A negative pressure circulation temperature control system

Abstract

The present invention discloses a negative pressure circulation temperature control system, which relates to the technical field of thermal management. The negative pressure circulation temperature control system includes a liquid storage tank connected to the load end for providing a liquid supply medium at a target temperature to the load end; a first vacuum tank connected to the load end and the liquid storage tank for receiving the liquid supply medium from the load end and supplying it to the liquid storage tank; a second vacuum tank connected to the load end and the liquid storage tank for receiving the liquid supply medium from the load end and supplying it to the liquid storage tank; a vacuum pump connected to the first vacuum tank and the second vacuum tank for alternately creating a negative pressure environment in the first vacuum tank and the second vacuum tank to utilize the negative pressure environment to alternately supply the liquid supply medium to the liquid storage tank by the first vacuum tank and the second vacuum tank; and a temperature control module connected to the liquid storage tank for adjusting the temperature of the liquid supply medium in the liquid storage tank to the target temperature. The present invention realizes continuous liquid supply to the load end, ensures the stability of the liquid level in the liquid storage tank, and improves the temperature control efficiency of the negative pressure circulation temperature control system.

Description

Technical Field

[0001] The present invention relates to the technical field of thermal management, and particularly to a negative pressure circulation temperature control system. Background Art

[0002] With the continuous improvement of industrial automation and energy conservation and environmental protection requirements, temperature control circulation systems are widely used in fields such as chemical industry, electronics, and construction. Traditional temperature control circulation systems generally adopt a positive pressure circulation method, that is, a positive pressure higher than the atmospheric pressure is generated in the pipeline by gravity or a driving circulation pump, so that the liquid supply medium circulates between the client device and the circulation temperature control system to achieve temperature control. However, there are significant safety hazards in the operation of the positive pressure circulation temperature control system. If the pipeline connection is loose or falls off, the liquid supply medium is extremely likely to leak to the outside, causing safety hazards and environmental pollution.

[0003] In contrast, the negative pressure circulation temperature control system sucks gas through a vacuum pump to form a negative pressure environment inside the system, so that the pressure in the pipeline is always lower than the external atmospheric pressure. Even if the system leaks, the medium will only flow into the system liquid storage chamber and will not flow out, significantly improving safety and fundamentally avoiding the risk of liquid supply medium leakage. Therefore, it has gradually been favored in industrial applications.

[0004] Existing negative pressure circulation temperature control systems mainly rely on the negative pressure generated by the vacuum pump to drive the flow of the liquid supply medium. However, the negative pressure that the vacuum pump can provide is limited, and when the liquid supply medium flows through components such as heat exchangers and valves, it will cause a large negative pressure loss, easily resulting in too small a negative pressure difference in the system, thus causing problems such as too low liquid supply pressure, slow liquid supply flow rate, and insufficient liquid supply head, affecting the stable operation of the system. In addition, when the liquid level of the liquid supply medium inside the negative pressure circulation temperature control system fluctuates greatly, the temperature of the liquid supply medium is likely to change, thus affecting the temperature control stability of the client device and reducing the temperature control efficiency. Summary of the Invention

[0005] The present invention provides a negative pressure circulation temperature control system to achieve continuous liquid supply to the load end, improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0006] In the first aspect of the present invention, a negative pressure circulation temperature control system is provided. The negative pressure circulation temperature control system includes:

[0007] A liquid storage tank, connected to the load end, for providing a liquid supply medium at a target temperature to the load end;

[0008] A first vacuum tank, connected to the load end and connected to the liquid storage tank, for receiving the liquid supply medium from the load end and providing the liquid supply medium to the liquid storage tank;

[0009] A second vacuum tank, connected to the load end and the liquid storage tank, for receiving the liquid supply medium from the load end and supplying the liquid supply medium to the liquid storage tank;

[0010] A vacuum pump, connected to the first vacuum tank and the second vacuum tank, for alternately creating a negative pressure environment in the first vacuum tank and the second vacuum tank to use the negative pressure environment to alternately supply the liquid supply medium to the liquid storage tank by the first vacuum tank and the second vacuum tank;

[0011] A temperature control module, connected to the liquid storage tank, for adjusting the temperature of the liquid supply medium in the liquid storage tank to the target temperature.

[0012] Optionally, the vacuum pump is connected to the air outlet of the second vacuum tank through a first control valve;

[0013] The vacuum pump is connected to the air outlet of the first vacuum tank through a second control valve;

[0014] The air inlet of the second vacuum tank is connected to a third control valve;

[0015] The air inlet of the first vacuum tank is connected to a fourth control valve;

[0016] The liquid inlet of the second vacuum tank is connected to the load end through a fifth control valve;

[0017] The liquid inlet of the first vacuum tank is connected to the load end through a sixth control valve;

[0018] The liquid outlet of the second vacuum tank is connected to the liquid inlet of the liquid storage tank through a seventh control valve;

[0019] The liquid outlet of the first vacuum tank is connected to the liquid inlet of the liquid storage tank through an eighth control valve.

[0020] Optionally, a first liquid level sensor is arranged in the first vacuum tank, and the first liquid level sensor is used for detecting the liquid level height of the liquid supply medium in the first vacuum tank;

[0021] A second liquid level sensor is arranged in the second vacuum tank, and the second liquid level sensor is used for detecting the liquid level height of the liquid supply medium in the second vacuum tank;

[0022] The negative pressure circulation temperature control system further includes a controller, and the controller is respectively in communication connection with the first liquid level sensor, the second liquid level sensor, the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve and the eighth control valve;

[0023] The controller is used to control the opening or closing of the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve and the eighth control valve according to the liquid level height of the liquid supply medium in the first vacuum tank and the liquid level height of the liquid supply medium in the second vacuum tank.

[0024] Optionally, the controller is specifically used for:

[0025] When the liquid level height of the liquid supply medium in the first vacuum tank is greater than the first low liquid level threshold and less than the first high liquid level threshold, control the second control valve and the sixth control valve to open, and the first control valve and the fifth control valve to close;

[0026] When the liquid level height of the liquid supply medium in the first vacuum tank is greater than or equal to the first high liquid level threshold, control the fourth control valve and the eighth control valve to open;

[0027] When the liquid level height of the liquid supply medium in the first vacuum tank is less than or equal to the first low liquid level threshold, control the fourth control valve and the eighth control valve to close;

[0028] When the liquid level height of the liquid supply medium in the second vacuum tank is greater than the second low liquid level threshold and less than the second high liquid level threshold, control the first control valve and the fifth control valve to open, and the second control valve and the sixth control valve to close;

[0029] When the liquid level height of the liquid supply medium in the second vacuum tank is greater than or equal to the second high liquid level threshold, control the third control valve and the seventh control valve to open;

[0030] When the liquid level height of the liquid supply medium in the second vacuum tank is less than or equal to the second low liquid level threshold, control the third control valve and the seventh control valve to close.

[0031] Optionally, the negative pressure circulation temperature control system further includes:

[0032] A gas drying filter, a steam-water separator and a gas trap;

[0033] The air outlet of the gas drying filter is connected to the air inlet of the first vacuum tank and the air inlet of the second vacuum tank;

[0034] The inlet of the steam-water separator is connected to the outlet of the vacuum pump; the outlet of the steam-water separator is connected to the inlet of the gas trap; the liquid outlet of the steam-water separator is connected to the liquid inlet of the liquid storage tank; the steam-water separator is used to separate the liquid supply medium water vapor output by the vacuum pump into the liquid supply medium and the liquid supply medium aerosol. The separated liquid supply medium is recovered into the liquid storage tank through the liquid outlet of the steam-water separator, and the liquid supply medium aerosol is transmitted to the gas trap through the gas outlet of the steam-water separator;

[0035] The liquid outlet of the gas trap is connected to the liquid inlet of the liquid storage tank; the first gas outlet of the gas trap is connected to the inlet of the gas drying filter; the second gas outlet of the gas trap is communicated with the external environment; the gas trap is used to cool the liquid supply medium aerosol, and the liquid supply medium obtained by cooling the liquid supply medium aerosol is recovered into the liquid storage tank through the liquid outlet of the gas trap.

[0036] Optionally, the temperature control module includes:

[0037] A heat exchanger, an internal circulation pump, a cooling water inlet pipeline, a cooling water outlet pipeline, a heat exchange inlet pipeline, and a heat exchange outlet pipeline;

[0038] The heat exchanger includes a cooling water inlet, a cooling water outlet, a heat exchange inlet, and a heat exchange outlet;

[0039] The internal circulation pump is arranged on the heat exchange inlet pipeline, or the internal circulation pump is arranged in the liquid storage tank;

[0040] The cooling water inlet pipeline is respectively communicated with the cooling water inlet end and the cooling water inlet; the cooling water outlet pipeline is respectively communicated with the cooling water outlet end and the cooling water outlet; the heat exchange inlet pipeline is respectively communicated with the liquid outlet of the liquid storage tank and the heat exchange inlet; the heat exchange outlet pipeline is respectively communicated with the liquid inlet of the liquid storage tank and the heat exchange outlet.

[0041] Optionally, the internal circulation pump is a submersible pump.

[0042] Optionally, a ninth control valve is arranged in the cooling water inlet pipeline;

[0043] The negative pressure circulation temperature control system further includes a temperature sensing unit; the temperature sensing unit is arranged in the liquid storage tank outlet pipeline between the liquid storage tank and the load end; the temperature sensing unit is used to detect the temperature of the liquid supply medium in the liquid storage tank outlet pipeline;

[0044] The negative pressure circulation temperature control system further includes a controller, which is communicatively connected to the ninth control valve and the temperature sensing unit respectively; the controller is configured to control the opening degree of the ninth control valve according to the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank.

[0045] Optionally, the controller is specifically configured to:

[0046] When the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is greater than the target temperature, increase the opening degree of the ninth control valve;

[0047] When the temperature of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is less than or equal to the target temperature, decrease the opening degree of the ninth control valve.

