High-purity silicon tetrachloride processing tail gas recycling device

Abstract

The invention discloses a high-purity silicon tetrachloride processing tail gas recycling device, and relates to the technical field of high-purity silicon tetrachloride processing. The device specifically comprises a condensing tower, a filtering tower, a purifying tower and a recycling tower which are hermetically mounted from top to bottom, one side of the recycling tower is connected with a liquid tank through bolts, the inner wall of the purifying tower is connected with a first mounting rod and a second mounting rod through bolts, and a stirring mechanism and a spraying mechanism are arranged between the first mounting rod and the second mounting rod; the spraying mechanism is located in the middle section of the stirring mechanism, the condensing tower and the purifying tower are connected through a gas guide pipe, a second liquid outlet pipe is connected to one side of the circumference of the condensing tower through threads, a first liquid outlet pipe is connected to the outer wall, close to the same side of the second liquid outlet pipe, of the recycling tower through threads, and a liquid pump is fixed to the outer wall of the front face of the liquid box through a supporting plate. The speed of spreading the hydrogen chloride gas into the purification tower is reduced, the spreading area of the hydrogen chloride gas is enlarged, and the contact reaction efficiency and quality of the hydrogen chloride gas and alkaline water are improved.

Description

Technical Field

[0001] The invention relates to the technical field of high-purity silicon tetrachloride processing, in particular to a high-purity silicon tetrachloride processing tail gas recycling device. Background Art

[0002] High-purity silicon tetrachloride (SiCl4) is the core raw material for high-end manufacturing industries such as semiconductors, optical fiber preforms, and photovoltaic materials. Its purity directly affects the performance of downstream products (such as optical fiber transmission loss and chip yield). With the rapid development of the global semiconductor industry and clean energy technology, the demand for high-purity silicon tetrachloride continues to grow, but its production process produces a large amount of tail gas. If these tail gases are discharged directly, it will not only cause waste of resources, but also lead to serious environmental problems (such as acid mist pollution and ozone layer depletion). Therefore, efficient recycling technology is urgently needed. Traditional direct discharge or alkali solution neutralization treatment methods not only cause waste of high-value SiCl4 resources (single-pass conversion rate is only 60%-80%), but also produce chlorine-containing wastewater to pollute the environment. With the expansion of the global semiconductor industry and the advancement of the "dual carbon" goals, the SiCl4 (concentration can reach 15%-30%) in the exhaust gas can be efficiently recovered (recovery rate > 95%) through adsorption condensation-distillation purification-closed-loop reuse technology, which can simultaneously reduce raw material costs (the regeneration cost per ton of SiCl4 is only 1 / 3 of that of new materials) and carbon emission intensity (reducing HCl emissions by approximately 2.5 tons / ton of product), becoming a key path to achieving green manufacturing and circular economy of electronic chemicals.

[0003] After searching, the invention with Chinese patent publication number CN214287404U discloses a tail gas recovery and recycling device in the production process of silicon tetrachloride for high-purity optical fiber, including a tail gas distribution station, a buffer tank, a diaphragm compressor, a gas-liquid separation tank and a tail gas storage tank connected in sequence through pipelines; the tail gas distribution station is provided with a tail gas inlet, and the tail gas storage tank is provided with a tail gas outlet. The tail gas enters from the tail gas inlet of the tail gas distribution station, passes through the tail gas distribution station, the buffer tank, the diaphragm compressor, the gas-liquid separation tank and the tail gas storage tank in sequence, and flows out from the tail gas outlet of the tail gas storage tank. This tail gas recovery and recycling device can recover the heavy component chlorosilane entrained in the tail gas, reducing the amount of tail gas processed. At the same time, nitrogen and light component chlorosilane are stored in the tail gas storage tank, which can be supplemented to the raw material tank truck to reduce the nitrogen in the raw material tank truck. The tail gas recovery and recycling device in the production process of silicon tetrachloride for high-purity optical fiber in the above invention has the following shortcomings:

