Vacuum magnetic control coating device and using method thereof

Abstract

The invention discloses a vacuum magnetic control coating device and a using method thereof, and belongs to the technical field of chip manufacturing, the vacuum magnetic control coating device comprises a base, the top surface of the base is fixedly connected with a driving mechanism, and the driving mechanism comprises a horizontal rotation driving part, an overturning driving part and a vertical lifting driving part which are fixedly connected to the top surface of the base; the horizontal rotation driving part comprises a rotating motor fixedly connected to the top face of the base, the rotating motor is in transmission connection with a rotating shaft, the bottom of the rotating shaft penetrates through the base and is fixedly connected with a rotating platform, the overturning driving part comprises an overturning motor fixedly connected to the top face of the base, the overturning motor is in transmission connection with an overturning shaft, and the overturning shaft is located in the rotating shaft. The bottom of the overturning shaft extends to the position below the rotating shaft and is in transmission connection with an overturning platform, and the overturning platform is in transmission connection with the rotating platform. According to the invention, the coating efficiency of the substrate can be improved.

Description

Technical Field

[0001] The present invention belongs to the technical field of chip manufacturing, and in particular relates to a vacuum magnetron coating device and a method for using the same. Background Art

[0002] Traditional vacuum magnetron coating equipment mostly adopts a single rotating or fixed substrate method, which has the following problems: Uneven coating: Single-axis motion leads to inconsistent film thickness distribution (difference between edge and center>20%). Poor flexibility: It is impossible to achieve multi-angle coating and it is difficult to handle workpieces with complex structures. Low efficiency: Lifting and rotation need to be operated step by step, and the coating cycle is long. Therefore, there is an urgent need for a vacuum magnetron coating device and its use method to solve the above problems. Summary of the invention

[0003] The purpose of the present invention is to provide a vacuum magnetron coating device and a method of using the same to solve the problems existing in the above-mentioned prior art.

[0004] To achieve the above-mentioned purpose, the present invention provides the following scheme: The present invention provides a vacuum magnetron coating device, comprising a base, the top surface of the base is fixedly connected to a driving mechanism, the driving mechanism comprises a horizontal rotation driving part, a flip driving part and a vertical lifting driving part fixedly connected to the top surface of the base, the horizontal rotation driving part comprises a rotating motor fixedly connected to the top surface of the base, the rotating motor is transmission-connected to a rotating shaft, the bottom of the rotating shaft passes through the base and is fixedly connected to a rotating platform, the flip driving part comprises a flip motor fixedly connected to the top surface of the base, the flip motor is transmission-connected to a flip shaft, the flip shaft is located in the rotating shaft, the bottom of the flip shaft extends to the bottom of the rotating shaft and is transmission-connected to the flip platform, the flip platform is transmission-connected to the rotating platform.

[0005] Preferably, a first pulley is fixedly connected to the top of the rotating shaft, and a first belt is provided between the rotating motor and the first pulley.

[0006] Preferably, the transmission ratio of the first pulley is 1:5.

[0007] Preferably, a connecting disk is fixedly connected to the bottom surface of the rotating shaft, the bottom surface of the connecting disk is fixedly connected to the rotating platform via a plurality of connecting rods, and one side of the rotating platform is connected to the flipping platform via a transmission member.

[0008] Preferably, a second pulley is fixedly connected to the top surface of the flip shaft, the second pulley is located above the first pulley, and a second belt is provided between the flip motor and the second pulley.

[0009] Preferably, a first gear is fixedly connected to the bottom surface of the flip shaft, the transmission member includes a second gear meshing with the first gear, the second gear is rotatably connected to the rotating platform via a first connecting shaft, the bottom of the first connecting shaft extends to the bottom of the rotating platform and is fixedly connected to a first bevel gear, the bottoms of a plurality of connecting rods are fixedly connected to the flip platform, one end of the flip platform close to the first bevel gear is rotatably connected to the second bevel gear, the second bevel gear is rotatably connected to the flip platform via a second connecting shaft, and the end of the second connecting shaft away from the second bevel gear extends into the flip platform.

[0010] Preferably, a first through hole is provided in the rotating platform.

[0011] Preferably, a second through hole is provided in the flip platform, and the second connecting shaft is rotatably connected in the second through hole.

[0012] Preferably, the transmission ratio of the second pulley is 1:10, the transmission ratio between the first gear and the second gear is 10:1, and the transmission ratio between the first gear and the second gear is 1:1.

[0013] A method for using a vacuum magnetron coating device comprises the following steps:

[0014] S1, start the rotating motor, so that the rotating motor drives the substrate to rotate horizontally;

[0015] S2, start the flip motor to flip the substrate during the coating process;

[0016] S3. Start the lifting mechanism to adjust the distance between the coating material and the substrate.

