Novel microwave probe

Abstract

The invention relates to the technical field of microwave probes, in particular to a novel microwave probe, and aims to solve the problem that a test result has a large error due to radiation of a radio frequency probe based on a coplanar waveguide signal transmission principle, the novel microwave probe comprises a cable, the end part of the cable is provided with a signal pin and a wrapping ground pin, the signal pin is fixed on a conductor in the center of the cable, the wrapping ground pin is fixed on a conductor on the outer ring of the cable, a notch is formed in one side of the wrapping ground pin, and the signal pin is embedded in the notch of the wrapping ground pin to form wrapping of the wrapping ground pin on the signal pin; an air gap is formed between the wrapping ground pin and the signal pin so as to restrain radiation. The invention has the effect of improving the radiation effect.

Description

Technical Field

[0001] The present application relates to the field of microwave probes, and in particular to a novel microwave probe. Background Art

[0002] In 2016, Mehdi Seyyedesfahla et al. published a paper titled "ACP Probe Measurement of On Chip Strip Dipole Antennas at W Band" in IEEE, which introduced that when using Formfactor's ACP series probes to test millimeter-wave on-chip antennas, the probe tip field would couple to the surrounding structure, resulting in inconsistent measurement results with simulations.

[0003] At the same time, Mirmehdi Seyyedesfahlan and Ibrahim Tekin published a paper titled "Influence of ACP Probe Radiation", which again mentioned the radiation effect of Formfactor's ACP series, which would cause a significant change in the reflection coefficient curve of the antenna. This ultimately led to inconsistencies between the measured data and the simulation results.

[0004] Cascade Microtech. Inc applied for patent US5506515 in 1994. From the patent data and physical pictures, we can see that there is a large open structure at the welding point between the probe tip and the semi-steel cable, which leads to the radiation effect. In the probe structure and physical pictures published in patents US20110043192 and US6118287, we can see that there is also a large open structure, which leads to the radiation effect. In patent CN116381293, although the overall needle tip structure material size has become smaller, there is still a large open space at the die-cutting point of the semi-steel cable, which ultimately leads to the existence of the radiation effect. Therefore, RF probes based on the principle of coplanar waveguide signal transmission all have radiation problems, which ultimately lead to large errors in the test results, so there is room for improvement. Summary of the invention

[0005] In order to improve the radiation effect, the present application provides a new type of microwave probe.

[0006] The novel microwave probe provided in this application adopts the following technical solution: A novel microwave probe comprises a cable, wherein a signal needle and a wrapped ground needle are arranged at the end of the cable, wherein the signal needle is fixed on a conductor at the center of the cable, and the wrapped ground needle is fixed on a conductor at the outer ring of the cable, and a notch is opened on one side of the wrapped ground needle, and the signal needle is embedded in the notch of the wrapped ground needle to form a wrapping of the signal needle by the wrapped ground needle; an air gap is formed between the wrapped ground needle and the signal needle to curb radiation.

[0007] By adopting the above technical solution, the signal pin is fixed on the conductor in the center of the cable, and the wrapped ground pin is fixed on the conductor on the outer ring of the cable, forming a tightly wrapped structure. This design reduces the open electric field at the tip of the probe, thereby significantly reducing radiation. The extremely small air gap formed between the wrapped ground pin and the signal pin effectively curbs radiation, ensures the stability and accuracy of high-frequency signal transmission, and improves test accuracy. Compared with the existing MEMS process, the present invention adopts traditional mechanical finishing methods (such as wire cutting), which greatly simplifies the production process, reduces production costs, shortens delivery cycles, and is more in line with domestic market demand.

[0008] Preferably, the virtual shape formed by the inner wall of the notch wrapping the ground pin is similar to the shape of the signal pin formed by the side wall of the signal pin, that is, the width of the air gap is equal at any position.

[0009] By adopting the above technical solution, the virtual shape formed by the inner wall of the gap that wraps the ground pin is similar to the shape formed by the side wall of the signal pin, ensuring that the width of the air gap is equal at any position. This not only helps to distribute the electromagnetic field more evenly, but also further reduces the radiation of the probe tip, improving the test accuracy and stability. In addition, this design simplifies the manufacturing process, reduces production costs, and improves the cost performance of the product.

