Inductance coil structure and assembling method thereof

Abstract

The invention provides an inductance coil structure. The inductance coil structure comprises a plurality of coil windings and a plurality of limiting columns. The coil windings are coaxially arranged and separated from each other. Each coil winding comprises a plurality of connecting assemblies and a plurality of flexible plates, and the connecting assemblies and the plates are connected in an interactive mode. The limiting columns are arranged on a plane, and each limiting column comprises at least one limiting groove. The limiting grooves of the limiting columns limit the plates, so that the plates have the same or different distances relative to the plane. Therefore, the inductance coil structure is easy to disassemble and assemble, so that the size and the distance of the coil winding can be adaptively adjusted.

Description

Technical Field

[0001] The present disclosure relates to an inductor coil structure and an assembly method thereof, and more particularly to an inductor coil structure and an assembly method thereof for plasma etching equipment. Background Art

[0002] Inductively Coupled Plasma (ICP) etching equipment injects RF power into an inductor located inside a cavity to increase the movement distance of electrons by inductive coupling, thereby exciting a high-density plasma in a high vacuum environment. In order to cope with different materials to be etched, since the size and configuration position of the inductor coil are fixed in the existing ICP etching equipment and cannot be easily changed, the ICP etching process can only be completed by adjusting the RF range and voltage power of the RF power supply, resulting in the uniformity of the plasma concentration and the electron temperature distribution being limited, which in turn affects the yield of the product. In view of this, the development of an inductor coil structure that can adaptively adjust the coil size and configuration position has become a problem that the relevant industry players are eager to solve. Summary of the invention

[0003] Therefore, the purpose of the present disclosure is to provide an inductor coil structure and an assembly method thereof, which utilizes connecting components to assemble plates to form a coil winding, is easy to disassemble and assemble, and has a segmented adjustable function. Furthermore, the shape of the coil winding can be defined by the arrangement of the limit posts on a plane (such as a base or a top seat). In summary, the present disclosure can solve the problem in the prior art that the coil size and configuration position are fixed and cannot be adjusted.

[0004] According to one embodiment of the present disclosure, an inductor coil structure is provided, which includes a plurality of coil windings and a plurality of limiting posts. The coil windings are coaxially arranged and separated from each other, wherein each coil winding includes a plurality of connecting components and a plurality of flexible plates, and the connecting components are interconnected with the plates. The limiting posts are arranged on a plane, wherein each limiting post includes at least one limiting groove. The at least one limiting groove of each limiting post limits each plate, so that the plates have the same or different distances relative to the plane.

[0005] Other embodiments of the aforementioned embodiment are as follows: Each of the aforementioned connecting components comprises a connecting member, two positioning members and two fixing members. The connecting member comprises two guide holes arranged symmetrically. The two positioning members are respectively provided in two of the plates and are respectively movably provided in the two guide holes. The two fixing members are respectively provided in the two positioning members to position the two of the plates.

[0006] Other embodiments of the aforementioned implementation are as follows: there is a distance between two of the aforementioned coil windings that are arranged at intervals from each other, and the length of the distance is between 10 mm and 20 mm.

[0007] Other embodiments of the aforementioned implementation are as follows: each of the aforementioned coil windings is divided into a plurality of inductance coils with different radii, and there is a spacing between two of these inductance coils arranged at intervals from each other, and they are electrically connected to each other via a connecting component, and the length of the spacing is between 10 mm and 20 mm.

[0008] Other embodiments of the aforementioned embodiment are as follows: The aforementioned connection assembly includes a connection plate, two positioning members and two fixing members. A guide hole is provided at one end of the connection plate. One of the two positioning members is inserted through one of the two inductance coils and is movably inserted through the guide hole. The other of the two positioning members is inserted through the other of the two inductance coils and the other end of the connection plate. The two fixing members are respectively assembled on the two positioning members so that the two inductance coils are electrically connected to each other.

[0009] Other embodiments of the aforementioned implementation are as follows: the number of the at least one limiting groove of each of the aforementioned limiting pillars is two. The two limiting grooves respectively limit the two of the inductor coils.

[0010] Other embodiments of the aforementioned implementation manner are as follows: each of the aforementioned plates is arc-shaped, and each of the aforementioned coil windings is spiral-shaped.