[0017] The present invention discloses the following technical effects: a rotating motor drives a rotating shaft, driving a rotating platform to rotate horizontally around a vertical axis, so that the substrate can be evenly covered with a thin film during the deposition process. A flipping motor drives a flipping shaft, and the flipping platform is linked through a transmission member, so that the substrate can be flipped while rotating horizontally (such as ±90°), so that the two sides of the substrate can be processed alternately during the deposition process; a stepping motor drives a lead screw to drive a platform lifting rod to adjust the distance between the coating material and the substrate to meet different deposition process requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The illustrative embodiments and descriptions of the present application are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0019] Figure 1 It is a structural schematic diagram of the vacuum magnetron coating device of the present invention;

[0020] Figure 2 It is a front view of the vacuum magnetron coating device of the present invention.

[0021] In the figure: 1. base; 2. rotating motor; 3. rotating shaft; 4. rotating platform; 5. flip motor; 6. flip shaft; 7. flip platform; 8. first pulley; 9. first belt; 10. connecting plate; 11. connecting rod; 12. second pulley; 13. second belt; 14. first gear; 15. second gear; 16. first bevel gear; 17. second bevel gear; 18. first through hole; 19. stepping motor; 20. screw rod; 21. slider; 22. platform lifting rod. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] Reference Figure 1-Figure 2 As shown, this embodiment provides a vacuum magnetron coating device, including a base 1, a driving mechanism is fixedly connected to the top surface of the base 1, the driving mechanism includes a horizontal rotation driving part, a flip driving part and a vertical lifting driving part fixedly connected to the top surface of the base 1, the horizontal rotation driving part includes a rotating motor 2 fixedly connected to the top surface of the base 1, the rotating motor 2 is transmission-connected to a rotating shaft 3, the bottom of the rotating shaft 3 passes through the base 1 and is fixedly connected to a rotating platform 4, the flip driving part includes a flip motor 5 fixedly connected to the top surface of the base 1, the flip motor 5 is transmission-connected to a flip shaft 6, the flip shaft 6 is located in the rotating shaft 3, the bottom of the flip shaft 6 extends to the bottom of the rotating shaft 3 and is transmission-connected to a flip platform 7, and the flip platform 7 is transmission-connected to the rotating platform 4.

[0025] The rotating motor 2 drives the rotating shaft 3, driving the rotating platform 4 to rotate horizontally around the vertical axis, so that the substrate can be evenly covered with a thin film during the deposition process. The flipping motor 5 drives the flipping shaft 6, and the flipping platform 7 is linked through the transmission member, so that the substrate can be flipped while rotating horizontally (such as ±90°), so that the two sides of the substrate can be processed alternately during the deposition process; the stepping motor 19 drives the screw 20 to drive the platform lifting rod 22 to adjust the distance between the coating material and the substrate to meet different deposition process requirements.

[0026] According to a further optimized solution, a first pulley 8 is fixedly connected to the top of the rotating shaft 3 , and a first belt 9 is provided between the rotating motor 2 and the first pulley 8 .

[0027] According to a further optimization scheme, the transmission ratio of the first pulley 8 is 1:5.

[0028] When the rotating motor 2 starts working, the rotating platform 4 rotates horizontally with the axis of the rotating shaft 3 as the center, and the turning platform 7 is partially controlled by the turning shaft 6 without causing interference. The speed is reduced by the pulley ratio (1:5) to match the coating process requirements.

[0029] According to a further optimized solution, a connecting disk 10 is fixedly connected to the bottom surface of the rotating shaft 3, and a rotating platform 4 is fixedly connected to the bottom surface of the connecting disk 10 via a plurality of connecting rods 11, and a side of the rotating platform 4 is connected to the flipping platform 7 via a transmission member.

[0030] According to a further optimized solution, a second pulley 12 is fixedly connected to the top surface of the flip shaft 6 , the second pulley 12 is located above the first pulley 8 , and a second belt 13 is provided between the flip motor 5 and the second pulley 12 .

[0031] Further optimization scheme, the bottom surface of the flip shaft 6 is fixed with a first gear 14, the transmission member includes a second gear 15 meshing with the first gear 14, the second gear 15 is rotatably connected to the rotating platform 4 through the first connecting shaft, the bottom of the first connecting shaft extends to the bottom of the rotating platform 4 and is fixed with a first bevel gear 16, the bottoms of the multiple connecting rods 11 are fixed to the flip platform 7, the end of the flip platform 7 close to the first bevel gear 16 is rotatably connected with the second bevel gear 17, the second bevel gear 17 is rotatably connected to the flip platform 7 through the second connecting shaft, and the end of the second connecting shaft away from the second bevel gear 17 extends into the flip platform 7. The flip motor 5 drives the second pulley 12 through the second belt 13 to drive the flip shaft 6 to rotate. The transmission ratio of the second pulley 12 (1:10) realizes low-speed and high-precision adjustment of the flip shaft 6.

[0032] According to a further optimized solution, a first through hole 18 is provided in the rotating platform 4 .

[0033] According to a further optimized solution, a second through hole is provided in the flip platform 7, and the second connecting shaft is rotatably connected in the second through hole.

[0034] According to a further optimization scheme, the transmission ratio of the second pulley 12 is 1:10, the transmission ratio between the first gear 14 and the second gear 15 is 10:1, and the transmission ratio between the first gear 14 and the second gear 15 is 1:1.