[0048] Optionally, the negative pressure circulation temperature control system further includes:

[0049] A first pressure sensor and a second pressure sensor; the first pressure sensor is arranged in the liquid outlet pipeline of the liquid storage tank between the liquid storage tank and the load end for detecting the pressure of the liquid outlet pipeline of the liquid storage tank; the second pressure sensor is arranged in the vacuum tank inlet pipeline between the load end and the first vacuum tank and the second vacuum tank for detecting the pressure of the vacuum tank inlet pipeline;

[0050] The vacuum pump includes a variable frequency vacuum pump;

[0051] The negative pressure circulation temperature control system further includes a controller, which is communicatively connected to the first pressure sensor, the second pressure sensor and the variable frequency vacuum pump respectively; the controller is configured to adjust the frequency of the variable frequency vacuum pump according to the pressure difference between the pressure of the liquid outlet pipeline of the liquid storage tank and the pressure of the vacuum tank inlet pipeline.

[0052] Optionally, the controller is specifically configured to:

[0053] When the absolute value of the pressure difference between the pressure of the liquid outlet pipeline of the liquid storage tank and the pressure of the vacuum tank inlet pipeline is greater than the threshold negative pressure, reduce the frequency of the variable frequency vacuum pump;

[0054] When the absolute value of the pressure difference between the pressure of the liquid outlet pipeline of the liquid storage tank and the pressure of the vacuum tank inlet pipeline is less than or equal to the threshold negative pressure, increase the frequency of the variable frequency vacuum pump.

[0055] Optionally, the range of the threshold negative pressure is between 35Kpa and 75Kpa.

[0056] Optionally, the negative pressure circulation temperature control system further includes:

[0057] Bubble detection unit; the bubble detection unit is arranged in the vacuum tank liquid inlet pipeline between the load end and the first vacuum tank and the second vacuum tank, and is used to detect the number of bubbles in the vacuum tank liquid inlet pipeline;

[0058] The negative pressure circulation temperature control system further includes a controller, which is communicatively connected to the bubble detection unit, and is used to output a warning message when the absolute value of the pressure difference between the pressure measured by the first pressure sensor and the pressure measured by the second pressure sensor is less than the negative pressure normal threshold, and the number of bubbles in the vacuum tank liquid inlet pipeline is greater than the preset bubble threshold number;

[0059] Or, when the liquid level height of the liquid supply medium in the first vacuum tank detected by the first liquid level sensor is less than the liquid level normal threshold, and / or, the liquid level height of the liquid supply medium in the second vacuum tank detected by the second liquid level sensor is less than the liquid level normal threshold, and the number of bubbles in the vacuum tank liquid inlet pipeline is greater than the preset bubble threshold number, output the warning message;

[0060] The warning message is used to prompt that the system negative pressure is abnormal.

[0061] Optionally, the negative pressure circulation temperature control system further includes:

[0062] Flow detection unit; the flow detection unit is arranged in the liquid storage tank outlet pipeline between the liquid storage tank and the load end, and is used to detect the flow rate of the liquid supply medium in the liquid storage tank outlet pipeline;

[0063] The negative pressure circulation temperature control system further includes a controller, which is communicatively connected to the flow detection unit, and is used to control the suction volume of the vacuum pump according to the flow rate of the liquid supply medium in the liquid storage tank outlet pipeline.

[0064] Optionally, the ratio range between the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid storage tank outlet pipeline is between 3:1 and 5:1.

[0065] The technical solution of the present invention is to provide a liquid storage tank connected to the load end in a negative pressure circulation temperature control system, so that the liquid supply medium stored in the liquid storage tank can be output to the load end. A first vacuum tank is connected to the load end and the liquid storage tank, and a vacuum pump is connected to the first vacuum tank, so that the vacuum pump can form a high negative pressure environment inside the first vacuum tank, and thus the liquid supply medium in the liquid storage tank can be sequentially output to the load end and the first vacuum tank. In addition, a second vacuum tank is connected to the load end and the liquid storage tank, and a vacuum pump is connected to the second vacuum tank. After a certain amount of liquid supply medium is stored in the first vacuum tank, the vacuum pump can form a high negative pressure environment inside the second vacuum tank, and the liquid supply medium in the liquid storage tank can be sequentially output to the load end and the second vacuum tank. While a high negative pressure environment is formed in the second vacuum tank, the liquid supply medium in the first vacuum tank can be recovered into the liquid storage tank. After a certain amount of liquid supply medium is stored in the second vacuum tank, the vacuum pump can again form a high negative pressure environment inside the first vacuum tank, so that the liquid supply medium in the liquid storage tank can be sequentially output to the load end and the first vacuum tank. At the same time, the liquid supply medium in the second vacuum tank can be recovered into the liquid storage tank. By alternately constructing a negative pressure environment in the first vacuum tank and the second vacuum tank by the vacuum pump, the first vacuum tank and the second vacuum tank can alternately provide the liquid supply medium for the liquid storage tank, ensuring the stable liquid level of the liquid storage tank and realizing continuous liquid supply from the liquid storage tank to the load end. In addition, a temperature control module connected to the liquid storage tank is provided in the negative pressure circulation temperature control system, so that the temperature of the liquid supply medium in the liquid storage tank is always maintained at the target temperature required by the load end, thereby ensuring the stable operation of the negative pressure circulation temperature control system. At the same time, the liquid supply medium in the liquid storage tank is maintained at a relatively constant liquid level, enabling the temperature control module to uniformly adjust the temperature of the liquid supply medium, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. By adjusting the temperature of the liquid supply medium through the temperature control module, the liquid supply medium does not need to pass through a heat exchanger during the process of being transported to the load end, avoiding pressure loss and improving the operating efficiency of the negative pressure circulation temperature control system.

[0066] It should be understood that the content described in this part is not intended to identify the key or important features of the embodiments of the present invention, nor is it used to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. Brief Description of the Drawings

[0067] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0068] Figure 1It is a schematic structural diagram of a negative pressure circulation temperature control system provided by an embodiment of the present invention.

[0069] Figure 2 It is a schematic structural diagram of another negative pressure circulation temperature control system provided by an embodiment of the present invention.

[0070] Figure 3 It is a schematic flow diagram of the control logic of a negative pressure circulation temperature control system provided by an embodiment of the present invention. Detailed implementation manners

[0071] In order to enable those skilled in the art to better understand the solution of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0072] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily need to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device including a series of steps or units does not necessarily have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0073] Figure 1 It is a schematic structural diagram of a negative pressure circulation temperature control system provided by an embodiment of the present invention, as Figure 1As shown in the figure, the negative pressure circulation temperature control system includes a liquid storage tank 1, which is connected to the load end 00 and is used to provide a liquid supply medium at a target temperature for the load end 00; a first vacuum tank 21, which is connected to the load end 00 and is also connected to the liquid storage tank 1, and is used to receive the liquid supply medium from the load end 00 and provide the liquid supply medium for the liquid storage tank 1; a second vacuum tank 22, which is connected to the load end 00 and is also connected to the liquid storage tank 1, and is used to receive the liquid supply medium from the load end 00 and provide the liquid supply medium for the liquid storage tank 1; a vacuum pump 3, which is connected to the first vacuum tank 21 and is also connected to the second vacuum tank 22, and is used to alternately create a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, so as to use the negative pressure environment to alternately provide the liquid supply medium for the liquid storage tank 1 by the first vacuum tank 21 and the second vacuum tank 22; a temperature control module 01, which is connected to the liquid storage tank 1 and is used to adjust the temperature of the liquid supply medium in the liquid storage tank 1 to the target temperature.

[0074] Among them, the liquid storage tank 1 can be specifically understood as a device for storing the liquid supply medium. At the same time, the liquid supply medium stored in the liquid storage tank 1 can be output from the first liquid outlet 101 of the liquid storage tank 1 to the liquid inlet 001 of the load end 00 through the liquid storage tank liquid outlet pipeline 12, so as to meet the demand for the liquid supply medium during the operation of the load end equipment. The liquid supply medium can be specifically understood as coolant, transformer oil, deionized water, etc.

[0075] Continue to refer to Figure 1 , the liquid inlet 2101 of the first vacuum tank 21 is connected to the liquid outlet 002 of the load end 00 through the first vacuum tank liquid inlet pipeline 211, the liquid outlet 2102 of the first vacuum tank 21 is connected to the first liquid inlet 102 of the liquid storage tank 1 through the first vacuum tank liquid outlet pipeline 212. At the same time, the gas outlet 2103 of the first vacuum tank 21 is connected to the gas inlet 301 of the vacuum pump 3 through the first vacuum tank gas outlet pipeline 213. Therefore, the vacuum pump 3 can evacuate the first vacuum tank 21 through the first vacuum tank gas outlet pipeline 213, so that the air pressure inside the first vacuum tank 21 decreases, forming a high negative pressure environment, while the liquid storage tank 1 is at a relatively higher pressure, thus forming a differential pressure driving force, so that the liquid supply medium in the liquid storage tank 1 can be output from the first liquid outlet 101 of the liquid storage tank 1 to the liquid inlet 001 of the load end 00 through the liquid storage tank liquid outlet pipeline 12. At the same time, after the liquid supply medium entering the load end 00 absorbs the heat generated by the load end equipment, its temperature rises, and it can be output from the liquid outlet 002 of the load end 00 to the liquid inlet 2101 of the first vacuum tank 21 through the first vacuum tank liquid inlet pipeline 211, so that the used liquid supply medium can be stored in the first vacuum tank 21.

