Multi-station manipulator for wafer interactive transmission

Abstract

The invention discloses a multi-station mechanical arm for wafer interactive transmission, and relates to the field of semiconductor production, the multi-station mechanical arm comprises an X-axis walking unit, the X-axis walking unit comprises a protection bin body and a first movement driving mechanism, the first movement driving mechanism is installed in the protection bin body, and a Y-axis arm telescopic unit comprises a wafer taking arm, a first supporting table and a second movement driving mechanism; one side of the wafer taking arm is connected with a second movement driving mechanism used for driving the wafer taking arm to move in the length direction of the first supporting table, the second movement driving mechanism is installed on the first supporting table, the rotation driving unit is installed at the bottom of the first supporting table, and the rotation driving unit comprises a rotation driving piece A; according to the multi-station mechanical arm for wafer interactive transmission, the automatic production requirement of a semiconductor yellow light area Inline can be met, the designed mechanical arm can automatically rotate by 350 degrees to take and place wafers at multiple stations, the position precision reaches 0.1 mm or above, and the transmission efficiency WPH reaches 180 wafers or above.

Description

Technical Field

[0001] The invention relates to semiconductor production technology, and in particular to a multi-station robot for wafer interactive transmission. Background Art

[0002] In the semiconductor manufacturing industry, the automated production of yellow light area equipment (such as photoresist and photolithography machine) is crucial to improving production efficiency and product quality. Traditional substrate transmission methods often rely on manual operation or simple mechanical transmission, which is not only inefficient, but also difficult to meet the requirements of modern semiconductor production lines for high precision, high stability and high flexibility.

[0003] Traditional substrate transport mechanisms usually have the following problems:

[0004] Limited range of movement: Traditional transmission mechanisms can often only achieve movement in a single direction or within a limited range, and it is difficult to meet the multi-station and multi-dimensional transmission needs on complex production lines.

[0005] Low transmission accuracy: During the transmission of the substrate, extremely high positioning accuracy must be ensured to avoid production problems caused by substrate damage or inaccurate positioning. However, traditional transmission mechanisms often find it difficult to meet this requirement.

[0006] Complex structure and high maintenance cost: Traditional transmission mechanisms usually contain a large number of mechanical parts, with complex structures, high maintenance costs, and are prone to failure.

[0007] Low degree of automation: Traditional transmission methods often require manual intervention, making it difficult to achieve a fully automated production process.

[0008] Therefore, the market urgently needs a substrate transfer mechanism that can achieve multi-dimensional, high-precision, and high-stability to meet the full-line automated production needs of Inline between semiconductor yellow light zone equipment coaters and lithography machines. Summary of the invention

[0009] The purpose of the present invention is to provide a multi-station robot for interactive wafer transfer, so as to solve the problem that conventional robots in the prior art are difficult to realize automatic substrate exchange between a photolithography machine and a coating machine due to their own structural limitations.

[0010] In order to achieve the above-mentioned object, the present invention provides the following technical solutions: a multi-station manipulator for wafer interactive transmission, comprising an X-axis walking unit, which comprises a protective warehouse body and a first mobile driving mechanism, wherein the first mobile driving mechanism is installed inside the protective warehouse body;

[0011] The Y-axis arm telescopic unit includes a film taking arm, a first support platform and a second mobile driving mechanism, one side of the film taking arm is connected to the second mobile driving mechanism for driving the film taking arm to move along the length direction of the first support platform, and the second mobile driving mechanism is installed on the first support platform;

[0012] A rotation drive unit is installed at the bottom of the first support platform, and the rotation drive unit includes an A rotation drive member, and the A rotation drive member is used to drive the first support platform to rotate around the axis of the output shaft of the A rotation drive member;

[0013] A Z-axis walking unit, one side of which is connected to the rotary driving unit, the Z-axis walking unit is used to drive the rotary driving unit to move in a direction perpendicular to the upper surface of the protective warehouse body, and one side of the Z-axis walking unit is connected to an X-axis walking unit for driving the Z-axis walking unit to move along the length direction of the protective warehouse body;

[0014] Definition: The length direction of the protective bin is the X-axis direction, the length direction of the first support platform is the Y-axis direction, the direction perpendicular to the protective bin is the Z-axis direction, the X-axis direction is perpendicular to the Z-axis direction, and the Y-axis direction is perpendicular to the Z-axis direction.

