Optical scanning module automatic switching device, optical scanning system and switching method

Abstract

The invention relates to an optical scanning module automatic switching device, an optical scanning system and a switching method, which are composed of an elastic material and realize switching of different scanning modules under the conditions of not changing an optical path and introducing more devices through combination of an electric control displacement device and a double-axis galvanometer module. The core technology is characterized by electric control displacement and multi-scanning module switching, and the problems of light path change and light path loss increase caused by scanning module switching are solved.

Description

Technical Field

[0001] The present invention relates to the field of optics, and in particular to an automatic switching device for an optical scanning module, an optical scanning system and a switching method. Background Art

[0002] In biomedical imaging, lasers are often used to perform raster scanning on the sample surface. Usually, two galvanometer oscillators are used to form an XY scanning system (referred to as a slow scanning module). In order to increase the scanning speed, a fast scanning module composed of a resonant oscillator and a galvanometer oscillator can be used. The slow scanning module and the fast scanning module correspond to different usage requirements, and the user needs to switch between the two scanning modules according to the current usage requirements.

[0003] The existing technical solution uses a reflector to change the optical path and guide the light to two modules to achieve switching. Figure 1 As shown, it includes a fast scanning module 100, a slow scanning module 300, and two reversible devices 200 with reflectors installed, one reversible device 200 is located in the incident light path, and the other reversible device 200 is located in the outgoing light path, wherein the reversible device may include a reflector 201 and a motor 202. When the fast scanning module 100 is used to scan the sample, the reversible device 200 located in the incident light path is flipped downward, so that the reflector on the reversible device 200 does not intervene in the light path, and the incident light enters the fast scanning module 100 from the incident light path 401 and then exits, and the reversible device 200 located in the outgoing light path is flipped downward, so that the reflector on the reversible device 200 does not intervene in the light path, and the outgoing light directly irradiates the sample surface to scan the sample. When the slow scanning module 300 is used, the flippable device 200 located in the incident light path flips upward, so that the reflector on the flippable device 200 intervenes in the light path, and the incident light enters the slow scanning module 100 from the incident light path 402 and then exits. The flippable device 200 located in the exit light path flips upward, so that the reflector on the flippable device 200 intervenes in the light path, and the exit light is reflected and irradiates the sample surface to scan the sample.

[0004] The prior art relies on manually operating the flip device 200 to switch the reflector when switching the scanning module, and the optical path of the fast scanning module 100 is obviously different from the optical path of the slow scanning module 300. The incident optical path 402 of the slow scanning module 300 passes through one more reflector than the incident optical path 401 of the fast scanning module 100, and the output optical path of the slow scanning module 300 also passes through one more reflector than the output optical path of the fast scanning module 100. The optical path losses are different, and the optical path of the slow scanning module 300 is more complicated. If there are differences in the dual-axis design of the scanning module, it may be necessary to continue to add reflectors to correct the optical path, and the optical path loss and complexity will be further increased. Summary of the invention

[0005] In order to solve the problems in the prior art, the embodiments of this article provide an automatic switching device for optical scanning modules, an optical scanning system and a switching method, which realizes switching different scanning modules without changing the optical path or introducing more devices through the combination of an electric-controlled displacement device and a dual-axis galvanometer module. The core technical features are electric-controlled displacement and multi-scanning module switching, which solves the problem of optical path changes and increased optical path loss caused by switching scanning modules.

[0006] On the one hand, an embodiment of the present specification provides an optical scanning module automatic switching device, comprising:

[0007] Fast scanning module, slow scanning module, electric translation stage, stage and controller;

[0008] The fast scanning module and the slow scanning module are arranged and installed on the stage along the Z-axis direction, the incident light path of the fast scanning module and the incident light path of the slow scanning module are parallel to the incident direction of the incident light, and the line between the first optical center point of the fast scanning module and the second optical center point of the slow scanning module is parallel to the Z-axis; the Z-axis is perpendicular to the incident light path and the outgoing light path of the fast scanning module, or perpendicular to the incident light path and the outgoing light path of the slow scanning module;

[0009] The stage is mounted on the electric translation stage;

[0010] The controller is used to use the fast scanning module or the slow scanning module corresponding to the scanning requirement as the target scanning module, and control the stage on the electric translation stage to move along the Z-axis direction according to the predetermined position of the incident light and the current position of the target scanning module, so that the incident light enters the target scanning module and performs a raster scan on the sample surface in the direction of the output light path of the target scanning module.

