Light tracing optical characteristic scanning measurement device and method

Abstract

The invention relates to the technical field of optical detection, and provides a ray tracing optical characteristic scanning measurement device and method, and the device comprises a light source which is used for irradiating a collimated light beam; the light beam direction adjusting module is arranged in the irradiation direction of the light beam and used for adjusting the irradiation direction of the light beam; the light beam pointing measurement module is movably arranged in a light path of the incident light beam, the reflected light beam and the refracted light beam; and the light beam power measuring module is movably arranged in a light path of the incident light beam, the reflected light beam and the refracted light beam. According to the light tracing optical characteristic scanning and measuring device provided by the invention, the light beam direction measuring module and the light beam power measuring module can flexibly move into incident, reflection and refraction light paths, other matched equipment does not need to be switched or the position of a sample does not need to be greatly adjusted, and the space direction and power information of the light beam can be quickly obtained; and the measurement efficiency and precision are obviously improved.

Description

Technical Field

[0001] The present invention relates to the field of optical detection technology, and in particular to a ray tracing optical property scanning measurement device and method. Background Art

[0002] In the field of R&D and quality inspection of optical materials and components, accurate measurement of the reflection characteristics, refraction characteristics and light energy loss of the material surface is a key technical requirement. Traditional optical property measurement devices usually use spectrophotometers, ellipsometers or measurement systems based on multi-sensor combinations to obtain parameters such as reflectivity, transmittance and refractive index through time-sharing or light-sharing methods.

[0003] However, the existing methods have the following significant defects. In the prior art, the measurement of reflected and refracted light beams is aimed at optical materials and components with one or more flat end faces. For optical materials or components with complex morphologies, it is often impossible to effectively adjust the optical path or switch the detector, which not only makes the measurement process cumbersome and time-consuming, but also makes it difficult to achieve close correlation analysis of incident, reflected, and refracted light beams. For example, some systems require manual adjustment of the sample angle or replacement of the detection module, which is easy to introduce human errors and cannot obtain high-precision sample characteristic information. Summary of the invention

[0004] The present invention provides a ray tracing optical property scanning measurement device and method, which are used to solve the problems that the existing measurement of reflected and refracted light beams often requires independent light path design or physical switching of different detectors, resulting in a cumbersome and time-consuming measurement process.

[0005] The present invention provides a ray tracing optical property scanning measurement device, comprising: A light source, for emitting a collimated light beam; A beam orientation adjustment module is provided in the irradiation direction of the beam, and is used to adjust the irradiation direction of the beam to form an incident beam to irradiate the measurement object; wherein the incident beam is reflected by the measurement object to generate a reflected beam, and the incident beam is refracted by the measurement object to generate a refracted beam; a beam pointing measurement module, movably disposed in the optical paths of the incident beam, the reflected beam and the refracted beam, and used for measuring the pointing directions of the incident beam, the reflected beam and the refracted beam in an XYZ coordinate system; The beam power measurement module is movably arranged in the optical paths of the incident beam, the reflected beam and the refracted beam, and is used to measure the power of the incident beam, the reflected beam and the refracted beam.

[0006] According to a ray tracing optical property scanning measurement device provided by the present invention, the light beam pointing measurement module comprises: At least one array sensor is movably arranged in the optical paths of the incident light beam, the reflected light beam and the refracted light beam to determine the direction of the beam centroid through the relative coordinates of the beam centroid of at least one of the array sensors on the detection plane and the detection plane.

[0007] According to a ray tracing optical property scanning measurement device provided by the present invention, the beam pointing measurement module comprises: a target plate and a machine vision imaging mechanism; The target plate is movably arranged in the optical paths of the incident light beam, the reflected light beam and the refracted light beam, and the machine vision imaging mechanism is used to photograph the scattered-scattered light formed on the target plate to determine the direction of the center of mass of the light beam.

[0008] According to a ray tracing optical property scanning measurement device provided by the present invention, the light beam pointing measurement module comprises: a fluorescent target plate and a machine vision imaging mechanism; The fluorescent target plate is movably arranged in the optical paths of the incident light beam, the reflected light beam and the refracted light beam, and the machine vision imaging mechanism is used to photograph the fluorescence formed on the fluorescent target plate to determine the direction of the center of mass of the light beam.

[0009] According to a ray tracing optical property scanning measurement device provided by the present invention, the beam power measurement module comprises: The detector composed of one or more planar photodetectors is movably arranged in the optical path of the incident light beam, the reflected light beam and the refracted light beam to measure the power of the light beam when the light beam is incident at a fixed relative angle to the plane of the detector port. A more common situation is that the light beam is perpendicular to the plane of the detector port. When the detector is a trap detector composed of three planar photodetectors, the absorption efficiency of the detector is very high, and the power of the light beam reflected from the plane of the detector port has almost no effect on the measurement. When the detector is a planar photodetector, the plane of the photodetector is the port, and the light beam can be perpendicular to the plane of the photodetector, but the light beam can also be kept at a certain angle to the plane of the photodetector so that the light beam reflected from the planar photodetector is directed to an optical trap absorber or other irrelevant directions to avoid mutual reflection and affect the measurement.

