Photomask box with detachable supporting mechanism

Abstract

The invention provides a photomask box with a detachable supporting mechanism, the photomask box is suitable for a double-layer box, the photomask box comprises an outer box and an inner box accommodated in the outer box, and the inner box comprises a base and at least one supporting mechanism arranged on the base. The supporting mechanism comprises a supporting assembly and a mounting interface connected to the base, the supporting assembly comprises a base body, at least one limiting column and a mounting hole, the at least one limiting column is connected with the base body, and the mounting hole penetrates through the base body and is a non-circular hole; and the supporting piece is provided with a matching structure used for being matched with the mounting hole, so that the supporting piece is detachably accommodated in the mounting hole. According to the photomask box with the detachable supporting mechanism, the detaching process of the supporting mechanism is simplified, and waste of materials and cost is reduced.

Description

Technical Field

[0001] The present invention relates to a support mechanism of a mask box, and in particular to a mask box with a detachable support mechanism. Background Art

[0002] In the prior art, in a known extreme ultraviolet (EUV) mask transport box, a support mechanism is used to support the mask, and the support mechanism includes a support member and a limit column. The support member is used to carry and contact the mask, and the limit column and the support member are integrated. When the support mechanism is combined with the inner box base of the mask box, in addition to fixing it with screws, a knurled pin is riveted into the inside of the limit column to strengthen the fixation to prevent it from loosening. Because the knurled pin and the inside of the limit column are interference fit, if the known support structure needs to be replaced, it is necessary to first destroy the limit column, remove the screws, and then knock out the knurled pin.

[0003] However, in actual use, only the support will come into contact with the photomask, and the limit column is only used to prevent abnormal movement errors from damaging the photomask components in emergencies. Therefore, under normal circumstances, the photomask will not come into contact with the limit column. In other words, only the support is a consumable, and the limit column does not actually need to be replaced. However, due to the current design, if the support needs to be replaced, the limit column will be replaced together with the support, resulting in waste of materials and costs, and there is also the problem of inconvenience in removal. Summary of the invention

[0004] In view of the above problems of the prior art, the present invention provides a reticle box with a detachable support mechanism to simplify the disassembly process of the support mechanism and reduce the waste of materials and costs. In addition, the support member can be made of a more wear-resistant material according to actual needs to increase its service life.

[0005] The present invention provides a mask box with a detachable supporting mechanism, which is suitable for a double-layer box, including an outer box and an inner box accommodated therein, the inner box including: a base and at least one supporting mechanism, the supporting mechanism being arranged on the base; the supporting mechanism including: a supporting assembly connected to an installation interface of the base, the supporting assembly including a seat body, at least one limiting column, and a mounting hole, at least one of the limiting columns being connected to the seat body, the mounting hole penetrating the seat body and being a non-circular hole; and a supporting member having a matching structure for cooperating with the mounting hole, so that the supporting member can be detachably accommodated in the mounting hole.

[0006] In a specific embodiment, the support member has at least one anti-rotation structure. When the support member is disposed in the mounting hole, the at least one anti-rotation structure abuts against an edge of the mounting hole.

[0007] In a specific embodiment, the thickness of the anti-rotation structure is the same as the thickness of the base.

[0008] In a specific embodiment, the support member includes a contact portion, a neck, and a bottom portion, the contact portion and the bottom portion are connected via the neck portion, and the neck portion has at least one anti-rotation structure.

[0009] In a specific embodiment, the support member includes a contact portion, a neck, and a bottom, the bottom is provided with at least one protrusion, and at least one of the protrusions protrudes outward from the bottom; the mounting hole is provided with at least one notch, and at least one of the notches extends outward from the periphery of the mounting hole corresponding to the shape of at least one of the protrusions.

[0010] In a specific embodiment, the neck is provided with at least one anti-rotation structure, and the mounting hole is provided with at least one positioning protrusion, which protrudes inward from the periphery of the mounting hole, and the positioning protrusion abuts against at least one of the anti-rotation structures to prevent the support member from rotating relative to the support assembly.