[0011] Furthermore, it also includes a beam analysis module, which is installed on the stage;

[0012] The beam analysis module is used to analyze the current position of the incident light;

[0013] The controller is further used to calculate the position change and change direction of the incident light according to the current position of the incident light and the predetermined position after controlling the stage on the electric translation stage to move along the Z-axis direction so that the incident light enters the target scanning module, and control the movement of the stage on the electric translation stage according to the position change and change direction of the incident light.

[0014] Furthermore, the optical axis of the beam analysis module is parallel to the X-axis, and the beam analysis module is used to analyze the current position of the incident light on a plane perpendicular to the X-axis, and the X-axis is parallel to the incident light path of the fast scanning module or the slow scanning module.

[0015] Furthermore, the controller controls the movement of the stage on the electric translation stage according to the position change of the incident light, including:

[0016] Calculating the position change and change direction of the current position of the incident light relative to the predetermined position on a plane perpendicular to the X-axis;

[0017] The stage on the electric translation stage is controlled to move a distance corresponding to the position change in the change direction.

[0018] Furthermore, the beam analysis module is also used to analyze the incident direction of the incident light;

[0019] The controller is further used to calculate the angle between the incident direction of the incident light and the direction of the current incident light axis of the target scanning module, and control the stage on the electric translation stage to rotate around an axis perpendicular to the X-axis and the Z-axis according to the angle.

[0020] Furthermore, the light beam analysis module is located between the fast scanning module and the slow scanning module, and the optical axis of the light beam analysis module, the incident light axis of the fast scanning module and the incident light axis of the slow scanning module are in the same plane.

[0021] Furthermore, in the process of the controller controlling the stage on the electric translation stage to move along the Z-axis direction, the incident light can enter the beam analysis module, and the controller is further used to calculate the latest moving distance and the latest moving direction of the stage according to the position change of the incident light, the changing direction of the incident light, and the predetermined moving distance and the predetermined moving direction of the stage, and control the stage on the electric translation stage to move according to the latest moving distance and the latest moving direction, the predetermined moving distance being the distance the stage moves when the target scanning module is moved to the predetermined position of the incident light, and the predetermined moving direction being the direction the stage moves when the target scanning module is moved to the predetermined position of the incident light.

[0022] On the other hand, the embodiments of this specification also provide an optical scanning system, including a light generator, a polarization beam splitter prism, a detection end, and the above-mentioned automatic switching device for the optical scanning module;

[0023] The light generator is used to generate a light beam;

[0024] The polarization beam splitter prism is located on the optical path of the light beam and is used to modulate the light beam into a P polarization state to obtain incident light;

[0025] The optical scanning module automatic switching device is located on the optical path of the incident light, and is used to move the fast scanning module or the slow scanning module to the optical path of the incident light according to the scanning requirements, so that the incident light enters the fast scanning module or the slow scanning module, and performs raster scanning on the sample surface in the direction of the outgoing optical path, and the reflected light in the S polarization state carrying the tissue information of the sample surface enters the fast scanning module or the slow scanning module along the outgoing optical path, and is emitted from the incident optical path of the fast scanning module or the slow scanning module to the polarization beam splitter prism, and the polarization beam splitter prism reflects the reflected light to the detection end;

[0026] The detection end is used to image the tissue information of the sample surface according to the reflected light.

[0027] On the other hand, the embodiments of this specification further provide an optical scanning module automatic switching method, which is applied to the above-mentioned optical scanning module automatic switching device, and the method includes:

[0028] The fast scanning module or the slow scanning module corresponding to the scanning requirement is used as the target scanning module;

[0029] According to the predetermined position of the incident light and the current position of the target scanning module, the stage on the electric translation stage is controlled to move along the Z-axis direction, so that the incident light enters the target scanning module, and a raster scan is performed on the sample surface in the direction of the output light path of the target scanning module. The Z-axis is perpendicular to the incident light path and the output light path of the fast scanning module, or perpendicular to the incident light path and the output light path of the slow scanning module.

