FeCoNiCrAlY target material and preparation method thereof
Through pre-alloying, powder mixing and discharge plasma sintering processes, problems such as high energy consumption, difficult components to control and segregation in the preparation of FeCoNiCrAlY targets are solved, and target materials with high density, uniform element distribution and high pass rate are achieved, and the process is efficient and low energy consumption.
Patent Information
- Application Number
- CN202411905750.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-05-06
AI Technical Summary
The existing FeCoNiCrAlY target preparation process has problems such as high energy consumption, difficult components to control, and easy internal pores and looseness. The large difference in the density of the elemental powder leads to segregation during powder mixing. The alloying reaction exothermics during thermal isostatic pressure, which may lead to melting of the envelope and preparation failure.
FeCoNiCrAlY targets are prepared by pre-alloying, powder mixing and discharge plasma sintering. Prealloyed by impacting ball mill of zirconia balls, the particle size of the elemental powder is controlled and mixed in batches, and the discharge plasma sintering process is used to sinter it at low temperature to reduce the exothermic heat of the alloying reaction.
The high density of FeCoNiCrAlY targets, uniform element distribution and no segregation phenomenon are achieved, the product pass rate is high, the process flow is short, the production efficiency is high, and the energy consumption is low.
Smart Images
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Abstract
Description
Technical Field
[0001] The present application relates to the technical field of powder metallurgy materials, and in particular to a FeCoNiCrAlY target material and a preparation method thereof. Background Art
[0002] NiCrAlY coating has excellent performance and is mostly used for the protection of high-temperature corrosion devices in the fields of aerospace, shipbuilding, etc. Compared with NiCrAlY coating, FeCoNiCrAlY coating has a high entropy effect due to the addition of Fe and Co. The coating's resistance to high-temperature oxidation, wear resistance, and corrosion resistance are further improved, which significantly extends the service life of the base material. It is of great significance to improve the reliability of equipment and reduce maintenance costs, so it has a broader application prospect.
[0003] The target material is the sputtering source in the coating preparation process, and the performance of the target material directly affects the sputtering process and the quality of the coating. FeCoNiCrAlY alloy targets are usually prepared by vacuum melting casting or hot isostatic pressing. The vacuum melting process has high temperature and high energy consumption, and the alloy composition is difficult to control. After casting, defects such as pores and looseness are prone to appear inside the target material, so the target material yield is low. The hot isostatic pressing process puts metal powder into a sleeve and sintering the powder into shape under the action of high temperature and high pressure. Compared with the vacuum melting process, the preparation temperature is low and the alloy composition is easy to control. However, the FeCoNiCrAlY alloy powder needs to be prepared by atomization first, which complicates the process flow and increases the raw material cost. If single powder is used, due to the large difference in density of each single powder of Fe, Co, Ni, Cr, Al, and Y, it is easy to segregate during the powder mixing process, and Fe, Ni and Al will undergo alloying reaction during hot isostatic pressing, releasing a large amount of heat. In severe cases, the sleeve will melt, causing the target material preparation to fail. Summary of the invention
[0004] In order to solve the above technical problems, the present application provides a FeCoNiCrAlY target material and a preparation method thereof.
[0005] The present application provides a FeCoNiCrAlY target material, which is composed of the following components in mass percentage: Fe: 10-25%, Co: 10-25%, Cr: 10-25%, Al: 10-20%, Y: 0.2-1.5%, and Ni as the balance.
[0006] Preferably, the FeCoNiCrAlY target material is composed of the following components in mass percentage: Fe: 18-22%, Co: 15-25%, Cr: 15-25%, Al: 10-20%, Y: 0.5-1.2%, and Ni as the balance.
[0007] Preferably, the FeCoNiCrAlY target material is composed of the following components in mass percentage: Fe: 18-22%, Co: 12-18%, Cr: 15-25%, Al: 15-20%, Y: 0.5-1.2%, and Ni as the balance.
[0008] In a specific embodiment, the FeCoNiCrAlY target material is composed of the following components in percentage by mass: Fe: 20%, Co: 20%, Cr: 20%, Al: 15%, Y: 1%, and Ni as the balance.
[0009] In a specific embodiment, the FeCoNiCrAlY target material is composed of the following components in percentage by mass: Fe: 15%, Co: 15%, Cr: 20%, Al: 15%, Y: 1%, and Ni as the balance.