[0011] In a specific embodiment, at least one of the anti-rotation structures is a supporting protrusion extending outward from the neck surface, and the supporting protrusion of the neck is offset from at least one of the protrusions of the bottom in a vertical direction.

[0012] In a specific embodiment, the bottom has at least one notch, and the at least one notch is recessed inward from the radial direction of the bottom surface, so that when the support member is placed in the mounting hole, the bottom avoids the positioning protrusion of the mounting hole.

[0013] In a specific embodiment, at least one of the recesses is disposed adjacent to at least one of the protrusions.

[0014] In a specific embodiment, the support member includes a fixing hole formed at the bottom. After the support member is rotated to a positioning position where the abutting protrusion and the positioning protrusion abut against each other, the support member is fixed in the mounting hole through the cooperation of a fixing component and the fixing hole.

[0015] In a specific embodiment, when the support member is located at the positioning position, the lower surface of the contact portion contacts the upper surface of the base, and an upper surface of the bottom contacts the lower surface of the base.

[0016] In one embodiment, the support member and the support assembly are formed of different materials.

[0017] In one embodiment, the support member material has a glass transition temperature greater than or equal to 200°C (392°F).

[0018] The reticle box with a detachable support mechanism proposed by the present invention can simplify the disassembly process of the support mechanism and reduce the waste of materials and costs. In addition, the support member can be made of a more wear-resistant material according to actual needs to increase its service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings described herein are only for explanation purposes and are not intended to limit the scope of the present invention in any way. In addition, the shapes and proportional dimensions of the various components in the figures are only schematic, used to help understand the present invention, and are not specifically limited to the shapes and proportional dimensions of the various components of the present invention. Those skilled in the art can select various possible shapes and proportional dimensions to implement the present invention according to the teachings of the present invention.

[0020] Figure 1 It is a three-dimensional view of the base of the inner box provided with the supporting mechanism of the present invention.

[0021] Figure 2 for Figure 1 A partially enlarged exploded perspective view of the support mechanism at point A in the middle.

[0022] Figure 3 A partial enlarged stereoscopic view of the support mechanism when replacing the support member.

[0023] Figure 4A This is a bottom view of a support member according to an embodiment of the present invention.

[0024] Figure 4B It is a front view of a support member according to an embodiment of the present invention.

[0025] Figure 4C It is a three-dimensional stereogram of a support member according to an embodiment of the present invention.

[0026] Figure 5A It is a bottom view of the support assembly according to an embodiment of the present invention.

[0027] Figure 5B It is a front view of a support assembly according to an embodiment of the present invention.

[0028] Fig. 6A It is a three-dimensional diagram of the support mechanism when the support member according to the embodiment of the present invention is in the positioning position.

[0029] Figure 6B It is a three-dimensional view of the support mechanism from another angle when the support member according to the embodiment of the present invention is not in the positioning position.

[0030] Fig. 7A It is a three-dimensional diagram of the support mechanism when the support member according to the embodiment of the present invention is in the positioning position.

[0031] Figure 7BIt is a three-dimensional view of the support mechanism from another angle when the support member according to the embodiment of the present invention is in the positioning position.

[0032] Fig. 8A for Fig. 6A Cross-sectional view of the middle section B.

[0033] Figure 8B for Fig. 7A Section view of the middle section C.

[0034] Fig. 9 It is a partially enlarged exploded perspective view of the support mechanism of the second embodiment of the present invention.

[0035] Fig.10 It is a partially enlarged stereoscopic view of the supporting mechanism of the second embodiment of the present invention when the supporting member is replaced.

[0036] Fig.11A It is a side view of a support member according to a second embodiment of the present invention.

[0037] Fig. 11B FIG. 1 is a top view of a support member according to a second embodiment of the present invention.

[0038] Fig. 12A It is a side view of a support assembly according to a second embodiment of the present invention.

[0039] Fig. 12B FIG. 1 is a top view of a support assembly according to a second embodiment of the present invention.

