Laser processing effect pre-testing device applied to laser

Abstract

The invention discloses a laser processing effect pre-testing device applied to a laser, and relates to the technical field of laser detection. Wherein the mounting platform is used for fixing a tested laser. The adjusting assembly connected with the second reflecting mirror can drive the second reflecting mirror to rotate and / or move to a first position in the light path and a second position outside the light path. The first reflecting mirror and the second detection assembly are sequentially arranged in a light path of the detected laser, the first reflecting mirror can reflect the detected laser to the processing assembly, and a first sub detected laser penetrates through the first reflecting mirror and irradiates the second detection assembly. The first detection assembly is used for detecting detected laser, and the second detection assembly is used for detecting first sub detected laser; the third detection assembly is used for detecting the target workpiece. Therefore, the device can be used for testing the performance parameters and the processing effect of the detected laser, and can be used for directly and indirectly detecting the detected laser and detecting the processing effect together, so that the detection efficiency and accuracy are improved.

Description

Technical Field

[0001] The present invention relates to the field of laser detection technology, and in particular to a laser processing effect pre-testing device applied to a laser. Background Art

[0002] Generally speaking, in the field of high-end manufacturing, laser processing technology is favored for its high precision and high efficiency. As the core component of laser processing equipment, the performance of the laser directly determines the processing quality, efficiency and stability of the product.

[0003] In the existing technology, after the laser is confirmed to be correct through conventional indicators during the production process, it will be sent to the equipment integrator for installation and debugging. As the core light source, the laser needs to be installed on the processing equipment integration system, and its performance is evaluated through external optical path debugging and actual product processing to see if it meets the standards.

[0004] However, there are differences in the installation methods and installation difficulties of the equipment. If the performance is found to be substandard, the laser needs to be replaced, which is cumbersome and time-consuming. Therefore, it is particularly necessary to design a professional, fast and efficient processing effect inspection device. Summary of the invention

[0005] The present specification provides a laser processing effect pre-testing device applied to a laser to at least partially solve the above-mentioned problems existing in the prior art.

[0006] This manual adopts the following technical solutions: This specification provides a laser processing effect pre-test device applied to a laser, comprising a mounting platform, an adjustment component, a first reflector, a first detection component, a second reflector, a processing component, a second detection component, and a third detection component; The mounting platform is used to fix the laser under test; The adjustment component is connected to the second reflector, and the adjustment component can drive the second reflector to rotate and / or move to a first position and a second position, the first position is within the optical path of the measured laser, and the second position is not within the optical path of the measured laser, and the second reflector in the first position can reflect the measured laser to the first detection component; The first reflector and the second detection component are sequentially arranged in the optical path of the measured laser, the first reflector can reflect the measured laser to the processing component, and a first sub-measured laser passes through the first reflector and irradiates the second detection component; The processing component is used to process the target workpiece based on a preset pattern by using the laser to be measured; The first detection component is used to detect the laser to be measured, the second detection component is used to detect the first sub-laser to be measured; and the third detection component is used to detect the target workpiece.

[0007] Preferably, the mounting platform includes a base, a dual-axis fine-tuning structure, and a quick-release fixing member; The dual-axis fine-tuning structure is connected to the base and the quick-release fixing member respectively, and can drive the quick-release fixing member to move along a first moving axis and a second moving axis that are perpendicular to each other; The first moving axis and the second moving axis are both perpendicular to a preset direction; the preset direction is an initial direction of the laser under test output by the laser under test; The quick-release fixing piece is used to fix the laser.

[0008] Preferably, the laser processing effect pre-testing device applied to the laser further comprises a sliding track; The installation platform comprises a base, and a sliding member is arranged at the bottom of the base; The structure of the sliding member is adapted to the sliding track, and the sliding member can slide along the sliding track; The extending direction of the sliding track is parallel to a preset direction; the preset direction is an initial direction of the measured laser output by the measured laser.

