Semiconductor integrated special gas circuit configuration method and device

Abstract

The invention discloses a semiconductor integrated special gas path configuration method and device. The method comprises the following steps: acquiring a gas path schematic diagram; the gas path schematic diagram comprises a plurality of gas path assemblies and a connection sequence of the plurality of gas path assemblies; configuring at least one initial layout scheme diagram corresponding to the gas path schematic diagram based on the gas path schematic diagram and the connection rules corresponding to the gas path assemblies; and sorting the at least one initial layout scheme diagram according to a preset priority to obtain a recommended layout diagram sequence, so that the gas path layout diagram can be automatically configured based on the gas path schematic diagram, and the integrated gas path configuration efficiency and the configuration quality are effectively improved.

Description

Technical Field

[0001] The present disclosure generally relates to the field of semiconductor manufacturing technology, and specifically relates to a method and device for configuring a semiconductor integrated special gas circuit. Background Art

[0002] Semiconductor integrated special gas supply equipment such as special gas cabinets need to be produced and configured according to the gas circuit layout diagram provided by engineers. In related technologies, the original gas circuit schematic diagram is usually provided by the demander, and the engineer draws the corresponding gas circuit layout diagram based on the gas circuit schematic diagram. However, in the manual drawing process, problems such as increased production costs and increased product volume due to the increase in the number of welds caused by insufficient engineer capabilities, or increased labor costs due to improved engineer capabilities, etc., are prone to occur. Summary of the invention

[0003] In view of the above-mentioned defects or deficiencies in the prior art, it is desired to provide a method and device for configuring a semiconductor integrated special gas circuit, which can automatically configure a gas circuit layout diagram based on the gas circuit schematic diagram, thereby effectively improving the integrated gas circuit configuration efficiency and configuration quality.

[0004] In a first aspect, an embodiment of the present application provides a method for configuring a semiconductor integrated special gas path, comprising: Obtaining a gas circuit schematic diagram; the gas circuit schematic diagram includes a plurality of gas circuit components and a connection sequence of the plurality of gas circuit components; Based on the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components, configuring at least one initial layout scheme diagram corresponding to the gas circuit schematic diagram; The at least one initial layout scheme diagram is sorted according to a preset priority to obtain a recommended layout diagram sequence.

[0005] In some embodiments, the sorting of the at least one initial layout scheme diagram according to the preset priority includes: For each of the initial layout plan diagrams, obtaining the number of welds and the minimum distance of interfaces corresponding to the initial layout plan diagram; Determining a weighted module corresponding to the initial layout plan diagram based on the number of welds and the minimum distance of the interface; At least one of the initial layout scheme graphs is sorted in descending order based on the weighted modulus.

[0006] In some embodiments, determining a weighted modulus corresponding to the initial layout plan diagram based on the number of welds and the minimum interface distance includes: Normalizing the number of welds and the minimum distance of interfaces respectively to obtain a normalized number of welds and a normalized minimum distance of interfaces; Calculating the weld weighted value corresponding to the normalized weld number and the interface minimum distance weighted value corresponding to the normalized interface minimum distance based on the correction weights; Based on the weld weighted value and the interface minimum distance weighted value, a weighted module corresponding to the initial layout plan diagram is determined.

[0007] In some embodiments, it also includes: The vector modulus of the weld weighted value and the interface minimum distance weighted value is used as the weighted modulus corresponding to the initial layout plan diagram.

[0008] In some embodiments, configuring at least one initial layout scheme diagram corresponding to the gas circuit schematic diagram based on the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components includes: Inputting the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components into a trained convolutional neural network model to obtain the at least one initial layout scheme diagram; or The at least one initial layout scheme diagram is obtained by using an enumeration method according to the gas circuit principle diagram and the connection rules corresponding to each of the gas circuit components.

[0009] In some embodiments, before sorting the at least one initial layout scheme diagram according to a preset priority to obtain a recommended layout diagram sequence, the method further includes: Get preset space rules; Filtering at least one initial layout plan diagram that satisfies the preset space from the at least one initial layout plan diagram; The at least one initial layout scheme diagram that is screened out is sorted according to the preset priority.

[0010] In some embodiments, the connection rule corresponding to the gas circuit component includes at least one of gas port type, gas flow direction, and valve status.

[0011] In a second aspect, an embodiment of the present application provides a semiconductor integrated special gas circuit configuration device, comprising: An acquisition module, used to acquire a gas circuit schematic diagram; the gas circuit schematic diagram includes a plurality of gas circuit components and a connection sequence of the plurality of gas circuit components; A generating module, configured to generate at least one initial layout scheme diagram corresponding to the gas circuit schematic diagram based on the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components; The sorting module is used to sort the at least one initial layout scheme diagram according to a preset priority to obtain a recommended layout diagram sequence.

