APC gate valve repeated positioning test tool and test method

Abstract

The invention relates to the technical field of repeated positioning precision testing, and provides an APC gate valve repeated positioning testing tool and a testing method.The APC gate valve repeated positioning testing tool comprises a clamping mechanism detachably connected to the upper end of one side of a gate valve, the clamping mechanism is connected with a limiting plate abutting against the lower end of the gate valve through a guide shaft, and the guide shaft is slidably sleeved with a sleeve; the sleeve is connected with a connecting plate used for installing a displacement sensor, a valve element of the gate valve is connected with a fixing plate used in cooperation with the displacement sensor, through the arrangement of the clamping mechanism, the guide shaft and the limiting plate, the tool and the gate valve are rapidly connected, it is ensured that the tool is fixed in the testing process, errors caused by movement are reduced, and the testing efficiency is improved. And through cooperation of the displacement sensor and the positioning plate, displacement data of multiple groups of valve closing / opening and middle positions of the valve element are obtained through repeated detection, and the repeated positioning precision of the gate valve is calculated.

Description

Technical Field

[0001] The present invention relates to the technical field of repeated positioning accuracy testing, and in particular to a repeated positioning testing tool and a testing method for an APC gate valve. Background Art

[0002] In the traditional vacuum field, valves usually have only two positions, open and closed. However, the APC gate valve can be adjusted to the middle position through the motor-controller to control the process pressure in the chamber. The repeatability of the APC gate valve refers to the error between two positionings when the valve is operated in the middle position, which has become an important indicator for evaluating the performance of the APC gate valve.

[0003] At present, there is a lack of effective testing methods for the repeatability accuracy of APC gate valves on the market. The testing difficulties are mainly reflected in two aspects: first, repeatability accuracy is a hidden performance indicator that is difficult to measure directly; second, there is no special testing method or tooling to support the evaluation of this indicator. Summary of the invention

[0004] The object of the present invention is to provide an APC gate valve repeat positioning test tool and a test method, which solves the problem that the repeat positioning accuracy of the existing APC gate valve cannot be tested.

[0005] The present invention is achieved through the following technical scheme: an APC gate valve repeated positioning test tool, including a clamping mechanism detachably connected to the upper end of one side of the gate valve, the clamping mechanism is connected to a limit plate abutting the lower end of the gate valve through a guide shaft, a sleeve is slidably sleeved on the guide shaft, the sleeve is connected to a connecting plate for installing a displacement sensor, and a fixing plate used in conjunction with the displacement sensor is connected to the valve core of the gate valve.

[0006] Furthermore, a connecting piece is provided at the end of the sleeve and is sleeved on the guide shaft. The connecting piece consists of a connecting plate and a connecting tube. The connecting plate is bolted to the sleeve. A shrinkage seam is opened in the connecting tube along the axial direction of the guide shaft. An open ring is sleeved on the connecting tube. An upper chuck and a lower chuck are wedge-shapedly fitted on the outside of the open ring. The upper chuck and the lower chuck are connected by bolts to adjust the tightness of the open ring on the connecting tube.

[0007] Preferably, the cross section of the open ring is a horizontally symmetrical convex pentagon or triangle.

[0008] Furthermore, a clamp is provided on the side of the limit plate, one end of the clamp is rotatably connected to the limit plate, and the other end of the clamp is connected to the flange bolt of the gate valve.

[0009] Furthermore, the limiting plate is provided with an avoidance groove for avoiding the upper flange of the plug valve.

[0010] Furthermore, the clamping mechanism includes an upper clamping plate and a lower clamping plate, and the upper clamping plate and the lower clamping plate are fastened by bolts to clamp the upper end of the gate valve.

[0011] Furthermore, at least two guide shafts are connected between the clamping mechanism and the limiting plate.

[0012] Furthermore, the fixing plate is connected to the valve core of the gate valve by bolts, suction cups or magnets.

[0013] A testing method comprises the following steps:

[0014] Step 1: Move the sleeve to slide along the guide shaft to adjust the displacement sensor to be within its detectable range;

[0015] Step 2: put the valve core of the gate valve in a closed or open state, and set the position of the positioning plate detected by the displacement sensor at this time as the displacement zero point;

[0016] Step 3: Move the valve core of the gate valve to any position between the closed valve and the open valve, and record the displacement at this time;

[0017] Step 4: Repeat the above steps 2 and 3 to obtain multiple sets of displacement data and calculate the repeatability of the gate valve.

[0018] Furthermore, the calculation formula for repeat positioning accuracy is: where max A is the largest group of displacement data among the above groups, min A It is the smallest group among the above multiple groups of displacement data, and DN is the diameter of the gate valve.

