System and method for comprehensively measuring thermal optical characteristics of high-power laser optical lens
By designing a comprehensive thermal optical characteristics measurement system for high-power laser optical lenses, using multiple measurement devices and optical path switching, the problems of limitations in the prior art measurement scenario, single information acquisition and lack of mutual inspection methods are solved, and the measurement of the thermal optical characteristics of high-power laser systems is achieved.
Patent Information
- Application Number
- CN202510020244.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-06
- Publication Date
- 2025-05-06
- Estimated Expiration
- 2045-01-06
AI Technical Summary
The prior art has limitations in the thermal optical characteristic measurement of high-power laser systems, single information acquisition and lack of mutual inspection methods, resulting in insufficient accuracy and reliability of measurement.
A comprehensive thermal optical characteristics measurement system for high-power laser optical lenses is designed, including a laser light source, a first rotating high mirror, a second rotating high mirror and a control computer. Comprehensive measurement and mutual inspection of thermal optical characteristics are achieved through a variety of measurement devices and optical path switching.
This system can effectively measure the thermal optical characteristics of the focus optical system with a spot size greater than 8mm and the collimating optical system with a beam diameter of ≤13mm, improve the accuracy and reliability of the measurement, and verify the correctness of the measurement results through mutual inspection methods.
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Figure CN119935503A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a thermal optical property measurement system and method, and in particular to a thermal optical property comprehensive measurement system and method for a high-power laser optical lens. Background Art
[0002] Thermo-optical properties of high-power laser optical systems refer to the temperature changes caused by the absorption of energy by optical components under the action of high-power lasers, which in turn cause thermal expansion, stress changes, wavefront distortion, and changes in optical path length. These changes will directly affect the focal intensity distribution and processing effect of the laser system, so accurate measurement and analysis of them are of key significance. With the widespread application of kilowatt-level multimode fiber laser light sources, the requirements for the optical properties of laser processing lenses are constantly increasing, and accurate measurement of their thermo-optical properties is crucial to ensure the stability and performance of the optical system.
[0003] The current mainstream measurement method is to use a laser focus analyzer for measurement, but there are several limitations in the measurement of thermal optical properties of high-power laser systems:
[0004] (1) Limitations of measurement scenarios: The laser focus analyzer has a narrow application scope and is only applicable to focusing optical systems with a spot size of less than 8 mm. It is difficult to measure systems with larger spots.
[0005] (2) Single information acquisition: The laser focus analyzer mainly obtains relative focus position information by scanning along the optical axis, which is difficult to fully reflect the overall thermal optical characteristics of the optical system, especially the inability to deeply analyze the impact of temperature changes on wavefront distortion;
[0006] (3) Lack of mutual inspection means: When deviations occur in the measurement results, there is a lack of other verification means to conduct closed-loop mutual inspection of the measurement results, resulting in insufficient measurement accuracy and reliability. Summary of the invention
[0007] The purpose of the present invention is to solve the shortcomings of using a laser focus analyzer to measure the thermal optical characteristics of a high-power laser system, such as the limitation of measurement scenarios, single information acquisition, and lack of mutual inspection means, and to provide a comprehensive measurement system and method for the thermal optical characteristics of a high-power laser optical lens.
