Adjusting structure for grating plate and substrate and adjusting method thereof

Abstract

The invention relates to the field of semiconductor processing technology, and provides an adjusting structure for a grating plate and a substrate and an adjusting method thereof. The adjusting structure for the grating plate and the substrate comprises an adjusting sleeve, a first threaded section is formed at the first end of the adjusting sleeve, the first threaded section is used for being in threaded fit with the substrate, a second threaded section is formed at the second end of the adjusting sleeve, and the thread pitch of the first threaded section is different from that of the second threaded section; the first end of the connecting rod is in threaded fit with the second threaded section, and the second end of the connecting rod is used for being flexibly connected with a grating plate; the detection piece is used for detecting parameter information of the grating plate and the substrate; and the driving part is in transmission connection with the adjusting sleeve, and the driving part is used for driving the adjusting sleeve to act based on the parameter information. The adjustment resolution of the adjustment structure can reach the micron level, the alignment time of the grating plate can be greatly shortened in the semiconductor processing process, and the adjustment efficiency is high.

Description

Technical Field

[0001] The invention relates to the field of semiconductor processing technology and provides an adjustment structure for a grating plate and a substrate and an adjustment method thereof. Background Art

[0002] In semiconductor lithography equipment, a grating plate is needed to provide a reference standard for the alignment of the wafer stage to ensure that the position of the wafer can be accurately measured, so that the ideal pattern can be etched on the wafer surface.

[0003] However, due to factors such as processing errors and assembly integration errors, the integration accuracy of the grating plate and the substrate does not meet the design requirements. In this case, it is necessary to go through multiple repairs, reintegration and testing to achieve the required accuracy. This process is not only cumbersome but also greatly reduces production efficiency. Summary of the invention

[0004] The embodiment of the present invention provides an adjustment structure for a grating plate and a substrate, so as to solve the defect of inconvenient flatness adjustment of the grating plate and the substrate in the related art.

[0005] The embodiment of the present invention also provides an adjustment method for a grating plate and a substrate.

[0006] A first aspect of the present invention provides an adjustment structure for a grating plate and a substrate, comprising: An adjusting sleeve, wherein a first thread segment is formed at a first end of the adjusting sleeve, the first thread segment is used to cooperate with the substrate thread, and a second thread segment is formed at a second end of the adjusting sleeve, the first thread segment and the second thread segment have different pitches; A connecting rod, wherein the first end of the connecting rod is threadably engaged with the second threaded section, and the second end of the connecting rod is used for flexible connection with the grating plate; A detection member, used for detecting parameter information of the grating plate and the substrate; A driving member is transmission-connected to the adjusting sleeve, and the driving member is used to drive the adjusting sleeve to move based on the parameter information.

[0007] According to an embodiment of the present invention, two groups of the adjusting sleeves and the connecting rods corresponding to the adjusting sleeves one by one are arranged on the base plate, and a line connecting central axes of the two groups of the adjusting sleeves is not parallel to an edge of the base plate.

[0008] According to an embodiment of the present invention, three groups of the adjusting sleeves and the connecting rods corresponding to the adjusting sleeves one by one are arranged on the base plate, and the intersection points of the central axes of the three groups of the adjusting sleeves and the base plate are not colinear.

[0009] According to one embodiment of the present invention, a groove recessed toward the central axis direction of the connecting rod is formed on the side wall of the second end of the connecting rod along the radial direction of the connecting rod, and during the adjustment process, the groove is suitable for deforming to realize the second end of the connecting rod for flexible connection with the grating plate.

[0010] According to an embodiment of the present invention, there are at least two groups of grooves, and an angle is formed between the recessed directions of at least two groups of grooves, and the value range of the angle is greater than 0 degree and less than or equal to 180 degrees.

[0011] According to an embodiment of the present invention, at least two groups of the grooves are spaced apart at the second end of the connecting rod along the axial direction of the connecting rod.

[0012] According to one embodiment of the present invention, a connecting seat is further included, wherein the connecting seat is used to be installed on the grating plate, and the second end of the connecting rod is flexibly connected to the connecting seat.

[0013] According to one embodiment of the present invention, a mounting seat is further included, wherein the mounting seat is used to be detachably mounted on the substrate, and the driving member is mounted on the mounting seat.

[0014] According to an embodiment of the present invention, along the axial direction of the connecting rod, the connecting rod is divided into multiple sections, two adjacent sections of the connecting rod are threadedly connected, and the pitches of the threaded sections between every two sections of the connecting rod are different.

[0015] A second aspect of the present invention provides an adjustment method for the adjustment structure of the grating plate and the substrate as described above, comprising: Acquiring parameter information between the grating plate and the substrate; Based on the parameter information, the working state of the driving member is adjusted.

