Loading port distribution method of semiconductor processing machine and semiconductor processing system

Abstract

The invention provides a loading port distribution method of a semiconductor processing machine and a semiconductor processing system.The method is applied to the semiconductor processing machine with N loading ports and M functional modules, M and N are positive integers larger than 1, and the method comprises the following steps that the number of current-station products corresponding to the M functional modules respectively is obtained periodically, calculating an in-process product proportion of the in-process product of the current station among the M function modules; the port proportions of the N loading ports among the M functional modules are determined according to the proportions of the in-process products among the M functional modules, and the higher the proportions of the in-process products are, the higher the proportions of the ports of the functional modules are; and allocating a corresponding loading port to each functional module according to the port proportion of the N loading ports among the M functional modules. According to the distribution method and the semiconductor processing system, the efficiency of the semiconductor processing machine is improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing technology, and in particular to a loading port allocation method for a semiconductor processing machine and a semiconductor processing system. Background Art

[0002] Wet etching is a commonly used semiconductor processing technology. It removes materials from the semiconductor surface through chemical reactions to achieve micro-machining and manufacturing while avoiding damage and thermal stress problems that may occur during mechanical processing. During the etching process, it is necessary to control the concentration, temperature, flow rate and other parameters of the reaction solution to ensure the accuracy and uniformity of the etching.

[0003] Because different processes have different requirements for the concentration, temperature, and flow rate of the reaction solution, most semiconductor manufacturers basically separate different processes according to the machine to achieve maximum efficiency. However, sometimes due to insufficient number of machines, all processes cannot be separated according to the machine, resulting in one machine having to use two processing functions to meet the production of different processes, and then a machine with limited loading ports needs to meet the production of two processes. In this case, the loading ports are usually allocated to the two processing functions in an equal manner. Since the number of work-in-progress to be loaded on the machine corresponding to each processing function is usually different, this allocation method will result in lower efficiency of the machine.

[0004] Therefore, it is necessary to develop a distribution method and system that can improve machine efficiency. Summary of the invention

[0005] The object of the present invention is to provide a loading port allocation method for a semiconductor processing machine and a semiconductor processing system to solve the problem of low efficiency of semiconductor processing machines in the prior art.

[0006] On the one hand, the present invention provides a loading port allocation method for a semiconductor processing machine, which is applied to a semiconductor processing machine with N loading ports and M functional modules, where M and N are positive integers greater than 1, and includes the following steps: periodically obtaining the number of work-in-progress at the current station corresponding to the M functional modules, and calculating the proportion of work-in-progress at the current station among the M functional modules; determining the port proportion of N loading ports among the M functional modules based on the proportion of work-in-progress at the current station among the M functional modules, wherein the higher the proportion of work-in-progress is for a functional module, the higher the port proportion is; and allocating a corresponding loading port to each functional module based on the port proportion of the N loading ports among the M functional modules.

[0007] The loading port allocation method involved in the present invention has the following beneficial effects: the loading port allocation method determines the port ratio of all loading ports among various functional modules according to the ratio of the current work-in-progress ratio among various functional modules, wherein the higher the proportion of the functional module in the work-in-progress ratio, the higher the port ratio, that is, the functional module with a higher proportion of the work-in-progress ratio has a more number of loading ports allocated to it, and the functional module with a higher proportion of the work-in-progress ratio has a higher degree of demand for loading ports. The loading port allocation method is equivalent to allocating loading ports according to the different degrees of demand for loading ports by various functional modules, and the functional module with a higher degree of demand has a more number of loading ports allocated to it. This allocation method is more reasonable and can more effectively improve the efficiency of semiconductor processing machines.

[0008] Preferably, the port ratio of the N loading ports among the M functional modules is determined according to the ratio of the current work-in-progress among the M functional modules, including: when the ratio of the work-in-progress in the previous and next cycles changes, the port ratio of the N loading ports among the M functional modules is dynamically adjusted according to the changed ratio of the work-in-progress. That is, the method of allocating the loading ports is dynamic, and the number of allocated loading ports will be adjusted in time according to the change of demand, so that the efficiency of the semiconductor processing machine is further improved.

[0009] Preferably, any functional module whose WIP ratio is not empty occupies some loading ports; that is, when allocating loading ports, the rule is that any functional module whose WIP ratio is not empty occupies some loading ports, that is, any functional module cannot occupy all loading ports, so as to avoid functional modules with a higher WIP ratio occupying all loading ports, resulting in functional modules with a lower WIP ratio being unable to realize their corresponding processing functions, thereby ensuring that the corresponding functional modules of the semiconductor processing machine can operate normally and the corresponding processing procedures can be smoothly implemented, thereby ensuring that the semiconductor processing machine can achieve better benefits.