[0010] Preferably, the end of the cable is provided with a first inclined surface, and the ends of the signal pin and the wrapped ground pin are also provided with a second inclined surface, and the first inclined surface and the second inclined surface are arranged in parallel.

[0011] By adopting the above technical solution, the end of the cable is provided with a first inclined surface, and the ends of the signal pin and the wrapped ground pin are also provided with a second inclined surface, and the first inclined surface and the second inclined surface are arranged in parallel. This design can effectively increase the visibility and operation convenience of the probe, while maintaining good electrical contact performance, ensuring the stability and reliability of signal transmission.

[0012] Preferably, an extension boss is provided at one end of the signal pin and the wrapped ground pin located on the second inclined surface, and the extension boss is located at one end of the signal pin and the wrapped ground pin close to the cable.

[0013] By adopting the above technical solution, the design of the extended boss increases the effective contact area between the signal pin and the wrapped ground pin on the second inclined surface, improving the stability and reliability of the structure. At the same time, the position design of the extended boss makes the signal pin and the wrapped ground pin fit more closely together, further reducing the radiation leakage in the air gap and enhancing the overall shielding effect of the probe. In addition, the extended boss also facilitates the installation and positioning of the probe in actual use, improving the convenience of operation.

[0014] Preferably, the edge of the wrapped ground pin protrudes from the cable setting.

[0015] By adopting the above technical solution, the edge protrusion cable setting of the wrapped ground pin can effectively increase the visibility and stability of the probe. First, the protruding edge design enhances the visibility of the probe during use, making it easier for operators to accurately align the target test point, thereby improving the accuracy and reliability of the test. Secondly, the protruding edge can also serve as a supporting structure to reduce the shaking of the probe when it contacts the object being measured, ensuring that the tip of the probe maintains stable contact with the surface of the chip, thereby further improving the accuracy of the measurement. In addition, this design can also protect the signal pin from external physical damage to a certain extent, thereby extending the service life of the probe.

[0016] Preferably, the wrapped ground pin is located at a connection point a where the edge of the extended boss and the protruding cable of the wrapped ground pin are located, and an edge b of the cable is close to one end of the wrapped ground pin, and the connection point a and the edge b of the cable coincide with each other.

[0017] By adopting the above technical solution, the edge of the wrapped ground pin located on the extended boss coincides with the connection point a of the wrapped ground pin protruding from the cable and the corner b of the end of the cable close to the wrapped ground pin, making the overall structure of the probe more compact, reducing the impact of the external environment on the internal signal transmission of the probe, and further reducing the radiation effect. This design not only improves the measurement accuracy of the probe, but also enhances the stability and reliability of the probe. This setting can solve the problem that the existing RF probe structure cannot realize an extremely small exposed probe at low cost and low difficulty, because there is no need to make a soft substrate microstrip sheet and electroforming contacts, the process requirements are reduced, the processing process is simple, and the manufacturing cost is reduced.

[0018] Preferably, there is a recovery edge c between the end of the wrapped ground pin away from the signal pin and the part of the wrapped ground pin protruding from the cable, and there is an intersection d between the recovery edge c and a virtual rectangle projected when the cable takes the wrapped ground pin as the base.

[0019] By adopting the above technical solution, a recovery edge c is set at the end of the wrapped ground pin away from the signal pin, so that there is an intersection d between the virtual rectangle projected when the cable takes the wrapped ground pin as the base and the recovery edge c. This design helps to further reduce the radiation at the tip of the probe and improve the test accuracy and stability. At the same time, the design of the recovery edge c can also enhance the overall structural strength of the probe, ensuring that it is not easily deformed or damaged during actual use.

[0020] Preferably, the end of the wrapped ground pin away from the signal pin is arranged to be parallel to an edge e, and the parallel edge e is arranged perpendicular to the axis of the cable.