[0016] According to the adjustment structure for the grating plate and the substrate provided by the embodiment of the first aspect of the present invention, the adjustment resolution can reach the micron level through the differential pitch design. In the semiconductor processing process, when it is necessary to adjust the accuracy of the grating plate and the substrate, the alignment time of the grating plate can be greatly shortened, and the repeatability accuracy can be improved from millimeters to microns. Through the flexible connection between the connecting rod and the grating plate, the corresponding assembly stress can be eliminated, and the measurement error caused by the mechanical deformation of the grating plate can be avoided. Through the closed-loop control of the detection component and the driving component, the closed-loop system has a high response frequency, can compensate for the vibration of the equipment in real time, and has strong stability in temperature drift. In the 24-hour continuous operation test, the attitude drift of the grating plate is ≤0.5 arc seconds. At the same time, the driving component can also support remote programming, and the debugging personnel can complete the calibration through the host computer with one key, shortening the relative position adjustment time of the grating plate and the substrate and improving the adjustment efficiency.

[0017] According to the adjustment method for the grating plate and the substrate provided by the embodiment of the second aspect of the present invention, by using a high-precision sensor to obtain parameter information and using different pitch thread segments for adjustment, the adjustment method can achieve extremely high adjustment accuracy. In practical applications, the relative displacement accuracy between the grating plate and the substrate can be controlled at the nanometer level, and the angle deviation can be controlled within a very small range, meeting the requirements of fields such as semiconductor manufacturing and high-end optical detection that have extremely stringent precision requirements, and effectively improving product quality and production efficiency. Compared with the traditional adjustment method, the adjustment efficiency is significantly improved, the debugging time and production cycle of the equipment are reduced, and it is particularly suitable for industrial production scenarios where frequent grating plate adjustment is required, and the overall operation efficiency of the equipment is improved. The adjustment method can automatically switch the adjustment strategy according to different parameter information and adapt to various complex working conditions. Whether it is facing a large initial position deviation or a small position change caused by external interference during the operation of the equipment, it can be effectively adjusted through the corresponding adjustment strategy. For example, in an industrial production environment, even if there are interference factors such as mechanical vibration and temperature change, the adjustment method can ensure that the grating plate is always in the best working position, improving the stability and reliability of the equipment. The entire adjustment process is automatically controlled by a microprocessor based on a preset algorithm, realizing intelligent and automated adjustment. The operator only needs to set the target parameters, and the system can automatically complete the entire process from parameter information acquisition to drive component adjustment, reducing errors caused by human intervention and improving the consistency and stability of adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic stereoscopic diagram of the adjustment structure for the grating plate and the substrate provided by the present invention.

[0020] Figure 2 It is a schematic front view of the adjustment structure for the grating plate and the substrate provided by the present invention.

[0021] Figure 3 It is a schematic top view of the adjustment structure for the grating plate and the substrate provided by the present invention.

[0022] Figure 4 yes Figure 3 Schematic cross-sectional view along the AA direction.

[0023] Figure 5 yes Figure 4 A partial enlarged view of point B in the middle.

[0024] Figure 6 It is a schematic flow chart of the adjustment method for the grating plate and the substrate provided by the present invention.

[0025] Reference numerals: 100, adjusting sleeve; 102, first threaded section; 104, second threaded section; 106, connecting rod; 108, detecting member; 110, driving member; 112, groove; 114, connecting seat; 116, mounting seat; 118, grating plate; 120, substrate. DETAILED DESCRIPTION

[0026] The following embodiments of the present invention are described in further detail in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0027] like Figures 1 to 5 As shown, the first embodiment of the present invention provides an adjustment structure for a grating plate 118 and a substrate 120, including: An adjusting sleeve 100, wherein a first thread segment 102 is formed at a first end of the adjusting sleeve 100, and the first thread segment 102 is used for threading with a base plate 120, and a second thread segment 104 is formed at a second end of the adjusting sleeve 100, and the first thread segment 102 and the second thread segment 104 have different thread pitches; A connecting rod 106, wherein a first end of the connecting rod 106 is threadedly engaged with the second threaded section 104, and a second end of the connecting rod 106 is used for flexible connection with the grating plate 118; The detection member 108 is used to detect parameter information of the grating plate 118 and the substrate 120; The driving member 110 is in transmission connection with the adjusting sleeve 100 , and is used for driving the adjusting sleeve 100 to move based on the parameter information.

[0028] According to the adjustment structure for the grating plate 118 and the substrate 120 provided by the embodiment of the first aspect of the present invention, the adjustment resolution can reach the micron level through the differential pitch design. In the semiconductor processing process, when it is necessary to adjust the accuracy of the grating plate 118 and the substrate 120, the alignment time of the grating plate 118 can be greatly shortened, and the repeat positioning accuracy can be improved from millimeters to microns. Through the flexible connection between the connecting rod 106 and the grating plate 118, the corresponding assembly stress can be eliminated, and the measurement error caused by the mechanical deformation of the grating plate 118 can be avoided. Through the closed-loop control of the detection member 108 and the driving member 110, the closed-loop system has a high response frequency, can compensate for the vibration of the equipment in real time, and has strong stability in temperature drift. In the 24-hour continuous operation test, the attitude drift of the grating plate 118 is ≤0.5 arc seconds. At the same time, the driving member 110 can also support remote programming, and the debugging personnel can complete the calibration through the host computer with one key, shortening the relative position adjustment time of the grating plate 118 and the substrate 120, and improving the adjustment efficiency.