[0008] In order to solve the deficiencies of the above-mentioned prior art, the present invention provides the following technical solutions:
[0009] A comprehensive measurement system for thermal optical characteristics of a high-power laser optical lens, which is special in that it includes a laser light source, a first rotating high-reflection mirror, a second rotating high-reflection mirror and a control computer;
[0010] Point X and point Y are sequentially arranged on the optical path of the laser light source along its transmission direction; the optical path of the laser light source is divided into a first detection optical path and a second detection optical path at point Y; the first detection optical path and the second detection optical path are respectively provided with a first measuring device and a second measuring device; the high-power laser optical lens to be measured is arranged on the optical path of the laser light source and is located between point X and point Y; the first rotating high-reflection mirror is arranged at point X, and the second rotating high-reflection mirror is arranged at point Y;
[0011] The laser light source includes two light sources: a high-power laser light source and a low-power laser light source, whose emission light paths are perpendicular to each other and intersect at the point X, and the high-power laser light source and the low-power laser light source are used to output high-power laser and low-power laser respectively;
[0012] The first measuring device is used to measure the reference focal position and focal position of the high-power laser optical lens, or absorb the high-power laser; the second measuring device is used to measure the reference wavefront phase distribution and the wavefront phase distribution after irradiation of the high-power laser optical lens;
[0013] The first rotating high-reflective mirror is provided with two working positions: position 1A and position 1B, and the second rotating high-reflective mirror is provided with corresponding positions 2A and 2B;
[0014] When the first rotating high-reflection mirror is in position 1A, the low-power laser light source is turned on, the high-power laser light source is turned off, and the first rotating high-reflection mirror is used to guide the low-power laser through the high-power laser optical lens to point Y; the second rotating high-reflection mirror is in position 2A, used to guide the laser at point Y to the second measuring device on the second detection optical path; or the second rotating high-reflection mirror is in position 2B, used to transmit the laser at point Y to the first measuring device on the first detection optical path;
[0015] When the first rotating high-reflection mirror is in position 1B, the high-power laser light source is turned on and the low-power laser light source is turned off. The first rotating high-reflection mirror is used to make the high-power laser pass through point X and then pass through the high-power laser optical lens to be measured to point Y. The second rotating high-reflection mirror is in position 2B, used to transmit the laser at point Y to the first measuring device on the first detection optical path;
[0016] The control computer is respectively connected to the high-power laser light source, the low-power laser light source, the first rotating high-reflective mirror, the second rotating high-reflective mirror, the first measuring device and the second measuring device, and is used to control the switch of the high-power laser light source and the low-power laser light source, the position switching of the first rotating high-reflective mirror and the second rotating high-reflective mirror, and control the first measuring device and the second measuring device, and obtain the measured data in real time.
[0017] Furthermore, the first measuring device is a laser focus analyzer and a beam absorber that are switchable with each other, the laser focus analyzer is used to measure the reference focus position and focus position of the high-power laser optical lens, and the beam absorber is used to absorb high-power laser; the laser focus analyzer and the beam absorber are respectively connected to the control computer, and the control computer is used to control the measurement process of the laser focus analyzer and the beam absorber, and obtain the measured data in real time.
[0018] Furthermore, the first rotating high-reflection mirror and the second rotating high-reflection mirror are both provided with a rotation driving mechanism, and the input end of each rotation driving mechanism is connected to the control computer;
[0019] Position sensors are provided at the 1A position, the 1B position, the 2A position, and the 2B position, and the output end of each position sensor is connected to the control computer;
[0020] The high-power laser light source and the low-power laser light source are both provided with an electric control device, and the input end of each electric control device is connected to the control computer.
[0021] Furthermore, the 1A position and the 2A position are both provided with positioning devices.
[0022] Furthermore, the high-power laser light source and the low-power laser light source are collimated laser light sources with the same wavelength; and the second measuring device adopts a Shack-Hartmann wavefront sensor.
[0023] A method for comprehensively measuring the thermal optical characteristics of a high-power laser optical lens is characterized in that the method adopts the above-mentioned comprehensive measuring system for the thermal optical characteristics of the high-power laser optical lens, and comprises the following steps:
[0024] Step 1: If the high-power laser optical lens to be tested is a focusing optical lens, then execute step 2; if the high-power laser optical lens to be tested is a beam expansion collimating lens or a beam reduction collimating lens, then execute step 3;
[0025] Step 2: After the control computer sets the first rotating high-reflection mirror to the 1A position and the second rotating high-reflection mirror to the 2B position, the low-power laser light source is turned on synchronously, and the first measuring device measures the reference focal position of the high-power laser optical lens. After the measurement, the low-power laser light source is turned off;
[0026] Step 3, after the control computer places the first rotating high-reflection mirror in the 1A position and the second rotating high-reflection mirror in the 2A position, the low-power laser light source is turned on synchronously, and the control computer measures the reference wavefront phase distribution of the high-power laser optical lens through the second measuring device; after the measurement, the low-power laser light source is turned off, and the first rotating high-reflection mirror and the second rotating high-reflection mirror are switched to the 1B position and the 2B position respectively through the control computer;
[0027] Step 4: The control computer turns on the high-power laser light source and allows the light to pass for at least half an hour. During this period, the first measuring device measures the focal position of the high-power laser optical lens. The measurement is performed multiple times and the measurement results are recorded. The average value of the multiple measurements is taken as the final focal position, or the first measuring device absorbs the high-power laser.