[0011] Other embodiments of the aforementioned implementation manner are as follows: each of the aforementioned plates is in a straight bar shape, and each of the aforementioned coil windings is in a polygonal shape.

[0012] Other embodiments of the aforementioned implementation are as follows: the aforementioned limiting grooves are respectively in surface contact with the plates.

[0013] According to another embodiment of the present disclosure, an assembly method of an inductor coil structure is provided, comprising the following steps: a limiting column setting step, a coil winding assembly step, and a plate limiting step. The limiting column setting step sets a plurality of limiting columns on a plane, wherein each limiting column comprises a limiting groove. The coil winding assembly step interactively assembles a plurality of connecting components and a plurality of flexible plates to form a plurality of coil windings. The plate limiting step respectively embeds these plates into the plurality of limiting grooves of these limiting columns to limit these plates. These coil windings are coaxially arranged and separated from each other. These plates have the same or different distances relative to the plane. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a three-dimensional schematic diagram showing the structure of an inductor coil in a first example according to a first implementation mode of the present disclosure;

[0015] Figure 2A It is shown Figure 1 A top view of an inductor coil structure;

[0016] Figure 2B It is shown Figure 1 A top view of a coil winding of an inductor coil structure;

[0017] Figure 3 is a top view showing the structure of the inductor coil in the second embodiment according to the first embodiment of the present disclosure;

[0018] Figure 4 is a three-dimensional schematic diagram showing an inductor coil structure applied to a plasma etching device in a third embodiment according to the first embodiment of the present disclosure;

[0019] Figure 5 It is shown Figure 4 A partially exploded view of a plasma etching device and an inductor coil structure;

[0020] Figure 6 It is shown Figure 4 An exploded schematic diagram of a first coil winding of an inductor coil structure;

[0021] Figure 7 It is shown Figure 4 An exploded schematic diagram of a second coil winding of an inductor coil structure;

[0022] Figure 8 It is shown Figure 4 An exploded schematic diagram of a third coil winding of an inductor coil structure;

[0023] Fig. 9 is a schematic flow chart showing a method for assembling an inductor coil structure according to a second embodiment of the present disclosure;

[0024] Fig. 10A It is shown Fig. 9 A schematic diagram of the limiting column setting steps of the assembly method;

[0025] Fig. 10B It is shown Fig. 9 A schematic diagram of the coil winding composition steps of the assembly method;

[0026] Fig. 10C It is shown Fig. 9 A schematic diagram of a panel limiting step of an assembly method;

[0027] Fig. 10D It is shown Fig. 9 A schematic diagram of a first assembly step of a panel limiting step of an assembly method; and

[0028] Fig. 10E It is shown Fig. 9 A schematic diagram of the second connection step of the panel limiting step of the assembly method.

[0029] Description of reference numerals:

[0030] 10,10a,10b: Inductor coil structure

[0031] 100,200,300,110a,120a,130a,140a,150a: coil winding

[0032] 100b: First coil winding

[0033] 200b: Second coil winding

[0034] 300b: Third coil winding

[0035] 110,110b,120,120b,130,130b,140,140b,210,210b,220,220b,310,310b,320,320b: Inductor