[0010] According to a ray tracing optical characteristic scanning measurement device provided by the present invention, the beam power measurement module comprises: an integrating sphere and a photoelectric detector; The integrating sphere is provided with a light inlet, the detection end of the photodetector is located inside the integrating sphere, and the integrating sphere and the photodetector are integrally movably arranged in the optical paths of the incident light beam, the reflected light beam and the refracted light beam, so that after the light beam enters the light beam through the light inlet, the photodetector measures the power of the light beam.

[0011] According to a ray tracing optical property scanning measurement device provided by the present invention, the beam azimuth adjustment module comprises: a reflector, a rotation drive mechanism, an X-axis drive mechanism and a Y-axis drive mechanism; The reflector is arranged on the X-axis drive mechanism through the rotation drive mechanism, and the X-axis drive mechanism is arranged on the Y-axis drive mechanism; The rotation drive mechanism is used to drive the reflector to rotate along the X-axis and / or the Y-axis, the X-axis drive mechanism is used to drive the reflector to translate along the X-axis, and the Y-axis drive mechanism is used to drive the reflector to translate along the Y-axis.

[0012] According to a ray tracing optical property scanning measurement device provided by the present invention, the measurement object is arranged on a rotating platform, and a center locator is arranged on the rotating platform; the rotating platform is used to drive the measurement object to rotate; the center locator is used to set the rotation center of the measurement object and align it with the scanning coordinate system of the beam azimuth adjustment module; The ray tracing optical property scanning measuring device further comprises: a scanning control module, configured to adjust a local area of ​​the measurement object to be within the light beam incident range by rotating the rotating platform, and control the light beam orientation adjustment module to scan the local area; The data splicing module is connected to the beam pointing measurement module and the beam power measurement module for splicing a plurality of local scanning results into complete optical characteristic distribution data according to the rotation angle and position relationship.

[0013] According to a ray tracing optical characteristic scanning measurement device provided by the present invention, the ray tracing optical characteristic scanning measurement device further comprises: A symmetry detection module, used to identify whether the optical properties of the measured object are centrally symmetric; A center calibration module, used to automatically make the geometric center of the measured object coincide with the scanning center axis of the beam azimuth adjustment module when the measured object is centrally symmetrical; The scanning optimization controller is configured to control the beam orientation adjustment module to scan only a single symmetrical sector based on the symmetry detection result, and generate complete optical characteristic distribution data through a mirror mapping algorithm.

[0014] The present invention also provides a ray tracing optical property scanning measurement method, comprising: Place the object to be measured at the position to be detected; The incident beam is set by using the beam orientation adjustment module, and the positions of the refracted beam and the reflected beam are determined by scanning; Moving the beam pointing measurement module to the optical path of the incident beam, the refracted beam or the reflected beam, and using the beam pointing measurement module to measure the direction of the incident beam, the refracted beam or the reflected beam; Moving the beam power measurement module to the optical path of the incident beam, the refracted beam or the reflected beam to measure the power of the incident beam, the refracted beam or the reflected beam; The position of the incident beam is adjusted using the beam orientation adjustment module, the direction of the incident beam, the refracted beam or the reflected beam is measured again using the beam pointing measurement module, and the power of the incident beam, the refracted beam or the reflected beam is measured again using the beam power measurement module.

[0015] The light tracing optical property scanning measurement device provided by the present invention has a light beam pointing measurement module and a light beam power measurement module that can be flexibly moved to the incident, reflected and refracted light paths. The spatial pointing (XYZ coordinates) and power data of the light beam can be synchronously acquired without switching detection equipment or adjusting the sample position, which significantly improves the measurement efficiency and avoids the data inaccuracy problem caused by traditional time-sharing measurement. By directly measuring the original light path parameters of the incident, reflected and refracted light beams (rather than relying on indirect calculations or assumed models), the system errors introduced by light path separation, environmental interference or mechanical vibration are reduced, ensuring the accuracy of optical parameter detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the ray tracing optical property scanning measurement device provided by the present invention.

[0018] Figure 2 It is one of the schematic diagrams of the light beam orientation adjustment module provided by the present invention.

[0019] Figure 3 This is the second schematic diagram of the light beam orientation adjustment module provided by the present invention.

[0020] Figure 4 This is the third schematic diagram of the light beam orientation adjustment module provided by the present invention.

[0021] Figure 5 It is a schematic diagram of the beam power measurement module provided by the present invention.

[0022] Figure 6 It is a schematic diagram of the light beam orientation adjustment module provided by the present invention.

[0023] Figure 7 It is a schematic diagram of the light beam azimuth adjustment provided by the present invention.

[0024] Figure 8 It is a schematic flow chart of the ray tracing optical property scanning measurement method provided by the present invention.