[0019] The present invention has at least the following advantages and beneficial effects:

[0020] (1) Through the setting of the clamping mechanism, guide shaft and limit plate, the tooling is quickly connected to the gate valve to ensure that it is fixed during the test and reduce the error caused by movement. Through the cooperation of the displacement sensor and the positioning plate, the displacement data of multiple groups of valve core closing / opening and intermediate positions are repeatedly detected to calculate the repeated positioning accuracy of the gate valve.

[0021] (2) The clamping force is transmitted to the connecting tube through the cooperation of the upper chuck, the lower chuck and the open ring, which is not easy to loosen and improves the clamping effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic structural diagram of an APC gate valve repeated positioning test fixture provided by the present invention.

[0023] Figure 2 Another structural schematic diagram of an APC gate valve repeated positioning test tool provided by the present invention.

[0024] Figure 3 A schematic structural diagram of a clamping mechanism in an APC gate valve repeated positioning test fixture provided by the present invention.

[0025] Figure 4 A schematic diagram of the connection between a sleeve and a connecting plate in an APC gate valve repeated positioning test tool provided by the present invention.

[0026] Figure 5 A cross-sectional view of a sleeve in an APC gate valve repeated positioning test tool provided by the present invention.

[0027] Figure 6 For the present invention Figure 5 A partial enlarged view of point A in the middle.

[0028] Figure 7 A schematic structural diagram of a limit plate in an APC gate valve repeated positioning test fixture provided by the present invention.

[0029] Figure 8 A schematic diagram of the structure of a connecting piece in an APC gate valve repeated positioning test fixture provided by the present invention.

[0030] Fig. 9 A schematic diagram of the structure of an open ring in an APC gate valve repeated positioning test tool provided by the present invention.

[0031] Figure markings: 1-gate valve, 2-clamping mechanism, 21-upper clamping plate, 22-lower clamping plate, 3-guide shaft, 4-limiting plate, 40-avoidance groove, 41-clamping piece, 5-sleeve, 6-connecting plate, 61-displacement sensor, 62-fixing plate, 7-connecting piece, 71-connecting plate, 72-connecting cylinder, 720-contraction seam, 8-opening ring, 80-notch, 91-upper clamping plate, 92-lower clamping plate. DETAILED DESCRIPTION

[0032] The following is a specific implementation method in conjunction with the accompanying drawings.

[0033] Example

[0034] like Figures 1 to 9As shown, in this embodiment, a repeated positioning test fixture for an APC gate valve is mainly disclosed, including a clamping mechanism 2 detachably connected to the upper end of one side of the gate valve 1, the clamping mechanism 2 is connected to a limit plate 4 abutting against the lower end of the gate valve 1 through a guide shaft 3, a sleeve 5 is slidably sleeved on the guide shaft 3, the sleeve 5 is connected to a connecting plate 6 for installing a displacement sensor 61, and a fixing plate 62 used in conjunction with the displacement sensor 61 is connected to the valve core of the gate valve 1. Specifically, the displacement sensor 61 can adopt a laser displacement sensor 61 in the prior art, and the position and displacement change of the fixing plate 62 can be measured contactlessly by laser technology. In addition, the connecting plate 6 is L-shaped, and the direction of the line connecting the center position of the fixing plate 62 and the displacement sensor 61 should be parallel to the moving direction of the valve core to ensure the accuracy of the measurement. One end of the guide shaft 3 is fixed to the clamping mechanism 2 by bolts, the middle part is a light rod, and the other end is threadedly connected to the limit plate 4. By setting the clamping mechanism 2, the guide shaft 3 and the limit plate 4, the tooling is quickly connected to the gate valve 1 to ensure that it is fixed during the test and reduce the error caused by movement.

