Graphite boat drying equipment and drying method

Abstract

The invention discloses graphite boat drying equipment and a drying method.The graphite boat drying equipment comprises a shell, a partition plate is integrally formed on the shell and divides the interior of the shell into a drying part and a mounting part, a scavenging valve is mounted on the shell and communicates with the drying part, and the mounting part is mounted on the shell and communicates with the drying part. The graphite boat drying equipment further comprises a heating mechanism, a plurality of carrying mechanisms and a control mechanism, the heating mechanism is arranged in the installation part and comprises a drying machine, a first gas conveying pipe and a second gas conveying pipe are installed on the drying machine, and drying gas blown out of the drying machine is guided into the drying part through the first gas conveying pipe. According to the graphite boat drying equipment and the drying method, the drying time of batch graphite boats is effectively shortened, the drying efficiency is improved, meanwhile, energy consumption can be reduced, the cost can be reduced, the service life of the equipment can be prolonged, the use cost is reduced, and remarkable economic benefits are brought to enterprises.

Description

Technical Field

[0001] The invention belongs to the technical field of drying equipment, and in particular relates to a graphite boat drying equipment and a drying method. Background Art

[0002] In the production process of photovoltaic cells, graphite boats are used as an important loading tool to carry silicon wafers and perform processes such as PECVD (plasma enhanced chemical vapor deposition). With its excellent electrical and thermal conductivity, graphite boats can meet the high requirements of silicon nitride coating and other processes for loading tools, thereby ensuring the stability and quality of silicon wafer coating.

[0003] However, during the PECVD process, if the silicon nitride film on the surface of the graphite boat is too thick, it is easy to cause uneven coating of the cell and the generation of color difference films, thus affecting product quality and production efficiency. Therefore, the graphite boat needs to be cleaned and dried.

[0004] Traditional drying equipment needs to heat the graphite boat to 140°C during operation and continue drying at this temperature for 10-12 hours. However, the temperature of the graphite boat and the drying equipment after drying is high, and the staff can only take out the graphite boat after the temperature cools down, resulting in long waiting time and affecting the drying efficiency of batches of graphite boats. In addition, the drying equipment needs to reheat the furnace when drying the next batch of graphite boats, which will seriously waste energy and significantly increase production costs. Frequent cooling and heating of the drying equipment will also affect the life of the drying equipment and increase the probability of damage to the drying equipment.

[0005] Therefore, in view of the above technical problems, it is necessary to provide a graphite boat drying device and a drying method.

[0006] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0007] The object of the present invention is to provide a graphite boat drying device and a drying method, which can solve the above problems.

[0008] In order to achieve the above-mentioned purpose, a specific embodiment of the present invention provides a graphite boat drying device, including a shell, a partition plate integrally formed on the shell, the partition plate divides the interior of the shell into a drying part and an installation part, a ventilation valve is installed on the shell, the ventilation valve and the drying part are connected, the graphite boat drying device also includes a heating mechanism, multiple conveying mechanisms and a control mechanism, the heating mechanism is arranged in the installation part, the heating mechanism includes a dryer, a first air pipe and a second air pipe are installed on the dryer, the drying gas blown out of the dryer is introduced into the drying part through the first air pipe, and the second air pipe runs through the shell; the conveying mechanism includes a door panel, a third sealing plate, a bottom plate and an air dispersion box are provided on the door panel, a second sliding groove and a wheel groove are opened on the bottom plate, a slide rail matching the second sliding groove is fixedly connected to the shell, and a moving wheel is rotatably connected in the wheel groove; a control panel for operating the control mechanism is installed on the shell.

[0009] In one or more embodiments of the present invention, there are multiple gas diffuser boxes, each of which is provided with a gas injection hole. A connecting pipe is installed on each of the multiple gas diffuser boxes, and the connecting pipe is used to connect the multiple gas diffuser boxes. A connecting component is provided on the partition plate, and the connecting component is used to transport the gas in the first gas pipe to the connecting pipe, and spray the drying gas through the gas injection hole, which is beneficial to the rapid drying of the graphite boat.

[0010] In one or more embodiments of the present invention, a first sealing plate and a second sealing plate are fixedly connected to the partition plate, and one end of the first sealing plate and the second sealing plate away from the partition plate are fixedly connected to the upper plate of the shell, and a pressurized space is formed between the shell, the partition plate, the first sealing plate and the second sealing plate, the first air supply pipe extends into the pressurized space, and the connecting component is arranged on the partition plate in the pressurized space.