[0036] 101,101b,201,201b,301,301b: Connecting components

[0037] 1011b: Connectors

[0038] 1012b,152b: Positioning parts

[0039] 1013b,153b: Fixing parts

[0040] 102,102b,202,202b,302,302b: Plate

[0041] 150,150b,250,250b,350,350b: connection components

[0042] 151b: Connecting plate

[0043] 160b, 260b, 360b: Connecting plate

[0044] 400,400a: Limit column

[0045] 410,412b: Limiting slot

[0046] 410b: First limit column

[0047] 411b: Column

[0048] 420b: Second limit column

[0049] 430b: The third limit column

[0050] 500,512b: Base

[0051] 501: Plane

[0052] 500b: Plasma Etching Equipment

[0053] 510b: Housing

[0054] 514b: Top seat

[0055] 5141b: First support seat

[0056] 5142b: Second support seat

[0057] 5143b: The third support seat

[0058] 520b: Capacitor components

[0059] C1: First variable capacitor

[0060] C2: Second variable capacitor

[0061] C3: The third variable capacitor

[0062] G, G1: Spacing

[0063] S10: Assembly method of inductor coil structure

[0064] S11: Limit column setting steps

[0065] S12: Coil winding composition steps

[0066] S13: Plate limiting step

[0067] S131: First group connection step

[0068] S132: Second group connection step DETAILED DESCRIPTION

[0069] The following will describe various embodiments of the present disclosure with reference to the accompanying drawings. For the sake of clarity, many practical details will be described together in the following description. However, it should be understood that these practical details should not be used to limit the present disclosure. That is, in some embodiments of the present disclosure, these practical details are not necessary. In addition, in order to simplify the drawings, some conventional structures and elements will be shown in a simple schematic manner in the drawings; and repeated elements may be represented by the same number.

[0070] In addition, in this article, when a certain element (or unit or module, etc.) is "connected / linked" to another element, it may refer to that the element is directly connected / linked to another element, or it may refer to that a certain element is indirectly connected / linked to another element, that is, there are other elements between the element and the other element. When it is clearly stated that a certain element is "directly connected / linked" to another element, it means that there are no other elements between the element and the other element. The terms first, second, third, etc. are only used to describe different elements, and there is no restriction on the elements themselves. Therefore, the first element can also be renamed as the second element. Moreover, the combination of elements / units / circuits in this article is not a generally known, conventional or existing combination in this field. Whether the elements / units / circuits themselves are existing cannot be used to determine whether their combination relationship is easy to be easily completed by those with ordinary knowledge in the technical field.

[0071] Please refer to Figure 1 , Figure 2A and Figure 2B ,in Figure 1 is a three-dimensional schematic diagram showing an inductor coil structure 10 in a first example of a first implementation mode of the present disclosure; Figure 2A It is shown Figure 1 A top view of the inductor coil structure 10; and Figure 2B It is shown Figure 1 A top view of a coil winding 100 of an inductor coil structure 10 is shown. Figures 1 to 2BIt can be seen that the inductor coil structure 10 includes a plurality of coil windings 100, 200, 300 and a plurality of limiting posts 400, and these coil windings 100, 200, 300 are coaxially arranged and separated from each other. The coil winding 100 includes a plurality of connecting components 101 and a plurality of flexible plates 102, and these connecting components 101 and these plates 102 are mutually assembled. The coil winding 200 includes a plurality of connecting components 201 and a plurality of flexible plates 202, and these connecting components 201 and these plates 202 are mutually assembled. The coil winding 300 includes a plurality of connecting components 301 and a plurality of flexible plates 302, and these connecting components 301 and these plates 302 are mutually assembled. The limiting posts 400 are arranged on a plane 501 of a base 500 and have a fixed height. Each limiting column 400 includes at least one limiting groove 410. The at least one limiting groove 410 of each limiting column 400 limits each plate 102, 202, 302 so that the plates 102, 202, 302 have the same distance (i.e., the same height) relative to the plane 501; in other words, the coil windings 100, 200, 300 are all located on the same horizontal plane. Thus, the inductor coil structure 10 of the present disclosure is easy to disassemble and assemble, and the user can add or reduce the coil for any one of the coil windings 100, 200, 300 or any of its line segments, so that the size of the coil, such as the number of turns and the total length, can be adaptively adjusted, thereby changing the electromagnetic field generated by each coil winding 100, 200, 300 after power is turned on.

[0072] Specifically, the coil winding 100 is located in the innermost layer of the inductor coil structure 10, and can be divided into four inductors 110, 120, 130, 140 and three connection components 150 formed by the interconnection of the connection component 101 and the plate 102. The inductors 110, 120, 130, 140 have different radii and are arranged at intervals from each other. The inductors 110, 120, 130, 140 have a first radius, a second radius, a third radius and a fourth radius respectively. The first radius is smaller than the second radius, the second radius is smaller than the third radius, and the third radius is smaller than the fourth radius. The connecting component 150 is connected between the two inductors 110 and 120 , another connecting component 150 is connected between the two inductors 120 and 130 , and another connecting component 150 is connected between the two inductors 130 and 140 , so that the inductors 110 , 120 , 130 , and 140 can be electrically connected in sequence from the inside to the outside through the three connecting components 150 .

