Adjustment Structure for a Grating Plate and a Substrate and Its Adjustment Method

Abstract

The present invention relates to the field of semiconductor processing technologies, and provides an adjustment structure for a grating plate and a substrate and an adjustment method thereof. The adjustment structure for the grating plate and the substrate includes an adjustment sleeve. A first threaded section is formed at a first end of the adjustment sleeve, and the first threaded section is used for threaded cooperation with the substrate. A second threaded section is formed at a second end of the adjustment sleeve, and the pitch of the first threaded section is different from that of the second threaded section. A connecting rod, a first end of the connecting rod is in threaded cooperation with the second threaded section, and a second end of the connecting rod is used for flexible connection with the grating plate. A detection member is used for detecting parameter information of the grating plate and the substrate. A driving member is in transmission connection with the adjustment sleeve, and the driving member is used for driving the adjustment sleeve to act based on the parameter information. The adjustment resolution of this adjustment structure can reach the micron level. During the semiconductor processing, the alignment time of the grating plate can be greatly shortened, and the adjustment efficiency is high.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor processing technology, and provides an adjustment structure and an adjustment method for a grating plate and a substrate. Background Art

[0002] In semiconductor lithography equipment, a grating plate is required to provide a reference standard for the alignment of a wafer stage, so as to ensure accurate measurement of the position of the wafer, and thus realize lithography of an ideal pattern on the wafer surface.

[0003] However, due to factors such as processing errors and assembly integration errors, the integration accuracy of the grating plate and the substrate does not meet the design requirements. In this case, it is necessary to go through multiple repairs, reintegration, and testing to achieve the required accuracy. This process is not only cumbersome but also greatly reduces production efficiency. Summary of the Invention

[0004] An embodiment of the present invention provides an adjustment structure for a grating plate and a substrate, which is used to solve the defect that it is inconvenient to adjust the flatness of the grating plate and the substrate in the related art.

[0005] An embodiment of the present invention also provides an adjustment method for a grating plate and a substrate.

[0006] The first aspect of the present invention provides an adjustment structure for a grating plate and a substrate, including:

[0007] An adjustment sleeve, a first threaded section is formed at the first end of the adjustment sleeve, the first threaded section is used for threaded cooperation with the substrate, a second threaded section is formed at the second end of the adjustment sleeve, and the pitch of the first threaded section is different from that of the second threaded section;

[0008] A connecting rod, the first end of the connecting rod is in threaded cooperation with the second threaded section, and the second end of the connecting rod is used for flexible connection with the grating plate;

[0009] A detection member, which is used to detect parameter information of the grating plate and the substrate;

[0010] A driving member, which is in transmission connection with the adjustment sleeve, and the driving member is used to drive the adjustment sleeve to act based on the parameter information.

[0011] According to an embodiment of the present invention, two sets of the adjustment sleeves and the connecting rods corresponding to the adjustment sleeves one by one are provided on the substrate, and the connection line of the central axes of the two sets of adjustment sleeves is not parallel to the edge of the substrate.

[0012] According to an embodiment of the present invention, three sets of the adjustment sleeves and the connecting rods corresponding to the adjustment sleeves one by one are provided on the substrate, and the intersection points of the central axes of the three sets of adjustment sleeves with the substrate are not collinear.

[0013] According to an embodiment of the present invention, along the radial direction of the connecting rod, a groove recessed toward the central axis direction of the connecting rod is formed on the side wall of the second end of the connecting rod. During the adjustment process, the groove is adapted to deform to enable the second end of the connecting rod to be flexibly connected to the grating plate.

[0014] According to an embodiment of the present invention, there are at least two groups of the grooves, and an included angle is formed between the recessed directions of the at least two groups of grooves. The value range of the included angle is greater than 0 degree and less than or equal to 180 degrees.

[0015] According to an embodiment of the present invention, along the axial direction of the connecting rod, at least two groups of the grooves are arranged at intervals at the second end of the connecting rod.

[0016] According to an embodiment of the present invention, it further includes a connecting seat for being mounted on the grating plate, and the second end of the connecting rod is flexibly connected to the connecting seat.

[0017] According to an embodiment of the present invention, it further includes a mounting seat for being detachably mounted on the substrate, and the driving member is mounted on the mounting seat.

[0018] According to an embodiment of the present invention, along the axis of the connecting rod, the connecting rod is in multiple segments, and adjacent two segments of the connecting rod are threadedly connected, and the pitch of the threaded segments between each two segments of the connecting rod is different.

[0019] An embodiment of the second aspect of the present invention provides an adjustment method for an adjustment structure for a grating plate and a substrate as described above, including:

[0020] Obtaining parameter information between the grating plate and the substrate;

[0021] Based on the parameter information, adjusting the working state of the driving member.

[0022] According to the adjustment structure for a grating plate and a substrate provided by the first aspect embodiment of the present invention, the adjustment resolution can reach the micron level through the differential pitch design. During the semiconductor processing, when the accuracy of the grating plate and the substrate needs to be adjusted, the alignment time of the grating plate can be greatly shortened, and the repeat positioning accuracy can be improved from millimeters to the micron level. Through the flexible connection between the connecting rod and the grating plate, the corresponding assembly stress can be eliminated, and the measurement error caused by the mechanical deformation of the grating plate can be avoided. Through the closed-loop control of the detection component and the driving component, the response frequency of the closed-loop system is high, the equipment vibration and temperature drift can be compensated in real time, and the stability is strong. During the 24-hour continuous operation test, the attitude drift of the grating plate is ≤0.5 arc seconds. At the same time, the driving component also supports remote programming, and the debugging personnel can complete the calibration with one key through the host computer, shortening the relative position adjustment time of the grating plate and the substrate and improving the adjustment efficiency.

