Detection device for detecting deformation of quartz boat

Abstract

The invention relates to the technical field of quartz boat detection, and discloses a detection device for detecting deformation of a quartz boat, which comprises a main body, the bottom of the main body is fixedly connected with a motor, the output end of the motor penetrates to the inner wall of the bottom of the main body and extends into the main body, and the outer surface of the output end of the motor is sleeved with a belt. The inner wall of the bottom of the body is fixedly connected with a fixing ring and a two-way threaded rod. The direction and the position of reflected light are changed in real time according to the deformation condition, the surface illumination requirement of the quartz boat can be more flexibly met, compared with traditional fixed light source arrangement, the dynamic illumination adjusting mode can better track the shadow area on the surface of the quartz boat, illumination uniformity is continuously improved, and the illumination effect is improved. And misjudgment caused by illumination shadow is reduced, so that the accuracy of deformation detection is improved.

Description

Technical Field

[0001] The invention relates to the technical field of quartz boat detection, in particular to a detection device for detecting deformation of a quartz boat. Background Art

[0002] As an important carrying tool, quartz boats are widely used in high-tech industries such as semiconductors and photovoltaics. In the semiconductor manufacturing process, quartz boats are used to carry materials such as silicon wafers and play a key role in process links such as high-temperature diffusion and chemical vapor deposition; Generally, when detecting whether a quartz boat is deformed, a light source is irradiated to the quartz boat, and then the surface of the quartz boat is photographed and detected through a camera sensor. Since traditional devices basically use a fixed light source arrangement when irradiating the quartz boat with a light source, and since there are many uneven grooves and corners on the surface of the quartz boat, it is easy to cause the light source to be difficult to distribute evenly on its surface during irradiation, which can easily lead to shadows during shooting and detection and cause misjudgment during detection, thereby affecting the accuracy of detection. Summary of the invention

[0003] The object of the present invention is to provide a detection device for detecting deformation of a quartz boat, so as to solve the problems raised in the above background technology.

[0004] In order to solve the above technical problems, the present invention is achieved through the following technical solutions: The present invention is a detection device for detecting the deformation of a quartz boat, comprising a main body, a motor is fixedly connected to the bottom of the main body, an output end of the motor penetrates the bottom inner wall of the main body and extends to the inside, a belt is sleeved and connected to the outer surface of the motor output end, a fixing ring is fixedly connected to the bottom inner wall of the main body, a bidirectional threaded rod is fixedly connected to the bottom inner wall of the main body, the top of the bidirectional threaded rod is open, a lifting rod is slidably connected to the opening of the bidirectional threaded rod, a reset spring is fixedly connected to the bottom of the lifting rod, one end of the reset spring close to the bidirectional threaded rod is fixedly connected to the bottom inner wall of the opening of the bidirectional threaded rod, an annular sawtooth groove is provided on the outer surface of the lifting rod, and further comprising; The detection mechanism includes an electric lifting plate fixedly connected to the inner wall of the bottom of the main body, a side wall of the electric lifting plate is slidably connected to a ring light, a top of the ring light is fixedly connected to a camera sensor, and a top of the camera sensor is fixedly connected to a detection sensor; The lifting mechanism includes a chassis rotatably connected to the inside of a fixed ring, the bottom of the chassis is transmission-connected to the output end of the motor through a belt, a plurality of telescopic rods are fixedly connected to the top of the chassis, a C-shaped plate is fixedly connected to one end of the telescopic rod away from the chassis, a hollow cylinder is provided on the side of the C-shaped plate away from the telescopic rod, and a C-shaped ring is fixedly connected to the outer surface of the hollow cylinder.

[0005] Furthermore, the bottom of the C-shaped ring is fixedly connected to a plurality of C-shaped plates, annular grooves are provided at the top and bottom of the C-shaped ring, a plurality of rectangular grooves are provided on the outer surface of the hollow tube, the inside of the C-shaped ring is rotatably connected to a gear ring, the top of the gear ring is fixedly connected to a telescopic frame, the inner wall of the telescopic frame is fixedly connected to an insertion rod, the inner wall of the hollow tube is fixedly connected to a short rod, and the end of the short rod away from the hollow tube is slidably connected to the bidirectional threaded groove on the outer surface of the bidirectional threaded rod.

[0006] Furthermore, a shaking mechanism is provided inside the main body, and the shaking mechanism includes a fixed ring 2 which is slidably connected to the outer surface of the hollow cylinder, a plurality of intermediate rods are rotatably connected to the outer surface of the fixed ring 2, an end of the plurality of intermediate rods away from the fixed ring 2 is rotatably connected to a telescopic ring, an elastic bag is fixedly connected to the top of the telescopic ring, the top of the elastic bag is fixedly connected to the outer surface of the fixed ring 2, a plurality of connecting belts are fixedly connected to the inner wall of the telescopic ring, an end of the connecting belt away from the telescopic ring penetrates to the inner wall of the C-shaped ring and is rotatably connected to the gear ring, and a plurality of reflective plates are fixedly connected to the outer surface of the elastic bag.