[0073] The coil winding 200 is located in the middle layer of the inductor coil structure 10, and can be divided into two inductors 210, 220 and a connecting component 250 formed by the interconnection of the connecting component 201 and the plate 202. The inductors 210, 220 have different radii and are arranged at intervals from each other, and a radius of the inductor coil 210 is smaller than a radius of the inductor coil 220. The connecting component 250 is connected between the two inductors 210, 220, so that the inductors 210, 220 can be electrically connected to each other via the connecting component 250.

[0074] The coil winding 300 is located at the outermost layer of the inductor coil structure 10, and can be divided into two inductors 310, 320 and a connecting component 350 formed by the interactive connection of the connecting component 301 and the plate 302. The inductors 310, 320 have different radii and are arranged at intervals from each other, and a radius of the inductor coil 310 is smaller than a radius of the inductor coil 320. The connecting component 350 is connected between the two inductors 310, 320, so that the inductors 310, 320 can be electrically connected to each other through the connecting component 350. Each limiting post 400 can be made of a plastic material, and each plate 102, 202, 302 can be made of a flexible metal material (such as copper), and after being embedded in the limiting post 400 and positioned, it presents an arc shape, so that each coil winding 100, 200, 300 presents a spiral shape. In other embodiments, the coil winding of the present disclosure may also be composed of a single inductor coil, or more than four inductor coils. Therefore, the coil winding of the present disclosure is not limited to the number of inductor coils; similarly, the inductor coil structure of the present disclosure is not limited to the number of coil windings.

[0075] In addition, the inductors 110, 120, 130, 140 arranged at intervals from each other may have a spacing G between them, the inductors 210, 220 arranged at intervals from each other may have a spacing G, the inductors 310, 320 arranged at intervals from each other may have a spacing G, and the length of the spacing G may be between 10 mm and 20 mm.

[0076] Please refer to Figure 3 , which is a top view of the inductor coil structure 10a in the second embodiment according to the first embodiment of the present disclosure. Figure 3It can be seen that the inductor coil structure 10a includes a plurality of coil windings 110a, 120a, 130a, 140a, 150a, 160a and a plurality of limiting posts 400a. The coil windings 110a, 120a, 130a, 140a, 150a, 160a are coaxially arranged in sequence from the inside to the outside and are arranged at intervals from each other. Each coil winding 110a, 120a, 130a, 140a, 150a, 160a is composed of a plurality of connecting components (not separately labeled) and a plurality of plates (not separately labeled) that are interconnected. As the coil windings 110a, 120a, 130a, 140a, 150a, 160a are arranged from the inner circle to the outer circle, the length of the plate can be correspondingly lengthened. Each plate is limited by the limiting column 400a and presents a straight bar shape, and each coil winding 110a, 120a, 130a, 140a, 150a, 160a presents a polygon. The connecting component is located at the inner and outer corners of the polygon and is used to connect two adjacent plates in the coil windings 110a, 120a, 130a, 140a, 150a, 160a. There may be a spacing G1 between two coil windings 110a, 120a, 130a, 140a, 150a, 160a that are spaced apart from each other, and the length of the spacing G1 is between 10 mm and 20 mm. In addition, since the plate is in a straight bar shape, the multiple limiting grooves of the multiple limiting columns 400a can respectively contact the multiple plates, so that each coil winding 110a, 120a, 130a, 140a, 150a, 160a can be more firmly positioned on the limiting column 400a, thereby improving the overall stability of the inductor coil structure 10a.