[0025] Reference numerals: 1. Light source; 11. Incident light beam; 12. Reflected light beam; 13. Refracted light beam; 2. Beam azimuth adjustment module; 21. Reflector; 22. Rotation drive mechanism; 23. X-axis drive mechanism; 24. Y-axis drive mechanism; 3. Beam pointing measurement module; 31. Array sensor; 32. Target plate; 33. Machine vision imaging mechanism; 34. Fluorescent target plate; 4. Beam power measurement module; 41. Integrating sphere; 42. Light entrance; 5. Measurement object. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0027] The embodiment of the present invention provides a ray tracing optical property scanning measurement device, such as Figure 1 As shown, the ray tracing optical characteristic scanning measurement device comprises: a light source 1, a beam orientation adjustment module 2, a beam pointing measurement module 3 and a beam power measurement module 4. The light source 1 is used to irradiate a collimated light beam; the beam orientation adjustment module 2 is arranged in the irradiation direction of the light beam, and is used to adjust the irradiation direction of the light beam to form an incident light beam 11 to irradiate the measurement object 5; wherein the incident light beam 11 is reflected by the measurement object 5 to generate a reflected light beam 12, and the incident light beam 11 is refracted by the measurement object 5 to generate a refracted light beam 13; the beam pointing measurement module 3 is movably arranged in the optical path of the incident light beam 11, the reflected light beam 12 and the refracted light beam 13, and is used to measure the directions of the incident light beam 11, the reflected light beam 12 and the refracted light beam 13 in the XYZ coordinate system; the beam power measurement module 4 is movably arranged in the optical path of the incident light beam 11, the reflected light beam 12 and the refracted light beam 13, and is used to measure the power of the incident light beam 11, the reflected light beam 12 and the refracted light beam 13.

[0028] In this embodiment, the main function of the light source 1 is to emit a collimated light beam. The collimated light beam remains parallel during propagation. The light beam orientation adjustment module 2 is arranged on the irradiation path of the light beam, and its main function is to adjust the irradiation direction of the light beam. By adjusting, it can be ensured that the incident light beam 11 is accurately irradiated onto the object to be measured. When the incident light beam 11 irradiates the measuring object 5, two main optical phenomena will occur: reflection and refraction. The reflected light beam 12 is the part of the light directly reflected from the surface of the measuring object 5, and the refracted light beam 13 is the part of the light that changes direction due to the change in medium density when passing through the measuring object 5. The light beam pointing measurement module 3 can move along the optical path of the incident light beam 11, the reflected light beam 12 and the refracted light beam 13. The main task of the beam pointing measurement module is to measure the specific direction of these light beams in the XYZ three-dimensional coordinate system. The light beam power measurement module 4 can also be moved to the optical path of the incident light beam 11, the reflected light beam 12 and the refracted light beam 13. The function of the light beam power measurement module 4 is to measure the power of these light beams, that is, the intensity of light energy. Power measurement helps to understand the energy loss or gain of the light after passing through the measuring object 5.

[0029] When detection is required, the measurement object 5 is placed at the preset detection position of the device to ensure that the measurement object 5 is stable and accurately positioned. Start the manipulator control system to ensure that all modules (beam azimuth adjustment module 2, beam pointing measurement module 3, beam power measurement module 4) are in a controllable state. Use the manipulator to control the beam azimuth adjustment module 2 to accurately adjust the irradiation direction of the incident light beam 11 according to the measurement requirements. Adjust the pitch angle and azimuth angle of the light beam to ensure that the incident light beam 11 can accurately irradiate the specified area of ​​the measurement object 5.

[0030] The preliminary scan determines the approximate position of the outgoing beam (refracted beam 13) and the reflected beam 12, which can be achieved by observing the reflection and refraction of the beam on the measurement object 5 and using auxiliary equipment (such as a beam positioner). The manipulator moves the beam pointing measurement module 3 precisely to the optical path of the incident beam 11, the outgoing beam or the reflected beam 12. According to the measurement requirements, you can choose to measure the direction of the incident beam 11 first, and then measure the direction of the outgoing beam or the reflected beam 12. The manipulator moves the beam power measurement module 4 to the same optical path and replaces the beam pointing measurement module 3. Using the beam power measurement module 4, accurately measure and record the power value of the incident beam 11, the outgoing beam or the reflected beam 12. This step helps to evaluate the energy loss or gain of the light after passing through the measurement object 5.

[0031] According to the measurement requirements, the robot controls the beam orientation adjustment module 2 to adjust the position of the incident beam 11 (such as changing the irradiation point or the incident angle). The direction and power of the adjusted incident beam 11, the outgoing beam or the reflected beam 12 are measured again. This step can be performed multiple times to obtain the optical property distribution data under different conditions. During the entire measurement process, the robot control system ensures that all modules move accurately and stably, thereby improving the accuracy and reliability of the measurement.

[0032] Input the measured beam pointing and power data into a computer or data analysis software. Use the software to process and analyze the data to extract useful optical property information (such as refractive index, reflectivity, absorptivity, etc.). Based on the analysis results, output a measurement report or draw corresponding charts and curves for further research and application.