[0007] Furthermore, an auxiliary mechanism is provided at the top of the C-shaped ring, and the auxiliary mechanism includes several fixed cylinders fixedly connected to the top of the gear ring, the side wall of the fixed cylinder is open, a T-shaped rod is slidably connected to the inside of the fixed cylinder, the bottom of the T-shaped rod is fixedly connected to a reset spring 2, the bottom of the reset spring 2 is fixedly connected to the bottom inner wall of the fixed cylinder, the tops of several T-shaped rods are fixedly connected to the bottom of the fixed ring 2, the top of the C-shaped ring is fixedly connected to a fixed sleeve, the outer surface of the fixed sleeve is provided with an annular wavy groove, the side of the T-shaped rod close to the lifting rod penetrates into the rectangular groove on the hollow cylinder and is slidably connected to the inside of the annular serrated groove.

[0008] Furthermore, a vibration mechanism is provided inside the elastic bag, and the vibration mechanism includes a rotating ring rotatably connected to the top of the telescopic frame, a plurality of push rods are rotatably connected to the top of the rotating ring, an end of the push rod away from the rotating ring is rotatably connected to the rotating frame, an end of the rotating frame close to the hollow cylinder is rotatably connected to the outer surface of the hollow cylinder, an auxiliary rod is rotatably connected to the middle of the rotating frame, an end of the auxiliary rod away from the rotating frame is rotatably connected to an elastic plate, and the elastic plate is slidably connected to the inner wall of the elastic bag; Wherein, the insertion rod on the inner wall of the telescopic frame is slidably connected to the inside of the annular wave groove.

[0009] Furthermore, an extrusion mechanism is provided inside the main body, and the extrusion mechanism includes a fixed plate fixedly connected to the bottom of the gear ring, an annular protrusion groove is provided at the bottom of the fixed plate, a protrusion plate is slidably connected inside the annular protrusion groove, an end of the protrusion plate away from the annular protrusion groove is fixedly connected to a hollow shaft, straight grooves are provided at the top and bottom of the hollow shaft, a hollow cylinder 2 is slidably connected to the outer surface of the hollow shaft, the outer surface of the hollow cylinder 2 is fixedly connected to the bottom outer wall of the C-shaped ring, an end of the hollow cylinder 2 away from the lifting rod is fixedly connected to a piston rod, the outer surface of the piston rod is slidably connected to an adsorption frame, the side wall of the adsorption frame is fixedly connected to the outer surface of the telescopic ring, a plurality of adsorption ports are provided on the side wall of the adsorption frame, and a conical plate is fixedly connected to the inside of the adsorption frame.

[0010] Furthermore, a cleaning mechanism is provided inside the hollow shaft, and the cleaning mechanism includes a movable plate rotatably connected to the inner wall of the hollow shaft on one side close to the raised plate, and a crank rod is rotatably connected to the end of the fixed plate away from the raised plate, the bottom of the crank rod passes through the outside of the straight groove and is rotatably connected to the inner wall of the hollow cylinder 2, the top of the crank rod passes through the outer wall of the hollow cylinder 2 and extends to the outside, and the extended end of the crank rod is fixedly connected to a fan.

[0011] Furthermore, the bottom of the fan is rotatably connected to the outer surface of the C-shaped ring, the outer surface of the fan is sleeved with an air inlet pipe, the bottom of the air inlet pipe is fixedly connected to the top outer wall of the C-shaped ring, several ends of the air inlet pipes away from the fans are fixedly connected to jet rings, the jet rings are fixedly connected to the inner wall of the elastic bag, and several air outlet holes are opened on the outer surface of the jet ring, and the air outlet holes penetrate to the outer wall of the elastic bag at one end away from the jet ring.

[0012] The present invention has the following beneficial effects: When the C-shaped ring and the hollow cylinder rotate, the short rod on the inner wall of the hollow cylinder will slide up and down along the bidirectional threaded groove on the outer surface of the bidirectional threaded rod while rotating. When the hollow cylinder rotates and slides downward, the sliding of the hollow cylinder will drive the lifting rod to move downward synchronously. When the hollow cylinder rotates and slides on the surface of the hollow cylinder, the rotation of the C-shaped ring and the hollow cylinder will drive the fixed cylinder and the T-shaped rod to rotate synchronously. When the T-shaped rod rotates, the rotation of the T-shaped rod will slide downward in the annular serrated groove on the lifting rod. Then, when the T-shaped rod slides to the straight path of the annular serrated groove, the T-shaped rod will be rebounded upward by the reset spring at the bottom to reset. In this way, the T-shaped rod can slide back and forth up and down as the C-shaped ring and the hollow cylinder rotate. When the T-shaped rod slides up and down, the up and down sliding of the T-shaped rod will drive the fixed cylinder to move downward synchronously. The second ring slides up and down synchronously. When the second fixed ring slides up and down, the sliding of the second fixed ring drives the telescopic ring to reciprocate through the middle rod to contract and expand. When the second fixed ring moves down and pushes the telescopic ring to expand through the middle rod, the downward movement of the second fixed ring and the expansion of the telescopic ring can cause the elastic bag to drive the reflector to deflect. At this time, the reflector on the elastic bag will deflect repeatedly with the expansion and contraction of the telescopic ring. When the light source of the ring light shines on the reflector, the reflected light can reflect the light source to the surface of the quartz boat to supplement the area on the surface of the quartz boat where the shadow is generated due to irregular shape or concave and convex, and change the direction and position of the reflected light in real time according to its deformation, which can more flexibly adapt to the lighting needs of the quartz boat surface. Compared with the traditional fixed light source arrangement, this dynamic lighting adjustment method can better track the shadow area on the surface of the quartz boat, continuously improve the uniformity of lighting, reduce the misjudgment caused by light shadow, and thus improve the accuracy of deformation detection.

