Three-dimensional shape inspection device and three-dimensional shape inspection method

Abstract

The three-dimensional shape inspection apparatus according to the disclosed embodiment includes: a light irradiation unit including a light source and a spatial light modulator configured to modulate light received from the light source so as to irradiate a plurality of lights having a plurality of focal points downward onto a surface of a measurement object; an optical system that refracts each of the modulated lights at different refractive indexes for a plurality of wavelengths in accordance with color differences, thereby forming a measurement interval in which the lights refracted by the wavelengths are focused in the vertical direction; and an image sensor that detects, among the light refracted by wavelength, color information of light focused and reflected at a position corresponding to a height on the surface of the measurement object; wherein the optical system includes a focus adjustment portion that makes it possible to change the measurement interval by changing, in the vertical direction, a position at which the light refracted by wavelength is focused.

Description

Technical Field

[0001] The present invention relates to a three-dimensional shape inspection device and a three-dimensional shape inspection method. Background Art

[0002] Confocal microscopy or confocal laser scanning microscopy (CLSM) is a microscope that removes out-of-focus light through a pinhole. It can eliminate light interference generated in areas outside the focus to achieve high resolution and high magnification. It is used in life sciences, semiconductors, materials science and other fields.

[0003] Among confocal microscopes, a chromatic confocal microscope is known that uses chromatic aberration to perform three-dimensional inspection of the measurement object. The chromatic confocal microscope refracts white light emitted by a light source at different refractive indices according to multiple wavelengths, and irradiates the refracted light onto the surface of the measurement object. It performs three-dimensional inspection in the following manner: the light refracted by wavelength that is focused and reflected on the surface of the measurement object passes through a pinhole, and the wavelength of the light that passes through is detected by a spectrometer. The chromatic confocal microscope tabulates the wavelength information of the focused light and the focal length information of the corresponding optical system in advance, and performs three-dimensional inspection by measuring the height of the measurement object based on the wavelength information of the detected light. Summary of the invention

[0004] Technical issues

[0005] The existing color confocal microscope performs three-dimensional inspection by detecting the light reflected by the light emitted from the light source irradiating only one point on the surface of the measurement object, so it can only implement point scanning or line scanning of a small length, which has the limitation of very slow inspection speed. The embodiments of the present disclosure solve the problems existing in the above-mentioned prior art.

[0006] In addition, since the axial resolution of the existing color confocal microscope depends on the maximum inspection height, as the maximum inspection height increases, the axial resolution also increases (i.e., the axial resolution deteriorates), resulting in a problem of device performance degradation. The embodiments of the present disclosure solve the above problems in the prior art.

[0007] In addition, a phosphor is a substance that absorbs light or electromagnetic waves of a specific wavelength and emits light of other wavelengths. When the object to be measured contains a phosphor, the existing color confocal microscope may not be able to accurately measure the height corresponding to the detected wavelength. An embodiment of the present disclosure solves the above problems in the prior art.

[0008] Technical Solution

[0009] One aspect of the present disclosure provides an embodiment of a three-dimensional shape inspection device. A three-dimensional shape inspection device of a representative embodiment includes: a light irradiation unit, the light irradiation unit including a light source and a spatial light modulator configured to modulate light received from the light source, thereby irradiating multiple light beams with multiple focal points downward onto the surface of a measurement object; an optical system, the optical system refracts each modulated light at multiple wavelengths with mutually different refractive indices according to chromatic aberration, thereby forming a measurement interval in the up-down direction where the light refracted by wavelength is focused; and an image sensor, the image sensor detects color information of light focused and reflected at a position corresponding to a height on the surface of the measurement object in the light refracted by wavelength; wherein the optical system includes a focus adjustment unit, the focus adjustment unit enables the measurement interval to be changed by changing the position where the light refracted by wavelength is focused in the up-down direction.

[0010] In one embodiment, the light irradiation section may irradiate the plurality of lights having a plurality of focal points in a horizontal direction perpendicular to an up-down direction downward onto the surface of the measuring object.

[0011] In one embodiment, the focus adjustment unit includes a variable lens for refracting each of the modulated lights, and the measurement interval can be changed in a vertical direction by adjusting the curvature of the variable lens.

[0012] In one embodiment, the variable lens may include a liquid lens whose curvature varies based on a current applied to the focus adjustment portion.

[0013] In one embodiment, the focus adjustment unit can select any one of a plurality of measurement intervals by changing a position where the light refracted according to the wavelength is focused in a vertical direction.

[0014] In one embodiment, any one of the plurality of measurement intervals may be different from another one of the plurality of measurement intervals.

[0015] In one embodiment, the spatial light modulator may include: a plurality of digital micromirror devices that modulate light received from the light source by reflecting light and are arranged in an array.

[0016] In one embodiment, the image sensor may detect color information of the multiple lights focused and reflected on the surface of the measurement object; and based on the color information of the multiple lights detected by the image sensor, measure respective heights on the surface of the measurement object reflecting the multiple lights.

[0017] In an embodiment, the color information may include RGB information of light focused and reflected on the surface of the measurement object.

[0018] In one embodiment, the image sensor may obtain wavelength information of light focused and reflected on the surface of the measurement object based on the RGB information.

[0019] In one embodiment, the image sensor may include any one of a color camera, a multi-spectral camera, or a monochrome camera with a bandpass filter.

[0020] In one embodiment, the light source may include any one of an LED, a halogen lamp or a xenon lamp.

[0021] In one embodiment, the three-dimensional shape inspection apparatus may further include: a control unit configured to measure the height of the surface of the measurement object based on color information detected by the image sensor.

[0022] In one embodiment, the three-dimensional shape inspection apparatus may further include: an external light source that irradiates light toward the surface of the measurement object.

[0023] In one embodiment, the image sensor may obtain wavelength information of light emitted by an external light source and reflected by the surface of the measurement object.

[0024] In one embodiment, the three-dimensional shape inspection device may also include: a control unit, which is configured to control the focus adjustment unit to change the measurement interval when the external light source irradiates light having a first wavelength, if the wavelength of the light detected by the image sensor is a second wavelength different from the first wavelength.

[0025] In one embodiment, the control section may control the focus adjustment section to change the measurement interval so that the wavelength of light focused at a position corresponding to the height on the surface of the measurement object does not include a wavelength between the first wavelength and the second wavelength.

[0026] Another aspect of the present disclosure provides an embodiment of a three-dimensional shape inspection device. A three-dimensional shape inspection device of a representative embodiment includes: a light irradiation unit, the light irradiation unit including a light source and a spatial light modulator configured to modulate light received from the light source, thereby irradiating multiple lights with multiple focal points downward onto the surface of a measurement object; an optical system, the optical system refracts the modulated lights at multiple wavelengths with mutually different refractive indices according to chromatic aberration, thereby forming a measurement interval in the up-down direction where the light refracted by wavelength is focused; an image sensor, the image sensor detects color information of light focused and reflected at a position corresponding to a height on the surface of the measurement object in the light refracted by wavelength; and a focus adjustment unit, the focus adjustment unit moves the optical system in the up-down direction to change the position where the light refracted by wavelength is focused in the up-down direction, thereby being able to change the measurement interval.