[0033] The light tracing optical property scanning measurement device provided by the present invention, the light beam pointing measurement module 3 and the light beam power measurement module 4 can be flexibly moved to the incident, reflected and refracted light paths, and the spatial pointing (XYZ coordinates) and power data of the light beam can be synchronously obtained without switching the detection equipment or adjusting the sample position, which significantly improves the measurement efficiency and avoids the data inaccuracy problem caused by traditional time-sharing measurement. By directly measuring the original light path parameters of the incident, reflected and refracted light beams 13 (rather than relying on indirect calculations or assumed models), the system errors introduced by light path separation, environmental interference or mechanical vibration are reduced, ensuring the accuracy of optical parameter detection.

[0034] It should be noted that the measuring object 5 can be of any shape, but the shape is relatively fixed in a measurement cycle and has a certain relative position in the XYZ coordinate system. Therefore, when the directions of the incident and outgoing light beams (refracted light beams) in the XYZ coordinate system are determined, the incident and outgoing positions of the incident and outgoing light beams can be derived from the shape and relative position of the measuring object 5.

[0035] In some embodiments, Figure 2 As shown, the beam pointing measurement module 3 includes: at least one array sensor 31. An array sensor 31 is controlled to move by a manipulator and is movably arranged in the optical paths of the incident light beam 11, the reflected light beam 12 and the refracted light beam 13, so as to determine the direction of the beam centroid through the relative coordinates of the beam centroid of at least one array sensor 31 on the detection plane and the detection plane.

[0036] In the actual detection process, a robot can be used to move an array sensor 31 to the optical path of the incident light beam 11, the reflected light beam 12 or the refracted light beam 13. In order to accurately measure the direction of the light beam, an array sensor 31 needs to be set at different positions to measure the light beam power density distribution.

[0037] An array sensor 31 measures the beam power density distribution at each position. The array sensor 31 can capture the intensity distribution of the beam on the detection plane, thereby determining the position of the beam centroid. Based on the measured beam power density distribution, the coordinates of the beam centroid at each position on the detection plane of the array sensor 31 are calculated.

[0038] During the calculation process, the coordinates of the beam centroid at each position on the detection plane of the array sensor 31 are first calculated. Then, based on the coordinates of the beam centroid measured by one of the array sensors 31 on the detection plane of the array sensor 31 and the relative coordinates of the array sensor 31 as a whole (two sets of data), the coordinates of the beam centroid on the array sensor 31 relative to the whole (A1, B1, C1) can be obtained. Then, based on the coordinates of the beam centroid measured by another array sensor 31 on the detection plane of the array sensor 31 and the relative coordinates of the array sensor 31 as a whole (two sets of data), the coordinates of the beam centroid on the array sensor 31 relative to the whole (A2, B2, C2) can be obtained. Based on the fact that the detection plane of the array sensor 31 and the overall position of the array sensor 31 are always consistent and the beam centroids measured at multiple positions are on the same straight line (two conditions), the direction of the beam centroid can be calculated.

[0039] In some embodiments, Figure 3 As shown, the beam pointing measurement module 3 includes: a target plate 32 and a machine vision imaging mechanism 33; the target plate 32 is movably arranged in the optical path of the incident light beam 11, the reflected light beam 12 and the refracted light beam 13, and the machine vision imaging mechanism 33 is used to shoot the scattered-scattered light formed on the target plate 32 to determine the direction of the center of mass of the light beam.

[0040] In this embodiment, the target plate 32 should be designed with a specific scattering pattern or mark so that the machine vision imaging mechanism 33 can accurately capture and identify it. The machine vision imaging mechanism 33 (such as a camera) should be calibrated in advance to ensure that the image it captures can accurately reflect the distribution of scattered light on the target plate 32. The manipulator moves the target plate 32 into the light path of the incident light beam 11, the reflected light beam 12 or the refracted light beam 13. The position of the target plate 32 should ensure that the light beam can irradiate its surface and form recognizable scattered light. The machine vision imaging mechanism 33 captures the scattered light image formed on the target plate 32. Since the light beam irradiated onto the target plate 32 will cause scattering, a specific light spot or light band will be displayed in the image.

[0041] The image of the scattered light captured is analyzed using image processing algorithms or software. By identifying the light spots or light bands in the image, the position of the beam centroid can be determined. The beam centroid is usually the center point of the scattered light intensity distribution, which can be obtained by calculating the centroid coordinates of the light spots or light bands.

[0042] The direction of the beam centroid can be determined based on the scattered light images taken at multiple different positions (at least two) and the calculated beam centroid coordinates. Since the target plate 32 is movable, multiple measurements can be performed at different positions to improve the accuracy of the beam pointing measurement.

[0043] When calculating the direction of the beam centroid, it is necessary to consider factors such as the moving distance and direction of the target plate 32, and the shooting angle and resolution of the machine vision imaging mechanism 33. Through appropriate algorithms and mathematical models, the direction of the beam in the XYZ three-dimensional coordinate system can be calculated.