[0015] Furthermore, the second mobile driving mechanism includes an A transmission belt, an A connecting member, a guide member, a B rotating driving member, a driving wheel, two driven wheels and two tensioning wheels. The two driven wheels are rotatably installed on the first support platform. One end of the driving wheel is connected to the B rotating driving member for driving the driving wheel to rotate around its own axis. The A transmission belt is sleeved on the outside of the driving wheel and the two driven wheels. The two tensioning wheels are used to tighten the A transmission belt. One side of the A connecting member is fixedly connected to the A transmission belt, and the other side of the A connecting member is fixedly connected to the film picking arm. One side of the film picking arm is connected to a guide member for limiting the reverse movement of the film picking arm along the length of the first support platform.

[0016] Furthermore, the guide member includes a guide rail, a B connecting member and a slider. The guide rail is fixedly installed on the first support platform, and the slider is slidably installed on the guide rail. One side of the slider is fixedly connected to the B connecting member, and one side of the B connecting member is fixedly connected to the film picking arm.

[0017] Furthermore, the second mobile driving mechanism includes a first slide, a second slide, a B transmission belt, an A telescopic driving member, a C connecting member, a D connecting member, a limiting member and two synchronous wheels. The bottom of the film taking arm is fixedly connected to the second slide, the first slide is slidably installed on the first support platform, and the second slide is slidably installed on the first slide. One side of the first slide is connected to the A telescopic driving member for driving the first slide to move along the length direction of the first support platform. One side of the second slide is fixedly connected to the C connecting member. Both synchronous wheels are rotatably installed on the first slide. The B transmission belt is sleeved on the outside of the two synchronous wheels. One side of the C connecting member is fixedly connected to the B transmission belt, one side of the D connecting member is fixedly connected to the B transmission belt, and one side of the D connecting member is connected to the limiting member. The limiting member can prevent the D connecting member from moving relative to the first support platform or the first slide.

[0018] Furthermore, the limiting member includes a first limiting plate, a second limiting plate, a sliding frame, a B telescopic driving member and two pins. One side of the first limiting plate is fixedly connected to the first sliding platform. The first limiting plate is provided with a plurality of A sockets, and the plurality of A sockets can be partially inserted into one of the pins. The second limiting plate is provided with a plurality of B sockets, and the plurality of B sockets can be partially inserted into another pin. The sliding frame is slidably installed on the first supporting platform. One side of the sliding frame is fixedly connected to the D connecting member, and one side of the second limiting plate is fixedly connected to the first supporting platform. The B telescopic driving member is used to drive the two pins to move along their respective axes.

[0019] Furthermore, the B telescopic driving member is a bidirectional telescopic driving member, the two movable ends of the bidirectional telescopic driving member are respectively fixedly connected to the two latches, and the fixed end of the bidirectional telescopic driving member is fixedly connected to the sliding frame.

[0020] Furthermore, the first mobile driving mechanism is a linear motor, a fixed end of the linear motor is fixedly connected to the protective warehouse body, and a movable end of the linear motor is connected to the Z-axis walking unit.

[0021] Furthermore, the Z-axis walking unit includes a vertical electric cylinder and a main body mounting seat, the fixed end of the vertical electric cylinder is fixedly connected to the main body mounting seat, one side of the main body mounting seat is fixedly connected to the movable end of the linear motor, and the movable end of the vertical electric cylinder is connected to the rotation drive unit.

[0022] Furthermore, the A rotation drive unit also includes a second support platform, the A rotation drive member is fixedly installed on the second support platform, the output shaft end of the A rotation drive member is fixedly connected to the first support platform, and one side of the second support platform is fixedly connected to the moving end of the vertical electric cylinder.

