Reciprocating beam profile online measurement device and method

Abstract

The invention relates to a reciprocating beam profile online measurement device and method. The device comprises a reciprocating transmission system, a motion angle conversion system, a beam signal collection system and a recovery system. The reciprocating transmission system comprises a reciprocating motion part in a vacuum chamber, the motion angle conversion system converts horizontal reciprocating linear motion of the reciprocating motion part into inclined reciprocating motion forming a certain included angle with the horizontal direction, and the beam signal collection system is driven by the motion angle conversion system to make inclined reciprocating motion. The signal collection module collects the contour information of the beam cross section in the working area, and the signal collection module is moved away from the working area when the recovery system is in a non-working state. Reciprocating motion of the signal collection module in the 45-degree direction is achieved, contour information collection of the beam cross section of the accelerator is completed, meanwhile, recovery of the device in the non-working state is achieved through the recovery system, and working space is reserved for other devices.

Description

Technical Field

[0001] The invention belongs to the field of beam measurement technology for accelerators, and in particular relates to a reciprocating beam profile online measurement device and method. Background Art

[0002] Beam diagnostic monitoring technology plays an important role in accelerator operation. In order to ensure the long-term stable transmission of the accelerator beam, the beam diagnostic monitoring device is required to provide beam transverse intensity distribution, beam center and diameter, beam emittance and other parameter information when adjusting the beam.

[0003] At present, the traditional beam diagnostic method belongs to the interception beam diagnostic method, such as fluorescent target, Faraday cage, etc., which will damage the beam distribution and cannot show the real-time beam situation. Therefore, the non-intercepting beam diagnostic system has received much attention. At the same time, the working space of the beam diagnostic device is limited, which requires the non-intercepting diagnostic method to have the characteristics of simple structure, small impact on the beam, and compact structure.

[0004] The beam profiler using non-interceptive diagnostic method should complete the measurement of the accelerator beam cross-sectional profile in a limited space in a non-interceptive manner, and be able to intuitively obtain the beam cross-sectional X and Y coordinate values ​​through simple operations to depict the beam cross-sectional profile. It should also be able to move the working area away without dismantling in the non-working state to leave working space for other beam monitoring instruments. The existing beam profile online measurement device is difficult to meet the above technical requirements, and its structure needs to be designed with targeted innovation. Summary of the invention

[0005] The purpose of the present invention is to provide a reciprocating beam profile online measurement device and method to address the technical problems that need to be solved in the prior art, to achieve online real-time measurement of the beam cross-sectional profile in a non-intercepting manner, and to achieve the recovery of the signal collection module when not in operation, thereby occupying as little space as possible in the beam diagnosis vacuum chamber.

[0006] To achieve the above object, the technical solution of the present invention is as follows:

[0007] A reciprocating beam profile online measurement device includes a reciprocating transmission system, a motion angle conversion system, a beam signal collection system and a recovery system; wherein the reciprocating transmission system includes a reciprocating motion component in a vacuum chamber, the motion angle conversion system converts the horizontal reciprocating linear motion of the reciprocating motion component into an inclined reciprocating motion with a certain angle to the horizontal direction, the beam signal collection system performs an inclined reciprocating motion driven by the motion angle conversion system, so that the signal collection module can collect the profile information of the beam cross section in the working area, and the recovery system moves the signal collection module away from the working area in a non-working state.

[0008] Further, in the above-mentioned reciprocating beam profile online measuring device, wherein,

[0009] The reciprocating transmission system includes a lead screw-slider transmission assembly driven by a stepper motor to realize the reciprocating linear motion of the reciprocating slider in the vacuum chamber;

[0010] The motion angle conversion system comprises a guide slider connected to the reciprocating slider through a slide slot connector, and the guide slider can slide back and forth along the inclined guide shaft driven by the reciprocating slider;

[0011] The beam signal collection system comprises a signal collection module arranged on an adapter block, wherein the adapter block is connected to the guide slider and can reciprocate along the inclined guide axis with the guide slider, so that the signal collection module can collect profile information of the beam cross section in the working area;

[0012] The recovery system comprises a recovery pipe capable of reciprocating motion, a gripper is provided at the front end of the recovery pipe, and the signal collection module is moved away from the working area by the gripper in a non-working state.

[0013] Furthermore, in a specific embodiment, as described above, in the reciprocating beam profile online measurement device, the stepper motor of the reciprocating transmission system is connected to a reciprocating screw arranged in a vacuum chamber through a coupling, and the reciprocating slider is arranged on the reciprocating screw, and the rotation of the reciprocating screw drives the reciprocating slider to perform reciprocating linear motion; a magnetic fluid seal is provided on the mounting flange of the vacuum chamber, and the output shaft of the stepper motor is connected to the magnetic fluid seal through a coupling I, and the other end of the magnetic fluid seal is connected to the reciprocating screw through a coupling II.