[0030] Finally, an embodiment of the present specification also provides a computer device, including a memory, a processor, and a computer program stored in the memory, and the processor implements the above method when executing the computer program.

[0031] Compared with the solution of using a flip mirror to adjust the optical path to switch the functional module, the optical scanning module automatic switching device provided in the embodiment of the present specification uses an electric translation stage to control the fast scanning module or the slow scanning module to enter the optical path, and does not change the optical path itself. Except for the switched scanning module, no other components in the optical path are changed, and the optical path is more stable and reliable. In addition, the embodiment of the present specification does not need to add a reflector, so it will not increase the light intensity loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of this article or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of this article. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0033] Figure 1 It is a structural schematic diagram of a switching scheme of an optical scanning module in the prior art;

[0034] Figure 2 This is a schematic diagram of the structure of the automatic switching device of the optical scanning module in the embodiment of this specification;

[0035] Figure 3 This is a schematic diagram of the structure of the optical scanning system in the embodiment of this specification;

[0036] Figure 4 Schematic diagram of the structure of an automatic switching device for optical scanning modules including a beam analysis module in an embodiment of this specification;

[0037] Figure 5 is a flow chart of an automatic switching method of an optical scanning module in an embodiment of this specification;

[0038] Figure 6 The figure is a schematic diagram of the structure of a computer device in an embodiment of the present specification.

[0039] [Description of Reference Numerals]

[0040] 1. Light generator;

[0041] 2. Polarization beam splitter prism;

[0042] 3. Detection end;

[0043] 100. Quick scan module;

[0044] 200. Reversible device;

[0045] 201, reflector;

[0046] 202. Motor;

[0047] 300, slow scanning module;

[0048] 401, incident light path;

[0049] 402, incident light path;

[0050] 500, electric translation stage;

[0051] 600, stage;

[0052] 800, beam analysis module;

[0053] 602. Computer equipment;

[0054] 604, processor;

[0055] 606. Memory;

[0056] 608, driving mechanism;

[0057] 610, input / output module;

[0058] 612. Input devices;

[0059] 614. Output device;

[0060] 616. Presentation equipment;

[0061] 618. Graphical user interface;

[0062] 620, network interface;

[0063] 622, communication link;

[0064] 624. Communication bus. DETAILED DESCRIPTION

[0065] The following will be combined with the drawings in the embodiments of this article to clearly and completely describe the technical solutions in the embodiments of this article. Obviously, the described embodiments are only part of the embodiments of this article, not all of the embodiments. Based on the embodiments of this article, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this article.

[0066] In view of the problems existing in the prior art, the embodiments of this specification provide an automatic switching device for an optical scanning module, such as Figure 2 As shown, it includes: a fast scanning module 100, a slow scanning module 300, an electric translation stage 500, a stage 600 and a controller;

[0067] The fast scanning module 100 and the slow scanning module 300 are arranged and installed on the stage 600 along the Z-axis direction, the incident light path of the fast scanning module 100 and the incident light path of the slow scanning module 300 are parallel to the incident direction of the incident light, and the line between the first optical center point of the fast scanning module 100 and the second optical center point of the slow scanning module 300 is parallel to the Z-axis; the Z-axis is perpendicular to the incident light path and the outgoing light path of the fast scanning module 100, or perpendicular to the incident light path and the outgoing light path of the slow scanning module 300;

[0068] The stage 600 is mounted on the electric translation stage 500;

[0069] The controller is used to use the fast scanning module 100 or the slow scanning module 300 corresponding to the scanning requirement as the target scanning module, and control the stage 600 on the electric translation stage 500 to move along the Z-axis direction according to the predetermined position of the incident light and the current position of the target scanning module, so that the incident light enters the target scanning module and performs a raster scan on the sample surface in the direction of the output light path of the target scanning module.