[0023] Compared with the prior art, the multi-station robot for wafer interactive transmission provided by the present invention has the following beneficial effects:

[0024] 1. It can meet the needs of automatic production of semiconductor yellow light area I nline. The designed manipulator can automatically rotate 350° for multi-station pick-up and placement of wafers, with a position accuracy of more than 0.1mm and a transmission efficiency of more than 180 wafers.

[0025] 2. Through the cooperation of the axis travel unit, Y-axis arm telescopic unit, rotary drive unit and Z-axis travel unit, the multi-dimensional movement of the film-taking arm in the X-axis, Y-axis and Z-axis directions, as well as the rotation around the output axis of the A rotary drive component are realized, meeting the multi-station and multi-dimensional transmission requirements on complex production lines;

[0026] 3. By adopting high-precision driving components such as linear motors, vertical electric cylinders and DD motors, the positioning accuracy of the wafer-taking arm during movement and rotation is ensured, avoiding production problems caused by substrate damage or inaccurate positioning;

[0027] 4. By setting up a second mobile drive mechanism, the dual functions of rapid movement and high-precision positioning of the film-picking arm are realized, which effectively improves the working efficiency and positioning accuracy of the equipment. When the film-picking arm is at the front end of its moving stroke, the moving speed of the film-picking arm is effectively improved. When the film-picking arm is at the end position of its moving stroke, the control of the movement accuracy of the film-picking arm can be significantly improved to meet the needs of high-precision operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0029] Figure 1 A schematic diagram of the overall external structure provided by an embodiment of the present invention;

[0030] Figure 2 A schematic cross-sectional view of an embodiment of the present invention;

[0031] Figure 3 A schematic diagram of a combination of a second mobile drive mechanism, a film-taking arm and a first support platform provided in an embodiment of the present invention;

[0032] Figure 4 The embodiment of the present invention provides Figure 3 A is an enlarged schematic diagram;

[0033] Figure 5 A schematic diagram of another combination of a second mobile drive mechanism, a film-taking arm and a first support platform provided in an embodiment of the present invention;

[0034] Figure 6 A schematic diagram of a first partial three-dimensional structure provided by an embodiment of the present invention;

[0035] Figure 7 A schematic diagram of a second partial three-dimensional structure provided by an embodiment of the present invention;

[0036] Figure 8 A schematic diagram of a third partial three-dimensional structure provided in an embodiment of the present invention.

[0037] Description of reference numerals:

[0038] 100, X-axis travel unit; 110, protective bin; 120, first mobile drive mechanism; 200, Y-axis arm telescopic unit; 210, film taking arm; 220, first support platform; 230, second mobile drive mechanism; 231, A transmission belt; 232, A connecting piece; 233, B rotating drive member; 234, driving wheel; 235, driven wheel; 236, B connecting piece; 237, slider; 238, guide rail; 239, tension wheel; 241, first slide; 242, second slide; 243, B transmission belt; 244, A telescopic retractable drive member; 245, C connecting member; 246, D connecting member; 247, synchronous wheel; 248, first limit plate; 249, second limit plate; 2411, sliding frame; 2412, B retractable drive member; 2413, latch; 2414, A socket; 2415, B socket; 300, rotation drive unit; 310, A rotation drive member; 320, second support platform; 400, Z-axis walking unit; 410, vertical electric cylinder; 420, main body mounting seat; 500, main drag chain; 600, walking drag chain; 700, drag chain protective cover. DETAILED DESCRIPTION

[0039] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0040] See also Figures 1 to 6 , a multi-station robot for wafer interactive transmission, comprising:

[0041] The X-axis walking unit 100 includes a protective warehouse body 110 and a first moving driving mechanism 120, and the first moving driving mechanism 120 is installed inside the protective warehouse body 110;

[0042] The Y-axis arm telescopic unit 200 includes a film taking arm 210, a first support platform 220, and a second mobile driving mechanism 230. One side of the film taking arm 210 is connected to the second mobile driving mechanism 230 for driving the film taking arm 210 to move along the length direction of the first support platform 220. The second mobile driving mechanism 230 is installed on the first support platform 220.