[0027] Another aspect of the present disclosure provides an embodiment of a three-dimensional shape inspection method. The three-dimensional shape inspection method of a representative embodiment includes: a light modulation step, modulating the light received from the light source so that multiple light beams with multiple focal points are irradiated onto the surface of the measurement object; a light irradiation step, irradiating light to the lower side so that the modulated lights are refracted at different refractive indices according to multiple wavelengths according to chromatic aberration, thereby forming a measurement interval in the up and down directions to focus the light refracted by wavelength; a focus adjustment step, changing the measurement interval by changing the position where the light refracted by wavelength is focused in the up and down directions; an information acquisition step, detecting the color information of the light focused and reflected at a position corresponding to the height on the surface of the measurement object in the light refracted by wavelength in the measurement interval; and a height measurement step, measuring the height of the surface of the measurement object based on the detected color information.

[0028] In one embodiment, the focus adjustment step may include: a step of selecting any one of a plurality of measurement intervals by changing the position at which the light refracted by the wavelength is focused in the up and down directions; the information obtaining step and the height measuring step may be performed based on the color information of the light refracted by the wavelength in any one of the measurement intervals, which is focused and reflected at a position corresponding to the height on the surface of the measuring object.

[0029] In one embodiment, the three-dimensional shape inspection method may also include: an external light source irradiation step, irradiating light onto the surface of the measurement object; the information acquisition step may include: an external light source wavelength detection step, obtaining wavelength information of light emitted by the external light source and reflected by the surface of the measurement object; the focus adjustment step may include: in the external light source irradiation step, when irradiating light with a first wavelength, if the wavelength of the light detected in the external light source wavelength detection step is a second wavelength different from the first wavelength, then changing the measurement interval step.

[0030] Effects of the Invention

[0031] According to an embodiment of the present disclosure, a large area of ​​a measurement object can be three-dimensionally inspected at a faster speed by using a spatial light modulator and an image sensor that detects color information of light.

[0032] According to the embodiments of the present disclosure, by dividing the maximum inspectable area into a plurality of steps for inspection, the axial resolution can be reduced, thereby having an effect of improving the performance of the device.

[0033] According to an embodiment of the present disclosure, there is an effect that even when the measurement object includes a fluorescent substance, accurate three-dimensional inspection can be performed by changing the measurement interval. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 1 is a schematic diagram showing a driving method of the three-dimensional shape inspection device according to the comparative embodiment of the present disclosure.

[0035] Figure 2 It is shown from Figure 1 The light emitted by the light source is refracted in the optical system with different refractive indices according to the wavelength to form a graph of the measurement intervals in the upper and lower directions.

[0036] Figure 3 It is shown from Figure 1 Schematic diagram of a state in which light emitted by a light source is refracted in an optical system with different refractive indices according to wavelength to form measurement intervals in the upper and lower directions.

[0037] Figure 4 It is an overall stereoscopic diagram of a three-dimensional shape inspection device according to an embodiment of the present disclosure.

[0038] Figure 5 is along Figure 4 A cross-sectional view taken along line A1-A1` is shown.

[0039] Figure 6 Schematic diagram showing a digital micromirror device used in an embodiment of the present disclosure.

[0040] Figure 7 is a schematic diagram showing a charge coupled device (CCD) used in an embodiment of the present disclosure.

[0041] Figure 8 3 is a schematic diagram showing a process of obtaining RGB information of light by a 3-charge coupled device according to an embodiment of the present disclosure.

[0042] Fig. 9 It shows that Figure 8 Conceptual diagram of the process of converting the RGB information obtained in the image into the HSV coordinate system.

[0043] Fig.10 Schematic diagram showing the operating state of the three-dimensional shape inspection device according to an embodiment of the present disclosure.

[0044] Fig.11 is a perspective view showing a focus adjustment unit according to an embodiment of the present disclosure.

[0045] Fig.12 is along Fig.11 The cross-sectional view is taken along the line S1-S1' shown.

[0046] Fig.13 is a conceptual diagram showing the operation of a liquid lens according to an embodiment of the present disclosure.

[0047] Fig.14 This is a diagram for describing the process of selecting any one of a plurality of measurement intervals for inspection according to an embodiment of the present disclosure.

[0048] Fig.15 It is shown Figure 5 The illustrated three-dimensional shape inspection device is a cross-sectional view of an embodiment in which the device further includes an external light source.

[0049] Fig.16 1 is a diagram for describing the operation of the three-dimensional shape inspection apparatus according to an embodiment of the present disclosure when the measurement object includes a fluorescent body.

[0050] Fig.17 This is a flowchart showing the flow of one embodiment of the three-dimensional shape inspection method of the present disclosure. DETAILED DESCRIPTION

[0051] The embodiments of the present disclosure are listed for the purpose of describing the technical concept of the present disclosure. The scope of rights of the present disclosure is not limited to the embodiments disclosed below or the specific description of these embodiments.

[0052] All technical terms and scientific terms used in this disclosure, unless otherwise defined, have the meanings commonly understood by those of ordinary skill in the art to which this disclosure belongs. All terms used in this disclosure are selected for the purpose of more clearly describing this disclosure, rather than for limiting the scope of rights according to this disclosure.

[0053] The expressions “including”, “having”, “having”, etc. used in the present disclosure should be understood as open-ended terms including other embodiment possibilities unless otherwise specified in the phrase or sentence containing the expression.

[0054] Expressions in the singular form described in the present disclosure may include a plural form meaning unless otherwise specified, and the same applies to expressions in the singular form recorded in the claims.

[0055] The expressions “first”, “second”, etc. used in the present disclosure are used to distinguish a plurality of components from each other, and do not limit the order or importance of these components.

[0056] The term "unit" used in the present disclosure means software, or hardware components such as field programmable gate arrays (FPGAs), application specific integrated circuits (ASICs). However, "units" are not limited to hardware and software. "Units" can be configured to be present in an addressable storage medium, or can be configured to drive one or more processors. Therefore, for example, "units" include components such as software components, object-oriented software components, class components, and task components, as well as processors, functions, attributes, processes, subroutines, program code segments, drivers, firmware, microcodes, circuits, data, databases, data structures, tables, arrays, and variables. The functions provided in the components and "units" can be combined into fewer components and "units", or can be further separated into additional components and "units".

[0057] The expression "based on..." used in the present disclosure is used to describe one or more factors described in the phrase or sentence containing the expression and affecting the behavior or action of decision or judgment, and the expression does not exclude other factors affecting the behavior or action of decision or judgment.

[0058] In the present disclosure, when it is mentioned that a certain constituent element is “connected to” or “accessed to” another constituent element, it should be understood that the certain constituent element can be directly connected to or accessed to the other constituent element, or can be connected or accessed through other new constituent elements.

[0059] Directional indicators such as "below" and "lower" used in the present disclosure are based on the direction of the measured object relative to the three-dimensional shape inspection device in the attached drawings, and directional indicators such as "above" and "upper" indicate the opposite direction, but this is only a description to enable the present disclosure to be clearly understood, and different definitions may be given to each direction depending on the reference placement position.