[0011] In one or more embodiments of the present invention, the connecting component includes a first sleeve, a first sliding groove matching the first sleeve is provided on the partition plate, an air inlet is provided on the first sleeve, a ventilation groove matching the first sliding groove is provided on the partition plate, the ventilation groove is L-shaped, one end of the ventilation groove is connected to the first sliding groove, a connecting plate is integrally formed on the first sleeve, a second sleeve is integrally formed on the connecting plate, a third sleeve is slidably connected to the second sleeve, an end of the third sleeve away from the connecting plate is fixedly connected to a fixing frame, a spring is fixedly connected to the fixing frame, an end of the spring away from the fixing frame is fixedly connected to the connecting plate, a through groove matching the third sleeve is provided on the partition plate, the third sleeve is fixed in the through groove, and the drying gas enters the connecting pipe from the ventilation groove through the hanging sliding of the first sleeve.

[0012] In one or more embodiments of the present invention, a baffle is fixedly connected to the outer wall of the connecting pipe.

[0013] In one or more embodiments of the present invention, a filter is installed on the first gas supply pipe.

[0014] In one or more embodiments of the present invention, a third air supply pipe is installed on the dryer, the third air supply pipe passes through the partition plate, and the third air supply pipe is connected to the drying part.

[0015] In one or more embodiments of the present invention, a rotating shaft is provided on the moving wheel, a reel is fixedly connected to the locking rotating shaft, and a coil spring is installed on the reel.

[0016] In one or more embodiments of the present invention, a cleaning box matching the moving wheel is embedded in the lower panel of the base plate, an air bag is arranged in the cleaning box, and a wiping block is adhered to the air bag.

[0017] In order to achieve the above object, a specific embodiment of the present invention provides a graphite boat drying method, comprising the following steps:

[0018] S1. Place the graphite boat to be dried on the transport mechanism, and evenly distribute the graphite boat on the gas diffuser box, and then push the transport mechanism into the drying part of the drying equipment;

[0019] S2, start the heating mechanism, the dryer delivers drying gas to the pressurized space, as the air pressure in the pressurized space increases, the connecting component in the pressurized space connects the first gas delivery pipe and the connecting pipe, the drying gas on the dryer enters the connecting pipe, and finally sprays out from the baffle to dry the graphite boat;

[0020] S3. After the graphite boat is dried, a command is sent to the control mechanism through the control panel, so that the dryer delivers room temperature gas, and at the same time, the ventilation valve is controlled to open to discharge the gas in the drying section, and then the transport mechanism in the drying section is pulled out.

[0021] Compared with the prior art, the graphite boat drying equipment and drying method of the present invention effectively shorten the drying time of batches of graphite boats and improve the drying efficiency. At the same time, it can reduce energy consumption, reduce costs, extend the service life of the equipment, and reduce the cost of use, bringing significant economic benefits to the enterprise. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the prior art descriptions. Obviously, the drawings described below are only some embodiments recorded in the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0023] Figure 1 A schematic diagram of the structure of a graphite boat drying device in one embodiment of the present invention Figure 1 ;

[0024] Figure 2 A schematic diagram of the structure of a graphite boat drying device in one embodiment of the present invention Figure 2 ;

[0025] Figure 3 This is a structural schematic diagram of a conveying mechanism of a graphite boat drying device in one embodiment of the present invention;

[0026] Figure 4 A cross-sectional view of a graphite boat drying device in one embodiment of the present invention Figure 1 ;

[0027] Figure 5 for Figure 4 The structural diagram at A in the middle;

[0028] Figure 6 A cross-sectional view of a graphite boat drying device in one embodiment of the present invention Figure 2 ;

[0029] Figure 7 for Figure 6 Schematic diagram of the structure at B in the middle;

[0030] Figure 8 is a cross-sectional view of a connected component;

[0031] Fig. 9 A cross-sectional view of a graphite boat drying device in one embodiment of the present invention Figure 3 ;

[0032] Fig.10 for Fig. 9 The structural diagram at C in the middle;

[0033] Fig.11 A cross-sectional view of the cleaning box.

