Double-roller coating structure and vacuum coating equipment

Abstract

The invention belongs to the technical field of vacuum evaporation coating equipment, and particularly relates to a double-roller coating structure used for vacuum coating equipment, the vacuum coating equipment is internally provided with a vacuum chamber, the vacuum chamber is internally provided with an evaporation source and two coating rollers arranged at an interval, and a middle partition plate is arranged between the two coating rollers; the evaporation source is arranged between the two coating rollers, the evaporation source and the coating rollers are arranged at intervals, correction baffles are arranged on the peripheries of the coating rollers, and the planes of the correction baffles are parallel to tangent lines between the evaporation source and the coating rollers. Therefore, under the condition that the coating quality is guaranteed, the coating efficiency is improved, and the energy consumption is reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum evaporation coating equipment, and in particular relates to a double-roller coating structure and vacuum coating equipment. Background Art

[0002] Most of the existing vacuum evaporation coating equipment is a spherical umbrella structure (the spherical umbrella rotates around the vertical Z axis), and a small amount of single roller coating structure.

[0003] Traditional coating solutions are mainly divided into the following categories: Figure 1 The scheme 1 and its derivatives shown are the most commonly used schemes. Most box-type coating structures are developed around this. The configuration is as follows Figure 1 As shown, a rotating spherical umbrella-shaped workpiece disk 2 is placed on the upper part of a vacuum chamber 1, and an electron beam (or resistance) evaporation source 3 is located at the lower part, and the film material is deposited on the workpiece disk by heating and evaporation. Figure 2 The scheme 2 and its derivative schemes shown are mainly used for coating of large pieces such as headlights and helmets. The outer surface of the vacuum chamber 1 is circular or in other shapes, and the coating roller 2 is slightly smaller than the vacuum chamber. The evaporation source 3 is located at the lower part of the coating roller. Because this structure is not convenient for the installation of multiple electron beam evaporation sources, the evaporation sources are mostly resistance evaporation sources. Figure 3 The scheme 3 and its derivative schemes shown are rarely used, and are mainly used for coating of car lights, helmets, sunglasses, etc. The outside is a special-shaped vacuum chamber 1 as shown in the figure, the coating roller 2 is located at the upper part of the vacuum chamber, and the evaporation source 3 is located at the lower part of the vacuum chamber. The evaporation source is an electron beam evaporation source or a resistance evaporation source.

[0004] In order to meet more loading requirements, especially in the nano coating of anti-counterfeiting materials, pigments, paints, and cosmetic raw materials, more requirements are put forward for loading, such as reducing the ball radius in the coating to increase the receiving area. Specifically, in traditional box coating, the ball SR is reduced to increase the capture area of ​​the film material, such as 1350 equipment, the ball SR is reduced from SR1100 to SR750, etc. For example, when comparing equipment of the same size, such as 1350×H1500 equipment: Figure 1 The traditional scheme 1 shown in the figure adopts a spherical umbrella structure, Φ1280 (inner hole 180) × SR750, and the coating surface area of ​​the workpiece disk is S1=2πR△h=16661cm 2 ; and Figure 2 In the traditional coating scheme 2 shown, for the same 1350 equipment, the roller diameter is Φ1280, the horizontal length is L1250, and the coating absorption area is S2=πΦL=50265cm 2 This structure is currently only used for low-speed coating of car lights, etc. The coating time of a single layer in the film system is short and uniformity is difficult to achieve. At the same time, it is inconvenient to load and collect the film material with a large roller. In addition, Figure 3The conventional coating scheme 3 shown in the figure is for the same 1350 equipment, and the loading area is the same as the conventional coating scheme 2, S3=πΦL=50265cm 2 However, it is necessary to arrange an evaporation source chamber at the bottom of the vacuum chamber, and the structure is relatively complicated.

[0005] In response to the above technical problems, it is also necessary to optimize and improve the structure of the coating equipment, so as to improve the coating efficiency and reduce energy consumption while ensuring the coating quality. Summary of the invention

[0006] The object of the present invention is to provide a double-roller coating structure and a vacuum coating device, so as to improve the coating efficiency and reduce the energy consumption while ensuring the coating quality.