[0043] The rotation driving unit 300 is installed at the bottom of the first support platform 220. The rotation driving unit 300 includes an A rotation driving member 310. The A rotation driving member 310 is used to drive the first support platform 220 to rotate around the axis of the output shaft of the A rotation driving member 310.

[0044] A Z-axis walking unit 400, one side of which is connected to the rotation driving unit 300, the Z-axis walking unit 400 is used to drive the rotation driving unit 300 to move in a direction perpendicular to the upper surface of the protective warehouse body 110, and one side of the Z-axis walking unit 400 is connected to the X-axis walking unit 100 for driving the Z-axis walking unit 400 to move along the length direction of the protective warehouse body 110;

[0045] Definition: The length direction of the protective chamber 110 is the X-axis direction, the length direction of the first support platform 220 is the Y-axis direction, the direction perpendicular to the protective chamber 110 is the Z-axis direction, the X-axis direction is perpendicular to the Z-axis direction, and the Y-axis direction is perpendicular to the Z-axis direction.

[0046] In order to solve the problem of semiconductor yellow light area equipment coating machine and photolithography machine to achieve I nli ne full-line automated production needs, to achieve automatic substrate transmission and exchange between the glue spreader and the photolithography machine, for this purpose, the present application drives the film picking arm 210 to move along the Y-axis direction by the second mobile drive mechanism 230 to achieve a linear reciprocating film picking action, and drives the first support platform 220 to rotate around the axis of the output shaft of the A rotating drive member 310 by the rotation drive unit 300 to achieve the rotation action of the film picking arm 210, the A rotating drive member 310 can specifically adopt a DD motor to achieve a 350° rotation action of the film picking arm 210, and the Z-axis walking unit 400 drives the rotation drive unit 300 and the X-axis walking unit 100 to drive the film picking arm 210 to move along the Z-axis direction, and the X-axis walking unit 100 drives the Z-axis walking unit 400 to move along the X-axis direction to achieve the movement of the film picking arm 210 along the X-axis direction, thereby effectively realizing the multi-station film picking and placing of the film picking arm 210, and effectively improving the efficiency of automatic substrate transmission and exchange between the glue spreader and the photolithography machine.

[0047] See also Figure 3 to Figure 4In one embodiment of the present invention, the second mobile driving mechanism 230 includes an A transmission belt 231, an A connecting member 232, a guide member, a B rotating driving member 233, a driving wheel 234, two driven wheels 235 and two tensioning wheels 239. The two driven wheels 235 are both rotatably mounted on the first support platform 220. One end of the driving wheel 234 is connected to the B rotating driving member 233 for driving the driving wheel 234 to rotate around its own axis. The A transmission belt 231 is sleeved on the outside of the driving wheel 234 and the two driven wheels 235. The two tensioning wheels 239 are used to tighten the A transmission belt 231. One side of the A connecting member 232 is fixedly connected to the A transmission belt 231, and the other side of the A connecting member 232 is fixedly connected to the film taking arm 210. One side of the film taking arm 210 is connected to a guide member for limiting the reverse movement of the film taking arm 210 along the length of the first support platform 220.

[0048] In one embodiment of the present invention, the guide member includes a guide rail 238, a B connecting member 236 and a slider 237. The guide rail 238 is fixedly mounted on the first support platform 220, and the slider 237 is slidably mounted on the guide rail 238. One side of the slider 237 is fixedly connected to the B connecting member 236, and one side of the B connecting member 236 is fixedly connected to the film taking arm 210. The guide rail 238 and the slider 237 are provided to make the movement of the film taking arm 210 more stable.