[0028] Step 5. After the measurement, the high-power laser light source is quickly turned off by controlling the computer, and the first rotating high-reflection mirror and the second rotating high-reflection mirror are quickly switched to the 1A position and the 2A position respectively, and the low-power laser light source is turned on synchronously. The control computer measures the wavefront phase distribution of the high-power laser optical lens after irradiation through the second measuring device to complete the comprehensive measurement of the thermal-optical characteristics of the high-power laser optical lens.
[0029] Furthermore, the step 1 is specifically as follows:
[0030] If the high-power laser optical lens is a focusing optical lens, switch the first measuring device to a laser focus analyzer, and then execute step 2; if the high-power laser optical lens is a beam expansion collimating lens or a beam reduction collimating lens, switch the first measuring device to a beam absorber, and then execute step 3.
[0031] Furthermore, in step 1, if the high-power laser optical lens to be tested is a focusing optical lens, step 6 is further included after step 5:
[0032] The expected focus position change Δz is calculated based on the difference between the post-irradiation wavefront phase distribution obtained in step 5 and the reference wavefront phase distribution obtained in step 3, and compared with the difference between the reference focus position obtained in step 2 and the focus position obtained in step 4.
[0033] Furthermore, the step 6 is specifically as follows:
[0034] Step 6.1, subtract the wavefront phase distribution after irradiation obtained in step 5 from the reference wavefront phase distribution obtained in step 3 to obtain the total wavefront phase change δw(r), and then calculate the expected focus position change Δz based on the total wavefront phase change δw(r):
[0035]
[0036] Where λ is the wavelength of the high-power laser;
[0037] Step 6.2: Subtract the reference focal position obtained in step 2 from the focal position obtained in step 4 to obtain the actual focal position change Δz′, and then use the root mean square error or percentage error to evaluate the matching degree between the expected focal position change Δz and the actual focal position change Δz′ to complete the comprehensive measurement of the thermal-optical properties of the high-power laser optical lens.
[0038] Compared with the prior art, the present invention has the following beneficial effects:
[0039] (1) The comprehensive measurement system of the thermal optical characteristics of the high-power laser optical lens of the present invention comprises a laser light source, a first rotating high-reflection mirror, a second rotating high-reflection mirror and a control computer, wherein the laser light source comprises a high-power laser light source and a low-power laser light source whose output light paths are perpendicular to and intersect with each other. The present invention achieves consistency of the light paths of the high-power laser and the low-power laser in the lens measurement area through the first rotating high-reflection mirror and the second rotating high-reflection mirror, realizes the common optical axis of the two light paths during the measurement process, and reduces the error of the measurement system.
[0040] (2) In the present invention, the first rotating high-reflection mirror and the second rotating high-reflection mirror will only cut into the optical path when a low-power laser is used; and they will rotate out of the optical path when a high-power laser is working, thereby preventing the high-power laser from causing thermal deformation of the reflector.
[0041] (3) The second measuring device in the present invention adopts a Shack-Hartmann wavefront sensor. The focusing optical lens measurement mode can realize the thermal optical property measurement of a focusing optical system with a spot size greater than 8 mm, and the beam expansion / contraction collimating lens measurement mode can realize the thermal optical property measurement of a collimating optical system with a beam diameter ≤13 mm.
[0042] (4) The comprehensive measurement method of the thermal optical characteristics of the high-power laser optical lens of the present invention can calculate the expected focus position change based on the difference between the measured wavefront phase distribution after irradiation and the reference wavefront phase distribution, thereby realizing mutual check with the actual focus position change measured by the first measuring device (laser focus analyzer). BRIEF DESCRIPTION OF THE DRAWINGS
[0043] Figure 1 A schematic diagram of the optical paths of a high-power laser and a low-power laser in an embodiment of a comprehensive measurement system for thermal optical properties of a high-power laser optical lens of the present invention;
[0044] Figure 2 It is a schematic structural diagram of an embodiment of the present invention.
