Vacuum suction cup type non-falling crystal bar gripper device and using method

Abstract

The invention discloses a vacuum suction cup type non-falling crystal bar gripper device which comprises a main body, a cover shell, a vacuum adsorption module and a vacuum breaking module, the main body comprises a first supporting frame and a second supporting frame, the cover shell comprises a first cover shell and a second cover shell, the first cover shell is arranged on the first supporting frame, and the second cover shell is arranged on the second supporting frame. The second supporting frame is provided with a second housing, and the lower portion of the first supporting frame is connected with the second supporting frame. The vacuum generator is adopted to generate negative pressure to the suction cup to suck and grab a crystal bar, the robot drives the gripper to carry the crystal bar above the crystal bar, the one-way valve and the logic valve stably keep the negative pressure on the suction cup in the carrying process to achieve the purpose that the crystal bar does not fall off when gas is cut off, and the normally-open electromagnetic valve is adopted to achieve the purpose that the crystal bar does not fall off when gas is cut off.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductors, and in particular relates to a vacuum suction cup type crystal rod gripper device that does not drop and a use method thereof. Background Art

[0002] Crystal ingots are generally transported using mechanical grippers or vacuum suction cup grippers. Mechanical grippers can easily damage the surface of the crystal ingot during use, while existing vacuum suction cup grippers may cause the crystal ingot to fall due to power outages or emergency situations, resulting in casualties and property losses, and the stability of the vacuum suction cup cannot be guaranteed. Summary of the invention

[0003] The purpose of the present invention is to overcome the shortcomings of the above-mentioned prior art and to provide a vacuum suction cup type crystal rod gripper device and a method of use. The present invention uses a vacuum generator to generate negative pressure to the suction cup to adsorb and grasp the crystal rod, and a robot drives the gripper to the top of the crystal rod for transportation. During the transportation process, a one-way valve and a logic valve are used to stably maintain the negative pressure on the suction cup to prevent the crystal rod from falling when the air is cut off, and a normally open solenoid valve is used to prevent the crystal rod from falling when the power is cut off.

[0004] In order to achieve the above invention purpose, the technical solution provided by the present invention is as follows:

[0005] A vacuum suction cup type crystal rod gripper device that does not drop, the device comprises a main body, a cover shell, a vacuum adsorption module and a vacuum breaking module, the main body comprises a first support frame and a second support frame, the cover shell comprises a first cover shell and a second cover shell, the first support frame is provided with a first cover shell, the second support frame is provided with a second cover shell, and the lower part of the first support frame is connected to the second support frame;

[0006] The vacuum adsorption module includes a normally open solenoid valve, a vacuum generator, a valve seat, a valve group and a suction cup assembly. The vacuum generators are respectively arranged on both sides of the upper end of the first support frame. A normally open solenoid valve is arranged on the first support frame inside each vacuum generator. The normally open solenoid valve controls the on-off of the air circuit of the vacuum generator. The vacuum generator is connected to the valve seat through an air circuit pipeline. The valve seat is arranged on the upper part of the second support frame. A plurality of valve groups are arranged at the lower end of the valve seat. A plurality of suction cup assemblies are arranged at the bottom of the second support frame. The valve groups on the valve seat are respectively connected to the suction cup assemblies.

[0007] The vacuum breaking module includes a vacuum solenoid valve and a one-way valve. The vacuum solenoid valve is arranged at the upper end of the first supporting frame. The vacuum solenoid valve is connected to the one-way valve through an air pipeline, and the one-way valve is connected to the suction cup assembly.

[0008] Furthermore, a mounting plate is provided in the middle of the end surface of the first support frame, and the mounting plate is connected to the robot gripper. Buffer connecting pieces are respectively provided at both ends of the first support frame, and the buffer connecting pieces are provided on one side of the vacuum generator. The buffer connecting piece connects the first support frame and the second support frame. The buffer connecting piece is a telescopic shaft, one end of the telescopic shaft is connected and fixed to the first support frame, and the other end of the telescopic shaft is connected and fixed to the second support frame. A buffer spring is also provided on the telescopic shaft; a fixing hole fixedly connected to the robot gripper is provided on the end surface of the mounting plate.