[0049] Specifically, the B rotating drive member 233 adopts a rotating cylinder or a motor, and the B rotating drive member 233 is fixedly installed on the first support platform 220. The driving wheel 234 is fixedly sleeved on the outside of the output shaft of the B rotating drive member 233. The driving wheel 234 is driven to rotate by the B rotating drive member 233, and the driving wheel 234 rotates to pull the A transmission belt 231 to move. Under the guidance of the guide member, the A transmission belt 231 drives the film picking arm 210 to move along the length direction of the first support platform 220 through the A connecting member 232, that is, the film picking arm 210 is moved along the Y-axis direction.

[0050] See also Figures 5 to 8In one embodiment of the present invention, the second mobile driving mechanism 230 includes a first slide 241, a second slide 242, a B transmission belt 243, an A telescopic driving member 244, a C connecting member 245, a D connecting member 246, a limiting member and two synchronous wheels 247. The bottom of the film-taking arm 210 is fixedly connected to the second slide 242. The first slide 241 is slidably mounted on the first support platform 220, and the second slide 242 is slidably mounted on the first slide 241. One side of the first slide 241 is connected to drive the first slide 241 along the first support platform. A telescopic driving member 244 moving in the length direction of 220 is fixedly connected to the second slide 242 on one side with the C connecting member 245, two synchronous wheels 247 are rotatably mounted on the first slide 241, a B transmission belt 243 is sleeved on the outside of the two synchronous wheels 247, a C connecting member 245 is fixedly connected to the B transmission belt 243 on one side, a D connecting member 246 is fixedly connected to the B transmission belt 243 on one side, and a D connecting member 246 is connected to a limiting member on one side, and the limiting member can prevent the D connecting member 246 from moving relative to the first support platform 220 or the first slide 241;

[0051] Specifically, the A telescopic driving member 244 adopts a telescopic cylinder or a hydraulic cylinder, the moving end of the A telescopic driving member 244 is fixedly connected to the first slide 241, and the fixed end of the A telescopic driving member 244 is fixedly connected to the first support platform 220. When the moving end of the A telescopic driving member 244 is extended or retracted, it drives the first slide 241 to move relative to the first support platform 220, and the first slide 241 drives the B transmission belt 243 to move through two synchronous wheels 247;

[0052] When the film-taking arm 210 needs to move quickly, the limiting member is used to prevent the D connecting member 246 from moving relative to the first support platform 220. At this time, under the action of the D connecting member 246, the B transmission belt 243 moves under the traction of the D connecting member 246, and the B transmission belt 243 drives the second slide 242 to move relative to the first slide 241 through the C connecting member 245, and the moving speed of the second slide 242 is multiple times the moving speed of the first slide 241. The second slide 242 drives the film-taking arm 210 to move, thereby realizing the rapid movement of the film-taking arm 210, and the moving distance of the film-taking arm 210 is multiple times the telescopic amount of the moving end of the A telescopic driving member 244, realizing the rapid movement of the film-taking arm 210;

[0053] Due to the increase in stroke, the position control accuracy of the film picking arm 210 is reduced. When the movement accuracy of the film picking arm 210 needs to be improved, the limiting member is used to prevent the D connecting member 246 from moving relative to the first slide 241. At this time, the B transmission belt 243 cannot move relative to the first slide 241, so that the second slide 242 drives the film picking arm 210 to move synchronously with the first slide 241, that is, the moving speed and moving distance of the film picking arm 210 are the same as the telescopic amount of the moving end of the A telescopic drive member 244, thereby improving the control of the movement accuracy of the film picking arm 210 when the film picking arm 210 is at the end of its moving stroke.

[0054] See also Figure 6 and Figure 8 In one embodiment of the present invention, the limiting member includes a first limiting plate 248, a second limiting plate 249, a sliding frame 2411, a B telescopic driving member 2412 and two latches 2413. One side of the first limiting plate 248 is fixedly connected to the first slide 241. The first limiting plate 248 is provided with a plurality of A plug holes 2414, and the plurality of A plug holes 2414 can be partially inserted into one of the latches 2413. The second limiting plate 249 is provided with a plurality of B plug holes 2415, and the plurality of B plug holes 2415 can be partially inserted into another latch 2413. The sliding frame 2411 is slidably installed on the first support platform 220. One side of the sliding frame 2411 is fixedly connected to the D connecting member 246. One side of the second limiting plate 249 is fixedly connected to the first support platform 220. The B telescopic driving member 2412 is used to drive the two latches 2413 to move along their respective axial directions.

