Ranging system

Abstract

The application discloses a ranging system, which is used for installation between a laser range finder and a crystal pulling furnace and measurement of a liquid level in the crystal pulling furnace. The ranging system comprises a mounting frame and a light path assembly. The mounting frame is used for mounting the laser range finder and is fixedly installed with the crystal pulling furnace. One end of the light path assembly is mounted on the mounting frame, and the other end extends to the inside of the crystal pulling furnace. The light path assembly is used for reflecting laser emitted by the laser range finder to the inside of the crystal pulling furnace. In the ranging system, laser is reflected to the liquid surface to be measured through the light path assembly, and the turning of the measurement light path is realized, so that the problem that the installation position of the laser range finder is limited by the structure of the crystal pulling furnace and it is difficult to directly reflect the liquid surface to be measured is solved. In addition, the telescopic support is arranged, so that the position of the light path assembly in the crystal pulling furnace can be adjusted. The elastic assembly is arranged, so that the reflection tube can be prevented from colliding with and damaging the generated single crystal silicon rod. The glass lens is arranged, so that the light path can be filtered.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of non-contact measurement, and particularly relates to a ranging system. BACKGROUND

[0002] The liquid level of a traditional semiconductor crystal pulling furnace is measured by a visual sensor, i.e., a CCD. The visual sensor has the disadvantages of low measurement accuracy, great influence of temperature, and high cost.

[0003] Limited by the structure of the crystal pulling furnace, high temperature and vacuum environment requirements, and insufficient space in the furnace, the existing liquid level measurement equipment is difficult to be applied to the measurement of the liquid level of the crystal pulling furnace

[0004] The information disclosed in the background section of this document is only intended to increase the understanding of the general background of the application and should not be construed as recognition or admission that this information constitutes prior art that is already known in this field. SUMMARY

[0005] The present application aims to provide a ranging system which can adapt a laser range finder to a crystal pulling furnace and provide a suitable measurement light path.

[0006] To achieve the above-mentioned purpose, the technical solution provided by an embodiment of the present application is as follows:

[0007] A ranging system for installation between a laser range finder and a crystal pulling furnace and measurement of the liquid level in the crystal pulling furnace, the ranging system comprising a mounting frame and a light path assembly, the mounting frame being used for mounting the laser range finder and fixedly installed with the crystal pulling furnace, one end of the light path assembly being installed on the mounting frame and the other end extending to the inside of the crystal pulling furnace, the light path assembly being used for reflecting the laser emitted by the laser range finder to the inside of the crystal pulling furnace.

[0008] In one or more embodiments of the present application, the ranging system further comprises a moving platform fixedly installed with the mounting frame, the moving platform being used for mounting the laser range finder and adjusting the position and / or angle of the laser range finder.

[0009] In one or more embodiments of the present application, the mounting frame comprises a telescopic support and a mounting seat, one end of the telescopic support being fixedly installed with the crystal pulling furnace and the other end being fixedly installed with the mounting seat, the mounting seat being used for mounting the laser range finder, one end of the light path assembly being fixedly installed with the mounting seat and the other end extending to the inside of the crystal pulling furnace and adjusting its position based on the telescopic adjustment of the telescopic support.

[0010] In one or more embodiments of the present application, the telescopic support comprises a bellows and a first mounting member, a first end of the bellows is fixedly mounted with the first mounting member, a second end of the bellows is fixedly mounted with the crystal pulling furnace, the first mounting member is fixedly mounted with the mounting seat, one end of the optical path assembly is arranged inside the bellows, and the other end of the optical path assembly extends to the inside of the crystal pulling furnace through the second end of the bellows; or the telescopic support comprises a bellows, a first mounting member and a second mounting member, a first end of the bellows is fixedly mounted with the first mounting member, a second end of the bellows is fixedly mounted with the crystal pulling furnace through the second mounting member, the first mounting member is fixedly mounted with the mounting seat, one end of the optical path assembly is arranged inside the bellows, and the other end of the optical path assembly extends to the inside of the crystal pulling furnace through the second end of the bellows.

[0011] In one or more embodiments of the present application, the telescopic support further comprises a guide rod, the guide rod is fixedly mounted outside the crystal pulling furnace, and the first mounting member is sleeved on the guide rod; and / or the telescopic support further comprises an adjusting rod and an adjusting member, the adjusting rod is fixedly mounted outside the crystal pulling furnace, the adjusting member and the first mounting member are both sleeved on the adjusting rod, and the adjusting member is used for adjusting the position of the first mounting member.