[0045] The reference numerals are as follows: 01, high-power laser optical lens;
[0046] 1. High-power laser light source; 2. Low-power laser light source; 3. First rotating high-reflection mirror; 4. Second rotating high-reflection mirror; 5. First measuring device; 51. Laser focus analyzer; 52. Beam absorber; 6. Second measuring device. DETAILED DESCRIPTION
[0047] The present invention will be further described below in conjunction with the accompanying drawings and exemplary embodiments.
[0048] Reference Figure 1 , Figure 2 The comprehensive measurement system of thermal optical characteristics of high-power laser optical lens includes a laser light source, a first rotating high-reflection mirror 3, a second rotating high-reflection mirror 4, a first measuring device 5, a second measuring device 6, and a control computer.
[0049] Reference Figure 1 Point X and point Y are sequentially arranged on the optical path of the laser light source along its transmission direction. The optical path of the laser light source is divided into a first detection optical path and a second detection optical path at point Y. The first detection optical path and the second detection optical path are respectively provided with a first measuring device 5 and a second measuring device 6; the high-power laser optical lens 01 to be measured is arranged on the optical path of the laser light source and is located between point X and point Y; a first rotating high-reflection mirror 3 is arranged at point X, and a second rotating high-reflection mirror 4 is arranged at point Y.
[0050] The laser light source comprises a high-power laser light source 1 and a low-power laser light source 2, whose outgoing light paths are perpendicular to each other and intersect at point X. The high-power laser light source 1 and the low-power laser light source 2 are used to output high-power laser and low-power laser respectively. The high-power laser light source 1 and the low-power laser light source 2 are collimated laser light sources of the same wavelength, so as to ensure the consistency of wavefront distortion, optical element material response, focal position, and synchronization and accuracy of system measurement.
[0051] The first measuring device 5 is used to measure the reference focal position and focal position of the high-power laser optical lens 01, or to absorb high-power laser; the second measuring device 6 is used to measure the reference wavefront phase distribution and the wavefront phase distribution after irradiation of the high-power laser optical lens 01.
[0052] The first measuring device 5 is a laser focus analyzer 51 and a beam absorber 52 that can be switched with each other; the laser focus analyzer 51 and the beam absorber 52 are respectively connected to a control computer, and the control computer is used to control the laser focus analyzer 51 and the beam absorber 52 and obtain the measured data in real time. The second measuring device 6 is a Shack-Hartmann wavefront sensor, and a phase measuring instrument such as a four-wave shearing interferometer, a four-step phase shift measuring instrument, etc. can also be used.
[0053] The first rotatable high-reflection mirror 3 is provided with a position 1A and a position 1B, and the second rotatable high-reflection mirror 4 is provided with a position 2A and a position 2B.
[0054] When the first rotating high-reflection mirror 3 is in position 1A, the low-power laser light source 2 is turned on and the high-power laser light source 1 is turned off, and the first rotating high-reflection mirror 3 is used to guide the low-power laser through the high-power laser optical lens 01 to point Y; the second rotating high-reflection mirror 4 is in position 2A, used to guide the laser at point Y to the second measuring device 6 on the second detection optical path; or, the second rotating high-reflection mirror 4 is in position 2B, used to transmit the laser at point Y to the first measuring device 5 on the first detection optical path.
[0055] When the first rotatable high-reflection mirror 3 is in position 1B, the high-power laser light source 1 is turned on and the low-power laser light source 2 is turned off. The first rotatable high-reflection mirror 3 is used to allow the high-power laser to pass through point X and then through the high-power laser optical lens 01 to be measured to point Y. The second rotatable high-reflection mirror 4 is in position 2B, and is used to transmit the laser at point Y to the first measuring device 5 on the first detection optical path.
[0056] The first rotatable high-reflective mirror 3 and the second rotatable high-reflective mirror 4 are both provided with a rotation driving mechanism, and the input end of each rotation driving mechanism is connected to a control computer to achieve fast and stable switching.
[0057] Position sensors are provided at positions 1A, 1B, 2A and 2B, and the output end of each position sensor is connected to the control computer; the high-power laser light source 1 and the low-power laser light source 2 are provided with electric control devices, and the input end of each electric control device is connected to the control computer; the signal of the position sensor will be transmitted to the control system to ensure that only after the first rotating high-reflective mirror 3 and / or the second rotating high-reflective mirror 4 are fully in place, the control computer sends a signal to the corresponding electric control device to allow the high-power laser light source 1 or the low-power laser light source 2 to be turned on.
