Semiconductor-grade quartz tube coating processing method

Abstract

The invention discloses a semiconductor-grade quartz tube coating processing method which comprises a lathe body, an auxiliary clamping mechanism, a transverse adjusting mechanism, a heating mechanism, a mixing mechanism and a spraying mechanism, and the middle of the right side of the lathe body is rotationally connected with a shell; the auxiliary clamping mechanism comprises a hydraulic rod and a limiting block, and the longitudinal section of the limiting block is of a trapezoidal structure; and the transverse adjusting mechanism is composed of a fixing frame, a third motor, an adjusting rod and an adjusting block, the fixing frame is connected with the adjusting block through a clamping groove, and the adjusting rod is in threaded connection with the adjusting block. According to the semiconductor-grade quartz tube coating processing method, quartz tubes of different sizes can be stably clamped and are double-fixed from the inner side and the outer side, loosening is avoided, nanoscale aluminum oxide powder and an organic solvent can be effectively mixed, the quartz tubes can be conveniently heated, drooping deformation of the quartz tubes in the using process is delayed, the service life of the quartz tubes is prolonged, and the service life of the quartz tubes is prolonged. And uniform spraying can be realized.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor-grade quartz tube coating processing, in particular to a semiconductor-grade quartz tube coating processing method. Background Art

[0002] Quartz generally refers to low-temperature quartz, which is the most widely distributed mineral in the quartz family. Its main component is SiO2, which is colorless and transparent, often containing a small amount of impurities, and becomes translucent or opaque crystals with a hard texture. Semiconductor-grade quartz tube coating processing, quartz tubes are tube products processed from quartz as raw materials. Large-diameter quartz tubes are generally used for semiconductor chip oxidation, reduction, diffusion, epitaxy and other processes, requiring good chemical stability, small thermal expansion coefficient, high-temperature resistant high-purity materials, semiconductor-grade quartz tubes need to be sprayed with oxide coatings, nitride coatings, carbide coatings or metal coatings on the outside, etc. There are various methods for semiconductor-grade quartz tube coating processing on the market;

[0003] However, in combination with the existing scheme and the actual use process, the current semiconductor-grade quartz tube coating processing method is not convenient for stably clamping quartz tubes of different sizes, and is not convenient for dual fixing from the inside and outside, and is easy to loosen, and is not convenient for mixing nano-alumina powder and organic solvents. The softening temperature of quartz glass is about 1730°C, and it can be used for a long time at 1100°C, and the maximum short-term use temperature can reach 1450°C. After entering the furnace, the quartz tube must be used for a long time at a high temperature of 1250°C. Obviously, if it exceeds 1100°C, it cannot be used for a long time. At high temperatures, it is easy to cause the middle part of the quartz tube to sag and deform, and at the same time reduce the service life of the quartz tube;

[0004] Therefore, we propose a semiconductor-grade quartz tube coating processing method to solve the above-mentioned problems. Summary of the invention

[0005] The object of the present invention is to provide a semiconductor-grade quartz tube coating processing method to solve the problems of the current semiconductor-grade quartz tube coating processing method proposed in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solution: a method for processing semiconductor-grade quartz tube coating, comprising:

[0007] A lathe body, wherein the middle portion of the right side of the lathe body is rotatably connected to a housing;

[0008] Also includes:

[0009] An auxiliary clamping mechanism, the auxiliary clamping mechanism comprising a hydraulic rod and a limit block, the longitudinal section of the limit block being a trapezoidal structure;

[0010] A lateral adjustment mechanism, the lateral adjustment mechanism comprises a fixed frame, a third motor, an adjustment rod and an adjustment block, the fixed frame and the adjustment block are connected by a slot, and the adjustment rod and the adjustment block are threadedly connected;

[0011] A heating mechanism, the heating mechanism comprising a support plate, a support rod, a base, a welding gun and a limiting rod, the support plate and the support rod are threadedly connected, and the support plate and the limiting rod are slidably connected;

[0012] A mixing mechanism, the mixing mechanism comprising a mixing barrel, a fourth motor and a lateral adjustment mechanism, the lateral adjustment mechanism being installed in the mixing barrel, and the mixing barrel being installed above the lathe body;

[0013] The spraying mechanism comprises a fixing plate, an electric telescopic rod, a spray head, a delivery pipe and a lifting ring, wherein the delivery pipe is connected to the lifting ring through a slot.