[0013] 2. In the present invention, when the telescopic ring is reciprocatingly contracting and expanding, the contraction and expansion of the connecting belt will drive the connecting belt to slide reciprocatingly inside and outside the C-shaped ring. When the connecting belt slides forward, the sliding of the connecting belt will drive the gear ring to rotate synchronously. When the gear ring rotates, the rotation of the gear ring will drive the telescopic frame to rotate synchronously. When the telescopic frame rotates, the rotation of the telescopic frame will slide up and down inside the annular wave groove on the outer surface of the fixed sleeve through the insertion rod on the inner wall. When the telescopic frame slides up and down, the sliding of the telescopic frame will drive the rotating ring to move up and down synchronously. When the rotating ring moves up and down, the movement of the rotating ring will push the rotating frame to rotate reciprocatingly up and down through the pushing rod. When the rotating frame rotates reciprocatingly, the rotation of the rotating frame will be driven by the auxiliary rod The top of the elastic plate makes the elastic plate shake on the inner wall of the elastic bag. When the elastic plate shakes, the shaking of the elastic plate will slap the inner wall of the elastic bag. When the shaking of the elastic plate slaps the inner wall of the elastic bag, the vibration generated by the slapping of the elastic bag can make the dust particles attached to the surface of the reflector vibrate and relax. When the dust particles are vibrated, some dust particles can relax and fall off from the surface of the reflector, which can reduce the accumulation of dust on the surface of the reflector to a certain extent. When the dust on the surface of the reflector is reduced, the refraction and diffusion of light caused by dust particles can be effectively reduced, so that the propagation path of the reflected light is more regular and reflected to the surface of the quartz boat, thereby reducing the possibility of mutual interference between light and improving the accuracy of detection.

[0014] 3. According to the present invention, when the telescopic ring reciprocates and expands, the expansion and contraction of the telescopic ring will drive the connecting belt to slide reciprocally. When the connecting belt slides reciprocally, the reciprocating sliding of the connecting belt will drive the gear ring to rotate back and forth. When the gear ring rotates reciprocally, the rotation of the gear ring will synchronize with the rotation of the fixed disk. When the fixed disk rotates, the raised plate will drive the hollow shaft to slide back and forth and reciprocatingly inside the hollow cylinder 2 through the annular raised groove at the bottom. When the hollow shaft slides in the direction of the fixed disk, the sliding of the hollow shaft will slide inside the adsorption frame through the piston rod. When the piston rod slides inside the adsorption frame, negative pressure will be generated inside the adsorption frame. At this time, the formation of negative pressure will adsorb the dust shaken off by vibration on the elastic bag into the adsorption frame through the adsorption holes on the adsorption frame. Since the adsorption frame is fixedly connected with a conical plate inside, when the piston rod is reset, part of the dust backflow can be reduced. When the hollow shaft slides back and forth, the sliding of the hollow shaft will drive the crank rod to rotate similar to the crank motion through the movable plate. When the crank rod rotates, the rotation of the crank rod will drive the fan to rotate inside the intake pipe. When the fan rotates, a certain amount of blowing will be generated inside the intake pipe, and the gas will be blown into the jet ring through the intake pipe. When the gas enters the inside of the jet ring, the gas will be blown toward the surface of the elastic bag through the air outlet under the entry of the gas. When the gas blows to the surface of the elastic bag, the dust on the photovoltaic panel on the elastic bag can be further cleaned. At this time, when the sliding dust is adsorbed by the negative pressure inside the adsorption frame, the flying of dust particles in the process of falling off from the surface of the reflector is reduced, and the flying of dust on the camera sensor and the detection sensor is reduced, which affects the visual detection effect and improves the detection accuracy of the camera sensor and the detection sensor.

[0015] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the overall partial cross-sectional structure of the present invention; Figure 3 It is a schematic diagram of the main body of the present invention; Figure 4 It is a bottom view structural diagram of the lifting mechanism of the present invention; Figure 5 It is an exploded diagram of the shaking mechanism of the present invention; Figure 6 It is a schematic diagram of the auxiliary mechanism of the present invention; Figure 7 It is a schematic diagram of the vibration mechanism of the present invention; Figure 8 It is a bottom view structural diagram of the vibration mechanism of the present invention; Fig. 9 For the present invention Figure 8 Enlarged view of point A in the middle; Fig.10 It is a schematic diagram of the cleaning mechanism structure of the present invention.