[0012] In one or more embodiments of the present application, the optical path assembly comprises a connecting tube and a reflector, one end of the connecting tube is mounted on the mounting frame, the other end of the connecting tube extends to the inside of the crystal pulling furnace, and the reflector is arranged inside the connecting tube.

[0013] In one or more embodiments of the present application, the distance measuring system further comprises an elastic assembly, and the optical path assembly is mounted on the mounting frame through the elastic assembly.

[0014] In one or more embodiments of the present application, the elastic assembly comprises a spring, a first end of the spring is fixedly mounted with the mounting frame, and a second end of the spring is fixedly mounted with the optical path assembly; or the elastic assembly comprises a telescopic tube, a first end of the telescopic tube is fixedly mounted with the mounting frame, and a second end of the telescopic tube is fixedly mounted with the optical path assembly; or the elastic assembly comprises a telescopic tube and a spring sleeved on the telescopic tube, a first end of the telescopic tube and a first end of the spring are fixedly mounted with the mounting frame, and a second end of the telescopic tube and a second end of the spring are fixedly mounted with the optical path assembly.

[0015] In one or more embodiments of the present application, the distance measuring system further comprises a glass lens, the glass lens is arranged between the laser range finder and the optical path assembly.

[0016] In one or more embodiments of the present application, an angle is arranged between the glass lens and the laser emitted by the laser range finder.

[0017] Compared with the prior art, in the range finding system of the present application, the laser is reflected to the liquid surface to be measured by the light path assembly, the turning of the measurement light path is realized, and thus the problem that the installation position of the laser range finder is limited by the structure of the crystal pulling furnace and it is difficult to directly irradiate the liquid surface to be measured is solved. In addition, by arranging the telescopic support, the position of the light path assembly in the crystal pulling furnace can be adjusted. By arranging the elastic assembly, the reflection tube can be prevented from colliding with and damaging the generated single crystal silicon rod. By arranging the glass lens, the light path can be filtered. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments described in the present application, and other drawings can be obtained by those skilled in the art without any creative effort.

[0019] Figure 1 It is an installation structure schematic diagram of the range finding system in an embodiment of the present application.

[0020] Figure 2 It is a structure schematic diagram of the mobile platform in an embodiment of the present application.

[0021] Figure 3 It is a structure schematic diagram of the light path assembly and the mounting seat in an embodiment of the present application.

[0022] Figure 4 It is a structure schematic diagram of the telescopic support in an embodiment of the present application. DETAILED DESCRIPTION

[0023] In order to make the person skilled in the art better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without any creative effort should belong to the protection scope of the present application.

[0024] In addition, in the present application, the words such as "first", "second" and the like are mainly used to distinguish one technical feature from another technical feature, and do not necessarily require or imply that there is a certain actual relationship, quantity or order between the technical features.

[0025] In the detailed description of the application, reference is made to the accompanying drawings which form a part hereof, and in which are shown by way of illustration various embodiments by which the application can be practiced. It is to be understood that other embodiments can be utilized and structural or logical changes can be made without departing from the scope of the present application. The following detailed description, therefore, is not to be taken in a limiting sense, as the scope of the application is defined by the appended claims.

[0026] Various operations can be described as multiple discrete actions or operations in a monitory sequence, where the ordering of various operations can not be essential. Specifically, these operations can not be performed in the recited order. The described operations can be performed in different order within the scope of the claims. Various additional operations can be performed and / or described operations can be omitted in additional embodiments.

[0027] For purposes of the present application, the phrase "A and / or B" means (A), (B), or (A and B). For purposes of the present application, the phrase "A, B, and / or C" means (A), (B), (C), (A and B), (A and C), (B and C), or (A, B and C).

[0028] Various components, devices, can be referred to in the singular or plural throughout this document, but this is merely for convenience and any reference to one or more of such components can include a plurality of such components according to the teachings herein.

[0029] The specification describes using the phrases "in one embodiment" or "in other embodiments" or "in some embodiments", which can each refer to one or more of the same or different embodiments. Furthermore, the terms "comprising", "including", "having" and the like, as used with respect to embodiments of the present application, are synonymous.

[0030] As Figure 1 shown, the distance measuring system in one embodiment of the present application is used for installation between the laser distance meter 10 and the crystal pulling furnace 11 and measurement of the liquid level in the crystal pulling furnace 11. The distance measuring system comprises a mounting frame 20 and an optical path assembly 30.