[0010] Preferably, for any one of the M functional modules, the proportion of the current work-in-progress in the functional module is consistent with the proportion of the N loading ports in the functional module. That is, the proportion of the current work-in-progress between the M functional modules is consistent with the proportion of the N loading ports in the M functional modules. In this way, the number of loading ports allocated to the functional module is more closely related to its demand for loading ports, and the allocation method is more reasonable and simpler, thereby more effectively improving the efficiency of the semiconductor processing machine.

[0011] Preferably, the M functional modules are different functional modules of the same process. In this way, the M functional modules based on the semiconductor processing machine can respectively implement different steps of the same process, thereby improving the efficiency of the process implementation.

[0012] Preferably, the port ratio of N loading ports among M functional modules is dynamically adjusted according to the changed WIP ratio, including: when the WIP ratio of any one of the M functional modules increases, the loading ports occupied by the functional module are kept unchanged, and an idle loading port is allocated to the functional module, so as to realize dynamic adjustment of the port ratio of N loading ports among M functional modules.

[0013] On the other hand, the present invention provides a semiconductor processing system, including: a semiconductor processing machine with N loading ports and M functional modules, a perception decision execution system, a manufacturing execution system and a real-time dispatch system, wherein: the perception decision execution system is used to periodically obtain the number of work-in-progress at the current station corresponding to the M functional modules from the manufacturing execution system, and calculate the proportion of work-in-progress at the current station among the M functional modules; the real-time dispatch system is used to determine the port proportion of N loading ports among the M functional modules according to the proportion of work-in-progress at the current station among the M functional modules, wherein the higher the proportion of work-in-progress of the functional module, the higher the port proportion; according to the port proportion, after allocating the corresponding loading port to each functional module, the manufacturing execution system is controlled to dispatch the goods.

[0014] The semiconductor processing system involved in the present invention has the following beneficial effects: the semiconductor processing system, based on the design of the perception decision execution system, the manufacturing execution system and the real-time dispatch system, can optimize the allocation of loading ports according to the different demands of each functional module for the loading ports. The functional modules with higher demands can be allocated to more loading ports, thereby improving the overall efficiency.

[0015] Preferably, the real-time dispatch system is also used to dynamically allocate corresponding loading ports to each functional module according to the changed work-in-progress ratio when the proportion of work-in-progress in the current and subsequent cycles changes, and then control the manufacturing execution system to dispatch goods, so as to dynamically allocate loading ports according to changes in demand, thereby further improving efficiency.

[0016] Preferably, for any one of the M functional modules, the perception decision execution system determines that the proportion of the current work-in-progress in the functional module is consistent with the proportion of the N loading ports in the functional module. In this way, the number of loading ports allocated to each functional module is consistent with the degree of demand for the loading port by the functional module, and the allocation method is simple and more reasonable, which can more effectively promote the improvement of efficiency.

[0017] Preferably, the M functional modules are different functional modules of the same process. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A flowchart of a method for allocating load ports of a semiconductor processing machine is provided for the present invention;

[0019] Figure 2 A structural schematic diagram of a semiconductor processing system is provided for the present invention.

[0020] Component number description:

[0021] 1. Semiconductor processing machine; 2. Perception decision execution system; 3. Manufacturing execution system; 4. Real-time delivery system. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0023] The present invention provides a method for allocating load ports of a semiconductor processing machine, which is applied to a semiconductor processing machine having N load ports and M functional modules, where M and N are positive integers greater than 1, such as Figure 1 As shown, the steps include: periodically obtaining the number of work-in-progress (WIP) corresponding to each of the M functional modules, and calculating the proportion of the work-in-progress of the current station among the M functional modules; determining the port proportion of N loading ports among the M functional modules according to the proportion of the work-in-progress of the current station among the M functional modules, wherein the higher the proportion of the work-in-progress of the functional module, the higher the port proportion; and allocating a corresponding loading port to each functional module according to the port proportion of the N loading ports among the M functional modules.

[0024] The present loading port allocation method determines the port ratio of all loading ports among various functional modules according to the ratio of the current work-in-progress ratio among various functional modules, wherein the higher the proportion of the functional module in the work-in-progress ratio, the higher the port ratio, that is, the higher the proportion of the functional module in the work-in-progress ratio, the more loading ports are allocated to it, and the higher the proportion of the functional module in the work-in-progress ratio, the higher the demand for loading ports. The present loading port allocation method is equivalent to allocating loading ports according to the different demand levels of various functional modules for loading ports, and the functional module with higher demand levels has more loading ports allocated to it. This allocation method is more reasonable and can more effectively improve the efficiency of semiconductor processing machines.