[0009] Furthermore, the second support frame as a whole is a square frame structure, the upper panel of the second support frame is connected to the first support frame through a telescopic shaft, and two valve seats are arranged in parallel on the lower end surface of the upper panel of the second support frame. Each valve seat is provided with multiple valve groups, and the valve group includes a normally open solenoid valve and a one-way valve. The normally open solenoid valve is connected to the one-way valve, and each valve group is respectively connected to each suction cup assembly.

[0010] Furthermore, the suction cup assembly includes a logic valve and a suction cup, and the suction cup is arranged at the bottom of the second support frame. Two rows of suction cups are arranged in parallel at the bottom of the second support frame. Each valve seat controls a row of suction cups correspondingly, and each suction cup is respectively provided with a logic valve. Each suction cup is connected to the valve group on the corresponding valve seat through an air pipeline through the logic valve.

[0011] Furthermore, the one-way valve in the vacuum breaking module is arranged on the suction cup assembly.

[0012] Furthermore, pressure gauges are respectively provided on the suction cup assemblies, which detect pressure changes when the suction cups are adsorbed and transmit the detected pressure signals to a network control module. The network control module is arranged on the side of the first support frame. The network control module controls the on and off of the normally open solenoid valves of each valve group on the control valve seat according to the pressure signals received from each suction cup assembly.

[0013] Furthermore, a hub is provided on one side of the second supporting frame, and the hub and the network control module are provided on the same side.

[0014] A method for using a vacuum suction cup type crystal rod gripper device that does not drop, the method specifically comprising the following steps:

[0015] S1, prepare a vacuum suction cup type crystal rod gripper device that does not drop, the device comprising a main body, a cover shell, a vacuum adsorption module and a vacuum breaking module, the main body comprising a first support frame and a second support frame, the cover shell comprising a first cover shell and a second cover shell, the first support frame is provided with a first cover shell, the second support frame is provided with a second cover shell, and the lower part of the first support frame is connected to the second support frame;

[0016] The vacuum adsorption module includes a normally open solenoid valve, a vacuum generator, a valve seat, a valve group and a suction cup assembly. The vacuum generators are respectively arranged on both sides of the upper end of the first support frame. A normally open solenoid valve is arranged on the first support frame inside each vacuum generator. The normally open solenoid valve controls the on-off of the air circuit of the vacuum generator. The vacuum generator is connected to the valve seat through an air circuit pipeline. The valve seat is arranged on the upper part of the second support frame. A plurality of valve groups are arranged at the lower end of the valve seat. A plurality of suction cup assemblies are arranged at the bottom of the second support frame. The valve groups on the valve seat are respectively connected to the suction cup assemblies.

[0017] The vacuum breaking module comprises a vacuum solenoid valve and a one-way valve, wherein the vacuum solenoid valve is arranged at the upper end of the first supporting frame, the vacuum solenoid valve is connected to the one-way valve through an air pipeline, and the one-way valve is connected to the suction cup assembly;

[0018] S2, the robot gripper is fixedly connected to the mounting plate, and the robot gripper moves the gripper device to the top of the crystal rod to be sucked and moved, and the gripper device falls so that the bottom suction cup is connected to the top of the crystal rod;

[0019] S3, the two vacuum generators on the first support frame are started, the vacuum generators generate negative pressure to the valve seat, the valve seat diverts the negative pressure gas path to the normally open solenoid valve on each valve group, and then leads to the suction cup assembly through the one-way valve, and the suction cup in the suction cup assembly generates adsorption force to adsorb the crystal rod;

[0020] S4, the pressure gauge on the suction cup assembly transmits the monitored pressure signal to the network control module, and the network control module closes the normally open solenoid valve on the valve group corresponding to the suction cup assembly whose pressure has not reached the threshold according to the received pressure signal;

[0021] S5, the robot gripper grabs the crystal rod and moves it to the required position, the vacuum solenoid valve is started, and the vacuum solenoid valve controls the air path of the one-way valve in the vacuum breaking module on the suction cup assembly to open, so that the suction cup breaks the vacuum to eliminate the suction force of the suction cup, and the gripper device is separated from the crystal rod, completing the adsorption and transportation of the crystal rod.