[0035] The power is transmitted to the first gear 14 at the bottom of the flip shaft 6, and the speed is reduced through the cooperation of the first gear 14 and the second gear 15 (transmission ratio 10:1); then the bevel gear set composed of the first gear 14 and the second gear 15 (transmission ratio 1:1) realizes the vertical power steering, and the flip platform 7 rotates with the axis of the output bevel gear as the center of the circle; the flip angle and speed of the substrate are accurately controlled by controlling the flip motor 5.

[0036] According to a further optimized solution, the vertical lifting drive unit includes a stepper motor 19 , the stepper motor 19 is fixedly connected to a lead screw 20 , a slider 21 is threadedly connected to the lead screw 20 , and the slider 21 is fixedly connected to a platform lifting rod 22 .

[0037] When the stepper motor 19 is started, the rotation of the screw rod 20 drives the slider 21 to move up and down along the fixed guide rail, and the platform lifting rod 22 moves up and down to achieve the precise lifting of the target gun. The target gun is connected to the turning platform 7 and the rotating platform 4. When the target gun is lifted or lowered, the substrate can move up and down.

[0038] A method for using a vacuum magnetron coating device comprises the following steps:

[0039] S1, start the rotary motor 2, so that the rotary motor 2 drives the substrate to rotate horizontally;

[0040] S2, start the flip motor 5 to flip the substrate during the coating process;

[0041] S3. Start the lifting mechanism to adjust the distance between the coating material and the substrate.

[0042] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0043] The embodiments described above are only descriptions of the preferred modes of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A vacuum magnetron coating device, characterized in that: The invention comprises a base (1), the top surface of the base (1) being fixedly connected to a driving mechanism, the driving mechanism comprising a horizontal rotation driving unit, a flip driving unit and a vertical lifting driving unit fixedly connected to the top surface of the base (1), the horizontal rotation driving unit comprising a rotating motor (2) fixedly connected to the top surface of the base (1), the rotating motor (2) being transmission-connected to a rotating shaft (3), the bottom of the rotating shaft (3) passing through the base (1) and being fixedly connected to a rotating platform (4), the flip driving unit comprising a flip motor (5) fixedly connected to the top surface of the base (1), the flip motor (5) being transmission-connected to a flip shaft (6), the flip shaft (6) being located inside the rotating shaft (3), the bottom of the flip shaft (6) extending below the rotating shaft (3) and being transmission-connected to a flip platform (7), the flip platform (7) being transmission-connected to the rotating platform (4).

2. The vacuum magnetron coating device according to claim 1, characterized in that: A first pulley (8) is fixedly connected to the top of the rotating shaft (3), and a first belt (9) is provided between the rotating motor (2) and the first pulley (8).

3. The vacuum magnetron coating device according to claim 2, characterized in that: The transmission ratio of the first pulley (8) is 1:

5.

4. The vacuum magnetron coating device according to claim 2, characterized in that: The bottom surface of the rotating shaft (3) is fixedly connected to a connecting disk (10), the bottom surface of the connecting disk (10) is fixedly connected to the rotating platform (4) via a plurality of connecting rods (11), and one side of the rotating platform (4) is connected to the flipping platform (7) via a transmission member.

5. The vacuum magnetron coating device according to claim 4, characterized in that: A second pulley (12) is fixedly connected to the top surface of the flip shaft (6), the second pulley (12) is located above the first pulley (8), and a second belt (13) is provided between the flip motor (5) and the second pulley (12).

6. The vacuum magnetron coating device according to claim 5, characterized in that: A first gear (14) is fixedly connected to the bottom surface of the flip shaft (6); the transmission member includes a second gear (15) meshing with the first gear (14); the second gear (15) is rotatably connected to the rotating platform (4) via a first connecting shaft; the bottom of the first connecting shaft extends below the rotating platform (4) and is fixedly connected to a first bevel gear (16); the bottoms of a plurality of connecting rods (11) are fixedly connected to the flip platform (7); one end of the flip platform (7) close to the first bevel gear (16) is rotatably connected to a second bevel gear (17); the second bevel gear (17) is rotatably connected to the flip platform (7) via a second connecting shaft; and one end of the second connecting shaft away from the second bevel gear (17) extends into the flip platform (7).

7. The vacuum magnetron coating device according to claim 1, characterized in that: A first through hole (18) is provided in the rotating platform (4).

8. The vacuum magnetron coating device according to claim 6, characterized in that: A second through hole is provided in the flip platform (7), and the second connecting shaft is rotatably connected in the second through hole.

9. The vacuum magnetron coating device according to claim 6, characterized in that: The transmission ratio of the second pulley (12) is 1:10, the transmission ratio between the first gear (14) and the second gear (15) is 10:1, and the transmission ratio between the first gear (14) and the second gear (15) is 1:

1.

10. A method for using a vacuum magnetron coating device, based on the vacuum magnetron coating device according to any one of claims 1 to 9, characterized in that: The following steps are involved: S1, starting the rotating motor (2), so that the rotating motor (2) drives the substrate to rotate horizontally; S2, starting the flip motor (5) to flip the substrate during the coating process; S3. Start the lifting mechanism to adjust the distance between the coating material and the substrate.

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