[0076] In addition, the liquid inlet 2201 of the second vacuum tank 22 is connected to the liquid outlet 002 of the load end 00 through the second vacuum tank liquid inlet pipeline 221. The liquid outlet 2202 of the second vacuum tank 22 is connected to the first liquid inlet 102 of the liquid storage tank 1 through the second vacuum tank liquid outlet pipeline 222. At the same time, the gas outlet 2203 of the second vacuum tank 22 is connected to the gas inlet 301 of the vacuum pump 3 through the second vacuum tank gas outlet pipeline 223. When a certain amount of liquid supply medium is stored in the first vacuum tank 21, the vacuum pump 3 can switch from evacuating the first vacuum tank 21 to evacuating the second vacuum tank 22 through the second vacuum tank gas outlet pipeline 223, so that the liquid supply medium in the liquid storage tank 1 can be output to the load end 00 through the liquid storage tank liquid outlet pipeline 12 under the action of the negative pressure driving force. At the same time, after the liquid supply medium entering the load end 00 absorbs the heat generated by the load end equipment, it can be output to the liquid inlet 2201 of the second vacuum tank 22 through the second vacuum tank liquid inlet pipeline 221, so that the used liquid supply medium can be stored in the second vacuum tank 22, thus realizing that the vacuum pump 3 alternately constructs a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, ensuring the continuous liquid supply of the liquid storage tank 1 to the load end 00.

[0077] While the vacuum pump 3 evacuates the second vacuum tank 22, the pressure in the first vacuum tank 21 will be higher than the pressure in the liquid storage tank 1, so that the liquid supply medium in the first vacuum tank 21 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the liquid outlet 2101 of the first vacuum tank 21 and the first vacuum tank liquid outlet pipeline 212, thus realizing the recovery of the used liquid supply medium to the liquid storage tank 1. It can be understood that even if the liquid supply medium in the first vacuum tank 21 entering the liquid storage tank 1 causes the air pressure in the liquid storage tank 1 to be balanced to a slightly negative pressure, under the pumping action of the vacuum pump 3 on the second vacuum tank 22, the air pressure in the liquid storage tank 1 will quickly return to a high negative pressure, so that the liquid supply medium in the first vacuum tank 21 can continue to be input into the liquid storage tank 1.

[0078] After a certain amount of liquid supply medium is stored in the second vacuum tank 22, the vacuum pump 3 can switch from evacuating the second vacuum tank 22 to evacuating the first vacuum tank 21 again, so that the liquid supply medium in the liquid storage tank 1 can be output to the load end 00 and the first vacuum tank 21 in turn under the action of the negative pressure driving force. At the same time, the liquid supply medium in the second vacuum tank 22 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the liquid outlet 2202 of the second vacuum tank 22 and the second vacuum tank liquid outlet pipeline 222. By alternately constructing a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22 by the vacuum pump 3, the negative pressure environment is used to alternately provide the liquid supply medium for the liquid storage tank 1 by the first vacuum tank 21 and the second vacuum tank 22, thus realizing the cyclic flow of the liquid supply medium, so as to keep the liquid level of the liquid storage tank 1 stable, ensure the continuous liquid supply of the liquid storage tank 1 to the load end 00, and improve the operation efficiency and stability of the negative pressure circulation temperature control system.

[0079] Continue to refer to Figure 1 , the temperature control module 01 is connected to the liquid storage tank 1 and can adjust the temperature of the liquid supply medium in the liquid storage tank 1 to the target temperature of the liquid supply medium required by the load end 00. Exemplarily, the temperature control module 01 can specifically be a chiller, a temperature control circulator, a plate heat exchanger, etc. The temperature control module 01 can accurately adjust the temperature of the liquid supply medium in the liquid storage tank 1 to keep it always at the target temperature required by the load end 00, thus ensuring the stable operation of the negative pressure circulation temperature control system. In addition, by alternately creating a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22 with the vacuum pump 3, the liquid supply medium in the liquid storage tank 1 can be continuously maintained at a relatively constant liquid level. The temperature control module 01 can uniformly adjust the temperature of the liquid supply medium, avoiding the situation of reduced temperature control efficiency or uneven temperature caused by large fluctuations in the liquid level in the liquid storage tank 1, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. In addition, by adjusting the temperature of the liquid supply medium through the temperature control module 01, the liquid supply medium does not need to pass through a heat exchanger during the process of being transported to the load end 00, avoiding pressure loss during the liquid supply process to the load end 00, thereby improving the operating efficiency of the negative pressure circulation temperature control system.

[0080] It can also be understood that a negative pressure environment is maintained inside the negative pressure circulation temperature control system. When a pipeline leaks, due to the external atmospheric pressure being higher than the leaked negative pressure, the liquid in the pipeline will not flow out into the external environment under the action of the negative pressure difference, avoiding leakage at the source. At the same time, since the inside of the negative pressure circulation temperature control system is a negative pressure environment, when it is necessary to disassemble and replace the connecting pipeline at the load end, there is no need to perform a shutdown and liquid discharge operation, and the connecting pipeline can be disassembled and replaced under the operating state of the negative pressure circulation temperature control system, improving the convenience of pipeline disassembly and replacement and saving operation time.

[0081] In this embodiment, a liquid storage tank connected to the load end is arranged in the negative pressure circulation temperature control system, so that the liquid supply medium stored in the liquid storage tank can be output to the load end. By arranging a first vacuum tank connected to the load end and the liquid storage tank, and a vacuum pump connected to the first vacuum tank, the vacuum pump can form a high negative pressure environment inside the first vacuum tank, so that the liquid supply medium in the liquid storage tank can be sequentially output to the load end and the first vacuum tank. In addition, by arranging a second vacuum tank connected to the load end and the liquid storage tank, and a vacuum pump connected to the second vacuum tank, after a certain amount of liquid supply medium is stored in the first vacuum tank, the vacuum pump can form a high negative pressure environment inside the second vacuum tank, and the liquid supply medium in the liquid storage tank can be sequentially output to the load end and the second vacuum tank. While a high negative pressure environment is formed in the second vacuum tank, the liquid supply medium in the first vacuum tank can be recovered to the liquid storage tank. After a certain amount of liquid supply medium is stored in the second vacuum tank, the vacuum pump can form a high negative pressure environment inside the first vacuum tank again, so that the liquid supply medium in the liquid storage tank can be sequentially output to the load end and the first vacuum tank. At the same time, the liquid supply medium in the second vacuum tank can be recovered to the liquid storage tank. By alternately constructing a negative pressure environment in the first vacuum tank and the second vacuum tank by the vacuum pump, the first vacuum tank and the second vacuum tank can alternately provide the liquid supply medium for the liquid storage tank, ensuring the stable liquid level of the liquid storage tank and realizing continuous liquid supply from the liquid storage tank to the load end. In addition, by arranging a temperature control module connected to the liquid storage tank in the negative pressure circulation temperature control system, the temperature of the liquid supply medium in the liquid storage tank can always be maintained at the target temperature required by the load end, thus ensuring the stable operation of the negative pressure circulation temperature control system. At the same time, the liquid supply medium in the liquid storage tank is maintained at a relatively constant liquid level, enabling the temperature control module to uniformly adjust the temperature of the liquid supply medium, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. By adjusting the temperature of the liquid supply medium through the temperature control module, the liquid supply medium does not need to pass through a heat exchanger during the process of being transported to the load end, avoiding pressure loss and improving the operation efficiency of the negative pressure circulation temperature control system.

[0082] Optionally, Figure 2 is a schematic structural diagram of another negative pressure circulation temperature control system provided by an embodiment of the present invention, as Figure 2As shown in the figure, the vacuum pump 3 is connected to the air outlet 2203 of the second vacuum tank 22 through the first control valve 51; the vacuum pump 3 is connected to the air outlet 2103 of the first vacuum tank 21 through the second control valve 52; the air inlet 2204 of the second vacuum tank 22 is connected to the third control valve 53; the air inlet 2104 of the first vacuum tank 21 is connected to the fourth control valve 54; the liquid inlet 2201 of the second vacuum tank 22 is connected to the load end 00 through the fifth control valve 55; the liquid inlet 2101 of the first vacuum tank 21 is connected to the load end 00 through the sixth control valve 56; the liquid outlet 2202 of the second vacuum tank 22 is connected to the first liquid inlet 102 of the liquid storage tank 1 through the seventh control valve 57; the liquid outlet 2102 of the first vacuum tank 21 is connected to the first liquid inlet 102 of the liquid storage tank 1 through the eighth control valve 58.

[0083] Specifically, continue to refer to Figure 2 , a sixth control valve 56 is provided in the first vacuum tank liquid inlet pipeline 211, and a second control valve 52 is provided in the first vacuum tank air outlet pipeline 213. When it is necessary to evacuate the first vacuum tank 21, the sixth control valve 56 and the second control valve 52 are opened, so that the vacuum pump 3 can evacuate the first vacuum tank 21 through the first vacuum tank air outlet pipeline 213, so that the liquid supply medium in the liquid storage tank 1 can be output to the load end 00 through the liquid storage tank liquid outlet pipeline 12 under the action of the negative pressure driving force. At the same time, after the liquid supply medium entering the load end 00 absorbs the heat generated by the load end equipment, it can be output to the liquid inlet 2101 of the first vacuum tank 21 through the first vacuum tank liquid inlet pipeline 211, so that the used liquid supply medium can be stored in the first vacuum tank 21.

[0084] A fifth control valve 55 is provided in the second vacuum tank liquid inlet pipeline 221, and a first control valve 51 is provided in the second vacuum tank air outlet pipeline 223. After a certain amount of liquid supply medium is stored in the first vacuum tank 21, the second control valve 52 and the sixth control valve 56 are closed, and the fifth control valve 55 and the first control valve 51 are opened, so that the vacuum pump 3 switches from evacuating the first vacuum tank 21 to evacuating the second vacuum tank 22 through the second vacuum tank air outlet pipeline 223, so that the liquid supply medium in the liquid storage tank 1 can be output to the load end 00 through the liquid storage tank liquid outlet pipeline 12 under the action of the negative pressure driving force. At the same time, after the liquid supply medium entering the load end 00 absorbs the heat generated by the load end equipment, it can be output to the liquid inlet 2201 of the second vacuum tank 22 through the second vacuum tank liquid inlet pipeline 221, so that the used liquid supply medium can be stored in the second vacuum tank 22, thus realizing that the vacuum pump 3 alternately constructs a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, ensuring the continuous liquid supply from the liquid storage tank 1 to the load end 00.