[0022] Furthermore, the pressure generated by the vacuum generator is 0.2Mpa-0.6Mpa.

[0023] Based on the above technical solution, the vacuum suction cup type non-dropping crystal rod gripper device and the use method of the present invention have achieved the following technical advantages through practical application:

[0024] 1. The method for using a vacuum suction cup type crystal rod gripper device of the present invention uses a vacuum generator to generate negative pressure to the suction cup to adsorb and grasp the crystal rod, and a robot drives the gripper to the top of the crystal rod for transportation. During the transportation process, a one-way valve and a logic valve are used to stably maintain the negative pressure on the suction cup to prevent the crystal rod from falling when the air is cut off, and a normally open solenoid valve is used to prevent the crystal rod from falling when the power is cut off. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a front sectional view of a gripper device in a vacuum suction cup type crystal rod non-dropping gripper device of the present invention.

[0026] Figure 2 It is a stereoscopic diagram of a gripper device in a vacuum suction cup type crystal rod-proof gripper device of the present invention. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is described below by the specific examples shown in the accompanying drawings. However, it should be understood that these descriptions are only exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, the description of well-known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present invention.

[0028] like Figure 1 and Figure 2 The present invention is a vacuum suction cup type crystal rod gripper device that does not fall off, the device includes a main body, a cover, a vacuum adsorption module and a vacuum breaking module, the main body includes a first support frame 41 and a second support frame 42, the cover includes a first cover 91 and a second cover 92, the first support frame 41 is provided with a first cover 91, the second support frame 42 is provided with a second cover 92, and the lower part of the first support frame 41 is connected to the second support frame 42;

[0029] The vacuum adsorption module includes a normally open solenoid valve 1, a vacuum generator 2, a valve seat 3, a valve group and a suction cup assembly. The vacuum generators 2 are respectively arranged on both sides of the upper end of the first support frame 41. A normally open solenoid valve 1 is arranged on the first support frame 41 inside each vacuum generator 2. The normally open solenoid valve 1 controls the on-off of the air circuit of the vacuum generator 2. The vacuum generator 2 is connected to the valve seat 3 through an air circuit pipeline. The valve seat 3 is arranged on the upper part of the second support frame 42. A plurality of valve groups are arranged at the lower end of the valve seat 3. A plurality of suction cup assemblies are arranged at the bottom of the second support frame 42. The valve groups on the valve seat 3 are respectively connected to the suction cup assemblies.

[0030] The vacuum breaking module includes a vacuum solenoid valve 10 and a one-way valve 5. The vacuum solenoid valve 10 is arranged at the upper end of the first supporting frame 41. The vacuum solenoid valve 10 is connected to the one-way valve 5 through an air pipeline, and the one-way valve 5 is connected to the suction cup assembly.

[0031] A mounting plate is provided in the middle of the end face of the first support frame 41, and the mounting plate is connected to the robot gripper. Buffer connecting pieces are provided at both ends of the first support frame, respectively. The buffer connecting pieces are provided on one side of the vacuum generator 2. The buffer connecting piece connects the first support frame with the second support frame. The buffer connecting piece is a telescopic shaft, one end of the telescopic shaft is connected and fixed to the first support frame 41, and the other end of the telescopic shaft is connected and fixed to the second support frame 42. A buffer spring is also provided on the telescopic shaft; a fixing hole fixedly connected to the robot gripper is provided on the end face of the mounting plate.