[0060] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. In the accompanying drawings, identical or corresponding constituent elements are given identical reference numerals. In addition, in the description of the following embodiments, repeated descriptions of identical or corresponding constituent elements may be omitted. However, even if the description of constituent elements is omitted, it does not mean that such constituent elements are not included in certain embodiments.

[0061] Figure 1 1 is a schematic diagram showing a driving method of the three-dimensional shape inspection device according to the comparative embodiment of the present disclosure. Figure 2 It is shown from Figure 1 The light emitted by the light source is refracted in the optical system with different refractive indices according to the wavelength to form a graph of the measurement intervals in the upper and lower directions. Figure 3 It is shown from Figure 1 Schematic diagram of a state in which light emitted by a light source is refracted in an optical system with different refractive indices according to wavelength to form measurement intervals in the upper and lower directions.

[0062] Reference Figures 1 to 3 , the operation of the three-dimensional shape inspection device 50 of the comparative embodiment is described as follows.

[0063] The three-dimensional shape inspection device 50 can irradiate light onto the surface of the measurement object 20 by allowing the light emitted by the light source 52 to pass through the beam splitter 54. The light source 52 can emit light having multiple wavelengths. The measurement object 20 may include a variety of inspection objects such as cells, metal and non-metal materials, and semiconductor substrates used in the fields of life sciences, semiconductors, and materials sciences. In addition, the measurement object 20 may include materials such as transparent bodies, and may include mirror surfaces (C4 bumps, μ bumps, patches, etc.) of semiconductors, etc.

[0064] The light passing through the beam splitter 54 may be refracted by the optical system 56. The optical system 56 may refract the incident light according to the multiple wavelengths with different refractive indices according to the chromatic aberration. The optical system 56 may focus the light with a longer wavelength to a position farther from the optical system 56 and focus the light with a shorter wavelength to a position closer to the optical system 56 according to the chromatic aberration. For example, referring to Figure 1 , showing a state in which light having multiple wavelengths is refracted by the optical system 56 with different refractive indices, light having the shortest wavelength (λ1) among the multiple wavelengths is focused at a position closest to the optical system 56, and light having the longest wavelength (λn ) is focused at a position farthest from the optical system 56. Among the lights refracted at a plurality of wavelengths, there may be light having a height corresponding wavelength λm focused at a position corresponding to a height on the surface of the measuring object 20. The height corresponding wavelength λm may have a shortest wavelength (λ1) and a longest wavelength (λ n ) between .

[0065] The plurality of wavelength-refracted lights are reflected from the surface of the measuring object 20 and reflected at the beam splitter 54. The beam splitter 54 may reflect the respective lights having the plurality of wavelengths reflected from the surface of the measuring object 20 toward the pinhole 58. The beam splitter 54, the optical system 56, and the pinhole 58 may allow only the light having the height-corresponding wavelength λm, which is focused and reflected at a position corresponding to the height on the surface of the measuring object 20, to pass through the pinhole 58 among the respective lights having the plurality of wavelengths. A spectrometer 60 may be formed on the optical path passing through the pinhole 58. The spectrometer 60 may detect the light by a spectrum according to the wavelength to detect the intensity information of the light based on the wavelength.

[0066] The three-dimensional shape inspection device 50 detects the wavelength component of the light focused on the surface of the measuring object 20 through the spectrometer 60, thereby measuring the height of the measuring object 20. The three-dimensional inspection of the three-dimensional shape of the measuring object 20 can be performed by horizontally moving the three-dimensional shape inspection device 50 or the measuring object 20. The three-dimensional shape inspection device 50 of the comparative embodiment can only implement a point scanning method or a line scanning method of a tiny length, so there is a limitation that the inspection speed is very slow, wherein the point scanning method is to perform a three-dimensional inspection by irradiating only one point on the surface of the measuring object with the light emitted from the light source 52. The inspection speed of the point scanning method of the three-dimensional shape inspection device 50 of the comparative embodiment may be less than 1 mm. 2 .

[0067] Reference Figures 2 to 3 , the axial resolution of the three-dimensional shape inspection device 50 of the comparative embodiment is described.

[0068] The axial resolution (Axial Resolution) of the three-dimensional shape inspection device 50 satisfies the following mathematical formula 1.

[0069]

Mathematical formula 1

[0070]

[0071] The axial resolution (Axial Res) is proportional to the range of the measurement interval (ΔMeasurement Range) and the spectral resolution (Spectral Res), and is inversely proportional to the difference (Δλ) between the maximum wavelength and the minimum wavelength of the light source 52 used in the inspection. The proportionality constant (k) in Mathematical Formula 1 is a constant determined during the design of the inspection environment or the inspection device. The resolution described in this specification is the shortest distance that can identify two close points. The smaller the value, the better the performance of the inspection device may be. For example, Figure 2 and Figure 3 As shown, the range of the measurement interval (ΔMeasurement Range) is the distance between the point where the light with the shortest wavelength (λ1) is focused and the point where the light with the longest wavelength (λ n ) is the distance between the points where the light is focused, and the wavelength difference (Δλ) is the difference between the shortest wavelength (λ1) and the longest wavelength (λ n ), the range of the measurement interval (ΔMeasurement Range) is Z1.

[0072] Since the three-dimensional shape inspection device 50 of the above-mentioned comparative embodiment can measure the height of the measurement object when the measurement object is located at the position where the light is focused, the inspection range of the measurement object will change according to the range of the measurement interval (ΔMeasurement Range). That is, the range of the measurement interval can refer to the maximum inspection height of the three-dimensional shape inspection device 50. The three-dimensional shape inspection device 50 of the comparative embodiment has the following problem: as the measurement interval range increases, that is, as the maximum inspection height increases, the axial resolution also increases.

[0073] In contrast, the following reference Figures 4 to 17 The three-dimensional shape inspection device and the three-dimensional shape inspection method of one embodiment of the present disclosure described in the present disclosure have the effect of being able to perform high-speed large-area three-dimensional inspection of the measurement object by using a spatial light modulator and an image sensor that detects color information of light. In addition, in one embodiment, the maximum inspectable area is divided into multiple steps for inspection by using a focus adjustment unit, thereby improving the axial resolution.

[0074] Figure 4 It is an overall stereoscopic diagram of a three-dimensional shape inspection device according to an embodiment of the present disclosure. Figure 5 is along Figure 4 A cross-sectional view taken along line A1-A1` is shown.

[0075] Reference Figure 4 and Figure 5, the three-dimensional shape inspection device 10 can inspect the three-dimensional shape of the measuring object 20. The three-dimensional shape inspection device 10 can irradiate light to the measuring object 20 and detect information of the reflected light to inspect the shape of the measuring object 20. By moving the position of the three-dimensional shape inspection device 10 or the measuring object 20 and detecting the position and height on multiple surfaces of the measuring object 20, the three-dimensional shape of the measuring object 20 can be inspected. Figure 5 In the figure, for the convenience of description, the three-dimensional shape inspection device 10 and the measurement object 20 are shown to be located at the same point, but the present disclosure is not limited thereto, and the three-dimensional shape inspection device 10 and the measurement object 20 can be moved in the up and down direction or the horizontal direction for inspection.