[0009] Preferably, the preset pattern includes a cross shape and / or a dot matrix.

[0010] Preferably, the dot matrix includes a plurality of dots, and any dot is composed of a plurality of concentric circles with a fixed radius, and different concentric circles represent different processing depths; The cross-shape includes four line segments of equal length that intersect each other to form the cross-shape, and the widths of the four line segments are the same; each line segment includes multiple concentric line segments of different widths, and different concentric line segments represent different processing depths; the concentric line segments are multiple line segments with the same midline points in the width direction and different widths.

[0011] Preferably, the processing assembly is capable of etching a target pattern on the surface of the target workpiece; The third detection component is used to detect the dimensional parameters of the target pattern on the surface of the target workpiece; the dimensional parameters include the roundness of the concentric circles and / or the diameter of the concentric circles and / or the positional relationship between adjacent points and / or the angle of intersecting line segments and / or the length of the line segments and / or the width of the concentric line segments and / or the smoothness of the boundaries of the concentric line segments.

[0012] Preferably, the laser processing effect pre-testing device applied to the laser further comprises at least one collimator; The collimator is arranged between the first reflector and the second reflector; And / or, the collimator is arranged between the first reflector and the processing component.

[0013] Preferably, the laser processing effect pre-testing device applied to the laser further includes a third reflector and a fourth detection component; The third reflector is disposed between the first reflector and the second detection component, and is used to reflect the second sub-laser to be measured in the first sub-laser to be measured to the fourth detection component, and the third sub-laser to be measured in the first sub-laser to be measured passes through the third reflector and irradiates the second detection component; The fourth detection component is used to detect the second sub-detected laser.

[0014] Preferably, the laser processing effect pre-testing device applied to the laser further includes an expansion component; The expansion component is disposed between the first reflector and the processing component; The expansion component includes a half-wave plate and / or an aperture and / or a shaping mirror.

[0015] Preferably, the laser processing effect pre-testing device applied to the laser further includes a controller; The controller is communicatively connected with the adjusting component and / or the processing component and / or the first detecting component and / or the second detecting component and / or the third detecting component; The controller can send a switching instruction to the adjustment component to make the second reflector rotate and / or displace to the first position, or make the second reflector rotate and / or displace to the second position; the controller is also used to control the processing component to adjust the focal length of the measured laser; The controller is also used to receive and display the first detection result, the second detection result and the third detection result.

[0016] Preferably, the laser processing effect pre-testing device applied to the laser further includes a reflector switching structure; The second reflector and / or the first reflector are both configured in plurality, and the plurality of second reflectors have different transmittances to laser beams of different wavelengths, and the plurality of first reflectors have different transmittances to laser beams of different wavelengths; The reflector switching structure includes a base, a switching member and a plurality of quick-release fixing members; The quick-release fixing part is used to fix the reflector, and the switching part is respectively connected to the base and the multiple quick-release fixing parts. At least a part of the structure of the switching part can rotate and / or move, and drive the multiple quick-release fixing parts to move, so that the reflector fixed by any quick-release fixing part can be switched between the third position and the fourth position; the reflector in the first position can reflect the measured laser, and the reflector in the second position cannot reflect the measured laser.

[0017] Preferably, the first detection component includes a power meter and / or a photoelectric probe; The second detection component includes a self-correlator and / or an image sensor camera; The third detection component includes a crystal phase microscope and / or a high-precision camera.