[0014] Further, in a specific embodiment, in the reciprocating beam profile online measurement device as described above, the reciprocating transmission system also includes a guide shaft I fixed on the vacuum chamber bracket, and the guide shaft I passes through the hole on the reciprocating slider, so that the reciprocating slider only moves along the guide shaft without rotating.

[0015] The reciprocating transmission system further comprises a laser position sensor arranged outside the vacuum chamber, and the laser position sensor identifies the position of the reciprocating slider through an observation window.

[0016] Further, in a specific embodiment, the reciprocating beam profile online measurement device as described above, wherein the slide groove connecting member of the motion angle conversion system includes a slide groove block and a needle roller bearing, the slide groove block is fixed on the reciprocating slider and moves with the reciprocating slider, a linear slide groove is opened on the slide groove block, the bearing end of the needle roller bearing is inserted into the linear slide groove, and the other end of the needle roller bearing is connected to the guide slider.

[0017] Furthermore, the inclined guide shaft of the motion angle conversion system is installed on the fixed block, the axial direction of the inclined guide shaft is at an angle of 45 degrees to the horizontal direction, a hole is opened on the guide slider, a dry sleeve is embedded in the hole, and the inclined guide shaft passes through the hole of the guide slider, so that the guide slider reciprocates along the inclined guide shaft at an angle of 45 degrees to the horizontal direction.

[0018] Furthermore, in a specific embodiment, the reciprocating beam profile online measurement device as described above, wherein the signal collection module of the beam signal collection system is fixed at one end of the horizontal guide shaft II, the adapter block is provided with a hole, a dry sleeve is embedded in the hole, the guide shaft II passes through the hole of the adapter block, and the guide shaft II connected to the signal collection module can reciprocate along the inclined guide shaft together with the guide slider together with the adapter block.

[0019] Further, in a specific embodiment, the reciprocating beam profile online measurement device as described above, wherein the signal collection module includes a U-shaped frame, and a plurality of winding poles are arranged along the U-shaped frame, and the winding poles are insulated from the U-shaped frame by insulating gaskets, and the plurality of winding poles are divided into two groups, one group is used to install and tighten the X-axis molybdenum wire, and the other group is used to install and tighten the Y-axis molybdenum wire. In each group of winding poles, there is a winding pole on which a conductor plug is inserted, and the conductor plug is connected to a signal receiving plug provided on the vacuum chamber mounting flange through a wire, and the signals collected by the X-axis molybdenum wire and the Y-axis molybdenum wire are transmitted to the signal receiving plug, and the outer part of the vacuum chamber of the signal receiving plug is connected to a signal identifier.

[0020] Furthermore, each group of winding poles for installing and tightening X-direction molybdenum wire or Y-direction molybdenum wire includes three independent winding poles, two of which are respectively located at the front and rear ends of different arms of the U-shaped frame for positioning the molybdenum wire, and the third winding pole is arranged adjacent to one of the winding poles, and a tensioning spring is provided on the third winding pole for tightening the molybdenum wire.

[0021] Further, in a specific embodiment, the reciprocating beam profile online measuring device as described above, wherein the recovery tube of the recovery system is connected to the screw motor and can reciprocate under the forward and reverse rotation of the screw motor, a bellows is sleeved on the outside of the recovery tube to ensure the vacuum seal when the recovery tube enters and exits the vacuum chamber, and the guide shaft III horizontally fixed on the mounting flange of the vacuum chamber allows the recovery tube and the bellows to move only in the axial direction; the other end of the guide shaft II connected to the signal collection module is provided with a mother block, and when the mother block is located at the lower end of the inclined guide shaft, the gripper arranged at the front end of the recovery tube can cooperate with the mother block to realize connection or disconnection operation, and when the gripper is connected to the mother block, the guide shaft II can slide in the hole of the adapter block under the drive of the recovery tube, so that the signal collection module is moved away from the working area.

[0022] As a specific implementation method, the mother block is provided with a spring plug, and a groove with an opening downward is formed between the spring plug and the main body of the mother block, and the wedge-shaped surface of the spring plug faces the gripper; when the recovery tube moves into the vacuum chamber, the gripper at the front end of the recovery tube lifts the spring plug and continues to move forward, and when the spring plug falls down, the gripper is restricted in the groove, and when the recovery tube moves out of the vacuum chamber, the gripper drives the mother block to move together, so that the guide shaft II slides in the hole of the adapter block, so that the signal collection module is moved away from the working area, and if the recovery tube moves in the opposite direction, the signal collection module will enter the working area; when the guide shaft II and the adapter block move upward along the inclined guide shaft with the guide slider, the gripper naturally detaches from the lower opening of the groove of the mother block.