[0014] Preferably, a first motor is installed inside the lathe body, and a shell is installed at the output end of the first motor, and a lathe chuck is rotatably connected inside the shell.

[0015] Preferably, an adjusting wheel is meshedly connected to the upper left side of the lathe chuck, and a second motor is installed on the left side of the adjusting wheel. A clamping block is meshedly connected to the right side of the lathe chuck, and the clamping blocks are distributed at equal angles.

[0016] Preferably, a mounting frame is fixed to the middle portion of the left side of the lathe chuck, and a hydraulic rod is installed inside the mounting frame. A limit block is installed at the output end of the hydraulic rod, and the material of the limit block is rubber.

[0017] Preferably, the fixing frame is symmetrically installed on the upper right side of the lathe body, and a third motor is installed on the right side of the fixing frame, and an adjusting rod is installed on the output end of the third motor.

[0018] Preferably, an adjusting block is slidably connected inside the fixing frame, and a supporting plate is fixed above the adjusting block, and a supporting rod is installed inside the supporting plate.

[0019] Preferably, a base is installed at the inner end of the support rod, and the support rod is rotatably connected to the base, a welding gun is installed on the inner side of the base, limiting rods are welded at the four corners of the outer side of the base, and the limiting rod slots are connected in the support plate.

[0020] Preferably, a fourth motor is installed above the mixing barrel, and a delivery pipe is installed below the mixing barrel, and a nozzle is installed at the lower end of the delivery pipe.

[0021] Preferably, a fixing plate is integrally provided at the upper end of the lifting ring, and a support frame is fixed to the rear side of the fixing plate, and a lateral adjustment mechanism is provided below the support frame, and electric telescopic rods are symmetrically installed front and back below the fixing plate, and a nozzle is installed at the output end of the electric telescopic rod.

[0022] Preferably, the semiconductor-grade quartz tube coating processing method comprises the following steps:

[0023] Step 1: Proportioning the coating solution, mixing the nano-aluminum oxide powder with the organic solvent in a ratio of 1:1 to 20 to form an alumina solution;

[0024] Step 2: Stir and filter thoroughly until there is no obvious sediment in the mixing barrel and no obvious particles attached to the surface of the lateral adjustment mechanism;

[0025] Step 3: Clean the quartz tube to be processed and clamp it on the shell. Use a welding torch to preheat the quartz tube until the water inside the tube evaporates.

[0026] Step 4: Use a welding gun to evenly heat the entire quartz tube axially to raise its temperature to 1000-2000°C. When the temperature drops to 100-500°C, rotate the quartz tube and evenly spray the alumina solution along the axial direction of the quartz tube;

[0027] Step 5: Use a welding torch to burn the quartz tube and the coating to make it transparent. The temperature is 1000-2000℃.

[0028] Step 6: Place the quartz tube in an annealing furnace for annealing, set the temperature to 1000°C to 2000°C, and keep it warm for 10 to 100 minutes. After the annealing is completed, take out the quartz tube and cool it naturally to room temperature.

[0029] Compared with the prior art, the invention has the following beneficial effects: the semiconductor-grade quartz tube coating processing method can stably clamp quartz tubes of different sizes, double fix them from the inside and outside to avoid loosening, and can effectively mix nano-alumina powder and organic solvent, conveniently heat the quartz tube, delay the sagging and deformation of the quartz tube during use, extend the service life of the quartz tube, and can spray uniformly;

[0030] 1. It is equipped with a lathe chuck, a hydraulic rod and a limit block. The clamping block is installed on the lathe chuck at equal angles. The hydraulic rod is installed in the installation frame. The limit block is installed at the output end of the hydraulic rod. The hydraulic rod can push the limit block to move, and can stably clamp quartz tubes of different sizes. It is double-fixed from the inside and outside to prevent loosening;

[0031] 2. A mixing barrel, a fourth motor and a lateral adjustment mechanism are provided. The mixing barrel is installed on the lathe body, and the output end of the fourth motor installed above the mixing barrel is installed with a lateral adjustment mechanism. The lateral adjustment mechanism mixes the nano-alumina powder and the organic solvent, and can effectively mix the nano-alumina powder and the organic solvent;