[0018] At least one of the above technical solutions adopted in this specification can achieve the following beneficial effects: Based on the above content, the laser processing effect pre-test device applied to the laser includes a mounting platform, an adjustment component, a first reflector, a first detection component, a second reflector, a processing component, a second detection component and a third detection component. The mounting platform is used to fix the laser to be tested. The adjustment component is connected to the second reflector, and the adjustment component can drive the second reflector to rotate and / or displace to a first position and a second position, the first position is within the optical path of the laser to be tested, and the second position is not within the optical path of the laser to be tested, and the second reflector in the first position can reflect the laser to be tested to the first detection component. The first reflector and the second detection component are sequentially arranged in the optical path of the laser to be tested, the first reflector can reflect the laser to be tested to the processing component, and there is a first sub-laser to be tested that passes through the first reflector and irradiates the second detection component. The processing component is used to process the target workpiece based on a preset pattern through the laser to be tested. The first detection component is used to detect the laser to be tested, the second detection component is used to detect the first sub-laser to be tested; and the third detection component is used to detect the target workpiece.

[0019] It can be seen that the device can test the performance parameters and processing effects of the laser under test, and can also realize direct detection, indirect detection of the laser under test, and detection of the processing effect, thereby improving the efficiency and accuracy of detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The drawings described herein are used to provide a further understanding of this specification and constitute a part of this specification. The illustrative embodiments and descriptions of this specification are used to explain this specification and do not constitute an improper limitation on this specification. In the drawings: Figure 1A schematic diagram of the structure of a laser processing effect pre-test device applied to a laser provided in one embodiment of the present specification; Figure 2 A partial structural schematic diagram of a laser processing effect pre-testing device applied to a laser provided in one embodiment of the present specification; Figure 3 A partial structural schematic diagram of a laser processing effect pre-testing device applied to a laser provided in one embodiment of the present specification; Figure 4 A partial structural schematic diagram of a laser processing effect pre-testing device applied to a laser provided in one embodiment of the present specification; Figure 5 A partial structural schematic diagram of a laser processing effect pre-testing device applied to a laser provided in one embodiment of the present specification; Figure 6 A schematic diagram of a preset pattern provided for one embodiment of this specification; Figure 7 A schematic diagram of a preset pattern provided for one embodiment of this specification; Figure 8 A partial structural schematic diagram of a laser processing effect pre-testing device applied to a laser provided in one embodiment of the present specification; Fig. 9 A partial structural schematic diagram of a laser processing effect pre-testing device applied to a laser provided in one embodiment of the present specification.

[0021] Description of reference numerals: Mounting platform 10; adjustment component 11; first reflector 12; first detection component 13; second reflector 14; processing component 15; second detection component 16; third detection component 17; measured laser 18; measured laser 19; first sub-measured laser 20; target workpiece 21; first moving axis 22; second moving axis 23; slide rail 24; collimator 25; fourth reflector 26; second sub-measured laser 27; third sub-measured laser 28. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solutions and advantages of this specification more clear, the technical solutions of this specification will be clearly and completely described below in combination with the specific embodiments of this specification and the corresponding drawings. Obviously, the described embodiments are only part of the embodiments of this specification, not all of the embodiments. Based on the embodiments in this specification, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0023] In the description of the present invention, it should be noted that the term "or" is generally used in a meaning including "and / or", unless the content clearly indicates otherwise.

[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. In addition, in the description of the present application, the terms "first", "second" and the like are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0025] Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] The technical solutions provided by the embodiments of this specification are described in detail below in conjunction with the accompanying drawings.

[0027] Figure 1 A schematic diagram of a laser processing effect pre-test device for a laser provided in one embodiment of the present specification is shown in FIG. Figure 1 As shown, the laser processing effect pre-test device applied to the laser includes a mounting platform 10, an adjustment component 11, a first reflector 12, a first detection component 13, a second reflector 14, a processing component 15, a second detection component 16 and a third detection component 17.

[0028] Preferably, the mounting platform 10 is used to fix the laser 18 to be tested.

[0029] Preferably, the measured laser 19 emitted by the measured laser 18 fixed to the mounting platform 10 can be emitted along a preset direction.

[0030] Preferably, the mounting platform 10 includes a base, a dual-axis fine-tuning structure, and a quick-release fixing member.

[0031] Further preferably, the dual-axis fine-tuning structure is connected to the base and the quick-release fixing member respectively, and can drive the quick-release fixing member to move along the first moving axis 22 and the second moving axis 23 which are perpendicular to each other.