[0044] The above steps can be repeated as needed to obtain more data and verify. The accuracy and reliability of the beam pointing measurement can be further improved through multiple measurements and calculations. The calculated beam pointing data is output to a computer or data analysis software for further analysis and application.

[0045] In some embodiments, Figure 4 As shown, the beam pointing measurement module 3 includes: a fluorescent target plate 34 and a machine vision imaging mechanism 33; the fluorescent target plate 34 is movably arranged in the optical path of the incident light beam 11, the reflected light beam 12 and the refracted light beam 13, and the machine vision imaging mechanism 33 is used to shoot the fluorescence formed on the fluorescent target plate 34 to determine the direction of the center of mass of the light beam.

[0046] During the detection process, the fluorescent target plate 34 can be moved to the optical path of the incident light beam 11, the reflected light beam 12 or the refracted light beam 13 by a mechanical device. The position of the fluorescent target plate 34 should ensure that the light beam can accurately irradiate its surface and excite the fluorescent material to produce fluorescence. The machine vision imaging mechanism 33 captures the fluorescent image formed on the fluorescent target plate 34. Since the fluorescent material emits fluorescence of a specific wavelength when irradiated by the light beam, a clear fluorescent area will be displayed in the image. The captured fluorescent image is analyzed by an image processing algorithm or software. By identifying the fluorescent area in the image, the position of the centroid of the beam can be determined. The centroid of the beam is usually the center point of the fluorescence intensity distribution, which can be obtained by calculating the centroid coordinates of the fluorescent area. According to the fluorescent images captured at multiple different positions and the calculated beam centroid coordinates, the direction of the beam centroid can be determined. Since the fluorescent target plate 34 is movable, multiple measurements can be performed at different positions to improve the accuracy of the beam pointing measurement. When calculating the direction of the beam centroid, factors such as the moving distance and direction of the fluorescent target plate 34 and the shooting angle and resolution of the machine vision imaging mechanism 33 need to be considered. Through appropriate algorithms and mathematical models, the direction of the light beam in three-dimensional space can be calculated. Finally, the calculated beam pointing data can be output to a computer or data analysis software for further analysis and application. These data can be used for optical system calibration, beam quality evaluation, and performance testing of optical components.

[0047] In one example, the beam power measurement module 4 includes a planar photodetector that is movably disposed in the optical paths of the incident beam 11, the reflected beam 12, and the refracted beam 13 to measure the power of the beam when the beam is incident perpendicularly to the planar photodetector.

[0048] During the inspection process, a mechanical device moves the planar photodetector into the path of the light beam to be measured. It is important to ensure that the detector surface is perpendicular to the incident light beam to maximize the received beam energy and reduce measurement errors.

[0049] In some cases, it may be necessary to adjust the position of the beam to ensure that it accurately illuminates the active area of ​​the planar photodetector.

[0050] When a light beam is incident vertically on a planar photodetector, the detector absorbs the energy of the beam and converts it into an electrical signal. This electrical signal is proportional to the power of the beam and can be measured and recorded by the circuit inside the detector or by an external data acquisition system.

[0051] In one example, if Figure 5As shown, the beam power measurement module 4 includes: an integrating sphere 41 and a photodetector. The integrating sphere 41 is provided with a light inlet 42, and the detection end of the photodetector is located in the integrating sphere 41. The integrating sphere 41 and the photodetector are integrally movably arranged in the optical path of the incident light beam 11, the reflected light beam 12, and the refracted light beam 13, so that after the light inlet 42 enters the light beam, the photodetector measures the power of the light beam.

[0052] In this embodiment, the integrating sphere 41 is a hollow sphere with a high reflectivity material coated on the inner wall, which is usually used in optical measurements to ensure that the light is reflected multiple times and evenly distributed in the sphere. After multiple reflections, the light entering the integrating sphere 41 will form a uniform illumination distribution in the sphere, so that no matter what the initial direction of the light beam is, as long as it can enter the integrating sphere 41, it will eventually be evenly distributed in the sphere.

[0053] Since the light is reflected multiple times in the integrating sphere 41, the photodetector does not need to maintain a strict perpendicular relationship with the light beam. This feature greatly reduces the difficulty and complexity of the measurement. The photodetector is a device that converts an optical signal into an electrical signal. In this example, it is used to measure the power of the light beam after being homogenized by the integrating sphere 41. Since the integrating sphere 41 has ensured the uniform distribution of the light, the photodetector can accurately reflect the average power of the entire light beam.

[0054] The integrating sphere 41 and the photodetector can be moved by a manipulator and other components, and can be flexibly moved to the optical paths of the incident light beam 11, the reflected light beam 12, and the refracted light beam 13. This design enables the measurement system to be applicable to different optical experiments and measurement requirements, thereby improving the versatility and flexibility of the system.