[0029] Please continue to see Figures 1 to 5 The adjustment sleeve 100 provided in the embodiment of the present invention adopts a stepped double-pitch thread design. The first thread segment 102 cooperates with the base plate 120 and the pitch P1 of the first thread segment 102 is relatively large (such as P1=1.5mm); the second thread segment 104 cooperates with the connecting rod 106 and the pitch P2 of the second thread segment 104 is relatively small (such as P2=0.5mm). The pitch difference between the two is used for precision fine-tuning. The double pitch difference (ΔP=1.0mm) forms a differential transmission to achieve compound adjustment of "fine-tuning level accuracy".

[0030] The material of the adjustment sleeve 100 can preferably be high-strength aluminum alloy, and the surface is hard chrome plated to ensure wear resistance and corrosion resistance to adapt to the harsh environment of high-precision equipment.

[0031] The second end of the connecting rod 106 is connected to the grating plate 118 . Meanwhile, the second end of the connecting rod 106 is allowed to deflect relative to the grating plate 118 within ±5°, thereby eliminating mechanical stress accumulation during adjustment.

[0032] The detection component 108 can integrate a laser displacement sensor (accuracy ±0.1μm) and an inclination sensor (accuracy ±2arcsec) to synchronously collect the three-dimensional position (X / Y / Z) and attitude (pitch / roll / yaw) parameters of the grating plate 118 to form a 6-DOF closed-loop feedback.

[0033] The driving element 110 can adopt a hybrid stepping motor (such as a 2-phase 1.8° motor) + a harmonic reducer (transmission ratio 100:1), combined with a double pitch differential formula (ΔL=(P1-P2)×n, n is the number of revolutions), to achieve ultra-precision adjustment with a theoretical resolution of 0.01μm / pulse.

[0034] The control algorithm is embedded in a fuzzy PID controller, which dynamically switches the adjustment mode according to the detection parameters: coarse adjustment (high speed) is enabled during initial positioning, fine adjustment (low speed) is switched when approaching the target, and vibration interference is eliminated through adaptive filtering.

[0035] The adjustment structure adopts a coaxial layout of "substrate 120-sleeve-connecting rod 106-grating plate 118", so it can adapt to compact spaces such as various specifications of lithography machines and related testing equipment.

[0036] According to an embodiment of the present invention, two groups of adjustment sleeves 100 and connecting rods 106 corresponding to the adjustment sleeves 100 are disposed on the base plate 120 , and the line connecting the central axes of the two groups of adjustment sleeves 100 is not parallel to the edge of the base plate 120 .

[0037] In one embodiment of the present invention, the two sets of adjustment sleeves 100 are not simply arranged parallel to the edge of the substrate 120, but the line connecting the central axes of the two sets of adjustment sleeves 100 and the edge of the substrate 120 is arranged at a specific angle to form a non-parallel state. This unique layout fully considers the complexity and accuracy requirements of the adjustment of the grating plate 118.

[0038] The ends of the adjustment sleeve 100 are connected to the base plate 120 and the connecting rod 106 respectively through threads with different pitches, and the other end of the connecting rod 106 is flexibly connected to the grating plate 118, while the detection member 108 and the driving member 110 work together to drive the adjustment sleeve 100 to move according to the detected parameter information of the grating plate 118 and the base plate 120. Under this overall structure, the design that the central axis line of the two sets of adjustment sleeves 100 is not parallel to the edge of the base plate 120 can avoid the situation that the adjustment can only be achieved in two-dimensional space during the adjustment process.

[0039] Compared with the parallel arrangement, this non-parallel arrangement enables the adjustment process to generate differentiated forces in multiple dimensions. For example, when the grating plate 118 needs to be adjusted at a complex angle, since the two sets of adjustment sleeves 100 apply forces to the connecting rod 106 in different directions, the grating plate 118 can be rotated and displaced more flexibly, thereby being able to cope with various complex installation environments and high-precision adjustment requirements, significantly improving the degree of freedom of adjustment.

[0040] The two sets of adjustment sleeves 100 are not arranged in parallel, and can cooperate with each other during the adjustment process to form a unique force vector combination. When fine-tuning the position and posture of the grating plate 118, the different driving degrees of the two sets of adjustment sleeves 100 by the driver 110 can be precisely controlled to achieve a more precise position calibration of the grating plate 118. For example, in some optical detection equipment that has extremely high requirements for the flatness of the grating plate 118, this setting can effectively reduce the accumulation of adjustment errors that may be caused by the parallel setting, and improve the adjustment accuracy to the sub-micron level.

[0041] The non-parallel layout enables the entire adjustment structure to have better mechanical balance when subjected to external force interference. When the device is affected by external factors such as vibration during operation, the two sets of adjustment sleeves 100 can support and stabilize the grating plate 118 from different directions to prevent the grating plate 118 from being excessively offset due to external forces.

[0042] According to an embodiment of the present invention, three groups of adjustment sleeves 100 and connecting rods 106 corresponding to the adjustment sleeves 100 are disposed on the base plate 120 , and the intersection points of the central axes of the three groups of adjustment sleeves 100 and the base plate 120 are not collinear.

[0043] In one embodiment of the present invention, the central axes of the three sets of adjustment sleeves 100 are not in a colinear state when they intersect with the base plate 120. The ends of each adjustment sleeve 100 are tightly connected to the base plate 120 and the connecting rod 106 through threads with different pitches, and the other end of the connecting rod 106 is flexibly connected to the grating plate 118.