[0076] The three-dimensional shape inspection device 10 may include a light irradiation unit 100 , an optical system, and an image sensor 400 .

[0077] The light irradiation unit 100 may irradiate light onto the surface of the measurement object 20. The light irradiation unit 100 may be configured to irradiate light toward a lower side direction where the measurement object 20 is located.

[0078] The light irradiation unit 100 may include a light source (not shown) and a spatial light modulator 110. The light source may be a white light source having multiple wavelengths. The light source may include any one of an LED, a halogen lamp, or a xenon lamp. The light source may include a sun-like LED. The present disclosure is not limited thereto, and any light source capable of emitting light having multiple wavelengths may be used in the present disclosure.

[0079] The light irradiation unit 100 may include a light irradiation unit housing 150 that introduces the light L of the light source into the interior of the three-dimensional shape inspection device 10. A space is formed inside the light irradiation unit housing 150 to receive the light L of the light source. The internal space of the light irradiation unit housing 150 may be a path through which the light L of the light source irradiates the measurement object 20. The light irradiation unit housing 150 may include a light receiving unit 152 formed with a hole and protruding outward. The light L of the light source may be received into the interior of the three-dimensional shape inspection device 10 through the light receiving unit 152.

[0080] The spatial light modulator 120 may modulate the light L received from the light source. The spatial light modulator 110 may include any device capable of changing the amplitude or phase information of the incident light according to the position. The spatial light modulator 110 may be a device that forms a light image in a three-dimensional space and controls the spatial distribution of light by controlling the spatial distribution of light.

[0081] The spatial light modulator 110 may modulate the light received from the light source so that the light has a plurality of focal points. The light irradiation unit 100 may irradiate a plurality of lights having a plurality of focal points onto the surface of the measuring object 20. Figure 4 and Figure 5In FIG. 1 , a single light having a single focus is shown to be irradiated onto the surface of the measurement object 20, but this is for the convenience of description, as with Figure 6 An embodiment of the spatial light modulator described below may irradiate a plurality of lights having a plurality of focal points onto the surface of the measurement object 20 using a plurality of digital micromirror devices (DMDs).

[0082] The optical system may refract light at multiple wavelengths using chromatic aberration. The optical system may refract light at multiple wavelengths with different refractive indices. The optical system may refract each light modulated in the spatial light modulator 110. The optical system may form a measurement interval where the light refracted at the wavelength is focused by refracting light having multiple wavelengths at different refractive indices. The measurement interval may be formed in the up and down directions. Figure 4 and Figure 5 In FIG. 1 , a single light having a single focus is shown to be irradiated onto the surface of the measurement object 20, but as shown in FIG. Figure 2 and Figure 3 As shown, the modulated light can be refracted by the optical system so that the light L received from the light source is refracted at different refractive indices according to multiple wavelengths, thereby forming measurement intervals in the up and down directions.

[0083] The optical system may include a plurality of lenses 211, 212, 213, 214, 215, 241. The lens may include any optical device that collects or disperses light by refracting received light. The lens may include a variable lens 241 with adjustable curvature.

[0084] The three-dimensional shape inspection device 10 may include a reflecting portion 220 that reflects light to change a moving path of the light. The reflecting portion 220 may include an optical device that transmits the light to a different path by reflecting received light.

[0085] The three-dimensional shape inspection device 10 may include a light separator 230 that reflects a portion of light and transmits another portion of light to separate the moving path of light into two paths. The light separator 230 may include an optical device that transmits a portion of received light and reflects another portion.

[0086] The image sensor 400 may detect color information of light. The image sensor 400 may detect light reflected by the measuring object 20. The image sensor 400 may detect light focused and reflected at a position corresponding to a height on the surface of the measuring object 20, among the light refracted by wavelength reflected by the measuring object 20. The image sensor 400 may detect color information of a plurality of lights focused and reflected on the surface of the measuring object 20.

[0087] In one embodiment, the three-dimensional shape inspection device 10 may include a control unit for measuring the height of the surface of the measurement object 20. The control unit may include a computer storing programs and / or information. The control unit may measure the height of the measurement object 20 based on the color information detected by the image sensor 400. The height of the measurement object 20 that reflects multiple lights may be measured based on the color information of multiple lights detected by the image sensor 400. The image sensor 400 may measure each height on the surface of the measurement object 20 that reflects multiple lights. The image sensor 400 of the three-dimensional shape inspection device 10 of the present disclosure can measure the heights on multiple surfaces of the measurement object 20 at one time, which has the effect of being able to perform high-speed large-area inspection of the measurement object.

[0088] Figure 6 is a schematic diagram showing a digital micromirror device used in an embodiment of the present disclosure. Figure 6 , a digital micromirror device (DMD) as an example of the spatial light modulator 110 according to an embodiment of the present disclosure is described.

[0089] The spatial light modulator 110 may include a digital micromirror device (DMD) using digital light processing (DLP) technology. The digital micromirror device (DMD) may include a plurality of digital micromirror devices (DMDs) arranged in an array. The digital micromirror device (DMD) may be a micro-sized mirror made using a micro-electromechanical system (MEMS). That is, each of the plurality of digital micromirror devices (DMDs) may function as a pixel. Figure 6 The digital micromirror devices (DMDs) of FIG. 1 form an array of 18 rows and 19 columns, but the number of rows and columns constituting the array is exemplary and may have any other number of columns and rows.

[0090] The digital micromirror device (DMD) has electrodes at the bottom that can receive electrical signals from the outside, and a reflector at the top that can reflect light. By applying electrical signals to the electrodes at the bottom of the digital micromirror device (DMD) to adjust the angle of the reflector, the reflected light is reflected to an external projection lens (not shown) and emitted, or is reflected to a light absorbing plate (not shown) and not emitted and absorbed. By adjusting the electrodes at the bottom of the digital micromirror device (DMD), the light of an independent digital micromirror device (DMD) can be adjusted to an on / off state. Since the spatial light modulator 110 can adjust each pixel of the digital micromirror device (DMD) to an on / off state, it can modulate the light L received from the light source into light having a desired shape and form. Figure 6, the digital micromirror devices of the 4n+1 rows and 4n+1 columns of the array are shown to be in the on state (n is an integer greater than 0), but the present disclosure is not limited to this, and the digital micromirror devices of the elements of each array can be arbitrarily adjusted to the on / off state.

[0091] Reference Figures 4 to 6 , the light irradiation unit 100 may irradiate a plurality of lights downward onto the surface of the measuring object 20 in a horizontal direction perpendicular to the up-down direction. Each of the plurality of digital micromirror devices (DMDs) may be adjusted to an on / off state, and light reflected from the digital micromirror device (DMD) in the on state may be emitted to the measuring object 20. Therefore, the plurality of lights emitted and modulated from each of the plurality of digital micromirror devices (DMDs) may have a plurality of focal points. The three-dimensional shape inspection device 10 of an embodiment of the present disclosure may irradiate a plurality of lights having a plurality of focal points onto the surface of the measuring object 20.

