Device for in-situ measurement of ion energy and flux

Abstract

The invention relates to a device for in-situ measurement of ion energy and flux, the device comprises a one-dimensional transmission mechanism and a measurement probe fixed at the bottom end of the one-dimensional transmission mechanism, and the measurement probe is arranged in a transmission channel for transmitting an ion beam; the measuring probe comprises a probe shell, a cover plate detachably arranged on the probe shell in a sleeving mode and a collector used for collecting ions, the collector and the cover plate are arranged at the two opposite ends of the probe shell, and an insulating sleeve is arranged on the inner wall of the probe shell; a central through hole is formed in the cover plate and is used for controlling the ion flux entering the measuring probe; a first grid mesh, a second grid mesh, a third grid mesh and a fourth grid mesh are sequentially arranged in the probe shell in the direction from the central through hole to the collector. According to the invention, different voltages are applied to the measuring probe, so that the effect of measuring ion energy and flux by using one probe is realized, the experiment cost is greatly reduced, the experiment efficiency is improved, and the required measuring space is saved.

Description

Technical Field

[0001] The invention relates to the technical field of ion beam measurement, and in particular to a device for in-situ measurement of ion energy and flux. Background Art

[0002] The energy of an ion beam is the energy of the ion beam due to its kinetic energy, while the flux refers to the number of ions passing through the ion beam per unit time per unit area, which is an important parameter for measuring the intensity of ion flow. In plasma physics, understanding the energy distribution and flux of ions is crucial to understanding the stability, conductivity and radiation characteristics of plasma; in the field of nuclear fusion, the energy and flux of ions affect the rate and efficiency of the reaction, and measuring these parameters helps to optimize the conditions of the fusion reaction to achieve higher energy output; in material surface treatment, the energy and flux of ions determine the degree of modification of the material surface, such as deposition, etching or doping, and the precise control of these parameters is crucial for the manufacture of high-quality materials and devices. Therefore, both in the laboratory and in the field of industrial applications, the energy and flux of ion beams are two very important experimental parameters.

[0003] The general measurement of ion energy and flux adopts a contact method, such as using a retarding potential analyzer to measure ion energy and a Faraday cup to measure ion flux. The invention patent CN104483132B provides a retarding energy analyzer for measuring large ion thrusters and the contact method-based plasma energy measurement device provided by CN117794038A, both of which are effective means of measuring ion energy. The invention patent CN209119038U proposes an improved Faraday cup structure and CN117665897A proposes a Faraday cup and charged ion beam measurement method, both of which are effective means of measuring ion flux.

[0004] In the prior art, there is no device that uses a single instrument to simultaneously measure ion energy and flux. In addition, the ion beam transmission pipeline of a small ion beam experimental equipment is relatively thin, and the measurement positions that can be set at a single location are limited. Using two instruments to separately measure the energy and flux of the ion beam will cause a waste of space and a decrease in measurement efficiency. Summary of the invention

[0005] In order to solve the technical problems existing in the above-mentioned prior art, the purpose of the present invention is to provide a device for in-situ measurement of ion energy and flux, which adopts a single probe to realize the measurement of ion energy and flux, and can flexibly operate the probe to realize energy and flux measurement and spatial scanning of ion beam according to different experimental needs.

[0006] To achieve the above-mentioned object of the invention, the present invention provides a device for in-situ measurement of ion energy and flux, comprising a one-dimensional transmission mechanism and a measuring probe fixed to the bottom end of the one-dimensional transmission mechanism, wherein the measuring probe is arranged in a transmission channel for transmitting an ion beam;

[0007] The measuring probe comprises a probe housing, a cover plate detachably mounted on the probe housing, and a collecting electrode for collecting ions, wherein the collecting electrode and the cover plate are arranged at opposite ends of the probe housing, and an insulating sleeve is arranged on the inner wall of the probe housing;

[0008] The cover plate is provided with a central through hole for controlling the ion flux entering the measuring probe;

[0009] Along the direction from the central through hole to the collecting electrode, a first grid, a second grid, a third grid, and a fourth grid are sequentially arranged in the probe housing;

[0010] When measuring ion energy, the first grid is grounded to shield the influence of internal voltage on external ions, the second grid and the third grid apply scanning voltage to screen ions with different energies, and the fourth grid applies negative bias to prevent electrons from reaching the collector and inhibit secondary electrons from moving out;

[0011] When measuring ion flux, the first grid, the second grid, the third grid, the fourth grid and the collector are all grounded for ion collection.