[0034] Description of main reference numerals:

[0035] 1. Shell; 11. Control panel; 12. Partition plate; 121. First sliding groove; 122. Through groove; 123. Ventilation groove; 13. First sealing plate; 14. Second sealing plate; 15. Dryer; 151. First air pipe; 152. Second air pipe; 153. Third air pipe; 16. Slide rail; 17. Ventilation valve; 2. Filter; 3. Door plate; 31. Third sealing plate; 32. Bottom plate; 321. Second sliding groove; 322. Wheel groove; 323. Moving wheel; 3231. Scroll; 33. Air dispersion box; 331. Jet hole; 34. Connecting pipe; 341. Baffle; 4. First sleeve; 401. Air inlet; 41. Connecting plate; 411. Second sleeve; 42. Third sleeve; 421. Fixing frame; 422. Spring; 5. Cleaning box; 51. Air bag; 511. Wiping block. DETAILED DESCRIPTION

[0036] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0037] like Figures 1 to 9 As shown, a graphite boat drying device in one embodiment of the present invention includes a housing 1, on which a partition plate 12 is integrally formed, and the partition plate 12 divides the interior of the housing 1 into a drying part and an installation part. A ventilation valve 17 is installed on the housing 1, and the ventilation valve 17 is connected to the drying part. The graphite boat drying device also includes a heating mechanism, a plurality of conveying mechanisms, a conveying mechanism, and a control mechanism.

[0038] The heating mechanism is arranged in the installation part, and the heating mechanism includes a dryer 15. The dryer 15 is installed with a first air pipe 151 and a second air pipe 152. The drying gas blown out from the dryer 15 is introduced into the drying part through the first air pipe 151, and the second air pipe 152 runs through the shell 1; the conveying mechanism includes a door panel 3, and the door panel 3 is provided with a third sealing plate 31, a bottom plate 32 and an air dispersion box 33. The bottom plate 32 is provided with a wheel groove 322, and a moving wheel 323 is rotatably connected in the wheel groove 322; the control mechanism can control the operation of the heating mechanism, and a control panel 11 for operating the control mechanism is installed on the shell 1.

[0039] Specifically, the graphite boat to be dried is placed on the gas dispersion box 33, and then the transport mechanism is pushed into the housing 1. By operating the control panel 11 to issue a command to the control mechanism to make the dryer 15 work, the graphite boat can be dried.

[0040] After the graphite boat is dried to a qualified degree, the ventilation valve 17 is opened through the control panel 11, and the dryer 15 is controlled to stop heating the gas, and instead absorbs air through the second air pipe 152, and delivers the air to the drying section and then quickly discharges it from the ventilation valve 17, thereby reducing the temperature in the drying section to a certain extent. When the temperature in the drying section drops below 80°C, the transport mechanism in the drying section is pulled out, the graphite boat on the transport mechanism is placed at room temperature to cool, and then a new transport mechanism is loaded into the drying section. In this way, there is no need to wait for the drying equipment and the graphite boat to cool completely, which can greatly shorten the time for picking up and placing the graphite boat and improve the drying efficiency.

[0041] In addition, when drying the next batch of graphite boats, it is only necessary to place the graphite boats on the next prepared transport mechanism in advance, and then send the graphite boats into the drying equipment through the transport mechanism. At this time, the temperature of the inner wall of the drying part of the drying equipment is slightly reduced, and there is no need to warm up the furnace. The above can save the energy consumption required for the drying equipment to reheat the furnace, and can also reduce the temperature difference of the drying equipment during frequent cooling and heating, reduce the probability of equipment damage and extend the service life of the equipment.

[0042] According to human tolerance experiments, people will not be harmed if they stay at 70℃ for 15 minutes in a dry environment. When the conveying mechanism is pulled out, the high-temperature gases exhausted from the conveying mechanism and the drying part will be dissipated into the air. At this time, the temperature around the conveying mechanism is around 50℃ and the staff will not be harmed.

[0043] Preferably, when pulling out the conveying mechanism of the drying section, the staff stands directly behind the door panel 3 to prevent the high-temperature gas of the drying section from directly hitting the staff's face, thereby further protecting the staff.