[0032] 3. An adjustment block, a support plate, a support rod and a welding gun are provided. The adjustment rod and the adjustment block are threadedly connected. The adjustment block drives the support plate to move. The support plate and the support rod are threadedly connected. The position of the welding gun can be adjusted. A welding gun is installed on the inside of the base, which is convenient for heating the quartz tube, delaying the sagging and deformation of the quartz tube during use, and extending the service life of the quartz tube;

[0033] 4. An electric telescopic rod, a nozzle and a lifting ring are provided. The electric telescopic rod is installed under the fixed plate. The electric telescopic rod pushes the nozzle to rise and fall. The delivery pipe is connected to the lifting ring slot. The adjusting rod drives the fixed plate to move, so that the nozzle moves and can spray evenly. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0035] Figure 2 This is a schematic diagram of the overall structure of the connection between the first motor and the housing of the present invention;

[0036] Figure 3 This is a schematic diagram of the overall structure of the lathe chuck and the mounting frame connected to the present invention;

[0037] Figure 4 This is a schematic diagram of the overall structure of the connection between the lathe chuck and the hydraulic rod of the present invention;

[0038] Figure 5 This is a schematic diagram of the overall structure of the connection between the adjusting wheel and the lathe chuck of the present invention;

[0039] Figure 6 This is a schematic diagram of the overall structure of the hydraulic rod and the limit block connected in the present invention;

[0040] Figure 7 This is a schematic diagram of the overall structure of the fixed frame and the adjustment block connected in the present invention;

[0041] Figure 8 This is a schematic diagram of the overall front structure of the adjustment rod and the adjustment block connected in the present invention;

[0042] Fig. 9 It is a schematic diagram of the overall structure of the heating mechanism of the present invention;

[0043] Fig.10 This is a schematic diagram of the overall structure of the fourth motor and the lateral adjustment mechanism connected to the present invention;

[0044] Fig.11This is a schematic diagram of the overall structure of the support frame and the fixing plate connected to the present invention;

[0045] Fig.12 It is a schematic diagram of the overall structure of the connection between the electric telescopic rod and the spray head of the present invention.

[0046] In the figure: 1. lathe body; 2. first motor; 3. housing; 4. second motor; 5. adjusting wheel; 6. lathe chuck; 7. mounting frame; 8. hydraulic rod; 9. limit block; 10. clamping block; 11. fixed frame; 12. third motor; 13. adjusting rod; 14. adjusting block; 15. support plate; 16. support rod; 17. base; 18. welding gun; 19. limit rod; 20. mixing barrel; 21. fourth motor; 22. lateral adjustment mechanism; 23. support frame; 24. fixed plate; 25. electric telescopic rod; 26. nozzle; 27. delivery pipe; 28. lifting ring. DETAILED DESCRIPTION

[0047] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] See also Figure 1-12 The present invention provides a technical solution: a semiconductor-grade quartz tube coating processing method, comprising:

[0049] A lathe body 1, the middle right side of the lathe body 1 is rotatably connected with a housing 3;

[0050] Also includes:

[0051] Auxiliary clamping mechanism, the auxiliary clamping mechanism includes a hydraulic rod 8 and a limit block 9, and the longitudinal section of the limit block 9 is a trapezoidal structure;

[0052] The lateral adjustment mechanism 22 is composed of a fixed frame 11, a third motor 12, an adjustment rod 13 and an adjustment block 14. The fixed frame 11 and the adjustment block 14 are connected by a slot, and the adjustment rod 13 and the adjustment block 14 are threadedly connected.

[0053] A heating mechanism, the heating mechanism comprises a support plate 15, a support rod 16, a base 17, a welding gun 18 and a limiting rod 19, the support plate 15 and the support rod 16 are threadedly connected, and the support plate 15 and the limiting rod 19 are slidably connected;

[0054] A mixing mechanism, the mixing mechanism comprises a mixing barrel 20, a fourth motor 21 and a lateral adjustment mechanism 22, the lateral adjustment mechanism 22 is installed in the mixing barrel 20, and the mixing barrel 20 is installed above the lathe body 1;

[0055] The spraying mechanism comprises a fixing plate 24, an electric telescopic rod 25, a spray head 26, a delivery pipe 27 and a hanging ring 28, and the delivery pipe 27 and the hanging ring 28 are connected by a slot.