[0018] In the accompanying drawings, the components represented by the reference numerals are listed as follows: In the figure: 1. Main body; 101. Motor; 102. Fixing ring; 103. Bidirectional threaded rod; 104. Lifting rod; 2. Detection mechanism; 201. Electric lifting plate; 202. Ring light; 203. Camera sensor; 204. Detection sensor; 3. Lifting mechanism; 301. Chassis; 302. Telescopic rod; 303. C-shaped ring; 304. Hollow cylinder; 305. Gear ring; 306. Telescopic frame; 4. Shaking mechanism; 401. Fixing ring 2; 402. Middle rod; 403. Telescopic ring; 404. Connecting belt; 405, elastic bag; 5, auxiliary mechanism; 501, fixed cylinder; 502, T-shaped rod; 503, fixed sleeve; 6, vibration mechanism; 601, rotating ring; 602, pushing rod; 603, rotating frame; 604, auxiliary rod; 605, elastic plate; 7, extrusion mechanism; 701, fixed disk; 702, hollow cylinder II; 703, adsorption frame; 704, raised plate; 705, hollow shaft; 8, cleaning mechanism; 801, movable plate; 802, crank rod; 803, fan; 804, jet ring. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] See also Figure 1-Figure 10As shown, the present invention is a detection device for detecting the deformation of a quartz boat, comprising a main body 1, a motor 101 is fixedly connected to the bottom of the main body 1, the output end of the motor 101 penetrates the bottom inner wall of the main body 1 and extends to the inside, a belt is sleeved and connected to the outer surface of the output end of the motor 101, a fixing ring 102 is fixedly connected to the bottom inner wall of the main body 1, a bidirectional threaded rod 103 is fixedly connected to the bottom inner wall of the main body 1, the top of the bidirectional threaded rod 103 is open, a lifting rod 104 is slidably connected to the opening of the bidirectional threaded rod 103, a reset spring is fixedly connected to the bottom of the lifting rod 104, one end of the reset spring close to the bidirectional threaded rod 103 is fixedly connected to the bottom inner wall of the opening of the bidirectional threaded rod 103, an annular sawtooth groove is provided on the outer surface of the lifting rod 104, and further comprising; The detection mechanism 2 includes an electric lifting plate 201 fixedly connected to the inner wall of the bottom of the main body 1, a ring light 202 is slidably connected to the side wall of the electric lifting plate 201, a camera sensor 203 is fixedly connected to the top of the ring light 202, and a detection sensor 204 is fixedly connected to the top of the camera sensor 203; The lifting mechanism 3 includes a chassis 301 rotatably connected to the inside of the fixed ring 102, the bottom of the chassis 301 is transmission-connected to the output end of the motor 101 through a belt, and a plurality of telescopic rods 302 are fixedly connected to the top of the chassis 301, and one end of the telescopic rod 302 away from the chassis 301 is fixedly connected to a C-shaped plate, and a hollow cylinder 304 is provided on the side of the C-shaped plate away from the telescopic rod 302, and a C-shaped ring 303 is fixedly connected to the outer surface of the hollow cylinder 304. When the motor 101 drives the chassis 301 to rotate through the belt, the rotation of the chassis 301 will drive the C-shaped ring 303 and the hollow cylinder 304 to rotate through the telescopic rod 302, and when the hollow cylinder 304 rotates, the short rod on the inner wall of the hollow cylinder 304 will slide up and down along the bidirectional threaded groove on the outer surface of the bidirectional threaded rod 103 while rotating.

[0021] The bottom of the C-shaped ring 303 is fixedly connected to a plurality of C-shaped plates, annular grooves are provided at the top and bottom of the C-shaped ring 303, a plurality of rectangular grooves are provided on the outer surface of the hollow cylinder 304, the inside of the C-shaped ring 303 is rotatably connected to a gear ring 305, the top of the gear ring 305 is fixedly connected to a telescopic frame 306, the inner wall of the telescopic frame 306 is fixedly connected to a plug rod, the inner wall of the hollow cylinder 304 is fixedly connected to a short rod, the end of the short rod away from the hollow cylinder 304 is slidably connected to the bidirectional threaded groove on the outer surface of the bidirectional threaded rod 103, when the hollow cylinder 304 rotates and slides downward, the sliding of the hollow cylinder 304 will drive the lifting rod 104 to move downward synchronously.

[0022] The main body 1 is provided with a shaking mechanism 4 inside, and the shaking mechanism 4 includes a second fixing ring 401 slidably connected to the outer surface of the hollow cylinder 304, the outer surface of the second fixing ring 401 is rotatably connected to a plurality of intermediate rods 402, and one end of the plurality of intermediate rods 402 away from the second fixing ring 401 is rotatably connected to a telescopic ring 403, and the top of the telescopic ring 403 is fixedly connected to an elastic bag 405, and the top of the elastic bag 405 is fixedly connected to the outer surface of the second fixing ring 401, and the inner wall of the telescopic ring 403 is fixedly connected to a plurality of connecting belts 404, and the connecting belts The end of 404 away from the telescopic ring 403 penetrates the inner wall of the C-shaped ring 303 and is rotatably connected to the gear ring 305. A plurality of reflectors are fixedly connected to the outer surface of the elastic bag 405. The up and down sliding of the T-shaped rod 502 will drive the fixed ring 2 401 to slide back and forth synchronously. When the fixed ring 2 401 slides up and down, the sliding of the fixed ring 2 401 will drive the telescopic ring 403 to reciprocate through the middle rod 402. When the fixed ring 2 401 moves downward and pushes the telescopic ring 403 to expand through the middle rod 402.