[0031] Wherein, the mounting frame 20 is used for mounting the laser distance meter 10 and fixedly installing with the crystal pulling furnace 11, one end of the optical path assembly 30 is mounted on the mounting frame 20 and the other end extends to the inside of the crystal pulling furnace 11, and the optical path assembly 30 is used for reflecting the laser emitted by the laser distance meter 10 to the inside of the crystal pulling furnace 11.

[0032] In an embodiment, the existing crystal pulling furnace 11 uses CCD measurement, and no laser range finder 10 is installed, so no appropriate mounting hole is reserved. Without changing the original structure of the crystal pulling furnace 11, the laser range finder 10 can be installed through the mounting hole 12 of the glass window of the rotating table of the crystal pulling furnace 11. The mounting hole 12 is located on the side wall of the crystal pulling furnace 11 and is perpendicular to the furnace body.

[0033] As shown in Figure 1 , in the crystal pulling furnace 11, there is only a 20mm gap between the single crystal silicon rod and the furnace wall, and the measured liquid level is located at the bottom of the crystal pulling furnace 11. By setting the mounting bracket 20 and the optical path assembly 30, the laser emitted by the laser range finder 10 can be reflected to reach the measured liquid level through the narrow 20mm gap, realizing liquid level measurement.

[0034] As shown in Figure 1 and Figure 2 , the distance measuring system can further include a moving platform 40 fixedly installed with the mounting bracket 20, and the moving platform 40 is used to install the laser range finder 10 and adjust the position and angle of the laser range finder 10.

[0035] As shown in Figure 2 , the moving platform 40 can include a displacement moving platform 41 and an angle moving platform 42. The displacement moving platform 41 is fixedly installed with the mounting bracket 20, the angle moving platform 42 is fixedly installed with the displacement moving platform 41, and the laser range finder 10 is installed on the angle moving platform 42. The displacement moving platform 41 is used to adjust the position of the angle moving platform 42, and further adjust the position of the laser range finder 10. The angle moving platform 42 is used to adjust the angle of the laser range finder 10. By adjusting the displacement moving platform 41 forward, backward, left, right, up and down, and adjusting the angle moving platform 42, the laser range finder 10 can be effectively calibrated to achieve the most ideal state of the light spot.

[0036] The displacement moving platform 41 and the angle moving platform 42 can be implemented by using existing technologies. In other embodiments, other cooperation installation modes can be used between the displacement moving platform 41, the angle moving platform 42, the laser range finder 10 and the mounting bracket 20. Only the displacement moving platform 41 or the angle moving platform 42 can be set, and the moving platform 40 is only used to adjust the position or angle of the laser range finder 10. The moving platform 40 can not be set, and the laser range finder 10 is directly fixedly installed with the mounting bracket 20.

[0037] In combination with Figure 1 , Figure 3 and Figure 4As shown, the mounting frame 20 comprises a telescopic support 21 and a mounting seat 22. One end of the telescopic support 21 is fixedly installed with the crystal pulling furnace 11, and the other end is fixedly installed with the mounting seat 22. The mounting seat 22 is used for installing the laser range finder 10. One end of the light path assembly 30 is fixedly installed with the mounting seat 22, and the other end extends to the inside of the crystal pulling furnace 11 and adjusts its position based on the telescopic adjustment of the telescopic support 21.

[0038] As shown in the drawings, Figure 3 As shown, the light path assembly 30 comprises a connecting pipe 31 and a mirror 32. One end of the connecting pipe 31 is installed on the mounting seat 22, and the other end of the connecting pipe 31 extends to the inside of the crystal pulling furnace 11, and the mirror 32 is arranged in the inside of the connecting pipe 31.

[0039] Preferably, the distance measuring system can further comprise an elastic assembly 33, and one end of the connecting pipe in the light path assembly 30 is installed on the mounting seat 22 through the elastic assembly 33.

[0040] Specifically, the inside of the connecting pipe 31 is provided with a mirror support 311 for installing the mirror 32, and a light transmission hole 312 is further formed on the connecting pipe 31. The mirror support 311 and the light transmission hole 312 are both arranged at the end of the connecting pipe 31 extending to the inside of the crystal pulling furnace 11.

[0041] In other embodiments, the light transmission hole 312 can not be arranged, and a transparent connecting pipe 31 can be used, or a transparent glass can be sealingly installed in the light transmission hole 312 to realize the sealing of the inside of the connecting pipe 31.