[0044] The detection member 108 and the driving member 110 work together in the system to constantly monitor the various parameter information of the grating plate 118 and the substrate 120, and accurately drive the adjustment sleeve 100 to move based on this information. In the entire adjustment structure system, the design that the central axes of the three groups of adjustment sleeves 100 and the intersection points of the substrate 120 are not colinear can achieve a full range of fine adjustment functions.

[0045] The central axes of the three groups of adjustment sleeves 100 and the intersection of the base plate 120 are not collinear, constructing a support adjustment structure similar to a triangle. This means that when adjusting the grating plate 118, forces can be applied to it from three different directions to achieve all-round adjustment in space. For example, when adjusting the three-dimensional spatial posture of the grating plate 118, compared with the collinear setting, this layout can more conveniently achieve complex actions such as tilting and twisting, greatly expanding the dimension of adjustment, and can better adapt to various complex working conditions and high-precision adjustment scenarios.

[0046] The non-collinear layout makes the force action mode more diverse during the adjustment process. When fine-tuning the position and posture of the grating plate 118, by precisely controlling the driving member 110 to drive the three groups of adjustment sleeves 100 to different degrees, the vector synthesis principle of force can be used to achieve extremely fine calibration of the grating plate 118. Taking high-end optical equipment with strict requirements on the flatness of the grating plate 118 as an example, this setting can effectively avoid the adjustment error superposition problem that may be caused by the collinear setting, and improve the adjustment accuracy to the nanometer level, which significantly improves the accuracy and stability of the adjustment.

[0047] Of course, in some other embodiments, more groups of adjusting sleeves 100 may be provided, and correspondingly, a connecting rod 106 is correspondingly provided on each adjusting sleeve 100 .

[0048] According to one embodiment of the present invention, along the radial direction of the connecting rod 106, a groove 112 is formed on the side wall of the second end of the connecting rod 106, which is recessed toward the central axis direction of the connecting rod 106. During the adjustment process, the groove 112 is suitable for deforming to achieve the second end of the connecting rod 106 for flexible connection with the grating plate 118.

[0049] In one embodiment of the present invention, a groove 112 is formed on the side wall of the second end of the connecting rod 106 along the radial direction thereof and is recessed toward the central axis.

[0050] In order to satisfy the function of realizing flexible connection by deformation of the groove 112 during the adjustment process, the groove 112 is made of a material with high elasticity and good plasticity, such as a spring steel alloy with a specific formula or a high-performance rubber composite material.

[0051] In the manufacturing process, precision molding, injection molding and other molding technologies can be used to ensure that the size of the groove 112 is accurate and uniform. In the entire adjustment structure system, when the adjustment sleeve 100 moves to drive the connecting rod 106 to adjust the position of the grating plate 118, the groove 112 can rely on its own characteristics to undergo controllable elastic deformation under stress, thereby achieving a flexible connection between the second end of the connecting rod 106 and the grating plate 118, effectively buffering the stress changes during the adjustment process.

[0052] The deformable characteristics of the groove 112 enable the connection between the connecting rod 106 and the grating plate 118 to better adapt to complex adjustment conditions. During the adjustment process, if there are external forces in different directions or slight misalignments caused by the adjustment, the groove 112 can automatically adjust the connection state through elastic deformation to ensure a tight and stable connection. For example, when the grating plate 118 is adjusted quickly at multiple angles, the groove 112 can adapt to the dynamic changes in the angle and position between the connecting rod 106 and the grating plate 118 in real time, avoiding stress concentration caused by rigid connection, and significantly improving the adaptability and reliability of the connection.

[0053] When the adjustment structure adjusts the grating plate 118, instant impact force or vibration may be generated. The groove 112 can effectively absorb and disperse the energy during the force deformation process, and protect the grating plate 118. For example, during high-speed adjustment, the impact force generated by sudden acceleration or deceleration can be buffered by the deformation of the groove 112, preventing the impact force from being directly transmitted to the grating plate 118, reducing the risk of damage to the grating plate 118 due to impact, and extending its service life.

[0054] When finely adjusting the grating plate 118, the flexible connection characteristics of the groove 112 can achieve more accurate fine-tuning. The operator can use the elastic deformation of the groove 112 to accurately control the position of the grating plate 118 through a small force. For example, when adjusting the flatness of the grating plate 118 with nanometer precision, by slightly changing the force on the connecting rod 106, the elastic deformation of the groove 112 can be converted into an extremely subtle displacement adjustment of the grating plate 118, meeting the dual requirements of adjustment accuracy and flexibility in high-precision adjustment scenarios.

[0055] According to an embodiment of the present invention, there are at least two groups of grooves 112, and an angle is formed between the recessed directions of the at least two groups of grooves 112, and the value range of the angle is greater than 0 degree and less than or equal to 180 degrees.

[0056] In one embodiment of the present invention, at least two groups of grooves 112 are provided on the side wall of the second end of the connecting rod 106 along the radial direction thereof. These grooves 112 are all recessed toward the central axis of the connecting rod 106, and the key is that a specific angle is formed between the recessed directions of at least two groups of grooves 112. The value range of the angle is precisely limited to greater than 0 degrees and less than or equal to 180 degrees.