[0010] In a specific embodiment, the FeCoNiCrAlY target material is composed of the following components in percentage by mass: Fe: 20%, Co: 15%, Cr: 20%, Al: 20%, Y: 1%, and Ni as the balance.
[0011] In a second aspect, the present application provides a method for preparing the above-mentioned FeCoNiCrAlY target material, which specifically comprises the following steps in sequence: Pre-alloying: Fe powder, Ni powder, Al powder and zirconia balls are added into a three-dimensional mixer and mixed evenly, and Fe powder, Ni powder and Al powder are pre-alloyed by impact milling of zirconia balls; Powder mixing: Add Co powder, Cr powder and Y powder into a three-dimensional mixer and mix evenly, then add pre-alloyed FeNiAl powder and continue to mix evenly to obtain FeCoNiCrAlY alloy powder; Spark plasma sintering: FeCoNiCrAlY alloy powder is loaded into a graphite mold, vacuumed to less than 5Pa, the sintering temperature is first raised to 400-450°C for pre-sintering, and then the sintering temperature is raised to 850-1000°C, and a pressure of 27-34MPa is applied for spark plasma sintering; Machining: The sintered FeCoNiCrAlY alloy target blank is cooled to room temperature in the furnace, and after demoulding, the FeCoNiCrAlY alloy target with the required dimensions is obtained by machining.
[0012] Preferably, the raw materials used to prepare the FeCoNiCrAlY alloy target are Fe powder, Co powder, Ni powder, Cr powder, Al powder and Y powder; the purity of the Fe powder is ≥99.5wt%, and the particle size is 200-400 mesh; the purity of the Co powder is ≥99.9wt%, and the particle size is 325-500 mesh; the purity of the Ni powder is ≥99.8wt%, and the particle size is 250-500 mesh; the purity of the Cr powder is ≥99.8wt%, and the particle size is 200-400 mesh; the purity of the Al powder is ≥99.8wt%, and the particle size is 325-500 mesh; the purity of the Y powder is ≥99.8wt%, and the particle size is 250-500 mesh.
[0013] Preferably, in the pre-alloying step, the mass ratio of the ball to the material is (3-8):1.
[0014] If the ball-to-material mass ratio is too small or too large, the pre-alloying effect will be affected; if the mass ratio is too small, the pre-alloying effect will be poor; if the mass ratio is too large, there will be more balls and less materials, and the powder will not be easy to mix evenly, and the pre-alloying effect will also be poor. Therefore, the ball-to-material mass ratio selected in this application is (3-8):1 to achieve the best pre-alloying effect.
[0015] Preferably, the spark plasma sintering heating process parameters are: first raise the sintering temperature to 410-440°C for pre-sintering, keep warm for 15-30 minutes, then raise the sintering temperature to 880-1000°C, apply a pressure of 29-32MPa, perform spark plasma sintering, and keep warm and pressurized for 10-20 minutes.
[0016] Preferably, the spark plasma sintering heating process parameters are: first raise the sintering temperature to 420-430°C for pre-sintering, keep warm for 20-25 minutes, then raise the sintering temperature to 900-980°C, apply a pressure of 29-32 MPa, perform spark plasma sintering, and keep warm and pressurized for 13-18 minutes.
[0017] Preferably, the spark plasma sintering heating process parameters are: first, the sintering temperature is raised to 425°C for pre-sintering, and the heat preservation time is 22 minutes, and then the sintering temperature is raised to 940°C, and the pressure is applied to 32MPa for spark plasma sintering, and the heat preservation time is 15 minutes. Spark plasma sintering is an emerging powder metallurgy sintering technology. This process is to put metal powder into a mold made of graphite or other materials, apply pressure through the upper and lower punches, and pass pulse current between the powder particles to generate high-temperature plasma. The high-temperature plasma activates the surface of the powder particles, and the effective discharge between the particles generates local high temperature, which melts the surface of the particles and then sinters them into shape. Compared with vacuum melting casting or hot isostatic pressing, the spark plasma sintering process has the advantages of fast heating speed, low sintering temperature, high production efficiency, and simple operation.