[0023] According to the adjustment method for a grating plate and a substrate provided by the second aspect embodiment of the present invention, by using a high-precision sensor to obtain parameter information and adjusting with different pitch thread segments, this adjustment method can achieve extremely high adjustment accuracy. In practical applications, the relative displacement accuracy between the grating plate and the substrate can be controlled at the nanometer level, and the angular deviation can be controlled within a very small range, meeting the requirements of fields with extremely high precision requirements such as semiconductor manufacturing and high-end optical detection, effectively improving product quality and production efficiency. Compared with the traditional adjustment method, the adjustment efficiency is significantly improved, the equipment debugging time and production cycle are reduced, especially suitable for industrial production scenarios that require frequent adjustment of the grating plate, and the overall operation efficiency of the equipment is improved. This adjustment method can automatically switch the adjustment strategy according to different parameter information to adapt to various complex working conditions. Whether facing the situation of large initial position deviation or the small position change caused by external interference during the equipment operation, it can be effectively adjusted through the corresponding adjustment strategy. For example, in the industrial production environment, even in the presence of interference factors such as mechanical vibration and temperature change, the adjustment method can ensure that the grating plate is always in the best working position, improving the stability and reliability of the equipment. The entire adjustment process is automatically controlled by the microprocessor based on the preset algorithm, realizing intelligent and automatic adjustment. The operator only needs to set the target parameters, and the system can automatically complete the whole process from parameter information acquisition to driving component adjustment, reducing the error caused by human intervention and improving the consistency and stability of the adjustment. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the following drawings are some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0025] Figure 1 It is a schematic perspective view of the adjustment structure for the grating plate and the substrate provided by the present invention.

[0026] Figure 2 It is a schematic front view of the adjustment structure for the grating plate and the substrate provided by the present invention.

[0027] Figure 3 It is a schematic top view of the adjustment structure for the grating plate and the substrate provided by the present invention.

[0028] Figure 4 It is Figure 3 a schematic cross-sectional view taken along the A-A direction in

[0029] Figure 5 It is Figure 4 a partially enlarged view at B in

[0030] Figure 6 It is a schematic flow chart of the adjustment method for the grating plate and the substrate provided by the present invention.

[0031] Reference numerals:

[0032] 100, adjustment sleeve; 102, first thread section; 104, second thread section; 106, connecting rod; 108, detecting member; 110, driving member; 112, groove; 114, connecting seat; 116, mounting seat; 118, grating plate; 120, substrate. Detailed implementation manners

[0033] The following further describes in detail the implementation manners of the present invention with reference to the drawings and embodiments. The following embodiments are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0034] As Figures 1 to 5 shown, an embodiment of the first aspect of the present invention provides an adjustment structure for a grating plate 118 and a substrate 120, including:

[0035] An adjustment sleeve 100, a first thread section 102 is formed at the first end of the adjustment sleeve 100, the first thread section 102 is used for threadedly cooperating with the substrate 120, a second thread section 104 is formed at the second end of the adjustment sleeve 100, and the pitch of the first thread section 102 is different from that of the second thread section 104;

[0036] A connecting rod 106, the first end of the connecting rod 106 is threadedly cooperating with the second thread section 104, and the second end of the connecting rod 106 is used for flexibly connecting with the grating plate 118;

[0037] A detecting member 108, which is used for detecting the parameter information of the grating plate 118 and the substrate 120;

[0038] The driving member 110 is in transmission connection with the adjusting sleeve 100, and the driving member 110 is used to drive the adjusting sleeve 100 to act based on the parameter information.

[0039] According to the adjusting structure for the grating plate 118 and the substrate 120 provided by the first aspect embodiment of the present invention, the adjusting resolution can reach the micron level through the differential pitch design. During the semiconductor processing, when the accuracy of the grating plate 118 and the substrate 120 needs to be adjusted, the alignment time of the grating plate 118 can be greatly shortened, and the repeat positioning accuracy can be improved from millimeters to the micron level. Through the flexible connection of the connecting rod 106 with the grating plate 118, the corresponding assembly stress can be eliminated, and the measurement error caused by the mechanical deformation of the grating plate 118 can be avoided. Through the closed-loop control of the detecting member 108 and the driving member 110, the closed-loop system has a high response frequency, can compensate for equipment vibration and temperature drift in real time, and has strong stability. During the 24-hour continuous operation test, the attitude drift of the grating plate 118 is ≤ 0.5 arcseconds. At the same time, the driving member 110 also supports remote programming, and the debugging personnel can complete the calibration with one key through the host computer, shortening the relative position adjustment time of the grating plate 118 and the substrate 120 and improving the adjustment efficiency.