[0058] Positioning devices are provided at both the 1A position and the 2A position, so as to ensure the accuracy and consistency when the first rotating high-reflective mirror 3 is reset to the 1A position and the second rotating high-reflective mirror 4 is reset to the 2A position each time.
[0059] The comprehensive measurement system for the thermal optical characteristics of the high-power laser optical lens 01 of the present invention is provided with a focusing optical lens measurement mode and a beam expansion / contraction collimation lens measurement mode. In the focusing optical lens measurement mode, the high-power laser optical lens 01 to be measured is a focusing lens, and the first measurement device 5 is switched to a laser focus analyzer 51 to measure the reference focus position and the focus position of the high-power laser optical lens 01; in the beam expansion / contraction collimation lens measurement mode, the high-power laser optical lens 01 to be measured is a beam expansion collimation lens or a beam reduction collimation lens, and the first measurement device 5 is switched to a beam absorber 52 to absorb the high-power laser.
[0060] The functions of controlling the computer are as follows:
[0061] (1) by rotating the driving mechanism, the first rotating high-reflective mirror 3 and the second rotating high-reflective mirror 4 are quickly switched between different positions (1A, 1B, 2A, 2B); and by reading the signal of the position sensor, it is ensured that the first rotating high-reflective mirror 3 and the second rotating high-reflective mirror 4 have reached the target position, and the electric control device of the corresponding light source is triggered to send a signal;
[0062] (2) It is used to control the switch of the high-power laser light source 1 and the low-power laser light source 2, and only after confirming that the corresponding high-reflection mirror is switched into place, it sends a start signal to the corresponding light source to ensure the synchronization and safety of the measurement;
[0063] (3) According to the measurement mode, the startup and switching of the first measuring device 5 (laser focus analyzer 51 or beam absorber 52) is controlled to collect the focus position data in real time, and the startup and data collection of the second measuring device 6 are synchronously controlled to obtain the data of the reference wavefront phase distribution and the wavefront phase distribution after irradiation.
[0064] Thermo-optical properties of high-power laser optical lenses refer to the changes in the optical performance of the lens due to thermal effects under high-power laser irradiation, mainly including thermally induced wavefront distortion, thermal lens effect, thermal drift, thermal radiation loss, thermal stress effect, transmittance change, material refractive index change and focus drift. The purpose of measuring the thermo-optical properties of high-power laser optical lenses is to:
[0065] (1) Evaluate thermally induced wavefront distortion: Understand how the wavefront phase of a high-power laser optical lens changes under high-power laser irradiation;
[0066] (2) Measurement of focus position drift: Evaluation of the axial and lateral changes in the focus position of the high-power laser optical lens after high-power laser irradiation;
[0067] (3) Analyze the change in optical path: Based on the change in wavefront phase distribution, the difference in optical path is calculated and further cross-checked with focus drift.
[0068] (4) Ensure the thermal stability of the lens: Verify the stability of the optical performance of the lens under high-power laser conditions through thermal optical property measurements.