[0012] In a third aspect, an embodiment of the present application provides an electronic device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the method described in the embodiment of the present application when executing the program.

[0013] In a fourth aspect, an embodiment of the present application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the method described in the embodiment of the present application.

[0014] In a fifth aspect, an embodiment of the present application provides a computer program product, including a computer program, characterized in that when the computer program is executed by a processor, it implements the method described in the embodiment of the present application.

[0015] The semiconductor integrated special gas circuit configuration method proposed in the embodiment of the present application can automatically configure at least one initial layout plan diagram corresponding to the gas circuit schematic diagram according to the connection rules corresponding to the gas circuit components. The initial layout plan diagram can be configured according to the connection rules corresponding to the gas circuit components without the manual participation of engineers. Engineers only need to conduct a post-review of the initial layout plan diagram, which can greatly reduce the difficulty and workload of engineers while meeting the gas circuit principle requirements of users, improve the efficiency and reliability of gas circuit configuration, and reduce the cost of gas circuit configuration. At the same time, by sorting through preset priorities to provide a sequence of recommended layout diagrams, it is possible to make orderly recommendations based on at least one initial layout plan diagram, providing users and engineers with a reliable data foundation and selection basis for post-engineering design, thereby improving the overall design efficiency and user experience of special gas cabinets.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Other features, objects and advantages of the present application will become more apparent by reading the detailed description of non-limiting embodiments made with reference to the following drawings: Figure 1 A schematic diagram of a process for configuring a semiconductor integrated specialty gas circuit according to an embodiment of the present application is shown; Figure 2 A connection rule diagram of a gas circuit assembly provided in an embodiment of the present application is shown; Figure 3 A schematic diagram of a weld provided in an embodiment of the present application is shown; Figure 4 A schematic diagram of a process for configuring a semiconductor integrated specialty gas circuit according to another embodiment of the present application is shown; Figure 5 A gas circuit schematic diagram provided by an embodiment of the present application is shown; Figure 6 A candidate layout scheme diagram provided by an embodiment of the prior art of the present application is shown; Figure 7 A candidate layout scheme diagram provided by an embodiment of the present application is shown; Figure 8 Shows this application Figure 5 Schematic diagram of the middle gas circuit assembly; Fig. 9 Shows this application Figure 8 A corresponding schematic diagram of a connection method of a gas circuit component; Fig.10 Shows this application Fig. 9 A corresponding schematic diagram of another connection method of the gas circuit components; Fig.11 A schematic diagram of the structure of a semiconductor integrated special gas circuit configuration device provided in one embodiment of the present application is shown; Fig.12 A schematic diagram of the structure of a computer system of an electronic device or server suitable for implementing an embodiment of the present application is shown. DETAILED DESCRIPTION

[0018] The present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the relevant inventions, rather than to limit the inventions. It should also be noted that, for ease of description, only the parts related to the invention are shown in the accompanying drawings.

[0019] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0020] In order to further illustrate the technical solution provided by the embodiment of the present application, this is described in detail below in conjunction with the accompanying drawings and specific implementation methods. Although the embodiment of the present application provides the method operation instruction steps shown in the following embodiments or drawings, more or less operation instruction steps may be included in the method based on routine or no creative labor. In the steps where there is no necessary causal relationship logically, the execution order of these steps is not limited to the execution order provided by the embodiment of the present application. The method may be executed in the order of the method shown in the embodiment or drawings or in parallel during the actual processing process or when the device is executed.

[0021] Please refer to Figure 1 , Figure 1 FIG. 1 is a flow chart of a method for configuring a semiconductor integrated special gas circuit according to an embodiment of the present application. Figure 1 As shown, the method includes: Step 101, obtaining a gas circuit schematic diagram; the gas circuit schematic diagram includes a plurality of gas circuit components and a connection sequence of the plurality of gas circuit components.

[0022] It should be noted that the gas circuit schematic diagram is a gas circuit schematic diagram corresponding to the special gas cabinet. The gas circuit schematic diagram can be an original gas circuit schematic diagram or an equivalent gas circuit diagram. When the gas circuit schematic diagram is an original gas circuit schematic diagram, the embodiment of the present application also includes a step of decomposing the original gas circuit schematic diagram into an equivalent gas circuit diagram.

[0023] That is to say, the semiconductor integrated special gas circuit configuration method proposed in the embodiment of the present application is a special gas circuit configuration implemented based on an equivalent gas circuit diagram. Among them, the equivalent gas circuit diagram removes unnecessary relevant information compared to the original gas circuit schematic diagram. Specifically, the equivalent gas circuit diagram can be decomposed in a manner similar to an equivalent circuit based on the original gas circuit schematic diagram and the inlet and outlet information configuration.