[0040] Please continue to refer to Figures 1 to 5 , the adjusting sleeve 100 provided by the embodiment of the present invention adopts a stepped double-pitch thread design. The first thread section 102 cooperates with the substrate 120 and the pitch P1 of the first thread section 102 is larger (such as P1 = 1.5 mm); the second thread section 104 cooperates with the connecting rod 106, and the pitch P2 of the second thread section 104 is smaller (such as P2 = 0.5 mm), and the pitch difference between the two is used for precise fine adjustment. The double-pitch difference (ΔP = 1.0 mm) forms a differential drive to achieve the composite adjustment of "fine adjustment level accuracy".

[0041] The material of the adjusting sleeve 100 can preferably be high-strength aluminum alloy, and the surface is treated with hard chromium plating to ensure wear resistance and corrosion resistance and adapt to the harsh environment of high-precision equipment.

[0042] The second end of the connecting rod 106 is connected to the grating plate 118. At the same time, the second end of the connecting rod 106 allows a relative deflection of ±5° with respect to the grating plate 118, thereby eliminating the accumulation of mechanical stress during adjustment.

[0043] The detecting member 108 can integrate a laser displacement sensor (accuracy ±0.1 μm) and an inclination sensor (accuracy ±2 arcsec) to synchronously collect the three-dimensional position (X / Y / Z) and attitude (pitch / roll / yaw) parameters of the grating plate 118 to form a six-degree-of-freedom closed-loop feedback.

[0044] The driving member 110 can adopt a hybrid stepper motor (such as a 2-phase 1.8° motor) + a harmonic reducer (transmission ratio 100:1), combined with the double-pitch differential formula (ΔL=(P1 - P2)×n, where n is the number of revolutions), to achieve ultra-precise adjustment with a theoretical resolution of 0.01 μm / pulse.

[0045] The control algorithm is embedded in a fuzzy PID controller, which dynamically switches the adjustment mode according to the detected parameters: coarse adjustment (high speed) is enabled during initial positioning, and fine adjustment (low speed) is switched when approaching the target, and vibration interference is eliminated through adaptive filtering.

[0046] By adopting a coaxial layout of "substrate 120 - sleeve - connecting rod 106 - grating plate 118", the adjustment structure can adapt to the compact spaces of various specifications of lithography machines and related detection equipment, etc.

[0047] According to an embodiment of the present invention, two sets of adjustment sleeves 100 are provided on the substrate 120, and connecting rods 106 corresponding to the adjustment sleeves 100 one by one. The connection line of the central axes of the two sets of adjustment sleeves 100 is not parallel to the edge of the substrate 120.

[0048] In an embodiment of the present invention, the two sets of adjustment sleeves 100 are not simply arranged parallel to the edge of the substrate 120, but the connection line of the central axes of the two sets of adjustment sleeves 100 is arranged at a specific angle with the edge of the substrate 120, forming a non-parallel state. This unique layout fully considers the complexity and precision requirements for the adjustment of the grating plate 118.

[0049] The end of the adjustment sleeve 100 is connected to the substrate 120 and the connecting rod 106 respectively through threads with different pitches. The other end of the connecting rod 106 is flexibly connected to the grating plate 118, and the detection member 108 and the driving member 110 work together to drive the adjustment sleeve 100 to act according to the detected parameter information of the grating plate 118 and the substrate 120. Under this overall structure, the design that the connection line of the central axes of the two sets of adjustment sleeves 100 is not parallel to the edge of the substrate 120 can avoid the form that adjustment can only be achieved in two-dimensional space during the adjustment process.

[0050] Compared with the parallel setting, this non-parallel layout enables the adjustment process to generate differential forces in multiple dimensions. For example, when complex angular adjustment of the grating plate 118 is required, since the two sets of adjustment sleeves 100 apply forces to the connecting rod 106 in different directions, the grating plate 118 can be rotated and displaced more flexibly, so as to cope with various complex installation environments and high-precision adjustment requirements, and significantly improve the degree of freedom of adjustment.

[0051] The two sets of adjusting sleeves 100 are arranged non-parallelly, and can cooperate with each other during the adjustment process to form a unique vector combination of forces. When finely adjusting the position and attitude of the grating plate 118, by precisely controlling the different driving degrees of the driving member 110 on the two sets of adjusting sleeves 100, more precise position calibration of the grating plate 118 can be achieved. For example, in some optical detection devices with extremely high requirements for the flatness of the grating plate 118, this setting can effectively reduce the accumulation of adjustment errors that may be caused by parallel arrangement, and improve the adjustment accuracy to the sub-micron level.

[0052] The non-parallel layout enables the entire adjustment structure to have better mechanical balance ability when withstanding external force interference. When the device is affected by external factors such as vibration during operation, the two sets of adjusting sleeves 100 can support and stabilize the grating plate 118 from different directions, preventing the position of the grating plate 118 from shifting too much due to external forces.

[0053] According to an embodiment of the present invention, three sets of adjusting sleeves 100 and connecting rods 106 corresponding to the adjusting sleeves 100 one by one are provided on the substrate 120, and the intersection points of the central axes of the three sets of adjusting sleeves 100 with the substrate 120 are not collinear.