[0023] The top of the C-shaped ring 303 is provided with an auxiliary mechanism 5, which includes a plurality of fixed cylinders 501 fixedly connected to the top of the gear ring 305, the side wall of the fixed cylinder 501 is open, the inside of the fixed cylinder 501 is slidably connected with a T-shaped rod 502, the bottom of the T-shaped rod 502 is fixedly connected with a reset spring 2, the bottom of the reset spring 2 is fixedly connected to the bottom inner wall of the fixed cylinder 501, the tops of the plurality of T-shaped rods 502 are fixedly connected to the bottom of the fixed ring 2 401, and the top of the C-shaped ring 303 is fixed. A fixing sleeve 503 is connected, and an annular wavy groove is provided on the outer surface of the fixing sleeve 503. The side of the T-shaped rod 502 close to the lifting rod 104 penetrates into the rectangular groove on the hollow cylinder 304 and is slidably connected to the inside of the annular serrated groove. When the T-shaped rod 502 rotates, the rotation of the T-shaped rod 502 will slide downward in the annular serrated groove on the lifting rod 104. Then, when the T-shaped rod 502 slides to the straight path of the annular serrated groove, the T-shaped rod 502 will be reset by the reset spring 2 at the bottom and bounce upward.

[0024] A vibration mechanism 6 is provided inside the elastic bag 405. The vibration mechanism 6 includes a rotating ring 601 rotatably connected to the top of the telescopic frame 306. A plurality of push rods 602 are rotatably connected to the top of the rotating ring 601. The end of the push rod 602 away from the rotating ring 601 is rotatably connected to a rotating frame 603. The end of the rotating frame 603 close to the hollow cylinder 304 is rotatably connected to the outer surface of the hollow cylinder 304. The middle part of the rotating frame 603 is rotatably connected to an auxiliary rod 604. The end of the auxiliary rod 604 away from the rotating frame 603 is rotatably connected to an elastic plate 605. The elastic plate 605 is slidably connected to the inner wall of the elastic bag 405. Among them, the insertion rod on the inner wall of the telescopic frame 306 is slidably connected to the inside of the annular wave groove. When the telescopic frame 306 slides up and down, the sliding of the telescopic frame 306 will drive the rotating ring 601 to move up and down synchronously. When the rotating ring 601 moves up and down, the movement of the rotating ring 601 will push the rotating frame 603 to rotate up and down through the pushing rod 602.

[0025] The main body 1 is provided with an extrusion mechanism 7, which includes a fixed plate 701 fixedly connected to the bottom of the gear ring 305, an annular raised groove is provided at the bottom of the fixed plate 701, a raised plate 704 is slidably connected to the inside of the annular raised groove, a hollow shaft 705 is fixedly connected to the end of the raised plate 704 away from the annular raised groove, straight grooves are provided at the top and bottom of the hollow shaft 705, a hollow cylinder 702 is slidably connected to the outer surface of the hollow shaft 705, the outer surface of the hollow cylinder 702 is fixedly connected to the outer wall of the bottom of the C-shaped ring 303, the end of the hollow cylinder 702 away from the lifting rod 104 is fixedly connected to the piston rod, and the outer surface of the piston rod is slidably connected to the suction Attached frame 703, the side wall of the adsorption frame 703 is fixedly connected to the outer surface of the telescopic ring 403, the side wall of the adsorption frame 703 is provided with a plurality of adsorption ports, and a conical plate is fixedly connected inside the adsorption frame 703. When the gear ring 305 rotates back and forth, the rotation of the gear ring 305 will synchronize with the rotation of the fixed disk 701. When the fixed disk 701 rotates, the raised plate 704 will drive the hollow shaft 705 to slide back and forth and back and forth inside the hollow cylinder 702 through the annular raised groove at the bottom. When the hollow shaft 705 slides toward the direction of the fixed disk 701, the sliding of the hollow shaft 705 will slide inside the adsorption frame 703 through the piston rod.

[0026] A cleaning mechanism 8 is provided inside the hollow shaft 705, and the cleaning mechanism 8 includes a movable plate 801 rotatably connected to the inner wall of the hollow shaft 705 on one side close to the raised plate 704, and a crank rod 802 is rotatably connected to one end of the fixed plate 701 away from the raised plate 704, the bottom of the crank rod 802 penetrates to the outside of the straight groove and is rotatably connected to the inner wall of the hollow cylinder 702, the top of the crank rod 802 penetrates to the outer wall of the hollow cylinder 702 and extends to the outside, and a fan 803 is fixedly connected to the extended end of the crank rod 802, and the sliding of the hollow shaft 705 will drive the crank rod 802 to rotate similar to the crank motion through the movable plate 801, and when the crank rod 802 rotates, the rotation of the crank rod 802 will drive the fan 803 to rotate inside the intake pipe, and when the fan 803 rotates, a certain amount of blowing will be generated inside the intake pipe, and the gas will be blown into the jet ring 804 through the intake pipe.

[0027] The bottom of the fan 803 is rotatably connected to the outer surface of the C-shaped ring 303, the outer surface of the fan 803 is sleeved with an air inlet pipe, the bottom of the air inlet pipe is fixedly connected to the top outer wall of the C-shaped ring 303, and the ends of several air inlet pipes away from the fan 803 are fixedly connected to the jet ring 804, and the jet ring 804 is fixedly connected to the inner wall of the elastic bag 405. The outer surface of the jet ring 804 is provided with several air outlet holes, and the end of the air outlet holes away from the jet ring 804 penetrates to the outer wall of the elastic bag 405. When the gas enters the interior of the jet ring 804, the gas will be blown toward the surface of the elastic bag 405 through the air outlet holes under the entry of the gas.