[0085] A fourth control valve 54 is provided in the first vacuum tank inlet pipeline 214, and an eighth control valve 58 is provided in the first vacuum tank liquid outlet pipeline 212. When the second control valve 52 and the sixth control valve 56 are closed and the fifth control valve 55 and the first control valve 51 are opened, the fourth control valve 54 and the eighth control valve 58 are opened. At this time, gas enters the first vacuum tank 21, making the pressure in the first vacuum tank 21 higher than the pressure in the liquid storage tank 1. The liquid supply medium in the first vacuum tank 21 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the first vacuum tank liquid outlet pipeline 212 via the liquid inlet 2101 of the first vacuum tank 21, thereby realizing the recovery of the used liquid supply medium to the liquid storage tank 1.

[0086] A third control valve 53 is provided in the second vacuum tank inlet pipeline 224, and a seventh control valve 57 is provided in the second vacuum tank liquid outlet pipeline 222. After a certain amount of liquid supply medium is stored in the second vacuum tank 22, the first control valve 51, the fourth control valve 54, the fifth control valve 55, and the eighth control valve 58 are closed, and the second control valve 52, the third control valve 53, the sixth control valve 56, and the seventh control valve 57 are opened, so that the vacuum pump 3 can be switched from evacuating the second vacuum tank 22 to evacuating the first vacuum tank 21 again, enabling the liquid supply medium in the liquid storage tank 1 to be output to the load end 00 and the first vacuum tank 21 in sequence under the action of the negative pressure driving force. At the same time, gas enters the second vacuum tank 22, enabling the liquid supply medium in the second vacuum tank 22 to be output to the first liquid inlet 102 of the liquid storage tank 1 through the second vacuum tank liquid outlet pipeline 222 via the liquid outlet 2202 of the second vacuum tank 22.

[0087] By providing the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57, and the eighth control valve 58 in the negative pressure circulation temperature control system, the vacuum pump 3 can alternately create a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, enabling the liquid supply medium in the liquid storage tank 1 to be continuously maintained at a relatively constant liquid level. The temperature control module 01 can evenly adjust the temperature of the liquid supply medium, avoiding the situation of reduced temperature control efficiency or uneven temperature caused by large fluctuations in the liquid level in the liquid storage tank 1, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0088] Optionally, continue to refer to Figure 2, a first liquid level sensor 61 is arranged in the first vacuum tank 21, and the first liquid level sensor 61 is used to detect the liquid level height of the liquid supply medium in the first vacuum tank 21; a second liquid level sensor 62 is arranged in the second vacuum tank 22, and the second liquid level sensor 62 is used to detect the liquid level height of the liquid supply medium in the second vacuum tank 22; the negative pressure circulation temperature control system further includes a controller, and the controller is respectively communicatively connected to the first liquid level sensor 61, the second liquid level sensor 62, the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58; the controller is used to control the opening or closing of the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58 according to the liquid level height of the liquid supply medium in the first vacuum tank 21 and the liquid level height of the liquid supply medium in the second vacuum tank 22.

[0089] Among them, the first liquid level sensor 61 is used to detect the liquid level height of the liquid supply medium in the first vacuum tank 21, and the second liquid level sensor 62 is used to detect the liquid level height of the liquid supply medium in the second vacuum tank 22. The controller can specifically be a Programmable Logic Controller (PLC), an STM32 control chip, an ESP32 control chip, etc. The controller is respectively communicatively connected to the first liquid level sensor 61, the second liquid level sensor 62, the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58, so that the controller can control the opening or closing of the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58 according to the liquid level height of the liquid supply medium in the first vacuum tank 21 and the liquid level height of the liquid supply medium in the second vacuum tank 22, so as to realize that the vacuum pump 3 alternately constructs a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, and can use the negative pressure environment to alternately supply the liquid supply medium to the liquid storage tank 1 by the first vacuum tank 21 and the second vacuum tank 22.

[0090] Optionally, such as Figure 3As shown, the controller is specifically configured to: when the liquid level of the liquid supply medium in the first vacuum tank 21 is greater than the first low liquid level threshold HL1 and less than the first high liquid level threshold HP1, control the second control valve 52 and the sixth control valve 56 to open, and the first control valve 51 and the fifth control valve 55 to close; when the liquid level of the liquid supply medium in the first vacuum tank 21 is greater than or equal to the first high liquid level threshold HP1, control the fourth control valve 54 and the eighth control valve 58 to open; when the liquid level of the liquid supply medium in the first vacuum tank 21 is less than or equal to the first low liquid level threshold HL1, control the fourth control valve 54 and the eighth control valve 58 to close; when the liquid level of the liquid supply medium in the second vacuum tank 22 is greater than the second low liquid level threshold HL2 and less than the second high liquid level threshold HP2, control the first control valve 51 and the fifth control valve 55 to open, and the second control valve 52 and the sixth control valve 56 to close; when the liquid level of the liquid supply medium in the second vacuum tank 22 is greater than or equal to the second high liquid level threshold HP2, control the third control valve 53 and the seventh control valve 57 to open; when the liquid level of the liquid supply medium in the second vacuum tank 22 is less than or equal to the second low liquid level threshold HL2, control the third control valve 53 and the seventh control valve 57 to close.

[0091] Specifically, when the liquid level of the liquid supply medium in the first vacuum tank 21 is greater than HL1 and less than HP1, the controller can control the second control valve 52 and the sixth control valve 56 to open, and the first control valve 51, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the seventh control valve 57 and the eighth control valve 58 to close, so that the vacuum pump 3 can evacuate the first vacuum tank 21, the liquid supply medium in the liquid storage tank 1 can be output to the first vacuum tank 21, and the first liquid level sensor 61 can detect the liquid level in the first vacuum tank 21 in real time. When the first liquid level sensor 61 detects that the liquid level in the first vacuum tank 21 is greater than or equal to HP1, the controller can control the second control valve 52 and the sixth control valve 56 to close, and control the first control valve 51, the fourth control valve 54, the fifth control valve 55 and the eighth control valve 58 to open, so that the liquid supply medium in the first vacuum tank 21 can be output to the liquid storage tank 1. At the same time, the vacuum pump 3 evacuates the second vacuum tank 22, so that the liquid supply medium in the liquid storage tank 1 can be output to the second vacuum tank 22, ensuring the continuous liquid supply from the liquid storage tank 1 to the load end 00. When the first liquid level sensor 61 detects that the liquid level in the first vacuum tank 21 is less than or equal to HL1, the controller can control the first control valve 51, the fourth control valve 54, the fifth control valve 55 and the eighth control valve 58 to close, and the second control valve 52 and the sixth control valve 56 to open, so that the liquid supply medium in the first vacuum tank 21 stops outputting to the liquid storage tank 1, and the liquid supply medium in the liquid storage tank 1 can be output to the first vacuum tank 21, so that the liquid level of the liquid supply medium in the first vacuum tank 21 can be maintained between HL1 and HP1.

[0092] When the liquid level height of the liquid supply medium in the second vacuum tank 22 is greater than HL2 and less than HP2, the controller can control the first control valve 51 and the fifth control valve 55 to open, and the second control valve 52 and the sixth control valve 56 to close, so that the vacuum pump 3 can evacuate the second vacuum tank 22, the liquid supply medium in the liquid storage tank 1 can be output to the first vacuum tank 21, and the second liquid level sensor 62 can detect the liquid level height in the second vacuum tank 22 in real time. When the second liquid level sensor 62 detects that the liquid level height in the second vacuum tank 22 is greater than or equal to HP2, the controller can control the first control valve 51 and the fifth control valve 55 to close, and control the second control valve 52, the third control valve 53, the sixth control valve 56 and the seventh control valve 57 to open, so that the liquid supply medium in the second vacuum tank 22 can be output to the liquid storage tank 1. At the same time, the vacuum pump 3 evacuates the first vacuum tank 21, so that the liquid supply medium in the liquid storage tank 1 can be output to the first vacuum tank 21, ensuring the continuous liquid supply of the liquid storage tank 1 to the load end 00. When the second liquid level sensor 62 detects that the liquid level height in the second vacuum tank 22 is less than or equal to HL2, the controller can control the second control valve 52, the third control valve 53, the sixth control valve 56 and the seventh control valve 57 to close, and the first control valve 51 and the fifth control valve 55 to open, so that the liquid supply medium in the second vacuum tank 22 stops outputting to the liquid storage tank 1, and the liquid supply medium in the liquid storage tank 1 can be output to the second vacuum tank 22, so that the liquid level height of the liquid supply medium in the second vacuum tank 22 can be maintained between HL2 and HP2.

[0093] In an optional embodiment, continue to refer to Figure 2 , a third liquid level sensor 63 is arranged in the liquid storage tank 1, and the third liquid level sensor 63 is used to detect the liquid level height of the liquid supply medium in the third vacuum tank.