[0054] In an embodiment of the present invention, when the central axes of the three sets of adjusting sleeves 100 intersect with the substrate 120, their intersection points are in a non-collinear state. The end of each adjusting sleeve 100 is tightly connected to the substrate 120 and the connecting rod 106 respectively through threads with different pitches, and the other end of the connecting rod 106 is flexibly connected to the grating plate 118.

[0055] The detection member 108 and the driving member 110 cooperate with each other in the system, constantly monitoring various parameter information of the grating plate 118 and the substrate 120, and precisely driving the adjusting sleeve 100 to act based on this information. In the entire adjustment structure system, the design that the intersection points of the central axes of the three sets of adjusting sleeves 100 with the substrate 120 are not collinear can achieve all-round and refined adjustment functions.

[0056] The non-collinearity of the intersection points of the central axes of the three sets of adjusting sleeves 100 with the substrate 120 constructs a support and adjustment structure similar to a triangle. This means that when adjusting the grating plate 118, forces can be applied to it from three different directions to achieve all-round adjustment in space. For example, when adjusting the three-dimensional spatial attitude of the grating plate 118, compared with the collinear arrangement, this layout can more conveniently achieve complex actions such as tilting and twisting, greatly expanding the adjustment dimension and better adapting to various complex working conditions and high-precision adjustment scenarios.

[0057] The non - collinear layout makes the way of force application more diverse during the adjustment process. When finely adjusting the position and attitude of the grating plate 118, by precisely controlling the driving of the three groups of adjusting sleeves 100 by the driving member 110 to different degrees, the extremely fine calibration of the grating plate 118 can be achieved by using the principle of vector synthesis of forces. Taking high - end optical equipment with strict flatness requirements for the grating plate 118 as an example, this setting can effectively avoid the problem of superposition of adjustment errors that may occur in collinear settings, improve the adjustment accuracy to the nanometer level, and significantly enhance the accuracy and stability of adjustment.

[0058] Of course, in some other embodiments, more groups of adjusting sleeves 100 can be provided, and correspondingly, connecting rods 106 are respectively provided on each adjusting sleeve 100.

[0059] According to an embodiment of the present invention, along the radial direction of the connecting rod 106, a groove 112 recessed toward the central axis direction of the connecting rod 106 is formed on the side wall of the second end of the connecting rod 106. During the adjustment process, the groove 112 is adapted to deform to achieve the flexible connection of the second end of the connecting rod 106 to the grating plate 118.

[0060] In an embodiment of the present invention, along the radial direction of the connecting rod 106, a groove 112 recessed toward the central axis direction is provided on its second - end side wall.

[0061] To meet the function of the groove 112 deforming during the adjustment process to achieve flexible connection, the groove 112 is made of materials with high elasticity and good plasticity, such as spring steel alloy with a specific formula or high - performance rubber composite material.

[0062] In the manufacturing process, precision molding, injection molding and other forming technologies can be used to ensure that the size of the groove 112 is precise and uniform. In the entire adjustment structure system, when the adjusting sleeve 100 acts to drive the connecting rod 106 to adjust the position of the grating plate 118, the groove 112 can, by virtue of its own characteristics, undergo controllable elastic deformation under force, so as to achieve the flexible connection between the second end of the connecting rod 106 and the grating plate 118, effectively buffering the stress change during the adjustment process.

[0063] The deformable characteristic of the groove 112 enables the connection between the connecting rod 106 and the grating plate 118 to better adapt to complex adjustment working conditions. During the adjustment process, if external forces in different directions or minor misalignments caused by adjustment are encountered, the groove 112 can automatically adjust the connection state through elastic deformation to ensure a tight and stable connection. For example, when quickly adjusting the grating plate 118 at multiple angles, the groove 112 can adapt to the dynamic changes in the angle and position between the connecting rod 106 and the grating plate 118 in real time, avoiding stress concentration caused by rigid connection, and significantly improving the adaptability and reliability of the connection.

[0064] When the adjustment structure performs an adjustment operation on the grating plate 118, instantaneous impact force or vibration may be generated. During the process of the groove 112 deforming under force, it can effectively absorb and disperse this energy, playing a protective role for the grating plate 118. For example, during high-speed adjustment, the impact force generated by sudden acceleration or deceleration can be buffered by the deformation of the groove 112, preventing the impact force from being directly transmitted to the grating plate 118, reducing the risk of damage to the grating plate 118 due to impact, and extending its service life.

[0065] When performing fine adjustment on the grating plate 118, the flexible connection characteristic of the groove 112 can achieve more precise fine adjustment. The operator can utilize the elastic deformation of the groove 112 to precisely control the position of the grating plate 118 with a small acting force. For example, when performing flatness adjustment on the grating plate 118 with nanometer-level precision, by slightly changing the acting force on the connecting rod 106, the elastic deformation of the groove 112 can be converted into an extremely subtle displacement adjustment of the grating plate 118, meeting the dual requirements of adjustment precision and flexibility in high-precision adjustment scenarios.

[0066] According to an embodiment of the present invention, there are at least two groups of grooves 112, and an included angle is formed between the depression directions of at least two groups of grooves 112, and the value range of the included angle is greater than 0 degrees and less than or equal to 180 degrees.

[0067] In an embodiment of the present invention, along the radial direction of the connecting rod 106, at least two groups of grooves 112 are provided on the side wall of its second end. These grooves 112 are all recessed towards the central axis direction of the connecting rod 106, and the key is that a specific included angle is formed between the depression directions of at least two groups of grooves 112. The value range of the included angle is precisely limited to be greater than 0 degrees and less than or equal to 180 degrees.