[0028] When in use, first place the quartz boat on the top of the chassis 301, then start the motor 101 and the electric lifting plate 201. When started, the electric lifting plate 201 will drive the ring light 202 to move down and illuminate the quartz boat. Then, when the motor 101 is started, the motor 101 will drive the chassis 301 to rotate through the belt. When the chassis 301 rotates, it will drive the quartz boat to rotate. Then, with the rotation of the quartz boat and the sliding of the ring light 202, the camera sensor 203 and the detection sensor 204 will detect the quartz boat.

[0029] When the motor 101 drives the chassis 301 to rotate through the belt, the rotation of the chassis 301 will drive the C-shaped ring 303 and the hollow cylinder 304 to rotate through the telescopic rod 302. When the hollow cylinder 304 rotates, the short rod on the inner wall of the hollow cylinder 304 will slide up and down along the bidirectional threaded groove on the outer surface of the bidirectional threaded rod 103. When the hollow cylinder 304 rotates and slides downward, the sliding of the hollow cylinder 304 will drive the lifting rod 104 to move downward synchronously. When the hollow cylinder 304 rotates and slides on the surface of the hollow cylinder 304, The rotation of the C-shaped ring 303 and the hollow cylinder 304 will drive the fixed cylinder 501 and the T-shaped rod 502 to rotate synchronously. When the T-shaped rod 502 rotates, the rotation of the T-shaped rod 502 will slide downward in the annular serrated groove on the lifting rod 104. Then, when the T-shaped rod 502 slides to the straight path of the annular serrated groove, the T-shaped rod 502 will be rebounded upward by the return spring 2 at the bottom to reset. In this way, the T-shaped rod 502 can slide up and down reciprocatingly with the rotation of the C-shaped ring 303 and the hollow cylinder 304. When the T-shaped rod 502 slides up and down When the second fixing ring 401 slides up and down, the sliding of the T-shaped rod 502 will drive the second fixing ring 401 to slide up and down synchronously. When the second fixing ring 401 slides up and down, the sliding of the second fixing ring 401 will drive the telescopic ring 403 to reciprocate through the middle rod 402. When the second fixing ring 401 moves down and pushes the telescopic ring 403 to expand through the middle rod 402, the downward movement of the second fixing ring 401 and the expansion of the telescopic ring 403 can cause the elastic bag 405 to drive the reflector to deflect. At this time, the reflector on the elastic bag 405 will move along with the expansion and contraction of the telescopic ring 403. The light source of the ring light 202 is repeatedly deflected during contraction. When the light source of the ring light 202 is irradiated onto the reflective plate, the reflected light can be reflected onto the surface of the quartz boat to supplement the shadow area on the surface of the quartz boat due to irregular shape or unevenness, and the direction and position of the reflected light can be changed in real time according to its deformation, which can more flexibly adapt to the lighting needs of the quartz boat surface. Compared with the traditional fixed light source arrangement, this dynamic lighting adjustment method can better track the shadow area on the surface of the quartz boat, continuously improve the uniformity of lighting, reduce the misjudgment caused by lighting shadows, and thus improve the accuracy of deformation detection.

[0030] When the telescopic ring 403 is reciprocatingly contracting and expanding, the contraction and expansion of the connecting belt 404 will drive the connecting belt 404 to slide reciprocatingly inside and outside the C-shaped ring 303. When the connecting belt 404 slides forward, the sliding of the connecting belt 404 will drive the gear ring 305 to rotate synchronously. When the gear ring 305 is rotating, the rotation of the gear ring 305 will drive the telescopic frame 306 to rotate synchronously. When the telescopic frame 306 is rotating, the rotation of the telescopic frame 306 will slide up and down inside the annular wave groove on the outer surface of the fixed sleeve 503 through the insertion rod on the inner wall. When the telescopic frame 306 slides up and down, the sliding of the telescopic frame 306 will drive the rotating ring 601 to move up and down synchronously. When the rotating ring 601 moves up and down, the movement of the rotating ring 601 will push the rotating frame 603 to rotate reciprocatingly up and down through the pushing rod 602. When the rotating frame 603 rotates reciprocatingly, the rotating The rotation of the frame 603 will push the top of the elastic plate 605 through the auxiliary rod 604, so that the elastic plate 605 shakes on the inner wall of the elastic bag 405. When the elastic plate 605 shakes, the shaking of the elastic plate 605 will slap the inner wall of the elastic bag 405. When the shaking of the elastic plate 605 slaps the inner wall of the elastic bag 405, the vibration generated by the slapping of the elastic bag 405 can make the dust particles attached to the surface of the reflector vibrate and relax. When the dust particles are vibrated, some dust particles can relax and fall off from the surface of the reflector, which can reduce the accumulation of dust on the surface of the reflector to a certain extent. When the dust on the surface of the reflector is reduced, the refraction and diffusion of light caused by dust particles can be effectively reduced, so that the propagation path of the reflected light is more regular and reflected to the surface of the quartz boat, thereby reducing the possibility of mutual interference between light and improving the accuracy of detection.