[0021] By adopting the above technical solution, the end of the wrapped ground pin away from the signal pin is set to a parallel edge e, and the parallel edge e is set perpendicular to the axis of the cable. This not only helps to maintain the overall structural stability and aesthetics of the probe, but also further reduces the impact of the radiation effect and ensures the accuracy and stability of high-frequency signal transmission. In addition, this design also facilitates the installation and alignment of the probe in practical applications, improving the convenience and reliability of operation.

[0022] Preferably, the widest part of the portion of the wrapped ground pin protruding from the cable is flush with the end of the signal pin close to the wrapped ground pin.

[0023] By adopting the above technical solution, the widest part of the part of the wrapped ground pin protruding from the cable is flush with the end of the signal pin close to the wrapped ground pin, ensuring that the overall structure of the probe is more compact, reducing the open electric field at the tip of the probe, and thus effectively reducing the radiation effect. This not only improves the stability and accuracy of the probe in high-frequency signal transmission, but also simplifies the manufacturing process, reduces production costs, and improves the cost performance of the product.

[0024] In summary, the present application includes at least one of the following beneficial technical effects: 1. The signal pin is fixed on the conductor in the center of the cable, and the wrapped ground pin is fixed on the conductor on the outer ring of the cable, forming a tightly wrapped structure. This design reduces the open electric field at the tip of the probe, thereby significantly reducing radiation. The extremely small air gap formed between the wrapped ground pin and the signal pin effectively curbs radiation, ensures the stability and accuracy of high-frequency signal transmission, and improves test accuracy. Compared with the existing MEMS process, the present invention adopts traditional mechanical finishing methods (such as wire cutting), which greatly simplifies the production process, reduces production costs, shortens delivery cycles, and is more in line with domestic market demand; 2. The virtual shape formed by the inner wall of the gap that wraps the ground pin is similar to the shape formed by the side wall of the signal pin, ensuring that the width of the air gap is equal at any position. This not only helps to distribute the electromagnetic field more evenly, but also further reduces the radiation of the probe tip, improving the test accuracy and stability. In addition, this design simplifies the manufacturing process, reduces production costs, and improves the cost performance of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of a new type of microwave probe in the implementation scheme of the present application.

[0026] Figure 2 is a perspective view of a probe according to an embodiment of the present application.

[0027] Figure 3 This is a graph of measured performance data of one of the novel microwave probes in the implementation scheme of the present application.

[0028] Figure 4 This is a graph of measured performance data of another novel microwave probe in the implementation scheme of the present application.

[0029] Explanation of the accompanying drawings: 1. cable; 11. first inclined surface; 2. signal pin; 21. second inclined surface; 22. extended boss; 3. wrapped ground pin; 4. air gap; 5. connection point a; 6. corner b; 7. recovery edge c; 8. intersection d; 9. parallel edge e. DETAILED DESCRIPTION

[0030] The following is combined with Figure 1-2 This application is described in further detail.

[0031] The present application embodiment discloses a novel microwave probe. Figure 1 The novel microwave probe includes a cable 1, and a signal pin 2 and a wrapped ground pin 3 are arranged at the end of the cable 1. The wrapped ground pin 3 is fixed to the conductor of the outer ring of the cable 1 by welding. A notch is opened on one side of the wrapped ground pin 3, and the signal pin 2 is embedded in the notch of the wrapped ground pin 3 to form a wrapping of the signal pin 2 by the wrapped ground pin 3. The signal pin 2 is fixed to the conductor at the center of the cable 1 by welding, and an air gap 4 is formed between the wrapped ground pin 3 and the signal pin 2 to curb radiation.

[0032] The signal pin 2 is fixed to the conductor at the center of the cable 1, and the wrapped ground pin 3 is fixed to the conductor of the outer ring of the cable 1, forming a tightly wrapped structure. This design reduces the open electric field at the tip of the probe, thereby significantly reducing radiation. The extremely small air gap 4 formed between the wrapped ground pin 3 and the signal pin 2 effectively curbs radiation, ensures the stability and accuracy of high-frequency signal transmission, and improves test accuracy. Compared with the existing MEMS process, the present invention adopts traditional mechanical finishing methods (such as wire cutting), which greatly simplifies the production process, reduces production costs, shortens delivery cycles, and is more in line with domestic market demand.