[0068] When the entire adjustment structure system operates, when the adjustment sleeve 100 acts to drive the connecting rod 106 to adjust the position of the grating plate 118, multiple groups of grooves 112 can elastically deform cooperatively under the force in different directions, thereby realizing a more complex and effective flexible connection between the second end of the connecting rod 106 and the grating plate 118, and greatly buffering the stress change during the adjustment process.

[0069] The design of multiple sets of grooves 112 with an included angle in the depression direction significantly improves the mechanical properties of the connection part between the connecting rod 106 and the grating plate 118. During the adjustment process, external forces in different directions can be borne and buffered by the grooves 112 in the corresponding depression directions respectively. For example, when impacted by a force from the X direction, the set of grooves 112 with a matching included angle can preferentially deform to absorb energy, and at the same time, other sets of grooves 112 can also cooperate to disperse the remaining stress and avoid local stress concentration. Compared with a single groove 112 or multiple sets of parallel grooves 112, this design can more comprehensively and evenly cope with complex external forces and enhance the overall strength and stability of the connection part.

[0070] This design greatly enriches the adjustment dimensions of the grating plate 118. When performing adjustment operations, fine adjustment of the grating plate 118 in multiple directions can be achieved by controlling the deformation amounts of different sets of grooves 112. For example, when adjusting the three-dimensional spatial attitude of the grating plate 118, by utilizing the elastic deformation differences of different sets of grooves 112, various attitude changes such as tilting and twisting of the grating plate 118 can be accurately controlled, providing more possibilities to meet the adjustment requirements of the grating plate 118 under various complex working conditions and significantly improving the flexibility and accuracy of adjustment.

[0071] The cooperative deformation of multiple sets of grooves 112 can more effectively absorb and disperse the impact force and vibration energy generated during the adjustment process. Due to the different depression directions of the grooves 112, when facing instantaneous impact forces from different angles, each set of grooves 112 can deform sequentially or simultaneously, forming a multi-level buffer protection mechanism. Taking the impact generated during high-speed adjustment as an example, different sets of grooves 112 can absorb energy successively according to the impact angle and intensity, comprehensively protecting the grating plate 118 from impact damage, further reducing the risk of damage to the grating plate 118 due to impact, and greatly extending its service life.

[0072] During the installation stage, the design of multiple sets of grooves 112 and the included angle can better adapt to complex installation environments. Even if there are large deviations between the connecting rod 106 and the grating plate 118 during the initial installation, different sets of grooves 112 can automatically adjust the connection state in different directions by virtue of their respective deformation capabilities, enabling the two to be smoothly connected and reach the appropriate position. This design greatly reduces the requirements for installation accuracy, reduces the debugging time and difficulty during the installation process, improves the installation efficiency, and is especially suitable for some application scenarios with high requirements for installation convenience.

[0073] According to an embodiment of the present invention, along the axial direction of the connecting rod 106, at least two sets of grooves 112 are provided at intervals at the second end of the connecting rod 106.

[0074] In an embodiment of the present invention, along the axial direction of the connecting rod 106, at least two sets of grooves 112 are provided at intervals at its second end.

[0075] These grooves 112 are all recessed towards the central axis direction of the connecting rod 106, and the shape of each group of grooves 112 can be flexibly determined according to actual needs. It can be designed as an annular groove 112 that continuously surrounds the side wall of the connecting rod 106 for evenly dispersing the force in the circumferential direction; it can also be an intermittent groove 112 distributed at a specific angle to meet the force requirements in a specific direction.

[0076] In terms of manufacturing process, advanced technologies such as high-precision electrical discharge machining can be used to precisely machine these grooves 112 on the side wall of the second end of the connecting rod 106, strictly ensuring that the dimensional accuracy and surface roughness of the grooves 112 meet higher standards, so as to meet the overall performance requirements of the adjustment structure.

[0077] In the entire adjustment structure, the connecting rod 106, as a key component connecting the adjustment sleeve 100 and the grating plate 118, multiple groups of grooves 112 arranged at intervals along the axial direction provide strong support for achieving a more excellent adjustment function.

[0078] At least two groups of grooves 112 arranged at intervals along the axial direction. When the adjustment structure adjusts the position of the grating plate 118, different groups of grooves 112 can respectively bear external forces from different directions and different stages, effectively dispersing stress.

[0079] For example, during the process of frequently and significantly adjusting the position of the grating plate 118, one group of grooves 112 first bears the main shear force, and another group of grooves 112 resists the possible torsional force. Multiple groups of grooves 112 work together to prevent loosening and displacement of the connection part, greatly enhancing the stability of the connection between the connecting rod 106 and the grating plate 118, and further improving the reliability of the entire adjustment structure during operation.

[0080] When finely adjusting the grating plate 118, multiple groups of grooves 112 can be used as precise adjustment references. Operators can more intuitively and accurately judge the adjustment amplitude and direction based on the positions of different groups of grooves 112 and the spacing between different groups of grooves 112.