[0025] In some embodiments, any functional module whose WIP ratio is not empty occupies part of the loading ports, that is, when allocating loading ports, the principle of any functional module whose WIP ratio is not empty occupies part of the loading ports is followed, that is, any functional module cannot occupy all the loading ports, so as to avoid functional modules with a higher WIP ratio occupying all loading ports, resulting in functional modules with a lower WIP ratio being unable to realize their corresponding processing functions, thereby ensuring that the corresponding functional modules of the semiconductor processing machine can operate normally and the corresponding processing procedures can be smoothly implemented, thereby ensuring that the semiconductor processing machine can achieve better benefits.

[0026] In some embodiments, for any one of the M functional modules, the proportion of the current work-in-progress in the functional module is consistent with the proportion of the N loading ports in the functional module. That is, the proportion of the current work-in-progress between the M functional modules is consistent with the proportion of the N loading ports in the M functional modules. In this way, the number of loading ports allocated to the functional module is more closely related to its demand for loading ports, and the allocation method is more reasonable and simpler, thereby more effectively improving the efficiency of the semiconductor processing machine.

[0027] In some embodiments, the M functional modules are different functional modules of the same process. In this way, the M functional modules based on the semiconductor processing machine can respectively implement different steps of the same process, thereby improving the efficiency of the process.

[0028] In some embodiments, the semiconductor processing machine is a wet etching device, referred to as a WET device, and the semiconductor processing machine has 4 loading ports and 2 functional modules, wherein the two functional modules are respectively the first functional module and the second functional module, the first functional module is used to implement one process in the wet etching process, and the second functional module is used to implement another process in the wet etching process. According to the proportion of the products between the two functional modules at the current station, the port proportion of the 4 loading ports between the two functional modules is determined, specifically including: when the proportion of the products between the first functional module and the second functional module at the current station is 3:1, the port proportion of the 4 loading ports between the first functional module and the second functional module is also 3:1, that is, the first functional module occupies 3 loading ports, and the second functional module occupies 1 loading port; and when the proportion of the products between the first functional module and the second functional module at the current station is 2:2, the port proportion of the 4 loading ports between the first functional module and the second functional module is also 2:2, that is, the first functional module occupies 2 loading ports, and the second functional module occupies 2 loading ports. This allocation method maximizes the efficiency of the machine by logically distinguishing the two functional modules according to the number of products in the current station. In addition, the two functional modules each occupy 6 working chambers. When the product is a wafer to be entered into the wet etching equipment.

[0029] In some embodiments, when the proportion of work-in-progress of any one of the M functional modules increases, the loading port occupied by the functional module is kept unchanged, and an idle loading port is allocated to the functional module, so as to dynamically adjust the port proportion of the N loading ports between the M functional modules. For example, when the proportion of work-in-progress between the first functional module and the second functional module is 2:2, the port proportion of the four loading ports between the first functional module and the second functional module is also 2:2, and the first functional module occupies the first loading port and the second loading port, and the second functional module occupies the third loading port and the fourth loading port. When the proportion of work-in-progress between the first functional module and the second functional module changes to 3:1, the first functional module still occupies the first loading port and the second loading port, and the third loading port or the fourth loading port is allocated to the first functional module, so as to achieve a port proportion of 3:1 of the four loading ports between the first functional module and the second functional module.

[0030] In some other embodiments, the semiconductor processing tool includes 6 load ports or 8 load ports, and the semiconductor processing tool may have 2 or more functional modules.

[0031] In some embodiments, the port ratio of N loading ports among M functional modules is determined based on the ratio of WIP among M functional modules, including: when the ratio of WIP in the previous and next cycles changes, the port ratio of N loading ports among M functional modules is dynamically adjusted according to the changed WIP ratio. That is, the method of allocating loading ports is dynamic, and the number of allocated loading ports will be adjusted in time according to the change in demand, so that the efficiency of semiconductor processing machines is further improved. More specifically, the number of WIP corresponding to each of the M functional modules is obtained every two hours, and the ratio of WIP among the M functional modules is calculated.