[0057] When the entire adjustment structure system is in operation, when the adjustment sleeve 100 moves to drive the connecting rod 106 to adjust the position of the grating plate 118, the multiple groups of grooves 112 can cooperate to undergo elastic deformation under forces in different directions, thereby achieving a more complex and effective flexible connection between the second end of the connecting rod 106 and the grating plate 118, thereby greatly buffering the stress changes during the adjustment process.

[0058] The design of multiple groups of grooves 112 with angles in the directions of the depressions significantly improves the mechanical properties of the connection between the connecting rod 106 and the grating plate 118. During the adjustment process, external forces in different directions can be borne and buffered by the grooves 112 in the corresponding directions of the depressions. For example, when subjected to an impact force from the X direction, the group of grooves 112 with an angle matching it can deform first to absorb energy, while other groups of grooves 112 can also work together to disperse residual stress and avoid local stress concentration. Compared with a single groove 112 or multiple groups of parallel grooves 112, this design can more comprehensively and evenly cope with complex external forces and enhance the overall strength and stability of the connection.

[0059] This design greatly enriches the adjustment dimensions of the grating plate 118. When performing adjustment operations, the deformation amounts of different grooves 112 groups can be controlled to achieve fine adjustment of the grating plate 118 in multiple directions. For example, when adjusting the three-dimensional spatial posture of the grating plate 118, the elastic deformation differences of different grooves 112 groups can be used to accurately control the tilt, twist and other posture changes of the grating plate 118, providing more possibilities for meeting the adjustment requirements of the grating plate 118 under various complex working conditions, and significantly improving the flexibility and accuracy of the adjustment.

[0060] The coordinated deformation of multiple groups of grooves 112 can more effectively absorb and disperse the impact force and vibration energy generated during the adjustment process. Since the grooves 112 are sunken in different directions, when facing instantaneous impact forces from different angles, each group of grooves 112 can deform in sequence or simultaneously, forming a multi-level buffer protection mechanism. Taking the impact generated during high-speed adjustment as an example, different groups of grooves 112 can absorb energy in sequence according to the impact angle and intensity, protecting the grating plate 118 from impact damage in all directions, further reducing the risk of damage to the grating plate 118 due to impact, and greatly extending its service life.

[0061] During the installation phase, multiple sets of grooves 112 and angle designs can better adapt to complex installation environments. Even if there is a large deviation between the connecting rod 106 and the grating plate 118 during the initial installation, different sets of grooves 112 can automatically adjust the connection state in different directions by virtue of their respective deformation capabilities, so that the two can be smoothly connected and reach the appropriate position. This design greatly reduces the requirements for installation accuracy, reduces the debugging time and difficulty during the installation process, and improves the installation efficiency, and is particularly suitable for some application scenarios that require high installation convenience.

[0062] According to one embodiment of the present invention, at least two groups of grooves 112 are spaced apart at the second end of the connecting rod 106 along the axial direction of the connecting rod 106 .

[0063] In one embodiment of the present invention, at least two groups of grooves 112 are spaced apart at the second end of the connecting rod 106 along the axial direction thereof.

[0064] These grooves 112 are all recessed toward the central axis of the connecting rod 106, and the shape of each group of grooves 112 can be flexibly determined according to actual needs. They can be designed as annular grooves 112 that continuously surround the side wall of the connecting rod 106 to evenly disperse the force in the circumferential direction; they can also be intermittent grooves 112 distributed at specific angles to meet the force requirements in a specific direction.

[0065] In terms of manufacturing technology, advanced technologies such as high-precision electrospark machining can be used to accurately machine these grooves 112 on the side wall of the second end of the connecting rod 106, strictly ensuring that the dimensional accuracy and surface roughness of the grooves 112 meet higher standards, thereby meeting the overall performance requirements of the adjustment structure.

[0066] In the entire adjustment structure, the connecting rod 106 is a key component connecting the adjustment sleeve 100 and the grating plate 118, and the multiple groups of grooves 112 arranged at intervals along the axial direction provide strong support for achieving a more outstanding adjustment function.

[0067] At least two groups of grooves 112 are spaced apart along the axial direction. When the adjustment structure adjusts the position of the grating plate 118, the grooves 112 of different groups can respectively withstand external forces from different directions and at different stages, thereby effectively dispersing the stress.

[0068] For example, in the process of frequently and drastically adjusting the position of the grating plate 118, one group of grooves 112 first bears the main shear force, and the other group of grooves 112 resists possible torsional force. Multiple groups of grooves 112 work together to prevent loosening and displacement of the connection parts, greatly enhancing the stability of the connection between the connecting rod 106 and the grating plate 118, thereby improving the reliability of the entire adjustment structure during operation.

[0069] When finely adjusting the grating plate 118, the plurality of grooves 112 can be used as a precise reference for adjustment. The operator can more intuitively and accurately judge the amplitude and direction of adjustment based on the positions of the different grooves 112 and the spacing between the different grooves 112.