[0081] For example, when adjusting the flatness of the grating plate 118, by observing the position changes of different groups of grooves 112, the magnitude and direction of the force exerted by the connecting rod 106 on the grating plate 118 can be precisely controlled, realizing fine adjustment of the position of the grating plate 118 to meet the stringent requirements for adjustment accuracy in high-precision adjustment scenarios. Moreover, in some mechanisms with segmented adjustment, different groups of grooves 112 can respectively correspond to different adjustment stages, further refining the adjustment process and improving the adjustment accuracy.

[0082] According to an embodiment of the present invention, it further includes a connecting seat 114. The connecting seat 114 is used to be mounted on the grating plate 118, and the second end of the connecting rod 106 is flexibly connected to the connecting seat 114.

[0083] In an embodiment of the present invention, the connecting seat 114 can be made of high-strength and lightweight materials, such as aluminum alloy or carbon fiber composite materials, to ensure reducing the overall weight while guaranteeing the structural strength. The connecting seat 114 is designed with specific mounting interfaces and can be firmly mounted on the surface of the grating plate 118 by means of screw fastening, snap connection, etc., ensuring the reliability and stability of the connection.

[0084] The setting of the connecting seat 114 increases the firmness of the connection between the connecting rod 106 and the grating plate 118. The larger contact area and the setting of the mounting structure can better disperse the acting force from the connecting rod 106.

[0085] Of course, in some other embodiments, the connecting seat 114 and the connecting rod 106 can also be set as an integral structure. In the actual application process, the connecting seat 114 is also used to achieve the flexible connection between the connecting rod 106 and the grating plate 118.

[0086] According to an embodiment of the present invention, it further includes a mounting seat 116. The mounting seat 116 is used to be detachably mounted on the substrate 120, and the driving member 110 is mounted on the mounting seat 116.

[0087] In an embodiment of the present invention, the adaptability between the mounting seat 116 and the substrate 120 needs to be considered to construct various detachable connection mounting structures between the mounting seat 116 and the substrate 120.

[0088] For the common flat substrate 120, the mounting seat 116 can be equipped with multiple screw holes and firmly fixed on the surface of the substrate 120 by screws. The screw connection method is simple to operate and the connection is firm, which can effectively resist various stresses generated during the operation of the equipment. For some application scenarios with requirements for installation convenience and quick disassembly, the mounting seat 116 can adopt a guide rail slider connection structure. The bottom of the mounting seat 116 is designed with a slider matching the guide rail on the substrate 120. During installation, only need to slide the slider along the guide rail into the specified position to complete the installation, and during disassembly, just operate in the reverse direction, which greatly improves the installation and disassembly efficiency.

[0089] The driving member 110 is firmly mounted on the mounting seat 116. The mounting seat 116 provides a stable and reliable mounting foundation for the driving member 110. Its detachable connection method with the substrate 120 effectively avoids disturbing the normal working state of the driving member 110 due to the deformation of the mounting seat 116 itself while ensuring the firmness of the connection.

[0090] The driving member 110 is installed on the mounting base 116, which shortens the power transmission path, reduces energy loss and deviation during transmission. During the actual adjustment process, this stable power transmission can accurately transmit the power of the driving member 110 to the adjustment sleeve 100, ensuring that the adjustment of the position of the grating plate 118 reaches extremely high accuracy and stability.

[0091] By the connection method that the mounting base 116 is detachably installed on the substrate 120, the maintenance and upgrade processes of the device are greatly optimized. When the driving member 110 fails, maintenance personnel do not need to perform complex and cumbersome disassembly on the entire adjustment structure. They only need to quickly remove the mounting base 116 together with the driving member 110 from the substrate 120, and then they can repair the faulty component separately or replace it with a new component, which greatly shortens the repair time and reduces the maintenance cost.

[0092] Moreover, when the device needs to be upgraded, it is easy to replace it with a combination of a driving member 110 and a mounting base 116 with better performance. There is no need to carry out large-scale transformation on the overall structure of the device, which reduces the downtime, significantly improves the usability and service life of the device, and enables the device to better adapt to the ever-developing technical requirements.

[0093] In addition, in some other embodiments, the diverse types of mounting bases 116 can be adapted to substrates 120 with different specifications and shapes, significantly broadening the application scope of the adjustment structure. For substrates 120 with small size and limited space, a mounting base 116 with a small volume and a compact structure can be customized to achieve stable installation and efficient operation of the driving member 110 without occupying too much space. For devices that need to be frequently disassembled and installed, such as portable detection instruments, a quick-plug type mounting base 116 can be used, and the operator can complete the assembly and disassembly of the device in a short time, which is convenient for the transfer and use of the device between different working sites.

[0094] This high degree of flexibility enables the adjustment structure to be widely applied to various different application scenarios, meet the diverse needs of different customers, and greatly enhance the versatility and market competitiveness of the product.

[0095] According to an embodiment of the present invention, along the axial direction of the connecting rod 106, the connecting rod 106 is multi-segmented, and adjacent two segments of the connecting rod 106 are threadedly connected, and the thread pitches between every two segments of the connecting rod 106 are different.

[0096] In an embodiment of the present invention, along the axial direction of the connecting rod 106, the connecting rod 106 is arranged in a multi-segmented structure. Adjacent two segments of the connecting rod 106 are tightly connected by threads, and the threaded connection method ensures that the connecting rod 106 has high stability during the force transmission process.