[0056] By adopting the above technical scheme, a heating mechanism is formed by combining the support plate 15, the support rod 16, the base 17, the welding gun 18 and the limit rod 19, which is convenient for heating the quartz tube; a mixing barrel 20, a fourth motor 21 and a lateral adjustment mechanism 22 are combined to form a mixing mechanism, which is convenient for mixing the alumina solution; a fixed plate 24, an electric telescopic rod 25, a nozzle 26, a delivery pipe 27 and a hanging ring 28 are combined to form a spraying mechanism, which can ensure uniform coating.

[0057] As attached Figure 2 and attached Figure 3 As shown in , a first motor 2 is installed inside the lathe body 1, and a housing 3 is installed at the output end of the first motor 2, and a lathe chuck 6 is rotatably connected inside the housing 3.

[0058] By adopting the above technical solution, the first motor 2 is installed inside the lathe body 1, and the output end of the first motor 2 is installed with the housing 3, so the structure is stable and reliable.

[0059] As attached Figure 3 , Attachment Figure 4 and attached Figure 5 As shown in the figure, an adjusting wheel 5 is meshedly connected to the upper left side of the lathe chuck 6, and a second motor 4 is installed on the left side of the adjusting wheel 5. A clamping block 10 is meshedly connected to the right side of the lathe chuck 6, and the clamping blocks 10 are distributed at equal angles.

[0060] By adopting the above technical solution, the adjusting wheel 5 is meshedly connected to the upper left side of the lathe chuck 6, and the clamping block 10 is meshedly connected to the right side of the lathe chuck 6, which can drive the lathe chuck 6 to rotate and conveniently clamp the quartz tube for rotation.

[0061] As attached Figure 4 and attached Figure 6 As shown in the figure, a mounting frame 7 is fixed to the middle of the left side of the lathe chuck 6, and a hydraulic rod 8 is installed inside the mounting frame 7. A limit block 9 is installed at the output end of the hydraulic rod 8, and the material of the limit block 9 is rubber.

[0062] By adopting the above technical solution, a limit block 9 is installed at the output end of the hydraulic rod 8. The limit block 9 is made of rubber and can stably clamp the quartz tube.

[0063] As attached Figure 1 and attached Figure 8 As shown in , the fixing frame 11 is symmetrically installed on the upper right side of the lathe body 1 , and a third motor 12 is installed on the right side of the fixing frame 11 , and an adjusting rod 13 is installed on the output end of the third motor 12 .

[0064] By adopting the above technical solution, the fixing frame 11 is symmetrically installed on the upper right side of the lathe body 1, and the output end of the third motor 12 is installed with an adjusting rod 13 to facilitate the adjustment of the position of the adjusting block 14.

[0065] As attached Figure 8 As shown in FIG. 1 , an adjusting block 14 is slidably connected to the interior of the fixing frame 11 , and a supporting plate 15 is fixed above the adjusting block 14 , and a supporting rod 16 is installed inside the supporting plate 15 .

[0066] By adopting the above technical solution, the adjusting block 14 is connected to the fixing frame 11 through internal sliding, and the supporting plate 15 is fixed above the adjusting block 14, so that the adjusting block 14 can move stably.

[0067] As attached Figure 7 and attached Fig. 9 As shown in the figure, a base 17 is installed at the inner end of the support rod 16, and the support rod 16 is rotatably connected to the base 17, a welding gun 18 is installed on the inner side of the base 17, and limiting rods 19 are welded at the four corners of the outer side of the base 17, and the limiting rods 19 are connected to the support plate 15 by a slot.

[0068] By adopting the above technical solution, the support rod 16 is rotatably connected to the base 17, a welding gun 18 is installed on the inner side of the base 17, and the limit rod 19 is connected to the support plate 15 by a slot, so as to facilitate the adjustment of the position of the welding gun 18.

[0069] As attached Fig.10 As shown in , a fourth motor 21 is installed above the mixing barrel 20 , and a delivery pipe 27 is installed below the mixing barrel 20 , and a nozzle 26 is installed at the lower end of the delivery pipe 27 .