[0024] It should also be noted that a special gas cabinet is a special gas storage cabinet or gas safety cabinet, which is a safety device used to store special gases (such as flammable, toxic, corrosive gases, etc.). The main purpose of the special gas cabinet is to ensure the safety of these gases during storage and use and reduce potential risks. Semiconductor special gas cabinets can also be used for gas supply and control during chip manufacturing. The gas circuit assembly may include necessary components in the semiconductor integrated special gas circuit, including but not limited to valves, pressure transmitters (PT) and gas sources.

[0025] Step 102: Based on the gas circuit schematic diagram and the connection rules corresponding to each gas circuit component, configure at least one initial layout scheme diagram corresponding to the gas circuit schematic diagram.

[0026] It should be noted that, in the embodiment of the present application, the connection rules corresponding to the gas path component include at least one of the gas port type, gas flow direction, and valve state.

[0027] For example, Figure 2 As shown, I, JL, JR, BI are two-way valve bases, T, L, R, TT, TL and TR are three-way valve bases, HH and FS are four-way valve bases, BY and BV are two-way three-way diaphragm valve bases. The black filled arrow is the air inlet, and the unfilled arrow is the air outlet. The air flow direction is formed between the air inlet and the air outlet.

[0028] Furthermore, the valve state includes open and closed. When the valve is open, it usually means that gas is allowed to flow from the air inlet to the air outlet, and when the valve is closed, it usually means that gas is prohibited from flowing out of the air outlet.

[0029] For example, taking the four-way valve base HH as an example, when the valve is closed, the upper, lower and left air inlets are not connected to the right air outlet, and the upper, lower and left air inlets are not connected to each other; when the valve is opened, the upper, lower and left air inlets are connected to the right air outlet, and the upper, lower and left air inlets are also connected to each other, for example, upper and lower air intake and left and right air outlet, or upper, lower and left side air intake and right side air outlet can be achieved.

[0030] In a feasible embodiment, the gas circuit schematic diagram and the connection rules corresponding to each gas circuit component are input into a trained convolutional neural network model to obtain at least one initial layout plan diagram.

[0031] Specifically, an initial convolutional neural network model is constructed, and the connection rules corresponding to each gas path component, a large number of historical gas path schematics, the layout schemes configured by engineers, and the final selected layout schemes are obtained. A large number of historical gas path schematics, the layout schemes configured by engineers, and the final selected layout schemes are divided into multiple training sets. The cross validation method is used to use each training set as a validation set to train and verify the initial convolutional neural network model until the convolutional neural network model reaches the training accuracy, thereby obtaining a trained convolutional neural network model.

[0032] When configuring at least one initial layout plan diagram corresponding to the gas circuit schematic diagram based on the gas circuit schematic diagram, the gas circuit schematic diagram and the connection rules corresponding to each gas circuit component can be directly input into the trained convolutional neural network model, so that the trained convolutional neural network model uses each gas circuit component to configure at least one initial layout plan corresponding to the gas circuit schematic diagram.

[0033] In some embodiments, the initial layout scheme output by the trained convolutional neural network model can be an initial layout scheme sequence corresponding to the gas circuit schematic diagram, that is, the connection order of multiple gas circuit components, and then an engineer or other graphic drawing tool draws the initial layout scheme diagram based on the initial layout scheme.

[0034] Optionally, the trained convolutional neural network model can output an initial layout plan diagram each time, and the gas path schematic diagram and each gas path component can be input into the trained convolutional neural network model multiple times to obtain multiple initial layout plan diagrams.

[0035] Optionally, the trained convolutional neural network model can output multiple initial layout plan diagrams each time, and the gas path schematic diagram and each gas path component can be input into the trained convolutional neural network model at one time to obtain multiple initial layout plan diagrams.

[0036] Therefore, the present application can automatically generate an initial layout plan diagram based on the trained convolutional neural network model, greatly reducing the basic workload of engineers. Moreover, the present application uses the connection rules corresponding to each gas circuit component to train the convolutional neural network, which can effectively improve the reliability of generating the initial layout plan diagram using the trained convolutional neural network model, and try to avoid problems such as gas port type errors.

[0037] In another feasible embodiment, at least one initial layout scheme diagram is obtained by using an enumeration method according to the gas circuit schematic diagram and the connection rules corresponding to each gas circuit component.

[0038] It should be understood that in the embodiments of the present application, the number of initial layout scheme diagrams can be determined according to the number and connection order of the gas circuit components in the gas circuit schematic diagram. For example, when the number of gas circuit components is small, the initial layout scheme diagram can be in the order of ten, when the number of gas circuit components is large, the initial layout scheme diagram can be in the order of hundreds, and when the number of gas circuit components is very large, the initial layout scheme diagram can be in the order of thousands or more, which is not specifically limited in the present application. It should also be understood that when the number of gas circuit components is large or very large, it is preferred to use a trained convolutional neural network model to generate the initial layout scheme diagram, which can greatly reduce the workload of engineers and improve the efficiency of special gas circuit configuration.