[0044] like Figure 3 , Fig. 9 and Fig.10 As shown, a rotating shaft is provided on the moving wheel 323 on the housing 1, a reel 3231 is welded on the locking rotating shaft, and a coil spring is installed on the reel 3231. Specifically, the transport mechanism is pushed to align the second sliding groove 321 on the bottom plate 32 with the slide rail 16. When the bottom plate 32 gradually enters the housing 1, the lower panel of the housing 1 will be connected with the moving wheel 323, and the transport mechanism will continue to be pushed into the housing 1, and the moving wheel 323 will rotate in the wheel groove 322. At this time, the bottom plate 32 slides on the slide rail 16 through the second sliding groove 321, and the moving wheel 323 will enter the wheel groove 322, which will not block the transport mechanism from entering the drying section. When pulled out, the rebound force of the coil spring on the reel 3231 of the moving wheel 323 can rotate the moving wheel 323, and the moving wheel 323 is vertically supported on the ground with the bottom plate 32 again, so that the transport mechanism can be used as a trolley.

[0045] It is worth noting that since the moving wheel 323 is in contact with the ground, when the moving wheel 323 enters the housing 1, the dust adhered to the moving wheel 323 will also enter the housing 1, causing the housing 1 to be contaminated, which may cause the graphite boat to be contaminated again.

[0046] In order to solve the above problem, the size of the bottom plate 32 is the same as that of the drying part, and when the bottom plate 32 is inserted into the drying part, the moving wheel 323 can be separated. At the same time, a cleaning box 5 matching the moving wheel 323 is embedded and installed on the lower panel of the bottom plate 32, and an air bag 51 is arranged in the cleaning box 5, and a wiping block 511 is bonded to the air bag 51.

[0047] Specifically, at room temperature, the airbag 51 does not expand, and the exposed surface of the wiping block 511 is concave at the lower end surface of the bottom plate 32. When the bottom plate 32 is located inside the housing 1, the heat of the drying section is transferred to the cleaning box 5 through the bottom plate 32, the airbag 51 expands due to the heat, and the wiping block 511 protrudes from the lower end surface of the bottom plate 32. When the transport mechanism in the housing 1 is pulled out, the wiping block 511 will clean the position where the moving wheel 323 and the lower panel of the housing 1 meet.

[0048] In order to dry the graphite boat more quickly, Figures 4 to 9 As shown, there are multiple gas diffusion boxes 33, each of which is provided with an air injection hole 331. A connecting pipe 34 is installed on the multiple gas diffusion boxes 33, and the connecting pipe 34 is used to achieve the connection between the multiple gas diffusion boxes 33. A connecting component is provided on the partition plate 12, and the connecting component is used to transport the gas in the first gas pipe 151 to the connecting pipe 34.

[0049] Specifically, the graphite boat is evenly placed on the gas diffusion box 33, and the connecting pipe 34 is connected to the first gas pipe 151. The gas in the first gas pipe 151 passes through the connecting pipe 34 and is ejected from multiple jet holes 331, thereby increasing the gas flow rate around the graphite boat and accelerating the drying time of the graphite boat.

[0050] When the conveying mechanism is pushed into the drying section, because the first air pipe 151 and the connecting pipe 34 are both inside the shell 1, in order to achieve the connection and separation of the first air pipe 151 and the connecting pipe 34. The first sealing plate 13 and the second sealing plate 14 are integrally formed on the partition plate 12, and the ends of the first sealing plate 13 and the second sealing plate 14 away from the partition plate 12 are integrally formed on the upper panel of the shell 1, and a pressurized space is formed between the shell 1, the partition plate 12, the first sealing plate 13 and the second sealing plate 14, and the first air pipe 151 extends into the pressurized space, and the connecting component is arranged on the partition plate 12 in the pressurized space.

[0051] Specifically, the connecting component includes a first sleeve 4, a first sliding groove 121 matching the first sleeve 4 is provided on the partition plate 12, an air inlet 401 is provided on the first sleeve 4, a ventilation groove 123 matching the first sliding groove 121 is provided on the partition plate 12, the ventilation groove 123 is L-shaped, one end of the ventilation groove 123 is connected to the first sliding groove 121, a connecting plate 41 is integrally formed on the first sleeve 4, a second sleeve 411 is integrally formed on the connecting plate 41, a third sleeve 42 is slidably connected to the second sleeve 411, a fixing frame 421 is welded to the end of the third sleeve 42 away from the connecting plate 41, a spring 422 is welded to the fixing frame 421, and an end of the spring 422 away from the fixing frame 421 is welded to the connecting plate 41, a through groove 122 matching the third sleeve 42 is provided on the partition plate 12, and the third sleeve 42 is fixed in the through groove 122.