[0018] In summary, the technical solution of this application has the following effects: The preparation method provided by the present application pre-alloys Fe powder, Ni powder and Al powder by impact ball milling with zirconia balls, and the alloy powder is pre-sintered at 400-450°C after being loaded into the mold, which greatly reduces the heat release of Fe, Ni and Al alloying reactions during spark plasma sintering, avoids the serious heat release of Fe, Ni and Al alloying reactions, generates more brittle alloy phases, and causes cracks on the surface of the blank after demolding. In addition, by controlling the particle size of the single powder, Fe powder, Ni powder and Al powder are mixed, Co powder, Cr powder and Y powder are mixed, and then FeNiAl powder and CoCrY powder are mixed, which avoids the occurrence of segregation after powder mixing due to the large density difference between the single powders.
[0019] The present application adopts a spark plasma sintering process to prepare a FeCoNiCrAlY alloy target material, which has a short process flow, high production efficiency, saves production costs, and has no high-temperature smelting process, low sintering temperature, and low energy consumption.
[0020] The FeCoNiCrAlY alloy target prepared in the present application has a relative density of more than 99%, a dense structure, no defects such as pores and looseness, uniform element distribution, no segregation phenomenon, and a high product qualification rate. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is the appearance of the FeCoNiCrAlY alloy target prepared in Example 1 of the present application.
[0022] Figure 2 This is the microstructure diagram of the FeCoNiCrAlY alloy target prepared in Example 1 of this application. DETAILED DESCRIPTION
[0023] The present application is further described in detail below in conjunction with examples, comparative examples and performance testing experiments. These examples should not be construed as limiting the scope of protection claimed in the present application. Example
[0024] Example 1 Example 1 provides a FeCoNiCrAlY target material and a preparation method thereof.
[0025] The mass percentage contents of the elements in the FeCoNiCrAlY alloy target prepared in this embodiment are: Fe: 20%, Co: 20%, Cr: 20%, Al: 15%, Y: 1%, and Ni is the balance.
[0026] The raw materials used for preparing the FeCoNiCrAlY alloy target are Fe powder, Co powder, Ni powder, Cr powder, Al powder and Y powder. The purity of the Fe powder is ≥99.5wt% and the particle size is 200-400 mesh; the purity of the Co powder is ≥99.9wt% and the particle size is 325-500 mesh; the purity of the Ni powder is ≥99.8wt% and the particle size is 250-500 mesh; the purity of the Cr powder is ≥99.8wt% and the particle size is 200-400 mesh; the purity of the Al powder is ≥99.8wt% and the particle size is 325-500 mesh; the purity of the Y powder is ≥99.8wt% and the particle size is 250-500 mesh.
[0027] The preparation method of FeCoNiCrAlY alloy target is specifically as follows: (1) Pre-alloying: Fe powder, Ni powder, Al powder and zirconia balls are added into a three-dimensional mixer and mixed evenly. Fe powder, Ni powder and Al powder are pre-alloyed by impact milling with zirconia balls. The ball-to-powder mass ratio (ball: powder) is 5:1. (2) Powder mixing: firstly, add Co powder, Cr powder and Y powder into a three-dimensional mixer and mix them evenly, then add pre-alloyed FeNiAl powder, and continue to mix evenly to obtain FeCoNiCrAlY alloy powder; (3) Spark plasma sintering: FeCoNiCrAlY alloy powder was loaded into a graphite mold and evacuated to less than 5 Pa. The sintering temperature was first raised to 425 °C for pre-sintering and the holding time was 22 min. Then the sintering temperature was raised to 940 °C and a pressure of 32 MPa was applied for spark plasma sintering and the holding time was 15 min. (4) Machining: The sintered FeCoNiCrAlY alloy target blank is cooled to room temperature in the furnace, and after demolding, the FeCoNiCrAlY alloy target with the required dimensions is obtained by machining.
[0028] The FeCoNiCrAlY alloy target prepared in this embodiment has a dense structure and a relative density of 99.68%. Figure 1 This is the appearance of the FeCoNiCrAlY alloy target prepared in Example 1. Figure 2 The microstructure diagram of the FeCoNiCrAlY alloy target prepared in Example 1 shows that the elements are evenly distributed without segregation.
[0029] Example 2 Example 2 provides a FeCoNiCrAlY target material and a preparation method thereof.
[0030] The mass percentage contents of the elements in the FeCoNiCrAlY alloy target prepared in this embodiment are: Fe: 15%, Co: 15%, Cr: 20%, Al: 15%, Y: 1%, and Ni is the balance.