[0012] According to a technical solution of the present invention, the probe housing is a rectangular parallelepiped structure, one side of which is open, and the cover plate is arranged on the open side of the probe housing;

[0013] The probe housing is further provided with an isolation gasket, and the first grid, the second grid, the third grid and the fourth grid are all positioned and fixed by the isolation gasket.

[0014] According to a technical solution of the present invention, the collecting electrode is made of graphite material, and the measuring surface is in an arc shape;

[0015] The insulating sleeve and the isolation gasket are made of Teflon material.

[0016] According to a technical solution of the present invention, it also includes a vent hole for ensuring that the air pressure inside the measuring probe is balanced with the outside world. The vent hole is arranged on the side of the probe shell opposite to the cover plate, and the vent hole passes through the probe shell, the insulating sleeve and the collecting electrode.

[0017] According to a technical solution of the present invention, the probe housing and the cover plate are made of stainless steel;

[0018] The first grid, the second grid, the third grid and the fourth grid are made of molybdenum material.

[0019] According to a technical solution of the present invention, the one-dimensional transmission mechanism includes a welding bellows, a short tube, a conical adapter, a hydraulic bellows and a probe rod;

[0020] The welded bellows is located at the top and is a retractable bellows structure. The lower end of the welded bellows is connected and fixed to the upper end of the short tube, and the short tube is a hollow tubular structure.

[0021] The conical adapter is fixed below the short tube, and the cross section of the conical adapter is in the shape of an inverted funnel;

[0022] The hydraulic bellows is arranged at the lower end of the conical adapter, and the lower end of the hydraulic bellows is communicated with the ion beam transmission channel;

[0023] The lower end of the probe rod passes through the welding bellows, the short tube, the conical adapter and the center hole of the hydraulic bellows in sequence and is fixed to the probe housing, and the upper end of the probe rod is connected to the upper end of the welding bellows.

[0024] According to a technical solution of the present invention, the short tube is coaxially arranged with the welding bellows, and the short tube is provided with a support ring for supporting the probe rod, and the probe rod support ring is fixed on the inner wall of the short tube.

[0025] According to a technical solution of the present invention, the one-dimensional transmission mechanism is equipped with a driving mechanism, the driving mechanism is arranged between the welding bellows and the short tube, and the driving mechanism includes a servo motor and a lead screw;

[0026] A movable ball is arranged on the lead screw, and the movable ball is fixed to the upper end of the welding bellows.

[0027] According to a technical solution of the present invention, the probe rod is sealed with the welded bellows via an O-ring.

[0028] According to a technical solution of the present invention, the probe rod is a hollow rod used for placing a power supply line of the measuring probe.

[0029] Compared with the prior art, the present invention has the following beneficial effects:

[0030] The present invention proposes a device for in-situ measurement of ion energy and flux. By applying different voltages to the measuring probe, the effect of measuring ion energy and flux with one probe is achieved, which greatly reduces the experimental cost, improves the experimental efficiency, and saves the required measurement space.

[0031] The present invention can control the ion flux entering the measuring probe by replacing the cover plates with different calibers.

[0032] The present invention can perform in-situ measurement and one-dimensional spatial scanning of ion beams through a one-dimensional transmission mechanism driven by a high-precision servo motor.

[0033] The present invention provides a vent on the measuring probe, which can ensure that the internal air pressure of the measuring probe is balanced with the external environment, effectively avoid discharge caused by increased internal air pressure, ensure the safety and stability of the measuring process, and ensure that the measurement can be carried out continuously and accurately. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0035] Figure 1 A schematic diagram schematically shows the structure of a device for in-situ measurement of ion energy and flux in an embodiment of the present invention;

[0036] Figure 2 A schematic diagram of the structure of a charged particle swallower in one embodiment of the present invention is shown;

[0037] Figure 3 The figure schematically shows the structure of a measuring probe in one embodiment of the present invention.