[0040] Description of Reference Numerals

[0041] 10: Base

[0042] 101: Install the interface

[0043] 102:Through hole

[0044] 103:Through hole

[0045] 20: Support mechanism

[0046] 21: Support components

[0047] 211: base body

[0048] 212: Limit column

[0049] 2121:Fixing hole

[0050] 213: Mounting hole

[0051] 2131: Gap

[0052] 2133: Positioning convex part

[0053] 22:Fixed components

[0054] 23: Support

[0055] 23A: Matching structure

[0056] 231:Contact Department

[0057] 2311:Contact protrusion

[0058] 2315: Lower surface

[0059] 232: Neck

[0060] 2321: Resist the convex part

[0061] 233: Bottom

[0062] 2331:convex part

[0063] 2333: Notch

[0064] 2335: Upper surface

[0065] 2337: Lower surface

[0066] 234:Fixing hole

[0067] 24: Install components

[0068] d1, D1, d2, D2: thickness

[0069] R1, R2, p1, p2, n1: distance

[0070] A: Circle

[0071] B, C: plane

[0072] Y1, Y2: vertical direction

[0073] 31: Support components

[0074] 311: base body

[0075] 312: Limiting column

[0076] 313: Mounting hole

[0077] 33: Support

[0078] 33A: Matching structure

[0079] 331:Ontology

[0080] 3311:Contact protrusion

[0081] 332: Anti-rotation structure DETAILED DESCRIPTION

[0082] The details of the present invention can be more clearly understood with reference to the accompanying drawings and the description of the specific embodiments of the present invention. However, the specific embodiments of the present invention described herein are only used for the purpose of explaining the present invention and cannot be understood as limiting the present invention in any way. Under the guidance of the present invention, technicians can conceive of any possible variations based on the present invention, which should all be considered to belong to the scope of the present invention.

[0083] See also Figure 1 The present invention provides a mask box with a detachable supporting mechanism, which is suitable for a double-layer box, including an outer box and an inner box accommodated in the outer box, the inner box including a base 10, a cover (not shown), and a supporting mechanism 20, which is connected to the mounting interface 101 of the base 10, and the supporting mechanism 20 is used to carry the mask.

[0084] See also Figure 2 , Figure 2 for Figure 1 Enlarged exploded view at circle A. The detachable support mechanism 20 of the first embodiment of the present invention comprises a support assembly 21 and a support member 23. The support assembly 21 is disposed in the mounting interface 101 of the base 10, and the support member 23 has a matching structure 23A for matching the mounting hole 213 of the support assembly 21, so that the support member 23 can be detachably accommodated in the mounting hole 213 of the support assembly 21.

[0085] See also FIG. 4A to FIG. 4C The support member 23 has a contact portion 231, a fixing hole 234, and a matching structure 23A. The contact portion 231 can be used to allow the user to hold or rotate the support member 23, and the fixing hole 234 penetrates the matching structure 23A. Please also refer to Figure 3 , the matching structure 23A can pass through the mounting hole 213 and can partially abut against the mounting hole 213, so that the support member can be accommodated in the mounting hole 213. In this embodiment, the matching structure 23A includes a neck 232 and a bottom 233. The contact portion 231 and the bottom 233 are connected through the neck 232, and the fixing hole 234 is disposed in the bottom 233 and the neck 232. In this embodiment, the fixing hole 234 passes through the lower surface 2337 of the bottom 233 and extends completely or partially to the neck 232. Preferably, the upper surface of the contact portion 231 is used to directly contact the photomask, and the neck 232 extends from the lower surface 2315 of the contact portion 231 and extends from the upper surface 2335 of the bottom 233. Preferably, a plurality of contact protrusions 2311 are formed on the upper surface of the contact portion 231 to reduce the contact area between the photomask and the support member 23 when the photomask is carried.

[0086] The periphery of the bottom 233 has at least one convex portion 2331 and at least one concave portion 2333. The convex portion 2331 protrudes outward relative to the radial direction of the surface of the bottom 233, and the concave portion 2333 is recessed inward relative to the radial direction of the surface of the bottom 233. The at least one convex portion 2331 is arranged adjacent to the at least one concave portion 2333. Preferably, the bottom 233 has a center O1, and the distance R1 from the convex portion 2331 to the center O1 is greater than the distance p1 from the concave portion 2333 to the center O1. In the embodiment of the present invention, the periphery of the bottom 233 has four convex portions 2331 and four concave portions 2333.