[0077] Please refer to Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8 ,in Figure 4 is a three-dimensional schematic diagram showing an inductor coil structure 10b applied to a plasma etching device 500b in a third embodiment according to the first embodiment of the present disclosure; Figure 5 It is shown Figure 4 A partially exploded view of a plasma etching apparatus 500b and an inductor coil structure 10b; Figure 6 It is shown Figure 4 An exploded schematic diagram of a first coil winding 100b of an inductor coil structure 10b; Figure 7 It is shown Figure 4 An exploded schematic diagram of a second coil winding 200b of the inductor coil structure 10b; and Figure 8 It is shown Figure 4 The exploded schematic diagram of the third coil winding 300b of the inductor coil structure 10b is shown in FIG. Figure 4 and Figure 5It can be seen that the plasma etching equipment 500b includes a shell 510b and a capacitor component 520b. The shell 510b has a accommodating space and includes a base 512b and a top seat 514b, and the accommodating space is located between the base 512b and the top seat 514b. The inductor coil structure 10b is arranged in the accommodating space and is electrically connected to the capacitor component 520b arranged on the side wall of the top seat 514b. The top seat 514b may include a first support seat 5141b, a second support seat 5142b and a third support seat 5143b. The first support seat 5141b, the second support seat 5142b and the third support seat 5143b may be three annular planes with different diameters, respectively, and they may be assembled into one from the inside to the outside.

[0078] The inductor coil structure 10b includes a plurality of coil windings and a plurality of limiting posts. These coil windings can be divided into a first coil winding 100b, a second coil winding 200b and a third coil winding 300b. These limiting posts can be divided into a plurality of first limiting posts 410b, a plurality of second limiting posts 420b and a plurality of third limiting posts 430b. These first limiting posts 410b are used to support the first coil winding 100b and position the first coil winding 100b on the first support seat 5141b. These second limiting posts 420b are used to support the second coil winding 200b and position the second coil winding 200b on the second support seat 5142b. These third limiting posts 430b are used to support the third coil winding 300b and position the third coil winding 300b on the third support seat 5143b. The first coil winding 100b, the second coil winding 200b and the third coil winding 300b are positioned by the first limiting pillar 410b, the second limiting pillar 420b and the third limiting pillar 430b respectively and can be coaxially arranged and separated from each other. The following paragraphs will be used with reference to the drawings to explain the detailed structure of each coil winding in detail.

[0079] Depend on Figure 5 and Figure 6 It can be seen that the first coil winding 100b includes four inductors 110b, 120b, 130b, 140b and three connecting components 150b. Each of the inductors 110b, 120b, 130b, 140b can be formed by a plurality of connecting components 101b and a plurality of flexible plates 102b that are interconnected.

[0080] The connecting assembly 101b may include a connecting member 1011b, two positioning members 1012b and two fixing members 1013b. The connecting member 1011b includes two guide holes symmetrically arranged. The two positioning members 1012b are respectively arranged on the two plates 102b and are respectively movably arranged on the two guide holes. The two fixing members 1013b are respectively arranged on the two positioning members 1012b to position the two plates 102b.

[0081] The connecting component 150b is connected between the two inductors 110b and 120b, another connecting component 150b is connected between the two inductors 120b and 130b, and another connecting component 150b is connected between the two inductors 130b and 140b, so that the inductors 110b, 120b, 130b, and 140b can be electrically connected in sequence from the inside to the outside through the three connecting components 150b. Taking the connecting component 150b connected between the two inductors 120b and 130b as an example, the connecting component 150b can include a connecting plate 151b, two positioning members 152b, and two fixing members 153b. One end of the connecting plate 151b is provided with a guide hole. One of the two positioning members 152b is inserted into one end of the inductor 120b (i.e., the plate 102b located at the tail end of the inductor 120b) and is movably inserted into the guide hole. The other of the two positioning members 152b is inserted through one end of the inductor 130b (i.e., the plate 102b at the head end of the inductor 130b) and the other end of the connecting plate 151b. The two fixing members 153b are respectively assembled on the two positioning members 152b, so that the two inductors 120b and 130b are electrically connected to each other. The rest of the connecting components 150b are similar.

[0082] Each first limiting column 410b may include a column 411b of different lengths and at least one limiting groove 412b, and the number of the at least one limiting groove 412b may be two. The two limiting grooves 412b respectively limit the plate 102b of one of the two inductor coils 110b, 120b, 130b, 140b arranged at intervals from each other and the plate 102b of the other of the two inductor coils 110b, 120b, 130b, 140b. The two plates 102b embedded in the same first limiting column 410b will have the same distance from the first support seat 5141b, that is, the two plates 102b have the same height relative to the base 512b. It is worth noting that, since the plates 102b of the inductor 110b are respectively embedded in the limiting grooves 412b of the first limiting pillars 410b with different column lengths, the different plates 102b in the inductor 110b can have different distances relative to the first support seat 5141b, that is, the different plates 102b in the inductor 110b have different heights relative to the base 512b; in other words, the inductor 110b can present a spiral ascending structure. The rest of the inductors 120b, 130b, 140b are similar. In addition, in the inductor 110b, in response to the first limiting pillars 410b with different column lengths being embedded, the horizontal height of the two plates 102b assembled between the two ends of the connecting component 101b can be changed by adjusting the position of the positioning member 1012b in the connecting member 1011b.