[0042] As shown in the drawings, Figure 3 As shown, the elastic assembly 33 comprises a telescopic pipe 331 and a spring 332 sleeved on the telescopic pipe 331, and the first end of the telescopic pipe 331 and the first end of the spring 332 are fixedly installed with the mounting seat 22, and the second end of the telescopic pipe 331 and the second end of the spring 332 are fixedly installed with the connecting pipe 31.

[0043] When the single crystal silicon rod touches the connecting pipe 31, the spring 332 and the telescopic pipe 331 can play a buffering role to avoid hard collision between the single crystal silicon rod and the connecting pipe 31, which can cause damage to the silicon rod.

[0044] In other embodiments, only the spring 332 or the telescopic pipe 331 can be arranged, or the elastic assembly 33 can not be arranged, and the connecting pipe 31 is directly fixedly installed with the mounting seat 22.

[0045] As shown in the drawings, Figure 3 As shown, the mounting seat 22 comprises a connecting flange 221 and a connecting support 222. One side of the connecting flange 221 is fixedly installed with the first end of the telescopic pipe 331 and the first end of the spring 332, and the other side is fixedly installed with the connecting support 222. The connecting support 222 is fixedly installed with the displacement moving platform 41 in the moving platform 40.

[0046] In an embodiment, the distance measuring system further comprises a glass lens 50 arranged between the laser distance meter 10 and the light path assembly 30. The glass lens 50 is preferably a high-temperature-resistant quartz glass lens 50.

[0047] Specifically, the mounting seat 22 further comprises a glass mounting seat 223 fixedly installed between the connecting bracket 222 and the connecting flange 221, and the glass lens 50 is installed inside the glass mounting seat 223.

[0048] Further, an inclination angle is arranged between the glass lens 50 and the laser emitted by the laser distance meter 10. By arranging the inclination angle, the laser is not perpendicular to the glass lens 50, which helps to reduce mirror reflection and filter out interfering light.

[0049] In the embodiment, the laser emitted by the laser distance meter 10 is horizontally emitted, and the light path is vertically downward after being reflected by the mirror 32. The direction of the laser emission is the x-axis, and the direction after reflection is the y-axis. Preferably, the glass lens 50 is perpendicular to the x-y plane, and the angle between the glass lens 50 and the y-axis is 10°.

[0050] In other embodiments, the specific size and direction of the inclination angle can also be adjusted according to the thickness and material of the glass lens 50.

[0051] In other embodiments, the glass lens 50 can also be gold-plated glass or other materials.

[0052] In combination with FIGS. 1-3, Figure 1 and Figure 4 As shown, the telescopic support 21 comprises a bellows 211, a first mounting member 212, a second mounting member 213, a guide rod 214, an adjusting rod 215, and an adjusting member 216. The first end of the bellows 211 is fixedly installed with the first mounting member 212, the second end of the bellows 211 is fixedly installed with the pulling crystal furnace 11 through the second mounting member 213, and the first mounting member 212 is fixedly installed with the connecting flange 221 in the mounting seat 22. One end of the light path assembly 30 is arranged inside the bellows 211, and the other end extends to the inside of the pulling crystal furnace 11 through the second end of the bellows 211.

[0053] The guide rod 214 is fixedly installed outside the pulling crystal furnace 11, and the first mounting member 212 is sleeved on the guide rod 214. The adjusting rod 215 is fixedly installed outside the pulling crystal furnace 11, and the adjusting member 216 and the first mounting member 212 are both sleeved on the adjusting rod 215, and the adjusting member 216 is used to adjust the position of the first mounting member 212.

[0054] In an embodiment, the bellows 211 is compressed by 50 mm and lengthened by 80 mm, thereby having a telescopic function of 130 mm. In other embodiments, bellows 211 of other sizes can also be used.

[0055] Specifically, the first mounting member 212 is provided with a first through hole, the second mounting member 213 is provided with a second through hole matched with the mounting hole 12 on the crystal pulling furnace 11, and the second mounting member 213 can be directly connected to the mounting hole 12 and fixedly installed with the crystal pulling furnace 11. The optical path assembly 30 can be sequentially inserted into the crystal pulling furnace 11 through the first through hole, the second through hole and the mounting hole 12.