[0087] Further reading Figure 4B and Figure 4C The neck 232 has at least one abutting protrusion 2321 (or may be called an anti-rotation structure), which protrudes outwardly from the surface of the neck 232 in the radial direction. When viewed from the front, the neck 232 has a thickness d1. The thickness d1 may also be the vertical distance between the lower surface 2315 of the contact portion 231 and the upper surface 2335 of the bottom 233. The farthest distance R1 of the protrusion 2331 from the center O1 of the bottom 233 defines a vertical direction Y1, and the shortest distance p1 of the abutting protrusion 2321 from the center O1 of the bottom 233 defines a vertical direction Y2. The protrusion 2331 and the abutting protrusion 2321 are offset in the vertical direction, that is, the vertical direction Y1 and the vertical direction Y2 are parallel to each other but do not overlap.

[0088] See also Figure 5A and Figure 5B The support assembly 21 has a seat body 211, at least one limiting column 212, and a mounting hole 213. At least one limiting column 212 is connected to the seat body 211, and at least one limiting column 212 has a fixing hole 2121 inside. The mounting hole 213 penetrates the seat body 211 and is a non-circular hole. The matching structure 23A of the support member 23 matches the shape of the mounting hole 213, so that the support member 23 can be detachably installed in the mounting hole 213. From the front view direction of the support assembly 21, the seat body 211 has a thickness D1, and the thickness D1 is substantially the same as or similar to the thickness d1 of the neck 232 of the support member 23.

[0089] The periphery of the mounting hole 213 has at least one notch 2131 and at least one positioning protrusion 2133, wherein the notch 2131 extends outward relative to the radial direction of the mounting hole 213, and the positioning protrusion 2133 is recessed inward relative to the radial direction of the mounting hole 213, wherein at least one notch 2131 is disposed adjacent to at least one positioning protrusion 2133. When the support member is assembled on the support assembly, the notch 2131 can avoid the matching structure 23A of the support member 23, and the positioning protrusion 2133 abuts against the matching structure 23A of the support member 23 to position each other, thereby avoiding unnecessary rotation of the support member 23 during assembly.

[0090] In this embodiment, when the support member 23 is assembled on the support assembly 21, the convex portion 2331 of the support member 23 is avoided, and the concave portion 2333 of the support member 23 can avoid the positioning convex portion 2133. When the support member 23 is assembled on the support assembly 21, the positioning convex portion 2133 and the abutting convex portion 2321 of the support member 23 are mutually positioned. In this embodiment, the mounting hole 213 has a center O2, and the distance R2 from the notch 2131 to the center O2 is greater than the distance p2 from the positioning convex portion 2133 to the center O2. Preferably, the notch 2131 has a shape corresponding to the convex portion 2331, and the positioning convex portion 2133 has a shape corresponding to the notch 2333. Preferably, the distance R2 from the notch 2131 to the center O2 is greater than or equal to the distance R1 from the convex portion 2331 to the center O1. In this embodiment, the periphery of the mounting hole 213 has four notches 2131 and four positioning convex portions 2133.

[0091] See also Fig. 6A and Figure 6B In order to more clearly illustrate the relative positions of the support member 23 and the support assembly 21, the base 10 is omitted in the figure. When the support member 23 is accommodated in the support assembly 21, the user can directly hold the contact portion 231 of the support member 23 or hold it through a robotic arm, align the protrusion 2331 of the support member 23 with the notch 2131 of the mounting hole 213 and insert it into the mounting hole 213 until the lower surface of the contact portion 231 contacts the upper surface 2115 of the seat body 211. At this time, the contact portion 231 is located above the upper surface 2115 of the seat body 211, the bottom 233 is located below the lower surface 2117 of the seat body 211, and the neck 232 is accommodated in the mounting hole 213. See also Fig. 8A , Fig. 8A for Fig. 6A 2 is a cross-sectional view of plane B, at which time the supporting protrusion 2321 and the positioning protrusion 2133 do not contact each other.