[0031] When the telescopic ring 403 reciprocates and expands, the expansion and contraction of the telescopic ring 403 will drive the connecting belt 404 to slide back and forth. When the connecting belt 404 slides back and forth, the reciprocating sliding of the connecting belt 404 will drive the gear ring 305 to rotate back and forth. When the gear ring 305 rotates back and forth, the rotation of the gear ring 305 will rotate synchronously with the fixed plate 701. When the fixed plate 701 rotates, the raised plate 704 will drive the hollow shaft 705 to move back and forth inside the hollow cylinder 702 through the annular raised groove at the bottom. , reciprocating sliding, when the hollow shaft 705 slides in the direction of the fixed disk 701, the sliding of the hollow shaft 705 will slide inside the adsorption frame 703 through the piston rod, and when the piston rod slides inside the adsorption frame 703, negative pressure will be generated inside the adsorption frame 703. At this time, the formation of negative pressure will adsorb the dust shaken off by the vibration on the elastic bag 405 into the adsorption frame 703 through the adsorption holes on the adsorption frame 703. Since the adsorption frame 703 is fixedly connected with a conical plate inside, when the piston rod is reset, the part can be reduced. In the case of dust backflow, when the hollow shaft 705 slides back and forth, the sliding of the hollow shaft 705 will drive the crank rod 802 to rotate similar to the crank motion through the movable plate 801. When the crank rod 802 rotates, the rotation of the crank rod 802 will drive the fan 803 to rotate inside the intake pipe. When the fan 803 rotates, a certain amount of blowing will be generated inside the intake pipe, and the gas will be blown into the jet ring 804 through the intake pipe. When the gas enters the interior of the jet ring 804, the gas will The gas is blown toward the surface of the elastic bag 405 through the air outlet. When the gas is blown to the surface of the elastic bag 405, the dust on the photovoltaic panel on the elastic bag 405 can be further cleaned. At this time, the negative pressure inside the adsorption frame 703 adsorbs the sliding dust, thereby reducing the flying of dust particles in the process of falling off from the surface of the reflector, reducing the impact of the flying dust on the detection of the camera sensor 203 and the detection sensor 204, and reducing the impact of the visual detection effect, thereby improving the detection accuracy of the camera sensor 203 and the detection sensor 204.

[0032] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A detection device for detecting deformation of a quartz boat, comprising a main body (1), wherein a motor (101) is fixedly connected to the bottom of the main body (1), an output end of the motor (101) penetrates the bottom inner wall of the main body (1) and extends to the inside, a belt is sleeved and connected to the outer surface of the output end of the motor (101), a fixing ring (102) is fixedly connected to the bottom inner wall of the main body (1), a bidirectional threaded rod (103) is fixedly connected to the bottom inner wall of the main body (1), the top of the bidirectional threaded rod (103) is open, a lifting rod (104) is slidably connected to the opening of the bidirectional threaded rod (103), a reset spring is fixedly connected to the bottom of the lifting rod (104), one end of the reset spring close to the bidirectional threaded rod (103) is fixedly connected to the bottom inner wall of the opening of the bidirectional threaded rod (103), and an annular sawtooth groove is provided on the outer surface of the lifting rod (104), characterized in that: Also includes; A detection mechanism (2), the detection mechanism (2) comprising an electric lifting plate (201) fixedly connected to the inner wall of the bottom of the main body (1), a ring light (202) being slidably connected to the side wall of the electric lifting plate (201), a camera sensor (203) being fixedly connected to the top of the camera sensor (203), and a detection sensor (204) being fixedly connected to the top of the camera sensor (203); A lifting mechanism (3), the lifting mechanism (3) comprising a chassis (301) rotatably connected to the inside of a fixed ring (102), the bottom of the chassis (301) being transmission-connected to the output end of a motor (101) via a belt, a plurality of telescopic rods (302) being fixedly connected to the top of the chassis (301), one end of the telescopic rod (302) away from the chassis (301) being fixedly connected to a C-shaped plate, a side of the C-shaped plate away from the telescopic rod (302) being provided with a hollow cylinder (304), and an outer surface of the hollow cylinder (304) being fixedly connected to a C-shaped ring (303).

2. A detection device for detecting deformation of a quartz boat according to claim 1, characterized in that: The bottom of the C-shaped ring (303) is fixedly connected to a plurality of the C-shaped plates, the top and bottom of the C-shaped ring (303) are both provided with annular grooves, the outer surface of the hollow cylinder (304) is provided with a plurality of rectangular grooves, the inside of the C-shaped ring (303) is rotatably connected to a gear ring (305), the top of the gear ring (305) is fixedly connected to a telescopic frame (306), the inner wall of the telescopic frame (306) is fixedly connected to an insertion rod, the inner wall of the hollow cylinder (304) is fixedly connected to a short rod, and one end of the short rod away from the hollow cylinder (304) is slidably connected to a bidirectional threaded groove on the outer surface of the bidirectional threaded rod (103).