[0055] In some embodiments, Figure 6 and Figure 7 As shown, the beam azimuth adjustment module 2 includes: a reflector 21, a rotation drive mechanism 22, an X-axis drive mechanism 23 and a Y-axis drive mechanism 24; the reflector 21 is arranged on the X-axis drive mechanism 23 through the rotation drive mechanism 22, and the X-axis drive mechanism 23 is arranged on the Y-axis drive mechanism 24; the rotation drive mechanism 22 is used to drive the reflector 21 to rotate along the X-axis and / or the Y-axis, the X-axis drive mechanism 23 is used to drive the reflector 21 to translate along the X-axis, and the Y-axis drive mechanism 24 is used to drive the reflector 21 to translate along the Y-axis.

[0056] In this example, the reflector 21 is movable and rotatable so as to accurately guide the light beam as required. The rotation drive mechanism 22 is responsible for driving the reflector 21 to rotate along the X-axis and / or the Y-axis. This rotation capability enables the reflector 21 to adjust the pitch angle and deflection angle of the light beam, thereby achieving precise control of the direction of the light beam. The X-axis drive mechanism 23 is used to drive the reflector 21 (through the rotation drive mechanism) to translate along the X-axis direction. The Y-axis drive mechanism 24 is responsible for driving the entire X-axis drive mechanism 23 (including the reflector and the rotation drive mechanism) to translate along the Y-axis direction.

[0057] By combining the reflector 21, the rotation drive mechanism 22, the X-axis drive mechanism 23 and the Y-axis drive mechanism 24, the beam azimuth adjustment module 2 realizes all-round control of the beam direction. Whether it is adjusting the pitch angle or deflection angle of the beam, or moving the beam in the horizontal or vertical direction, it can be easily achieved through this module.

[0058] In some embodiments, Figure 1 As shown, the measuring object 5 is arranged on a rotating platform, and a center locator is arranged on the rotating platform; the rotating platform is used to drive the measuring object 5 to rotate; the center locator is used to set the rotation center of the measuring object 5 and align it with the scanning coordinate system of the beam azimuth adjustment module 2; the ray tracing optical characteristic scanning measurement device also includes: a scanning control module, configured to adjust the local area of ​​the measuring object 5 to the incident range of the beam through the rotation of the rotating platform, and control the beam azimuth adjustment module 2 to scan the local area; a data splicing module, which is communicated with the beam pointing measurement module 3 and the beam power measurement module 4, and is used to splice multiple local scanning results into complete optical characteristic distribution data according to the rotation angle and position relationship.

[0059] In this embodiment, the rotating platform is used to drive the measurement object 5 to rotate so as to scan various local areas of the measurement object 5. This rotation capability allows the measurement to cover the entire object, not just a part of it. A center locator is provided on the rotating platform to set the rotation center of the measurement object 5. The scanning control module is responsible for coordinating the entire scanning process. It first adjusts the local area of ​​the measurement object 5 to the incident range of the light beam by rotating the rotating platform, and then controls the light beam azimuth adjustment module 2 to accurately scan the local area. Through automated control, the scanning control module improves the efficiency and accuracy of the scanning. The data splicing module is connected to the light beam pointing measurement module 3 and the light beam power measurement module 4 in communication, and is responsible for splicing multiple local scanning results into complete optical property distribution data according to the rotation angle and position relationship. After data splicing, the system will generate a data set containing the complete optical property distribution of the measurement object 5.

[0060] In some embodiments, Figure 1As shown, the ray tracing optical property scanning measurement device further includes: a symmetry detection module, used to identify whether the optical property of the measurement object 5 is centrally symmetrical. A center calibration module, used to automatically coincide the geometric center of the measurement object 5 with the scanning center axis of the beam orientation adjustment module 2 when the measurement object 5 is centrally symmetrical; and a scanning optimization controller, configured to control the beam orientation adjustment module 2 to scan only a single symmetrical sector based on the symmetry detection result, and generate complete optical property distribution data through a mirror mapping algorithm.

[0061] In this embodiment, the symmetry detection module can significantly reduce unnecessary scanning areas by quickly identifying the symmetry of the measurement object 5, thereby improving the scanning efficiency. When the measurement object 5 is identified as centrally symmetrical, the center calibration module will automatically coincide the geometric center of the measurement object 5 with the scanning center axis of the beam azimuth adjustment module 2. Through center calibration, the scanning error caused by the misalignment of the measurement object 5 with the scanning center axis can be eliminated, thereby improving the accuracy of the measurement. Based on the symmetry detection result, the scanning optimization controller controls the beam azimuth adjustment module 2 to scan only a single symmetrical sector. Then, the scanning optimization controller generates complete optical property distribution data using a mirror mapping algorithm. Among them, the mirror mapping algorithm is a mathematical algorithm for inferring the optical property distribution of the entire measurement object 5 based on the scanning results of a single symmetrical sector. Since the measurement object 5 has central symmetry, the data of the missing part can be generated by mirror mapping.

[0062] By scanning only a single symmetrical sector and using a mirror mapping algorithm to generate complete data, the scan optimization controller can significantly reduce the scan time and data processing volume. This not only improves scanning efficiency, but also reduces the demand on computing resources.

