Standardized placing method for liquid outlet distance

Abstract

The invention discloses a standardized placement method for a liquid opening distance, which comprises the following steps: sequentially arranging a crucible, a guide cylinder and a furnace cover from bottom to top, and arranging a bracket around the crucible for fixing; two centrosymmetric laser emitting devices are additionally arranged at the furnace cover and are used for realizing accurate placement of the liquid opening distance in the furnace; laser of the laser emitting device is emitted to the lower edge of the guide cylinder, and the ideal liquid opening distance is accurately placed according to the ray distance and ray included angle conditions fed back by the laser emitting device. According to the liquid opening distance standardized placement method, the ideal liquid opening distance is achieved through limiting cooperation of the laser emitting devices and the crucible, the two laser emitting devices are additionally arranged on the furnace cover, and the laser ray horizontal included angle, the laser emitting distance and the distance between the lower edge opening of the guide cylinder and the liquid level in the crucible are set. The single crystal furnace can accurately place an ideal liquid opening distance according to the conditions of ray distance, ray included angle and the like fed back by the laser emitting device, and errors caused by manual placement are reduced.

Description

Technical Field

[0001] The invention relates to the technical field of single crystal silicon production and manufacturing, and in particular to a method for placing a liquid inlet distance in a standardized manner. Background Art

[0002] The standardized placement method of the liquid nozzle distance is a method for achieving accurate placement of the liquid nozzle distance in the furnace. When the current single crystal furnace table needs to place the liquid nozzle distance, it is adjusted by manually observing the distance between the bottom edge of the guide tube in the furnace and the liquid surface (the size of the crescent reflected by the guide tube) and cooperating with CCD image capture technology. With the continuous development of science and technology, people have higher and higher requirements for the manufacturing process of the standardized placement method of the liquid nozzle distance.

[0003] The existing standardized placement method for liquid nozzle distance has certain drawbacks when used. Affected by poor sight lines in the furnace, CCD capture clarity, and the inability to achieve complete uniformity in operating techniques, errors of varying degrees occur when placing the liquid nozzle distance, which has a certain adverse effect on people's use process. Therefore, we propose a standardized placement method for liquid nozzle distance. Summary of the invention

[0004] Technical problem to be solved: In view of the shortcomings of the prior art, the present invention provides a standardized placement method for liquid nozzle distance, which realizes the placement of ideal liquid nozzle distance through the cooperation of laser emitting device and crucible limiter, and adds two laser emitting devices at the furnace cover, and sets the horizontal angle of laser beam, laser emitting distance, and the distance between the lower edge of guide tube and the liquid surface in the crucible. In this way, the single crystal furnace can accurately place the ideal liquid nozzle distance through the beam distance, beam angle and other conditions fed back by the laser emitting device, thereby reducing the error caused by manual placement, and can effectively solve the problems in the background technology.

[0005] Technical solution: To achieve the above purpose, the technical solution adopted by the present invention is: a method for placing a liquid mouth distance in a standardized manner, comprising the following steps: S1: The crucible, the guide tube and the furnace cover are arranged in sequence from bottom to top, and brackets are arranged around the crucible for fixing; S2: Two centrally symmetrical laser emitting devices are added to the furnace cover to achieve accurate placement of the liquid inlet distance in the furnace; S3: The horizontal angles of the laser beams of the laser emitting devices are α and β, the distance between the two groups of laser emitting devices is L1, the laser emitting distances are L2 and L2', and the distance between the lower edge of the guide tube and the liquid surface in the crucible is L3; S4: The laser emitting devices are centrally symmetrical and on the same horizontal line, their spacing L1 is known, and their angles need to be precisely adjusted; S5: The laser of the laser emitting device hits the lower edge of the guide tube, and the ideal liquid inlet distance is accurately placed according to the ray distance and ray angle conditions fed back by the laser emitting device.