[0052] Specifically, under normal conditions, the lower end surface of the first sleeve 4 is higher than the upper end surface of the connecting pipe 34, and the transport mechanism can smoothly enter the drying section. After the transport mechanism is pushed into the drying section, the connecting pipe 34 is located directly below the first sleeve 4, and the dryer 15 is started. The drying gas flowing out of the first gas pipe 151 enters the pressurized space. As the air pressure in the pressurized space increases, the air pressure pushes the connecting plate 41. At this time, the spring 422 is stretched by the pressure, and the second sleeve 411 slides downward in the third sleeve 42. The first sleeve 4 is gradually sleeved on the connecting pipe 34 until the air inlet 401 is connected to the ventilation groove 123. The drying gas in the pressurized space can pass through the ventilation groove 123 and the first sleeve 4 and then enter the connecting pipe 34, and finally be ejected from the jet hole 331.

[0053] After drying is completed, the dryer 15 stops working, the gas in the drying section is discharged by the ventilation valve 17, and the air pressure in the pressurized space will gradually decrease. While the spring 422 retracts and pulls the connecting plate 41 upward, the first sleeve 4 will also slide upward in the first sliding groove 121, and the first sleeve 4 and the connecting pipe 34 are separated, which will not affect the removal of the conveying mechanism from the drying section.

[0054] Furthermore, a baffle plate 341 is integrally formed on the outer wall of the connecting pipe 34. When the first sleeve 4 abuts against the baffle plate 341, the air inlet 401 is just connected to the vent groove 123, so that the first sleeve 4 is positioned.

[0055] In addition, the first sleeve 4 is sleeved on the connecting pipe 34, which can not only input the drying gas output from the dryer 15 into the connecting pipe 34, but also clamp the connecting pipe 34 to prevent the increase of air pressure in the drying section from causing the conveying mechanism to detach from the drying section.

[0056] Furthermore, a third gas pipe 153 is installed on the dryer 15, and the third gas pipe 153 penetrates the partition plate 12, and the third gas pipe 153 is connected to the drying part. Specifically, when drying the graphite boat, the dryer 15 absorbs high-temperature gas from the drying part to realize the circulation of the drying gas, thereby reducing the energy required by the dryer 15 to heat the gas.

[0057] Furthermore, because the water on the graphite boat will turn into water vapor during drying, a filter 2 is installed on the first air pipe 151. The filter 2 can absorb the water vapor flowing in the first air pipe 151, so that the drying gas ejected from the jet hole 331 is dry, thereby accelerating the drying speed of the graphite boat.

[0058] A graphite boat drying method comprises the following steps:

[0059] S1. Place the graphite boat to be dried on the transport mechanism, and evenly distribute the graphite boat on the gas diffuser box 33, and then push the transport mechanism into the drying part of the drying equipment;

[0060] S2, start the heating mechanism, the dryer 15 delivers drying gas into the pressurized space, as the air pressure in the pressurized space increases, the connecting component in the pressurized space connects the first air delivery pipe 151 and the connecting pipe 34, the drying gas on the dryer 15 enters the connecting pipe 34, and finally sprays out from the jet hole 331 to dry the graphite boat;

[0061] S3. After the graphite boat is dried, a command is sent to the control mechanism through the control panel 11, so that the dryer 15 delivers room temperature gas, and at the same time, the ventilation valve 17 is controlled to open to discharge the gas in the drying section, and then the transport mechanism in the drying section is pulled out.

[0062] When in use, the graphite boat to be dried is placed on the gas diffuser box 33, and then the transport mechanism is pushed to allow the gas diffuser box 33 to enter the drying portion on the housing 1. The control panel 11 sends a command to the control mechanism to start the dryer 15. The drying gas output by the dryer 15 first enters the pressurized space, so that the first sleeve 4 is sleeved on the connecting pipe 34, and the first gas delivery pipe 151 and the connecting pipe 34 are connected, and finally the drying gas is sprayed from the jet hole 331 to dry the graphite boat on the gas diffuser box 33.

[0063] After the graphite boat is dried, the moving mechanism on the housing 1 is pulled out, and the next moving mechanism that is ready is pushed into the drying section.

[0064] Compared with the prior art, the graphite boat drying equipment and drying method of the present invention effectively shorten the drying time of batches of graphite boats and improve the drying efficiency. At the same time, it can reduce energy consumption, reduce costs, extend the service life of the equipment, and reduce the cost of use, bringing significant economic benefits to the enterprise.