[0070] For example, when adjusting the flatness of the grating plate 118, by observing the position changes of different groups of grooves 112, the force applied by the connecting rod 106 to the grating plate 118 can be accurately controlled in magnitude and direction, so as to achieve fine adjustment of the position of the grating plate 118 and meet the stringent requirements for adjustment accuracy in high-precision adjustment scenarios. Moreover, in some mechanisms using segmented adjustment, different groups of grooves 112 can correspond to different adjustment stages, further refining the adjustment process and improving the accuracy of the adjustment.

[0071] According to an embodiment of the present invention, a connecting seat 114 is further included. The connecting seat 114 is used to be installed on the grating plate 118 , and the second end of the connecting rod 106 is flexibly connected to the connecting seat 114 .

[0072] In one embodiment of the present invention, the connection base 114 can be made of high-strength, lightweight materials, such as aluminum alloy or carbon fiber composite materials, to ensure that the overall weight is reduced while ensuring structural strength. The connection base 114 is designed with a specific mounting interface and can be firmly mounted on the surface of the grating plate 118 by means of screw fastening, snap connection, etc., to ensure the reliability and stability of the connection.

[0073] The setting of the connecting seat 114 increases the stability of the connection between the connecting rod 106 and the grating plate 118 . The larger contact area and the setting of the mounting structure can better disperse the force from the connecting rod 106 .

[0074] Of course, in some other embodiments, the connection seat 114 and the connection rod 106 may be configured as an integrated structure. In actual application, the connection seat 114 is also used to achieve a flexible connection between the connection rod 106 and the grating plate 118 .

[0075] According to an embodiment of the present invention, a mounting seat 116 is further included. The mounting seat 116 is used to be detachably mounted on the base plate 120 , and the driving member 110 is mounted on the mounting seat 116 .

[0076] In one embodiment of the present invention, the mounting base 116 needs to consider the adaptability with the base plate 120 to construct various detachable connection mounting structures between the mounting base 116 and the base plate 120 .

[0077] For common flat substrates 120, the mounting base 116 can be equipped with multiple screw holes, and the mounting base 116 can be firmly fixed to the surface of the substrate 120 by screws. The screw connection method is simple to operate, the connection is stable, and it can effectively resist various stresses generated during the operation of the equipment. For some application scenarios that require convenient installation and quick disassembly, the mounting base 116 can adopt a guide rail slider connection structure. The bottom of the mounting base 116 is designed with a slider that matches the guide rail on the substrate 120. When installing, you only need to slide the slider along the guide rail into the specified position to complete the installation. When disassembling, just do the reverse operation, which greatly improves the efficiency of installation and disassembly.

[0078] The driving member 110 is firmly mounted on the mounting base 116, which provides a stable and reliable mounting base for the driving member 110. The detachable connection between the driving member 110 and the substrate 120 effectively avoids interference with the normal working state of the driving member 110 due to deformation of the mounting base 116 itself while ensuring the firmness of the connection.

[0079] The drive member 110 is mounted on the mounting seat 116, which shortens the power transmission path, reduces energy loss and deviation during the transmission process. In the actual adjustment process, this stable power transmission can accurately transmit the power of the drive member 110 to the adjustment sleeve 100, ensuring that the adjustment of the position of the grating plate 118 reaches extremely high accuracy and stability.

[0080] The connection mode in which the mounting base 116 is detachably mounted on the base plate 120 greatly optimizes the maintenance and upgrade process of the equipment. When the driving member 110 fails, the maintenance personnel do not need to carry out complicated and tedious disassembly of the entire adjustment structure. They only need to quickly remove the mounting base 116 and the driving member 110 from the base plate 120, and then they can repair the failed parts separately or replace them with new parts, which greatly shortens the maintenance time and reduces the maintenance cost.

[0081] Moreover, when the equipment needs to be upgraded, it can be easily replaced with a drive component 110 and mounting bracket 116 combination with better performance, without the need for large-scale modifications to the overall structure of the equipment, thereby reducing downtime, significantly improving the availability and service life of the equipment, and enabling the equipment to better adapt to evolving technological needs.

[0082] In addition, in some other embodiments, the various types of mounting seats 116 can be adapted to substrates 120 of different specifications and shapes, significantly broadening the application scope of the adjustment structure. For substrates 120 with smaller sizes and limited space, a mounting seat 116 with a small volume and compact structure can be customized to achieve stable installation and efficient operation of the drive member 110 without taking up too much space. For equipment that needs to be frequently disassembled and installed, such as portable detection instruments, a quick-plug mounting seat 116 can be used, so that operators can complete the assembly and disassembly of the equipment in a short time, which is convenient for the transfer and use of the equipment between different work sites.

[0083] This high degree of flexibility enables the adjustment structure to be widely used in various application scenarios, meeting the diverse needs of different customers, and greatly improving the versatility and market competitiveness of the product.

[0084] According to an embodiment of the present invention, the connecting rod 106 is divided into multiple sections along the axial direction of the connecting rod 106 , two adjacent sections of the connecting rod 106 are threadedly connected, and the thread pitches of the thread sections between every two sections of the connecting rod 106 are different.

[0085] In one embodiment of the present invention, the connecting rod 106 is configured as a multi-section structure along the axial direction of the connecting rod 106. Two adjacent sections of the connecting rod 106 are tightly connected by threads, and the threaded connection method ensures that the connecting rod 106 has high stability during the force transmission process.