[0023] The measurement method using the above-mentioned reciprocating beam profile online measurement device is as follows:

[0024] The stepper motor of the reciprocating transmission system transmits the rotational motion to the reciprocating screw through the coupling and the magnetic fluid seal, and the reciprocating slider converts the rotational motion of the reciprocating screw into reciprocating linear motion in the vacuum chamber;

[0025] The slide block of the slide connector of the motion angle conversion system moves together with the reciprocating slider, and the needle bearing of the slide connector drives the guide slider to slide back and forth along the inclined guide shaft through steering;

[0026] The adapter block of the beam signal collection system moves together with the guide slider, thereby driving the signal collection module to reciprocate along the inclined guide axis through the guide axis II; the movement of the signal collection module along the inclined guide axis can be decomposed into sub-movements with equal speeds along the X direction and the Y direction, thereby realizing the collection of the profile information of the beam cross section in the X and Y directions, and transmitting the collected information to the signal receiving plug, realizing two beam profile measurements through one reciprocating motion;

[0027] When the beam profile measurement is completed, the adapter block of the beam signal collection system moves to the lower end of the inclined guide shaft, and the gripper at the front end of the recovery tube of the recovery system can cooperate with the mother block at the end of the guide shaft II to realize the connection or disconnection operation. When the gripper is connected to the mother block, the guide shaft II can slide in the hole of the adapter block driven by the recovery tube, so that the signal collection module is moved away from the working area, leaving working space for other beam monitoring instruments.

[0028] Furthermore, in the measurement method of the reciprocating beam profile online measurement device as described above, a laser position sensor arranged outside the vacuum chamber identifies the position of the reciprocating slider inside the vacuum chamber through an observation window, thereby recording the working status of the beam signal collection system.

[0029] The beneficial effects of the present invention are as follows: the present invention realizes the reciprocating motion of the signal collection module in the direction of 45 degrees through the cooperation of the reciprocating transmission system, the motion angle conversion system and the beam signal collection system, so as to complete the profile information collection of the accelerator beam cross section, realize the online real-time measurement of the beam cross section profile, facilitate the accelerator beam adjustment, and maintain the long-term stability of the beam. At the same time, the recovery system realizes the recovery of the device when it is not in working state, and reserves working space for other devices. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is an isometric view of a reciprocating beam profile online measuring device in a specific embodiment of the present invention;

[0031] Figure 2 It is a structural schematic diagram of a reciprocating transmission system in a specific embodiment;

[0032] Figure 3 It is a structural schematic diagram of a motion angle conversion system in a specific embodiment;

[0033] Figure 4 It is a structural schematic diagram of a beam signal collection system and a recovery system in a specific embodiment;

[0034] Figure 5 It is a structural schematic diagram of a mother block in a specific embodiment;

[0035] Figure 6 It is a structural schematic diagram of a signal collection module in a specific embodiment;

[0036] Figure 7 It is a schematic diagram of the structure of the recovery tube in a specific embodiment.

[0037] In the figure, 1- bracket, 2- flange, 3- transition flange cylinder, 4- stepping motor, 5- coupling I, 6- magnetic fluid seal, 7- coupling II, 8- reciprocating screw, 9- reciprocating slider, 10- guide shaft I, 11- laser position sensor, 12- slide block, 13- needle bearing, 14- guide slider, 15- tilt guide shaft, 16- fixed block, 17- signal collection module, 18- signal receiving plug, 19- adapter Block, 20-guide shaft II, 21-mother block, 22-screw motor, 23-recovery tube, 24-bellows, 25-guide shaft III, 26-gripper, 1701-U-shaped frame, 1702-insulating gasket, 1703-winding column, 1704-X-axis molybdenum wire, 1705-Y-axis molybdenum wire, 1706-tensioning spring, 1707-conductor plug, 2101-spring plug, 2102-mother block body, 2103-groove. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0039] The present invention provides a reciprocating beam profile online measurement device, including a reciprocating transmission system, a motion angle conversion system, a beam signal collection system and a recovery system. The entire device is supported by a bracket, which supports the power parts, transmission system, etc. of the device to ensure the normal operation of the device. The flange and the transition flange cylinder are used to install the bracket, and the vacuum degree in the accelerator vacuum chamber is ensured by the sealing between some parts, and an observation window is opened on the side of the transition flange cylinder for use by a laser position sensor, so as to facilitate laser transmission to identify the position of the reciprocating slider inside the vacuum chamber.