[0032] The second support frame 42 is a square frame structure as a whole. The upper panel of the second support frame 42 is connected to the first support frame 41 through a telescopic shaft. Two valve seats 3 are arranged in parallel on the lower end surface of the upper panel of the second support frame 42. Each valve seat 3 is provided with multiple valve groups, and the valve group includes a normally open solenoid valve 1 and a one-way valve 5. The normally open solenoid valve 1 is connected to the one-way valve 5, and each valve group is connected to each suction cup assembly respectively.

[0033] The suction cup assembly includes a logic valve 6 and a suction cup 7. The suction cup 7 is arranged at the bottom of the second support frame 42. Two rows of suction cups 7 are arranged in parallel at the bottom of the second support frame 42. Each valve seat 3 controls a row of suction cups 7. Each suction cup 7 is respectively provided with a logic valve 6. Each suction cup 7 is connected to the valve group on the corresponding valve seat 3 through an air pipeline through the logic valve 6.

[0034] The one-way valve 5 in the vacuum breaking module is arranged on the suction cup assembly.

[0035] The suction cup assemblies are respectively provided with pressure gauges 8, which detect the pressure changes when the suction cups 7 are adsorbed, and transmit the detected pressure signals to the network control module 12. The network control module 12 is arranged on the side of the first support frame 41. The network control module 12 controls the on and off of the normally open solenoid valve 1 of each valve group on the control valve seat 3 according to the pressure signals received from each suction cup assembly.

[0036] A hub 11 is disposed on one side of the second supporting frame 42 , and the hub 11 and the network control module 12 are disposed on the same side.

[0037] A method for using a vacuum suction cup type crystal rod gripper device that does not drop, the method specifically comprising the following steps:

[0038] S1, prepare a vacuum suction cup type crystal rod gripper device that does not drop, the device comprising a main body, a cover shell, a vacuum adsorption module and a vacuum breaking module, the main body comprising a first support frame 41 and a second support frame 42, the cover shell comprising a first cover shell 91 and a second cover shell 92, the first support frame 41 is provided with the first cover shell 91, the second support frame 42 is provided with the second cover shell 92, and the lower part of the first support frame 41 is connected to the second support frame 42;

[0039] The vacuum adsorption module includes a normally open solenoid valve 1, a vacuum generator 2, a valve seat 3, a valve group and a suction cup assembly. The vacuum generators 2 are respectively arranged on both sides of the upper end of the first support frame 41. A normally open solenoid valve 1 is arranged on the first support frame 41 inside each vacuum generator 2. The normally open solenoid valve 1 controls the on-off of the air circuit of the vacuum generator 2. The vacuum generator 2 is connected to the valve seat 3 through an air circuit pipeline. The valve seat 3 is arranged on the upper part of the second support frame 42. A plurality of valve groups are arranged at the lower end of the valve seat 3. A plurality of suction cup assemblies are arranged at the bottom of the second support frame 42. The valve groups on the valve seat 3 are respectively connected to the suction cup assemblies.

[0040] The vacuum breaking module includes a vacuum solenoid valve 10 and a one-way valve 5. The vacuum solenoid valve 10 is arranged at the upper end of the first support frame 41. The vacuum solenoid valve 10 is connected to the one-way valve 5 through an air pipeline, and the one-way valve 5 is connected to the suction cup assembly.

[0041] S2, the robot gripper is fixedly connected to the mounting plate, and the robot gripper moves the gripper device to the top of the crystal rod to be sucked and moved, and the gripper device falls so that the bottom suction cup 7 is connected to the top of the crystal rod;

[0042] S3, the two vacuum generators 2 on the first support frame 41 are started, the vacuum generator 2 generates negative pressure to the valve seat 3, the valve seat 3 shunts the negative pressure gas path to the normally open solenoid valve 1 on each valve group, and then leads to the suction cup assembly through the one-way valve 5, and the suction cup 7 in the suction cup assembly generates adsorption force to adsorb the crystal rod;