[0070] In the embodiment of the present specification, the fast scanning module 100 and the slow scanning module 300 both have two lenses, the first lens is used to receive incident light, and the second lens is used to irradiate the outgoing light onto the sample surface, receive the reflected light from the sample surface, and then emit the reflected light from the first lens. Usually, the optical axis of the first lens (incident optical axis) is perpendicular to the optical axis of the second lens (outgoing optical axis), but there are also some scanning modules whose incident optical axis and outgoing optical axis are not perpendicular, and the automatic switching device of the optical scanning module in the embodiment of the present specification is applicable.

[0071] It should be noted that both the fast scanning module 100 and the slow scanning module 300 are mature optical components in the art, and their scanning principles are not described in detail here.

[0072] In the embodiment of the present specification, the first optical center point is the intersection of the incident light axis and the output light axis of the fast scanning module 100, the second optical center point is the intersection of the incident light axis and the output light axis of the slow scanning module 300, the Z axis is parallel to the line between the first optical center point and the second optical center point, and the stage 600 moves along the Z axis, so the line between the optical axis of the fast scanning module 100 and the optical axis of the slow scanning module 300 is also parallel to the movement direction of the Z axis. Therefore, when the position of the incident light does not change, if fast scanning is currently used, that is, the incident light axis of the fast scanning module 100 corresponds to the position of the incident light, then when it is necessary to switch to slow scanning, it is only necessary to move the stage 600 along the Z axis direction, and the incident light axis of the slow scanning module 300 can correspond to the position of the incident light without any offset.

[0073] Therefore, the optical paths of the fast scanning module 100 and the slow scanning module 300 of the embodiment of the present specification are the same, thereby abandoning the traditional solution that requires a reflector to adjust the optical path, reducing the optical path loss and complexity.

[0074] In the embodiment of the present specification, the fast scanning module 100 can be fixed on the stage 600 by bolts, and the slow scanning module 300 and the fast scanning module 100 can be connected and fixed by bolts. The threaded hole is processed on the top cover of the outer shell of the fast scanning module 100 located below, and the position is located at the center of the optical axis of the two scanning modules, ensuring that the optical axes are parallel and aligned in the Z-axis direction after the two scanning modules are connected.

[0075] The electric translation stage can be composed of a stepper motor, a lead screw, and a guide rail, and the stage 600 is mounted on the guide rail. The electric translation stage 500 can communicate with the controller via the RS232 serial port, and the controller sends instructions to control the operation of the stepper motor in the electric translation stage 500, driving the lead screw to rotate, thereby controlling the movement of the stage 600.

[0076] Based on Figure 2 The optical scanning module automatic switching device shown in the figure, the embodiment of this specification also provides an optical scanning system, such as Figure 3 As shown, it includes a light generator 1, a polarization beam splitter prism 2, a detection end 3 and Figure 2 The optical scanning module automatic switching device shown;

[0077] The light generator 1 is used to generate a light beam;

[0078] The polarization beam splitter prism 2 is located on the optical path of the light beam and is used to modulate the light beam into a P polarization state to obtain incident light;

[0079] The optical scanning module automatic switching device is located on the optical path of the incident light, and is used to move the fast scanning module 100 or the slow scanning module 300 to the optical path of the incident light according to the scanning requirements, so that the incident light enters the fast scanning module 100 or the slow scanning module 300, and performs raster scanning on the sample surface in the direction of the outgoing optical path, and the reflected light in the S polarization state carrying the tissue information of the sample surface enters the fast scanning module 100 or the slow scanning module 300 along the outgoing optical path, and is emitted from the incident optical path of the fast scanning module 100 or the slow scanning module 300 to the polarization beam splitter prism 2, and the polarization beam splitter prism 2 reflects the reflected light to the detection end 3;

[0080] The detection end 3 is used to image the tissue information of the sample surface according to the reflected light.

[0081] In the embodiments of this specification, the imaging method of the detection end 3 is common knowledge in the art and will not be described in detail here.