[0038] Reference numerals:

[0039] 1. High-precision servo motor; 2. Welded bellows; 3. Lead screw; 4. Short tube; 5. Probe rod support ring; 6. Conical adapter; 7. Hydraulic bellows; 8. Probe rod; 9. Measuring probe; 10. Ion beam transmission channel; 11. O-ring; 12. Scale;

[0040] 9-1, cover plate; 9-2, first grid; 9-3, third grid; 9-4, insulating sleeve; 9-5, collecting electrode; 9-6, probe housing; 9-7, vent; 9-9, fourth grid; 9-10, second grid; 9-11, isolation gasket. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] like Figures 1 to 3 As shown, the present invention provides a device for in-situ measurement of ion energy and flux, comprising a one-dimensional transmission mechanism and a measurement probe 9 fixed to the bottom end of the one-dimensional transmission mechanism, wherein the measurement probe 9 is arranged in a transmission channel 10 for transmitting an ion beam;

[0043] The measuring probe 9 comprises a probe housing 9-6, a cover plate 9-1 detachably mounted on the probe housing 9-6, and a collecting electrode 9-5 for collecting ions. The collecting electrode 9-5 and the cover plate 9-1 are arranged at opposite ends of the probe housing 9-6. An insulating sleeve 9-4 is arranged on the inner wall of the probe housing 9-6.

[0044] The cover plate 9-1 is provided with a central through hole for controlling the ion flux entering the measuring probe;

[0045] Along the direction from the central through hole to the collecting electrode 9-5, the first grid 9-2, the second grid 9-10, the third grid 9-3, and the fourth grid 9-9 are arranged in sequence in the probe housing 9-6.

[0046] By setting the measuring probe 9 in the ion beam transmission channel 10 and using a one-dimensional transmission mechanism to drive it to move, it is possible to measure different positions of the ion beam, or move the measuring probe 9 out of the beam area. The central through hole of the cover plate 9-1 can control the amount of ions entering. When measuring the ion energy, the first grid 9-2 is grounded, which effectively shields the interference of the internal voltage on the external ions, so that the external ions can enter the subsequent grid area normally. The second grid 9-10 and the third grid 9-3 apply a scanning voltage, and the electric field between the grids is used to screen ions of different energies. Only ions with energy higher than the electric field energy can reach the fourth grid 9-9. The fourth grid 9-9 applies a negative bias to prevent electrons from reaching the collector 9-5 and inhibit the removal of secondary electrons, thereby ensuring the accuracy of measuring ion energy. When measuring ion flux, the first grid 9-2, the second grid 9-10, the third grid 9-3, the fourth grid 9-9 and the collector 9-5 are all grounded, so that all ions entering the measuring probe 9 can be collected by the collector 9-5, thereby realizing the measurement of ion energy and flux with one measuring probe 9, saving measurement space and cost and improving measurement efficiency.

[0047] By replacing the cover plate 9 - 1 with different apertures, the ion flux entering the measuring probe can be controlled. For example, replacing a small-aperture cover plate facilitates spatial scanning, while replacing a large-aperture cover plate facilitates measurement of ion flux and energy distribution.

[0048] The cover plate 9-1 and the probe housing 9-6 can be detachably installed by means of threaded connection.

[0049] In some embodiments of the present invention, the probe housing 9-6 is a rectangular parallelepiped structure, one side of which is open, and the cover plate 9-1 is disposed on the open side of the probe housing 9-6;

[0050] The probe housing 9-6 is also provided with an isolation gasket 9-11, and the first grid 9-2, the second grid 9-10, the third grid 9-3 and the fourth grid 9-9 are all positioned and fixed by the isolation gasket 9-11.

[0051] The isolation gasket 9-11 provided in the probe housing 9-6 can accurately fix the positions of the first grid 9-2, the second grid 9-10, the third grid 9-3 and the fourth grid 9-9, ensuring the relative positions of the grids are stable during the measurement process, thereby ensuring the accuracy and reliability of ion screening and measurement.

[0052] Further, the collector 9-5 is disposed at the end of the isolation spacer 9-11.

[0053] In some embodiments of the present invention, the collector 9-5 is made of graphite material and the measuring surface is arc-shaped. The good conductivity of graphite enables it to efficiently collect ions and conduct measurement signals. The arc-shaped measuring surface can increase the contact area with ions, improve the collection efficiency, and further improve the accuracy of measurement. The insulating sleeve 9-4 and the isolation gasket 9-11 are made of Teflon material. The excellent insulation performance of Teflon can prevent signal interference and leakage between each grid and the collector 9-5, ensure the stability of electrical performance during the measurement process, and ensure the reliability of the measurement results.