[0069] The comprehensive measurement method of the thermal optical characteristics of a high-power laser optical lens adopts the comprehensive measurement system of the thermal optical characteristics of the high-power laser optical lens, and comprises the following steps:
[0070] Step 1: If the high-power laser optical lens 01 to be measured is a focusing optical lens, the control computer switches the first measuring device 5 to the laser focus analyzer 51, and then performs steps 2 to 6 in sequence;
[0071] If the high-power laser optical lens 01 to be measured is a beam expansion collimator lens or a beam reduction collimator lens, after the control computer switches the first measuring device 5 to the beam absorber 52, steps 3 to 5 are performed in sequence, and then the comprehensive measurement of the thermal optical characteristics of the high-power laser optical lens 01 is directly completed;
[0072] Step 2, after the control computer controls the two rotating drive mechanisms to respectively make the first rotating high-reflection mirror 3 at the 1A position and the second rotating high-reflection mirror 4 at the 2B position, the control computer receives the in-position signals of the position sensors at the 1A position and the 2B position, and then sends a start signal to the electric control device of the low-power laser light source 2 to synchronously start the low-power laser light source 2;
[0073] The control computer controls the laser focus analyzer 51 to measure the reference focus position of the high-power laser optical lens 01, and the control computer turns off the low-power laser light source 2 after the measurement is completed;
[0074] Step 3, after the control computer controls the first rotating high-reflective mirror 3 to be in the 1A position and the second rotating high-reflective mirror 4 to be switched to the 2A position, the control computer receives the in-position signal of the position sensor at the 2A position, and then sends a start signal to the electric control device of the low-power laser light source 2 to synchronously start the low-power laser light source 2;
[0075] The control computer measures the reference wavefront phase distribution of the high-power laser optical lens 01 through the second measuring device 6 (Shack-Hartmann wavefront sensor);
[0076] After the measurement is completed, the control computer turns off the low-power laser light source 2, and controls the two rotation drive mechanisms through the control computer to switch the first rotating high-reflection mirror 3 and the second rotating high-reflection mirror 4 to the 1B position and the 2B position respectively;
[0077] Step 4, the control computer receives the in-position signals of the position sensors at the 1B position and the 2B position, and then sends a start signal to the electric control device of the high-power laser light source 1, turns on the high-power laser light source 1, and passes light for at least half an hour. During this period, the control computer controls the laser focus analyzer 51 to measure the focal position of the high-power laser optical lens 01, measures multiple times and records the measurement results, and takes the average value of multiple measurements as the final focal position, or controls the beam absorber 52 to absorb the high-power laser;
[0078] Step 5: After the measurement is completed, the high-power laser light source 1 is quickly turned off by the control computer, and the two rotating drive mechanisms are controlled to quickly switch the first rotating high-reflection mirror 3 and the second rotating high-reflection mirror 4 to the 1A position and the 2A position respectively. The control computer receives the in-position signals of the position sensors at the 1A position and the 2A position, and then sends a start signal to the electric control device of the low-power laser light source 2 to synchronously start the low-power laser light source 2. The control computer measures the wavefront phase distribution of the high-power laser optical lens 01 after irradiation through the second measuring device 6;
[0079] Step 6: The total wavefront phase change δw(r) will cause the high-power laser to produce a total optical path change Λ(r) during the focusing process, thereby causing a focus position change; in the wavefront phase measurement, the focus position change can be quantitatively predicted by converting the phase change into an optical path difference; this method can be cross-checked with the measurement results of the laser focus analyzer to verify the accuracy and reliability of the wavefront measurement;
[0080] The total optical path change Λ(r) of the optical system caused by high-power laser is:
[0081] Λ(r)=n0L+[Δn f (r)]L+[Δn S (r)]L+n0[ΔL(r)]
[0082] In the above formula, n0 is the refractive index of the material at a constant temperature, L is the length of the optical element, and Δn T (r) is the thermal shift of the refractive index, Δn S (r) is the displacement of the refractive index caused by stress, and ΔL(r) is the displacement of the optical element length caused by thermal expansion;
[0083] The total wavefront phase change δw(r) of the optical system caused by high-power laser is:
[0084]
[0085] Using the corresponding relationship between the total wavefront phase change δw(r) and the total optical path change Λ(r), the expected focus position change Δz is calculated:
[0086]
[0087] Based on the above formula, the expected focus position change Δz is calculated according to the difference between the wavefront phase distribution after irradiation obtained in step 5 and the reference wavefront phase distribution obtained in step 3, and compared with the difference between the reference focus position obtained in step 2 and the focus position obtained in step 4, so as to complete the comprehensive measurement of the thermal optical characteristics of the high-power laser optical lens 01;
[0088] Specifically:
[0089] Step 6.1, subtract the wavefront phase distribution after irradiation obtained in step 5 from the reference wavefront phase distribution obtained in step 3 to obtain the total wavefront phase change δw(r), and then calculate the expected focus position change Δz based on the total wavefront phase change δw(r):
[0090]
[0091] λ is the wavelength of the high-power laser;
[0092] Step 6.2, subtract the reference focal position obtained in step 2 from the focal position obtained in step 4 to obtain the actual focal position change Δz′, and then use the root mean square error (RMSE) or percentage error to evaluate the matching degree between the expected focal position change Δz and the actual focal position change Δz′ to complete the comprehensive measurement of the thermal optical properties of the high-power laser optical lens 01.
