Transmission device for grinding head and grinding system

Abstract

The invention discloses a transmission device for a grinding head and a grinding system. The transmission device comprises a power input shaft, a first change gear set, a first power steering assembly, a second power steering assembly and a power output shaft. The power input shaft is connected with an output shaft of a motor; the first change gear set comprises a first high-speed gear and a first low-speed gear which are meshed with each other; the first power steering assembly comprises a first input end and a first output end which are perpendicular to each other in rotation direction. One end of the power output shaft is connected to the second output end, and the other end is connected with the grinding head. According to the transmission device for the grinding head and the grinding system, output power of the motor is rigidly transmitted to the grinding head through the power input shaft, the first change gear set, the first power steering assembly, the second power steering assembly and the power output shaft, and it is ensured that the grinding head can reliably output power for grinding; and the unstable grinding effect caused by unstable transmission between the motor and the grinding head is avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing, and in particular to a transmission device and a grinding system for a grinding head. Background Art

[0002] In the field of chemical-mechanical polishing (CMP), the machine plays a leading role in the process. Among them, the PC Arm (pressure control arm) plays a key role as an important component of the machine, and the grinding disc is an indispensable core component of the PC Arm.

[0003] Specifically, the grinding disc plays a vital role in the chemical mechanical grinding process. It is mainly used to trim the grinding pad to ensure the flatness and consistency of the grinding pad surface so as to better carry out subsequent grinding operations. At the same time, the grinding disc can also effectively remove the residual slag and other impurities on the grinding pad to prevent these impurities from having an adverse effect on the grinding effect, thereby maintaining the stability of the grinding rate (RR) and ensuring the efficiency and reliability of the entire grinding process.

[0004] At present, the main way for existing machines to provide the rotation speed for the grinding disc is to transmit the motor rotation speed to the grinding disc through a transmission belt. Although this transmission method is relatively simple in structure, it has disadvantages. First, the service life of the belt is relatively short and it is easy to break, resulting in increased equipment maintenance costs and interruptions in the production process; second, after a period of use, the belt is prone to slipping, which not only reduces the transmission efficiency of the rotation speed and affects the normal operation of the grinding disc, but also may cause unstable grinding effect, thereby affecting product quality and production efficiency. Summary of the invention

[0005] The purpose of the present invention is to provide a transmission device and a grinding system for a grinding head, which have the advantages of stable power transmission and high reliability.

[0006] To achieve the above object, the present invention provides a transmission device for a grinding head, comprising:

[0007] A power input shaft, the power input shaft is used to be connected to the output shaft of the motor;

[0008] A first speed gear set, comprising a first high-speed gear and a first low-speed gear meshing with each other, wherein the first high-speed gear is fixedly connected to the power input shaft;

[0009] A first power steering assembly, comprising a first input end and a first output end, the rotation directions of which are perpendicular to each other, wherein the first input end is directly or indirectly connected to the first low-speed gear;

[0010] The second power steering assembly comprises a second input end and a second output end, the rotation directions of which are perpendicular to each other, the second input end is connected to the first output end,

[0011] A power output shaft, one end of which is connected to the second output end, and the other end of which is used to be connected to the grinding head.

[0012] Optionally, the transmission device also includes a second speed gear set, the second speed gear set includes a second high-speed gear and a second low-speed gear, the second high-speed gear and the first low-speed gear are coaxially arranged, and the second low-speed gear is directly connected to the first input end of the first power steering assembly.

[0013] Optionally, the transmission ratio of the second speed change gear set is i1.

[0014] Optionally, the transmission ratio of the first speed gear set is i2.

[0015] Optionally, the first power steering assembly includes a first bevel gear and a second bevel gear meshing with each other, the first bevel gear is connected to the second low-speed gear, and the second bevel gear is connected to the second power steering assembly.

[0016] Optionally, the transmission ratio between the first bevel gear and the second bevel gear is 1.

[0017] Optionally, the second power steering assembly includes a third bevel gear and a fourth bevel gear meshing with each other, the third bevel gear is connected to the second bevel gear, and the fourth bevel gear is connected to the power output shaft.

[0018] Optionally, a transmission ratio between the third bevel gear and the fourth bevel gear is 1.

[0019] Optionally, the second bevel gear and the third bevel gear are connected via a transmission shaft, and the transmission device further comprises a bearing, an inner ring of the bearing is sleeved on the transmission shaft, and an outer ring of the bearing is used to connect to an external support member.

[0020] The present invention also provides a grinding system, comprising:

[0021] A motor, the motor being used to provide a power source;

[0022] A grinding head, wherein the grinding head is used for grinding a grinding device on a semiconductor device;

[0023] As for the transmission device for the grinding head mentioned above, the power input shaft of the transmission device is connected to the output shaft of the motor, and the power output shaft of the transmission device is connected to the grinding head.