[0086] It is particularly important that the pitch of the thread segments between each two connecting rods 106 is different. For example, the thread pitch between the first and second connecting rods 106 can be set to be larger, such as 0.4 mm, while the thread pitch between the second and third connecting rods 106 is smaller, such as 0.3 mm, so that during the adjustment process, fine tuning can be achieved through the difference in the pitch between the two.

[0087] During the manufacturing process, high-precision thread processing technology is used to ensure the accuracy, roughness and pitch of each thread segment to meet the requirements of the entire adjustment structure for high-precision adjustment. In the entire adjustment structure system, the multi-section connecting rod 106 works together with the adjustment sleeve 100, the connecting seat 114 and the grating plate 118 to provide strong support for realizing diversified and accurate adjustment functions.

[0088] The design of multiple connecting rods 106 with different pitches between each segment greatly improves the adjustment accuracy. For example, when adjusting the flatness of the grating plate 118, the position adjustment at the nanometer level can be achieved through the thread segments with different pitches, effectively reducing the error caused by insufficient adjustment accuracy and meeting the stringent requirements of high-precision application scenarios.

[0089] Thread segments with different pitches make the adjustment process more flexible and changeable. The operator can select the appropriate thread segment to operate according to the actual adjustment requirements. When faced with complex adjustment tasks, such as when multiple parameters (position, angle, etc.) of the grating plate 118 need to be adjusted at the same time, the combination of thread segments with different pitches can be used to achieve precise control of the grating plate 118 in multiple dimensions. For example, in some optical detection equipment that has extremely high requirements for the posture of the grating plate 118, by using thread segments with different pitches, the tilt angle and plane position of the grating plate 118 can be accurately adjusted, expanding the dimensions and possibilities of adjustment.

[0090] In addition, the multi-section connecting rod 106 can better adapt to complex working conditions. During the operation of the equipment, various external forces may be encountered or different adjustment tasks may need to be dealt with. Threaded segments with different pitches can play an advantage in different working conditions.

[0091] For example, when subjected to a large external impact force, the thread segment with a larger pitch can bear the main impact force with its relatively strong structural strength, protecting other fine adjustment parts from damage; and under working conditions where small displacement compensation is required, the grating plate 118 and the substrate 120 can be adjusted with high precision through the differential cooperation of the thread segment with a large pitch and the thread segment with a small pitch, thereby ensuring that the position of the grating plate 118 is always maintained in the optimal state.

[0092] See also Figure 6A second aspect of the present invention provides a method for adjusting the adjustment structure of the grating plate 118 and the substrate 120 as described above, comprising: Step 10, obtaining parameter information between the grating plate 118 and the substrate 120; Step 20: adjusting the working state of the driving member 110 based on the parameter information.

[0093] According to the adjustment method for the grating plate 118 and the substrate 120 provided by the embodiment of the second aspect of the present invention, by using a high-precision sensor to obtain parameter information and using different pitch thread segments for adjustment, the adjustment method can achieve extremely high adjustment accuracy. In practical applications, the relative displacement accuracy between the grating plate 118 and the substrate 120 can be controlled at the nanometer level, and the angle deviation can be controlled within a very small range, meeting the requirements of fields such as semiconductor manufacturing and high-end optical detection that have extremely stringent precision requirements, and effectively improving product quality and production efficiency. Compared with the traditional adjustment method, the adjustment efficiency is significantly improved, the debugging time and production cycle of the equipment are reduced, and it is particularly suitable for industrial production scenarios where the grating plate 118 needs to be adjusted frequently, and the overall operation efficiency of the equipment is improved. The adjustment method can automatically switch the adjustment strategy according to different parameter information and adapt to various complex working conditions. Whether it is facing a large initial position deviation or a small position change caused by external interference during the operation of the equipment, it can be effectively adjusted through the corresponding adjustment strategy. For example, in an industrial production environment, even if there are interference factors such as mechanical vibration and temperature changes, the adjustment method can ensure that the grating plate 118 is always in the best working position, improving the stability and reliability of the equipment. The entire adjustment process is automatically controlled by the microprocessor based on a preset algorithm, realizing intelligent and automated adjustment. The operator only needs to set the target parameters, and the system can automatically complete the entire process from parameter information acquisition to the adjustment of the drive member 110, reducing the error caused by human intervention and improving the consistency and stability of the adjustment.

[0094] Please continue to see Figure 6 In step 10, various detection components 108 integrated in the adjustment structure, such as laser displacement sensors, tilt sensors, etc., are used to collect parameter information between the grating plate 118 and the substrate 120 in real time. The laser displacement sensor can accurately measure the relative displacement data between the grating plate 118 and the substrate 120 in three-dimensional space, with an accuracy of sub-micron or even nanometer level.

[0095] The tilt sensor is used to monitor the tilt angle change of the grating plate 118 relative to the substrate 120, and its measurement accuracy can reach a small angle deviation, such as ±0.01°.

[0096] These sensors transmit the collected data to the data acquisition module in the form of electrical signals. The data acquisition module integrates the data from different sensors, and can amplify and filter the electrical signals through the signal conditioning circuit to remove noise interference and improve the accuracy of the data. Subsequently, the analog signal is converted into a digital signal using the analog-to-digital conversion circuit for subsequent analysis and processing by the microprocessor. The microprocessor analyzes the processed data and extracts key parameters between the grating plate 118 and the substrate 120, such as relative displacement, tilt angle, etc.