[0092] Figure 7 is a schematic diagram showing a charge coupled device (CCD) used in an embodiment of the present disclosure. Figure 8 3 is a schematic diagram showing a process of obtaining RGB information of light by a 3-charge coupled device according to an embodiment of the present disclosure. Fig. 9 It shows that Figure 8 Conceptual diagram of the process of converting the RGB information obtained in the image into the HSV coordinate system.

[0093] In reference Figure 7 In one embodiment, the image sensor may include a charge coupled device (CCD). A charge coupled device (CCD) may refer to a sensor that converts light into electric charge to obtain information about the light. A charge coupled device (CCD) is composed of a chip in the form of a pixel, and a photodiode that generates electrons according to the number of photons is arranged inside. By measuring and reconstructing the amount of electrons or current, the intensity information of the light can be obtained.

[0094] The charge coupled device (CCD) may include a plurality of charge coupled devices (CCDs) arranged in an array. Each charge coupled device (CCD) may function as a pixel. The plurality of charge coupled devices (CCDs) may detect color information of a plurality of reflected lights that are focused and reflected on the surface of the measuring object 20 by modulated lights having a plurality of focal points. Based on the color information of the plurality of lights detected by the charge coupled device (CCD), each height on the surface of the measuring object 20 that reflects the plurality of lights may be measured.

[0095] The charge coupled device (CCD) 91 may be a 1-charged coupled device (1CCD) consisting of one charge coupled device, or a 3-charged coupled device (Three Charged Coupled Device, hereinafter referred to as 3CCD) having three independent charge coupled devices.

[0096] For example, refer to Figure 8 , the 3-charge coupled device (3CCD) may include 3 independent charge coupled devices (3CCD-R, 3CCD-G, 3CCD-B). The 3 independent charge coupled devices (3CCD-R, 3CCD-G, 3CCD-B) are respectively located on the path of the light separated into R, G, and B components from prisms A, B, and C, so that the R, G, and B components of the light can be detected. The 3-charge coupled device (3CCD) detects the R, G, and B components separated from prisms A, B, and C using each charge coupled device, and can provide higher color reproducibility and image quality compared to the 1-charge coupled device (1CCD) method.

[0097] In other embodiments not shown, the image sensor 400 may include a complementary metal oxide semiconductor (CMOS). The CMOS may be composed of a plurality of pixels. Light reaching each pixel may be focused on a photodiode to generate electrons, and the generated electrons may be converted into a voltage form to detect light information.

[0098] The image sensor 400 may include any one of a color camera, a multispectral camera, or a monochrome camera with a bandpass filter. The image sensor 400 of the present disclosure is not limited thereto, but includes all devices capable of detecting RGB information of light.

[0099] The color information of the light detected by the image sensor 400 may include RGB information. For example, the color information of the light detected by a 3-charge coupled device (3CCD) of the image sensor 400 may include RGB information. The RGB information may be RGB information of light focused and reflected at a position corresponding to a height on the surface of the measuring object 20, among the light refracted by wavelength.

[0100] The image sensor 400 may obtain wavelength information of light based on the detected RGB information.

[0101] In an embodiment not shown, by creating a look-up table that tabulates wavelength information corresponding to RGB information in advance, the RGB information detected by the image sensor 400 can be converted into wavelength information of light.

[0102] In reference Fig. 9 In another embodiment, the image sensor 400 may convert the RGB information into another coordinate system to obtain the wavelength information of the light focused and reflected on the surface of the measuring object 20. The other coordinate system may be an HSV coordinate system or a CIE XYZ coordinate system. For example, the RGB information detected by the image sensor 400 may be converted into an HSV coordinate system through the following mathematical formulas 2, 3, and 4, so that the wavelength information of the light may be obtained through the HSV information. H is a value indicating hue (Hue), having a value of 0° to 360°, and 0° and 360° may represent the hue of red. S is a value indicating saturation (Saturation), assuming that when the most vivid state is 100%, 0% may represent an achromatic color of the same brightness. V is a value indicating value (Value), which may represent the brightness when white is 100% and black is 0%. Since the wavelength information of the light source corresponding to the H value of the light source is a predetermined value (for example, when H is 0° or 360°, the wavelength of red light is 625nm to 740nm), the wavelength information of the light source can be detected by the H value obtained by HSV coordinate system conversion.

[0103]

Mathematical formula 2

[0104] H=θ(if B≤G)

[0105] =360-θ(if B≥G)

[0106]

[0107]

Mathematical formula 3

[0108]

[0109]

Mathematical formula 4

[0110]

[0111] In addition, in the CIE chromaticity diagram obtained by converting RGB information into the CIE XYZ coordinate system, the dominant wavelength (Dominant Wavelength) as the wavelength of monochromatic light whose position is closest to the chromaticity coordinates of the light source can be detected. The above-mentioned HSV coordinate system and CIE XYZ coordinate system are merely examples for describing the present disclosure, and all coordinate systems that can obtain wavelength information of light can be used.

[0112] Fig.10 Schematic diagram showing the operating state of a three-dimensional shape inspection device according to an embodiment of the present disclosure. Figure 4 , Figure 5 and Fig.10 , the inspection method of the three-dimensional shape inspection device 10 of the present invention is described as follows.

[0113] The spatial light modulator 110 modulates the light L received from the light source and irradiates the light onto the surface of the measuring object 20. An optical system for transmitting light may be arranged on the path before the light is irradiated from the spatial light modulator 110 to the measuring object 20. For example, the optical system may include a plurality of lenses 211, 212, 214, 241 arranged on the path. A light separator 230 may be arranged on the path of the light irradiated from the spatial light modulator 110 to the measuring object 20. The light separator 230 may form a light path from the spatial light modulator 110 to the measuring object 20 by reflecting the received light. The optical system may include a lens 242 (not shown) located before irradiating to the measuring object 20. The lens 242 may be composed of a plurality of lenses. The lens 242 may be an objective lens.

[0114] The light reflected from the surface of the measuring object 20 is transferred to the image sensor 400. An optical system for transferring light may be arranged on the path of the light reflected from the measuring object 20 to the image sensor 400. For example, the optical system may include a plurality of lenses 241, 214, 212, 215 arranged on the path. A light separator 230 may be arranged on the path of the light from the measuring object 20 to the image sensor 400. The light separator 230 may form a light path from the measuring object 20 to the image sensor 400 by transmitting the received light. The image sensor 400 may measure the height of the measuring object 20 by detecting the color information of the light focused and reflected at a position corresponding to the height on the surface of the measuring object 20 in the light refracted by the wavelength. The path of light formed in such a manner that the light L emitted from the light source may be reflected by the measuring object 20 and transferred to the image sensor 400 is not limited thereto, and any light path may be formed by arranging the lens, the reflecting portion 220, and the light separator 230.