[0024] In summary, compared with the prior art, the transmission device for the grinding head and the grinding system provided by the present invention have the following beneficial effects:

[0025] The transmission device and grinding system for the grinding head of the present invention rigidly transmit the output power of the motor to the grinding head through the power input shaft, the first speed gear set, the first power steering assembly, the second power steering assembly and the power output shaft, ensuring that the grinding head can reliably output power for grinding and avoiding unstable grinding effect caused by unstable transmission between the motor and the grinding head. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic structural diagram of the transmission device of the present invention.

[0027] Description of reference numerals:

[0028] Power input shaft 110

[0029] First speed gear set 120

[0030] The first high speed gear 121

[0031] First low speed gear 122

[0032] The first power steering assembly 130

[0033] First bevel gear 131

[0034] Second bevel gear 132

[0035] Second power steering assembly 140

[0036] The third bevel gear 141

[0037] Fourth bevel gear 142

[0038] Power output shaft 150

[0039] Second speed gear set 160

[0040] The second high speed gear 161

[0041] Second low speed gear 162

[0042] Drive shaft 170

[0043] Bearing 180

[0044] Motor 200

[0045] Grinding head 300 DETAILED DESCRIPTION

[0046] The following will be combined with the attached embodiment of the present invention Figure 1, the technical solutions, structural features, objectives achieved and effects in the embodiments of the present invention are described in detail.

[0047] It should be noted that the drawings are in a very simplified form and use non-precise proportions. They are only used to conveniently and clearly assist in explaining the embodiments of the present invention, and are not used to limit the conditions for the implementation of the present invention. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size, without affecting the effects and purposes that can be achieved by the present invention, should still fall within the scope of the technical content disclosed by the present invention.

[0048] It should be noted that, in the present invention, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only the elements explicitly listed, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0049] like Figure 1 As shown, the present invention provides a transmission device for a grinding head, including a power input shaft 110 , a first speed change gear set 120 , a first power steering assembly 130 , a second power steering assembly 140 and a power output shaft 150 .

[0050] The power input shaft 110 is used to be connected to the output shaft of the motor 200. The output shaft of the motor 200 is connected to the power input shaft 110 to transmit the output power of the motor 200 to the transmission device, and then passes through the first speed gear set 120, the first power steering assembly 130, and the second power steering assembly 140 to the grinding head 300 through the power output shaft 150.

[0051] The first speed gear set 120 includes a first high-speed gear 121 and a first low-speed gear 122 that mesh with each other. The first high-speed gear 121 is fixedly connected to the power input shaft 110, that is, the first high-speed gear 121 and the power output shaft 110 of the motor have the same rotation speed. The first high-speed gear 121 and the first low-speed gear 122 have the same module and pressure angle to achieve meshing and power transmission, and the number of teeth of the first high-speed gear 121 is less than the number of teeth of the first low-speed gear 122 to achieve a reduced rotation speed, wherein the transmission ratio of the first speed gear set 120 is i2.

[0052] The first power steering assembly 130 includes a first input end and a first output end whose rotation directions are perpendicular to each other. The first input end is directly or indirectly connected to the first low-speed gear 122 .

[0053] In this embodiment, the first power steering assembly 130 includes a first bevel gear 131 and a second bevel gear 132 meshing with each other, the first bevel gear 131 is connected to the second low-speed gear 162, and the second bevel gear 132 is connected to the second power steering assembly 140. And the input end of the first bevel gear 131 is indirectly connected to the first low-speed gear 122. The rotation axes of the first bevel gear 131 and the second bevel gear 132 are perpendicular to each other to achieve the change of the direction of the transmitted power.

[0054] The transmission ratio between the first bevel gear 131 and the second bevel gear 132 is 1, that is, the meshing of the first bevel gear 131 and the second bevel gear 132 is only used to change the direction of power without changing the transmission ratio, thereby reducing structural complexity and improving the reliability of power transmission.

[0055] The second power steering assembly 140 includes a second input end and a second output end whose rotation directions are perpendicular to each other, and the second input end is connected to the first output end.

[0056] In this embodiment, the second power steering assembly 140 includes a third bevel gear 141 and a fourth bevel gear 142 meshing with each other, the third bevel gear 141 is connected to the second bevel gear 132, that is, the third bevel gear 141 and the second bevel gear 132 have the same rotation speed, and the fourth bevel gear 142 is connected to the power output shaft 150. By providing the first power steering assembly 130 and the second power steering assembly 140, a 180° change in the power output direction is achieved to adapt to the power output direction required by the grinding head 300, so as to perform better grinding.

[0057] The transmission ratio between the third bevel gear 141 and the fourth bevel gear 142 is 1, and the transmission ratio between the third bevel gear 141 and the fourth bevel gear 142 is 1, that is, the engagement of the third bevel gear 141 and the fourth bevel gear 142 is only used to change the direction of power without changing the transmission ratio, thereby reducing structural complexity and improving the reliability of power transmission.