[0082] In the embodiment of the present specification, when it is necessary to switch the scanning module, the relative position between the light generator 1 and the automatic switching device for optical scanning modules is known, and the positions of the slow scanning module 300 and the fast scanning module 100 on the automatic switching device for optical scanning modules are also known. Therefore, the distance required for the scanning module to move to the optical path of the incident light can be calculated based on the current position of any scanning module relative to the automatic switching device for optical scanning modules and the predetermined position of the light generator 1 relative to the automatic switching device for optical scanning modules. Then, the switching of the scanning modules can be achieved by controlling the electric translation stage 500 according to the distance.

[0083] In some other embodiments of the present specification, since the position of the light generator 1 may change, after the position of the light generator 1 changes, its position relative to the automatic switching device of the optical scanning module will also change. If the movement of the stage 600 is still controlled according to its predetermined position, the incident light axis of the fast scanning module 100 or the slow scanning module 300 after the movement may not correspond to the position of the incident light, resulting in the incident light being unable to effectively enter the fast scanning module 100 or the slow scanning module 300.

[0084] In view of this situation, the embodiment of this specification uses a beam analysis module to calibrate the moving position.

[0085] Specifically, Figure 4 As shown, the optical scanning module automatic switching device further includes a beam analysis module 800, which is installed on the stage 600;

[0086] The beam analysis module 800 is used to analyze the current position of the incident light;

[0087] The controller is further used to calculate the position change and change direction of the incident light according to the current position of the incident light and the predetermined position after controlling the object stage 600 on the electric translation stage 500 to move along the Z-axis direction so that the incident light enters the target scanning module, and control the movement of the object stage 600 on the electric translation stage 500 according to the position change and change direction of the incident light.

[0088] In the embodiment of the present specification, the beam analysis module 800 may be a beam analyzer, which can capture a two-dimensional image of the beam through a CCD or CMOS sensor and detect the position, shape, intensity distribution and propagation direction of the beam.

[0089] Furthermore, the optical axis of the beam analysis module 800 is parallel to the X-axis, and the beam analysis module 800 is used to analyze the current position of the incident light on a plane perpendicular to the X-axis, and the X-axis is parallel to the incident light path of the fast scanning module 100 or the slow scanning module 300.

[0090] The controller controls the movement of the stage 600 on the electric translation stage 500 according to the position change of the incident light, including:

[0091] Calculating the position change and change direction of the current position of the incident light relative to the predetermined position on a plane perpendicular to the X-axis;

[0092] The stage 600 on the electric translation stage 500 is controlled to move in the change direction by a distance corresponding to the position change.

[0093] In the embodiment of the present specification, the current position of the incident light is the position of the light generator 1 on the plane perpendicular to the light beam emission direction. When the position changes (the position change of the light generator along the light beam emission direction is not involved here, because when the position of the light generator along the light beam emission direction changes, it affects the distance between the light beam emission point and the scanning module, and does not cause the incident light axis of the scanning module to be unable to correspond to the position of the incident light), the controller calculates the position change and change direction of the incident light according to the current position of the incident light and the predetermined position, and controls the movement of the stage 600 on the electric translation stage 500 according to the position change and change direction of the incident light, thereby adjusting the position of the incident light axis of the scanning module on the plane perpendicular to the light beam emission direction. After the adjustment, the incident light can accurately enter the scanning module, avoiding the incident light from failing to enter the scanning module or the effective part of the incident light (such as the part whose light intensity does not meet the specified value requirements) from failing to enter the scanning module, thereby avoiding a decrease in scanning accuracy.

[0094] In some other embodiments of this specification, in addition to the position of the light generator 1 changing, the direction of the emitted light may also change due to operations such as staff's accidental touch, etc. This will cause the incident light to not enter the scanning module vertically, which will also affect the scanning accuracy.

[0095] In view of this situation, the light beam analysis module 800 of the embodiment of this specification is also used to analyze the incident direction of the incident light;

[0096] The controller is further used to calculate the angle between the incident direction of the incident light and the direction of the current incident light axis of the target scanning module, and control the stage 600 on the electric translation stage 500 to rotate around an axis perpendicular to the X-axis and the Z-axis according to the angle, so that the incident light axis of the rotated scanning module is parallel to the incident direction of the incident light, thereby preventing the incident light from entering the scanning module at an angle.