[0065] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0066] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A graphite boat drying device, comprising a shell, characterized in that: The shell is integrally formed with a partition plate, the partition plate divides the interior of the shell into a drying part and a mounting part, the shell is installed with a ventilation valve, the ventilation valve is connected to the drying part, and the graphite boat drying equipment also includes: A heating mechanism, the heating mechanism is arranged in the installation part, the heating mechanism comprises a dryer, a first gas pipe and a second gas pipe are installed on the dryer, the drying gas blown out of the dryer is introduced into the drying part through the first gas pipe, and the second gas pipe runs through the shell; A plurality of transport mechanisms, wherein the transport mechanisms include a door plate, a third sealing plate, a bottom plate and a gas dispersion box are provided on the door plate, a second sliding groove and a wheel groove are provided on the bottom plate, a slide rail matching the second sliding groove is fixedly connected to the housing, and a moving wheel is rotatably connected in the wheel groove; A control mechanism, wherein a control panel for operating the control mechanism is mounted on the housing.

2. The graphite boat drying equipment according to claim 1, characterized in that: There are multiple gas diffusion boxes, each of which is provided with an air injection hole. A connecting pipe is installed on each of the multiple gas diffusion boxes, and the connecting pipe is used to connect the multiple gas diffusion boxes. A connecting component is provided on the partition plate, and the connecting component is used to transport the gas in the first gas pipe to the connecting pipe.

3. The graphite boat drying equipment according to claim 2, characterized in that: A first sealing plate and a second sealing plate are fixedly connected to the partition plate, and one end of the first sealing plate and the second sealing plate away from the partition plate are fixedly connected to the upper plate of the shell, and a pressurized space is formed among the shell, the partition plate, the first sealing plate and the second sealing plate, the first air supply pipe extends into the pressurized space, and the connecting component is arranged on the partition plate in the pressurized space.

4. The graphite boat drying equipment according to claim 3, characterized in that: The connecting component includes a first sleeve, a first sliding groove matching the first sleeve is provided on the partition plate, an air inlet is provided on the first sleeve, a ventilation groove matching the first sliding groove is provided on the partition plate, the ventilation groove is L-shaped, one end of the ventilation groove is connected to the first sliding groove, a connecting plate is integrally formed on the first sleeve, a second sleeve is integrally formed on the connecting plate, a third sleeve is slidably connected to the second sleeve, an end of the third sleeve away from the connecting plate is fixedly connected to a fixing frame, a spring is fixedly connected to the fixing frame, an end of the spring away from the fixing frame is fixedly connected to the connecting plate, a through groove matching the third sleeve is provided on the partition plate, and the third sleeve is fixed in the through groove.

5. The graphite boat drying equipment according to claim 4, characterized in that: A baffle is fixedly connected to the outer wall of the connecting pipe.

6. The graphite boat drying equipment according to claim 3, characterized in that: A filter is installed on the first gas delivery pipe.

7. The graphite boat drying equipment according to claim 1, characterized in that: The drying machine is provided with a third air supply pipe, the third air supply pipe passes through the partition plate, and the third air supply pipe is connected with the drying part.

8. The graphite boat drying equipment according to claim 1, characterized in that: The moving wheel is provided with a rotating shaft, a reel is fixedly connected to the locking rotating shaft, and a coil spring is installed on the reel.

9. The graphite boat drying equipment according to claim 1, characterized in that: A cleaning box matching the moving wheel is embedded and installed on the lower panel of the bottom plate. An air bag is arranged in the cleaning box, and a wiping block is bonded to the air bag.

10. A graphite boat drying method, characterized in that: The following steps are involved: S1. Place the graphite boat to be dried on the transport mechanism, and evenly distribute the graphite boat on the gas diffuser box, and then push the transport mechanism into the drying part of the drying equipment; S2, start the heating mechanism, the dryer delivers drying gas to the pressurized space, as the air pressure in the pressurized space increases, the connecting component in the pressurized space connects the first gas delivery pipe and the connecting pipe, the drying gas on the dryer enters the connecting pipe, and finally sprays out from the baffle to dry the graphite boat; S3. After the graphite boat is dried, a command is sent to the control mechanism through the control panel, so that the dryer delivers room temperature gas, and at the same time, the ventilation valve is controlled to open to discharge the gas in the drying section, and then the transport mechanism in the drying section is pulled out.

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