[0063] The embodiment of the present invention also provides a ray tracing optical property scanning measurement method, such as Figure 8 As shown, the method comprises the following steps: Step S810: placing the measurement object at a position to be detected.

[0064] Step S820: using the beam orientation adjustment module to set the incident beam, and scanning to determine the positions of the refracted beam and the reflected beam.

[0065] Step S830: moving the beam pointing measurement module to the optical path of the incident beam, the refracted beam or the reflected beam, and using the beam pointing measurement module to measure the pointing direction of the incident beam, the refracted beam or the reflected beam.

[0066] Step S840: moving the beam power measurement module to the optical path of the incident beam, the refracted beam, or the reflected beam to measure the power of the incident beam, the refracted beam, or the reflected beam.

[0067] Step S850: Use the beam azimuth adjustment module to adjust the position of the incident beam, use the beam pointing measurement module to measure the direction of the incident beam, refracted beam or reflected beam again, and use the beam power measurement module to measure the power of the incident beam, refracted beam or reflected beam again.

[0068] like Figure 1 As shown, when detection is required, the measurement object 5 is placed at the preset detection position of the device to ensure that the measurement object 5 is stable and accurately positioned. The manipulator control system is started to ensure that all modules (beam azimuth adjustment module 2, beam pointing measurement module 3, beam power measurement module 4) are in a controllable state. The manipulator is used to control the beam azimuth adjustment module 2 to accurately adjust the irradiation direction of the incident light beam 11 according to the measurement requirements. The pitch angle and azimuth angle of the light beam are adjusted to ensure that the incident light beam 11 can accurately irradiate the specified area of ​​the measurement object 5.

[0069] The preliminary scan determines the approximate position of the outgoing beam (refracted beam 13) and the reflected beam 12, which can be achieved by observing the reflection and refraction of the beam on the measurement object 5 and using auxiliary equipment (such as a beam positioner). The manipulator moves the beam pointing measurement module 3 precisely to the optical path of the incident beam 11, the outgoing beam or the reflected beam 12. According to the measurement requirements, you can choose to measure the direction of the incident beam 11 first, and then measure the direction of the outgoing beam or the reflected beam 12. The manipulator moves the beam power measurement module 4 to the same optical path and replaces the beam pointing measurement module 3. Using the beam power measurement module 4, accurately measure and record the power value of the incident beam 11, the outgoing beam or the reflected beam 12. This step helps to evaluate the energy loss or gain of the light after passing through the measurement object 5.

[0070] According to the measurement requirements, the robot controls the beam orientation adjustment module 2 to adjust the position of the incident beam 11 (such as changing the irradiation point or the incident angle). The direction and power of the adjusted incident beam 11, the outgoing beam or the reflected beam 12 are measured again. This step can be performed multiple times to obtain the optical property distribution data under different conditions. During the entire measurement process, the robot control system ensures that all modules move accurately and stably, thereby improving the accuracy and reliability of the measurement.

[0071] Input the measured beam pointing and power data into a computer or data analysis software. Use the software to process and analyze the data to extract useful optical property information (such as refractive index, reflectivity, absorptivity, etc.). Based on the analysis results, output a measurement report or draw corresponding charts and curves for further research and application.

[0072] In the ray tracing optical property scanning measurement method provided by the present invention, the beam pointing measurement module 3 and the beam power measurement module 4 can be flexibly moved to the incident, reflected and refracted light paths, and the spatial pointing (XYZ coordinates) and power data of the beam can be synchronously obtained without switching the detection equipment or adjusting the sample position, which significantly improves the measurement efficiency and avoids the data inaccuracy problem caused by traditional time-sharing measurement. By directly measuring the original optical path parameters of the incident, reflected and refracted light beams 13 (rather than relying on indirect calculations or assumed models), the system errors introduced by optical path separation, environmental interference or mechanical vibration are reduced, ensuring the accuracy of optical parameter detection.

[0073] In order to further reduce the time required for the beam pointing measurement module and the beam power measurement module to move between the incident, reflected and refracted optical paths, the beam pointing measurement module and the beam power measurement module that has undergone relative optical power responsivity calibration can be independently set in the incident, reflected and refracted optical paths, respectively, and only a quick cut-in and move-out operation is required for the beam power measurement module in the incident optical path. Although the cost is increased, time is saved and efficiency is improved.

[0074] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A ray tracing optical property scanning measurement device, characterized in that: include: A light source, for emitting a collimated light beam; A beam orientation adjustment module is provided in the irradiation direction of the beam, and is used to adjust the irradiation direction of the beam to form an incident beam to irradiate the measurement object; wherein the incident beam is reflected by the measurement object to generate a reflected beam, and the incident beam is refracted by the measurement object to generate a refracted beam; a beam pointing measurement module, movably disposed in the optical paths of the incident beam, the reflected beam and the refracted beam, and used for measuring the pointing directions of the incident beam, the reflected beam and the refracted beam in an XYZ coordinate system; The beam power measurement module is movably arranged in the optical paths of the incident beam, the reflected beam and the refracted beam, and is used to measure the power of the incident beam, the reflected beam and the refracted beam.