[0056] The first mounting member 212 can also be provided with a guide hole, and the first mounting member 212 is sleeved on the guide rod 214 through the guide hole. The guide rod 214 provides a guide function for the movement of the first mounting member 212. Preferably, a brass sleeve is arranged in the guide hole, which can reduce the friction on the guide rod 214.

[0057] The first mounting member 212 can also be provided with a third through hole, and the first mounting member 212 is sleeved on the adjusting rod 215 through the third through hole. The adjusting member 216 can include two bolts arranged on both sides of the first mounting member 212, and the adjusting rod 215 can be provided with external threads matched with the internal threads of the bolts. By screwing the bolts, the position of the first mounting member 212 can be adjusted, and the depth of the optical path assembly 30 entering the crystal pulling furnace 11 can be further adjusted.

[0058] In other embodiments, the adjusting member 216 can also adjust the position of the first mounting member 212 through buckling, damping or other ways cooperating with the adjusting rod 215. The number of guide rods 214, the number of adjusting rods 215 and the number of adjusting members 216 can be set to be multiple. The guide rod 214 can also not be arranged, or the adjusting rod 215 and the adjusting member 216 can not be arranged, or the guide rod 214, the adjusting rod 215 and the adjusting member 216 can not be arranged.

[0059] In an embodiment, the guide rod 214 and the adjusting rod 215 are fixedly installed with the second mounting member 213, and in other embodiments, the guide rod 214 and / or the adjusting rod 215 can be directly fixedly installed with the crystal pulling furnace 11.

[0060] In other embodiments, the second mounting member 213 can not be arranged, and the second end of the bellows 211 can be fixedly installed with the crystal pulling furnace 11 by welding or other ways.

[0061] In an embodiment, the glass lens 50 and the glass mounting seat 223, the glass mounting seat 223 and the connecting flange 221 can be sealed and installed by high-temperature-resistant sealing rings, and the telescopic pipe 331 and the connecting flange 221 can be sealed and installed by welding, so that the telescopic pipe 331 and the glass mounting seat 223 can be completely sealed.

[0062] The bellows 211 can be sealed and installed with the first mounting member 212 and the second mounting member 213 by welding. The second mounting member 213 and the crystal pulling furnace 11 can be sealed and docked, and the first mounting member 212 and the connecting flange 221 can be sealed and installed with a high-temperature resistant sealing ring.

[0063] It can be seen that at this time, the interior of the crystal pulling furnace 11 and the interior of the bellows 211 form a closed space, so that after the installation system is installed in the crystal pulling furnace 11, the crystal pulling furnace 11 can still meet high-temperature and sealed crystal pulling conditions.

[0064] By setting up a retractable bellows 211 and placing the optical path component 30 inside the bellows 211, all seals between the entire ranging system and the crystal pulling furnace 11 can be achieved by static sealing. In particular, there is no need for dynamic sealing between the connecting pipe 31 that needs to be moved and the crystal pulling furnace 11, which reduces the difficulty of sealing while improving the sealing and stability.

[0065] In other embodiments, sealing can be achieved in other ways or at other locations. For example, by sealing the light-transmitting hole 312 in the connecting tube 31 with transparent glass and sealing the connection between the connecting tube 31 and the telescopic tube 331, the sealing between the glass lens 50 and the glass mounting base 223 and between the glass mounting base 223 and the connecting flange 221 can be eliminated. There are many other ways to achieve static sealing, which will not be detailed here.

[0066] During actual operation, the first mounting member 212 can be pulled to drive the bellows 211 to expand and contract, thereby adjusting the depth of the optical path component 30 entering the crystal pulling furnace 11, and then adjusting the position of the reflective mirror 32 to reflect the light path to prevent the optical path component 30 from touching the crystal rod. The optical path component 30 can also be pulled out of the crystal pulling furnace 11 when feeding the crystal pulling furnace 11 to avoid contamination of the optical path component 30.

[0067] After adjusting the position of the first mounting member 212 , the laser rangefinder 10 can be fine-tuned by the mobile platform 40 , thereby effectively calibrating the laser rangefinder 10 and making the laser spot reach the most ideal state.

[0068] By setting up the optical path component 30, the laser can be reflected and vertically illuminate the liquid surface to be measured, thereby solving the problem that the laser rangefinder 10 cannot be installed normally due to the influence of the space of the crystal pulling furnace 11, and the optical path cannot be perpendicular to the liquid surface or normally obliquely to the liquid surface due to the influence of the internal structure of the furnace body.

