Filling device for improving water absorption or oxidation in evaporation material filling process

Abstract

The invention discloses a filling device for improving water absorption or oxidation in the evaporation material filling process, and belongs to the technical field of crucibles. One side of a glove box body is correspondingly provided with a glove box transfer cavity, a crucible cover is provided with a valve plate, a guide rail, a sliding part and a placing part are installed in the glove box body, and the sliding part is slidably installed in the guide rail; by means of the vacuum evaporation device, it can be guaranteed that filling is conducted in the nitrogen or other inert gas environment, after filling is completed, the nitrogen or other inert gas environment can be maintained in the process that the interior of the crucible is transferred to an evaporation process cavity, and therefore the situation that an evaporation material absorbs water or reacts with atmospheric components to be denatured is avoided; the crucible body is in threaded connection with the crucible cover, the joint is airtight after connection, the valve plate is arranged on the crucible cover, the contact part of the valve plate and the crucible cover is good in flatness and airtight after being closed, the glove box body is in a nitrogen or other inert gas environment, and the pressure is smaller than the atmospheric pressure.

Description

Technical Field

[0001] The invention relates to a filling device for improving water absorption or oxidation in a filling process of evaporation materials, belonging to the technical field of crucibles. Background Art

[0002] The existing crucible for evaporation is open-topped. Materials are added in the atmospheric environment. After the materials are added to the crucible, they are directly in contact with the atmosphere. If the materials are easy to absorb water or react with atmospheric components (such as metal Mg, Li, etc.), the materials will denature, affecting the stability of the evaporation process and even the performance of the device.

[0003] In view of the above-mentioned deficiencies, a filling device is needed to improve the water absorption or oxidation during the filling process of the evaporation material, so as to make improvements on the above-mentioned deficiencies. Summary of the invention

[0004] The main purpose of the present invention is to provide a filling device that improves water absorption or oxidation during the filling process of evaporation materials.

[0005] The purpose of the present invention can be achieved by adopting the following technical solutions:

[0006] A filling device for improving water absorption or oxidation during the filling process of evaporation materials, comprising a glove box body for limiting position;

[0007] A glove box transfer chamber is installed on one side of the glove box body. A crucible body is placed in the glove box body. One end of the crucible body is covered with a crucible cover. A connecting thread is coiled at the connection between one end of the crucible body and the crucible cover, and a valve plate is installed on the crucible cover.

[0008] Preferably, guide rails, sliding parts and placement parts are installed in the glove box body, the guide rails are correspondingly installed on both sides of the glove box body, the sliding parts are slidably installed in the guide rails, and the placement parts are slidably installed on the sliding parts.

[0009] Preferably, the valve plate on the crucible cover is an open-close structure.

[0010] Preferably, the connecting threads on the crucible body and the crucible cover are fixedly connected by threaded rotation.

[0011] Preferably, the outer end of the crucible cover is opened and closed by a valve plate.

[0012] Preferably, the placement piece is an arc-shaped structure.

[0013] Beneficial technical effects of the present invention:

[0014] The present invention provides a filling device for improving water absorption or oxidation in the filling process of evaporation materials. The present invention can ensure that the filling is carried out in a nitrogen or other inert gas environment, and after the filling is completed, the inside of the crucible can also maintain a nitrogen or other inert gas environment during the process of transferring to the evaporation process chamber, thereby avoiding the evaporation material from absorbing water or reacting with atmospheric components to denature. The crucible body and the crucible cover are connected by threads, and the connection is airtight after connection. The valve plate is arranged on the crucible cover, and the part of the valve plate in contact with the crucible cover has good flatness and is airtight after closing. The glove box body is a nitrogen or other inert gas environment, and the pressure is less than the atmospheric pressure. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 A schematic diagram of the structure of a glove box body of a preferred embodiment of a filling device for improving water absorption or oxidation in the filling process of evaporation materials according to the present invention;

[0016] Figure 2 A schematic diagram of a crucible exploded view of a preferred embodiment of a filling device for improving water absorption or oxidation during the filling process of evaporation materials according to the present invention;

[0017] Figure 3 A structural exploded side view of a preferred embodiment of a filling device for improving water absorption or oxidation during the filling process of the evaporation material according to the present invention;

[0018] Figure 4 The present invention is a structural exploded bottom view of a preferred embodiment of a filling device for improving water absorption or oxidation during the filling process of evaporation materials according to the present invention.

[0019] In the figure: 1. crucible body; 2. crucible cover; 3. valve plate; 4. glove box body; 5. glove box transfer chamber; 6. guide rail; 7. sliding part; 8. placement part; 9. connecting thread. DETAILED DESCRIPTION

[0020] In order to make the technical solution of the present invention more clear and specific to those skilled in the art, the present invention is further described in detail below in conjunction with embodiments and drawings, but the implementation manner of the present invention is not limited thereto.

[0021] like Figure 1 - Figure 4 As shown, the present embodiment provides a filling device for improving water absorption or oxidation in the filling process of evaporation materials, including a glove box body 4 for limiting position;

[0022] A glove box transfer chamber 5 is installed on one side of the glove box body 4, a crucible body 1 is placed in the glove box body 4, one end of the crucible body 1 is covered with a crucible cover 2, a connecting thread 9 is coiled at the connection between one end of the crucible body 1 and the crucible cover 2, and a valve plate 3 is installed on the crucible cover 2.

[0023] A guide rail 6 , a sliding member 7 and a placement member 8 are installed in the glove box body 4 . The guide rail 6 is correspondingly installed on both sides of the glove box body 4 . The sliding member 7 is slidably installed in the guide rail 6 , and the placement member 8 is slidably installed on the sliding member 7 .