[0006] As a preferred technical solution of the present application, the two groups of laser emitting devices are installed on the same plane of the furnace cover and are centrally symmetrical, and the distance between the two groups of laser emitting devices is L1, and the distance L1 is known.

[0007] As a preferred technical solution of the present application, the laser emitted by the laser emitting device hits the lower edge of the guide tube, from which the angle α can be known, and L2 is L1*tanα.

[0008] As a preferred technical solution of the present application, the distance L3 between the lower edge of the guide tube and the liquid surface in the crucible is a known ideal liquid inlet distance, and the distance from the laser emitting device to the liquid surface is L2+L3, that is, L2'.

[0009] As a preferred technical solution of the present application, when the laser emission distance is L2+L3, it is known that L2'=L2+L3, then β=tanβ*180° / π.

[0010] As a preferred technical solution of the present application, after obtaining the theoretical optimal angle β, the emitting device is adjusted and the crucible is placed. When the crucible is placed to the laser intersection position above the liquid surface, it is the ideal liquid mouth distance.

[0011] As a preferred technical solution of the present application, in the steps S1-S5, two centrally symmetrical laser emitting devices are added to the furnace cover to achieve precise placement of the liquid inlet distance in the furnace.

[0012] As a preferred technical solution of the present application, a monitorable lifting mechanism with automatically controlled lifting is arranged between the guide tube and the bracket. While the two groups of laser emitting devices are measuring the distance, the monitorable lifting mechanism can fine-tune the distance between the lower edge of the guide tube and the liquid surface in the crucible until the optimal distance is reached.

[0013] Beneficial effects: Compared with the prior art, the present invention provides a method for placing a standardized liquid mouth distance, which has the following beneficial effects: the method for placing a standardized liquid mouth distance realizes the placement of an ideal liquid mouth distance through the cooperation of a laser emitting device and a crucible limiter, two laser emitting devices are added to the furnace cover, and the horizontal angle of the laser beam, the laser emitting distance, and the distance between the lower edge of the guide tube and the liquid surface in the crucible are set. In this way, the single crystal furnace can accurately place the ideal liquid mouth distance through the beam distance, beam angle and other conditions fed back by the laser emitting device, thereby reducing the error caused by manual placement, and the crucible, the guide tube and the furnace cover are arranged in sequence from bottom to top, and brackets are arranged around the crucible for fixing; an additional laser emitting device is added to the furnace cover. Two centrally symmetrical laser emitting devices are used to achieve accurate placement of the liquid mouth distance in the furnace; the horizontal angles of the laser rays of the laser emitting devices are α and β, the distance between the two groups of laser emitting devices is L1, the laser emitting distances are L2 and L2', and the distance between the lower edge of the guide tube and the liquid surface in the crucible is L3; the laser emitting devices are centrally symmetrical and on the same horizontal line, the spacing L1 between them is known, and their angles need to be accurately adjusted; the laser of the laser emitting device hits the lower edge of the guide tube, and the ideal liquid mouth distance is accurately placed through the ray distance and ray angle conditions fed back by the laser emitting device. The entire liquid mouth distance standardized placement method has a simple structure, is easy to operate, and has a better effect than the traditional method. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A schematic diagram of the preparation work for placing a liquid nozzle distance in a method for placing a liquid nozzle distance in accordance with the present invention.

[0015] Figure 2 It is a schematic diagram of standardized placement of liquid inlet distance in a standardized placement method of liquid inlet distance of the present invention. DETAILED DESCRIPTION

[0016] The technical scheme of the present invention will be clearly and completely described below in conjunction with the accompanying drawings and specific embodiments, but it will be understood by those skilled in the art that the following described embodiments are part of embodiments of the present invention, rather than all embodiments, and are only used to illustrate the present invention, and should not be considered as limiting the scope of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative work are within the scope of protection of the present invention. If specific conditions are not specified in the embodiments, they are carried out according to normal conditions or conditions recommended by the manufacturer. If the manufacturer is not specified in the reagents or instruments used, they are all conventional products that can be purchased commercially.