[0040] The reciprocating transmission system includes a lead screw-slider transmission assembly driven by a stepper motor to realize the reciprocating linear motion of the reciprocating slider in the vacuum chamber;

[0041] The motion angle conversion system comprises a guide slider connected to the reciprocating slider through a slide slot connector, and the guide slider can slide back and forth along the inclined guide shaft driven by the reciprocating slider;

[0042] The beam signal collection system comprises a signal collection module arranged on an adapter block, wherein the adapter block is connected to the guide slider and can reciprocate along the inclined guide axis with the guide slider, so that the signal collection module can collect profile information of the beam cross section in the working area;

[0043] The recovery system comprises a recovery pipe capable of reciprocating motion, a gripper is provided at the front end of the recovery pipe, and the signal collection module is moved away from the working area by the gripper in a non-working state.

[0044] The specific structure of each system of the whole device is as follows Figure 1-7 shown.

[0045] Figure 1 In the figure, the bracket 1 is fixed on the flange 2, the left side of the flange 2 is the external structure of the vacuum chamber, and the right side of the flange is the internal structure of the vacuum chamber. A signal receiving plug 18 is provided on the flange 2, and the laser position sensor 11 is located outside the observation window on the transition flange cylinder 3.

[0046] like Figure 2As shown, the reciprocating transmission system includes a stepper motor 4, a coupling Ⅰ5, a magnetic fluid seal 6, a coupling Ⅱ7, a reciprocating screw 8, a reciprocating slider 9, a guide shaft Ⅰ10 and a laser position sensor 11. The stepper motor 4 is fixed on a bracket 1 outside the vacuum chamber, and the output shaft of the stepper motor 4 is connected to one end of the magnetic fluid seal 6 through the coupling Ⅰ5. The magnetic fluid seal 6 is installed on the flange 2 in the form of a thread, and the rotational motion outside the vacuum chamber is transmitted to the reciprocating screw 8 in the vacuum chamber, and the vacuum degree of the accelerator vacuum chamber is ensured. The other end of the magnetic fluid seal 6 is connected to the reciprocating screw 8 through the coupling Ⅱ7. The reciprocating screw 8 is installed on the bracket 1. A dry sliding sleeve is embedded in the bracket 1, and the reciprocating screw 8 penetrates the sliding sleeve, which can reduce the rotational friction coefficient of the reciprocating screw 8, reduce the heat generation of the reciprocating screw 8, and increase the life of the reciprocating screw 8. The reciprocating screw 8 is provided with a matching reciprocating slider 9. The rotation of the reciprocating screw 8 can drive the reciprocating slider 9 to perform reciprocating linear motion. A circular hole is opened on the reciprocating slider 9, and a guide shaft Ⅰ10 is inserted into the hole. The reciprocating slider 9 cooperates with the guide shaft Ⅰ10 to ensure that the slider only moves in the axial direction without rotating; the two ends of the guide shaft Ⅰ10 are connected and fixed to the bracket 1 by bolts. The laser position sensor 11 is installed on the bracket 1 outside the observation window by screws, and is used to identify the position of the reciprocating slider 9 in the reciprocating transmission system. When the reciprocating slider 9 returns to the extreme position close to the flange 2 end, the laser sensor is triggered to output a zeroing signal, which is convenient for recording the zero position information of the device.

[0047] like Figure 3 As shown, the motion angle conversion system includes a slide block 12, a needle roller bearing 13, a guide slider 14, an inclined guide shaft 15 and a fixed block 16. The slide block 12 is installed on the reciprocating slider 9 by screws, and reciprocates with the reciprocating slider 9. A linear slide is provided on the slide block 12, and the bearing end of the needle roller bearing 13 is inserted into the slide. The slide block 12 and the needle roller bearing 13 form a slide structure, and the other end of the needle roller bearing 13 is connected to the guide slider 14 by a thread. A cylindrical hole is provided on the guide slider 14 for embedding a dry sliding sleeve, and the dry sliding sleeve is penetrated by an inclined guide shaft 15, and the inclined guide shaft 15 is installed on the fixed block 16.

[0048] In this embodiment, the axial direction of the inclined guide shaft 15 is at an angle of 45 degrees to the horizontal direction, and the fixing block 16 is installed on the bracket 1 by screws. In this way, the reciprocating slider 9 reciprocates in the horizontal direction to drive the slide block 12 to reciprocate in the horizontal direction, and the slide block 12 provides reciprocating motion power for the guide slider 14 with the help of the needle bearing 13. Under the guidance of the inclined guide shaft 15 at an angle of 45 degrees to the horizontal direction, the guide slider 14 reciprocates at an angle of 45 degrees to the horizontal direction, completing the conversion of the horizontal reciprocating motion into the 45-degree reciprocating motion.