[0055] B telescopic drive member 2412 is a bidirectional telescopic drive member, which can be a bidirectional telescopic cylinder or a bidirectional electric telescopic rod. The two moving ends of the bidirectional telescopic drive member are respectively fixedly connected to the two latches 2413, and the outer side walls of the two latches 2413 are slidably connected to the sliding frame 2411. The fixed end of the bidirectional telescopic drive member is fixedly connected to the sliding frame 2411.

[0056] Specifically, when a limiting member is needed to prevent the D connecting member 246 from moving relative to the first support platform 220, the two-way telescopic driving member drives the latch 2413 on one side of the first limiting plate 248 to move away from the A insertion hole 2414 on the first limiting plate 248, and drives the other latch 2413 to be inserted into the B insertion hole 2415 on the second limiting plate 249, so that the sliding frame 2411 and the D connecting member 246 cannot move relative to the first support platform 220;

[0057] When a limiting member is needed to prevent the D connecting member 246 from moving relative to the first slide 241, similarly, the bidirectional telescopic driving member drives the pin 2413 on one side of the first limit plate 248 to move and insert into the A hole 2414 on the first limit plate 248, and drives the other pin 2413 to disengage from the B hole 2415 on the second limit plate 249.

[0058] In one embodiment of the present invention, a displacement sensor is also provided. The displacement sensor is used to measure the moving distance of the D-connecting member 246 relative to the first support platform 220. The displacement sensor is fixedly mounted on the first support platform 220 so that the D-connecting member 246 can return to the starting point of its own travel after moving relative to the first support platform 220. To this end, the position of the D-connecting member 246 is measured by the displacement sensor.

[0059] See also Figure 1 and Figure 2 In one embodiment of the present invention, the first mobile driving mechanism 120 is a linear motor, the fixed end of the linear motor is fixedly connected to the protective warehouse body 110, and the moving end of the linear motor is connected to the Z-axis walking unit 400;

[0060] Specifically, the Z-axis walking unit 400 is driven by a linear motor to move along the X-axis direction, and the Z-axis walking unit 400 drives the film taking arm 210 to move along the X-axis direction through the rotation driving unit 300 and the X-axis walking unit 100.

[0061] See also Figure 1 and Figure 2 In one embodiment of the present invention, the Z-axis walking unit 400 includes a vertical electric cylinder 410 and a main body mounting seat 420, the fixed end of the vertical electric cylinder 410 is fixedly connected to the main body mounting seat 420, one side of the main body mounting seat 420 is fixedly connected to the moving end of the linear motor, and the moving end of the vertical electric cylinder 410 is connected to the rotation driving unit 300;

[0062] Specifically, the Z-axis travel unit 400 drives the rotation drive unit 300 to move along the Z-axis direction, and the rotation drive unit 300 drives the film taking arm 210 to move along the Z-axis direction through the X-axis travel unit 100.

[0063] See also Figure 1 and Figure 2 In one embodiment of the present invention, the A rotation drive unit 300 further includes a second support platform 320, the A rotation drive member 310 is fixedly mounted on the second support platform 320, the output shaft end of the A rotation drive member 310 is fixedly connected to the first support platform 220, and one side of the second support platform 320 is fixedly connected to the moving end of the vertical electric cylinder 410;

[0064] Specifically, the A rotation driving member 310 drives the first support platform 220 to rotate axially around the output shaft of the A rotation driving member 310 to realize the rotation of the X-axis walking unit 100 and the film taking arm 210.