[0115] The three-dimensional shape inspection device 10 may include a focus adjustment unit that can change the measurement interval by changing the position where the light refracted by the optical system according to the wavelength is focused in the up-down direction. For example, according to the embodiments described later, the focus adjustment unit can be implemented by a device that can change the position of the optical system, or by a device that constitutes a part of the optical system and can change the light focusing position.

[0116] The focus adjustment unit can change the position where the light refracted by wavelength is focused. The focus adjustment unit can change the position where the light is focused in the up-down direction. The focus adjustment unit can change the measurement interval where the light refracted by wavelength is focused. The focus adjustment unit can change the point where the light with the shortest wavelength among the light refracted by wavelength is focused in the up-down direction. The focus adjustment unit can change the point where the light with the longest wavelength among the light refracted by wavelength is focused in the up-down direction. The focus adjustment unit can change the point where the light with a wavelength between the shortest wavelength and the longest wavelength among the light refracted by wavelength is focused in the up-down direction.

[0117] In an embodiment not shown in the figure, the focus adjustment unit can be operated by a mechanical device that adjusts the position of the optical system to change the measurement interval. The focus adjustment unit can change the measurement interval by moving the optical system in the up and down direction.

[0118] In reference Figures 10 to 13 In other embodiments, the focus adjustment unit 240 may constitute a part of the optical system. Figures 10 to 13 The illustrated embodiment is used as a reference for description.

[0119] Reference Fig.10 , the optical system may include a focus adjustment unit 240. In the present disclosure, a case where the focus adjustment unit 240 is arranged on the light path immediately before the measuring object 20 is irradiated is shown, but it is not limited thereto, and the focus adjustment unit 240 may be arranged on any path on the light path from the light source to the image sensor 400.

[0120] The focus adjustment unit 240 may be operated using an electronic device that changes the measurement interval by applying a current or the like.

[0121] Fig.11 is a perspective view showing a focus adjustment unit according to an embodiment of the present disclosure. Fig.12 is along Fig.11 The cross-sectional view is taken along the line S1-S1' shown. Fig.13 is a conceptual diagram showing the operation of a liquid lens according to an embodiment of the present disclosure.

[0122] Reference Figures 10 to 13 , the focus adjustment unit 240 may include a variable lens 241 that refracts each light modulated by the spatial light modulator 110. The focus adjustment unit 240 may adjust the curvature of the variable lens 241. Generally speaking, as the curvature of the variable lens 241 increases, the focal length, which is the distance from the variable lens to the light focusing point, may become shorter. As the focus adjustment unit 240 adjusts the curvature of the variable lens 241, the thickness C of the variable lens 241 may be adjusted. Generally speaking, as the curvature of the variable lens 241 increases, the thickness C of the variable lens 241 also increases.

[0123] The curvature of the variable lens 241 can be adjusted based on the current applied to the focus adjustment unit 240. By adjusting the current applied to the focus adjustment unit 240, the curvature of the variable lens 241 can be adjusted. The focus adjustment unit 240 can change the measurement interval of the focus of the light refracted by the wavelength in the up and down directions by adjusting the curvature of the variable lens 241.

[0124] The variable lens 241 may include a liquid lens 260 whose curvature can be changed. The liquid lens 260 may change its curvature by receiving an applied current. The liquid lens 260 may adjust the curvature of the liquid lens 260 by adjusting the applied current. For example, the curvature of the liquid lens 260 is increased by adjusting the current applied to the liquid lens 260, so that the thickness of the liquid lens increases (C1->C2) (refer to Fig.13 ). As the curvature and thickness of the liquid lens 260 increase, the focal length of the liquid lens 260 can be reduced, and the measurement interval can be changed in the up and down directions according to the reduced focal length (refer to Fig.13 ).

[0125] Fig.14 This is a diagram for describing the process of selecting any one of a plurality of measurement intervals for inspection according to an embodiment of the present disclosure.

[0126] The focus adjustment unit 240 can select any one of the multiple measurement intervals by changing the position where the light refracted by the wavelength is focused. The focus adjustment unit 240 can select multiple measurement intervals in the vertical direction by changing the position where the light is focused in the vertical direction. For example, the focus adjustment unit 240 can select any one of the first measurement interval 0 to Z3, the second measurement interval Z1 to Z2, and the third measurement interval Z2 to Z3 for inspection. Figures 1 to 3 Compared with the comparative embodiment shown in the figure, the present disclosure can divide the measurement interval 0 to Z1 into multiple measurement intervals for measurement, thus having the effect of reducing the range (ΔMeasurement Range) value of the measurement interval in mathematical formula 1, thereby having the effect of reducing the axial resolution (that is, at the same maximum inspectable height Z1, the axial resolution can be reduced by 3 times). Fig.14 In the figure, the case where the measurement intervals are divided into three is shown, but this is for the convenience of description, and the present disclosure is not limited thereto, and the measurement intervals may be divided into one or more measurement intervals for inspection.

[0127] In one embodiment, any measurement interval among the multiple measurement intervals may be different from another measurement interval among the multiple measurement intervals. Any measurement interval may be different in level from that of the other measurement interval in the up and down directions. The level of any part of any measurement interval may be the same as the level of any part of the other measurement interval (that is, at least one interval with the same level may exist in different measurement intervals). The levels of all intervals of any measurement interval may be different from the levels of all intervals of the other measurement interval. Fig.14 In the example, the level of all sections in any measurement section is shown as a reference, but the present disclosure is not limited to this.

[0128] Fig.15 It is shown Figure 5 The illustrated three-dimensional shape inspection device is a cross-sectional view of an embodiment in which the device further includes an external light source. Fig.16 1 is a diagram for describing the operation of the three-dimensional shape inspection apparatus according to an embodiment of the present disclosure when the measurement object includes a fluorescent body.

[0129] Reference Fig.15 and Fig.16 , describing the manner in which the three-dimensional shape inspection apparatus of the present disclosure operates when the measurement object contains a fluorescent body.

[0130] A phosphor is a substance that absorbs light or electromagnetic waves of a specific wavelength and emits light of other wavelengths. When the object to be measured contains a phosphor, a confirmation process is required to confirm whether the wavelength of the reflected and detected light is the wavelength reflected from the pure measurement object without the phosphor or the wavelength emitted after being excited by the phosphor. In addition, in the inspection of the three-dimensional shape inspection device, it is necessary to adjust the measurement interval for inspection so that light with a specific wavelength is not focused and reflected on the surface of the measurement object.

[0131] Reference Fig.15 , the three-dimensional shape inspection device 10 may include an external light source 600 that irradiates light onto the surface of the measuring object 20. The external light source 600 may irradiate light having a single wavelength onto the surface of the measuring object 20. After irradiating light having a single wavelength onto the measuring object 20, the external light source 600 may further irradiate light by increasing or decreasing the wavelength of the light having a single wavelength, thereby irradiating light having multiple wavelengths onto the surface of the measuring object 20. The image sensor 400 may obtain wavelength information of light emitted by the external light source 600 and reflected by the surface of the measuring object 20.