[0094] Specifically, when the liquid supply medium in the liquid storage tank 1 is output to the first vacuum tank 21 and the liquid supply medium in the second vacuum tank 22 is output to the liquid storage tank 1, the third liquid level sensor 63 can detect the liquid level height in the liquid storage tank 1 in real time. When the third liquid level sensor 63 detects that the liquid level height in the liquid storage tank 1 is greater than or equal to the third liquid level upper limit threshold, the controller can control the third control valve 53 and the seventh control valve 57 to close, so that the liquid supply medium in the second vacuum tank 22 stops being output to the liquid storage tank 1. When the third liquid level sensor 63 detects that the liquid level height in the liquid storage tank 1 is less than or equal to the third liquid level lower limit threshold, the controller can control the third control valve 53 and the seventh control valve 57 to open again, so that the liquid supply medium in the second vacuum tank 22 can be output to the liquid storage tank 1 again; when the liquid supply medium in the liquid storage tank 1 is output to the second vacuum tank 22 and the liquid supply medium in the first vacuum tank 21 is output to the liquid storage tank 1, the third liquid level sensor 63 can also detect the liquid level height in the liquid storage tank 1 in real time. When the third liquid level sensor 63 detects that the liquid level height in the liquid storage tank 1 is greater than or equal to the third liquid level upper limit threshold, the controller can control the fourth control valve 54 and the eighth control valve 58 to close, so that the liquid supply medium in the first vacuum tank 21 stops being output to the liquid storage tank 1. When the third liquid level sensor 63 detects that the liquid level height in the liquid storage tank 1 is less than or equal to the third liquid level lower limit threshold, the controller can control the fourth control valve 54 and the eighth control valve 58 to open again, so that the liquid supply medium in the first vacuum tank 21 can be output to the liquid storage tank 1 again, so that the liquid level height of the liquid supply medium in the liquid storage tank 1 can be maintained between the third liquid level lower limit threshold and the third liquid level upper limit threshold.

[0095] By controlling the opening or closing of the first control valve 51, the second control valve 52, the third control valve 53, the fourth control valve 54, the fifth control valve 55, the sixth control valve 56, the seventh control valve 57 and the eighth control valve 58 by the controller, the vacuum pump 3 can alternately create a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, so that the circulating flow of the liquid supply medium in the negative pressure circulation temperature control system can operate stably, ensuring the continuous liquid supply from the liquid storage tank 1 to the load end 00, and maintaining the liquid levels of the liquid storage tank 1, the first vacuum tank 21 and the second vacuum tank 22 stable, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0096] Optionally, continue to refer to Figure 2, the negative pressure circulation temperature control system further includes a gas drying filter 4, a steam-water separator 7, and a gas trap 8; the air outlet 401 of the gas drying filter 4 is connected to the air inlet 2104 of the first vacuum tank 21 and is also connected to the air inlet 2204 of the second vacuum tank 22; the air inlet 701 of the steam-water separator 7 is connected to the air outlet 302 of the vacuum pump 3; the air outlet 702 of the steam-water separator 7 is connected to the air inlet 801 of the gas trap 8; the liquid outlet 703 of the steam-water separator 7 is connected to the liquid inlet of the liquid storage tank 1; the steam-water separator 7 is used to separate the liquid supply medium water vapor output by the vacuum pump 3 into a liquid supply medium and a liquid supply medium aerosol, the separated liquid supply medium is recovered into the liquid storage tank 1 through the liquid outlet 703 of the steam-water separator 7, and the liquid supply medium aerosol is transmitted to the gas trap 8 through the air outlet of the steam-water separator 7; the liquid outlet 802 of the gas trap 8 is connected to the liquid inlet of the liquid storage tank 1; the first air outlet 803 of the gas trap 8 is connected to the air inlet 402 of the gas drying filter 4; the second air outlet 804 of the gas trap 8 is communicated with the external environment; the gas trap 8 is used to cool the liquid supply medium aerosol, and the liquid supply medium obtained by cooling the liquid supply medium aerosol is recovered into the liquid storage tank 1 through the liquid outlet 802 of the gas trap 8.

[0097] Among them, the air outlet 401 of the gas drying filter 4 is connected to the air inlet 2104 of the first vacuum tank 21 through the first vacuum tank inlet pipeline 214, so that the gas drying filter 4 can transport the filtered gas to the air inlet 2104 of the first vacuum tank 21 through the first vacuum tank inlet pipeline 214. After the gas enters the first vacuum tank 21, the pressure in the first vacuum tank 21 is higher than the pressure in the liquid storage tank 1, and the liquid supply medium in the first vacuum tank 21 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the liquid outlet pipeline 212 of the first vacuum tank 21 through the liquid inlet 2101 of the first vacuum tank 21, thereby realizing the recovery of the used liquid supply medium into the liquid storage tank 1. The air outlet 401 of the gas drying filter 4 is connected to the air inlet 2204 of the second vacuum tank 22 through the second vacuum tank inlet pipeline 224, so that the gas drying filter 4 can transport the filtered gas to the air inlet 2204 of the second vacuum tank 22 through the second vacuum tank inlet pipeline 224. The liquid supply medium in the second vacuum tank 22 can be output to the first liquid inlet 102 of the liquid storage tank 1 through the liquid outlet pipeline 222 of the second vacuum tank 22 through the liquid outlet 2202 of the second vacuum tank 22. By transporting gas to the first vacuum tank 21 and the second vacuum tank 22 through the gas drying filter 4, the first vacuum tank 21 and the second vacuum tank 22 can alternately provide the liquid supply medium for the liquid storage tank 1, improving the operation efficiency and stability of the negative pressure circulation temperature control system.

[0098] When the vacuum pump 3 creates a negative pressure environment in the first vacuum tank 21 and the second vacuum tank 22, it will output water vapor carrying a liquid supply medium. The air inlet 701 of the steam separator 7 is connected to the air outlet 302 of the vacuum pump 3, so that the steam separator 7 can receive the water vapor carrying the liquid supply medium output by the vacuum pump 3. The steam separator 7 can separate the water vapor carrying the liquid supply medium output by the vacuum pump 3 into a liquid supply medium and a liquid supply medium aerosol. At the same time, the air outlet 702 of the steam separator 7 is connected to the air inlet 801 of the gas trap 8, and the liquid outlet 703 of the steam separator 7 is connected to the second liquid inlet 103 of the liquid storage tank 1, so that the separated liquid supply medium can be recovered into the liquid storage tank 1 through the liquid outlet 703 of the steam separator 7, and the liquid supply medium aerosol can be transmitted to the gas trap 8 through the air outlet 702 of the steam separator 7. Exemplarily, the steam separator 7 can specifically be a gravity separation type steam separator, a cyclone separation type steam separator or a filtration type steam separator. The steam separator 7 can effectively separate and recover the liquid supply medium contained in the water vapor output by the vacuum pump 3, thereby reducing losses, improving the operating efficiency of the negative pressure circulation temperature control system, and being able to keep the liquid level in the liquid storage tank 1 stable, improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0099] The gas trap 8 can receive the medium aerosol separated by the steam separator 7. At the same time, the gas trap 8 also includes a first cooling water inlet 805 and a first cooling water outlet 806, so that the cooling water can flow through the gas trap through the first cooling water inlet 805 and the first cooling water outlet 806, so that the gas trap 8 can cool the liquid supply medium aerosol. The liquid outlet 802 of the gas trap 8 is connected to the second liquid inlet 103 of the liquid storage tank 1, so that the gas trap 8 can recover the liquid supply medium formed by cooling the medium aerosol into the liquid storage tank 1. At the same time, the first air outlet 803 of the gas trap 8 is connected to the air inlet 402 of the gas dry filter 4, and the second air outlet 804 of the gas trap 8 is communicated with the external environment, so that the gas trap 8 can recover the gas part from which the liquid supply medium is separated to the gas dry filter 4, so that the gas dry filter 4 can dry and filter this part of the gas and output it to the first vacuum tank 21 or the second vacuum tank 22, thereby realizing the recycling of waste gas. The gas trap 8 can perform secondary treatment on the medium aerosol separated by the steam separator 7, realizing the recycling of the liquid supply medium and waste gas, improving the operating efficiency of the negative pressure circulation temperature control system. At the same time, the waste gas discharged by the gas trap 8 into the external environment does not contain the liquid supply medium, thereby optimizing the waste gas emission and reducing pollution.

[0100] Optionally, continue to refer to Figure 2, the temperature control module 01 includes a heat exchanger 02, an internal circulation pump 03, a cooling water inlet pipeline 011, a cooling water outlet pipeline 012, a heat exchange inlet pipeline 013, and a heat exchange outlet pipeline 014; the heat exchanger 02 includes a cooling water inlet, a cooling water outlet, a heat exchange inlet 023, and a heat exchange outlet 024; the internal circulation pump 03 is arranged on the heat exchange inlet pipeline 013, or the internal circulation pump 03 is arranged in the liquid storage tank 1; the cooling water inlet pipeline 011 is respectively communicated with the cooling water inlet end 05 and the cooling water inlet; the cooling water outlet pipeline 012 is respectively communicated with the cooling water outlet end 06 and the cooling water outlet; the heat exchange inlet pipeline 013 is respectively communicated with the outlet of the liquid storage tank 1 and the heat exchange inlet 023; the heat exchange outlet pipeline 014 is respectively communicated with the inlet of the liquid storage tank 1 and the heat exchange outlet 024.

[0101] Among them, the heat exchanger 02 is used to adjust the temperature of the liquid supply medium in the liquid storage tank 1 to the target temperature of the liquid supply medium required by the load end 00. Specifically, continue to refer to Figure 2 , the cooling water flows into the second cooling water inlet 021 of the heat exchanger from the cooling water inlet end 05 through the cooling water inlet pipeline 011. Under the combined action of the internal circulation pump 03 and the negative pressure in the liquid storage tank 1, the liquid supply medium in the liquid storage tank 1 flows into the heat exchange inlet 023 of the heat exchanger from the second outlet 104 of the liquid storage tank 1 through the heat exchange inlet pipeline 013, so that the cooling water and the liquid supply medium can achieve heat exchange in the heat exchanger 02. The liquid supply medium adjusted to the target temperature through heat exchange can flow back to the third inlet 105 of the liquid storage tank 1 from the heat exchange outlet 024 of the liquid storage tank 1 through the heat exchange outlet pipeline 014, so that the liquid storage tank 1 can provide the liquid supply medium with the target temperature for the load end 00. At the same time, the cooled coolant flows into the cooling water outlet end 06 from the second cooling water outlet 022 of the heat exchanger through the cooling water outlet pipeline 012 to realize the recycling of the cooling water. The heat exchanger 02 can accurately adjust the temperature of the liquid supply medium in the liquid storage tank 1 to keep it always at the target temperature required by the load end 00, thus ensuring the stable operation of the negative pressure circulation temperature control system. In addition, by adjusting the temperature of the liquid supply medium through the heat exchanger 02, the liquid supply medium does not need to pass through the heat exchanger during the process of being transported to the load end 00, avoiding the pressure loss during the liquid supply process to the load end 00, thereby improving the operation efficiency of the negative pressure circulation temperature control system.