[0032] Preferably, the first movable axis 22 and the second movable axis 23 are both perpendicular to a preset direction, wherein the preset direction is an initial direction of the measured laser 19 output by the measured laser 18 .

[0033] Preferably, the quick-release fixture is used to fix the laser.

[0034] Preferably, the dual-axis fine-tuning structure includes a connecting member, a first movable axis 22 and a second movable axis 23. The connecting member is slidably connected to the first movable axis 22 and can move along the first movable axis 22, and the connecting member can be connected to the quick-release fixing member. The first movable axis 22 is slidably connected to the second movable axis 23 and can move along the second movable axis 23. The second movable axis 23 is connected to the base.

[0035] Figure 2 A partial structural diagram of a laser processing effect pre-testing device for a laser provided in one embodiment of the present specification, such as Figure 2 As shown, the laser 19 to be tested emitted by the laser 18 to be tested fixed to the mounting platform 10 can be emitted along a preset direction, and the first movable axis 22 and the second movable axis 23 are both perpendicular to the preset direction. The double-direction arrow indicates that at least two of the connecting member, the first movable axis 22 and the second movable axis 23 in the mounting platform 10 move relative to each other. The unidirectional arrow indicates the direction in which the laser 19 to be tested emitted by the laser 18 to be tested is emitted.

[0036] It should be emphasized that the relevant mechanical technology for realizing dual-axis adjustment has been developed to a relatively mature level. The above embodiments are only illustrative. The mounting platform 10 may also adopt other structures, which are not limited in this specification.

[0037] Preferably, the laser processing effect pre-testing device applied to the laser also includes a sliding track.

[0038] Preferably, a sliding member is provided at the bottom of the base.

[0039] Further preferably, the structure of the sliding member is compatible with the sliding track, and the sliding member can slide along the sliding track.

[0040] Preferably, the extension direction of the sliding track is parallel to the preset direction, that is, the extension direction of the sliding track 24 is the initial direction of the measured laser 19 output by the measured laser 18 .

[0041] Figure 3 A partial structural diagram of a laser processing effect pre-testing device for a laser provided in one embodiment of the present specification, such as Figure 3 As shown, the extension direction of the slide rail 24 is the initial direction of the measured laser 19 output by the measured laser 18. The one-way arrow represents the initial direction of the measured laser 19 emitted by the measured laser 18.

[0042] By adopting the above-mentioned method, the position of the laser 18 to be tested can be adjusted in all directions through the installation platform 10, so that different lasers can be tested by the laser processing effect pre-testing device applied to the laser.

[0043] Preferably, the adjustment component 11 is connected to the second reflector 14, and the adjustment component 11 can drive the second reflector 14 to rotate and / or move to a first position and a second position. In addition, the first position is within the optical path of the measured laser 19, and the second position is not within the optical path of the measured laser 19. In other words, the second reflector 14 in the first position can reflect the measured laser 19 to the first detection component 13, and at this time, the measured laser 19 cannot irradiate the first reflector 12.

[0044] Figure 4 as well as Figure 5 All of them are partial structural schematic diagrams of a laser processing effect pre-test device applied to a laser provided by an embodiment of this specification, such as Figure 4 As shown, the second reflector 14 is driven by the adjustment component 11 to rotate and / or move to the first position, and reflects the measured laser 19 to the first detection component 13. At this time, the measured laser 19 cannot irradiate the first reflector 12. Figure 5 As shown, the second reflector 14 is rotated and / or displaced to the second position driven by the adjustment component 11 , and no longer affects the propagation of the measured laser 19 , and the measured laser 19 irradiates the first reflector 12 .

[0045] It should be noted that the development of reciprocating mechanical structures has been relatively mature, and this specification does not limit the specific structure of the adjustment component 11, which can be set according to needs.