[0083] In addition, the first coil winding 100b may further include two connecting plates 160b, two ends of which are respectively connected to one end of the inductor 110b (i.e., the plate 102b located at the head end of the inductor 110b) and one end of the inductor 140b (i.e., the plate 102b located at the tail end of the inductor 140b). The other two ends of the two connecting plates 160b pass through the first support seat 5141b and are electrically connected to the capacitor component 520b. The capacitor component 520b is arranged on the side wall of the top seat 514b and includes a first variable capacitor C1, a second variable capacitor C2 and a third variable capacitor C3. The first variable capacitor C1, the second variable capacitor C2 and the third variable capacitor C3 are respectively electrically connected to the two connecting plates 160b, and are used to change the electromagnetic field generated by the first coil winding 100b, thereby adjusting the etching rate of the first coil winding 100b.

[0084] Depend on Figure 5 and Figure 7 It can be known that the second coil winding 200b includes two inductance coils 210b, 220b and a connection component 250b. Each inductance coil 210b, 220b can be composed of a plurality of connection components 201b and a plurality of flexible plates 202b that are interconnected. The connection component 250b is connected between the two inductance coils 210b, 220b to electrically connect the inductance coils 210b, 220b to each other. The inductance coils 210b, 220b are respectively embedded in two limiting grooves located on two sides of the second limiting column 420b. Since each second limiting column 420b has a different column length, the second coil winding 200b can present a spiral ascending structure.

[0085] In addition, the second coil winding 200b may further include two connecting plates 260b, two ends of which are respectively connected to one end of the inductor 210b (i.e., the plate 202b located at the head end of the inductor 210b) and one end of the inductor 220b (i.e., the plate 202b located at the tail end of the inductor 220b). The other two ends of the two connecting plates 260b pass through the second support seat 5142b and are electrically connected to the capacitor component 520b. The structure of the connecting component 201b is similar to that of the connecting component 101b, the structure of the connecting component 250b is similar to that of the connecting component 150b, and the structure of the second limiting column 420b is similar to that of the first limiting column 410b. The only difference is the difference in the size of the components, so the detailed structures of the aforementioned connecting component 201b, the connecting component 250b and the second limiting column 420b are not further described.

[0086] Depend on Figure 5 and Figure 8It can be known that the third coil winding 300b includes two inductance coils 310b, 320b and a connection component 350b. Each inductance coil 310b, 320b can be composed of a plurality of connection components 301b and a plurality of flexible plates 302b that are interconnected. The connection component 350b is connected between the two inductance coils 310b, 320b to electrically connect the inductance coils 310b, 320b to each other. The inductance coils 310b, 320b are respectively embedded in two limiting grooves located on two sides of the third limiting column 430b. Since each third limiting column 430b has a different column length, the third coil winding 300b can present a spiral ascending structure.

[0087] In addition, the third coil winding 300b may further include two connecting plates 360b, two ends of which are respectively connected to one end of the inductor 310b (i.e., the plate 302b located at the head end of the inductor 310b) and one end of the inductor 320b (i.e., the plate 302b located at the tail end of the inductor 320b). The other two ends of the two connecting plates 360b pass through the third support seat 5143b and are electrically connected to the capacitor component 520b. The structure of the connecting component 301b is similar to that of the connecting component 101b, the structure of the connecting component 350b is similar to that of the connecting component 150b, and the structure of the third limiting column 430b is similar to that of the first limiting column 410b. The only difference is the difference in the size of the components, so the detailed structures of the aforementioned connecting component 301b, the connecting component 350b and the third limiting column 430b are not further described.