[0007] In order to achieve the above-mentioned object, the present invention provides a double-roller coating structure for use in vacuum coating equipment, wherein the vacuum coating equipment has a vacuum chamber, wherein an evaporation source and two coating rollers disposed at intervals are disposed in the vacuum chamber, wherein a middle partition is disposed between the two coating rollers; The evaporation source is arranged in the middle position of the two coating rollers and is spaced apart from the coating rollers, wherein a correction baffle is provided on the outer periphery of the coating roller, and the plane of the correction baffle is parallel to the tangent between the evaporation source and the coating roller.

[0008] In a possible design, the evaporation sources are provided in plurality and are evenly spaced apart along the axial direction of the coating roller.

[0009] In one possible design, the distance between the two coating rollers is 8 to 10 mm.

[0010] In a possible design, the diameter of the coating roller is 630 mm and the length of the coating roller is 1250 mm.

[0011] In a possible design, the height of the evaporation source is 150 mm, and the shortest distance from the evaporation source to the coating roller is 650 mm.

[0012] A vacuum coating device comprises the above-mentioned double-roller coating structure.

[0013] Through the above technical solution, by adopting a smaller double roller structure, the loading and unloading of the substrate is more convenient, the work efficiency is improved, and the downtime is reduced. The smaller roller diameter is conducive to reducing the moment of inertia, making it easier for the drive motor to achieve high-speed rotation, thereby appropriately increasing the roller speed and accelerating production efficiency. The symmetrical arrangement of the central axis, that is, the evaporation source is located in the middle of the two coating rollers, ensures that the coating conditions on both sides are consistent, which helps to ensure the uniformity of the film layers of the two rollers. The design of the correction baffle can effectively control the coating thickness, reduce material waste, and ensure the consistency and stability of the coating quality. This structure is suitable for both electron beam evaporation and resistance evaporation, and the evaporation source type can be flexibly selected according to different materials and process requirements, with strong adaptability and flexibility. The rotation of the roller not only helps to uniformly coat the film, but also promotes the rapid cooling and solidification of the coating material, thereby improving product quality. By coating in a vacuum environment, the influence of impurities in the air can be avoided, ensuring the purity and high quality of the coating. The design of the middle partition reduces the possibility of interference between the coatings on both sides, reduces the risk of equipment wear, and extends the service life of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 It is a schematic structural diagram of a conventional coating solution 1 described in the background technology in one embodiment; Figure 2 It is a schematic structural diagram of a conventional coating solution 2 described in the background technology in one embodiment; Figure 3 is a schematic structural diagram of a conventional coating solution 3 described in the background technology in an embodiment; Figure 4 It is a schematic diagram of the three-dimensional structure of the double-roller coating structure provided by the present invention in one embodiment; Figure 5 yes Figure 4 The cross-sectional structure schematic diagram is shown along the AA direction in the figure.

[0016] In the above drawings: 1-vacuum chamber, 2-correction baffle, 3-coating roller, 4-middle partition, 5-evaporation source. DETAILED DESCRIPTION

[0017] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments. It should be noted that although the description of these embodiments is used to help understand the present invention, it does not constitute a limitation of the present invention. The specific structures and functional details disclosed herein are only used to describe the embodiments of the present invention. However, the present invention can be embodied in many alternative forms, and it should not be understood that the present invention is limited to the embodiments set forth herein.

[0018] According to a first aspect of the present invention, a double-roller coating structure is provided. Figure 4 and Figure 5 One specific embodiment is shown.

[0019] See also Figure 4 and Figure 5 As shown, the double roller coating structure is used in a vacuum coating device, and the vacuum coating device has a vacuum chamber 1. An evaporation source 5 and two coating rollers 3 are arranged at intervals in the vacuum chamber 1, wherein a middle partition 4 is arranged between the two coating rollers 3; the evaporation source 5 is arranged in the middle of the two coating rollers 3 and is arranged at intervals from the coating rollers 3, wherein a correction baffle 2 is arranged on the periphery of the coating rollers 3, and the plane of the correction baffle 2 is parallel to the tangent line between the evaporation source 5 and the coating rollers 3.