Claims
1. A comprehensive measurement system for thermal optical properties of high-power laser optical lenses, characterized by: It comprises a laser light source, a first rotating high-reflection mirror (3), a second rotating high-reflection mirror (4) and a control computer; Point X and point Y are sequentially arranged on the optical path of the laser light source along its transmission direction; the optical path of the laser light source is divided into a first detection optical path and a second detection optical path at point Y; the first detection optical path and the second detection optical path are respectively provided with a first measuring device (5) and a second measuring device (6); the high-power laser optical lens (01) to be measured is arranged on the optical path of the laser light source and is located between point X and point Y; the first rotating high-reflection mirror (3) is arranged at point X, and the second rotating high-reflection mirror (4) is arranged at point Y; The laser light source comprises a high-power laser light source (1) and a low-power laser light source (2), the emission light paths of which are perpendicular to each other and intersect at the point X, the high-power laser light source (1) and the low-power laser light source (2) being used to output high-power laser and low-power laser respectively; The first measuring device (5) is used to measure the reference focal position and focal position of the high-power laser optical lens (01), or to absorb the high-power laser; the second measuring device (6) is used to measure the reference wavefront phase distribution and the wavefront phase distribution after irradiation of the high-power laser optical lens (01); The first rotating high-reflective mirror (3) is provided with a 1A position and a 1B position, and the second rotating high-reflective mirror (4) is provided with a 2A position and a 2B position; When the first rotating high-reflection mirror (3) is in position 1A, the low-power laser light source (2) is turned on, the high-power laser light source (1) is turned off, and the first rotating high-reflection mirror (3) is used to guide the low-power laser to pass through the high-power laser optical lens (01) to point Y; the second rotating high-reflection mirror (4) is in position 2A, used to guide the laser at point Y to the second measuring device (6) on the second detection optical path; or, the second rotating high-reflection mirror (4) is in position 2B, used to transmit the laser at point Y to the first measuring device (5) on the first detection optical path; When the first rotating high-reflection mirror (3) is in position 1B, the high-power laser light source (1) is turned on and the low-power laser light source (2) is turned off. The first rotating high-reflection mirror (3) is used to allow the high-power laser to pass through point X and then through the high-power laser optical lens (01) to be measured to point Y. The second rotating high-reflection mirror (4) is in position 2B and is used to allow the laser at point Y to be transmitted to the first measuring device (5) on the first detection optical path. The control computer is respectively connected to the high-power laser light source (1), the low-power laser light source (2), the first rotating high-reflection mirror (3), the second rotating high-reflection mirror (4), the first measuring device (5) and the second measuring device (6), and is used to control the switch of the high-power laser light source (1) and the low-power laser light source (2), the position switching of the first rotating high-reflection mirror (3) and the second rotating high-reflection mirror (4), and control the first measuring device (5) and the second measuring device (6), and obtain measured data in real time.
2. The comprehensive measurement system for thermal optical characteristics of a high-power laser optical lens according to claim 1, characterized in that: The first measuring device (5) is a laser focus analyzer (51) and a beam absorber (52) that are switchable with each other. The laser focus analyzer (51) is used to measure the reference focus position and the focus position of the high-power laser optical lens (01), and the beam absorber (52) is used to absorb the high-power laser. The laser focus analyzer (51) and the beam absorber (52) are respectively connected to the control computer, and the control computer is used to control the measurement process of the laser focus analyzer (51) and the beam absorber (52), and to obtain the measured data in real time.
3. The comprehensive measurement system for thermal optical characteristics of a high-power laser optical lens according to claim 1, characterized in that: The first rotating high-reflection mirror (3) and the second rotating high-reflection mirror (4) are both provided with a rotating drive mechanism, and the input end of each rotating drive mechanism is connected to the control computer; Position sensors are provided at the 1A position, the 1B position, the 2A position, and the 2B position, and the output end of each position sensor is connected to the control computer; The high-power laser light source (1) and the low-power laser light source (2) are both provided with an electric control device, and the input end of each electric control device is connected to the control computer.
4. The thermal optical characteristics comprehensive measurement system of the high-power laser optical lens according to claim 2 is characterized in that: Positioning devices are provided at the 1A position and the 2A position.