[0092] Next, please refer to Fig. 7A and Figure 7B After the support member 23 is rotated in one direction, the protrusion 2331 and the notch 2131 are offset from each other in the vertical direction, so that the upper surface of the bottom 233 contacts the lower surface of the base 211 to prevent the support member 23 from being separated from the vertical direction. Figure 8B , Figure 8B for Fig. 7AThe support member 23 is rotated until the abutting protrusion 2321 and the positioning protrusion 2133 abut against each other, so that the support member 23 is located at the positioning position, and the support member 23 is locked from the bottom of the base 10 by the installation component 24, so that the support member 23 is installed in the support component 21 set on the base 10, that is, the installation of the support mechanism 20 is completed. By the abutting protrusion 2321 and the positioning protrusion 2133 abut against each other, the support member 23 can be prevented from rotating relative to the support component 21 during the process of the installation component 24 locking the support member 23. Preferably, the distance t1 from the center O1 of the support member 23 to the abutting protrusion 2321 is greater than the distance p2 from the center O1 of the support member 23 to the positioning protrusion 2133, so that the positioning protrusion 2133 of the installation hole 213 can abut against the support member 23 to prevent the support member 23 from rotating relative to the support component 21. In this embodiment, the installation component 24 is a screw, and the fixing hole 234 is a screw hole corresponding to the screw. The support member 23 is rotated until the direction in which the supporting protrusion 2321 and the positioning protrusion 2133 abut against each other is the same as the direction in which the installation component 24 locks the support member 23, so that when the support member 23 is locked, the supporting protrusion 2321 and the positioning protrusion 2133 are forced to be in continuous contact, thereby avoiding unnecessary rotation of the support member 23 during the locking process, thereby increasing the installation efficiency.

[0093] The following will describe the process of installing the detachable support mechanism of the invention on the installation interface of the base. Figure 2 and Figure 5A First, the support component 21 is fixed through the fixing component 22 from the through hole 102 of the base 10 to the fixing hole 2121 in the limiting column 212. The fixing component 22 can be riveted into the limiting column 212 using a knurled pin or locked by a screw.

[0094] Second, see Fig. 6A and Figure 6B , align the protrusion 2331 of the support member 23 with the notch 2131 of the mounting hole 213 and insert the support member 23 into the mounting hole 213 until the lower surface 2315 of the contact portion 231 and the upper surface 2115 of the seat body 211 contact each other.

[0095] Next, see Fig. 7A and Figure 7B , the support member 23 is rotated in one direction, the protrusion 2331 of the support member 23 and the notch 2131 of the mounting hole 213 are offset in the vertical direction, so that the upper surface 2335 of the bottom 233 and the lower surface 2117 of the seat body 211 contact each other. Figure 8B , the support member 23 is rotated until the positioning protrusion 2133 contacts the abutting protrusion 2321 , so that the support member 23 reaches the positioning position.

[0096] Finally, the support member 23 is locked by the mounting assembly 24 from below the through hole 103 of the base, and the installation of the support mechanism 20 is completed. When the support member 23 is arranged in the mounting hole 213, the abutting protrusion 2321 can be forced to continuously abut against the positioning protrusion 2133 of the mounting hole 213, so as to prevent the support member 23 from rotating relative to the support assembly 21 during the installation process.

[0097] When the support member 23 is to be replaced, the mounting assembly 24 is first removed, and then the support member 32 is rotated until the protrusion 2331 of the support member 23 is aligned with the notch 2131 of the mounting hole 213 to remove the support member 23 from the mounting hole 213 . The support member 23 can then be replaced by repeating the above steps.

[0098] The supporting mechanism of the second embodiment of the present invention can be found in Fig. 9 The difference between the second embodiment and the first embodiment lies in the structures of the support member 33 and the support assembly 31 .

[0099] The detachable support mechanism of the second embodiment includes a support assembly 31 and a support member 33. The support assembly 31 is disposed on the mounting interface 101 of the base 10, and the support member 33 is detachably mounted on the support assembly 31.