[0039] Step 103: sort at least one initial layout scheme diagram according to a preset priority to obtain a recommended layout diagram sequence.

[0040] It should be noted that before sorting at least one initial layout plan diagram according to a preset priority, it is necessary to further verify the feasibility of the initial layout plan diagram, that is, to determine whether at least one gas path component in the initial layout plan diagram matches the provided gas path component. In other words, the gas path component in the initial layout plan diagram is an existing gas path component. For example, Figure 2 A four-way valve base with one inlet and three outlets is not provided. If a four-way valve base with one inlet and three outlets exists in the initial layout plan, the initial layout plan needs to be deleted, that is, the gas path component provider of the initial layout plan cannot implement it, so the initial layout plan does not participate in the sorting recommendation.

[0041] Optionally, the preset priority includes but is not limited to at least one of customer preference, number of welds, minimum interface distance, etc., and this application does not make specific limitations.

[0042] It should be noted that the weld is the welding gap between two adjacent valve bases. Figure 3 As shown, a three-way valve base and a four-way valve base are connected by a weld.

[0043] It should be understood that the increase in the number of welds will have a certain impact on the stability and gas pressure of the special gas circuit, thereby affecting the stability of the special gas cabinet.

[0044] It should also be noted that the various gas circuit components used in the embodiments of the present application are obtained by machining. Specifically, the machined gas circuit components include UCR connectors with threads. Among them, the UCR connector with threads is a metal gasket surface sealing connector with ultra-high sealing performance and ultra-low leakage in the vacuum to positive pressure range. This sealing method is to install the metal gasket between the flange airtight parts of the two connectors (connector bodies) and realize an ultra-precise sealing connection method through threaded connection. After testing, the gas leakage rate of the UCR connection mode provided in the embodiments of the present application is ≤ 1×10-10Pa.m3 / sec.He, which is much lower than the weld connection method.

[0045] For example, in a configuration such as Figure 3 When the structure shown in FIG. 1 is used, the configuration of the present application is as follows Figure 3 The valve shown, the machined three-way base, the UCR joint, the weld, the UCR joint, the machined four-way base, the valve. Figure 3 There is a weld between the three-way base and the four-way base, and the three-way base, the four-way base and the valve are connected by machined threads. The configuration of the prior art is a connection method of valve, UCR joint, weld, UCR joint, three-way pipe, UCR joint, weld, UCR joint, four-way pipe, UCR joint, weld, UCR joint, valve, and there are three welds. It can be seen that the gas circuit assembly provided in the embodiment of the present application can effectively reduce the number of welds configured in the gas circuit through the UCR joint with threads, and improve the sealing performance.

[0046] Therefore, the semiconductor integrated special gas gas circuit configuration method proposed in the embodiment of the present application can automatically configure at least one initial layout plan diagram corresponding to the gas circuit schematic diagram according to the connection rules corresponding to the gas circuit components, without the manual participation of engineers, and can configure the initial layout plan diagram according to the connection rules corresponding to the gas circuit components. Engineers only need to review the initial layout plan diagram later, which can greatly reduce the difficulty and workload of engineers while meeting the gas circuit principle requirements of users, improve the efficiency and reliability of gas circuit configuration, and reduce the cost of gas circuit configuration. At the same time, by sorting through preset priorities to provide a sequence of recommended layout diagrams, it is possible to make orderly recommendations based on at least one initial layout plan diagram, providing users and engineers with a reliable data foundation and selection basis for subsequent engineering design, thereby improving the overall design efficiency and user experience of special gas cabinets.

[0047] In a feasible embodiment, at least one initial layout plan diagram is sorted according to a preset priority, including: obtaining a preset space rule, screening at least one initial layout plan diagram that meets the preset space from at least one initial layout plan diagram, and sorting the screened at least one initial layout plan diagram according to the preset priority.

[0048] The preset space rules may be space rules provided by the user, that is, space requirements for placing special gas cabinets or processes are met, etc. Optionally, the preset space rules include but are not limited to the coordinate distance between the air inlet and the air outlet, the maximum layout space, etc., which can be limited by the user according to actual needs or process capabilities, and this application does not make specific limitations.

[0049] For example, when a gas circuit schematic diagram includes 9 gas circuit components, the three initial layout schemes provide layout schemes of three space specifications: 1×9, 9×1, and 3×3. At this time, based on the coordinate distance of the air inlet and outlet provided by the user, a 1×9 layout scheme can be selected to improve the compactness of the space and thus reduce welds; or, based on the maximum layout space provided by the user, a 3×3 layout scheme can be selected to improve the structural strength.