[0054] In some embodiments of the present invention, the device also includes a vent hole 9-7 for ensuring that the air pressure inside the measuring probe is balanced with the outside air pressure. The vent hole 9-7 is arranged on the side of the probe shell 9-6 opposite to the cover plate 9-1. The vent hole 9-7 passes through the probe shell 9-6, the insulating sleeve 9-4 and the collecting electrode 9-5.

[0055] During the measurement process, factors such as ion impact may cause the internal air pressure of the measuring probe 9 to increase. The vent hole 9-7 can ensure that the internal air pressure of the measuring probe 9 is balanced with the external environment, effectively avoiding discharge caused by the increase in internal air pressure, ensuring the safety and stability of the measurement process, and ensuring that the measurement can be carried out continuously and accurately.

[0056] In some embodiments of the present invention, the probe housing 9-6 and the cover plate 9-1 are made of stainless steel, which has good mechanical strength and corrosion resistance, and can protect the precision components inside the measuring probe 9 from the influence of the external environment, maintain the structural stability of the measuring probe 9, and extend its service life. The first grid 9-2, the second grid 9-10, the third grid 9-3, and the fourth grid 9-9 are made of molybdenum material. The suitable electrical properties and chemical stability of molybdenum enable it to work stably during ion screening and control, meet the performance requirements of the grid during the measurement process, and ensure the accuracy and reliability of the measurement.

[0057] In some embodiments of the present invention, the one-dimensional transmission mechanism includes a welding bellows 2, a short tube 4, a conical adapter 6, a hydraulic bellows 7 and a probe rod 8;

[0058] The welding bellows 2 is located at the top and is a retractable bellows structure. The lower end of the welding bellows 2 is connected and fixed to the upper end of the short tube 4. The short tube 4 is a hollow tubular structure.

[0059] The conical adapter 6 is fixed below the short tube 4, and the cross section of the conical adapter 6 is in the shape of an inverted funnel;

[0060] The hydraulic bellows 7 is arranged at the lower end of the conical adapter 6, and the lower end of the hydraulic bellows 7 is directly connected to the flange opening on the ion transmission channel 10;

[0061] The lower end of the probe rod 8 passes through the central holes of the welding bellows 2, the short tube 4, the conical adapter 6 and the hydraulic bellows 7 in sequence and is fixed to the probe housing 9-6, and the upper end of the probe rod 8 is connected to the upper end of the welding bellows 2.

[0062] The measurement probe 9 is driven to move by the one-dimensional transmission mechanism. After the measurement is completed, the measurement probe 9 can be moved out of the measurement channel through the one-dimensional transmission mechanism to avoid affecting the transmission of the ion beam. At the same time, the measurement surface of the measurement probe 9 can be adjusted to be perpendicular to the ion beam axis or at a certain angle by rotating the probe rod 8 to meet different measurement requirements.

[0063] The welded bellows 2 in the one-dimensional transmission mechanism is a retractable bellows structure, which is connected to the short tube 4 and other components, and can achieve axial compression and stretching during the transmission process, thereby driving the probe rod 8 and the measuring probe 9 to move, and realizing the in-situ measurement and one-dimensional spatial scanning of the ion beam. The inverted funnel-shaped cross-section of the conical adapter 6 can well transition and connect components of different pipe diameters, and ensure the sealing of the connection, preventing gas leakage and impurities from entering and affecting the measurement. The probe rod 8 passes through the center holes of each component and is fixed to the probe housing 9-6, realizing effective power transmission, and ensuring that the measuring probe 9 can accurately move and measure in the ion beam transmission channel 10.

[0064] In addition, among the welding bellows 2, the short tube 4, the conical adapter 6 and the hydraulic bellows 7, two connected components can be connected via flanges, and corresponding sealing structures can be configured.

[0065] The hydraulic bellows 7 is connected to the ion beam transmission channel 10, and the hydraulic bellows 7 can be used to adjust the overall angle of the "welding bellows 2, short tube 4, conical adapter 6 and driving mechanism" to meet different measurement requirements.

[0066] Specifically, the hydraulic bellows 7 can produce a slight compression or extension at any position on its circumference, thereby achieving a change in the overall angle of the "welded bellows 2, short tube 4, tapered adapter 6 and driving mechanism".

[0067] In some embodiments of the present invention, the short tube 4 is coaxially arranged with the welding bellows 2 , and the short tube 4 is provided with a support ring 5 for supporting the probe rod 8 , and the probe rod support ring 5 is fixed on the inner wall of the short tube 4 .