[0031] The raw materials used for preparing the FeCoNiCrAlY alloy target are Fe powder, Co powder, Ni powder, Cr powder, Al powder and Y powder. The purity of the Fe powder is ≥99.5wt% and the particle size is 200-400 mesh; the purity of the Co powder is ≥99.9wt% and the particle size is 325-500 mesh; the purity of the Ni powder is ≥99.8wt% and the particle size is 250-500 mesh; the purity of the Cr powder is ≥99.8wt% and the particle size is 200-400 mesh; the purity of the Al powder is ≥99.8wt% and the particle size is 325-500 mesh; the purity of the Y powder is ≥99.8wt% and the particle size is 250-500 mesh.
[0032] The preparation method of FeCoNiCrAlY alloy target is specifically as follows: (1) Pre-alloying: Fe powder, Ni powder, Al powder and zirconia balls are added into a three-dimensional mixer and mixed evenly. Fe powder, Ni powder and Al powder are pre-alloyed by impact milling with zirconia balls. The ball-to-powder mass ratio (ball: powder) is 5:1. (2) Powder mixing: firstly, add Co powder, Cr powder and Y powder into a three-dimensional mixer and mix them evenly, then add pre-alloyed FeNiAl powder, and continue to mix evenly to obtain FeCoNiCrAlY alloy powder; (3) Spark plasma sintering: FeCoNiCrAlY alloy powder was loaded into a graphite mold and evacuated to less than 5 Pa. The sintering temperature was first raised to 420 °C for pre-sintering and the holding time was 20 min. Then the sintering temperature was raised to 920 °C and a pressure of 32 MPa was applied for spark plasma sintering and the holding time was 16 min. (4) Machining: The sintered FeCoNiCrAlY alloy target blank is cooled to room temperature in the furnace, and after demolding, the FeCoNiCrAlY alloy target with the required dimensions is obtained by machining.
[0033] The FeCoNiCrAlY alloy target material has a dense structure, a relative density of 99.39%, and uniform element distribution without segregation.
[0034] Example 3 Example 3 provides a FeCoNiCrAlY target material and a preparation method thereof.
[0035] The mass percentage contents of the elements in the FeCoNiCrAlY alloy target prepared in this embodiment are: Fe: 20%, Co: 15%, Cr: 20%, Al: 20%, Y: 1%, and Ni is the balance.
[0036] The raw materials used to prepare the FeCoNiCrAlY alloy target are Fe powder, Co powder, Ni powder, Cr powder, Al powder and Y powder. The purity of the Fe powder is ≥99.5wt% and the particle size is 200-400 mesh; the purity of the Co powder is ≥99.9wt% and the particle size is 325-500 mesh; the purity of the Ni powder is ≥99.8wt% and the particle size is 250-500 mesh; the purity of the Cr powder is ≥99.8wt% and the particle size is 200-400 mesh; the purity of the Al powder is ≥99.8wt% and the particle size is 325-500 mesh; the purity of the Y powder is ≥99.8wt% and the particle size is 250-500 mesh.
[0037] The preparation method of FeCoNiCrAlY alloy target is specifically as follows: (1) Pre-alloying: Fe powder, Ni powder, Al powder and zirconia balls are added into a three-dimensional mixer and mixed evenly. Fe powder, Ni powder and Al powder are pre-alloyed by impact milling with zirconia balls. The ball-to-powder mass ratio (ball: powder) is 5:1. (2) Powder mixing: firstly, add Co powder, Cr powder and Y powder into a three-dimensional mixer and mix them evenly, then add pre-alloyed FeNiAl powder, and continue to mix evenly to obtain FeCoNiCrAlY alloy powder; (3) Spark plasma sintering: FeCoNiCrAlY alloy powder was loaded into a graphite mold and evacuated to less than 5 Pa. The sintering temperature was first raised to 425 °C for pre-sintering and the holding time was 22 min. Then the sintering temperature was raised to 940 °C and a pressure of 32 MPa was applied for spark plasma sintering and the holding time was 15 min. (4) Machining: The sintered FeCoNiCrAlY alloy target blank is cooled to room temperature in the furnace, and after demolding, the FeCoNiCrAlY alloy target with the required dimensions is obtained by machining.
[0038] The FeCoNiCrAlY alloy target material has a dense structure, a relative density of 99.75%, and uniform element distribution without segregation.
[0039] Embodiment 4-9 Examples 4-9 respectively provide a FeCoNiCrAlY target material and a preparation method thereof.
[0040] The difference between the above embodiment and embodiment 1 is that the parameter conditions of spark plasma sintering are different, as shown in Table 1. The other process parameters of the above embodiment and embodiment 1 are the same.