5. The comprehensive measurement system for thermal optical characteristics of a high-power laser optical lens according to claim 1, characterized in that: The high-power laser light source (1) and the low-power laser light source (2) are collimated laser light sources with the same wavelength; and the second measuring device (6) adopts a Shack-Hartmann wavefront sensor.
6. A comprehensive measurement method for the thermal optical characteristics of a high-power laser optical lens, characterized in that: The comprehensive measurement system for thermal optical characteristics of the high-power laser optical lens according to claim 1 comprises the following steps: Step 1: If the high-power laser optical lens (01) to be tested is a focusing optical lens, then execute step 2; if the high-power laser optical lens (01) to be tested is a beam expansion collimating lens or a beam reduction collimating lens, then execute step 3; Step 2: After the control computer sets the first rotating high-reflection mirror (3) to the 1A position and the second rotating high-reflection mirror (4) to the 2B position, the low-power laser light source (2) is turned on synchronously, and the first measuring device (5) measures the reference focal position of the high-power laser optical lens (01). After the measurement is completed, the low-power laser light source (2) is turned off; Step 3: After the control computer sets the first rotating high-reflection mirror (3) to the 1A position and the second rotating high-reflection mirror (4) to the 2A position, the low-power laser light source (2) is turned on synchronously, and the control computer measures the reference wavefront phase distribution of the high-power laser optical lens (01) through the second measuring device (6); after the measurement is completed, the low-power laser light source (2) is turned off, and the first rotating high-reflection mirror (3) and the second rotating high-reflection mirror (4) are switched to the 1B position and the 2B position respectively through the control computer; Step 4: The control computer turns on the high-power laser light source (1) and allows the light to pass for at least half an hour. During this period, the first measuring device (5) measures the focal position of the high-power laser optical lens (01). The measurement is repeated multiple times and the measurement results are recorded. The average value of the multiple measurements is taken as the final focal position, or the first measuring device (5) absorbs the high-power laser. Step 5: After the measurement is completed, the high-power laser light source (1) is quickly turned off by controlling the computer, the first rotating high-reflection mirror (3) and the second rotating high-reflection mirror (4) are quickly switched to the 1A position and the 2A position respectively, and the low-power laser light source (2) is simultaneously turned on. The control computer measures the wavefront phase distribution of the high-power laser optical lens (01) after irradiation through the second measuring device (6), thereby completing the comprehensive measurement of the thermal optical characteristics of the high-power laser optical lens (01).
7. The method for comprehensive measurement of thermal optical characteristics of a high-power laser optical lens according to claim 6, characterized in that: The step 1 is specifically as follows: If the high-power laser optical lens (01) is a focusing optical lens, the first measuring device (5) is switched to a laser focus analyzer (51), and then step 2 is performed; if the high-power laser optical lens (01) is a beam expansion collimator lens or a beam reduction collimator lens, the first measuring device (5) is switched to a beam absorber (52), and then step 3 is performed.
8. The method for comprehensive measurement of thermal optical characteristics of a high-power laser optical lens according to claim 6 or 7, characterized in that: In the step 1, if the high-power laser optical lens (01) to be tested is a focusing optical lens, then after the step 5 is completed, the step 6 is also included: The expected focus position change Δz is calculated based on the difference between the post-irradiation wavefront phase distribution obtained in step 5 and the reference wavefront phase distribution obtained in step 3, and compared with the difference between the reference focus position obtained in step 2 and the focus position obtained in step 4.
9. The method for comprehensive measurement of thermal optical characteristics of a high-power laser optical lens according to claim 8, characterized in that: The step 6 is specifically as follows: Step 6.1, subtract the wavefront phase distribution after irradiation obtained in step 5 from the reference wavefront phase distribution obtained in step 3 to obtain the total wavefront phase change δw(r), and then calculate the expected focus position change Δz based on the total wavefront phase change δw(r): Where λ is the wavelength of the high-power laser; Step 6.2, subtract the reference focal position obtained in step 2 from the focal position obtained in step 4 to obtain the actual focal position change Δz′, and then use the root mean square error or percentage error to evaluate the matching degree between the expected focal position change Δz and the actual focal position change Δz′, thereby completing the comprehensive measurement of the thermal optical characteristics of the high-power laser optical lens (01).
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