[0043] S4, the pressure gauge 8 on the suction cup assembly transmits the monitored pressure signal to the network control module 12, and the network control module 12 closes the normally open solenoid valve 1 on the valve group corresponding to the suction cup assembly whose pressure has not reached the threshold according to the received pressure signal;

[0044] S5, the robot gripper grabs the crystal rod and moves it to the required position, the vacuum solenoid valve 10 is started, and the vacuum solenoid valve 10 controls the air path of the one-way valve 5 in the vacuum breaking module on the suction cup assembly to open, so that the suction cup 7 breaks the vacuum to eliminate the suction force of the suction cup 7, and the gripper device is separated from the crystal rod, completing the crystal rod adsorption and transportation.

[0045] The pressure generated by the vacuum generator 2 is 0.2Mpa-0.6Mpa.

[0046] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, ordinary technicians in the field should understand that the specific implementation methods of the invention can still be modified or some technical features can be replaced by equivalents without departing from the spirit of the technical solution of the present invention, which should be included in the scope of the technical solution for protection of the present invention.

Claims

1. A vacuum suction cup type crystal rod gripper device that does not drop, characterized in that: The device comprises a main body, a cover, a vacuum adsorption module and a vacuum breaking module, the main body comprises a first supporting frame and a second supporting frame, the cover comprises a first cover and a second cover, the first supporting frame is provided with a first cover, the second supporting frame is provided with a second cover, and the lower part of the first supporting frame is connected to the second supporting frame; The vacuum adsorption module includes a normally open solenoid valve, a vacuum generator, a valve seat, a valve group and a suction cup assembly. The vacuum generators are respectively arranged on both sides of the upper end of the first support frame. A normally open solenoid valve is arranged on the first support frame inside each vacuum generator. The normally open solenoid valve controls the on-off of the air circuit of the vacuum generator. The vacuum generator is connected to the valve seat through an air circuit pipeline. The valve seat is arranged on the upper part of the second support frame. A plurality of valve groups are arranged at the lower end of the valve seat. A plurality of suction cup assemblies are arranged at the bottom of the second support frame. The valve groups on the valve seat are respectively connected to the suction cup assemblies. The vacuum breaking module includes a vacuum solenoid valve and a one-way valve. The vacuum solenoid valve is arranged at the upper end of the first supporting frame. The vacuum solenoid valve is connected to the one-way valve through an air pipeline, and the one-way valve is connected to the suction cup assembly.

2. A vacuum suction cup type crystal rod gripper device that does not drop according to claim 1, characterized in that: A mounting plate is provided in the middle of the end surface of the first support frame, and the mounting plate is connected to the robot gripper. Buffer connecting pieces are respectively provided at both ends of the first support frame, and the buffer connecting pieces are provided on one side of the vacuum generator. The buffer connecting piece connects the first support frame and the second support frame. The buffer connecting piece is a telescopic shaft, one end of the telescopic shaft is connected and fixed to the first support frame, and the other end of the telescopic shaft is connected and fixed to the second support frame. A buffer spring is also provided on the telescopic shaft; a fixing hole fixedly connected to the robot gripper is provided on the end surface of the mounting plate.

3. A vacuum suction cup type crystal rod gripper device that does not drop according to claim 2, characterized in that: The second support frame as a whole is a square frame structure. The upper panel of the second support frame is connected to the first support frame through a telescopic shaft. Two valve seats are arranged in parallel on the lower end surface of the upper panel of the second support frame. Each valve seat is provided with multiple valve groups. The valve group includes a normally open solenoid valve and a one-way valve. The normally open solenoid valve is connected to the one-way valve, and each valve group is connected to each suction cup assembly respectively.