[0132] Reference Fig.16 , the external light source 600 irradiates the measuring object 20 with light having a first wavelength (λ1), and when the wavelength of the light reflected by the measuring object 20 and detected by the image sensor 400 is a second wavelength (λ2) different from the first wavelength (λ1), the control unit may confirm that there is a fluorescent body on the measuring object 20. The control unit may be configured as follows: when the external light source 600 irradiates the measuring object 20 with light having a first wavelength (λ1), if the wavelength of the light reflected and detected by the image sensor 400 is the second wavelength (λ2), the focus adjustment unit 240 is controlled to change the measurement interval. The control unit may control the focus adjustment unit 240 in order to prevent the image sensor 400 for detecting the light reflected from the measuring object from detecting the light excited by the fluorescent body contained in the measuring object.

[0133] The control section may control the focus adjustment section 240 to change the measurement interval so that the wavelength of the light focused at the position corresponding to the height on the surface of the measurement object 20 does not include the wavelength between the first wavelength (λ1) and the second wavelength (λ2). If the wavelength of the light focused at the position corresponding to the height on the surface of the measurement object 20 includes the wavelength between the first wavelength (λ1) and the second wavelength (λ2), the height corresponding to the wavelength detected by the image sensor 400 during the inspection process may be inaccurate. The measurement interval may be changed to a range between the third wavelength (λ3) and the fourth wavelength (λ4) (refer to Fig.16 ) so that the wavelength of the light focused at the position corresponding to the height on the surface of the measuring object 20 does not include the wavelength between the first wavelength (λ1) and the second wavelength (λ2). Fig.16 , the values ​​of the first wavelength (λ1) and the second wavelength (λ2) are approximately 450 nm to 500 nm, and the values ​​of the third wavelength (λ3) and the fourth wavelength (λ4) are 570 nm to 620 nm, but the present disclosure is not limited thereto.

[0134] Fig.17 This is a flowchart showing the flow of one embodiment of the three-dimensional shape inspection method of the present disclosure.

[0135] Reference Figure 4 , Figure 5 and Fig.17 The three-dimensional shape inspection method S10 may include a white light irradiation step S101, a DLP multiple pattern irradiation step S102, a measurement object irradiation step S103, and a reflection step S104 of a wavelength signal corresponding to the height of the measurement object.

[0136] The white light irradiation step S101 is a step of irradiating light L from a light source to irradiate onto the surface of the measuring object 20. The DLP multiple pattern irradiation step S102 may be a step of modulating the light received in the white light irradiation step S101. The DLP multiple pattern irradiation step S102 may modulate the light L received from the light source so as to irradiate multiple lights having multiple focal points onto the surface of the measuring object 20. In the DLP multiple pattern irradiation step S102, light modulation may be performed by the spatial light modulator 110. The DLP multiple pattern irradiation step S102 may correspond to a light modulation step.

[0137] The measurement object irradiation step S103 may irradiate each light modulated in the DLP multiple pattern irradiation step S102 downward so that it is refracted at different refractive indices according to multiple wavelengths according to chromatic aberration, thereby forming a measurement interval in the upper and lower directions where the light refracted according to the wavelength is focused. In the measurement object irradiation step S103, the modulated light may form the measurement interval by an optical system. The measurement object irradiation step S103 may correspond to the light irradiation step.

[0138] The reflection step S104 of the wavelength signal corresponding to the height of the measuring object may be a step in which, among the wavelength-refracted light irradiated to the measuring object in the measuring object irradiation step S103 , light focused at a position corresponding to the height on the surface of the measuring object 20 is reflected.

[0139] The three-dimensional shape inspection method S10 may include an information obtaining step of detecting color information of light focused and reflected at a position corresponding to a height on a surface of the measurement object 20 , among the light refracted by wavelength in the measurement section.

[0140] The information obtaining step may include an image obtaining step S105 , an RGB information obtaining step S106 , a coordinate system conversion step S107 , and a wavelength information confirmation step S108 .

[0141] The image acquisition step S105 may be a step of receiving an image or information of light focused and reflected at a position corresponding to a height on the surface of the measuring object 20. The image acquisition step S105 may receive light reflected from the measuring object 20 by the image sensor 400. The RGB information acquisition step S106 may be a step of obtaining RGB information of the light received in the image acquisition step S105. The RGB information acquisition step S106 may obtain RGB information of the light by a 3-charge coupled device (3CCD) of the image sensor 400.

[0142] The coordinate system conversion step S107 may include the step of converting the RGB information obtained in the RGB information obtaining step S106 into another coordinate system (e.g., the HSV coordinate system or the CIE XYZ coordinate system). The wavelength information confirmation step S108 may include the step of confirming the wavelength information of the light based on the information obtained in the coordinate system conversion step S107. As described above, the wavelength information confirmation step S108 may confirm the wavelength information of the light using the H value of the HSV coordinate system or the dominant wavelength information of the CIE XYZ coordinate system.

[0143] The three-dimensional shape inspection method S10 may include: a measurement object height confirmation step S109, measuring the height of the surface of the measurement object based on the color information detected in the information acquisition step. In the measurement object height confirmation step S109, the height of the measurement object may be measured by detecting the color information of the light focused and reflected at a position corresponding to the height on the surface of the measurement object 20 in the light refracted by the wavelength. The measurement object height confirmation step S109 may correspond to the height measurement step.

[0144] The three-dimensional shape inspection method S10 may include a three-dimensional inspection step S110 after the measurement object height confirmation step. The three-dimensional inspection step may include at least one of the steps S101 to S109, and by performing the steps S101 to S109 multiple times, inspection may be performed on multiple surfaces of the measurement object 20.

[0145] The three-dimensional shape inspection method S10 may include: a focus adjustment step of changing the measurement interval by changing the position where the light refracted by the wavelength is focused in the up-down direction. The focus adjustment step may be a step of changing the measurement interval by the focus adjustment unit 240. The focus adjustment step may be performed before the white light irradiation step S101, or before the white light irradiation step in the three-dimensional inspection step S110 performed at least once, so that the focus adjustment step may be repeated multiple times.

[0146] The focus adjustment step may include: a measurement interval selection step of selecting any one of a plurality of measurement intervals by changing the position where the light refracted by the wavelength is focused in the up-down direction. The measurement interval selection step uses the focus adjustment unit 240 to change the position where the light is focused in the up-down direction, so that a plurality of measurement intervals can be selected in the up-down direction. The information acquisition step and the height measurement step may be performed based on the color information of the light, which is the light focused and reflected at a position corresponding to the height on the surface of the measurement object in the light refracted by the wavelength of any measurement interval selected in the measurement interval selection step. The measurement interval selection step may be performed before the white light irradiation step S101, or before the white light irradiation step in the three-dimensional inspection step S110 performed at least once, so that the measurement interval selection step may be repeated multiple times.

[0147] The three-dimensional shape inspection method S10 may further include: an external light source irradiation step of irradiating light onto the surface of the measurement object. The information acquisition step may include: an external light source wavelength detection step of obtaining wavelength information of light reflected by the surface of the measurement object in the external light source irradiation step. The external light source irradiation step and the external light source wavelength detection step may be performed before the white light irradiation step S101, or before the white light irradiation step in the three-dimensional inspection step S110 performed at least once, so that the external light source irradiation step and the external light source wavelength detection step may be repeated multiple times.