[0050] That is to say, before sorting the layout plan diagrams, at least one initial layout plan diagram that meets the preset space rules is first screened out according to the preset space rules, and then the at least one initial layout plan diagram is sorted according to the preset priority.

[0051] Therefore, the embodiment of the present application preferentially screens at least one initial layout plan diagram based on spatial rules to ensure that at least one initial layout plan diagram used for priority sorting later meets the spatial rules provided by the user, avoids recommending layout plan diagrams that cannot meet the spatial rules to the user, causing a gap in expectations between users and engineers, improves the reliability and accuracy of the subsequent recommendation sequence, and improves the user experience.

[0052] In a possible embodiment, if Figure 4 As shown, at least one initial layout scheme diagram is sorted according to a preset priority, including: Step 401, for each initial layout plan diagram, obtain the number of welds and the minimum distance of interfaces corresponding to the initial layout plan diagram.

[0053] It should be noted that the number of welds affects the stability and installation complexity of the special gas cabinet, and the minimum distance of the interface is related to the ease of installation. The larger the minimum distance of the interface, the easier the installation. Based on this, this application selects the number of welds and the minimum distance of the interface as the evaluation conditions for the initial layout plan diagram to improve the evaluation reliability of the initial layout plan diagram.

[0054] Step 402, based on the number of welds and the minimum distance of the interface, determine the weighted module corresponding to the initial layout plan diagram.

[0055] In a feasible embodiment, the number of welds and the minimum interface distance are normalized respectively to obtain the normalized number of welds and the normalized minimum interface distance; the weld weighted value corresponding to the normalized number of welds and the interface minimum distance weighted value corresponding to the normalized minimum interface distance are calculated based on the correction weights; based on the weld weighted value and the interface minimum distance weighted value, the weighted modulus of the initial layout plan diagram is determined.

[0056] It should be understood that by normalizing the number of welds and the minimum distance of interfaces respectively, the dimensional effects of the number of welds and the minimum distance of interfaces can be eliminated, thereby improving the stability and generalization ability of the post-fusion algorithm.

[0057] Optionally, the number of welds is normalized using inverse normalization. Exemplarily, the welds are normalized using the following formula:

[0058] Among them, X1 is the number of welds, is the normalized weld number.

[0059] Optionally, the minimum interface distance is normalized using the following formula:

[0060] Among them, X2 is the minimum distance of the interface, is the normalized minimum interface distance.

[0061] Furthermore, the present application uses modified weights to calculate the weighted values ​​of the normalized number of welds and the normalized minimum distance of interfaces, respectively, to obtain weighted moduli corresponding to the number of welds and the minimum distance of interfaces, so that the layout distribution recommendation is only affected by the number of welds and the minimum distance of interfaces.

[0062] Preferably, the correction weight corresponding to the number of welds and the minimum distance of the interface is 5: 1, that is, the weight ratio of the number of welds and the minimum distance of the interface is 5: 1. In other words, in the embodiment of the present application, more attention is paid to the influence of the number of welds on the layout distribution diagram.

[0063] Exemplarily, the weighted values ​​of the number of welds and the minimum distance of the interface are calculated using the following formulas: Weld weighted value = ω1×

[0064] Minimum interface distance weighted value = ω2×

[0065] Among them, ω1 is the weight corresponding to the number of welds, ω2 is the weight corresponding to the minimum distance of the interface, is the normalized weld number, is the normalized minimum interface distance.

[0066] Furthermore, in the embodiment of the present application, the vector modulus of the weld weighted value and the interface minimum distance weighted value is used as the weighted modulus corresponding to the initial layout scheme diagram. Specifically, the weighted modulus is obtained by calculating the modulus of the sum of the squares of the weld weighted value and the interface minimum distance weighted value. Exemplarily, the weighted modulus is calculated using the following formula:

[0067] Step 403: sort at least one initial layout solution diagram in descending order based on the weighted modulus.

[0068] Therefore, the embodiment of the present application selects the number of welds and the minimum distance of interfaces as evaluation conditions, calculates the weighted modulus corresponding to each initial layout plan, and sorts the initial layout plans according to the weighted modulus. This can make the initial layout plan drawings with smaller numbers of welds and larger minimum distances of interfaces have smaller arrangement numbers, thereby recommending a sequence of initial layout plan drawings with smaller numbers of welds and larger minimum distances of interfaces to users or engineers. On the basis of ensuring the drawing needs of users and projects, the stability and convenience of the prioritized recommended initial layout plan drawings are improved by sorting the recommended sequence.

[0069] In one specific embodiment, the user provides Figure 5 The gas path schematic diagram is input into the trained convolutional neural network model or the enumeration method is used to obtain the 6 initial layout schemes shown in the following table. Then, the 6 initial layout schemes are weighted modulus calculated, as shown in Table 1, to obtain the adjusted sequence number.