[0097] In step 20, based on the acquired and processed parameter information, the microprocessor formulates a corresponding adjustment strategy according to a preset adjustment algorithm.

[0098] For example, if it is detected that the relative displacement between the grating plate 118 and the substrate 120 is large, exceeds the allowable error range, and is in the initial stage of adjustment, the adjustment algorithm will preferentially use the multi-section connecting rod 106 for rapid adjustment.

[0099] At this time, the microprocessor will send instructions to the driver 110 to adjust the running speed and rotation direction of the driver 110, so that the adjustment sleeve 100 can rotate quickly, driving the connecting rod 106 to make a larger displacement adjustment to quickly reduce the displacement difference between the grating plate 118 and the substrate 120.

[0100] When the grating plate 118 approaches the target position, the microprocessor switches the adjustment strategy. If it is detected that a small position adjustment or angle correction is required, the adjustment algorithm uses the multi-section connecting rod 106 to perform a relatively slow adjustment, thereby achieving a fine adjustment with higher accuracy.

[0101] The microprocessor will accurately control the output power and rotation angle of the driver 110, so that the adjustment sleeve 100 rotates at an extremely slow speed, and achieves a small displacement adjustment of the connecting rod 106, thereby accurately adjusting the position and posture of the grating plate 118. During the adjustment process, the microprocessor will continuously monitor the data fed back by the sensor, and adjust the working state of the driver 110 in real time to ensure that the grating plate 118 can accurately reach the target position and meet the requirements of high-precision adjustment.

[0102] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An adjustment structure for a grating plate and a substrate, characterized in that: include: An adjusting sleeve (100), wherein a first thread segment (102) is formed at a first end of the adjusting sleeve (100), the first thread segment (102) being used to cooperate with a base plate thread, and a second thread segment (104) is formed at a second end of the adjusting sleeve (100), the first thread segment (102) and the second thread segment (104) having different thread pitches; A connecting rod (106), wherein a first end of the connecting rod (106) is threadably engaged with the second threaded section (104), and a second end of the connecting rod (106) is used for flexible connection with the grating plate; A detection member (108) for detecting parameter information of the grating plate and the substrate; A driving member (110) is transmission-connected to the adjusting sleeve (100), and the driving member (110) is used to drive the adjusting sleeve (100) to move based on the parameter information.

2. The adjustment structure for the grating plate and the substrate according to claim 1, characterized in that: Two groups of the adjusting sleeves (100) and the connecting rods (106) corresponding one to one to the adjusting sleeves (100) are arranged on the base plate, and a line connecting the central axes of the two groups of the adjusting sleeves (100) is not parallel to an edge of the base plate.

3. The adjustment structure for the grating plate and the substrate according to claim 1, characterized in that: Three groups of the adjusting sleeves (100) and the connecting rods (106) corresponding one to one to the adjusting sleeves (100) are arranged on the base plate, and the central axes of the three groups of the adjusting sleeves (100) are not colinear with the intersection points of the base plate.

4. The adjustment structure for the grating plate and the substrate according to claim 1, characterized in that: A groove (112) is formed on the side wall of the second end of the connecting rod (106) along the radial direction of the connecting rod (106), and is recessed in the direction of the central axis of the connecting rod (106). During the adjustment process, the groove (112) is adapted to deform so as to enable the second end of the connecting rod (106) to be flexibly connected to the grating plate.

5. The adjustment structure for the grating plate and the substrate according to claim 4, characterized in that: The grooves (112) are at least two groups, and an angle is formed between the recessed directions of the at least two groups of grooves (112), and the value range of the angle is greater than 0 degrees and less than or equal to 180 degrees.

6. The adjustment structure for the grating plate and the substrate according to claim 4 or 5, characterized in that: At least two groups of grooves (112) are arranged at intervals at the second end of the connecting rod (106) along the axial direction of the connecting rod (106).

7. The adjustment structure for a grating plate and a substrate according to claim 4 or 5, characterized in that: It also comprises a connecting seat (114), the connecting seat (114) being used for being mounted on the grating plate, and the second end of the connecting rod (106) being flexibly connected to the connecting seat (114).

8. The adjustment structure for a grating plate and a substrate according to any one of claims 1 to 5, characterized in that: It also includes a mounting seat (116), wherein the mounting seat (116) is used to be detachably mounted on the base plate, and the driving member (110) is mounted on the mounting seat (116).

9. The adjustment structure for a grating plate and a substrate according to any one of claims 1 to 5, characterized in that: Along the axial direction of the connecting rod (106), the connecting rod (106) is divided into multiple sections, two adjacent sections of the connecting rod (106) are threadedly connected, and the thread pitches of the threaded sections between every two sections of the connecting rod (106) are different.

10. An adjustment method for an adjustment structure of a grating plate and a substrate according to any one of claims 1 to 9, characterized in that: include: Acquiring parameter information between the grating plate and the substrate; Based on the parameter information, the working state of the driving member (110) is adjusted.

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