[0004] Although the above device can recover the heavy component chlorosilane entrained in the tail gas and reduce the amount of tail gas to be treated, the hydrogen chloride that accounts for a large proportion of the tail gas is not effectively purified and recycled. Therefore, a high-purity silicon tetrachloride processing tail gas recycling device is urgently needed. Summary of the invention

[0005] The purpose of the present invention is to solve the defect of incomplete purification of hydrogen chloride gas in the prior art, and to propose a high-purity silicon tetrachloride processing tail gas recycling device.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] A high-purity silicon tetrachloride processing tail gas recycling device comprises a condensing tower, a filtering tower, a purification tower and a recovery tower which are sealed and installed from top to bottom, a liquid tank is connected to one side of the recovery tower by bolts, and a first mounting rod and a second mounting rod are connected to the inner wall of the purification tower by bolts, and a stirring mechanism and a spraying mechanism are arranged between the first mounting rod and the second mounting rod, and the spraying mechanism is located in the middle section of the stirring mechanism;

[0008] The condensing tower and the purification tower are connected by an air guide pipe, and one side of the circumference of the condensing tower is connected with a liquid outlet pipe 2 by a thread, the outer wall of the recovery tower on the same side as the liquid outlet pipe 2 is connected with a liquid outlet pipe 1 by a thread, a liquid pump is fixed to the front outer wall of the liquid tank by a support plate, the liquid inlet end of the liquid pump is connected to the liquid tank by a liquid inlet pipe, the liquid outlet end of the liquid pump is connected with a liquid guide pipe by a thread, the top end of the liquid guide pipe passes through one side of the top of the purification tower by a thread, and a flow valve is arranged on the circumference of the liquid guide pipe, a liquid level gauge is vertically arranged at a corner of the top of the liquid tank, and the top of the condensing tower is connected with an exhaust gas duct by a flange.

[0009] Preferably: the stirring mechanism includes a bevel gear, a speed sensor, an L-shaped rotating plate, a rotating rod, a linkage gear, a bevel rod, a ball chain and a triangular disturbance plate, and the bottom of one end of the mounting rod is fixedly connected to a servo motor by bolts, the rotating rod is connected to the output end of the servo motor by a thread, and the speed sensor is arranged at the bearing end cover of the output shaft of the servo motor.

[0010] Furthermore: the bevel gear is fixedly connected to the top of one end of the second mounting rod, the L-shaped rotating plate is fixedly connected to the circumferential outer wall of the rotating rod, the bevel rod is rotatably connected to the inner side of the tail end of the L-shaped rotating plate through a bearing, and the linkage gear is connected to the bottom end of the bevel rod through a thread.

[0011] On the basis of the above scheme: the linkage gear and the bevel gear are meshed with each other, the ball chain is arranged at one end of the mounting rod, and the bevel rod is connected to the end of the ball chain, and the triangular disturbance plate is connected to the top of the bevel rod by a thread.

[0012] A better solution among the above solutions is: the spray mechanism includes a turntable, a spray head, an annular through pipe, a horizontal liquid guide plate, a rotating joint and a longitudinal liquid guide plate, and the bottom center of the turntable is connected to the top circumference of the rotating rod through a thread, and the annular through pipe is fixedly connected to the top circumferential outer wall of the turntable.

[0013] As a further solution of the present invention: the rotary joint is rotatably connected to one end of the liquid guiding tube, and the transverse liquid guiding plate and the longitudinal liquid guiding plate are fixedly connected to the circumference of the rotary joint, and the transverse liquid guiding plate is connected to the annular through tube.

[0014] At the same time, the three or more spray heads are connected to the top circumference of the annular through pipe through threads, and the tops of both ends of the longitudinal liquid guide plate are connected to the spray heads through threads.

[0015] As a preferred embodiment of the present invention: the top inner wall of the purification tower is connected to a gas conveying disc via threads, and a sealing cover is fixedly connected to the bottom center of the gas conveying disc.