[0046] Preferably, the first reflector 12 and the second detection component 16 are sequentially arranged in the optical path of the laser light 19 to be detected.

[0047] Further preferably, the first reflector 12 is capable of reflecting the measured laser 19 to the processing component 15 , and a first sub-measured laser 20 passes through the first reflector 12 to irradiate the second detection component 16 .

[0048] It is understood by those skilled in the art that the spectral line width and beam quality (M 2 When measuring laser parameters such as laser power factor and polarization state, it is necessary to ensure that the laser power is less than a certain threshold to avoid damage to detection equipment such as beam analyzers and charge coupled device (CCD) cameras.

[0049] Preferably, the processing component 15 is used to process the target workpiece 21 based on a preset pattern through the measured laser 19.

[0050] Preferably, the first detection component 13 is used to directly detect the measured laser 19. After the measured laser 19 is output by the measured laser 18, it can be irradiated to the first detection component 13 after being reflected by the reflector, thereby minimizing the influence of optical elements on the measured laser 19 and improving the detection accuracy.

[0051] Preferably, the first detection component 13 can detect parameters such as spot quality and / or power and / or roundness and / or beam quality.

[0052] Preferably, the first detection component 13 includes a power meter and / or a photoelectric probe / spot analyzer and other equipment, which is not limited in this specification.

[0053] Preferably, the second detection component 16 is used to detect the first sub-detected laser 20 .

[0054] Preferably, the power of the first sub-detected laser 20 is less than a preset power threshold.

[0055] Preferably, the second detection component 16 can detect the spot quality and / or spectral line width and / or beam quality (M 2 factor) and / or polarization state and / or circularity and other parameters are tested.

[0056] Preferably, the second detection component 16 includes an autocorrelator and / or a CCD camera and other equipment, which is not limited in this specification.

[0057] Preferably, the third detection component 17 is used to detect the target workpiece 21 .

[0058] Preferably, the third detection component 17 includes equipment such as a crystal phase microscope and / or a high-precision camera, and this specification does not impose any limitation thereto.

[0059] Preferably, the processing component 15 can etch a target pattern on the surface of the target workpiece 21 based on a preset pattern.

[0060] Preferably, the preset pattern includes a cross shape and / or a dot matrix.

[0061] Preferably, the dot matrix includes a plurality of dots, and any dot is composed of a plurality of concentric circles with a fixed radius, and different concentric circles represent different processing depths.

[0062] Preferably, the cross-shaped line includes four line segments of equal length and intersecting each other to form the cross-shaped line, and the widths of the four line segments are the same. Moreover, each line segment includes a plurality of concentric line segments of different widths, and different concentric line segments represent different processing depths. The concentric line segments are a plurality of line segments having the same midline point in the width direction and different widths.

[0063] Figure 6as well as Figure 7 All of them are schematic diagrams of preset patterns provided in one embodiment of this specification, such as Figure 6 As shown in , the dot matrix includes multiple dots, and any dot is composed of multiple concentric circles with fixed radius. Figure 7 As shown, the cross shape includes four line segments of equal length and intersecting each other to form a cross shape, and the widths of the four line segments are the same. In addition, each line segment includes a plurality of concentric line segments of different widths.

[0064] Preferably, the third detection component 17 is used to detect the size parameters of the target pattern on the surface of the target workpiece 21. The size parameters include the roundness of the concentric circles and / or the diameter of the concentric circles and / or the positional relationship between adjacent points and / or the angle of intersecting line segments and / or the length of the line segments and / or the width of the concentric line segments and / or the smoothness of the boundaries of the concentric line segments.