[0017] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0018] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0019] like Figure 1 , 2 As shown, a method for placing a liquid port distance in a standardized manner includes the following steps: S1: The crucible, the guide tube and the furnace cover are arranged in sequence from bottom to top, and brackets are arranged around the crucible for fixing; S2: Two centrally symmetrical laser emitting devices are added to the furnace cover to achieve accurate placement of the liquid inlet distance in the furnace; S3: The horizontal angles of the laser beams of the laser emitting devices are α and β, the distance between the two groups of laser emitting devices is L1, the laser emitting distances are L2 and L2', and the distance between the lower edge of the guide tube and the liquid surface in the crucible is L3; S4: The laser emitting devices are centrally symmetrical and on the same horizontal line, their spacing L1 is known, and their angles need to be precisely adjusted; S5: The laser of the laser emitting device hits the lower edge of the guide tube, and the ideal liquid inlet distance is accurately placed according to the ray distance and ray angle conditions fed back by the laser emitting device.

[0020] The ideal liquid mouth distance can be placed by cooperating with the laser emitting device and the crucible limiter. Two laser emitting devices are added to the furnace cover to set the horizontal angle of the laser beam, the laser emitting distance, and the distance between the lower edge of the guide tube and the liquid surface in the crucible. In this way, the single crystal furnace can accurately place the ideal liquid mouth distance through the beam distance, beam angle and other conditions fed back by the laser emitting device, thereby reducing the error caused by manual placement.

[0021] Furthermore, the two groups of laser emitting devices are installed on the same plane of the furnace cover and are centrally symmetrical, and the distance between the two groups of laser emitting devices is L1, and the distance L1 is known.

[0022] Furthermore, the laser emitted by the laser emitting device hits the lower edge of the guide tube, from which the angle α can be known, and L2 is L1*tanα.

[0023] Furthermore, the distance L3 between the lower edge of the guide tube and the liquid surface in the crucible is a known ideal liquid inlet distance, and the distance from the laser emitting device to the liquid surface is L2+L3, that is, L2'.

[0024] Furthermore, when the laser emission distance is L2+L3, it is known that L2'=L2+L3, then β=tanβ*180° / π.

[0025] Furthermore, after obtaining the theoretical optimal angle β, the launch device is adjusted and the crucible is placed. When the crucible is placed to the laser intersection position above the liquid surface, it is the ideal liquid mouth distance.

[0026] Furthermore, in steps S1-S5, two centrally symmetrical laser emitting devices are added to the furnace cover to achieve precise placement of the liquid inlet distance in the furnace.

[0027] Furthermore, a monitorable lifting mechanism with automatic controlled lifting is arranged between the guide tube and the bracket. While the two groups of laser emitting devices are measuring the distance, the monitorable lifting mechanism can fine-tune the distance between the lower edge of the guide tube and the liquid surface in the crucible until the optimal distance is reached.

[0028] This application requires the addition of two laser emission devices on the furnace cover: 1. The laser emitting devices are centrally symmetrical and on the same horizontal line, their spacing L1 is known, and their angles need to be precisely adjusted; 2. As attached Figure 1 As shown, the laser hits the lower edge of the guide tube, from which we can know the angle α, and L2 is L1*tanα; 3. As attached Figure 1 As shown, if the ideal liquid inlet distance L3 is known, the distance from the launch device to the liquid surface is L2+L3; 4. As attached Figure 2 As shown, it is known that L2'=L2+L3, then β=tanβ*180° / π; 5. As attached Figure 2 As shown, after obtaining the theoretical optimal angle β, adjust the launch device and place the crucible. When the crucible is placed to the laser intersection position above the liquid surface, it is the ideal liquid mouth distance.