[0016] At the same time, the bottom circumference of the gas delivery disk is respectively provided with conical flow holes distributed in an annular array, and one side of the circumference of the gas delivery disk is connected with a connecting pipe through threads.

[0017] As a more preferred solution of the present invention: the end of the connecting pipe is connected to the end of the air guide pipe through a thread.

[0018] The beneficial effects of the present invention are:

[0019] 1. A high-purity silicon tetrachloride processing tail gas recycling device, when working, starts the servo motor to drive the rotating rod to rotate, the rotating rotating rod drives the L-shaped rotating plate on its circumference to rotate, and the rotating L-shaped rotating plate drives the inclined rod at its tail end to make a circular motion around the helical gear. At the same time, the linkage gear at the bottom end of the inclined rod is meshed with the helical gear, so that the linkage gear makes a synchronous circular motion around the helical gear, and the linkage gear rotates. At this time, the self-rotating linkage gear drives the inclined rod to rotate, and the rotating inclined rod drives the triangular disturbance plate at its top to keep rotating obliquely while making a circular motion, and the ball chain at one end of the mounting rod rotates synchronously, thereby promoting the disturbance of the hydrogen chloride gas entering the purification tower, and increasing the contact area and mixing degree between the hydrogen chloride gas and the alkaline water.

[0020] 2. This high-purity silicon tetrachloride processing tail gas recycling device drives the turntable to rotate synchronously through the rotating rotating rod. Before this, the liquid pump extracts the alkaline water in the liquid tank, introduces it into the horizontal liquid guide plate and the longitudinal liquid guide plate through the liquid inlet pipe and the liquid guide pipe, and is diverted to each spray head through the annular through pipe. At this time, the rotating rotating rod drives the turntable to rotate, thereby prompting the multiple spray heads located above it to complete the rotation action, promoting the uniform dispersion of the alkaline water in the purification tower, ensuring the neutralization and purification quality of the hydrogen chloride gas by the alkaline water, so that the hydrogen chloride gas is effectively purified.

[0021] 3. In the high-purity silicon tetrachloride processing tail gas recycling device, when the hydrogen chloride gas enters the gas conveying plate through the air duct, it is vertically guided downward through a plurality of conical flow holes distributed in an annular array at the bottom of the gas conveying plate, which not only slows down the speed of the hydrogen chloride gas spreading into the purification tower, but also expands the spreading area of ​​the hydrogen chloride gas, thereby improving the efficiency and quality of the contact reaction between the hydrogen chloride gas and the alkaline water. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the main structure of a high-purity silicon tetrachloride processing tail gas recycling device proposed by the present invention;

[0023] Figure 2 This is a schematic diagram of the top view of a high-purity silicon tetrachloride processing tail gas recycling device proposed by the present invention;

[0024] Figure 3 A side structural schematic diagram of a high-purity silicon tetrachloride processing tail gas recycling device proposed by the present invention;

[0025] Figure 4 This is a schematic diagram of the combined structure of a stirring mechanism and a spraying mechanism in a high-purity silicon tetrachloride processing tail gas recycling device proposed by the present invention;

[0026] Figure 5 This is a schematic diagram of the structure of a spray mechanism in a high-purity silicon tetrachloride processing tail gas recycling device proposed by the present invention;

[0027] Figure 6 This is a schematic diagram of the structure of a stirring mechanism in a high-purity silicon tetrachloride processing tail gas recycling device proposed by the present invention;

[0028] Figure 7 This is a schematic diagram of the structure of a gaseous conveying plate in a high-purity silicon tetrachloride processing tail gas recycling device proposed by the present invention;

[0029] Figure 8 This is a flow chart for regulating the number of rotations of the rotating rod and the amount of alkaline water.