[0097] Particularly crucial is that the pitch of the threaded segments between every two connecting rods 106 is different. For example, the thread pitch between the first and the second connecting rods 106 can be set relatively large, such as 0.4 mm, while the thread pitch between the second and the third connecting rods 106 is smaller, like 0.3 mm, which is used to achieve fine adjustment through the pitch difference between the two during the adjustment process.

[0098] During the manufacturing process, a high-precision thread processing technology is adopted to ensure the accuracy of the precision, roughness, and pitch of each thread segment, so as to meet the requirements of high-precision adjustment for the entire adjustment structure. In the entire adjustment structure system, the multi-segment connecting rod 106 works in coordination with the adjustment sleeve 100, the connecting seat 114, and the grating plate 118, providing strong support for realizing diverse and precise adjustment functions.

[0099] The design of the multi-segment connecting rod 106 with different pitches between each segment greatly improves the adjustment accuracy. For example, when adjusting the flatness of the grating plate 118, nano-level position adjustment can be achieved through the threaded segments with different pitches, effectively reducing the errors caused by insufficient adjustment accuracy and meeting the stringent requirements of high-precision application scenarios.

[0100] The threaded segments with different pitches make the adjustment process more flexible and variable. The operator can select the appropriate threaded segment for operation according to the actual adjustment requirements. When facing complex adjustment tasks, such as simultaneously adjusting multiple parameters (position, angle, etc.) of the grating plate 118, the combination of threaded segments with different pitches can be used to achieve precise control of the grating plate 118 in multiple dimensions. For example, in some optical detection devices with extremely high requirements for the attitude of the grating plate 118, by using threaded segments with different pitches, the tilt angle and plane position of the grating plate 118 can be accurately adjusted, expanding the dimensions and possibilities of adjustment.

[0101] In addition, the multi-segment connecting rod 106 can better adapt to complex working conditions. During the operation of the device, various external force interferences may be encountered or different adjustment tasks need to be dealt with. The threaded segments with different pitches can play their advantages under different working conditions.

[0102] For example, when subjected to a large external impact force, the threaded segment with a larger pitch can rely on its relatively strong structural strength to bear the main impact force and protect other fine adjustment parts from damage; while in the working condition where micro-displacement compensation is required, through the differential cooperation of the threaded segment with a large pitch and the threaded segment with a small pitch, the grating plate 118 and the substrate 120 can be adjusted with high precision, thereby ensuring that the position of the grating plate 118 always remains in the best state.

[0103] See Figure 6, an embodiment of the second aspect of the present invention provides an adjustment method for the adjustment structure of the grating plate 118 and the substrate 120 as described above, including:

[0104] Step 10, obtain the parameter information between the grating plate 118 and the substrate 120;

[0105] Step 20, based on the parameter information, adjust the working state of the driving member 110.

[0106] According to the adjustment method for the grating plate 118 and the substrate 120 provided by the embodiment of the second aspect of the present invention, by using a high-precision sensor to obtain parameter information and adjusting with different pitch thread segments, this adjustment method can achieve extremely high adjustment accuracy. In practical applications, the relative displacement accuracy between the grating plate 118 and the substrate 120 can be controlled at the nanometer level, and the angular deviation can be controlled within a very small range, meeting the requirements of fields with extremely high precision requirements such as semiconductor manufacturing and high-end optical detection, effectively improving product quality and production efficiency. Compared with traditional adjustment methods, the adjustment efficiency is significantly improved, the equipment debugging time and production cycle are reduced, especially suitable for industrial production scenarios that require frequent adjustment of the grating plate 118, and the overall operation efficiency of the equipment is improved. This adjustment method can automatically switch adjustment strategies according to different parameter information to adapt to various complex working conditions. Whether facing a large initial position deviation or a small position change caused by external interference during the operation of the equipment, it can be effectively adjusted through corresponding adjustment strategies. For example, in an industrial production environment, even in the presence of interference factors such as mechanical vibration and temperature change, the adjustment method can ensure that the grating plate 118 is always in the best working position, improving the stability and reliability of the equipment. The entire adjustment process is automatically controlled by a microprocessor based on a preset algorithm, realizing intelligent and automatic adjustment. The operator only needs to set the target parameters, and the system can automatically complete the whole process from parameter information acquisition to adjustment of the driving member 110, reducing the errors caused by human intervention and improving the consistency and stability of the adjustment.

[0107] Please continue to refer to Figure 6 , in step 10, through various detection components 108 integrated in the adjustment structure, such as laser displacement sensors, inclination sensors, etc., the parameter information between the grating plate 118 and the substrate 120 is collected in real time. The laser displacement sensor can accurately measure the relative displacement data between the grating plate 118 and the substrate 120 in three-dimensional space, and the accuracy can reach the sub-micron or even nanometer level.

[0108] The inclination sensor is used to monitor the change in the inclination angle of the grating plate 118 relative to the substrate 120, and its measurement accuracy can reach a small angular deviation, such as ±0.01°.