[0097] In this solution, a rotatable motor can be installed on the electric translation stage 500, and the stage 600 can be installed on the rotatable motor, so as to rotate the stage 600, so that the scanning module rotates around an axis perpendicular to the X-axis and the Z-axis.

[0098] In the embodiment of the present specification, if the outgoing optical axis of the fast scanning module 100 and the slow scanning module 300 is perpendicular to the incident optical axis, then the direction of the axis perpendicular to the X-axis and the Z-axis ( Figure 4 On the contrary, if the exit light axis of the fast scanning module 100 or the slow scanning module 300 is not perpendicular to the incident light axis, then the direction of the axis perpendicular to the X-axis and the Z-axis is also not parallel to the exit light axis direction of the two scanning modules.

[0099] If the exit light axis of the fast scanning module 100 and the slow scanning module 300 is perpendicular to the incident light axis, then when the scanning module rotates around the direction of the axis perpendicular to the X-axis and the Z-axis (that is, the direction parallel to the incident light axis), only the direction of the incident light axis will change, and the direction of the exit light axis will not change. On the contrary, if the exit light axis of the fast scanning module 100 or the slow scanning module 300 is not perpendicular to the incident light axis, then when the scanning module rotates around the direction of the axis perpendicular to the X-axis and the Z-axis, the directions of the incident light axis and the exit light axis will change. For the change in the direction of the exit light axis, what is affected is the irradiation position of the exit light on the sample surface. At this time, the staff only needs to manually adjust the position of the sample.

[0100] In some other embodiments of the present specification, the optical axis position can also be calibrated in real time during the process of switching the scanning module. Figure 4 As shown, at this time, the beam analysis module 800 is located between the fast scanning module 100 and the slow scanning module 300, and the optical axis of the beam analysis module 800, the incident optical axis of the fast scanning module 100 and the incident optical axis of the slow scanning module 300 are in the same plane.

[0101] Therefore, in the process of the controller controlling the stage 600 on the electric translation stage 500 to move along the Z-axis direction, the incident light can enter the beam analysis module 800, and the controller is further used to calculate the latest moving distance and the latest moving direction of the stage according to the position change of the incident light, the changing direction of the incident light, and the predetermined moving distance and the predetermined moving direction of the stage, and control the stage 600 on the electric translation stage 500 to move according to the latest moving distance and the latest moving direction, the predetermined moving distance being the distance the stage moves when the target scanning module is moved to the predetermined position of the incident light, and the predetermined moving direction being the direction the stage moves when the target scanning module is moved to the predetermined position of the incident light.

[0102] Based on the same inventive concept, the embodiment of this specification also provides an automatic switching method of an optical scanning module, such as Figure 5 As shown, the method includes:

[0103] Step 501: taking a fast scanning module or a slow scanning module corresponding to a scanning requirement as a target scanning module;

[0104] Step 502: According to the predetermined position of the incident light and the current position of the target scanning module, the stage on the electric translation stage is controlled to move along the Z-axis direction, so that the incident light enters the target scanning module, and a raster scan is performed on the sample surface in the direction of the output light path of the target scanning module, and the Z-axis is perpendicular to the incident light path and the output light path of the fast scanning module, or perpendicular to the incident light path and the output light path of the slow scanning module.

[0105] like Figure 6 The figure is a schematic diagram of the structure of the computer device in the embodiment of this specification. The method in the embodiment of this specification can be applied to the computer device in this embodiment.

[0106] The computer device 602 may include one or more processors 604, such as one or more central processing units (CPUs), each of which may implement one or more hardware threads. The computer device 602 may also include any memory 606 for storing any type of information such as code, settings, data, etc. Without limitation, for example, the memory 606 may include any one or more combinations of the following: any type of RAM, any type of ROM, a flash memory device, a hard disk, an optical disk, etc. More generally, any storage resource may use any technology to store information.

[0107] Further, any storage resource may provide volatile or non-volatile retention of information.