[0030] In the figure: 1, recovery tower; 2, liquid pump; 3, liquid inlet pipe; 4, liquid tank; 5, flow valve; 6, liquid level meter; 7, liquid guide pipe; 8, air guide pipe; 9, exhaust gas guide pipe; 10, condensation tower; 11, liquid outlet pipe 1; 12, liquid outlet pipe 2; 13, filter tower; 14, purification tower; 15, mounting rod 1; 16, mounting rod 2; 17, servo motor; 18, stirring mechanism; 19, spray mechanism; 1401, gas conveying plate; 1402, conical flow hole ; 1403, sealing cover; 1404, connecting pipe; 1801, bevel gear; 1802, speed sensor; 1803, L-shaped rotating plate; 1804, rotating rod; 1805, linkage gear; 1806, bevel rod; 1807, ball chain; 1808, triangular disturbance plate; 1901, turntable; 1902, sprinkler head; 1903, annular through pipe; 1904, horizontal liquid guide plate; 1905, rotary joint; 1906, vertical liquid guide plate. DETAILED DESCRIPTION

[0031] The technical solution of the present invention is further described in detail below in conjunction with specific implementation methods.

[0032] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0033] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0034] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "set" should be understood in a broad sense, for example, they can be fixedly connected or set, or detachably connected or set, or integrally connected or set. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] Embodiment 1:

[0036] A high-purity silicon tetrachloride processing tail gas recycling device, such as Figure 1 , Figure 2 , Figure 3 , Figure 4, Figure 5 , Figure 6 and Figure 7 As shown, it includes a condensation tower 10, a filtering tower 13, a purification tower 14 and a recovery tower 1 which are sealed and installed from top to bottom, one side of the recovery tower 1 is connected to a liquid tank 4 by bolts, and the inner wall of the purification tower 14 is connected to a mounting rod 15 and a mounting rod 2 16 by bolts, and a stirring mechanism 18 and a spraying mechanism 19 are arranged between the mounting rod 15 and the mounting rod 2 16, and the spraying mechanism 19 is located in the middle section of the stirring mechanism 18;

[0037] The condensation tower 10 and the purification tower 14 are connected by an air guide pipe 8, and a liquid outlet pipe 2 12 is connected to one side of the circumference of the condensation tower 10 by a thread, and a liquid outlet pipe 1 11 is connected to the outer wall of the recovery tower 1 on the same side of the liquid outlet pipe 2 12 by a thread, a liquid pump 2 is fixed to the front outer wall of the liquid tank 4 by a support plate, the liquid inlet end of the liquid pump 2 is connected to the liquid tank 4 by a liquid inlet pipe 3, and the liquid outlet end of the liquid pump 2 is connected to a liquid guide pipe 7 by a thread, and the top of the liquid guide pipe 7 passes through one side of the top of the purification tower 14 by a thread, and a flow valve 5 is arranged on the circumference of the liquid guide pipe 7, a liquid level meter 6 is vertically arranged at a corner of the top of the liquid tank 4, and the top of the condensation tower 10 is connected to an exhaust gas duct 9 by a flange; the model of the flow valve 5 is Siemens VVP41.2 flow valve 5.

[0038] The condensation tower 10, the filtration tower 13 and the recovery tower 1 are all prior art, and the models of the condensation tower 10, the filtration tower 13 and the recovery tower 1 are SC-50, DMC-200 and YJDJG series respectively, and their working principles are not described in detail in this case;

[0039] Silicon tetrachloride, the main gaseous component in the tail gas, is condensed and liquefied by the condensation tower 10 and then flows into the second liquid outlet pipe 12 for recovery, while the gaseous hydrogen chloride gas enters the purification tower 14 through the air guide pipe 8;

[0040] In order to improve the purification and treatment of hydrogen chloride, which accounts for a large proportion of tail gas; Figure 4 , Figure 5 , Figure 6 As shown, the stirring mechanism 18 includes a bevel gear 1801, a speed sensor 1802, an L-shaped rotating plate 1803, a rotating rod 1804, a linkage gear 1805, a bevel rod 1806, a ball chain 1807 and a triangular disturbance plate 1808, and the bottom of one end of the mounting rod 16 is fixedly connected to the servo motor 17 by bolts, the rotating rod 1804 is connected to the output end of the servo motor 17 by threads, and the speed sensor 1802 is arranged at the bearing end cover of the output shaft of the servo motor 17;