2. The ray tracing optical property scanning measurement device according to claim 1, characterized in that: The beam pointing measurement module comprises: At least one array sensor is movably arranged in the optical paths of the incident light beam, the reflected light beam and the refracted light beam to determine the direction of the beam centroid through the relative coordinates of the beam centroid of at least one of the array sensors on the detection plane and the detection plane.

3. The ray tracing optical property scanning measurement device according to claim 1, characterized in that: The beam pointing measurement module includes: a target plate and a machine vision imaging mechanism; The target plate is movably arranged in the optical paths of the incident light beam, the reflected light beam and the refracted light beam, and the machine vision imaging mechanism is used to photograph the scattered-scattered light formed on the target plate to determine the direction of the center of mass of the light beam.

4. The ray tracing optical property scanning measurement device according to claim 1, characterized in that: The beam pointing measurement module includes: a fluorescent target plate and a machine vision imaging mechanism; The fluorescent target plate is movably arranged in the optical paths of the incident light beam, the reflected light beam and the refracted light beam, and the machine vision imaging mechanism is used to photograph the fluorescence formed on the fluorescent target plate to determine the direction of the center of mass of the light beam.

5. The ray tracing optical property scanning measuring device according to any one of claims 1 to 4, characterized in that: The beam power measurement module comprises: The detector, which is composed of one or more planar photodetectors, is movably arranged in the optical paths of the incident light beam, the reflected light beam and the refracted light beam to measure the power of the light beam when the light beam is incident at a fixed relative angle to the plane of the detector port.

6. The ray tracing optical property scanning measuring device according to any one of claims 1 to 4, characterized in that: The beam power measurement module comprises: an integrating sphere and a photoelectric detector; The integrating sphere is provided with a light inlet, the detection end of the photodetector is located inside the integrating sphere, and the integrating sphere and the photodetector are integrally movably arranged in the optical paths of the incident light beam, the reflected light beam and the refracted light beam, so that after the light beam enters the light beam through the light inlet, the photodetector measures the power of the light beam.

7. The ray tracing optical property scanning measurement device according to any one of claims 1 to 4, characterized in that: The beam azimuth adjustment module includes: a reflector, a rotation drive mechanism, an X-axis drive mechanism and a Y-axis drive mechanism; The reflector is arranged on the X-axis drive mechanism through the rotation drive mechanism, and the X-axis drive mechanism is arranged on the Y-axis drive mechanism; The rotation drive mechanism is used to drive the reflector to rotate along the X-axis and / or the Y-axis, the X-axis drive mechanism is used to drive the reflector to translate along the X-axis, and the Y-axis drive mechanism is used to drive the reflector to translate along the Y-axis.

8. The ray tracing optical property scanning measurement device according to claim 7, characterized in that: The measurement object is arranged on a rotating platform, and a center locator is arranged on the rotating platform; the rotating platform is used to drive the measurement object to rotate; the center locator is used to set the rotation center of the measurement object and align it with the scanning coordinate system of the beam azimuth adjustment module; The ray tracing optical property scanning measuring device further comprises: a scanning control module, configured to adjust a local area of ​​the measurement object to be within the light beam incident range by rotating the rotating platform, and control the light beam orientation adjustment module to scan the local area; The data splicing module is connected to the beam pointing measurement module and the beam power measurement module for splicing a plurality of local scanning results into complete optical characteristic distribution data according to the rotation angle and position relationship.

9. The ray tracing optical property scanning measurement device according to claim 7, characterized in that: The ray tracing optical property scanning measuring device further comprises: A symmetry detection module, used to identify whether the optical properties of the measured object are centrally symmetric; A center calibration module, used to automatically make the geometric center of the measured object coincide with the scanning center axis of the beam azimuth adjustment module when the measured object is centrally symmetrical; The scanning optimization controller is configured to control the beam orientation adjustment module to scan only a single symmetrical sector based on the symmetry detection result, and generate complete optical characteristic distribution data through a mirror mapping algorithm.

10. A ray tracing optical property scanning measurement method based on the ray tracing optical property scanning measurement device according to any one of claims 1 to 9, characterized in that: include: Place the measurement object at the position to be detected; The incident beam is set by using the beam orientation adjustment module, and the positions of the refracted beam and the reflected beam are determined by scanning; Moving the beam pointing measurement module to the optical path of the incident beam, the refracted beam or the reflected beam, and using the beam pointing measurement module to measure the direction of the incident beam, the refracted beam or the reflected beam; Moving the beam power measurement module to the optical path of the incident beam, the refracted beam or the reflected beam to measure the power of the incident beam, the refracted beam or the reflected beam; The position of the incident beam is adjusted using the beam orientation adjustment module, the direction of the incident beam, the refracted beam or the reflected beam is measured again using the beam pointing measurement module, and the power of the incident beam, the refracted beam or the reflected beam is measured again using the beam power measurement module.

Images