[0033] Reference Figure 1 , the virtual shape formed by the inner wall of the notch that wraps the ground pin 3 is similar to the shape of the signal pin 2 formed by the side wall of the signal pin 2, that is, the width of the air gap 4 is equal at any position. This design allows the signal pin 2 to maintain a uniform air gap 4 throughout its entire length, thereby minimizing the radiation effect. That is, if the signal pin 2 is cylindrical, the inner wall of the notch that wraps the ground pin 3 should also present a corresponding circular profile; if the signal pin 2 has a square cross-section, the inner wall of the notch that wraps the ground pin 3 should present a corresponding square profile.

[0034] Reference Figure 1 The end of the cable 1 near the signal pin 2 is provided with a first inclined surface 11, and the ends of the signal pin 2 and the wrapped ground pin 3 are also provided with a second inclined surface 21, and the first inclined surface 11 and the second inclined surface 21 are arranged in parallel. Such a design helps to improve the visibility of the probe and facilitates the operator to accurately align the chip under test. For example, the angle of the first inclined surface 11 can be adjusted according to actual needs, and is usually set to about 45 degrees to balance visibility and ease of operation.

[0035] The signal pin 2 and the wrapped ground pin 3 are provided with an extended boss 22 at one end of the second inclined surface 21, and the extended boss 22 is located at the end of the signal pin 2 and the wrapped ground pin 3 close to the cable 1. The function of the extended boss 22 is to provide additional support during the insertion process to prevent the signal pin 2 and the wrapped ground pin 3 from deflecting or bending when subjected to lateral force. For example, the height of the extended boss 22 can be set to 0.5mm to 1mm, and the diameter is slightly larger than the diameter of the signal pin 2 and the wrapped ground pin 3 to ensure sufficient support area.

[0036] Reference Figure 1 and Figure 2 , the edge of the wrapped ground pin 3 protrudes from the cable 1. This can provide additional physical isolation when the probe contacts the chip under test, further reducing radiation interference. For example, the edge of the wrapped ground pin 3 can extend beyond the surface of the cable 1 by about 0.2mm to 0.3mm to ensure that the signal pin 2 is not directly exposed when contacting the chip under test.

[0037] The widest part of the part of the wrapped ground pin 3 protruding from the cable 1 is flush with the end of the signal pin 2 close to the wrapped ground pin 3. The widest part of the part of the wrapped ground pin 3 protruding from the cable 1 is flush with the end of the signal pin 2 close to the wrapped ground pin 3, ensuring that the overall structure of the probe is more compact, reducing the open electric field at the tip of the probe, and thus effectively reducing the radiation effect. This not only improves the stability and accuracy of the probe in high-frequency signal transmission, but also simplifies the manufacturing process, reduces production costs, and improves the cost performance of the product.

[0038] The edge of the wrapped ground pin 3 located on the extended boss 22 is connected to the connection point a5 of the wrapped ground pin 3 protruding from the cable 1, and the corner b6 of the cable 1 is close to the wrapped ground pin 3. The connection point a5 and the corner b6 of the cable 1 coincide with each other. This design makes the entire probe structure more compact, reduces unnecessary space occupation, and improves integration. For example, the connection point a5 and the corner b6 can be firmly connected by laser welding or the like to ensure reliability after long-term use. The above structure can solve the problem that the existing RF probe structure cannot realize an extremely small exposed probe at low cost and low difficulty, because there is no need to make a soft substrate microstrip sheet and electroforming contacts, the process requirements are reduced, the processing process is simple, and the manufacturing cost is reduced.

[0039] There is a recovery edge c7 between the end of the wrapped ground pin 3 away from the signal pin 2 and the part of the wrapped ground pin 3 protruding from the cable 1. There is an intersection d8 between the virtual rectangle projected when the cable 1 takes the wrapped ground pin 3 as the base and the recovery edge c7. The design of the recovery edge c7 is to guide the excess stress to concentrate on the designated area to prevent damage to the probe structure during the plugging and unplugging process.