[0041] The bevel gear 1801 is fixedly connected to the top of one end of the mounting rod 16, the L-shaped rotating plate 1803 is fixedly connected to the circumferential outer wall of the rotating rod 1804, the bevel rod 1806 is rotatably connected to the inner side of the tail end of the L-shaped rotating plate 1803 through a bearing, and the linkage gear 1805 is connected to the bottom end of the bevel rod 1806 through a thread;

[0042] The linkage gear 1805 is meshed with the bevel gear 1801, the ball chain 1807 is arranged at one end of the mounting rod 15, and the bevel rod 1806 is connected to the end of the ball chain 1807, and the triangular disturbance plate 1808 is connected to the top of the bevel rod 1806 by threading; the model of the speed sensor 1802 is SZMB-10 / SZMB-9;

[0043] The spray mechanism 19 includes a turntable 1901, a spray head 1902, an annular pipe 1903, a transverse liquid guide plate 1904, a rotary joint 1905 and a longitudinal liquid guide plate 1906, and the bottom center of the turntable 1901 is connected to the top circumference of the rotating rod 1804 by a thread, the annular pipe 1903 is fixedly connected to the outer wall of the top circumference of the turntable 1901, the rotary joint 1905 is rotatably connected to one end of the liquid guide tube 7, and the transverse liquid guide plate 1904 and the longitudinal liquid guide plate 1906 are fixedly connected to the circumference of the rotary joint 1905, and the transverse liquid guide plate 1904 is connected to the annular pipe 1903, more than three spray heads 1902 are connected to the top circumference of the annular pipe 1903 by threads, and the tops of both ends of the longitudinal liquid guide plate 1906 are connected to the spray heads 1902 by threads; the model of the rotary joint 1905 is Rotary Systems M-060S-HF.

[0044] During operation, the servo motor 17 is started to drive the rotating rod 1804 to rotate, and the rotating rotating rod 1804 drives the L-shaped rotating plate 1803 on its circumference to rotate, and the rotating L-shaped rotating plate 1803 drives the inclined rod 1806 at its tail end to make a circular motion around the bevel gear 1801. At the same time, the linkage gear 1805 at the bottom end of the inclined rod 1806 is meshed with the bevel gear 1801, so that the linkage gear 1805 moves synchronously around the bevel gear 1801, and the linkage gear 1805 rotates. At this time, the self-rotating linkage gear 1805 drives the inclined rod 1806 to rotate, and the rotating inclined rod 1806 drives the triangular disturbance plate 1808 at its top to keep rotating obliquely while making a circular motion, and the ball chain 1807 located at the end of the mounting rod 15 rotates synchronously, thereby promoting the disturbance of the hydrogen chloride gas entering the purification tower 14, and increasing the contact area and mixing degree between the hydrogen chloride gas and the alkaline water;

[0045] At the same time, the rotating rotating rod 1804 synchronously drives the turntable 1901 to rotate. Prior to this, the liquid pump 2 extracts the alkaline water in the liquid tank 4, introduces it into the horizontal liquid guide plate 1904 and the longitudinal liquid guide plate 1906 through the liquid inlet pipe 3 and the liquid guide pipe 7, and is diverted to each spray head 1902 through the annular through pipe 1903. At this time, the rotating rotating rod 1804 drives the turntable 1901 to rotate, thereby prompting the multiple spray heads 1902 located above it to complete the rotation action, promoting the uniform dispersion of the alkaline water in the purification tower 14, ensuring the neutralization and purification quality of the hydrogen chloride gas by the alkaline water, and effectively purifying the hydrogen chloride gas.