[0068] The short tube 4 is coaxially arranged with the welding bellows 2 and is internally provided with a support ring 5 for supporting the probe rod 8. The support ring 5 is fixed on the inner wall of the short tube 4 to ensure the stability of the probe rod 8 during the transmission process. When the one-dimensional transmission mechanism drives the measuring probe 9 to move, the deviation and shaking of the probe rod 8 are reduced, ensuring that the measuring probe 9 can accurately reach the predetermined measuring position, improving the accuracy and reliability of the measurement, and reducing the measurement error caused by the position deviation of the measuring probe 9.

[0069] In some embodiments of the present invention, the one-dimensional transmission mechanism is configured with a driving mechanism, the driving mechanism is arranged between the welding bellows 2 and the short tube 4, and the driving mechanism includes a servo motor 1 and a lead screw 3;

[0070] A moving ball is arranged on the lead screw 3 , and the moving ball is fixed to the upper end of the welding bellows 2 .

[0071] The lead screw 3 is driven to rotate by the servo motor 1, and the moving ball on the lead screw 3 is fixed to the upper end of the welding bellows 2, so as to realize precise control of the welding bellows 2, drive the probe rod 8 and the measuring probe 9 to move in one-dimensional direction with high precision, realize precise adjustment of the measuring position, meet the requirements of different experiments on the measuring position, and further improve the flexibility and accuracy of the measurement.

[0072] In some embodiments of the present invention, the probe rod 8 is sealed with the welded bellows 2 via an O-ring 11, such as Figure 2As shown, O-rings 11 can be provided at both ends of the flanges corresponding to the welded bellows 2, and further sealing connections can be performed in conjunction with flanges of small sizes. The good elasticity and sealing properties of the O-rings 11 ensure that gas leakage and impurities do not enter during the transmission process, thereby maintaining the stability of the measurement environment, and allow the probe rod 8 to rotate flexibly within a certain range, thereby facilitating adjustment of the measurement angle of the measuring probe 9 to meet different measurement requirements, thereby improving the accuracy and applicability of the measurement.

[0073] In some embodiments of the present invention, the probe rod 8 is a hollow rod for placing the power supply line of the measuring probe 9. On the one hand, it can prevent the power supply line from degassing and affecting the quality of the ion beam, and on the other hand, it can shield the influence of the voltage applied on the grid on the measurement signal. At the same time, it also protects the power supply line from damage by the external environment, ensures the stability of the power supply during the measurement process, and ensures that the measuring device can work continuously and stably.

[0074] The present invention, the specific operation process is:

[0075] When measuring the energy of the ion beam, the first grid 9-2 is grounded to shield the influence of the internal applied voltage on the external ions; the second grid 9-10 and the third grid 9-3 apply a scanning voltage, and the ions of different energies are screened through the electric field formed between the grids, and only the ions with higher energy than the electric field can reach the fourth grid 9-9; the fourth grid 9-9 applies a negative bias to prevent the electrons entering from the front from reaching the collector 9-5, and inhibit the removal of secondary electrons excited by the high-energy ions from the collector 9-5; the current signal on the collector 9-5 is collected and first-order differentiated, and the energy distribution curve of the measured ion beam can be obtained. When measuring the flux of the ion beam, the first grid 9-2, the second grid 9-10, the third grid 9-3, the fourth grid 9-9 and the collector 9-5 are grounded together to collect all the ions entering the measuring probe 9 through the cover plate, and the collected ion flow signal is measured to obtain the flux size of the ion beam.

[0076] Parts of the present invention that are not described in detail belong to the well-known technology in the art.

[0077] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0078] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The various embodiments can be combined as needed, and the same or similar parts can refer to each other.