[0040] The end of the wrapped ground pin 3 away from the signal pin 2 is set to a parallel edge e9, and the parallel edge e9 is set perpendicular to the axis of the cable 1. This design is conducive to improving the installation accuracy of the wrapped ground pin 3. This not only helps to maintain the overall structural stability and aesthetics of the probe, but also further reduces the impact of the radiation effect, ensuring the accuracy and stability of high-frequency signal transmission. In addition, this design also facilitates the installation and alignment of the probe in practical applications, improving the convenience and reliability of operation.

[0041] The implementation principle of a new type of microwave probe in the embodiment of the present application is: by tightly combining the signal needle 2 and the wrapped ground needle 3 to form a very small air gap 4, the electromagnetic radiation at the tip of the probe is effectively suppressed. At the same time, by optimizing the overall structure of the probe, such as setting an inclined surface, extending the boss 22, recovering edges and parallel edges, etc., the reliability and service life of the probe are further improved. Compared with the prior art, the probe of the present invention not only significantly reduces the radiation effect and improves the test accuracy, but also simplifies the process technology, reduces the production cost, and has higher market competitiveness.

[0042] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A novel microwave probe, comprising a cable (1), wherein the end of the cable (1) is provided with a signal pin (2) and a wrapped ground pin (3), characterized in that: The signal pin (2) is fixed on the conductor at the center of the cable (1), and the wrapped ground pin (3) is fixed on the conductor at the outer ring of the cable (1). A notch is provided on one side of the wrapped ground pin (3), and the signal pin (2) is embedded in the notch of the wrapped ground pin (3) to form a wrapping of the signal pin (2) by the wrapped ground pin (3); an air gap (4) is formed between the wrapped ground pin (3) and the signal pin (2) to suppress radiation.

2. A novel microwave probe according to claim 1, characterized in that: The virtual shape formed by the inner wall of the notch that wraps the ground pin (3) is similar to the shape of the signal pin (2) formed by the side wall of the signal pin (2), that is, the width of the air gap (4) is equal at any position.

3. A novel microwave probe according to claim 1, characterized in that: The end of the cable (1) is provided with a first inclined surface (11), and the ends of the signal pin (2) and the wrapped ground pin (3) are also provided with a second inclined surface (21), and the first inclined surface (11) and the second inclined surface (21) are arranged in parallel.

4. A novel microwave probe according to claim 3, characterized in that: An extension boss (22) is provided at one end of the signal pin (2) and the wrapped ground pin (3) located on the second inclined surface (21); the extension boss (22) is located at one end of the signal pin (2) and the wrapped ground pin (3) close to the cable (1).

5. A novel microwave probe according to claim 4, characterized in that: The edge of the wrapped ground pin (3) protrudes from the cable (1).

6. A novel microwave probe according to claim 5, characterized in that: The edge of the wrapped ground pin (3) is located on the extended boss (22) and the connection point a (5) where the wrapped ground pin (3) protrudes from the cable (1), and the edge b (6) of the cable (1) is close to one end of the wrapped ground pin (3), and the connection point a (5) and the edge b (6) of the cable (1) coincide with each other.

7. A novel microwave probe according to claim 6, characterized in that: There is a recovery edge c (7) between the end of the wrapped ground pin (3) away from the signal pin (2) and the portion of the wrapped ground pin (3) protruding from the cable (1), and there is an intersection d (8) between a virtual rectangle projected when the cable (1) takes the wrapped ground pin (3) as the base and the recovery edge c (7).

8. A novel microwave probe according to claim 7, characterized in that: One end of the wrapped ground pin (3) away from the signal pin (2) is arranged as a parallel edge e (9), and the parallel edge e (9) is arranged perpendicular to the axis of the cable (1).

9. A novel microwave probe according to claim 5, characterized in that: The widest part of the part of the wrapped ground pin (3) protruding from the cable (1) is flush with the end of the signal pin (2) close to the wrapped ground pin (3).

Images