[0046] In order to promote the hydrogen chloride gas led out from the gas pipe 8 to quickly react with the alkaline water; Figure 7 As shown, the top inner wall of the purification tower 14 is connected to a gas delivery disc 1401 by threads, and a sealing cover 1403 is fixedly connected to the bottom center of the gas delivery disc 1401, and conical flow holes 1402 distributed in an annular array are respectively opened on the bottom circumference of the gas delivery disc 1401, and a connecting pipe 1404 is connected to one side of the circumference of the gas delivery disc 1401 by threads, and the end of the connecting pipe 1404 is connected to the end of the air guide pipe 8 by threads;

[0047] When the hydrogen chloride gas enters the gas delivery plate 1401 through the air guide pipe 8, it is discharged vertically downward through the multiple conical flow holes 1402 distributed in a ring array at the bottom of the gas delivery plate 1401, which not only slows down the speed of the hydrogen chloride gas spreading into the purification tower 14, but also expands the spreading area of ​​the hydrogen chloride gas, thereby improving the efficiency and quality of the contact reaction between the hydrogen chloride gas and the alkaline water.

[0048] Embodiment 2:

[0049] A high-purity silicon tetrachloride processing tail gas recycling device, such as Figure 8 As shown, in the purification process of gaseous hydrogen chloride, the number of turns of the rotating rod 1804 (stirring intensity) and the amount of sprayed alkali solution (liquid-gas ratio) affect the treatment efficiency of gaseous hydrogen chloride, and the steps are as follows:

[0050] S1: When the servo motor 17 drives the rotating rod 1804 to rotate, the speed sensor 1802 transmits the number of rotations of the rotating rod 1804 to the controller of the servo motor 17 through a signal line, and the controller controls the number of rotations of the rotating rod 1804;

[0051] S2: When the liquid pump 2 pumps out the alkaline water in the liquid tank 4 and the alkaline water enters the liquid guiding tube 7 through the liquid inlet pipe 3, the flow valve 5 located on the circumference of the liquid guiding tube 7 regulates the amount of the alkaline water.

[0052] The efficiency of treating hydrogen chloride gas is studied by the number of revolutions of the rotating rod 1804 and the amount of alkaline water introduced. The algorithm formula is as follows:

[0053]

[0054] Where k is the gas-liquid mass transfer coefficient, N is the number of stirring cycles, α is the stirring index (the index of stirring speed to mass transfer coefficient), Q L is the spraying amount, β is the spraying index (the index of spraying amount to contact area);

[0055] When the experimental results show that α = 0.7, β = 0.8, k = 0.05, N = 200, Q L =10, we get:

[0056] η=[1-exp(-0.05·200 0.7 10 0.8 )]·100%≈92.5%

[0057] It can be seen that by regulating the number of rotations of the rotating rod 1804 and the amount of alkaline water added, the specific efficiency percentage of hydrogen chloride gas treatment can be obtained through the above formula, thereby helping enterprises to determine the optimal parameter combination to improve mass transfer efficiency, reduce operating costs, and ensure a balance between economy and environmental protection requirements.

[0058] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A high-purity silicon tetrachloride processing tail gas recycling device, comprising a condensation tower (10), a filtration tower (13), a purification tower (14) and a recovery tower (1) which are sealed and installed from top to bottom, characterized in that: A liquid tank (4) is connected to one side of the recovery tower (1) by bolts, and a first mounting rod (15) and a second mounting rod (16) are connected to the inner wall of the purification tower (14) by bolts, and a stirring mechanism (18) and a spraying mechanism (19) are arranged between the first mounting rod (15) and the second mounting rod (16), and the spraying mechanism (19) is located in the middle section of the stirring mechanism (18); The condensation tower (10) and the purification tower (14) are connected via an air guide pipe (8), and a second liquid outlet pipe (12) is connected via a thread on one side of the circumference of the condensation tower (10), and a first liquid outlet pipe (11) is connected via a thread on the outer wall of the recovery tower (1) close to the same side of the second liquid outlet pipe (12). A liquid pump (2) is fixed to the front outer wall of the liquid tank (4) via a support plate, and the liquid inlet end of the liquid pump (2) is connected to the liquid tank (4) via a liquid inlet pipe (3). The liquid outlet end of the liquid pump (2) is connected via a thread to a liquid guide pipe (7), and the top of the liquid guide pipe (7) penetrates through one side of the top of the purification tower (14) via a thread, and a flow valve (5) is arranged on the circumference of the liquid guide pipe (7). A liquid level meter (6) is vertically arranged at one corner of the top of the liquid tank (4), and the top of the condensation tower (10) is connected to an exhaust gas conduit (9) via a flange.