[0108] Further, any storage resource may represent a fixed or removable component of the computer device 602. In one case, when the processor 604 executes the associated instructions stored in any storage resource or combination of storage resources, the computer device 602 may perform any operation of the associated instructions. The computer device 602 also includes one or more drive mechanisms 608 for interacting with any storage resource, such as a hard disk drive system, an optical disk drive system, etc.

[0109] The computer device 602 may also include an input / output module 610 (I / O) for receiving various inputs (via input devices 612) and for providing various outputs (via output devices 614). A specific output mechanism may include a presentation device 616 and an associated graphical user interface (GUI) 618. In other embodiments, the input / output module 610 (I / O), input device 612, and output device 614 may not be included, and the computer device 602 may be used as a computer device in a network. The computer device 602 may also include one or more network interfaces 620 for exchanging data with other devices via one or more communication links 622. One or more communication buses 624 couple the components described above together.

[0110] The communication link 622 may be implemented in any manner, for example, through a local area network, a wide area network (e.g., the Internet), a point-to-point connection, etc., or any combination thereof. The communication link 622 may include any combination of hardwired links, wireless links, routers, gateway functions, name servers, etc. governed by any protocol or combination of protocols.

[0111] It should be understood that in the various embodiments of this document, the size of the serial numbers of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this document.

[0112] It should also be understood that in the embodiments of this article, the term "and / or" is only a description of the association relationship of the associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0113] Those of ordinary skill in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the interchangeability of hardware and software, the composition and steps of each example have been generally described in terms of function in the above description. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professional and technical personnel can use different methods to implement the described functions for each specific application, but such implementation should not be considered to be beyond the scope of this article.

[0114] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the systems, devices and units described above can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0115] In the several embodiments provided herein, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. For example, the device embodiments described above are only schematic, for example, the division of the units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the mutual coupling or direct coupling or communication connection shown or discussed can be an indirect coupling or communication connection through some interfaces, devices or units, or can be electrical, mechanical or other forms of connection.

[0116] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the embodiments of this article.

[0117] In addition, each functional unit in each embodiment of this invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above integrated unit may be implemented in the form of hardware or in the form of software functional unit.

[0118] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this article is essentially or the part that contributes to the prior art, or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a storage medium, including a number of instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the method described in each embodiment of this article. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk and other media that can store program codes.

[0119] Specific embodiments are used in this article to illustrate the principles and implementation methods of this article. The description of the above embodiments is only used to help understand the methods and core ideas of this article. At the same time, for general technicians in this field, according to the ideas of this article, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as a limitation on this article.

Claims

1. An automatic switching device for an optical scanning module, characterized in that: include: A fast scanning module (100), a slow scanning module (300), an electric translation stage (500), a stage (600), and a controller; The fast scanning module (100) and the slow scanning module (300) are arranged along the Z-axis direction and installed on the stage (600); the incident light path of the fast scanning module (100) and the incident light path of the slow scanning module (300) are both parallel to the incident direction of the incident light, and the line between the first optical center point of the fast scanning module (100) and the second optical center point of the slow scanning module (300) is parallel to the Z-axis; the Z-axis is perpendicular to the incident light path and the exit light path of the fast scanning module (100), or perpendicular to the incident light path and the exit light path of the slow scanning module (300); The object carrier (600) is mounted on the electric translation stage (500); The controller is used to use the fast scanning module (100) or the slow scanning module (300) corresponding to the scanning demand as a target scanning module, and control the stage (600) on the electric translation stage (500) to move along the Z-axis direction according to the predetermined position of the incident light and the current position of the target scanning module, so that the incident light enters the target scanning module and performs a raster scan on the sample surface in the direction of the output light path of the target scanning module.

2. The optical scanning module automatic switching device according to claim 1, characterized in that: It also includes a beam analysis module (800) installed on the stage (600); The beam analysis module (800) is used to analyze the current position of the incident light; The controller is further used to calculate the position change and change direction of the incident light according to the current position of the incident light and the predetermined position after controlling the object stage (600) on the electric translation stage (500) to move along the Z-axis direction so that the incident light enters the target scanning module, and control the movement of the object stage (600) on the electric translation stage (500) according to the position change and change direction of the incident light.