[0024] The valve plate 3 on the crucible cover 2 is an opening and closing structure.

[0025] The connecting threads 9 on the crucible body 1 and the crucible cover 2 are fixedly connected by threaded rotation.

[0026] The outer end of the crucible cover 2 is opened and closed by a valve plate 3 .

[0027] The placement member 8 is an arc-shaped structure.

[0028] like Figure 1 - Figure 4 As shown, the working process of a filling device for improving water absorption or oxidation in the filling process of evaporation materials provided by the present embodiment is as follows: unpacked materials and the crucible of the present invention are placed into the glove box body 4 through the transfer chamber. The glove box body 4 is a nitrogen or other inert gas atmosphere, and the pressure is less than the atmospheric pressure. The crucible filling is completed in the glove box body 4, and the crucible cover 2 is screwed on. At the same time, the valve plate 3 is turned over to cover the crucible mouth, and the filled crucible is taken out through the filling cavity. In the process of introducing air into the transfer chamber, because the valve plate 3 and the crucible cover 2 are airtight, and the pressure inside the crucible is less than the atmospheric pressure, as the pressure of the transfer chamber gradually increases and finally reaches the atmospheric pressure, the valve plate 3 will be tightly attached to the crucible cover 2 by the atmospheric pressure to ensure that the inside of the crucible is in a nitrogen or other inert gas environment. Figure 3 As shown, the crucible is taken out of the transfer chamber, placed in the evaporation process chamber, and then evacuated. As the pressure in the process chamber decreases, the pressure inside the crucible will be greater than the pressure in the evaporation process chamber, and the valve plate pops open under the action of the pressure difference. The nitrogen or other inert gas in the crucible is extracted as the vacuum is drawn, and the filling is completed. During the entire filling process, the evaporation material does not come into contact with the atmosphere and is always kept in a nitrogen or inert gas environment. The crucible body 1 is placed on the placement piece 8 and moved toward the inside of the glove box body 4 to achieve the function of easy movement and storage. The placement piece 8 can be moved inward and outward by (electric telescopic rod, drive motor and pulling piece).

[0029] Example

[0030] like Figure 1 - Figure 4 As shown,

[0031] The first step: placing the unpacked materials and the crucible of the present invention into a glove box (structure 4) through a transfer chamber, wherein the glove box body 4 is filled with nitrogen or other inert gas atmosphere, and the pressure is less than the atmospheric pressure;

[0032] Step 2: Fill the crucible in the glove box body 4, screw on the crucible cover 2, and flip the valve plate 3 to cover the crucible opening;

[0033] Step 3: Take the filled crucible out through the middle filling cavity. During the process of introducing air into the transfer cavity, because the valve plate 3 is airtight with the crucible cover 2 and the pressure inside the crucible is less than the atmospheric pressure, as the pressure in the transfer cavity gradually increases and finally reaches the atmospheric pressure, the valve plate 2 will be tightly attached to the crucible cover by the atmospheric pressure, ensuring that the interior of the crucible is in a nitrogen or other inert gas environment, such as Figure 3 As shown;

[0034] Step 4: Take the crucible out of the transfer chamber, put it into the evaporation process chamber, and then evacuate it. As the pressure in the process chamber decreases, the pressure inside the crucible will be greater than the pressure in the evaporation process chamber. The valve plate 2 pops open under the action of the pressure difference, and the nitrogen or other inert gas in the crucible is sucked away as the vacuum is evacuated. At this point, the filling is completed. During the entire filling process, the evaporation material does not come into contact with the atmosphere and is always kept in a nitrogen or inert gas environment.

[0035] Step 5: Place the crucible body 1 on the placement piece 8 and move it toward the inside of the glove box body 4 to facilitate movement and storage. The placement piece 8 can be moved inward and outward through (electric telescopic rod, drive motor and pulling piece).

[0036] The above description is only a further embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and concepts of the present invention within the scope disclosed by the present invention, which belong to the protection scope of the present invention.

Claims

1. A filling device for improving water absorption or oxidation during the filling process of evaporation materials, characterized in that: It includes a glove box body (4) for limiting position; A glove box transfer chamber (5) is correspondingly installed on one side of the glove box body (4), a crucible body (1) is placed in the glove box body (4), one end of the crucible body (1) is covered with a crucible cover (2), a connecting thread (9) is coiled at the connection between one end of the crucible body (1) and the crucible cover (2), and a valve plate (3) is installed on the crucible cover (2).

2. A filling device for improving water absorption or oxidation during the filling process of evaporation materials according to claim 1, characterized in that: A guide rail (6), a sliding member (7) and a placement member (8) are installed in the glove box body (4); the guide rail (6) is correspondingly installed on both sides of the glove box body (4); the sliding member (7) is slidably installed in the guide rail (6); and the placement member (8) is slidably installed on the sliding member (7).

3. A filling device for improving water absorption or oxidation during the filling process of evaporation materials according to claim 2, characterized in that: The valve plate (3) on the crucible cover (2) is an opening and closing structure.

4. A filling device for improving water absorption or oxidation during the filling process of evaporation materials according to claim 3, characterized in that: The connecting threads (9) on the crucible body (1) and the crucible cover (2) are fixedly connected by threaded rotation.

5. A filling device for improving water absorption or oxidation during the filling process of evaporation materials according to claim 4, characterized in that: The outer end of the crucible cover (2) is opened and closed by a valve plate (3).

6. A filling device for improving water absorption or oxidation during the filling process of evaporation materials according to claim 5, characterized in that: The placement piece (8) is an arc-shaped structure.

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