[0049] like Figure 4As shown, the beam signal collection system includes a signal collection module 17, a signal receiving plug 18, a transfer block 19, a guide shaft II 20 and a connecting mother block 21. In this embodiment, the structure of the signal collection module 17 is as follows Figure 6 As shown, it includes a U-shaped frame 1701, an insulating gasket 1702, a winding post 1703, an X-direction molybdenum wire 1704, a Y-direction molybdenum wire 1705, a tension spring 1706 and a conductor plug 1707. A plurality of winding posts 1703 are arranged along the two arms of the U-shaped frame 1701, and the winding posts 1703 are insulated from the U-shaped frame 1701 by the insulating gasket 1702. The plurality of winding posts are divided into two groups, one group is used for installing and tightening the X-direction molybdenum wire 1704, and the other group is used for installing and tightening the Y-direction molybdenum wire 1705.

[0050] In this embodiment, six identical holes are opened on the U-shaped frame 1701, and the holes are in the shape of dumbbells, and insulating gaskets 1702 are placed at both ends; the winding post 1703 is inserted into the hole with the insulating gasket 1702, so there are six winding posts 1703, each 3 in a group, two of each group of winding posts are respectively located at the front end and the rear end of different arms of the U-shaped frame, which are used for positioning the molybdenum wire, and the third winding post is arranged adjacent to one of the winding posts, which is used to tighten the molybdenum wire. Specifically, one end of the winding post 1703 is threaded through the hole of the insulating gasket 1702 and the winding post 1703 is tightened by a nut, so that the insulation between the winding post 1703 and the U-shaped frame 1701 is achieved, and the signal on the molybdenum wire is prevented from being interfered by the U-shaped frame 1701; the other end of the winding post 1703 is opened with a circular groove and a hole is punched on the side of the winding post 1703 body, which is used for positioning the molybdenum wire and installing and fixing the tensioning spring 1706. The X-direction molybdenum wire 1704 and the Y-direction molybdenum wire 1705 are cross-wired in space, and each molybdenum wire occupies three winding poles 1703. At the same time, one end of the molybdenum wires in both directions are tightened by the tension spring 1706, and the other end is wound on a winding pole 1703 for fastening. The X-direction molybdenum wire winding pole and the Y-direction molybdenum wire winding pole are insulated, and the conductor plug 1707 is inserted above the winding pole 1703, and only one winding pole among the three winding poles occupied by the X-direction molybdenum wire 1704 and one winding pole among the three winding poles occupied by the Y-direction molybdenum wire 1705 are selected for installation, for receiving X (Y) direction signals, and a wire is installed on the conductor plug 1707, and the other end of the wire is connected to the signal receiving plug 18 set on the flange 2. In this way, the conductor plug 1707 transmits the signals collected by the X and Y molybdenum wires to the signal receiving plug 18 through the wire.

[0051] In this embodiment, the signal receiving plug 18 is fixed to the flange 2 by bolts, the vacuum outer part of the signal receiving plug 18 is connected to the signal identifier by wires, and the vacuum inner part is connected to the conductor plug 1707 of the signal collection module 17 by wires. The adapter block 19 is installed on the guide slider 14 by screws, and reciprocates with the guide slider 14 at an angle of 45 degrees to the horizontal direction. The adapter block 19 has a hole embedded in the dry sleeve, and the guide shaft II 20 will penetrate into the hole of the adapter block 19 and be lubricated by the sleeve. One end of the guide shaft II 20 is connected to the signal collection module 17 by bolts, and the other end of the guide shaft II 20 is connected to the mother block 21 by threads. A spring plug is installed in the mother block 21 for cooperation with the recovery system. During the working process, the signal collection system does not move inside, so the signal collection system will reciprocate in the 45-degree direction driven by the guide slider. At this time, the movement in the 45-degree direction can be decomposed into equal-speed sub-movements along the X and Y directions, so as to realize the collection of the profile information of the beam cross section in the X and Y directions.

[0052] like Figure 4 As shown, the recovery system includes a screw motor 22, a recovery tube 23, a bellows 24 and a guide shaft III 25. The nut of the screw motor 22 is fixed to one end of the recovery tube 23 by bolts, so that the forward and reverse rotation of the screw motor 22 can drive the recovery tube 23 to reciprocate through the nut. The end of the recovery tube 23 connected to the nut is also connected to one end of the bellows 24 by bolts. The bellows 24 sleeves the recovery tube 23 inside the bellows 24 to ensure vacuum sealing. The other end of the bellows 24 is installed on the flange 2, so that the reciprocating motion of the recovery tube 23 is achieved while ensuring the vacuum degree of the vacuum chamber. The guide shaft III 25 is installed on the flange 2 and passes through the end flange of the bellows 24. Its function is to make the bellows 24 and the recovery tube 23 move only in the axial direction. The other end of the recovery tube 23 is a fixed gripper 26. In this embodiment, the structure of the gripper 26 is as shown in Figure 7 As shown, it cooperates with the female block 21 connected to one end of the guide shaft II 20. The structure of the female block 21 is as follows Figure 5 As shown, the female block 21 is provided with a spring plug 2101 , and a groove 2103 opening downward is formed between the spring plug 2101 and the female block body 2102 , and the wedge-shaped surface of the spring plug 2101 faces the gripper 26 .