[0020] The entire coating process is carried out in a vacuum chamber 1, which can avoid interference from impurities, which is beneficial to improving the quality and purity of the coating. The evaporation source 5 (which can be an electron beam or resistance evaporation) is arranged in the middle of the two coating rollers 3 and maintains a certain distance from the coating rollers 3. This arrangement ensures that the material can be evenly deposited on the surface of the coating rollers 3. A correction baffle 2 is provided on the periphery of each coating roller 3, and its plane is parallel to the tangent between the evaporation source 5 and the coating roller 3. The setting of the baffle is conducive to accurately controlling the thickness and uniformity of the coating, avoiding unnecessary material waste and uneven coating. A middle partition 4 is provided between the two coating rollers 3 to further optimize the coating area, prevent interference between the coatings on both sides, and ensure the consistency and stability of the coating quality.

[0021] The working process of the double roller coating structure in the vacuum coating equipment is as follows: the substrate to be coated is mounted on the coating roller 3, usually fixed by winding. The vacuum chamber 1 is closed and the vacuum system is started until the required vacuum degree is reached. Check whether the evaporation source 5 is correctly installed and ensure that all connections and control systems are working properly. Start the evaporation source 5 to start heating and evaporating the coating material (such as metal or alloy). The selection of electron beam or resistance evaporation source 5 depends on the specific process requirements and material properties. The coating roller 3 starts to rotate slowly, so that the substrate gradually passes under the evaporation source 5. Due to the rotation of the coating roller 3, the surface of the substrate can evenly receive the deposition of the evaporated material. The baffle 2 is corrected according to the preset angle and parallel to the tangent between the evaporation source 5 and the coating roller 3 to ensure the consistency and uniformity of the coating thickness. When the predetermined coating thickness is reached, the evaporation source 5 is stopped. The coating roller 3 continues to rotate for a period of time to ensure that the coating material is completely solidified and cooled. Open the vacuum chamber 1, take out the substrate that has been coated, and check the coating quality and consistency.

[0022] Through the above technical scheme, by adopting a smaller double roller structure, the loading and unloading of the substrate can be facilitated, thereby improving work efficiency and reducing downtime. The smaller roller diameter is conducive to reducing the moment of inertia, making it easier for the drive motor to achieve high-speed rotation, thereby appropriately increasing the roller speed and accelerating production efficiency. By symmetrically arranging the central axis, that is, the evaporation source 5 is located in the middle of the two coating rollers 3, the coating conditions on both sides are consistent, thereby ensuring the uniformity of the film layers of the two rollers. The design of the correction baffle 2 can effectively control the coating thickness, reduce material waste, and ensure the consistency and stability of the coating quality. This structure is suitable for both electron beam evaporation and resistance evaporation, and the type of evaporation source 5 can be flexibly selected according to different materials and process requirements, with strong adaptability and flexibility. The rotation of the roller not only helps to uniformly coat the film, but also promotes the rapid cooling and solidification of the coating material, thereby improving product quality. By coating in a vacuum environment, the influence of impurities in the air can be avoided, ensuring the purity and high quality of the coating. The design of the middle partition 4 reduces the possibility of interference between the coatings on both sides, reduces the risk of equipment wear, and extends the service life of the equipment.

[0023] In the present disclosure, a plurality of evaporation sources 5 are provided and are evenly spaced along the axis direction of the coating roller 3. In this way, it can be ensured that the material can be evenly deposited on the surface of the substrate during the entire coating process, avoiding the phenomenon of local uneven coating. The entire coating process is carried out in the vacuum chamber 1 to ensure that there is no interference from impurities and improve the quality and purity of the coating. Each evaporation source 5 is set in the middle position of the two coating rollers 3 and keeps a certain distance from the coating rollers 3. This arrangement ensures that the material can be evenly deposited on the surface of the coating roller 3.