[0070] Table 1

[0071]

[0072] Therefore, the semiconductor integrated special gas circuit configuration method provided by the embodiment of the present application can be used for Figure 5 The gas path schematic diagram shown in the figure obtains 6 initial layout schemes (figures), and can be prioritized based on the number of welds and the minimum distance of the interface as evaluation conditions to obtain a sequence of recommended layout schemes (figures), thereby achieving the purpose of giving priority to recommending layout schemes (figures) with fewer welds and larger minimum distance of the interface to users or engineers.

[0073] For example, Figure 6 and Figure 7 Provided for Figure 5 A layout diagram for configuration, where: Figure 6 The configuration scheme generated by using some of the machined gas circuit components in this application is 6 rows and 8 columns, Figure 7This is a configuration scheme generated using the machined gas circuit components in this application, 5 rows and 6 columns. It can be seen that under the same gas circuit principle, Figure 7 Relative to Figure 6 Fewer welds and fewer UCR interfaces.

[0074] In a specific embodiment, Figure 8-Figure 10 As shown, Figure 8 for Figure 5 The configuration scheme of the gas circuit components in the middle part, that is, the connection sequence of the gas circuit components Q15, Q10 and the filter, Fig. 9 A set of connection methods corresponding to the gas circuit components provided by the prior art, Fig.10 A set of connection methods corresponding to the gas circuit components obtained by machining as described above in this application. Fig. 9 The gas circuit components and their connection methods shown in the figure have 5 welds, 3 UCR joints, L1=2Row, L2=204mm; Fig.10 The gas circuit components and their connection methods shown in the figure only have 4 welds and 3 UCR joints, L1=3Row, L2=179.5mm. Row is the number of rows, 2Row means 2 rows, and 3Row means 3 rows.

[0075] In summary, the semiconductor integrated special gas gas circuit configuration method proposed in the embodiment of the present application can automatically configure at least one initial layout plan diagram corresponding to the gas circuit schematic diagram according to the connection rules corresponding to the gas circuit components. The initial layout plan diagram can be configured according to the connection rules corresponding to the gas circuit components without the manual participation of engineers. Engineers only need to review the initial layout plan diagram later, which can greatly reduce the difficulty and workload of engineers while meeting the gas circuit principle requirements of users, improve the efficiency and reliability of gas circuit configuration, and reduce the cost of gas circuit configuration. At the same time, by sorting through preset priorities to provide a sequence of recommended layout diagrams, it is possible to make orderly recommendations based on at least one initial layout plan diagram, providing users and engineers with a reliable data foundation and selection basis for subsequent engineering design, thereby improving the overall design efficiency and user experience of special gas cabinets.

[0076] It should be noted that although the operations of the method of the present invention are described in a particular order in the drawings, this does not require or imply that the operations must be performed in this particular order or that all illustrated operations must be performed to achieve desired results.

[0077] Fig.11 A schematic structural diagram of a semiconductor integrated special gas circuit configuration device provided in one embodiment of the present application is shown.

[0078] like Fig.11As shown, the semiconductor integrated special gas circuit configuration device 10 proposed in the embodiment of the present application includes: The acquisition module 11 is used to acquire a gas circuit schematic diagram; the gas circuit schematic diagram includes a plurality of gas circuit components and a connection sequence of the plurality of gas circuit components; A generating module 12, configured to generate at least one initial layout scheme diagram corresponding to the gas circuit schematic diagram based on the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components; The sorting module 13 is used to sort the at least one initial layout scheme diagram according to a preset priority to obtain a recommended layout diagram sequence.

[0079] In some embodiments, the sorting module 13 is further configured to: For each of the initial layout plan diagrams, obtaining the number of welds and the minimum distance of interfaces corresponding to the initial layout plan diagram; Determining a weighted module corresponding to the initial layout plan diagram based on the number of welds and the minimum distance of the interface; At least one of the initial layout scheme graphs is sorted in descending order based on the weighted modulus.

[0080] In some embodiments, the sorting module 13 is further configured to: Normalizing the number of welds and the minimum distance of interfaces respectively to obtain a normalized number of welds and a normalized minimum distance of interfaces; Calculating the weld weighted value corresponding to the normalized weld number and the interface minimum distance weighted value corresponding to the normalized interface minimum distance based on the correction weights; Based on the weld weighted value and the interface minimum distance weighted value, a weighted module corresponding to the initial layout plan diagram is determined.

[0081] In some embodiments, the sorting module 13 is further configured to: The vector modulus of the weld weighted value and the interface minimum distance weighted value is used as the weighted modulus corresponding to the initial layout plan diagram.