[0053] When the beam signal collection system completes a reciprocating measurement, the adapter block 19 of the beam signal collection system moves to the lower end of the inclined guide shaft 15. At this time, the bellows 24 is compressed, the recovery tube 23 extends into the specified position, and the gripper 26 lifts the spring plug 2101 of the mother block 21 connected to one end of the guide shaft II 20 and continues to move forward. Then the spring plug 2101 falls down and forms a groove with the mother block body 2102, which restricts the gripper 26 in the groove. The gripper 26 will also stop moving at this time, ready to grab the recovery signal collection system. The existence of the groove restricts the relative horizontal movement between the gripper 26 and the connected mother block 21. In other words, if the gripper is retracted at this time, it will drive the mother block 21 to be retracted together. Therefore, when the recovery tube 23 returns to the initial test position, the bellows 24 will be stretched accordingly, so that the beam signal collection system will also be retracted along with the recovery tube 23, that is, the guide shaft II 20 can slide in the hole of the adapter block 19 driven by the recovery tube 23, so that the signal collection module 17 is moved away from the working area, so that the signal collection module 17 occupies as little space as possible in the beam diagnosis vacuum chamber.

[0054] When the beam cross-section signal acquisition operation is performed, the recovery tube 23 will once again drive the signal collection module 17 to the position before the previous recovery, and then the guide slider 14 will move, so that the beam signal collection system moves upward along the 45-degree inclined guide axis 15. Due to the opening below the groove 2103 formed by the spring plug 2101 and the main body 2102 of the mother block 21, the beam signal collection system moves upward at 45 degrees, and the mother block 21 naturally separates from the gripper 26 of the recovery tube. After separation, the recovery tube 23 is retracted to the initial test position. The entire system will be reset to zero, and then the online measurement of the beam can be performed.

[0055] A complete measurement process of the above-mentioned reciprocating beam profile online measurement device is described as follows:

[0056] The stepper motor 4 of the reciprocating transmission system transmits the rotational motion to the reciprocating screw 8 through the coupling I5, the magnetic fluid seal 6 and the coupling II7, and the reciprocating slider 9 converts the rotational motion of the reciprocating screw 8 into reciprocating linear motion in the vacuum chamber;

[0057] The slide block 12 of the slide connector of the motion angle conversion system moves together with the reciprocating slider 9, and the needle bearing 13 of the slide connector drives the guide slider 14 to slide back and forth along the inclined guide shaft 15 at an angle of 45 degrees to the horizontal direction through steering;

[0058] The adapter block 19 of the beam signal collection system moves together with the guide slider 14, thereby driving the signal collection module 17 to reciprocate along the inclined guide axis 15 through the guide axis II 20; the movement of the signal collection module 17 along the inclined guide axis can be decomposed into sub-movements with equal speeds along the X direction and the Y direction, thereby realizing the collection of the profile information of the beam cross section in the X and Y directions, and transmitting the collected information to the signal receiving plug 18, realizing two beam profile measurements through one reciprocating motion;

[0059] The laser position sensor 11 outside the vacuum chamber identifies the position of the reciprocating slider 9 inside the vacuum chamber through the observation window. When the reciprocating slider 9 returns to the limit position close to one end of the flange 2, the laser position sensor 11 is triggered to output a zeroing signal, which is convenient for recording the zero position information of the device.

[0060] When the beam profile measurement is completed, the adapter block 19 of the beam signal collection system moves to the lower end of the inclined guide shaft 15, and the gripper 26 at the front end of the recovery tube 23 of the recovery system can cooperate with the mother block 21 at the end of the guide shaft II to realize the connection or disconnection operation. When the gripper 26 is connected to the mother block 21, the guide shaft II 20 can slide in the hole of the adapter block 19 driven by the recovery tube, so that the signal collection module 17 is moved away from the working area to leave working space for other beam monitoring instruments.

[0061] Those skilled in the art will readily conceive of other embodiments of the present invention after considering the specification and practicing the invention disclosed herein. This application is intended to cover any variations, uses or adaptations of the present invention that follow the general principles of the present invention and include common knowledge or customary techniques in the art that are not disclosed by the present invention. Thus, if these variations and use adaptations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and use adaptations.

[0062] The above embodiments are merely illustrative of the present invention, and the present invention may also be implemented in other specific ways or other specific forms without departing from the gist or essential features of the present invention. Therefore, the described embodiments should be considered illustrative rather than restrictive in any respect. The scope of protection of the present invention should be described by the claims, and any changes equivalent to the intent and scope of the claims should also be included within the scope of the present invention.