[0065] Based on the above content, the laser processing effect pre-test device applied to the laser includes an installation platform 10, an adjustment component 11, a first reflector 12, a first detection component 13, a second reflector 14, a processing component 15, a second detection component 16 and a third detection component 17. The installation platform 10 is used to fix the laser 18 to be tested. The adjustment component 11 is connected to the second reflector 14, and the adjustment component 11 can drive the second reflector 14 to rotate and / or displace to a first position and a second position, the first position is within the optical path of the laser 19 to be tested, and the second position is not within the optical path of the laser 19 to be tested, and the second reflector 14 in the first position can reflect the laser 19 to be tested to the first detection component 13. The first reflector 12 and the second detection component 16 are sequentially arranged in the optical path of the laser 19 to be tested, the first reflector 12 can reflect the laser 19 to be tested to the processing component 15, and there is a first sub-laser 20 to be tested that passes through the first reflector 12 and irradiates the second detection component 16. The processing component 15 is used to process the target workpiece 21 based on a preset pattern by the measured laser 19. The first detection component 13 is used to detect the measured laser 19, the second detection component 16 is used to detect the first sub-measured laser 20; and the third detection component 17 is used to detect the target workpiece 21.

[0066] It can be seen that the device can test the performance parameters and processing effects of the laser 18 under test, and can also realize direct detection, indirect detection of the laser 19 under test, and detection of the processing effect, thereby improving the efficiency and accuracy of detection.

[0067] Preferably, the laser processing effect pre-testing device applied to the laser further includes at least one collimator 25 .

[0068] Preferably, the collimator 25 is disposed between the first reflector 12 and the second reflector 14 , and / or the collimator 25 is disposed between the first reflector 12 and the processing assembly 15 .

[0069] Figure 8 A partial structural diagram of a laser processing effect pre-testing device for a laser provided in one embodiment of the present specification, such as Figure 8 As shown, the first collimator 25 is disposed between the first reflector 12 and the second reflector 14 , and the second collimator 25 is disposed between the first reflector 12 and the processing assembly 15 .

[0070] Preferably, the laser processing effect pre-testing device applied to the laser further includes a third reflector and a fourth detection component.

[0071] Preferably, the third reflector is disposed between the first reflector 12 and the second detection component 16, and is used to reflect the second sub-measured laser 27 in the first sub-measured laser 20 to the fourth detection component, and the third sub-measured laser 28 in the first sub-measured laser 20 passes through the third reflector and irradiates the second detection component 16.

[0072] Preferably, the fourth detection component is used to detect the second sub-detected laser 27 .

[0073] It should be noted that, in this case, the second detection component 16 is used to detect the third sub-detected laser 28 .

[0074] Fig. 9 A partial structural diagram of a laser processing effect pre-testing device for a laser provided in one embodiment of the present specification, such as Fig. 9 As shown, the third reflector is configured between the first reflector 12 and the second detection component 16, and is used to reflect the second sub-laser 27 in the first sub-laser 20 to the fourth detection component, and the third sub-laser 28 in the first sub-laser 20 passes through the third reflector to irradiate the second detection component 16.

[0075] Preferably, the laser processing effect pre-testing device applied to the laser also includes an expansion component.

[0076] Preferably, the expansion component is disposed between the first reflector 12 and the processing component 15 .

[0077] Preferably, the extension component includes optical elements such as a polarization element and / or an aperture and / or a shaping mirror, which is not limited in this specification.

[0078] By adopting the above method, the polarization state or power of the laser 19 under test can be adjusted by adding a polarization state element, or the laser 19 under test can be shaped by a shaping mirror, or the laser 19 under test can be adjusted by other elements, which is suitable for the needs of different test scenarios.

[0079] Preferably, the laser processing effect pre-testing device applied to the laser also includes a controller.

[0080] Preferably, the controller is communicatively connected with the adjusting component 11 and / or the processing component 15 and / or the first detecting component 13 and / or the second detecting component 16 and / or the third detecting component 17 .

[0081] Preferably, the controller is capable of sending a switching instruction to the adjustment component 11, so that the second reflector 14 rotates and / or moves to the first position, or rotates and / or moves the second reflector to the second position; the controller is also used to control the processing component 15 to adjust the focal length of the measured laser 19.