[0088] Thus, the inductor coil structure 10b of the present disclosure is easy to disassemble and assemble, and has the function of being adjustable in sections, so as to achieve the adaptive adjustment of the size and spacing of the coil winding, thereby changing the overall inductance value of the coil winding. Furthermore, in addition to being able to adjust the number of turns or the total length of the coil winding according to demand through the structural configuration of the interconnection of the connecting components and the plate parts, the present disclosure also uses limit columns of different column lengths to position the plates in the coil winding at different horizontal positions, thereby being able to adjust the electromagnetic field strength generated by the coil winding for a specific etching area. In addition, the variable capacitor can be adjusted mechanically or electronically to achieve automatic adjustment of the electromagnetic field and etching rate.

[0089] Please refer to Fig. 9 , Fig. 10A , Fig. 10B , Fig. 10C , Fig. 10D and Fig. 10E ,in Fig. 9 is a schematic flow chart showing an assembly method S10 (hereinafter referred to as assembly method S10 ) of an inductor coil structure according to a second embodiment of the present disclosure; Fig. 10A It is shown Fig. 9 A schematic diagram of a limiting column setting step S11 of an assembly method S10; Fig. 10B It is shown Fig. 9 A schematic diagram of a coil winding forming step S12 of the assembly method S10; Fig. 10C It is shown Fig. 9 A schematic diagram of a panel limiting step S13 of an assembly method S10; Fig. 10D It is shown Fig. 9 A schematic diagram of a first assembly step S131 of the panel limiting step S13 of the assembly method S10; and Fig. 10E It is shown Fig. 9 Schematic diagram of the second assembly step S132 of the panel limiting step S13 of the assembly method S10. Figure 1 The inductor coil structure 10 provided in an embodiment of FIG. 2 illustrates the steps in the assembly method S10, but the assembly method S10 provided in the present disclosure is not limited to only applying Figure 1 The inductor structure 10 disclosed in FIG. 2 should be explained first. FIG. 10A to FIG. 10E Taking the assembly of the coil winding 300 in the inductor coil structure 10 as an example, the assembly method S10 is used to assemble the coil windings 100 and 200 in a similar manner, and thus will not be described in detail.

[0090] Depend on Fig. 9 and Fig. 10A It can be seen that the assembly method S10 includes the following steps: a limiting column setting step S11, a coil winding forming step S12 and a plate limiting step S13. The limiting column setting step S11 sets a plurality of limiting columns 400 on the plane 501 of the base 500.

[0091] Depend on Fig. 10B It can be seen that the coil winding forming step S12 alternately assembles a plurality of connection components 301 and a plurality of flexible plates 302 to form two inductors 310 and 320 of the coil winding 300. The inductor 310 belongs to the inner circle of the coil winding 300, and the inductor 320 belongs to the outer circle of the coil winding 300.

[0092] Depend on Fig. 10C It can be known that the plate limiting step S13 includes respectively embedding the plurality of plates 302 of the inductor 310 into the plurality of limiting grooves 410 with the notches of the limiting pillars 400 facing inwards, so as to limit the plates 302 of the inductor 310 .

[0093] Depend on Fig. 9 , Fig. 10D and Fig. 10EIt can be known that the plate limiting step S13 may further include a first assembly step S131 and a second assembly step S132. The first assembly step S131 assembles one end of the connecting component 350 to one end of the inductor 310 (i.e., the plate 302 located at the tail end of the inductor 310). The second assembly step S132 assembles the other end of the connecting component 350 to one end of the inductor 320 (i.e., the plate 302 located at the head end of the inductor 320), and then respectively embeds the multiple plates 302 of the inductor 320 into the multiple limiting grooves 410 with the notches of the limiting columns 400 facing outward, so that the connecting component 350 is assembled between the inductors 310 and 320, so that the inductors 310 and 320 can be electrically connected to each other through the connecting component 350.