3. The optical scanning module automatic switching device according to claim 2, characterized in that: The optical axis of the light beam analysis module (800) is parallel to the X-axis, and the light beam analysis module (800) is used to analyze the current position of the incident light on a plane perpendicular to the X-axis, and the X-axis is parallel to the incident light path of the fast scanning module (100) or the slow scanning module (300).

4. The optical scanning module automatic switching device according to claim 3, characterized in that: The controller controls the movement of the object carrier (600) on the electric translation stage (500) according to the position change of the incident light, comprising: Calculating the position change and change direction of the current position of the incident light relative to the predetermined position on a plane perpendicular to the X-axis; The object carrier (600) on the electric translation stage (500) is controlled to move a distance corresponding to the position change in the change direction.

5. The optical scanning module automatic switching device according to claim 3, characterized in that: The light beam analysis module (800) is also used to analyze the incident direction of the incident light; The controller is further used to calculate the angle between the incident direction of the incident light and the direction of the current incident light axis of the target scanning module, and control the object stage (600) on the electric translation stage (500) to rotate around an axis perpendicular to the X-axis and the Z-axis according to the angle.

6. The optical scanning module automatic switching device according to claim 3, characterized in that: The light beam analysis module (800) is located between the fast scanning module (100) and the slow scanning module (300), and the optical axis of the light beam analysis module (800), the incident light axis of the fast scanning module (100), and the incident light axis of the slow scanning module (300) are located in the same plane.

7. The optical scanning module automatic switching device according to claim 6, characterized in that: In the process of the controller controlling the stage (600) on the electric translation stage (500) to move along the Z-axis direction, the incident light can enter the beam analysis module (800), and the controller is further used to calculate the latest moving distance and the latest moving direction of the stage according to the position change of the incident light, the changing direction of the incident light, and the predetermined moving distance and the predetermined moving direction of the stage, and control the stage (600) on the electric translation stage (500) to move according to the latest moving distance and the latest moving direction, wherein the predetermined moving distance is the distance the stage moves when the target scanning module is moved to the predetermined position of the incident light, and the predetermined moving direction is the direction the stage moves when the target scanning module is moved to the predetermined position of the incident light.

8. An optical scanning system, characterized in that: It comprises a light generator (1), a polarization beam splitter prism (2), a detection end (3) and an automatic switching device for an optical scanning module as claimed in any one of claims 1 to 7; The light generator (1) is used to generate a light beam; The polarization beam splitting prism (2) is located on the optical path of the light beam and is used to modulate the P polarization state of the light beam to obtain incident light; The optical scanning module automatic switching device is located on the optical path of the incident light, and is used to move the fast scanning module (100) or the slow scanning module (300) to the optical path of the incident light according to scanning requirements, so that the incident light enters the fast scanning module (100) or the slow scanning module (300), performs a raster scan on the sample surface in the direction of the outgoing optical path, and the reflected light in the S polarization state carrying the tissue information of the sample surface enters the fast scanning module (100) or the slow scanning module (300) along the outgoing optical path, and is emitted from the incident optical path of the fast scanning module (100) or the slow scanning module (300) to the polarization beam splitter prism (2), and the polarization beam splitter prism (2) reflects the reflected light to the detection end (3); The detection end (3) is used to image the tissue information of the sample surface according to the reflected light.

9. An optical scanning module automatic switching method, applied to the optical scanning module automatic switching device according to any one of claims 1 to 7, characterized in that: The method comprises: The fast scanning module or the slow scanning module corresponding to the scanning requirement is used as the target scanning module; According to the predetermined position of the incident light and the current position of the target scanning module, the stage on the electric translation stage is controlled to move along the Z-axis direction, so that the incident light enters the target scanning module, and a raster scan is performed on the sample surface in the direction of the output light path of the target scanning module. The Z-axis is perpendicular to the incident light path and the output light path of the fast scanning module, or perpendicular to the incident light path and the output light path of the slow scanning module.

10. A computer device comprising a memory, a processor, and a computer program stored in the memory, characterized in that: When the processor executes the computer program, the method according to claim 9 is implemented.

Images