2. A high-purity silicon tetrachloride processing tail gas recycling device according to claim 1, characterized in that: The stirring mechanism (18) comprises a bevel gear (1801), a rotation speed sensor (1802), an L-shaped rotating plate (1803), a rotating rod (1804), a linkage gear (1805), a bevel rod (1806), a ball chain (1807) and a triangular disturbance plate (1808), and the bottom of one end of the mounting rod (16) is fixedly connected to a servo motor (17) by bolts, the rotating rod (1804) is connected to the output end of the servo motor (17) by threads, and the rotation speed sensor (1802) is arranged at the bearing end cover of the output shaft of the servo motor (17).

3. A high-purity silicon tetrachloride processing tail gas recycling device according to claim 2, characterized in that: The bevel gear (1801) is fixedly connected to the top of one end of the second mounting rod (16); the L-shaped rotating plate (1803) is fixedly connected to the circumferential outer wall of the rotating rod (1804); the bevel rod (1806) is rotatably connected to the inner side of the tail end of the L-shaped rotating plate (1803) through a bearing; and the linkage gear (1805) is threadedly connected to the bottom end of the bevel rod (1806).

4. A high-purity silicon tetrachloride processing tail gas recycling device according to claim 2, characterized in that: The linkage gear (1805) is meshed with the bevel gear (1801), the ball chain (1807) is arranged at one end of the mounting rod (15), and the bevel rod (1806) is connected to the end of the ball chain (1807), and the triangular disturbance plate (1808) is connected to the top of the bevel rod (1806) by means of threads.

5. A high-purity silicon tetrachloride processing tail gas recycling device according to claim 1, characterized in that: The spray mechanism (19) comprises a rotating disk (1901), a spray head (1902), an annular through pipe (1903), a transverse liquid guide plate (1904), a rotating joint (1905) and a longitudinal liquid guide plate (1906), wherein the bottom center of the rotating disk (1901) is connected to the top circumference of the rotating rod (1804) through a thread, and the annular through pipe (1903) is fixedly connected to the top circumferential outer wall of the rotating disk (1901).

6. A high-purity silicon tetrachloride processing tail gas recycling device according to claim 5, characterized in that: The rotary joint (1905) is rotatably connected to one end of the liquid guiding tube (7), and the transverse liquid guiding plate (1904) and the longitudinal liquid guiding plate (1906) are fixedly connected to the circumference of the rotary joint (1905), and the transverse liquid guiding plate (1904) is connected to the annular through tube (1903).

7. A high-purity silicon tetrachloride processing tail gas recycling device according to claim 5, characterized in that: The three or more spray heads (1902) are connected to the top circumference of the annular through pipe (1903) through threads, and the tops of both ends of the longitudinal liquid guide plate (1906) are connected to the spray heads (1902) through threads.

8. A high-purity silicon tetrachloride processing tail gas recycling device according to claim 1, characterized in that: The top inner wall of the purification tower (14) is connected to a gas delivery disc (1401) via threads, and a sealing cover (1403) is fixedly connected to the bottom center of the gas delivery disc (1401).

9. A high-purity silicon tetrachloride processing tail gas recycling device according to claim 8, characterized in that: The bottom circumference of the gas delivery disc (1401) is provided with conical flow holes (1402) distributed in a circular array, and one side of the circumference of the gas delivery disc (1401) is connected to a connecting pipe (1404) through a thread.

10. A high-purity silicon tetrachloride processing tail gas recycling device according to claim 9, characterized in that: The end of the connecting tube (1404) is connected to the end of the air guide tube (8) via a thread.

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