[0148] The focus adjustment step may include a step of changing a measurement interval if the wavelength of the light detected in the external light source wavelength detection step is a second wavelength different from the first wavelength when light having a first wavelength is irradiated in the external light source irradiation step. The focus adjustment step may include a step of changing the measurement interval so that the wavelength of the light focused at a position corresponding to the height on the surface of the measurement object does not include a wavelength between the first wavelength and the second wavelength different from the first wavelength. The focus adjustment step may be performed after the external light source wavelength detection step.

[0149] The technical concept of the present disclosure is described above based on some embodiments and examples shown in the accompanying drawings, but it should be understood that various substitutions, deformations and changes can be made within the limits of the technical concept and scope of the present disclosure that can be understood by ordinary technicians in the technical field to which the present disclosure belongs. In addition, such substitutions, deformations and changes should be deemed to fall within the scope of the attached claims.

Claims

1. A three-dimensional shape inspection device, comprising: a light irradiation section including a light source and a spatial light modulator configured to modulate light received from the light source so as to irradiate a plurality of lights having a plurality of focal points downward onto a surface of a measurement object; An optical system that refracts each modulated light according to a plurality of wavelengths at mutually different refractive indices according to chromatic aberration, thereby forming a measurement zone in a vertical direction for focusing the light refracted according to the wavelengths; and an image sensor that detects color information of light focused and reflected at a position corresponding to a height on the surface of the measuring object, among the light refracted by wavelength; The optical system includes a focus adjustment unit that changes the position where the light refracted by the wavelength is focused in a vertical direction so as to change the measurement interval.

2. The three-dimensional shape inspection device according to claim 1, wherein: The light irradiation section irradiates the plurality of lights having a plurality of focal points in a horizontal direction perpendicular to an up-down direction downward onto the surface of the measuring object.

3. The three-dimensional shape inspection device according to claim 1, wherein: The focus adjustment unit includes a variable lens that refracts each of the modulated lights, and the measurement section can be changed in a vertical direction by adjusting the curvature of the variable lens.

4. The three-dimensional shape inspection device according to claim 3, wherein: The variable type lens includes a liquid lens whose curvature varies based on a current applied to the focus adjustment portion.

5. The three-dimensional shape inspection device according to claim 1, wherein: The focus adjustment unit can select any one of a plurality of measurement intervals by changing the position at which the light refracted according to the wavelength is focused in the up-down direction.

6. The three-dimensional shape inspection device according to claim 5, wherein: Any one of the plurality of measurement intervals is different from another one of the plurality of measurement intervals.

7. The three-dimensional shape inspection device according to claim 1, wherein: The spatial light modulator comprises: A plurality of digital micromirror devices are provided, which modulate light received from the light source by reflecting the light and are arranged in an array.

8. The three-dimensional shape inspection device according to claim 1, wherein: the image sensor detecting color information of the plurality of lights focused and reflected on the surface of the measuring object, Based on color information of the plurality of lights detected by the image sensor, respective heights on the surface of the measurement object reflecting the plurality of lights are measured.

9. The three-dimensional shape inspection device according to claim 1, wherein: The color information includes RGB information of light focused and reflected on the surface of the measurement object.

10. The three-dimensional shape inspection device according to claim 9, wherein: The image sensor obtains wavelength information of light focused and reflected on the surface of the measurement object based on the RGB information.

11. The three-dimensional shape inspection device according to claim 1, wherein: The image sensor includes any one of a color camera, a multispectral camera, or a monochrome camera with a bandpass filter.

12. The three-dimensional shape inspection device according to claim 1, wherein: The light source includes any one of an LED, a halogen lamp or a xenon lamp.

13. The three-dimensional shape inspection device according to claim 1, wherein: Also includes: A control section measures the height of the surface of the measurement object based on the color information detected by the image sensor.

14. The three-dimensional shape inspection device according to claim 1, wherein: Also includes: an external light source that radiates light onto the surface of the measurement object; The image sensor obtains wavelength information of light emitted by an external light source and reflected by the surface of the measurement object.

15. The three-dimensional shape inspection device according to claim 14, wherein: Also includes: A control section configured to control the focus adjustment section to change the measurement interval if the wavelength of the light detected by the image sensor is a second wavelength different from the first wavelength when the external light source radiates light having a first wavelength.

16. The three-dimensional shape inspection device according to claim 15, wherein: The control section controls the focus adjustment section to change the measurement interval so that the wavelength of light focused at a position corresponding to the height on the surface of the measurement object does not include a wavelength between the first wavelength and the second wavelength.

17. A three-dimensional shape inspection device, comprising: a light irradiation section including a light source and a spatial light modulator configured to modulate light received from the light source so as to irradiate a plurality of lights having a plurality of focal points downward onto a surface of a measurement object; An optical system that refracts each modulated light according to a plurality of wavelengths at mutually different refractive indices according to chromatic aberration, thereby forming a measurement zone in a vertical direction for focusing the light refracted according to the wavelengths; an image sensor that detects color information of light focused and reflected at a position corresponding to a height on the surface of the measuring object, among the light refracted by wavelength; and A focus adjustment unit moves the optical system in the up-down direction to change the position where the light refracted according to the wavelength is focused in the up-down direction, thereby being able to change the measurement interval.

18. A three-dimensional shape inspection method, comprising: a light modulation step of modulating the light received from the light source so that a plurality of light beams having a plurality of focal points are irradiated onto the surface of the measurement object; a light irradiation step of irradiating light downward so that each modulated light is refracted at different refractive indices according to a plurality of wavelengths based on chromatic aberration, thereby forming a measurement zone in the up-down direction for focusing the light refracted according to the wavelength; A focus adjustment step, changing the measurement interval by changing the focus position of the light refracted by the wavelength in the up-down direction; an information obtaining step of detecting color information of light focused and reflected at a position corresponding to a height on the surface of the measurement object, among the light refracted by wavelength in the measurement section; and A height measuring step of measuring the height of the surface of the measurement object based on the detected color information.

19. The three-dimensional shape inspection method according to claim 18, wherein: The focus adjustment step comprises: A step of selecting any one of a plurality of measurement intervals by changing the position where the light refracted by the wavelength is focused in the up-down direction; The information obtaining step and the height measuring step are performed based on color information of light focused and reflected at a position corresponding to the height on the surface of the measurement object, among the light refracted by wavelength in the any one measurement section.

20. The three-dimensional shape inspection method according to claim 18, wherein: Also includes: an external light source irradiation step of irradiating light onto the surface of the measurement object; The information obtaining step comprises: an external light source wavelength detection step, obtaining wavelength information of light emitted by an external light source and reflected by the surface of the measurement object; The focus adjustment step comprises: A step of changing the measurement interval when the wavelength of the light detected in the external light source wavelength detection step is a second wavelength different from the first wavelength when the light having the first wavelength is irradiated in the external light source irradiation step.

Images