[0102] The internal circulation pump 03 is arranged on the heat exchange liquid inlet pipeline 013, or the internal circulation pump 03 is arranged in the liquid storage tank 1 to increase the flow velocity of the liquid supply medium circulating between the heat exchanger 02 and the liquid storage tank 1, so that the liquid supply medium can pass through the heat exchanger 02 for temperature regulation faster, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. In addition, the heat exchange process of the liquid supply medium in the negative pressure circulation temperature control system is realized through the internal circulation of the liquid storage tank 1, so that the liquid storage tank 1 has a certain cold storage and heat storage capacity, that is, it can store a certain amount of cold or heat. Therefore, when the target temperature required by the load end 00 fluctuates in a short time, the liquid storage tank 1 can release or absorb heat to avoid the drastic change of the temperature of the liquid supply medium, so as to ensure that the load end 00 can continuously obtain the liquid supply medium with a stable temperature.

[0103] Optionally, the internal circulation pump is a submersible pump.

[0104] Among them, the submersible pump can be specifically understood as a pump that can be completely immersed in the liquid supply medium. The submersible pump has the characteristics of large flow rate and small lift, so as to increase the flow velocity of the liquid supply medium in the heat exchanger 02 and avoid the influence of too high lift on the stability of the negative pressure circulation temperature control system, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. In addition, since the pump body of the submersible pump can be directly immersed in the liquid storage tank 1 without additional installation space, the overall size of the negative pressure circulation temperature control system equipment can be saved, and the structural compactness and stability of the negative pressure circulation temperature control system are improved.

[0105] Optionally, continue to refer to Figure 2 , a ninth control valve 59 is arranged in the cooling water inlet pipeline 011; the negative pressure circulation temperature control system further includes a temperature sensing unit 91; the temperature sensing unit 91 is arranged in the liquid storage tank outlet pipeline 12 between the liquid storage tank 1 and the load end 00; the temperature sensing unit 91 is used to detect the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12; the negative pressure circulation temperature control system further includes a controller, and the controller is respectively communicatively connected with the ninth control valve 59 and the temperature sensing unit 91; the controller is used to control the opening degree of the ninth control valve 59 according to the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12.

[0106] Among them, the ninth control valve 59 is arranged in the cooling water inlet pipeline 011. The larger the opening degree of the ninth control valve 59, the faster the cooling water flows into the heat exchanger 02 through the cooling water inlet pipeline 011, thereby enhancing the heat exchange efficiency and enabling the temperature of the liquid supply medium to approach the target temperature faster. On the contrary, the smaller the opening degree of the ninth control valve 59, the slower the cooling water flows into the heat exchanger 02 through the cooling water inlet pipeline 011, thereby preventing overcooling. The temperature sensing unit 91 can be specifically understood as a temperature measuring thermal resistor. The temperature sensing unit 91 can detect the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12 in real time and transmit the measured temperature to the controller, so that the controller can control the opening degree of the ninth control valve 59 according to the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12 measured by the temperature sensing unit 91. By precisely controlling the opening degree of the ninth control valve 59, the cooling water flow rate in the heat exchanger 02 can be precisely controlled, thereby avoiding excessive or insufficient inflow of cooling water, reducing energy waste, ensuring that the temperature of the liquid supply medium always remains at the target temperature required by the load end 00, and improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0107] Optionally, continue to refer to Figure 3 , the controller is specifically configured to: when the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12 is greater than the target temperature, increase the opening degree of the ninth control valve 59; when the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12 is less than or equal to the target temperature, decrease the opening degree of the ninth control valve 59.

[0108] Specifically, when the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12 measured by the temperature sensing unit 91 is greater than the target temperature, it indicates that the temperature of the liquid supply medium is relatively high at this time and the heat exchange efficiency of the heat exchanger 02 needs to be enhanced. Therefore, the controller increases the opening degree of the ninth control valve 59 to increase the flow rate of the cooling water flowing into the heat exchanger 02 through the cooling water inlet pipeline 011, so that the temperature of the liquid supply medium can be reduced to the target temperature. When the temperature of the liquid supply medium in the liquid storage tank outlet pipeline 12 measured by the temperature sensing unit 91 is less than or equal to the target temperature, it indicates that the temperature of the liquid supply medium is relatively low at this time and the inflow of the cooling water in the heat exchanger 02 needs to be reduced. Therefore, the controller decreases the opening degree of the ninth control valve 59 to decrease the flow rate of the cooling water flowing into the heat exchanger 02 through the cooling water inlet pipeline 011, thereby preventing overcooling and enabling the temperature of the liquid supply medium to be raised to the target temperature. By precisely controlling the opening degree of the ninth control valve 59, it can be ensured that the temperature of the liquid supply medium always remains at the target temperature required by the load end 00, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system.

[0109] It can also be understood that the adjustment of the opening degree of the ninth control valve 59 by the controller can be achieved by combining proportional-integral-derivative (PID) control with negative cooling control. The PID control method dynamically calculates the error and adjusts the opening degree of the ninth control valve 59 to accurately and stably maintain the temperature of the liquid supply medium at the target temperature, ensuring that the temperature requirements of the load end 00 are met. The PID control method can adapt to temperature changes, thereby improving the temperature control efficiency and stability of the negative pressure circulation temperature control system. At the same time, the negative cooling control method can reduce temperature fluctuations, avoid overcooling or overheating phenomena, and ensure the real-time performance and stability of the temperature control of the negative pressure circulation temperature control system.

[0110] Optionally, continuing to refer to Figure 2 , the negative pressure circulation temperature control system further includes: a first pressure sensor 92 and a second pressure sensor 93; the first pressure sensor 92 is disposed in the liquid storage tank outlet pipeline 12 between the liquid storage tank and the load end for detecting the pressure of the liquid storage tank outlet pipeline 12; the second pressure sensor 93 is disposed in the vacuum tank inlet pipeline 210 between the load end 00 and the first vacuum tank and the second vacuum tank for detecting the pressure of the vacuum tank inlet pipeline 210; the vacuum pump 3 includes a variable frequency vacuum pump; the negative pressure circulation temperature control system further includes a controller, and the controller is respectively communicatively connected to the first pressure sensor 92, the second pressure sensor 93, and the variable frequency vacuum pump; the controller is configured to adjust the frequency of the variable frequency vacuum pump according to the pressure difference between the pressure of the liquid storage tank outlet pipeline 12 and the pressure of the vacuum tank inlet pipeline 210.

[0111] Among them, the first pressure sensor 92 is used to detect the pressure of the liquid storage tank outlet pipeline 12, the second pressure sensor 93 is used to detect the pressure of the vacuum tank inlet pipeline 210, and the vacuum tank inlet pipeline 210 is respectively communicated with the first vacuum tank inlet pipeline 211 and the second vacuum tank inlet pipeline 221. The pressure difference between the pressure of the liquid storage tank outlet pipeline 12 and the pressure of the vacuum tank inlet pipeline 210 is the negative pressure difference of the negative pressure circulation temperature control system. When the negative pressure difference of the negative pressure circulation temperature control system is too large, it may cause the liquid level in the liquid storage tank 1 to drop rapidly, and may cause bubbles to form inside the liquid storage tank outlet pipeline 12 and the vacuum tank inlet pipeline 210, resulting in unstable liquid supply and being unfavorable to the stable operation of the negative pressure circulation temperature control system; when the negative pressure difference of the negative pressure circulation temperature control system is too small, it will cause the flow rate of the liquid supply medium to decrease, so that the liquid supply volume of the liquid storage tank 1 to the load end 00 may not meet the operation requirements of the load end equipment.

[0112] The variable-frequency vacuum pump can adjust the operating frequency in real time. When the frequency of the variable-frequency vacuum pump is high, the pumping rate of the pump increases, the vacuum degrees of the first vacuum tank 21 and the second vacuum tank 22 increase, and the negative pressure difference in the negative-pressure circulation temperature control system increases; when the frequency of the variable-frequency vacuum pump is low, the pumping rate of the pump decreases, the vacuum degrees of the first vacuum tank 21 and the second vacuum tank 22 decrease, and the negative pressure difference in the negative-pressure circulation temperature control system decreases. Specifically, the controller can adjust the operating frequency of the variable-frequency vacuum pump in real time according to the negative pressure difference of the negative-pressure circulation temperature control system to ensure that the negative pressure difference of the negative-pressure circulation temperature control system is maintained within a reasonable range, thereby improving the operating efficiency and stability of the negative-pressure circulation temperature control system. At the same time, adjusting the frequency of the variable-frequency vacuum pump according to actual needs avoids the continuous high-energy consumption operation of the fixed-frequency vacuum pump, thereby improving the energy utilization rate.

[0113] Optionally, continue to refer to Figure 3 , the controller is specifically configured to: when the absolute value of the pressure difference between the pressure of the liquid storage tank liquid outlet pipeline 12 and the pressure of the vacuum tank liquid inlet pipeline 210 is greater than the threshold negative pressure, reduce the frequency of the variable-frequency vacuum pump; when the absolute value of the pressure difference between the pressure of the liquid storage tank liquid outlet pipeline 12 and the pressure of the vacuum tank liquid inlet pipeline 210 is less than or equal to the threshold negative pressure, increase the frequency of the variable-frequency vacuum pump.