[0070] By adopting the above technical solution, a fourth motor 21 is installed above the mixing barrel 20, and a delivery pipe 27 is installed below the mixing barrel 20, so as to facilitate mixing of the solvent.

[0071] As attached Figure 1 and attached Fig.12 As shown in the figure, a fixing plate 24 is integrally provided at the upper end of the lifting ring 28, and a support frame 23 is fixed to the rear side of the fixing plate 24, and a lateral adjustment mechanism 22 is provided below the support frame 23, and an electric telescopic rod 25 is symmetrically installed front and back below the fixing plate 24, and a nozzle 26 is installed at the output end of the electric telescopic rod 25.

[0072] By adopting the above technical solution, the electric telescopic rod 25 is symmetrically installed front and back under the fixing plate 24, and the output end of the electric telescopic rod 25 is installed with a nozzle 26, so as to facilitate the adjustment of the position of the nozzle 26.

[0073] Preferably, the semiconductor-grade quartz tube coating processing method comprises the following steps:

[0074] Step 1: Proportioning the coating solution, mixing the nano-aluminum oxide powder with the organic solvent in a ratio of 1:1 to 20 to form an alumina solution;

[0075] Step 2: Stir and filter thoroughly until there is no obvious sediment in the mixing barrel 20 and no obvious particles attached to the surface of the lateral adjustment mechanism 22;

[0076] Step 3: After cleaning the quartz tube to be processed, clamp it on the housing 3, and preheat the quartz tube with a welding torch 18 until the water inside the tube evaporates;

[0077] Step 4: Use the welding torch 18 to uniformly heat the entire quartz tube axially to raise its temperature to 1000-2000° C. When the temperature drops to 100-500° C., rotate the quartz tube and uniformly spray the alumina solution along the axial direction of the quartz tube;

[0078] Step 5: Use a welding torch 18 to finely burn the quartz tube and the coating to make it transparent, at a temperature of 1000-2000°C;

[0079] Step 6: Place the quartz tube in an annealing furnace for annealing, set the temperature to 1000°C to 2000°C, and keep it warm for 10 to 100 minutes. After the annealing is completed, take out the quartz tube and cool it naturally to room temperature.

[0080] By adopting the above technical solution, the quartz tube is preheated by mixing nano-alumina powder and organic solvent, and then the alumina solution is sprayed on the quartz tube after heating. The formed coating can ensure that the quartz tube delays sagging and deformation during use, thereby increasing the service life of the quartz tube. Specific embodiment one;

[0082] The existing semiconductor-grade quartz tube coating processing method is not convenient for stably clamping quartz tubes of different sizes. In order to solve this technical problem, the present embodiment is as shown in the attached Figure 1 -Attached Figure 6 As shown in the figure, the second motor 4 installed in the housing 3 is opened, and the second motor 4 drives the adjusting wheel 5 at its output end to rotate, and the adjusting wheel 5 is meshed and connected with the lathe chuck 6. The rotation of the lathe chuck 6 drives the clamping block 10 meshed and connected on the right side to move, so that the clamping block 10 slides in the housing 3 connected to the slot therewith, and the clamping blocks 10 distributed at equal angles clamp the quartz tube. The lathe chuck 6 and the clamping block 10 are mature technologies on the market;

[0083] Then open the hydraulic rod 8 installed in the installation frame 7, and the hydraulic rod 8 drives the limit block 9 installed at its output end to move horizontally, so that the limit block 9 and the inside of the quartz tube fit closely. Since the longitudinal section of the limit block 9 is trapezoidal, it can adapt to quartz tubes with different inner diameters. The limit block 9 made of rubber increases the friction with the quartz tube and ensures the stability of the limit block 9 and the clamping block 10;

[0084] When the quartz tube needs to be driven to rotate, the first motor 2 installed in the lathe body 1 is turned on, the first motor 2 drives the housing 3 to rotate, and the housing 3 drives the limit block 9 installed on the right side thereof; Specific embodiment 2;