[0082] In some embodiments, the generating module 12 is further configured to: Inputting the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components into a trained convolutional neural network model to obtain the at least one initial layout scheme diagram; or The at least one initial layout scheme diagram is obtained by using an enumeration method according to the gas circuit principle diagram and the connection rules corresponding to each of the gas circuit components.

[0083] In some embodiments, the sorting module 13 is further configured to: Get preset space rules; Filtering at least one initial layout plan diagram that satisfies the preset space from the at least one initial layout plan diagram; The at least one initial layout scheme diagram that is screened out is sorted according to the preset priority.

[0084] In some embodiments, the connection rule corresponding to the gas circuit component includes at least one of gas port type, gas flow direction, and valve status.

[0085] It should be understood that the modules or modules described in the semiconductor integrated special gas circuit configuration device 10 are similar to those described in the reference Figure 1 The various steps in the described method correspond to each other. Therefore, the operations and features described above for the method are also applicable to the semiconductor integrated special gas circuit configuration device 10 and the modules contained therein, and will not be repeated here. The semiconductor integrated special gas circuit configuration device 10 can be pre-implemented in a browser or other security application of an electronic device, or can be loaded into a browser or its security application of an electronic device by downloading or the like. The corresponding modules in the semiconductor integrated special gas circuit configuration device 10 can cooperate with the modules in the electronic device to implement the solution of the embodiment of the present application.

[0086] For the several modules or units mentioned in the above detailed description, this division is not mandatory. In fact, according to the embodiments of the present disclosure, the features and functions of two or more modules or units described above can be embodied in one module or unit. On the contrary, the features and functions of one module or unit described above can be further divided into multiple modules or units to be embodied.

[0087] Reference below Fig.12 , Fig.12 A schematic diagram of the structure of a computer system of an electronic device or server suitable for implementing an embodiment of the present application is shown. like Fig.12 As shown, the computer system includes a central processing unit (CPU) 901, which can perform various appropriate actions and processes according to the program stored in the read-only memory (ROM) 902 or the program loaded from the storage part 908 to the random access memory (RAM) 903. In the RAM 903, various programs and data required for the operation instructions of the system are also stored. The CPU 901, the ROM 902, and the RAM 903 are connected to each other through a bus 904. An input / output (I / O) interface 905 is also connected to the bus 904.

[0088] The following components are connected to the I / O interface 905: an input section 906 including a keyboard, a mouse, etc.; an output section 907 including a cathode ray tube (CRT), a liquid crystal display (LCD), etc., and a speaker, etc.; a storage section 908 including a hard disk, etc.; and a communication section 909 including a network interface card such as a LAN card, a modem, etc. The communication section 909 performs communication processing via a network such as the Internet. A drive 910 is also connected to the I / O interface 905 as needed. A removable medium 911, such as a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, etc., is installed on the drive 910 as needed so that a computer program read therefrom is installed into the storage section 908 as needed.

[0089] In particular, according to an embodiment of the present application, the above reference flow chart Figure 2 The described process can be implemented as a computer software program. For example, an embodiment of the present application includes a computer program product, which includes a computer program carried on a computer-readable medium, and the computer program includes a program code for executing the method shown in the flowchart. In such an embodiment, the computer program includes a program code for executing the method shown in the flowchart. In such an embodiment, the computer program can be downloaded and installed from a network through the communication part 909, and / or installed from a removable medium 911. When the computer program is executed by the central processing unit (CPU) 901, the above-mentioned functions defined in the system of the present application are executed.

[0090] It should be noted that the computer-readable medium shown in the present application may be a computer-readable signal medium or a computer-readable storage medium or any combination of the above two. The computer-readable storage medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, device or device, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In the present application, a computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, device or device. In the present application, a computer-readable signal medium may include a data signal propagated in a baseband or as part of a carrier wave, which carries a computer-readable program code. This propagated data signal may take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. Computer-readable signal media may also be any computer-readable medium such as a computer-readable storage medium that can send, propagate or transmit a program for use by or in conjunction with an instruction execution system, device or device. The program code contained on the computer-readable medium may be transmitted using any appropriate medium, including but not limited to: wireless, wire, optical cable, RF, etc., or any suitable combination of the above.

[0091] The flow chart and block diagram in the accompanying drawings illustrate the possible architecture, functions and operating instructions of the system, method and computer program product according to various embodiments of the present application. In this regard, each box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the aforementioned module, program segment or a part of a code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some implementations as replacements, the functions marked in the box can also occur in a sequence different from that marked in the accompanying drawings. For example, the boxes represented by two connections can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flow chart, and the combination of the boxes in the block diagram and / or flow chart can be implemented with a dedicated hardware-based system that performs a specified function or operating instruction, or can be implemented with a combination of dedicated hardware and computer instructions.