[0082] Preferably, the controller is also used to receive and display the first detection result, the second detection result and the third detection result.

[0083] By adopting the above method, the laser processing effect pre-test device applied to the laser can realize automatic detection. After the camera is installed, the laser processing effect pre-test device applied to the laser can be remotely controlled to complete the detection without manual adjustment, thereby improving the detection efficiency.

[0084] Preferably, the laser processing effect pre-test device applied to the laser also includes a reflector switching structure. Specifically, the second reflector 14 and / or the first reflector 12 are configured in plurality, and the reflectance of the plurality of second reflectors 14 to lasers of different wavelengths is different, and the transmittance of the plurality of first reflectors 12 to lasers of different wavelengths is different. The reflector switching structure includes a base, a switching member, and a plurality of quick-release clamps. The quick-release clamp is used to fix the reflector, and the switching member is respectively connected to the base and the plurality of quick-release clamps, and at least part of the structure of the switching member can rotate and / or move, and drive the plurality of quick-release clamps to move, so that the reflector fixed by any quick-release clamp can be switched between the third position and the fourth position. The reflector in the first position can reflect the laser 19 to be measured, and the reflector in the second position cannot reflect the laser 19 to be measured.

[0085] By adopting the above method, the transmittance of the laser light 19 with different wavelengths passing through the first reflector 12 and the second reflector 14 can be adjusted to adapt to the detection of the laser light 19 with different wavelengths.

[0086] Further preferably, the controller is communicatively connected with the reflector switching structure, and the controller can send a switching instruction to the reflector switching structure to instruct the reflector switching structure to switch the reflector.

[0087] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, commodity or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, commodity or device. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, commodity or device including the elements.

[0088] Each embodiment in this specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0089] The above description is only an embodiment of this specification and is not intended to limit this specification. For those skilled in the art, this specification may have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of this specification should be included in the scope of the claims of this application.

Claims

1. A laser processing effect pre-test device applied to a laser, characterized in that: It includes a mounting platform, an adjustment component, a first reflector, a first detection component, a second reflector, a processing component, a second detection component and a third detection component; The mounting platform is used to fix the laser to be tested; The adjustment component is connected to the second reflector, and the adjustment component can drive the second reflector to rotate and / or move to a first position and a second position, the first position is within the optical path of the measured laser, and the second position is not within the optical path of the measured laser, and the second reflector in the first position can reflect the measured laser to the first detection component; The first reflector and the second detection component are sequentially arranged in the optical path of the measured laser, the first reflector can reflect the measured laser to the processing component, and a first sub-measured laser passes through the first reflector and irradiates the second detection component; The processing component is used to process the target workpiece based on a preset pattern by using the laser to be measured; The first detection component is used to detect the laser to be measured, the second detection component is used to detect the first sub-laser to be measured; and the third detection component is used to detect the target workpiece.

2. The laser processing effect pre-testing device applied to a laser according to claim 1, characterized in that: The installation platform includes a base, a dual-axis fine-tuning structure and a quick-release fixing member; The dual-axis fine-tuning structure is connected to the base and the quick-release fixing member respectively, and can drive the quick-release fixing member to move along a first moving axis and a second moving axis that are perpendicular to each other; The first moving axis and the second moving axis are both perpendicular to a preset direction; the preset direction is an initial direction of the laser under test output by the laser under test; The quick-release fixing piece is used to fix the laser.

3. The laser processing effect pre-testing device applied to a laser according to claim 1, characterized in that: The laser processing effect pre-testing device applied to the laser also includes a sliding track; The installation platform comprises a base, and a sliding member is arranged at the bottom of the base; The structure of the sliding member is adapted to the sliding track, and the sliding member can slide along the sliding track; The extending direction of the sliding track is parallel to a preset direction; the preset direction is an initial direction of the measured laser output by the measured laser.