4. The vacuum suction cup type crystal rod gripper device that does not drop according to claim 3, characterized in that: The suction cup assembly includes a logic valve and a suction cup, and the suction cup is arranged at the bottom of the second support frame. Two rows of suction cups are arranged in parallel at the bottom of the second support frame. Each valve seat controls a row of suction cups correspondingly, and each suction cup is respectively provided with a logic valve. Each suction cup is connected to the valve group on the corresponding valve seat through an air pipeline through the logic valve.

5. The vacuum suction cup type crystal rod gripper device that does not drop according to claim 4, characterized in that: The one-way valve in the vacuum breaking module is arranged on the suction cup assembly.

6. The vacuum suction cup type crystal rod gripper device that does not drop according to claim 4, characterized in that: The suction cup assemblies are respectively provided with pressure gauges, which detect the pressure changes when the suction cups are adsorbed and transmit the detected pressure signals to the network control module. The network control module is arranged on the side of the first support frame. The network control module controls the opening and closing of the normally open solenoid valves of each valve group on the control valve seat according to the pressure signals received from each suction cup assembly.

7. The vacuum suction cup type crystal rod gripper device that does not drop according to claim 2, characterized in that: A hub is arranged on one side of the second supporting frame, and the hub and the network control module are arranged on the same side.

8. A method for using a vacuum suction cup type crystal rod gripper device that does not drop, characterized in that: The method specifically comprises the following steps: S1, prepare a vacuum suction cup type crystal rod gripper device that does not drop, the device comprising a main body, a cover shell, a vacuum adsorption module and a vacuum breaking module, the main body comprising a first support frame and a second support frame, the cover shell comprising a first cover shell and a second cover shell, the first support frame is provided with a first cover shell, the second support frame is provided with a second cover shell, and the lower part of the first support frame is connected to the second support frame; The vacuum adsorption module includes a normally open solenoid valve, a vacuum generator, a valve seat, a valve group and a suction cup assembly. The vacuum generators are respectively arranged on both sides of the upper end of the first support frame. A normally open solenoid valve is arranged on the first support frame inside each vacuum generator. The normally open solenoid valve controls the on-off of the air circuit of the vacuum generator. The vacuum generator is connected to the valve seat through an air circuit pipeline. The valve seat is arranged on the upper part of the second support frame. A plurality of valve groups are arranged at the lower end of the valve seat. A plurality of suction cup assemblies are arranged at the bottom of the second support frame. The valve groups on the valve seat are respectively connected to the suction cup assemblies. The vacuum breaking module comprises a vacuum solenoid valve and a one-way valve, wherein the vacuum solenoid valve is arranged at the upper end of the first supporting frame, the vacuum solenoid valve is connected to the one-way valve through an air pipeline, and the one-way valve is connected to the suction cup assembly; S2, the robot gripper is fixedly connected to the mounting plate, and the robot gripper moves the gripper device to the top of the crystal rod to be sucked and moved, and the gripper device falls so that the bottom suction cup is connected to the top of the crystal rod; S3, the two vacuum generators on the first support frame are started, the vacuum generators generate negative pressure to the valve seat, the valve seat diverts the negative pressure gas path to the normally open solenoid valve on each valve group, and then leads to the suction cup assembly through the one-way valve, and the suction cup in the suction cup assembly generates adsorption force to adsorb the crystal rod; S4, the pressure gauge on the suction cup assembly transmits the monitored pressure signal to the network control module, and the network control module closes the normally open solenoid valve on the valve group corresponding to the suction cup assembly whose pressure has not reached the threshold according to the received pressure signal; S5, the robot gripper grabs the crystal rod and moves it to the required position, the vacuum solenoid valve is started, and the vacuum solenoid valve controls the air path of the one-way valve in the vacuum breaking module on the suction cup assembly to open, so that the suction cup breaks the vacuum to eliminate the suction force of the suction cup, and the gripper device is separated from the crystal rod, completing the adsorption and transportation of the crystal rod.

9. The method for using the vacuum suction cup type crystal rod gripper device according to claim 8, characterized in that: The pressure generated by the vacuum generator is 0.2Mpa-0.6Mpa.

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