[0094] Repeating the limiting column setting step S11, the coil winding composition step S12 and the plate limiting step S13 of the assembly method S10, the remaining coil windings 100, 200 can be installed on the base 500 to form an inductor coil structure 10, and the coil windings 100, 200, 300 are coaxially arranged and separated from each other. Thereby, the assembly method S10 of the present disclosure can be used to define the shape of each coil winding 100, 200, 300 or the pattern it presents through the arrangement of the limiting columns 400 on the plane 501, and each plate 102, 202, 302 has the same distance (i.e., the same height) relative to the plane 501. Furthermore, the assembly method S10 can also be applied to assembling Figure 3 and Figure 4 The disclosed inductor structures 10a, 10b. During the assembly of the inductor structure 10b, the plates 102b, 202b, 302b may have different distances relative to the top 514b (ie, they may have the same height relative to the base 512b).

[0095] In summary, the disclosed content has the following advantages: First, the inductor coil structure is easy to disassemble and assemble, and the size and spacing of the coil winding can be adaptively adjusted. Second, in addition to defining the shape of the coil winding by the arrangement of the limit posts, the limit posts of different lengths can be used to position the plates in the coil winding at different horizontal positions, thereby adjusting the electromagnetic field strength generated by the coil winding for a specific etching area. Third, the coil winding with a polygonal structure has higher stability.

[0096] Although the present disclosure has been disclosed in the above-mentioned implementation modes, it is not intended to limit the present disclosure. Any person skilled in the art may make various changes and modifications without departing from the concept and scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be determined by the claims.

Claims

1. An inductor coil structure, characterized in that: Include: A plurality of coil windings are coaxially arranged and separated from each other, wherein each of the coil windings comprises a plurality of connecting components and a plurality of flexible plates, and the plurality of connecting components are interconnected with the plurality of plates; and A plurality of limiting posts are arranged on a plane, wherein each of the limiting posts comprises at least one limiting groove, and the at least one limiting groove of each limiting post limits each of the plates, so that the plurality of plates have the same or different distances relative to the plane.

2. The inductor coil structure according to claim 1, characterized in that: Each of the connection components comprises: A connecting piece, comprising two guide holes symmetrically arranged; Two positioning members are respectively disposed through two of the plurality of plates and are respectively movably disposed through the two guide holes; and Two fixing members are respectively assembled on the two positioning members to position the two of the plurality of plate members.

3. The inductor coil structure according to claim 1, characterized in that: There is a distance between two of the plurality of coil windings spaced apart from each other, and the length of the distance is between 10 mm and 20 mm.

4. The inductor coil structure according to claim 1, characterized in that: Each of the coil windings is divided into a plurality of inductance coils with different radii. A distance is provided between two of the plurality of inductance coils arranged at intervals from each other and they are electrically connected to each other via a connecting component. The length of the distance is between 10 mm and 20 mm.

5. The inductor coil structure according to claim 4, characterized in that: The connection component contains: A connecting plate, one end of which is provided with a guide hole; two positioning members, one of which is disposed through one of the two of the plurality of inductance coils and is movably disposed through the guide hole, and the other of which is disposed through the other of the two of the plurality of inductance coils and the other end of the connection plate; and Two fixing members are respectively assembled on the two positioning members so that two of the plurality of inductor coils are electrically connected to each other.

6. The inductor coil structure according to claim 4, characterized in that: The number of the at least one limiting groove of each limiting column is two, and the two limiting grooves respectively limit the two of the multiple inductor coils.

7. The inductor coil structure according to claim 1, characterized in that: Each of the plates is in an arc shape, and each of the coil windings is in a spiral shape.

8. The inductor coil structure according to claim 1, characterized in that: Each of the plates is in a straight bar shape, and each of the coil windings is in a polygonal shape.

9. The inductor coil structure according to claim 8, characterized in that: The plurality of limiting grooves are in surface contact with the plurality of plates respectively.

10. A method for assembling an inductor coil structure, characterized in that: The following steps are involved: a limiting column setting step, setting a plurality of limiting columns on a plane, wherein each of the limiting columns comprises a limiting groove; a coil winding forming step, interactively assembling a plurality of connection components and a plurality of flexible plates to form a plurality of coil windings; as well as a plate limiting step, respectively embedding the plurality of plates into the plurality of limiting grooves of the plurality of limiting pillars to limit the plurality of plates; Wherein, the plurality of coil windings are coaxially arranged and separated from each other; The plurality of plates have the same or different distances relative to the plane.

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