[0065] See also Figure 1 and Figure 2 In one embodiment of the present invention, a main drag chain 500, a walking drag chain 600 and a drag chain protective cover 700 are further provided, one end of the main drag chain 500 is fixedly connected to the main body mounting seat 420, the other end of the main drag chain 500 is fixedly connected to the protective warehouse body 110, one end of the walking drag chain 600 is fixedly connected to one side of the second support platform 320, the other end of the walking drag chain 600 is fixedly connected to the inner wall of the drag chain protective cover 700, and one side of the drag chain protective cover 700 is fixedly connected to the fixed end of the vertical electric cylinder 410;

[0066] Specifically, the connection lines of the electrical components are protected by the main drag chain 500 and the traveling drag chain 600 to avoid line damage.

[0067] In one embodiment of the present invention, a corresponding control unit can be set for use. The control unit can select any controller to be connected to the electrical parts in the present application, so as to control the opening and closing operation of each electrical part. This part is the prior art. Here, a single-chip microcomputer can be provided as a control unit for display. The single-chip microcomputer in this embodiment is a typical embedded microcontroller (Microcontroller Unit), which is composed of an arithmetic unit, a controller, a memory, an input and output device, etc., which is equivalent to a microcomputer. Compared with the general-purpose microprocessor used in personal computers, it emphasizes self-supply (no external hardware) and cost saving. Its biggest advantage is that it is small in size and can be placed inside the instrument, but it has a small storage capacity, a simple input and output interface, and low functional consumption.

[0068] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A multi-station robot for wafer interactive transmission, characterized in that: include: An X-axis walking unit (100) comprises a protective warehouse body (110) and a first moving driving mechanism (120), wherein the first moving driving mechanism (120) is installed inside the protective warehouse body (110); The Y-axis arm telescopic unit (200) comprises a film taking arm (210), a first support platform (220) and a second moving drive mechanism (230); one side of the film taking arm (210) is connected to the second moving drive mechanism (230) for driving the film taking arm (210) to move along the length direction of the first support platform (220); the second moving drive mechanism (230) is installed on the first support platform (220); A rotation drive unit (300) is installed at the bottom of the first support platform (220), the rotation drive unit (300) comprises an A rotation drive member (310), and the A rotation drive member (310) is used to drive the first support platform (220) to rotate around the axis of the output shaft of the A rotation drive member (310); A Z-axis walking unit (400), one side of which is connected to the rotation driving unit (300), the Z-axis walking unit (400) is used to drive the rotation driving unit (300) to move in a direction perpendicular to the upper surface of the protective warehouse body (110), and one side of the Z-axis walking unit (400) is connected to an X-axis walking unit (100) used to drive the Z-axis walking unit (400) to move in the length direction of the protective warehouse body (110); Definition: The length direction of the protective bin body (110) is the X-axis direction, the length direction of the first support platform (220) is the Y-axis direction, the direction perpendicular to the protective bin body (110) is the Z-axis direction, the X-axis direction is perpendicular to the Z-axis direction, and the Y-axis direction is perpendicular to the Z-axis direction.

2. A multi-station robot for wafer interactive transmission according to claim 1, characterized in that: The second mobile driving mechanism (230) comprises a transmission belt (231), a connecting member (232), a guide member, a rotating driving member (233), a driving wheel (234), two driven wheels (235) and two tensioning wheels (239), wherein the two driven wheels (235) are both rotatably mounted on the first support platform (220), one end of the driving wheel (234) is connected to the rotating driving member (233) for driving the driving wheel (234) to rotate around its own axis, and the transmission belt (231) is connected to the connecting member (232) and the guide member (233) is connected to the connecting member (233) and the guide member (233) is connected to the connecting member (234 ... The belt (231) is sleeved on the outside of the driving wheel (234) and the two driven wheels (235); the two tensioning wheels (239) are used to tighten the A transmission belt (231); one side of the A connecting member (232) is fixedly connected to the A transmission belt (231); the other side of the A connecting member (232) is fixedly connected to the film taking arm (210); one side of the film taking arm (210) is connected to a guide member used to limit the reverse movement of the film taking arm (210) along the length of the first support platform (220).