3. A detection device for detecting deformation of a quartz boat according to claim 2, characterized in that: A shaking mechanism (4) is arranged inside the main body (1), and the shaking mechanism (4) comprises a second fixing ring (401) slidably connected to the outer surface of the hollow cylinder (304); the outer surface of the second fixing ring (401) is rotatably connected to a plurality of intermediate rods (402); one end of the plurality of intermediate rods (402) away from the second fixing ring (401) is rotatably connected to a telescopic ring (403); the top of the telescopic ring (403) is fixedly connected to an elastic bag (405); the top of the elastic bag (405) is fixedly connected to the outer surface of the second fixing ring (401); the inner wall of the telescopic ring (403) is fixedly connected to a plurality of connecting belts (404); one end of the connecting belt (404) away from the telescopic ring (403) penetrates the inner wall of the C-shaped ring (303) and is rotatably connected to the gear ring (305); and the outer surface of the elastic bag (405) is fixedly connected to a plurality of reflective plates.

4. The detection device for detecting deformation of a quartz boat according to claim 3, characterized in that: An auxiliary mechanism (5) is arranged at the top of the C-shaped ring (303), and the auxiliary mechanism (5) comprises a plurality of fixed cylinders (501) fixedly connected to the top of the gear ring (305), the side wall of the fixed cylinder (501) being arranged in an open manner, a T-shaped rod (502) being slidably connected inside the fixed cylinder (501), a second return spring being fixedly connected to the bottom of the T-shaped rod (502), the bottom of the second return spring being fixedly connected to the bottom inner wall of the fixed cylinder (501), the tops of a plurality of T-shaped rods (502) being fixedly connected to the bottom of the second fixed ring (401), a fixed sleeve (503) being fixedly connected to the top of the C-shaped ring (303), an annular wave groove being provided on the outer surface of the fixed sleeve (503), and a side of the T-shaped rod (502) close to the lifting rod (104) passing through the rectangular groove on the hollow cylinder (304) and being slidably connected inside the annular sawtooth groove.

5. A detection device for detecting deformation of a quartz boat according to claim 4, characterized in that: A vibration mechanism (6) is arranged inside the elastic bag (405), and the vibration mechanism (6) comprises a rotating ring (601) rotatably connected to the top of the telescopic frame (306); a plurality of push rods (602) are rotatably connected to the top of the rotating ring (601); one end of the push rod (602) away from the rotating ring (601) is rotatably connected to a rotating frame (603); one end of the rotating frame (603) close to the hollow cylinder (304) is rotatably connected to the outer surface of the hollow cylinder (304); an auxiliary rod (604) is rotatably connected to the middle of the rotating frame (603); one end of the auxiliary rod (604) away from the rotating frame (603) is rotatably connected to an elastic plate (605); and the elastic plate (605) is slidably connected to the inner wall of the elastic bag (405); Wherein, the insertion rod on the inner wall of the telescopic frame (306) is slidably connected to the inside of the annular wave groove.

6. The detection device for detecting deformation of a quartz boat according to claim 5, characterized in that: The main body (1) is provided with an extrusion mechanism (7) inside, the extrusion mechanism (7) comprising a fixed plate (701) fixedly connected to the bottom of the gear ring (305), the bottom of the fixed plate (701) being provided with an annular raised groove, the inside of the annular raised groove being slidably connected with a raised plate (704), the end of the raised plate (704) away from the annular raised groove being fixedly connected with a hollow shaft (705), the top and bottom of the hollow shaft (705) being provided with straight grooves, the outer surface of the hollow shaft (705) being slidably connected with a protrusion (704) There is a second hollow cylinder (702), the outer surface of which is fixedly connected to the bottom outer wall of the C-shaped ring (303), the end of the second hollow cylinder (702) away from the lifting rod (104) is fixedly connected to a piston rod, the outer surface of the piston rod is slidably connected to an adsorption frame (703), the side wall of the adsorption frame (703) is fixedly connected to the outer surface of the telescopic ring (403), the side wall of the adsorption frame (703) is provided with a plurality of adsorption ports, and the interior of the adsorption frame (703) is fixedly connected to a conical plate.

7. A detection device for detecting deformation of a quartz boat according to claim 6, characterized in that: A cleaning mechanism (8) is provided inside the hollow shaft (705), and the cleaning mechanism (8) comprises a movable plate (801) rotatably connected to the inner wall of the hollow shaft (705) on one side close to the raised plate (704); one end of the fixed plate (701) away from the raised plate (704) is rotatably connected to a crank rod (802); the bottom of the crank rod (802) penetrates the outside of the straight groove and is rotatably connected to the inner wall of the second hollow cylinder (702); the top of the crank rod (802) penetrates the outer wall of the second hollow cylinder (702) and extends to the outside; and the extended end of the crank rod (802) is fixedly connected to a fan (803).

8. The detection device for detecting deformation of a quartz boat according to claim 7, characterized in that: The bottom of the fan (803) is rotatably connected to the outer surface of the C-shaped ring (303); the outer surface of the fan (803) is sleeved with an air intake pipe; the bottom of the air intake pipe is fixedly connected to the top outer wall of the C-shaped ring (303); a plurality of air intake pipes are fixedly connected to an air jet ring (804) at one end away from the fan (803); the air jet ring (804) is fixedly connected to the inner wall of the elastic bag (405); a plurality of air outlet holes are opened on the outer surface of the air jet ring (804); and the end of the air outlet hole away from the air jet ring (804) penetrates to the outer wall of the elastic bag (405).

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