[0035] Furthermore, in the specific implementation, Figure 4-Figure 6 , Figure 8 , Fig. 9 As shown, the end of the sleeve 5 provided in the embodiment of the present invention is provided with a connector 7 sleeved on the guide shaft 3, and the connector 7 is composed of a connecting disc 71 and a connecting tube 72. The connecting disc 71 is bolted to the sleeve 5, and the connecting tube 72 is provided with a contraction seam 720 along the axial direction of the guide shaft 3. An open ring 8 is sleeved on the connecting tube 72, and an upper chuck 91 and a lower chuck 92 are wedge-shapedly matched on the outside of the open ring 8. The upper chuck 91 and the lower chuck 92 are connected by bolts to adjust the tightness of the clamp of the open ring 8 on the connecting tube 72. It should be noted that the sleeve 5 has an interference fit with the guide shaft 3 through the linear bearing arranged inside it, so that there is a certain axial and circumferential resistance between the sleeve 5 and the guide shaft 3. When the connecting tube 72 does not hold the guide shaft 3 tightly, it can still withstand a certain load, ensuring that the displacement sensor 61 cannot be easily moved and has a certain position retention ability. The connecting disc 71 and the connecting tube 72 are integrally formed, and the connecting disc 71 cover is buckled on the sleeve 5, and the inner wall of the connecting tube 72 is in contact with the guide shaft 3. The connection tube 72 is provided with a contraction seam 720, and the open ring 8 is provided with a notch 80, which can both realize the adjustment of the tightness of the hoop. By screwing the bolt, the upper chuck 91 and the lower chuck 92 are brought closer to each other, and the upper chuck 91 and the lower chuck 92 are wedge-matched with the open ring 8 to squeeze the open ring 8 inward, so that the connection tube 72 clamps the guide shaft 3, and the position of the sleeve 5 is relatively fixed. Conversely, by screwing the bolt, the abutting force of the upper chuck 91 and the lower chuck 92 on the open ring 8 is reduced, and the upper chuck 91 and the lower chuck 92 are separated from each other, and the open ring 8 and the connection tube 72 loosen the clamp on the guide shaft 3 under the resetting action of the elastic force.

[0036] Preferably, if Figure 6and Fig. 9 As shown, the cross section of the open ring 8 is a horizontally symmetrical convex pentagon or triangle. Specifically, the inner wall of the open ring 8 is in smooth contact with the connecting tube 72, and the outer wall is provided with wedge-shaped surfaces respectively contacting the upper chuck 91 and the lower chuck 92. The axial movement of the upper chuck 91 and the lower chuck 92 is converted into a tightening movement of the circumferential surface of the connecting tube 72.

[0037] Furthermore, in the specific implementation, Figure 1 , Figure 2 , Figure 7 As shown, a clip 41 is provided on the side of the above-mentioned limit plate 4 provided in the embodiment of the present invention, one end of the clip 41 is rotatably connected to the limit plate 4, and the other end of the clip 41 is bolted to the flange of the gate valve 1. Specifically, a strip hole is provided at one end of the clip 41 connected to the flange, which can adapt to valve bodies of different sizes, improve the flexibility of operation, and further enable the tooling to be securely fixed on the gate valve 1, ensuring that no shaking occurs during the test.

[0038] Furthermore, in the specific implementation, Figure 1 , Figure 2 , Figure 7 As shown, the above-mentioned limit plate 4 provided in the embodiment of the present invention is provided with a avoidance groove 40 for avoiding the flange on the gate valve 1. This avoids structural interference between the limit plate 4 and the flange when connected, thereby improving the rationality of the structure and the stability of the connection.

[0039] Furthermore, in the specific implementation, Figure 1-Figure 3 As shown, the clamping mechanism 2 provided in the embodiment of the present invention includes an upper clamping plate 21 and a lower clamping plate 22, which are fastened by bolts to clamp the upper end of the gate valve 1. Specifically, the upper clamping plate 21 and the lower clamping plate 22 are clamped on the long flange at the upper end of the gate valve 1, and through holes for avoiding the connecting bolts on the long flange are provided on the upper clamping plate 21 and the lower clamping plate 22, which can play a role in positioning and installation, and also enhance the stability of the connection.

[0040] Furthermore, in the specific implementation, Figure 1 , Figure 2 , Figure 4 As shown, at least two guide shafts 3 are connected between the clamping mechanism 2 and the limit plate 4 provided in the embodiment of the present invention. On the one hand, the relative position of the connecting plate 6 on the horizontal plane can be stabilized, and on the other hand, the load of the connecting plate 6 and the displacement sensor 61 on the sleeve 5 can be effectively dispersed, thereby improving the overall stability of the system and ensuring the reliability of the test results.

[0041] Furthermore, in a specific implementation, the fixing plate 62 provided in the embodiment of the present invention is connected to the valve core of the gate valve 1 by bolts, suction cups or magnets. The fixing plate 62 is detachably connected to the valve core, and the sleeve 5 drives the displacement sensor 61 to move, which can be flexibly adjusted to ensure that the displacement sensor 61 is within the effective detection range.

[0042] In this embodiment, a testing method is also disclosed, comprising the following steps:

[0043] Step 1: Move the sleeve 5 to slide along the guide shaft 3 to adjust the displacement sensor 61 to be within its detectable range; since the detection distance of the laser displacement sensor 61 is limited, the position of the laser displacement sensor 61 needs to be adjusted before detection to ensure that it is within the effective detection range.