[0092] The units or modules involved in the embodiments described in the present application may be implemented by software or by hardware. The described units or modules may also be arranged in a processor, for example, they may be described as: a processor includes an acquisition module, a generation module and a sorting module. Among them, the names of these units or modules do not constitute a limitation on the units or modules themselves under certain circumstances. For example, the acquisition module may also be described as "obtaining a gas circuit schematic diagram; the gas circuit schematic diagram includes multiple gas circuit components and the connection order of multiple gas circuit components".

[0093] As another aspect, the present application further provides a computer-readable storage medium, which may be included in the electronic device described in the above embodiment, or may exist independently without being assembled into the electronic device. The above computer-readable storage medium stores one or more programs, and when the above programs are used by one or more processors to execute the semiconductor integrated special gas path configuration method described in the present application.

[0094] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used. Those skilled in the art should understand that the scope of disclosure involved in the present application is not limited to the technical solution formed by a specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the aforementioned disclosed concept. For example, the above features are replaced with the technical features with similar functions disclosed in the present application (but not limited to) by each other to form a technical solution.

Claims

1. A method for configuring a semiconductor integrated special gas circuit, characterized in that: include: Obtaining a gas circuit schematic diagram; the gas circuit schematic diagram includes a plurality of gas circuit components and a connection sequence of the plurality of gas circuit components; Based on the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components, configuring at least one initial layout scheme diagram corresponding to the gas circuit schematic diagram; The at least one initial layout scheme diagram is sorted according to a preset priority to obtain a recommended layout diagram sequence.

2. The semiconductor integrated special gas circuit configuration method according to claim 1, characterized in that: The step of sorting the at least one initial layout scheme diagram according to a preset priority to obtain a recommended layout diagram sequence includes: For each of the initial layout plan diagrams, obtaining the number of welds and the minimum distance of interfaces corresponding to the initial layout plan diagram; Determining a weighted module corresponding to the initial layout plan diagram based on the number of welds and the minimum distance of the interface; At least one of the initial layout scheme graphs is sorted in descending order based on the weighted modulus.

3. The semiconductor integrated special gas circuit configuration method according to claim 2, characterized in that: The step of determining a weighted module corresponding to the initial layout scheme diagram based on the number of welds and the minimum distance of the interface includes: Normalizing the number of welds and the minimum distance of interfaces respectively to obtain a normalized number of welds and a normalized minimum distance of interfaces; Calculating the weld weighted value corresponding to the normalized weld number and the interface minimum distance weighted value corresponding to the normalized interface minimum distance based on the correction weights; Based on the weld weighted value and the interface minimum distance weighted value, a weighted modulus corresponding to the initial layout plan diagram is determined.

4. The semiconductor integrated special gas circuit configuration method according to claim 3, characterized in that: Also includes: The vector modulus of the weld weighted value and the interface minimum distance weighted value is used as the weighted modulus corresponding to the initial layout plan diagram.

5. The semiconductor integrated special gas circuit configuration method according to claim 1, characterized in that: The configuring at least one initial layout scheme diagram corresponding to the gas circuit schematic diagram based on the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components comprises: Inputting the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components into a trained convolutional neural network model to obtain the at least one initial layout scheme diagram; or The at least one initial layout scheme diagram is obtained by using an enumeration method according to the gas circuit principle diagram and the connection rules corresponding to each of the gas circuit components.

6. The semiconductor integrated special gas circuit configuration method according to claim 1, characterized in that: Before sorting the at least one initial layout scheme diagram according to a preset priority to obtain a recommended layout diagram sequence, the method further includes: Get preset space rules; Filtering at least one initial layout plan diagram that satisfies the preset space from the at least one initial layout plan diagram; The at least one initial layout scheme diagram that is screened out is sorted according to the preset priority.

7. The semiconductor integrated special gas circuit configuration method according to claim 1 or 2, characterized in that: The connection rule corresponding to the gas path component includes at least one of the gas port type, gas flow direction, and valve state.

8. A semiconductor integrated special gas circuit configuration device, characterized in that: include: An acquisition module is used to acquire a gas circuit schematic diagram; The gas circuit schematic diagram includes a plurality of gas circuit components and a connection sequence of the plurality of gas circuit components; A generating module, configured to generate at least one initial layout scheme diagram corresponding to the gas circuit schematic diagram based on the gas circuit schematic diagram and the connection rules corresponding to each of the gas circuit components; The sorting module is used to sort the at least one initial layout scheme diagram according to a preset priority to obtain a recommended layout diagram sequence.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the semiconductor integrated special gas path configuration method as described in any one of claims 1-7 is implemented.

10. A computer program product, comprising a computer program, characterized in that When the computer program is executed by a processor, the semiconductor integrated special gas circuit configuration method described in any one of claims 1 to 7 is implemented.

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