Claims

1. A reciprocating beam profile online measurement device, characterized in that: It includes a reciprocating transmission system, a motion angle conversion system, a beam signal collection system and a recovery system; wherein the reciprocating transmission system includes a reciprocating motion component in a vacuum chamber, the motion angle conversion system converts the horizontal reciprocating linear motion of the reciprocating motion component into an inclined reciprocating motion with a certain angle to the horizontal direction, the beam signal collection system performs an inclined reciprocating motion driven by the motion angle conversion system, so that the signal collection module can collect the profile information of the beam cross section in the working area, and the recovery system moves the signal collection module away from the working area in a non-working state.

2. The reciprocating beam profile online measurement device according to claim 1, characterized in that: The reciprocating transmission system comprises a lead screw-slider transmission assembly driven by a stepping motor (4) to realize reciprocating linear motion of the reciprocating slider (9) in the vacuum chamber; The motion angle conversion system comprises a guide slider (14) connected to the reciprocating slider (9) via a slide slot connector, and the guide slider (14) can slide back and forth along an inclined guide shaft (15) driven by the reciprocating slider (9); The beam signal collection system comprises a signal collection module (17) arranged on an adapter block (19); the adapter block (19) is connected to the guide slider (14) and can reciprocate along the inclined guide axis (15) along with the guide slider (14), so that the signal collection module (17) can collect profile information of the beam cross section in the working area; The recovery system comprises a recovery pipe (23) capable of reciprocating movement, a gripper (26) being provided at the front end of the recovery pipe (23), and the signal collection module (17) is moved away from the working area by the gripper (26) in a non-working state.

3. The reciprocating beam profile online measurement device according to claim 2, characterized in that: The stepping motor (4) of the reciprocating transmission system is connected to a reciprocating screw (8) arranged in the vacuum chamber through a coupling, and the reciprocating slider (9) is arranged on the reciprocating screw (8). The rotation of the reciprocating screw (8) drives the reciprocating slider (9) to perform reciprocating linear motion.

4. The reciprocating beam profile online measurement device according to claim 3, characterized in that: A magnetic fluid seal (6) is provided on the mounting flange (2) of the vacuum chamber, the output shaft of the stepping motor (4) is connected to the magnetic fluid seal (6) through a coupling I (5), and the other end of the magnetic fluid seal (6) is connected to a reciprocating screw (8) through a coupling II (7).

5. The reciprocating beam profile online measurement device according to claim 2, characterized in that: The reciprocating transmission system also includes a guide shaft I (10) fixed on the vacuum chamber bracket, and the guide shaft I (10) passes through the hole on the reciprocating slider (9), so that the reciprocating slider (9) only moves along the guide shaft I without rotating.

6. The reciprocating beam profile online measurement device according to claim 2, characterized in that: The reciprocating transmission system further comprises a laser position sensor (11) arranged outside the vacuum chamber, and the laser position sensor (11) identifies the position of the reciprocating slider (9) through an observation window.

7. The reciprocating beam profile online measuring device according to claim 2, characterized in that: The slide connecting member of the motion angle conversion system comprises a slide block (12) and a needle roller bearing (13). The slide block (12) is fixed on the reciprocating slider (9) and moves with the reciprocating slider (9). A linear slide is formed on the slide block (12). The bearing end of the needle roller bearing (13) is inserted into the linear slide. The other end of the needle roller bearing (13) is connected to the guide slider (14).

8. The reciprocating beam profile online measuring device according to claim 2 or 7, characterized in that: The tilted guide shaft (15) of the motion angle conversion system is mounted on a fixed block (16), the axial direction of the tilted guide shaft (15) forms an angle of 45 degrees with the horizontal direction, the guide slider (14) is provided with a hole, a dry sleeve is embedded in the hole, the tilted guide shaft (15) passes through the hole of the guide slider (14), so that the guide slider (14) performs a reciprocating motion along the tilted guide shaft (15) at an angle of 45 degrees with the horizontal direction.

9. The reciprocating beam profile online measuring device according to claim 2, characterized in that: The signal collection module (17) of the beam signal collection system is fixed to one end of the horizontal guide shaft II (20), the adapter block (19) is provided with a hole, a dry sleeve is embedded in the hole, the guide shaft II (20) passes through the hole of the adapter block (19), and the guide shaft II (20) connected to the signal collection module (17) can reciprocate along the inclined guide shaft (15) together with the adapter block (19) and the guide slider (14).

10. The reciprocating beam profile online measuring device according to claim 2, characterized in that: The signal collection module (17) comprises a U-shaped frame (1701), along which a plurality of winding poles (1703) are arranged, the winding poles (1703) being insulated from the U-shaped frame (1701) by insulating gaskets (1702), the plurality of winding poles (1703) being divided into two groups, one group being used for installing and tightening X-direction molybdenum wires (1704), and the other group being used for installing and tightening Y-direction molybdenum wires (1705), one winding pole in each group having a conductor plug (1707) plugged thereon, the conductor plug (1707) being connected to a signal receiving plug (18) arranged on a vacuum chamber mounting flange (2) via a wire, and transmitting signals collected by the X-direction molybdenum wires and the Y-direction molybdenum wires to the signal receiving plug (18), and the vacuum chamber outer side portion of the signal receiving plug (18) being connected to a signal identifier.