[0041] Table 1 Parameters of spark plasma sintering in Examples 1, 4-9 and Comparative Examples 3-7 Comparative Example Comparative Example 1 This comparative example provides a FeCoNiCrAlY target material and a preparation method thereof.
[0042] The difference between this comparative example and Example 1 is that step (1) is omitted, Fe powder, Ni powder and Al powder are not pre-alloyed, Co powder, Cr powder and Y powder are added to a three-dimensional mixer and mixed evenly, then Fe powder, Ni powder and Al powder are added, and mixing is continued to obtain FeCoNiCrAlY alloy powder, and the remaining steps are the same as in Example 1.
[0043] When spark plasma sintering is performed in this comparative example, the alloying reaction of Fe, Ni and Al releases heat seriously, generates a lot of brittle alloy phases, and cracks appear on the surface of the blank after demolding.
[0044] Comparative Example 2 This comparative example provides a FeCoNiCrAlY target material and a preparation method thereof.
[0045] The difference between this comparative example and Example 1 is that step (2) is omitted. After the pre-alloyed FeNiAl powder is obtained, the Co powder, Cr powder and Y powder are not mixed first, but the pre-alloyed FeNiAl powder, Co powder, Cr powder and Y powder are directly added to the three-dimensional mixer for mixing. The remaining steps are the same as in Example 1.
[0046] In this comparative example, since the density difference between the powders is large, it is difficult to mix them evenly. After spark plasma sintering, the surface segregation of the FeCoNiCrAlY alloy target material is serious.
[0047] Comparative Examples 3-7 Comparative Examples 3-7 respectively provide a FeCoNiCrAlY target material and a preparation method thereof.
[0048] The difference between the comparative example and Example 1 is that the parameter conditions of spark plasma sintering are different, as shown in Table 2.
[0049] The remaining process parameters of the comparative example and embodiment 1 are the same.
[0050] The difference between Comparative Example 3 and Example 1 is that in step (3), the pre-sintering and heat preservation at 425°C is not performed, but the sintering temperature is directly raised to 940°C, and a pressure of 32 MPa is applied to perform spark plasma sintering, and the remaining steps are the same as those of Example 1. When spark plasma sintering is performed in this comparative example, the alloying reaction of Fe, Ni and Al is highly exothermic, and a large amount of brittle alloy phase is generated, and cracks are found on the surface of the blank after demolding.
[0051] The difference between Comparative Example 4 and Example 1 is that step (3) is pre-sintered and kept at 350°C, which is a relatively low temperature. During spark plasma sintering, the alloying reaction of Fe, Ni and Al still generates some brittle alloy phases, resulting in cracks on the surface of the blank after demolding.
[0052] The difference between Comparative Example 5 and Example 1 is that in step (3), pre-sintering and heat preservation are carried out at 500° C., which is a relatively high temperature, resulting in adhesion and agglomeration between the powders. After spark plasma sintering, the blank structure is not dense and has a low relative density.
[0053] The difference between Comparative Example 6 and Example 1 is that the spark plasma sintering temperature in step (3) is 800° C., and the other steps are the same as Example 1. Since the sintering temperature is too low, the FeCoNiCrAlY alloy target material blank has a non-dense structure and a relative density of 97.83%.
[0054] The difference between Comparative Example 7 and Example 1 is that the spark plasma sintering temperature in step (3) is 1050°C, and the other steps are the same as Example 1. Since the sintering temperature is too high, Fe, Ni and Al alloying reaction generates more brittle alloy phases, and cracks appear on the surface of the blank after demolding.
[0055] Performance testing (1) Relative density of FeCoNiCrAlY target: The measured density is measured by the Archimedean drainage method. The relative density is equal to the measured density divided by the theoretical density.
[0056] (2) Observation of crack and segregation performance.
[0057] Test results: as shown in Table 2.
[0058] Table 2 Performance test results of FeCoNiCrAlY target in examples and comparative examples Combined with the test results in Table 2, the present application prepares FeCoNiCrAlY target material through the preparation method of "pre-alloying + powder mixing + spark plasma sintering + machining", and obtains a target material with high density, uniform element distribution, no segregation phenomenon, and high product qualification rate.
[0059] Although the present invention has been described in detail above with general descriptions and specific embodiments, it is obvious to those skilled in the art that some modifications or improvements may be made thereto based on the present invention. Therefore, these modifications or improvements made without departing from the spirit of the present invention all fall within the scope of protection claimed by the present invention.