[0024] In the present disclosure, three evaporation sources 5 are provided and are evenly spaced along the axial direction of the coating roller 3, ensuring that the material can be evenly deposited on the surface of the substrate during the entire coating process, so that the material can be evenly distributed over the entire width of the substrate, thereby ensuring the uniformity of the film layer.

[0025] Specifically, the spacing between the two coating rollers 3 is 8-10 mm. Since the evaporation source 5 is disposed in the middle of the two coating rollers 3 and maintains a certain distance from the coating rollers 3, the material can be uniformly deposited on the surface of the coating rollers 3. By providing sufficient space, cross contamination of the coating material can be avoided, while maintaining the compactness of the equipment, improving the uniformity and consistency of the film layer, and improving the production efficiency and adaptability of the equipment. This design is particularly suitable for large-area substrate processing that requires high-precision coating, ensuring high-quality coating effects and a long equipment life.

[0026] In an embodiment provided by the present disclosure, the diameter of the coating roller 3 is 630 mm, which helps to achieve a larger coating area and ensures uniform distribution of materials during the coating process. The length of the coating roller 3 is 1250 mm, which not only ensures sufficient coating area, but also keeps the overall equipment in a relatively compact structure, which is suitable for various production line layouts.

[0027] The coating absorption surface area is S, S=2πφL. Among them, φ=630mm, L=1250mm. Then S=2*3.1416*630*1250=49480cm 2 That is, the coating roller has an absorption surface area of ​​49480 cm², which enables a larger area of ​​substrate to be processed in one coating process, effectively improving production efficiency. Since multiple evaporation sources work simultaneously, the time required for coating is greatly shortened, and the overall production speed is improved.

[0028] The height of the evaporation source 5 is 150 mm, and the shortest distance from the evaporation source to the coating roller is 650 mm, so that the material can be fully diffused and evenly deposited during the coating process, avoiding material accumulation or local overheating problems caused by insufficient space. Based on the combined effect of the 150 mm height of the evaporation source 5 and the 650 mm lower evaporation space (i.e., the shortest distance from the evaporation source to the coating roller), it is ensured that the material can be fully diffused and evenly deposited during the coating process, avoiding material accumulation or local overheating problems caused by insufficient space.

[0029] According to a second aspect of the present invention, a vacuum coating device is provided. The vacuum coating device comprises the double-roller coating structure of the first aspect.

[0030] Finally, it should be noted that the present invention is not limited to the above optional implementations, and anyone can derive other various forms of products under the enlightenment of the present invention. The above specific implementations should not be understood as limiting the scope of protection of the present invention. The scope of protection of the present invention should be based on the definition in the claims, and the description can be used to interpret the claims.

Claims

1. A double-roller coating structure, used in a vacuum coating device, wherein the vacuum coating device has a vacuum chamber, characterized in that: The vacuum chamber is provided with an evaporation source and two coating rollers arranged at intervals, wherein a middle partition is provided between the two coating rollers; The evaporation source is arranged in the middle position of the two coating rollers and is spaced apart from the coating rollers, wherein a correction baffle is provided on the outer periphery of the coating roller, and the plane of the correction baffle is parallel to the tangent between the evaporation source and the coating roller.

2. The double-roller coating structure according to claim 1, characterized in that: The evaporation sources are provided in plurality and are evenly spaced apart along the axial direction of the coating roller.

3. The double-roller coating structure according to claim 1, characterized in that: The distance between the two coating rollers is 8~10mm.

4. The double-roller coating structure according to claim 1, characterized in that: The diameter of the coating roller is 630 mm, and the length of the coating roller is 1250 mm.

5. The double-roller coating structure according to claim 1, characterized in that: The height of the evaporation source is 150 mm, and the shortest distance from the evaporation source to the coating roller is 650 mm.

6. A vacuum coating device, characterized in that: It comprises a double-roller coating structure as described in any one of claims 1 to 5.

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