[0100] See also Fig.11A and Fig. 11B The support member 33 includes a body 331, a matching structure 33A, and a fixing hole (not shown). The body 331 is generally cylindrical, and a plurality of contact protrusions 3311 are formed on its upper surface to reduce the contact area between the mask and the support member 33 when the mask is carried. The matching structure 33A is used to match the mounting hole 313 of the support assembly 31, so that the support member 33 is accommodated in the mounting hole 313 of the support assembly 31. In this embodiment, the matching structure 33A has an anti-rotation structure 332 protruding outward from the body 331, and the anti-rotation structure 332 has a thickness d2 when viewed from the side. The fixing hole is formed in the body 331 and partially penetrates the body 331.

[0101] See also Fig. 12A and Fig. 12B The support assembly 31 has a seat body 311, at least one limiting column 312, and a mounting hole 313. At least one limiting column 312 is connected to the seat body 311, and at least one limiting column 312 is provided with a fixing hole (same as the fixing hole 2121 of the first embodiment) inside. The mounting hole 213 passes through the seat body 311 and is a non-circular hole. The cross-sectional shape of the anti-rotation structure 332 matches the shape of the mounting hole 313, so that the support member 33 can be accommodated in the mounting hole 313, and can resist the mounting hole 313 to prevent the support member 33 from rotating. From the front view direction of the support assembly 31, the seat body 311 has a thickness D2, and the thickness D2 is substantially the same as or similar to the thickness d2 of the anti-rotation structure 332 of the support member 33.

[0102] The following will describe the process of installing the detachable support mechanism of the second embodiment of the present invention on the base 10. Fig.10 First, the support component 31 is fixed through the fixing component 22 from the through hole 102 of the lower cover to the fixing hole 2121 in the limiting column 312. The fixing component 22 can be riveted into the limiting column 312 using a knurled pin or locked by a screw.

[0103] Next, the user can directly hold or use a robot arm to hold the matching structure 33A of the support member 33, align it with the mounting hole 313, and put it into the mounting hole 313. Next, the support member 33 is installed from below the through hole 103 of the base through the mounting assembly 24, and the installation of the support mechanism is completed. By matching the cross-sectional shape of the anti-rotation structure 332 and the shape of the mounting hole 313, when the support member 33 is set in the mounting hole 313, the anti-rotation structure 332 can be forced to continuously abut against the periphery of the mounting hole 313, thereby preventing the support member 33 from rotating relative to the support assembly 31 during the installation process.

[0104] If the support member 33 needs to be replaced, the mounting assembly 24 is removed, and then the support member 33 can be vertically removed, and then the above steps are repeated to replace the support member 33. After the support assembly 31 is fixed to the base 10, it does not need to be disassembled and replaced, which can avoid waste of materials and costs.

[0105] The detachable support mechanism of the first embodiment and the second embodiment of the present invention has a detachable design of the support members 23, 33 and the support components 21, 31, which not only has a quick replacement function, but also has a higher degree of freedom in matching and combination.

[0106] Preferably, the support components 21, 31 and the support members 23, 33 can be made of different materials or have different surface treatments. For example, the support components 21, 31 can be made of more cost-effective materials, and the support members 23, 33 can select suitable materials according to actual usage requirements. Preferably, the support members 23, 33 can be made of more wear-resistant materials, such as materials with a glass transition temperature (Tg) of 200°C (392°F) (inclusive) or above, and / or in general atmospheric environment or vacuum environment, the selected materials are insulating materials or materials with static dissipation function (such as surface resistance between 104 and 1011 (Ω / sq)).

[0107] Preferably, in the embodiment of the present invention, the support members 23 and 33 are made of polyimide (Pi), which has a significant improvement in wear and service life. In addition, the material of the support members 23 and 33 themselves can be plastic or metal, and processed by surface treatment, surface coating, etc. The glass transition temperature of the coating material selected for the support members 23 and 33 is 200°C (392°F) (inclusive) or above, and / or in a general atmospheric environment or a vacuum environment, it can be insulated or have the function of static dissipation to improve the service life of the support members 23 and 33.