[0114] Specifically, when it is determined according to the pressures measured by the first pressure sensor 92 and the second pressure sensor 93 that the absolute value of the pressure difference between the pressure of the liquid storage tank liquid outlet pipeline 12 and the pressure of the vacuum tank liquid inlet pipeline 210 is greater than the threshold negative pressure, it indicates that the negative pressure difference in the negative-pressure circulation temperature control system is large at this time. Therefore, the controller reduces the frequency of the variable-frequency vacuum pump to reduce the vacuum degrees of the first vacuum tank 21 and the second vacuum tank 22, thereby reducing the negative pressure difference in the negative-pressure circulation temperature control system; when it is determined according to the pressures measured by the first pressure sensor 92 and the second pressure sensor 93 that the absolute value of the pressure difference between the pressure of the liquid storage tank liquid outlet pipeline 12 and the pressure of the vacuum tank liquid inlet pipeline 210 is less than or equal to the threshold negative pressure, it indicates that the negative pressure difference in the negative-pressure circulation temperature control system is small at this time. Therefore, the controller increases the frequency of the variable-frequency vacuum pump to increase the vacuum degrees of the first vacuum tank 21 and the second vacuum tank 22, thereby increasing the negative pressure difference in the negative-pressure circulation temperature control system. By adjusting the operating frequency of the variable-frequency vacuum pump in real time, the negative pressure difference of the negative-pressure circulation temperature control system is ensured to be maintained within a reasonable range, thereby improving the operating efficiency and stability of the negative-pressure circulation temperature control system. Exemplarily, the operating frequency of the variable-frequency vacuum pump can be adjusted between 30HZ and 60HZ.

[0115] Optionally, the range of the threshold negative pressure is between 35Kpa and 75Kpa.

[0116] Specifically, the range of the threshold negative pressure is between 35 Kpa and 75 Kpa. That is, when the absolute value of the pressure difference between the pressure of the liquid outlet pipeline 12 of the liquid storage tank and the pressure of the liquid inlet pipeline 210 of the vacuum tank is between 35 Kpa and 75 Kpa, it can ensure that the negative pressure circulation temperature control system has a stable negative pressure traction force, enabling the liquid storage tank 1 to maintain a stable liquid supply frequency, ensuring that the liquid supply medium can be delivered to the load end 00 as required, and preventing problems such as insufficient liquid supply caused by too low negative pressure difference or too fast flow rate of the liquid supply medium and generation of bubbles due to too high negative pressure difference. By controlling the negative pressure difference of the negative pressure circulation temperature control system within the threshold negative pressure range, the temperature control efficiency and stability of the negative pressure circulation temperature control system can be improved, and the energy utilization rate can also be increased.

[0117] Optionally, continuing to refer to Figure 2 , the negative pressure circulation temperature control system further includes: a bubble detection unit 94; the bubble detection unit 94 is arranged in the vacuum tank liquid inlet pipeline 210 between the load end 00 and the first vacuum tank 21 and the second vacuum tank 22, and is used to detect the number of bubbles in the vacuum tank liquid inlet pipeline 210; the negative pressure circulation temperature control system further includes a controller, and the controller is communicatively connected to the bubble detection unit 94, and is used to output a warning message when the absolute value of the pressure difference between the pressure measured by the first pressure sensor 92 and the pressure measured by the second pressure sensor 93 is less than the normal negative pressure threshold, and the number of bubbles in the vacuum tank liquid inlet pipeline 210 is greater than the preset bubble threshold number; or, when the liquid level height of the liquid supply medium in the first vacuum tank 21 detected by the first liquid level sensor 61 is less than the normal liquid level threshold, and / or, the liquid level height of the liquid supply medium in the second vacuum tank 22 detected by the second liquid level sensor 62 is less than the normal liquid level threshold, and the bubbles in the vacuum tank liquid inlet pipeline 210 are greater than the preset bubble threshold number, output a warning message; the warning message is used to prompt that the system negative pressure is abnormal.

[0118] Among them, the bubble detection unit 94 can specifically be a bubble detector. The bubble detection unit 94 is used to detect the number of bubbles in the liquid inlet pipeline 210 of the vacuum tank and can output the detected number of bubbles in the liquid inlet pipeline 210 of the vacuum tank to the controller, so that the controller can combine the measurement data of the bubble detection unit 94, the first pressure sensor 92, the second pressure sensor 93, the first liquid level sensor 61, and the second liquid level sensor 62 to comprehensively judge whether there is leakage or abnormal operation in the negative pressure circulation temperature control system. Specifically, when the absolute value of the pressure difference between the pressure measured by the first pressure sensor 92 and the pressure measured by the second pressure sensor 93 is less than the normal negative pressure threshold, and the number of bubbles in the liquid inlet pipeline 210 of the vacuum tank is greater than the preset bubble threshold number, that is, when the negative pressure difference of the negative pressure circulation temperature control system is too small and the number of bubbles increases abnormally, it indicates that there may be air leakage or pipeline breakage in the negative pressure circulation temperature control system. At this time, the controller can output a warning message. When the liquid level height of the liquid supply medium in the first vacuum tank 21 detected by the first liquid level sensor 61 is less than the normal liquid level threshold, and / or the liquid level height of the liquid supply medium in the second vacuum tank 22 detected by the second liquid level sensor 62 is less than the normal liquid level threshold, and the number of bubbles in the liquid inlet pipeline 210 of the vacuum tank is greater than the preset bubble threshold number, that is, when the liquid level in the first vacuum tank 21 and / or the second vacuum tank 22 is too low and the number of bubbles increases abnormally, it indicates that the liquid supply medium cannot be replenished in time in the first vacuum tank 21 and / or the second vacuum tank 22 at this time, and there may be air leakage or pipeline breakage in the negative pressure circulation temperature control system. At this time, the controller can output a warning message. By combining the number of bubbles, the negative pressure difference, and the liquid level height, the controller can accurately judge whether there is leakage, abnormal liquid supply, or abnormal negative pressure in the negative pressure circulation temperature control system and can output a warning message in time in case of abnormality. The warning message is used to prompt the system that the negative pressure is abnormal, so as to timely remind the operator to repair the negative pressure circulation temperature control system, thereby effectively avoiding situations such as pump damage and negative pressure fluctuation caused by air entering the pipeline inside the negative pressure circulation temperature control system, thus improving the overall safety and reliability of the negative pressure circulation temperature control system.

[0119] In an optional embodiment, the negative pressure circulation temperature control system may further include a warning unit. The controller is communicatively connected to the warning unit, so that when the controller detects that there is an abnormal negative pressure situation in the negative pressure circulation temperature control system, it can send the warning message to the warning unit. The warning unit can provide a warning to the operator in time through sound alarm, visual warning, or remote feedback, improving the accuracy, intuitiveness, and timeliness of the warning of the negative pressure circulation temperature control system, ensuring that the operator can respond quickly and check and maintain the negative pressure circulation temperature control system, preventing potential failures from further expanding, and thus ensuring the stable operation of the negative pressure circulation temperature control system.

[0120] Optionally, continue to refer to Figure 2The negative pressure circulation temperature control system also includes: a flow detection unit 95; the flow detection unit 95 is arranged in the liquid storage tank outlet pipeline 12 between the liquid storage tank 1 and the load end 00, and is used to detect the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12; the negative pressure circulation temperature control system also includes a controller, which is communicated with the flow detection unit 95 and is used to control the suction volume of the vacuum pump 3 according to the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12.

[0121] The flow detection unit 95 may specifically be a flow meter, which is used to detect the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12, and can output the detected flow of the liquid supply medium in the liquid storage tank outlet pipeline 12 to the controller, so that the controller can control the suction volume of the vacuum pump 3 according to the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12. Specifically, when the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12 is large, the controller can increase the suction volume of the vacuum pump 3 to maintain the circulation flow of the liquid supply medium in the negative pressure circulation temperature control system; when the flow of the liquid supply medium in the liquid storage tank outlet pipeline 12 is small, the controller can reduce the suction volume of the vacuum pump 3, thereby reducing unnecessary energy consumption and avoiding the problem of a large number of bubbles in the pipeline of the negative pressure circulation temperature control system caused by excessive suction. The controller controls the suction volume of the vacuum pump 3 according to the flow rate of the liquid supply medium in the liquid storage tank outlet pipeline 12, thereby improving the operating efficiency and stability of the negative pressure circulation temperature control system, improving energy utilization, and extending the service life of the equipment in the negative pressure circulation temperature control system.

[0122] Optionally, the ratio between the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank ranges from 3:1 to 5:1.

[0123] Specifically, the controller controls the suction volume of the vacuum pump 3 according to the flow rate of the liquid supply medium in the liquid outlet pipeline 12 of the liquid storage tank, so as to control the ratio between the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank to be between 3:1 and 5:1. When the ratio between the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is between 3:1 and 5:1, the negative pressure circulation temperature control system can use a smaller negative pressure driving force to effectively drive more liquid supply medium to circulate, thereby improving the negative pressure circulation temperature control system's ability to convey the liquid supply medium and reducing the workload of the vacuum pump. By controlling the suction volume of the vacuum pump and the flow rate of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank within an appropriate range, it is possible to ensure the operating efficiency of the negative pressure circulation temperature control system while taking into account energy saving, stability and safety, which helps to improve the overall performance of the negative pressure circulation temperature control system.

[0124] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps recited in the present invention can be executed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution disclosed in the present invention can be achieved, and no limitation is made herein.