[0029] Working principle: The ideal liquid mouth distance is placed through the cooperation of the laser emitting device and the crucible limiter. Two laser emitting devices are added to the furnace cover to set the horizontal angle of the laser beam, the laser emitting distance, and the distance between the lower edge of the guide tube and the liquid surface in the crucible. In this way, the single crystal furnace can accurately place the ideal liquid mouth distance through the beam distance, beam angle and other conditions fed back by the laser emitting device, reducing the error caused by manual placement.

[0030] A crucible, a guide tube and a furnace cover are arranged in sequence from bottom to top, and brackets are arranged around the crucible for fixing; two centrally symmetrical laser emitting devices are added to the furnace cover to realize the precise placement of the liquid mouth distance in the furnace; the horizontal angles of the laser rays of the laser emitting devices are α and β, the distance between the two groups of laser emitting devices is L1, the laser emitting distances are L2 and L2', and the distance between the lower edge of the guide tube and the liquid surface in the crucible is L3; the laser emitting devices are centrally symmetrical and on the same horizontal line, and their spacing L1 is known, and their angles need to be precisely adjusted; the laser of the laser emitting device hits the lower edge of the guide tube, and the ideal liquid mouth distance is accurately placed according to the ray distance and ray angle conditions fed back by the laser emitting device.

[0031] It should be noted that, in this article, relational terms such as first and second (number one, number two), etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0032] The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A method for standardizing the placement of liquid inlet distances, characterized in that: The steps include: S1: The crucible, the guide tube and the furnace cover are arranged in sequence from bottom to top, and brackets are arranged around the crucible for fixing; S2: Two centrally symmetrical laser emitting devices are added to the furnace cover to achieve accurate placement of the liquid inlet distance in the furnace; S3: The horizontal angles of the laser beams of the laser emitting devices are α and β, the distance between the two groups of laser emitting devices is L1, the laser emitting distances are L2 and L2', and the distance between the lower edge of the guide tube and the liquid surface in the crucible is L3; S4: The laser emitting devices are centrally symmetrical and on the same horizontal line, their spacing L1 is known, and their angles need to be precisely adjusted; S5: The laser of the laser emitting device hits the lower edge of the guide tube, and the ideal liquid inlet distance is accurately placed according to the ray distance and ray angle conditions fed back by the laser emitting device.

2. A method for standardizing the placement of liquid inlet distances according to claim 1, characterized in that: The two groups of laser emitting devices are installed on the same plane of the furnace cover and are centrally symmetrical. The distance between the two groups of laser emitting devices is L1, and the distance L1 is known.

3. A method for standardizing the placement of liquid inlet distances according to claim 1, characterized in that: The laser emitted by the laser emitting device hits the lower edge of the guide tube, from which the angle α can be known, and L2 is L1*tanα.

4. A method for standardizing the placement of liquid nozzle distances according to claim 1, characterized in that: The distance L3 between the lower edge of the guide tube and the liquid surface in the crucible is a known ideal liquid outlet distance, and the distance from the laser emitting device to the liquid surface is L2+L3, that is, L2'.

5. A method for standardizing the placement of liquid inlet distances according to claim 1, characterized in that: When the laser emission distance is L2+L3, it is known that L2'=L2+L3, then β=tanβ*180° / π.

6. A method for standardizing the placement of liquid nozzle distances according to claim 1, characterized in that: After obtaining the theoretical optimal angle β, adjust the launch device and place the crucible. When the crucible is placed to the laser intersection position above the liquid surface, it is the ideal liquid mouth distance.

7. A method for standardizing the placement of liquid nozzle distances according to claim 1, characterized in that: In the steps S1-S5, two centrally symmetrical laser emitting devices are added to the furnace cover to achieve accurate placement of the liquid inlet distance in the furnace.

8. A method for standardizing the placement of liquid inlet distances according to claim 1, characterized in that: A monitorable lifting mechanism with automatic control of lifting is arranged between the guide tube and the bracket. While the two groups of laser emitting devices are measuring distance, the monitorable lifting mechanism can fine-tune the distance between the lower edge of the guide tube and the liquid surface in the crucible until the optimal distance is reached.

Images