[0109] These sensors transmit the collected data to the data acquisition module in the form of electrical signals. The data acquisition module integrates the data from different sensors and can process the electrical signals through a signal conditioning circuit, such as amplifying and filtering, to remove noise interference and improve the accuracy of the data. Subsequently, an analog-to-digital conversion circuit is used to convert the analog signal into a digital signal for subsequent analysis and processing by the microprocessor. The microprocessor analyzes the processed data and extracts key parameters between the grating plate 118 and the substrate 120, such as the relative displacement and tilt angle.

[0110] In step 20, based on the obtained and processed parameter information, the microprocessor formulates a corresponding adjustment strategy according to a preset adjustment algorithm.

[0111] For example, if it is detected that the relative displacement between the grating plate 118 and the substrate 120 is large, exceeding the allowable error range and in the initial stage of adjustment, the adjustment algorithm will preferentially use the multi-segment connecting rod 106 for rapid adjustment.

[0112] At this time, the microprocessor sends an instruction to the driving member 110 to adjust the running speed and rotation direction of the driving member 110, so that the adjusting sleeve 100 rotates rapidly, driving the connecting rod 106 to perform a large-amplitude displacement adjustment to quickly reduce the displacement gap between the grating plate 118 and the substrate 120.

[0113] When the grating plate 118 approaches the target position, the microprocessor will switch the adjustment strategy. If it is detected that a small position adjustment or angle correction is required, the adjustment algorithm will use the multi-segment connecting rod 106 for relatively slow adjustment, thereby achieving a finer adjustment with higher precision.

[0114] The microprocessor will precisely control the output power and rotation angle of the driving member 110 to make the adjusting sleeve 100 rotate at an extremely slow speed, realizing a small displacement adjustment of the connecting rod 106, thereby accurately adjusting the position and posture of the grating plate 118. During the adjustment process, the microprocessor will continuously monitor the data fed back by the sensors and adjust the working state of the driving member 110 in real time to ensure that the grating plate 118 can accurately reach the target position and meet the requirements of high-precision adjustment.

[0115] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An adjustment structure for a grating plate and a substrate, characterized in that, Comprising: An adjusting sleeve (100), a first threaded section (102) is formed at the first end of the adjusting sleeve (100), the first threaded section (102) is used for threaded cooperation with the substrate, a second threaded section (104) is formed at the second end of the adjusting sleeve (100), and the pitch of the first threaded section (102) is different from that of the second threaded section (104); A connecting rod (106), the first end of the connecting rod (106) is in threaded cooperation with the second threaded section (104), and the second end of the connecting rod (106) is used for flexible connection with the grating plate; A detecting member (108), which is used for detecting the parameter information of the grating plate and the substrate; A driving member (110), which is in transmission connection with the adjusting sleeve (100), and the driving member (110) is used for driving the adjusting sleeve (100) to act based on the parameter information.

2. The adjusting structure for the grating plate and the substrate according to claim 1, characterized in that, Two sets of the adjusting sleeves (100) and the connecting rods (106) corresponding to the adjusting sleeves (100) one by one are arranged on the substrate, and the connection line of the central axes of the two sets of adjusting sleeves (100) is not parallel to the edge of the substrate.

3. The adjustment structure for a grating plate and a substrate according to claim 1, characterized in that, Three sets of the adjusting sleeves (100) and the connecting rods (106) corresponding to the adjusting sleeves (100) one by one are arranged on the substrate, and the intersection points of the central axes of the three sets of adjusting sleeves (100) and the substrate are not collinear.

4. The adjustment structure for a grating plate and a substrate according to claim 1, characterized in that Along the radial direction of the connecting rod (106), a groove (112) recessed towards the central axis direction of the connecting rod (106) is formed on the side wall of the second end of the connecting rod (106). During the adjustment process, the groove (112) is adapted to deform to realize the flexible connection of the second end of the connecting rod (106) with the grating plate.

5. The adjustment structure for a grating plate and a substrate according to claim 4, wherein, There are at least two sets of the grooves (112), and an included angle is formed between the recessed directions of at least two sets of the grooves (112), and the value range of the included angle is greater than 0 degree and less than or equal to 180 degrees.

6. The adjusting structure for the grating plate and the substrate according to claim 4 or 5, characterized in that, Along the axial direction of the connecting rod (106), at least two sets of the grooves (112) are arranged at intervals at the second end of the connecting rod (106).

7. The adjusting structure for a grating plate and a substrate according to claim 4 or 5, characterized in that, It further includes a connecting seat (114), the connecting seat (114) is used for being installed on the grating plate, and the second end of the connecting rod (106) is flexibly connected to the connecting seat (114).

8. The adjustment structure for a grating plate and a substrate according to any one of claims 1 to 5, characterized in that, It further includes a mounting seat (116), the mounting seat (116) is used for detachably mounting on the substrate, and the driving member (110) is mounted on the mounting seat (116).

9. The adjustment structure for a grating plate and a substrate according to any one of claims 1 to 5, characterized in that, Along the axis of the connecting rod (106), the connecting rod (106) is multi-segmented, and adjacent two segments of the connecting rod (106) are in threaded connection, and the pitch of the threaded section between each two segments of the connecting rod (106) is different.

10. A method for adjusting an adjustment structure for a grating plate and a substrate according to any one of claims 1 to 9, characterized in that, Comprising: Obtaining the parameter information between the grating plate and the substrate; Adjusting the working state of the driving member (110) based on the parameter information.

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