[0058] In this embodiment, continue as Figure 1As shown, the second bevel gear 132 and the third bevel gear 141 are connected by a transmission shaft 170, and the transmission device also includes a bearing 180, the inner ring of the bearing 180 is sleeved on the transmission shaft 170, and the outer ring of the bearing 180 is used to connect with an external support. The length of the transmission shaft 170 can be set as needed, and the distance between the grinding head 300 and the motor 200 is set as needed to ensure that the motor 200 can output power to the grinding heads 300 at different distances. In order to avoid the transmission shaft 170 from being too long to form a structure similar to a simply supported beam, which causes the transmission shaft 170 to deform greatly, a bearing 180 is set in the middle of the transmission shaft 170 to support the transmission shaft 170, improve the support stiffness of the transmission shaft 170, and avoid the situation where the power output by the motor 200 cannot be transmitted to the grinding head 300 due to the insufficient stiffness of the transmission shaft 170.

[0059] One end of the power output shaft 150 is connected to the second output end, and the other end is used to connect to the grinding head 300. The power output shaft 150 is used to transmit the output power of the second output end of the fourth bevel gear 142 to the grinding head 300 for grinding.

[0060] In this embodiment, the transmission device further includes a second speed gear set 160, which includes a second high-speed gear 161 and a second low-speed gear 162. The second high-speed gear 161 and the first low-speed gear 122 are coaxially arranged, that is, the second high-speed gear 161 and the first low-speed gear 122 have the same rotation speed. The second low-speed gear 162 is directly connected to the first input end of the first power steering assembly 130. The second high-speed gear 161 and the second low-speed gear 162 have the same module and pressure angle to achieve meshing and transmission of power, and the number of teeth of the second high-speed gear 161 is less than the number of teeth of the second low-speed gear 162 to achieve a reduced rotation speed. The transmission ratio of the second speed gear set 160 is i1. In this embodiment, by setting the first speed gear set 120 and the second speed gear set 160 of continuous speed reduction gear sets, the output rotation speed of the motor is reduced in two stages, avoiding excessive speed reduction ratio caused by setting a single-stage speed reduction gear set, and improving the reliability of the speed reduction gear set.

[0061] The present invention further provides a grinding system, including a motor 200 and a grinding head 300 .

[0062] The motor 200 is used to provide a power source. The motor 200 is used to convert external input electrical energy into rotational kinetic energy output. The grinding head 300 is used to grind the grinding device on the semiconductor device; as the transmission device for the grinding head 300 described above, the power input shaft 110 of the transmission device is connected to the output shaft of the motor 200, and the power output shaft 150 of the transmission device is connected to the grinding head 300. Thus, the kinetic energy output by the motor 200 is rigidly transmitted to the grinding head 300 after deceleration and change of direction, so as to achieve reliable grinding.

[0063] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A transmission device for a grinding head, characterized in that: The transmission device comprises: A power input shaft, the power input shaft is used to be connected to the output shaft of the motor; A first speed gear set, comprising a first high-speed gear and a first low-speed gear meshing with each other, wherein the first high-speed gear is fixedly connected to the power input shaft; A first power steering assembly, comprising a first input end and a first output end, the rotation directions of which are perpendicular to each other, wherein the first input end is directly or indirectly connected to the first low-speed gear; The second power steering assembly comprises a second input end and a second output end, the rotation directions of which are perpendicular to each other, the second input end is connected to the first output end, A power output shaft, one end of which is connected to the second output end, and the other end of which is used to be connected to the grinding head.

2. The transmission device for a grinding head according to claim 1, characterized in that: The transmission device also includes a second speed gear set, which includes a second high-speed gear and a second low-speed gear. The second high-speed gear and the first low-speed gear are coaxially arranged, and the second low-speed gear is directly connected to the first input end of the first power steering assembly.

3. The transmission device for a grinding head according to claim 2, characterized in that: The transmission ratio of the second speed gear set is i1.

4. The transmission device for a grinding head according to claim 1 or 3, characterized in that: The transmission ratio of the first speed gear set is i2.

5. The transmission device for a grinding head according to claim 2, characterized in that: The first power steering assembly includes a first bevel gear and a second bevel gear meshing with each other, the first bevel gear is connected to the second low-speed gear, and the second bevel gear is connected to the second power steering assembly.

6. The transmission device for a grinding head according to claim 5, characterized in that: The transmission ratio between the first bevel gear and the second bevel gear is 1.

7. The transmission device for a grinding head according to claim 5, characterized in that: The second power steering assembly includes a third bevel gear and a fourth bevel gear meshing with each other, the third bevel gear is connected to the second bevel gear, and the fourth bevel gear is connected to the power output shaft.

8. The transmission device for a grinding head according to claim 7, characterized in that: The transmission ratio of the third bevel gear and the fourth bevel gear is 1.

9. The transmission device for a grinding head according to claim 7, characterized in that: The second bevel gear and the third bevel gear are connected via a transmission shaft. The transmission device further comprises a bearing. The inner ring of the bearing is sleeved on the transmission shaft. The outer ring of the bearing is used to connect with an external support member.

10. A grinding system, characterized in that: include: A motor, the motor being used to provide a power source; A grinding head, wherein the grinding head is used for grinding a grinding device on a semiconductor device; The transmission device for a grinding head according to any one of claims 1 to 9, wherein the power input shaft of the transmission device is connected to the output shaft of the motor, and the power output shaft of the transmission device is connected to the grinding head.

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