Claims
1. A FeCoNiCrAlY target material, characterized in that: The following components are contained in percentage by weight Composition: Fe: 10~25%, Co: 10~25%, Cr: 10~25%, Al: 10~20%, Y: 0.2~1.5%, Ni is the balance.
2. The FeCoNiCrAlY target according to claim 1, characterized in that: The following components are contained in percentage by weight Composition: Fe: 18~22%, Co: 15~25%, Cr: 15~25%, Al: 10~20%, Y: 0.5~1.2%, Ni is the balance.
3. The FeCoNiCrAlY target according to claim 1, characterized in that: The following components are contained in percentage by weight Composition: Fe: 18~22%, Co: 12~18%, Cr: 15~25%, Al: 15~20%, Y: 0.5~1.2%, Ni is the balance.
4. The method for preparing a FeCoNiCrAlY target material according to any one of claims 1 to 3, characterized in that: Specifically, the following steps are performed in sequence: Pre-alloying: Fe powder, Ni powder, Al powder and zirconia balls are added into a three-dimensional mixer and mixed evenly, and Fe powder, Ni powder and Al powder are pre-alloyed by impact milling of zirconia balls; Powder mixing: Add Co powder, Cr powder and Y powder into a three-dimensional mixer and mix evenly, then add pre-alloyed FeNiAl powder and continue to mix evenly to obtain FeCoNiCrAlY alloy powder; Spark plasma sintering: FeCoNiCrAlY alloy powder is loaded into a graphite mold, vacuumed to less than 5Pa, the sintering temperature is first raised to 400~450℃ for pre-sintering, and then the sintering temperature is raised to 850~1000℃, and a pressure of 27~34MPa is applied for spark plasma sintering; Machining: The sintered FeCoNiCrAlY alloy target blank is cooled to room temperature in the furnace, and after demolding, the FeCoNiCrAlY alloy target with the required dimensions is obtained by machining.
5. The method for preparing the FeCoNiCrAlY target according to claim 4, characterized in that: The raw materials used to prepare the FeCoNiCrAlY alloy target are Fe powder, Co powder, Ni powder, Cr powder, Al powder and Y powder; the purity of the Fe powder is ≥99.5wt%, and the particle size is 200-400 mesh; the purity of the Co powder is ≥99.9wt%, and the particle size is 325-500 mesh; the purity of the Ni powder is ≥99.8wt%, and the particle size is 250-500 mesh; the purity of the Cr powder is ≥99.8wt%, and the particle size is 200-400 mesh; the purity of the Al powder is ≥99.8wt%, and the particle size is 325-500 mesh; the purity of the Y powder is ≥99.8wt%, and the particle size is 250-500 mesh.
6. The method for preparing the FeCoNiCrAlY target material according to claim 4, characterized in that: In the pre-alloying step, the mass ratio of ball to material is (3~8):
1.
7. The method for preparing the FeCoNiCrAlY target according to claim 4, characterized in that: In the pre-alloying step, the mass ratio of ball to material is (4-7):
1.
8. The method for preparing the FeCoNiCrAlY target according to claim 4, characterized in that: The spark plasma sintering heating process parameters are: firstly, the sintering temperature is raised to 410-440°C for pre-sintering, and the heat preservation time is 15-30 minutes, and then the sintering temperature is raised to 880-1000°C, and a pressure of 29-32MPa is applied for spark plasma sintering, and the heat preservation and pressure holding time is 10-20 minutes.
9. The method for preparing the FeCoNiCrAlY target material according to claim 8, characterized in that: The spark plasma sintering heating process parameters are: firstly, the sintering temperature is raised to 420-430°C for pre-sintering, and the heat preservation time is 20-25 minutes, and then the sintering temperature is raised to 900-980°C, and a pressure of 29-32MPa is applied for spark plasma sintering, and the heat preservation and pressure holding time is 13-18 minutes.
10. The method for preparing the FeCoNiCrAlY target material according to claim 9, characterized in that: The spark plasma sintering temperature rising process parameters are: firstly, the sintering temperature is raised to 425°C for pre-sintering, and the heat preservation time is 22 minutes, and then the sintering temperature is raised to 940°C, and a pressure of 32MPa is applied for spark plasma sintering, and the heat preservation and pressure holding time is 15 minutes.