[0125] The above specific embodiments do not constitute a limitation on the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub - combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

Claims

1. A negative pressure circulation temperature control system, characterized in that, Comprising: A liquid storage tank, connected to the load end, for providing a liquid supply medium at a target temperature to the load end; A first vacuum tank, connected to the load end and to the liquid storage tank, for receiving the liquid supply medium from the load end and providing the liquid supply medium to the liquid storage tank; A second vacuum tank, connected to the load end and to the liquid storage tank, for receiving the liquid supply medium from the load end and providing the liquid supply medium to the liquid storage tank; A vacuum pump, connected to the first vacuum tank and to the second vacuum tank, for alternately creating a negative pressure environment in the first vacuum tank and the second vacuum tank to utilize the negative pressure environment to alternately provide the liquid supply medium to the liquid storage tank by the first vacuum tank and the second vacuum tank; A temperature control module, connected to the liquid storage tank, for adjusting the temperature of the liquid supply medium in the liquid storage tank to the target temperature; The vacuum pump is connected to the outlet of the second vacuum tank through a first control valve; The vacuum pump is connected to the outlet of the first vacuum tank through a second control valve; The inlet of the second vacuum tank is connected to a third control valve; The inlet of the first vacuum tank is connected to a fourth control valve; The inlet of the second vacuum tank is connected to the load end through a fifth control valve; The inlet of the first vacuum tank is connected to the load end through a sixth control valve; The outlet of the second vacuum tank is connected to the inlet of the liquid storage tank through a seventh control valve; The outlet of the first vacuum tank is connected to the inlet of the liquid storage tank through an eighth control valve; A first liquid level sensor is provided in the first vacuum tank, and the first liquid level sensor is used to detect the liquid level height of the liquid supply medium in the first vacuum tank; A second liquid level sensor is provided in the second vacuum tank, and the second liquid level sensor is used to detect the liquid level height of the liquid supply medium in the second vacuum tank; The negative pressure circulation temperature control system further includes a controller, and the controller is communicatively connected to the first liquid level sensor, the second liquid level sensor, the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve, and the eighth control valve respectively; The controller is used to control the opening or closing of the first control valve, the second control valve, the third control valve, the fourth control valve, the fifth control valve, the sixth control valve, the seventh control valve, and the eighth control valve according to the liquid level height of the liquid supply medium in the first vacuum tank and the liquid level height of the liquid supply medium in the second vacuum tank.

2. The negative pressure circulation temperature control system according to claim 1, characterized in that, Specifically, the controller is used for: When the liquid level height of the liquid supply medium in the first vacuum tank is greater than a first low liquid level threshold and less than a first high liquid level threshold, controlling the second control valve and the sixth control valve to open, and the first control valve and the fifth control valve to close; When the liquid level height of the liquid supply medium in the first vacuum tank is greater than or equal to the first high liquid level threshold, controlling the fourth control valve and the eighth control valve to open; When the liquid level height of the liquid supply medium in the first vacuum tank is less than or equal to the first low liquid level threshold value, control the fourth control valve and the eighth control valve to close; When the liquid level height of the liquid supply medium in the second vacuum tank is greater than the second low liquid level threshold value and less than the second high liquid level threshold value, control the first control valve and the fifth control valve to open, and the second control valve and the sixth control valve to close; When the liquid level height of the liquid supply medium in the second vacuum tank is greater than or equal to the second high liquid level threshold value, control the third control valve and the seventh control valve to open; When the liquid level height of the liquid supply medium in the second vacuum tank is less than or equal to the second low liquid level threshold value, control the third control valve and the seventh control valve to close.

3. The negative pressure circulation temperature control system according to claim 1, characterized in that, It further includes: A gas drying filter, a steam-water separator, and a gas trap; The air outlet of the gas drying filter is connected to the air inlet of the first vacuum tank and is also connected to the air inlet of the second vacuum tank; The air inlet of the steam-water separator is connected to the air outlet of the vacuum pump; the air outlet of the steam-water separator is connected to the air inlet of the gas trap; the liquid outlet of the steam-water separator is connected to the liquid inlet of the liquid storage tank; the steam-water separator is used to separate the water vapor of the liquid supply medium output by the vacuum pump into the liquid supply medium and the liquid supply medium aerosol mist, and the separated liquid supply medium is recovered into the liquid storage tank through the liquid outlet of the steam-water separator, and the liquid supply medium aerosol mist is transmitted to the gas trap through the air outlet of the steam-water separator; The liquid outlet of the gas trap is connected to the liquid inlet of the liquid storage tank; the first air outlet of the gas trap is connected to the air inlet of the gas drying filter; the second air outlet of the gas trap is communicated with the external environment; the gas trap is used to cool the liquid supply medium aerosol mist, and the liquid supply medium obtained by cooling the liquid supply medium aerosol mist is recovered into the liquid storage tank through the liquid outlet of the gas trap.

4. The negative pressure circulation temperature control system according to claim 1, characterized in that, The temperature control module includes: A heat exchanger, an internal circulation pump, a cooling water inlet pipeline, a cooling water outlet pipeline, a heat exchange inlet pipeline, and a heat exchange outlet pipeline; The heat exchanger includes a cooling water inlet, a cooling water outlet, a heat exchange inlet, and a heat exchange outlet; The internal circulation pump is arranged on the heat exchange inlet pipeline, or the internal circulation pump is arranged in the liquid storage tank; The cooling water inlet pipeline is respectively communicated with the cooling water inlet end and the cooling water inlet; the cooling water outlet pipeline is respectively communicated with the cooling water outlet end and the cooling water outlet; the heat exchange inlet pipeline is respectively communicated with the second liquid outlet of the liquid storage tank and the heat exchange inlet; the heat exchange outlet pipeline is respectively communicated with the third liquid inlet of the liquid storage tank and the heat exchange outlet.

5. The negative pressure circulation temperature control system according to claim 4, wherein, The internal circulation pump is a submersible pump.

6. The negative pressure circulation temperature control system according to claim 4, characterized in that A ninth control valve is arranged in the cooling water inlet pipeline; The negative pressure circulation temperature control system further includes a temperature sensing unit; the temperature sensing unit is arranged in the liquid storage tank liquid outlet pipeline between the liquid storage tank and the load end; the temperature sensing unit is used to detect the temperature of the liquid supply medium in the liquid storage tank liquid outlet pipeline; The negative pressure circulation temperature control system further includes a controller, and the controller is respectively communicatively connected with the ninth control valve and the temperature sensing unit; the controller is used to control the opening degree of the ninth control valve according to the temperature of the liquid supply medium in the liquid storage tank liquid outlet pipeline.

7. The negative pressure circulation temperature control system according to claim 6, characterized in that, Specifically, the controller is used for: When the temperature of the liquid supply medium in the liquid storage tank liquid outlet pipeline is greater than the target temperature, increasing the opening degree of the ninth control valve; When the temperature of the liquid supply medium in the liquid storage tank liquid outlet pipeline is less than or equal to the target temperature, decreasing the opening degree of the ninth control valve.

8. The negative pressure circulation temperature control system according to claim 1, wherein It further includes: A first pressure sensor and a second pressure sensor; the first pressure sensor is arranged in the liquid storage tank liquid outlet pipeline between the liquid storage tank and the load end and is used to detect the pressure of the liquid storage tank liquid outlet pipeline; the second pressure sensor is arranged in the vacuum tank liquid inlet pipeline between the load end and the first vacuum tank and the second vacuum tank and is used to detect the pressure of the vacuum tank liquid inlet pipeline; The vacuum pump includes a variable frequency vacuum pump. The negative pressure circulation temperature control system further includes a controller, and the controller is respectively communicatively connected with the first pressure sensor, the second pressure sensor and the variable frequency vacuum pump; the controller is used to adjust the frequency of the variable frequency vacuum pump according to the pressure difference between the pressure of the liquid storage tank liquid outlet pipeline and the pressure of the vacuum tank liquid inlet pipeline.

9. The negative pressure circulation temperature control system according to claim 8, wherein Specifically, the controller is used for: When the absolute value of the pressure difference between the pressure of the liquid storage tank liquid outlet pipeline and the pressure of the vacuum tank liquid inlet pipeline is greater than the threshold negative pressure, decreasing the frequency of the variable frequency vacuum pump; When the absolute value of the pressure difference between the pressure of the liquid storage tank liquid outlet pipeline and the pressure of the vacuum tank liquid inlet pipeline is less than or equal to the threshold negative pressure, increasing the frequency of the variable frequency vacuum pump.

10. The negative pressure circulation temperature control system according to claim 9, characterized in that, The range of the threshold negative pressure is between 35Kpa and 75Kpa.

11. The negative pressure circulation temperature control system according to claim 8, wherein It further includes: A bubble detection unit; the bubble detection unit is arranged in the vacuum tank liquid inlet pipeline between the load end and the first vacuum tank and the second vacuum tank and is used to detect the number of bubbles in the vacuum tank liquid inlet pipeline; The negative pressure circulation temperature control system further includes a controller, and the controller is communicatively connected with the bubble detection unit and is used to output a warning message when the absolute value of the pressure difference between the pressure measured by the first pressure sensor and the pressure measured by the second pressure sensor is less than the normal negative pressure threshold and the number of bubbles in the vacuum tank liquid inlet pipeline is greater than the preset bubble threshold number. Alternatively, when the liquid level height of the liquid supply medium in the first vacuum tank detected by the first liquid level sensor is less than the normal liquid level threshold, and / or, the liquid level height of the liquid supply medium in the second vacuum tank detected by the second liquid level sensor is less than the normal liquid level threshold, and the number of bubbles in the liquid supply pipeline of the vacuum tank is greater than the preset bubble threshold number, the warning information is output; The warning information is used to prompt abnormal system negative pressure.

12. The negative pressure circulation temperature control system according to claim 1, wherein It further includes: A flow detection unit; the flow detection unit is arranged in the liquid outlet pipeline of the liquid storage tank between the liquid storage tank and the load end, and is used to detect the flow of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank; The negative pressure circulation temperature control system further includes a controller, and the controller is communicatively connected to the flow detection unit, and is used to control the suction and discharge volume of the vacuum pump according to the flow of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank.

13. The negative pressure circulation temperature control system according to claim 12, characterized in that, The proportional range between the suction and discharge volume of the vacuum pump and the flow of the liquid supply medium in the liquid outlet pipeline of the liquid storage tank is between 3:1 and 5:1.

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