4. The laser processing effect pre-testing device for laser according to claim 1, characterized in that: The preset pattern includes a cross shape and / or a dot matrix.

5. The laser processing effect pre-testing device for laser according to claim 4, characterized in that: The dot matrix includes a plurality of dots, and any dot is composed of a plurality of concentric circles with a fixed radius, and different concentric circles represent different processing depths; The cross-shape includes four line segments of equal length that intersect each other to form the cross-shape, and the widths of the four line segments are the same; each line segment includes multiple concentric line segments of different widths, and different concentric line segments represent different processing depths; the concentric line segments are multiple line segments with the same midline points in the width direction and different widths.

6. The laser processing effect pre-testing device for laser according to claim 5, characterized in that: The processing component is capable of etching a target pattern on the surface of the target workpiece; The third detection component is used to detect the dimensional parameters of the target pattern on the surface of the target workpiece; the dimensional parameters include the roundness of the concentric circles and / or the diameter of the concentric circles and / or the positional relationship between adjacent points and / or the angle of intersecting line segments and / or the length of the line segments and / or the width of the concentric line segments and / or the smoothness of the boundaries of the concentric line segments.

7. The laser processing effect pre-testing device for laser according to claim 1, characterized in that: The laser processing effect pre-testing device applied to the laser also includes at least one collimator; The collimator is arranged between the first reflector and the second reflector; And / or, the collimator is arranged between the first reflector and the processing component.

8. The laser processing effect pre-testing device for laser according to claim 1, characterized in that: The laser processing effect pre-testing device applied to the laser also includes a third reflector and a fourth detection component; The third reflector is disposed between the first reflector and the second detection component, and is used to reflect the second sub-laser to be measured in the first sub-laser to be measured to the fourth detection component, and the third sub-laser to be measured in the first sub-laser to be measured passes through the third reflector and irradiates the second detection component; The fourth detection component is used to detect the second sub-detected laser.

9. The laser processing effect pre-testing device for laser according to claim 1, characterized in that: The laser processing effect pre-testing device applied to the laser also includes an expansion component; The expansion component is disposed between the first reflector and the processing component; The expansion component includes a half-wave plate and / or an aperture and / or a shaping mirror.

10. The laser processing effect pre-testing device applied to a laser according to any one of claims 1 to 9, characterized in that: The laser processing effect pre-testing device applied to the laser also includes a controller; The controller is communicatively connected with the adjusting component and / or the processing component and / or the first detecting component and / or the second detecting component and / or the third detecting component; The controller can send a switching instruction to the adjustment component to make the second reflector rotate and / or displace to the first position, or make the second reflector rotate and / or displace to the second position; the controller is also used to control the processing component to adjust the focal length of the measured laser; The controller is also used to receive and display the first detection result, the second detection result and the third detection result.

11. The laser processing effect pre-testing device for laser according to any one of claims 1 to 9, characterized in that: The laser processing effect pre-testing device applied to the laser also includes a reflector switching structure; The second reflector and / or the first reflector are both configured in plurality, and the plurality of second reflectors have different transmittances to laser beams of different wavelengths, and the plurality of first reflectors have different transmittances to laser beams of different wavelengths; The reflector switching structure includes a base, a switching member and a plurality of quick-release fixing members; The quick-release fixing part is used to fix the reflector, and the switching part is respectively connected to the base and the multiple quick-release fixing parts. At least a part of the structure of the switching part can rotate and / or move, and drive the multiple quick-release fixing parts to move, so that the reflector fixed by any quick-release fixing part can be switched between the third position and the fourth position; the reflector in the first position can reflect the measured laser, and the reflector in the second position cannot reflect the measured laser.

12. The laser processing effect pre-testing device for laser according to any one of claims 1 to 9, characterized in that: The first detection component includes a power meter and / or a photoelectric probe; The second detection component includes a self-correlator and / or an image sensor camera; The third detection component includes a crystal phase microscope and / or a high-precision camera.

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