[0079] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A device for in-situ measurement of ion energy and flux, characterized in that It comprises a one-dimensional transmission mechanism and a measuring probe (9) fixed to the bottom end of the one-dimensional transmission mechanism, wherein the measuring probe (9) is arranged in a transmission channel (10) for transmitting an ion beam; The measuring probe (9) comprises a probe housing (9-6), a cover plate (9-1) detachably mounted on the probe housing (9-6), and a collecting electrode (9-5) for collecting ions, the collecting electrode (9-5) and the cover plate (9-1) being arranged at two opposite ends of the probe housing (9-6), and an insulating sleeve (9-4) being arranged on the inner wall of the probe housing (9-6); The cover plate (9-1) is provided with a central through hole for controlling the flow of ions entering the measuring probe; Along the direction from the central through hole to the collecting electrode (9-5), a first grid (9-2), a second grid (9-10), a third grid (9-3), and a fourth grid (9-9) are sequentially arranged in the probe housing (9-6); When measuring ion energy, the first grid (9-2) is grounded to shield the influence of internal voltage on external ions, the second grid (9-10) and the third grid (9-3) apply scanning voltage to screen ions of different energies, and the fourth grid (9-9) applies negative bias to prevent electrons from reaching the collector (9-5) and inhibit secondary electrons from moving out; When measuring ion flux, the first grid (9-2), the second grid (9-10), the third grid (9-3), the fourth grid (9-9) and the collector (9-5) are all grounded for ion collection.

2. The device for in-situ measurement of ion energy and flux according to claim 1, characterized in that: The probe housing (9-6) is in a rectangular parallelepiped structure, one side of which is open, and the cover plate (9-1) is arranged on the open side of the probe housing (9-6); The probe housing (9-6) is also provided with an isolation gasket (9-11), and the first grid (9-2), the second grid (9-10), the third grid (9-3) and the fourth grid (9-9) are all positioned and fixed by the isolation gasket (9-11).

3. The device for in-situ measurement of ion energy and flux according to claim 2, characterized in that: The collecting electrode (9-5) is made of graphite material, and the measuring surface is in an arc shape; The insulating sleeve (9-4) and the isolation gasket (9-11) are made of Teflon material.

4. The device for in-situ measurement of ion energy and flux according to claim 3, characterized in that: It also includes a vent hole (9-7) for ensuring that the air pressure inside the measuring probe is balanced with the outside air pressure, the vent hole (9-7) being arranged on the side of the probe housing (9-6) opposite to the cover plate (9-1), and the vent hole (9-7) passing through the probe housing (9-6), the insulating sleeve (9-4) and the collecting electrode (9-5).

5. The device for in-situ measurement of ion energy and flux according to claim 1, characterized in that: The probe housing (9-6) and the cover plate (9-1) are made of stainless steel; The first grid (9-2), the second grid (9-10), the third grid (9-3) and the fourth grid (9-9) are made of molybdenum material.

6. The device for in-situ measurement of ion energy and flux according to claim 1, characterized in that: The one-dimensional transmission mechanism comprises a welding bellows (2), a short tube (4), a conical adapter (6), a hydraulic bellows (7) and a probe rod (8); The welding bellows (2) is located at the top and is a retractable bellows structure. The lower end of the welding bellows (2) is connected and fixed to the upper end of the short tube (4). The short tube (4) is a hollow tubular structure. The conical adapter (6) is fixed below the short tube (4), and the cross section of the conical adapter (6) is in the shape of an inverted funnel; The hydraulic bellows (7) is arranged at the lower end of the conical adapter (6), and the lower end of the hydraulic bellows (7) is connected to the ion beam transmission channel (10); The lower end of the probe rod (8) passes through the central holes of the welded bellows (2), the short tube (4), the conical adapter (6) and the hydraulic bellows (7) in sequence and is fixed to the probe housing (9-6), and the upper end of the probe rod (8) is connected to the upper end of the welded bellows (2).

7. The device for in-situ measurement of ion energy and flux according to claim 6, characterized in that: The short tube (4) is coaxially arranged with the welded bellows (2), and the short tube (4) is provided with a support ring (5) for supporting the probe rod (8), and the probe rod support ring (5) is fixed on the inner wall of the short tube (4).

8. The device for in-situ measurement of ion energy and flux according to claim 6, characterized in that: The one-dimensional transmission mechanism is provided with a driving mechanism, the driving mechanism is arranged between the welding bellows (2) and the short tube (4), and the driving mechanism comprises a servo motor (1) and a lead screw (3); The lead screw (3) is provided with a movable ball, and the movable ball is fixed to the upper end of the welded bellows (2).

9. The device for in-situ measurement of ion energy and flux according to claim 6, characterized in that: The probe rod (8) is sealed with the welded bellows (2) via an O-ring (11).

10. The device for in-situ measurement of ion energy and flux according to claim 6, characterized in that: The probe rod (8) is a hollow rod and is used for accommodating the power supply line of the measuring probe (9).

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