[0086] The existing semiconductor-grade quartz tube coating processing method is not convenient for heating the quartz tube. In order to solve this technical problem, the present embodiment is as follows: Figure 1 , Attachment Figure 7 , Attachment Figure 8 and attached Fig. 9 As shown in the figure, the third motor 12 is turned on, the third motor 12 drives the adjusting rod 13 installed at its output end to rotate, the adjusting rod 13 drives the adjusting block 14 connected to its outer thread to move, so that the adjusting block 14 slides in the fixed frame 11 connected to the slot thereof, the adjusting block 14 drives the support plate 15 fixed above it to move, the support plate 15 drives the welding gun 18 to move, and the welding gun 18 heats the quartz tube until the water inside the quartz tube evaporates;

[0087] When the heating position needs to be adjusted, the support rod 16 threadedly connected to the support plate 15 is rotated, and the inner end of the support rod 16 rotates on the base 17 and pushes the base 17 to move. The limiting rods 19 are fixed at the four corners of the outer side of the base 17. When the base 17 moves, the limiting rods 19 slide in the support plate 15 connected to the slot, and limit the base 17. The base 17 drives the welding gun 18 to move, and the heating position can be flexibly adjusted. Specific embodiment three;

[0089] The existing semiconductor-grade quartz tube coating processing method is not convenient for mixing alumina solution. In order to solve this technical problem, the present embodiment is as follows Figure 1 and attached Fig.10 As shown in the figure, nano-aluminum oxide powder and organic solvent are put into a mixing barrel 20, and a fourth motor 21 installed above the mixing barrel 20 is turned on. The fourth motor 21 drives a lateral adjustment mechanism 22 installed at its output end to rotate, and the lateral adjustment mechanism 22 mixes the nano-aluminum oxide powder and the organic solvent to form an aluminum oxide solution; Specific embodiment four:

[0091] The existing semiconductor-grade quartz tube coating processing method is not convenient for uniformly spraying the solution. In order to solve this technical problem, the present embodiment is as follows Figure 1 , Attachment Fig.11 and attached Fig.12 As shown in the figure, a delivery pipe 27 is installed below the mixing barrel 20, and the solution in the mixing barrel 20 is sprayed out through the nozzle 26, so that the solution is evenly sprayed on the surface of the quartz tube, and the third motor 12 is turned on, and the adjustment rod 13 drives the adjustment block 14 to move, and the adjustment block 14 drives the support frame 23 to move horizontally, and the support frame 23 drives the fixed plate 24 to move, and the position of the nozzle 26 installed below the fixed plate 24 is adjusted. A lifting ring 28 is fixed at the middle part of the lower part of the fixed plate 24, and the delivery pipe 27 is connected to the lifting ring 28 by a slot, and the lifting ring 28 supports and limits the delivery pipe 27;

[0092] The electric telescopic rod 25 symmetrically installed front and back below the fixed plate 24 is opened, and the electric telescopic rod 25 pushes the spray head 26 installed at its output end to rise and fall, and the height of the spray head 26 is adjusted to adjust the spraying range.

[0093] This is the entire working process of the semiconductor-grade quartz tube coating processing method. The contents not described in detail in this specification belong to the prior art known to professional and technical personnel in this field.

[0094] The standard parts used in the present invention can all be purchased from the market, and special-shaped parts can be customized according to the instructions and the drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. Machinery, parts and equipment all adopt conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be described in detail here.

[0095] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A semiconductor-grade quartz tube coating processing method, comprising: A lathe body (1), wherein the middle portion of the right side of the lathe body (1) is rotatably connected to a housing (3); It is characterized by further comprising: An auxiliary clamping mechanism, the auxiliary clamping mechanism comprising a hydraulic rod (8) and a limit block (9), the limit block (9) having a trapezoidal longitudinal section; A lateral adjustment mechanism (22), the lateral adjustment mechanism (22) comprising a fixed frame (11), a third motor (12), an adjustment rod (13) and an adjustment block (14), the fixed frame (11) and the adjustment block (14) being connected by a slot, and the adjustment rod (13) and the adjustment block (14) being connected by a thread; A heating mechanism, the heating mechanism comprising a support plate (15), a support rod (16), a base (17), a welding gun (18) and a limiting rod (19), the support plate (15) and the support rod (16) being threadedly connected, and the support plate (15) and the limiting rod (19) being slidably connected; A mixing mechanism, the mixing mechanism comprising a mixing barrel (20), a fourth motor (21) and a lateral adjustment mechanism (22), the lateral adjustment mechanism (22) being installed in the mixing barrel (20), and the mixing barrel (20) being installed above the lathe body (1); The spraying mechanism comprises a fixing plate (24), an electric telescopic rod (25), a spray head (26), a delivery pipe (27) and a hanging ring (28), wherein the delivery pipe (27) and the hanging ring (28) are connected by a slot.