3. A multi-station robot for wafer interactive transmission according to claim 2, characterized in that: The guide member comprises a guide rail (238), a B connecting member (236) and a slider (237); the guide rail (238) is fixedly mounted on the first support platform (220); the slider (237) is slidably mounted on the guide rail (238); one side of the slider (237) is fixedly connected to the B connecting member (236); and one side of the B connecting member (236) is fixedly connected to the film taking arm (210).

4. The multi-station robot for wafer interactive transmission according to claim 1, characterized in that: The second moving driving mechanism (230) comprises a first slide (241), a second slide (242), a B transmission belt (243), an A telescopic driving member (244), a C connecting member (245), a D connecting member (246), a limiting member and two synchronous wheels (247); the bottom of the film taking arm (210) is fixedly connected to the second slide (242); the first slide (241) is slidably mounted on the first support platform (220); the second slide (242) is slidably mounted on the first slide (241); one side of the first slide (241) is connected to a drive member for driving the first slide (241) to move along the first support platform (220); One side of the second slide (242) of the A telescopic driving member (244) that moves in the length direction is fixedly connected to the C connecting member (245), the two synchronous wheels (247) are both rotatably mounted on the first slide (241), the B transmission belt (243) is sleeved on the outside of the two synchronous wheels (247), one side of the C connecting member (245) is fixedly connected to the B transmission belt (243), one side of the D connecting member (246) is fixedly connected to the B transmission belt (243), and one side of the D connecting member (246) is connected to a limiting member, which can prevent the D connecting member (246) from moving relative to the first support platform (220) or the first slide (241).

5. The multi-station robot for wafer interactive transmission according to claim 4, characterized in that: The limiting member comprises a first limiting plate (248), a second limiting plate (249), a sliding frame (2411), a B telescopic driving member (2412) and two latches (2413); one side of the first limiting plate (248) is fixedly connected to the first slide table (241); a plurality of A plug holes (2414) are provided on the first limiting plate (248); the plurality of A plug holes (2414) can be partially inserted into one of the latches (2413); a plurality of A plug holes (2414) are provided on the second limiting plate (249); A plurality of B sockets (2415) are provided, wherein the plurality of B sockets (2415) can be partially inserted into another latch pin (2413), a sliding frame (2411) is slidably mounted on the first support platform (220), one side of the sliding frame (2411) is fixedly connected to the D connecting member (246), one side of the second limiting plate (249) is fixedly connected to the first support platform (220), and a B telescopic driving member (2412) is used to drive the two latch pins (2413) to move along their respective axial directions.

6. The multi-station robot for wafer interactive transmission according to claim 5, characterized in that: The B telescopic driving member (2412) is a bidirectional telescopic driving member, the two movable ends of which are respectively fixedly connected to the two latches (2413), and the fixed end of which is fixedly connected to the sliding frame (2411).

7. The multi-station robot for wafer interactive transmission according to claim 1, characterized in that: The first mobile drive mechanism (120) is a linear motor, the fixed end of the linear motor is fixedly connected to the protective warehouse body (110), and the movable end of the linear motor is connected to the Z-axis walking unit (400).

8. The multi-station robot for wafer interactive transmission according to claim 7, characterized in that: The Z-axis walking unit (400) comprises a vertical electric cylinder (410) and a main body mounting seat (420), wherein a fixed end of the vertical electric cylinder (410) is fixedly connected to the main body mounting seat (420), one side of the main body mounting seat (420) is fixedly connected to a movable end of a linear motor, and the movable end of the vertical electric cylinder (410) is connected to a rotation drive unit (300).

9. The multi-station robot for wafer interactive transmission according to claim 8, characterized in that: The A rotation drive unit (300) further comprises a second support platform (320), the A rotation drive member (310) is fixedly mounted on the second support platform (320), the output shaft end of the A rotation drive member (310) is fixedly connected to the first support platform (220), and one side of the second support platform (320) is fixedly connected to the movable end of the vertical electric cylinder (410).

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