11. The reciprocating beam profile online measuring device according to claim 10, characterized in that: Each group of winding poles for installing and tightening X-direction molybdenum wire (1704) or Y-direction molybdenum wire (1705) includes three independent winding poles, two of which are respectively located at the front and rear ends of different arms of the U-shaped frame (1701) for positioning the molybdenum wire, and the third winding pole is arranged adjacent to one of the winding poles, and a tensioning spring (1706) is provided on the third winding pole for tightening the molybdenum wire.

12. The reciprocating beam profile online measuring device according to claim 2, characterized in that: The recovery pipe (23) of the recovery system is connected to the lead screw motor (22) and can reciprocate under the forward and reverse rotation of the lead screw motor (22). The recovery pipe (23) is covered with a bellows (24) to ensure vacuum sealing when the recovery pipe (23) enters and exits the vacuum chamber. The guide shaft III (25) fixed horizontally on the vacuum chamber mounting flange (2) allows the recovery pipe (23) and the bellows (24) to move only in the axial direction. The other end of the guide shaft II (20) connected to the signal collection module (17) is provided with a mother block (21). When the mother block (21) is located at the lower end of the inclined guide shaft (15), the gripper (26) arranged at the front end of the recovery pipe (23) can cooperate with the mother block (21) to achieve connection or disconnection operations. When the gripper is connected to the mother block, the guide shaft II (20) can slide in the hole of the adapter block (19) driven by the recovery pipe (23) to move the signal collection module (17) away from the working area.

13. The reciprocating beam profile online measuring device according to claim 12, characterized in that: The mother block (21) is provided with a spring plug (2101), and a groove (2103) opening downward is formed between the spring plug (2101) and the mother block body (2102), and the wedge-shaped surface of the spring plug (2101) faces the gripper (26); when the recovery tube (23) moves into the vacuum chamber, the gripper at the front end of the recovery tube lifts up the spring plug (2101) and continues to move forward, and when the spring plug (2101) falls down, the gripper is confined in the groove (2103), and when the recovery tube (23) moves into the vacuum chamber, the gripper at the front end of the recovery tube lifts up the spring plug (2101) and continues to move forward, When the guide shaft II (20) and the adapter block (19) move outward, the gripper drives the mother block (21) to move together, so that the guide shaft II (20) slides in the hole of the adapter block (19), so that the signal collection module (17) moves away from the working area. If the recovery tube (23) moves in the opposite direction, the signal collection module (17) will enter the working area. When the guide shaft II (20) and the adapter block (19) move upward along the inclined guide shaft (15) along with the guide slider (14), the gripper naturally disengages from the lower opening of the groove (2103) of the mother block.

14. A measurement method using the reciprocating beam profile online measurement device according to any one of claims 1 to 13, characterized in that: include: The stepper motor of the reciprocating transmission system transmits the rotational motion to the reciprocating screw through the coupling and the magnetic fluid seal, and the reciprocating slider converts the rotational motion of the reciprocating screw into reciprocating linear motion in the vacuum chamber; The slide block of the slide connector of the motion angle conversion system moves together with the reciprocating slider, and the needle bearing of the slide connector drives the guide slider to slide back and forth along the inclined guide shaft through steering; The adapter block of the beam signal collection system moves together with the guide slider, thereby driving the signal collection module to reciprocate along the inclined guide axis through the guide axis II; the movement of the signal collection module along the inclined guide axis can be decomposed into sub-movements with equal speeds along the X direction and the Y direction, thereby realizing the collection of the profile information of the beam cross section in the X and Y directions, and transmitting the collected information to the signal receiving plug, realizing two beam profile measurements through one reciprocating motion; When the beam profile measurement is completed, the adapter block of the beam signal collection system moves to the lower end of the inclined guide shaft, and the gripper at the front end of the recovery tube of the recovery system can cooperate with the mother block at the end of the guide shaft II to realize the connection or disconnection operation. When the gripper is connected to the mother block, the guide shaft II can slide in the hole of the adapter block driven by the recovery tube, so that the signal collection module is moved away from the working area, leaving working space for other beam monitoring instruments.

15. The measuring method of the reciprocating beam profile online measuring device according to claim 14, characterized in that: The laser position sensor arranged outside the vacuum chamber identifies the position of the reciprocating slider inside the vacuum chamber through the observation window, thereby recording the working status of the beam signal collection system.

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