[0069] During the growth of single crystal silicon, if the optical path component 30 is touched, the spring 332 and the telescopic tube 331 can play a buffering role to avoid damage to the generated single crystal silicon rod.

[0070] It will be obvious to a person skilled in the art that the application is not limited to the details of the foregoing exemplary embodiments and can be implemented in other concrete forms without departing from the spirit or essential characteristics of the application. The embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. No reference signs in the claims should be considered as limiting the scope of the claims to the identity of the reference signs therein.

[0071] Furthermore, it should be understood that although the description is made on the basis of the embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A distance measurement system for installation between a laser range finder and a crystal pulling furnace and for measuring the liquid level in the crystal pulling furnace, characterized in that: The distance measurement system includes a mounting frame and an optical path component. The mounting frame is used to mount the laser rangefinder and is fixedly mounted to the crystal pulling furnace. One end of the optical path component is mounted on the mounting frame and the other end extends into the interior of the crystal pulling furnace. The optical path component is used to reflect the laser light emitted by the laser rangefinder into the interior of the crystal pulling furnace. Among them, the mounting frame includes a retractable bracket and a mounting seat, one end of the retractable bracket is fixedly mounted on the crystal pulling furnace, and the other end is fixedly mounted on the mounting seat, and the mounting seat is used to install a laser rangefinder, one end of the optical path component is fixedly mounted on the mounting seat, and the other end extends to the interior of the crystal pulling furnace and adjusts its own position based on the extension and retraction of the retractable bracket.

2. The ranging system according to claim 1, wherein: The distance measuring system further comprises a mobile platform fixedly mounted on the mounting frame, wherein the mobile platform is used to mount the laser rangefinder and adjust the position and / or angle of the laser rangefinder.

3. The distance measurement system according to claim 1, wherein: The retractable bracket includes a bellows and a first mounting member, the first end of the bellows is fixedly mounted to the first mounting member, the second end of the bellows is fixedly mounted to the crystal pulling furnace, the first mounting member is fixedly mounted to the mounting seat, one end of the optical path component is disposed inside the bellows, and the other end passes through the second end of the bellows and extends into the interior of the crystal pulling furnace; or The retractable bracket includes a bellows, a first mounting member and a second mounting member. The first end of the bellows is fixedly mounted to the first mounting member, the second end of the bellows is fixedly mounted to the crystal pulling furnace through the second mounting member, and the first mounting member is fixedly mounted to the mounting seat. One end of the optical path assembly is arranged inside the bellows, and the other end passes through the second end of the bellows and extends to the inside of the crystal pulling furnace.

4. The distance measurement system according to claim 3, characterized in that The retractable bracket further includes a guide rod, the guide rod is fixedly mounted on the outer side of the crystal pulling furnace, and the first mounting member is sleeved on the guide rod; and / or The retractable bracket also includes an adjusting rod and an adjusting member. The adjusting rod is fixedly mounted on the outside of the crystal pulling furnace. The adjusting member and the first mounting member are both sleeved on the adjusting rod. The adjusting member is used to adjust the position of the first mounting member.

5. The distance measurement system according to claim 1, characterized in that The optical path assembly includes a connecting tube and a reflector. One end of the connecting tube is mounted on the mounting frame, and the other end of the connecting tube extends to the interior of the crystal pulling furnace. The reflector is arranged inside the connecting tube.

6. The distance measurement system according to claim 1, characterized in that The distance measuring system further includes an elastic component, and the optical path component is mounted on the mounting frame via the elastic component.

7. The distance measurement system according to claim 6, characterized in that The elastic component includes a spring, a first end of the spring is fixedly mounted on the mounting bracket, and a second end of the spring is fixedly mounted on the optical path component; or The elastic component includes a telescopic tube, a first end of the telescopic tube is fixedly mounted on the mounting frame, and a second end of the telescopic tube is fixedly mounted on the optical path component; or The elastic component includes a telescopic tube and a spring sleeved on the telescopic tube, the first end of the telescopic tube and the first end of the spring are fixedly mounted on the mounting frame, and the second end of the telescopic tube and the second end of the spring are fixedly mounted on the optical path component.

8. The distance measurement system according to claim 1, wherein: The distance measuring system further comprises a glass lens, which is arranged between the laser rangefinder and the optical path component.

9. The distance measurement system according to claim 8, characterized in that: An inclination angle is set between the glass lens and the laser emitted by the laser rangefinder.

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