[0108] By making the support members 23 and 33 made of more wear-resistant and higher-performance materials, the wear resistance and service life of the support members 23 and 33 are effectively improved, and the dust pollution of the mask is reduced.

[0109] The detailed explanation of the above-mentioned embodiments is only intended to explain the present invention so as to facilitate a better understanding of the present invention. However, these descriptions cannot be interpreted as limitations on the present invention for any reason. In particular, the various features described in different embodiments may also be arbitrarily combined with each other to form other embodiments. Unless there is a clear description to the contrary, these features should be understood to be applicable to any embodiment and are not limited to the described embodiments.

Claims

1. A mask box with a detachable support mechanism, which is suitable for a double-layer box, comprising an outer box and an inner box contained therein, characterized in that: The inner box includes: A base, and at least one supporting mechanism, wherein the supporting mechanism is disposed on the base; The support mechanism includes: a support assembly connected to a mounting interface of the base, the support assembly comprising a base, at least one limiting column, and a mounting hole, at least one limiting column is connected to the base, and the mounting hole penetrates the base and is a non-circular hole; and A support member has a matching structure for matching the mounting hole, so that the support member can be detachably accommodated in the mounting hole.

2. The reticle box with a detachable supporting mechanism according to claim 1, characterized in that: The matching structure has at least one anti-rotation structure. When the support member is disposed in the mounting hole, at least one of the anti-rotation structures abuts against an edge of the mounting hole.

3. The reticle box with a detachable supporting mechanism as claimed in claim 2, characterized in that: The thickness of the anti-rotation structure is the same as the thickness of the seat body.

4. The reticle box with a detachable supporting mechanism according to claim 2, characterized in that: The support member includes a contact portion, the matching structure includes a neck and a bottom, the contact portion and the bottom are connected through the neck, and the neck has at least one anti-rotation structure.

5. The reticle box with a detachable supporting mechanism according to claim 1, characterized in that: The support member includes a contact portion, the matching structure includes a neck and a bottom, the bottom is provided with at least one protrusion, and at least one of the protrusions protrudes outward from the bottom; the mounting hole is provided with at least one notch, and at least one of the notches corresponds to the shape of at least one of the protrusions and extends outward from the periphery of the mounting hole.

6. The reticle box with a detachable supporting mechanism according to claim 5, characterized in that: The neck is provided with at least one anti-rotation structure, and the mounting hole is provided with at least one positioning protrusion, which protrudes inward from the periphery of the mounting hole. The positioning protrusion abuts against at least one of the anti-rotation structures to prevent the support member from rotating relative to the support assembly.

7. The reticle box with a detachable supporting mechanism according to claim 6, characterized in that: At least one of the anti-rotation structures is a supporting protrusion extending outward from the neck surface, and the supporting protrusion of the neck is offset from at least one of the protrusions of the bottom in a vertical direction.

8. The reticle box with a detachable supporting mechanism according to claim 6, characterized in that: The bottom has at least one notch, and the at least one notch is recessed inward from the radial direction of the bottom surface, so that when the support member is placed in the mounting hole, the bottom avoids the positioning protrusion of the mounting hole.

9. The reticle box with a detachable supporting mechanism according to claim 8, characterized in that: At least one of the recesses of the bottom is disposed adjacent to at least one of the protrusions.

10. The reticle box with a detachable supporting mechanism according to claim 6, characterized in that: The support member includes a fixing hole formed at the bottom. After the support member is rotated to a positioning position where the abutting protrusion and the positioning protrusion abut against each other, the support member is fixed in the mounting hole through the cooperation of a fixing component and the fixing hole.

11. The reticle box with a detachable supporting mechanism according to claim 10, characterized in that: When the support member is located at the positioning position, a lower surface of the contact portion contacts an upper surface of the base body, and an upper surface of the bottom portion contacts a lower surface of the base body.

12. The reticle box with a detachable supporting mechanism according to claim 1, characterized in that: The support member has a glass transition temperature greater than or equal to 200°C.

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