[0044] Step 2: The valve core of the gate valve 1 is in a closed or open state, and the position of the positioning plate detected by the displacement sensor 61 at this time is set as the displacement zero point.

[0045] Step 3: Move the valve core of the gate valve 1 to any position between the closed valve and the open valve, and record the displacement at this time.

[0046] Step 4: Repeat the above steps 2 and 3 to obtain multiple sets of displacement data, and calculate the repeatability of the gate valve 1.

[0047] Furthermore, in a specific implementation, the calculation formula for the above-mentioned repeated positioning accuracy provided in the embodiment of the present invention is: where max A is the largest group of displacement data among the above groups, min A is the smallest group among the above multiple groups of displacement data, and DN is the diameter of the gate valve 1. The performance of the gate valve 1 can be quickly evaluated by the size of the repeated positioning accuracy value C. The larger the repeated positioning accuracy value, the worse the repeated positioning accuracy performance of the gate valve 1; the smaller the repeated positioning accuracy value, the better the repeated positioning accuracy performance of the gate valve 1.

Claims

1. A repeated positioning test tool for an APC gate valve, characterized in that: The invention comprises a clamping mechanism (2) detachably connected to the upper end of one side of a gate valve (1); the clamping mechanism (2) is connected to a limit plate (4) abutting against the lower end of the gate valve (1) via a guide shaft (3); a sleeve (5) is slidably sleeved on the guide shaft (3); the sleeve (5) is connected to a connecting plate (6) for mounting a displacement sensor (61); and a fixing plate (62) used in conjunction with the displacement sensor (61) is connected to the valve core of the gate valve (1).

2. The APC gate valve repeated positioning test tool according to claim 1 is characterized in that: The end of the sleeve (5) is provided with a connecting piece (7) which is sleeved on the guide shaft (3). The connecting piece (7) is composed of a connecting plate (71) and a connecting tube (72). The connecting plate (71) is bolted to the sleeve (5). The connecting tube (72) is provided with a contraction seam (720) along the axial direction of the guide shaft (3). An open ring (8) is sleeved on the connecting tube (72). An upper chuck (91) and a lower chuck (92) are wedge-shapedly fitted on the outside of the open ring (8). The upper chuck (91) and the lower chuck (92) are connected by bolts to adjust the tightness of the open ring (8) on the clamp of the connecting tube (72).

3. The APC gate valve repeated positioning test tool according to claim 2 is characterized in that: The cross section of the open ring (8) is a horizontally symmetrical convex pentagon or triangle.

4. The APC gate valve repeatable positioning test tool according to claim 1, characterized in that: A clamping piece (41) is provided on the side of the limit plate (4), one end of the clamping piece (41) is rotatably connected to the limit plate (4), and the other end of the clamping piece (41) is connected to the flange bolt of the gate valve (1).

5. The APC gate valve repeated positioning test tool according to claim 1 is characterized in that: The limit plate (4) is provided with an avoidance groove (40) for avoiding the upper flange of the gate valve (1).

6. The APC gate valve repeatable positioning test tool according to claim 1, characterized in that: The clamping mechanism (2) comprises an upper clamping plate (21) and a lower clamping plate (22); the upper clamping plate (21) and the lower clamping plate (22) are fastened by bolts to clamp the upper end of the gate valve (1).

7. The APC gate valve repeated positioning test tool according to claim 1, characterized in that: At least two guide shafts (3) are connected between the clamping mechanism (2) and the limiting plate (4).

8. The APC gate valve repeatable positioning test tool according to claim 1, characterized in that: The fixing plate (62) is connected to the valve core of the gate valve (1) by bolts, suction cups or magnets.

9. A test method for an APC gate valve repeatable positioning test tool according to any one of claims 1 to 8, comprising the following steps: Step 1: moving the sleeve (5) to slide along the guide shaft (3) to adjust the displacement sensor (61) to be within its detectable range; Step 2: The valve core of the gate valve (1) is placed in a closed or open state, and the position of the positioning plate detected by the displacement sensor (61) at this time is set as the displacement zero point; Step 3, moving the valve core of the gate valve (1) to any position between the valve closing position and the valve opening position, and recording the displacement at this time; Step 4: Repeat the above steps 2 and 3 to obtain multiple sets of displacement data, and calculate the repeatability of the positioning accuracy of the gate valve (1).

10. The testing method according to claim 9, characterized in that: The calculation formula of the repeated positioning accuracy is: where max A is the largest group of displacement data among the above groups, min A It is the smallest group among the above multiple groups of displacement data, and DN is the diameter of the gate valve (1).

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