2. A semiconductor-grade quartz tube coating processing method according to claim 1, characterized in that: A first motor (2) is installed inside the lathe body (1), and a housing (3) is installed at the output end of the first motor (2); a lathe chuck (6) is rotatably connected inside the housing (3).

3. The method for processing semiconductor-grade quartz tube coating according to claim 2, characterized in that: An adjusting wheel (5) is meshedly connected to the upper left side of the lathe chuck (6), and a second motor (4) is installed on the left side of the adjusting wheel (5). A clamping block (10) is meshedly connected to the right side of the lathe chuck (6), and the clamping blocks (10) are distributed at equal angles.

4. The method for processing semiconductor-grade quartz tube coating according to claim 3, characterized in that: A mounting frame (7) is fixed to the middle of the left side of the lathe chuck (6), and a hydraulic rod (8) is installed inside the mounting frame (7). A limit block (9) is installed at the output end of the hydraulic rod (8), and the material of the limit block (9) is rubber.

5. The method for processing semiconductor-grade quartz tube coating according to claim 1, characterized in that: The fixed frame (11) is symmetrically mounted on the upper right side of the lathe body (1), and a third motor (12) is mounted on the right side of the fixed frame (11). An adjusting rod (13) is mounted on the output end of the third motor (12).

6. A semiconductor-grade quartz tube coating processing method according to claim 5, characterized in that: An adjusting block (14) is slidably connected inside the fixing frame (11), and a supporting plate (15) is fixed above the adjusting block (14), and a supporting rod (16) is installed inside the supporting plate (15).

7. A semiconductor-grade quartz tube coating processing method according to claim 6, characterized in that: A base (17) is installed at the inner end of the support rod (16), and the support rod (16) is rotatably connected to the base (17). A welding gun (18) is installed on the inner side of the base (17). Limit rods (19) are welded at the four corners of the outer side of the base (17), and the limit rods (19) are connected to the support plate (15) through a slot.

8. The method for processing semiconductor-grade quartz tube coating according to claim 1, characterized in that: A fourth motor (21) is installed above the mixing barrel (20), and a delivery pipe (27) is installed below the mixing barrel (20), and a spray head (26) is installed at the lower end of the delivery pipe (27).

9. The method for processing semiconductor-grade quartz tube coating according to claim 1, characterized in that: A fixing plate (24) is integrally provided at the upper end of the lifting ring (28), a support frame (23) is fixed to the rear side of the fixing plate (24), and a lateral adjustment mechanism (22) is provided below the support frame (23), an electric telescopic rod (25) is symmetrically installed front and rearward below the fixing plate (24), and a nozzle (26) is installed at the output end of the electric telescopic rod (25).

10. A semiconductor-grade quartz tube coating processing method as claimed in claim 1, characterized in that: The semiconductor-grade quartz tube coating processing method comprises the following steps: Step 1: Proportioning the coating solution, mixing the nano-aluminum oxide powder with the organic solvent in a ratio of 1:1 to 20 to form an alumina solution; Step 2: Stir and filter thoroughly until there is no obvious sediment in the mixing barrel (20) and no obvious particles are attached to the surface of the lateral adjustment mechanism (22); Step 3: After cleaning the quartz tube to be processed, clamp it on the housing (3), and preheat the quartz tube with a welding torch (18) until the water inside the tube evaporates; Step 4: using a welding torch (18) to uniformly heat the entire quartz tube axially to raise its temperature to 1000-2000° C., and when the temperature drops to 100-500° C., rotating the quartz tube and uniformly spraying the alumina solution along the axial direction of the quartz tube; Step 5: Use a welding torch (18) to finely sinter the quartz tube and the coating until it becomes transparent, at a temperature of 1000-2000°C; Step 6: Place the quartz tube in an annealing furnace for annealing, set the temperature to 1000°C to 2000°C, and keep it warm for 10 to 100 minutes. After the annealing is completed, take out the quartz tube and cool it naturally to room temperature.

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