[0032] In some embodiments, by adjusting the working attributes of the loading ports that will be in an idle state after a set time, the port ratio of N loading ports among M functional modules is adjusted to meet the set requirements. Specifically, in some time periods, when the workload is small, the first functional module occupies one loading port, and the working attribute of the loading port is busy; the second functional module occupies one loading port, and the working attribute of the loading port is busy; at the same time, the semiconductor processing machine has two loading ports that are in an idle state, and the working attributes of the two loading ports are idle. When entering a busy time period, by changing the working attributes of the two loading ports from idle to busy, the first functional module occupies two loading ports and the second functional module occupies two loading ports.

[0033] like Figure 2As shown, in some embodiments, a semiconductor processing system is provided, including: a semiconductor processing machine 1 having N loading ports and M functional modules, a sense decision execution system 2 (Sense Decide Respond, SDR), a manufacturing execution system 3 (Manufacturing Execution System, MES) and a real-time dispatch system 4 (Real-time Dispatch System, RTD). Among them: the sense decision execution system 2 is used to periodically obtain the number of work-in-progress corresponding to each of the M functional modules from the manufacturing execution system, and calculate the proportion of work-in-progress of the ...

[0034] This semiconductor processing system, based on the design of the perception decision execution system, the manufacturing execution system and the real-time dispatch system, can optimize the allocation of loading ports according to the different demands of each functional module for the loading ports. The functional modules with higher demands can be allocated to more loading ports, thereby improving the overall efficiency.

[0035] In some embodiments, for any one of the M functional modules, the perception decision execution system determines that the current work-in-progress ratio of the work-in-progress of the functional module is consistent with the ratio of the N loading ports to the ports of the functional module. In this way, the number of loading ports allocated to each functional module is consistent with the degree of demand for loading ports by the functional module, and the allocation method is simple and more reasonable, which can more effectively promote efficiency improvement.

[0036] In some embodiments, the real-time dispatch system 4 is also used to dynamically allocate corresponding loading ports to each functional module according to the changed work-in-progress ratio when the proportion of work-in-progress in the current and subsequent cycles changes, and then control the manufacturing execution system 3 to dispatch goods, so as to dynamically allocate loading ports according to changes in demand, thereby further improving efficiency.

[0037] In some embodiments, the perception decision execution system includes a monitoring module. The monitoring module can obtain the number of work-in-progress corresponding to each functional module from the manufacturing execution system every two hours, and calculate the proportion of work-in-progress between each functional module, so as to realize dynamic monitoring of the degree of demand for the loading port of each functional module.

[0038] In some embodiments, the real-time dispatch system includes a loading port setting module, and the manufacturing execution system includes a loading port combination adjustment module. The loading port setting module will first determine whether it is necessary to reset the port ratio of N loading ports among M functional modules based on the ratio of the current work-in-progress among M functional modules. When necessary, the loading port setting module will re-determine the port ratio of N loading ports among M functional modules, but will not specify the loading ports because there are peak moments and critical large orders; then, the loading port combination adjustment module will change the working properties of the idle loading ports according to the port ratio determined by the loading port setting module, so that the number of loading ports occupied by each functional module meets the set requirements; and when it is not necessary, it returns to execute the step of calculating the ratio of the current work-in-progress among M functional modules.

[0039] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A method for allocating load ports of a semiconductor processing machine, applied to a semiconductor processing machine having N load ports and M functional modules, where M and N are positive integers greater than 1, characterized in that: The steps include: Periodically obtain the number of WIPs corresponding to each of the M functional modules, and calculate the ratio of the WIPs of the current station among the M functional modules; According to the proportion of the current work-in-progress among the M functional modules, determine the port proportion of the N loading ports among the M functional modules, wherein the higher the proportion of the work-in-progress of the functional module is, the higher the port proportion is; According to the port proportion of the N loading ports among the M functional modules, a corresponding loading port is allocated to each functional module.

2. The method according to claim 1, characterized in that: According to the proportion of the current workpieces among the M functional modules, the proportion of the N loading ports among the M functional modules is determined, including: When the proportion of work-in-progress in the previous and next cycles changes, the proportion of N loading ports among M functional modules is dynamically adjusted according to the changed proportion of work-in-progress.

3. The method according to claim 1 or 2, characterized in that: Any functional module with a non-empty WIP ratio occupies some loading ports.

4. The method according to claim 1 or 2, characterized in that: For any one of the M functional modules, the proportion of the current work-in-progress in the functional module is consistent with the proportion of the N loading ports in the functional module.

5. The method according to claim 1 or 2, characterized in that: The M functional modules are different functional modules of the same process.

6. The method according to claim 2, characterized in that: According to the changed proportion of work-in-progress, dynamically adjust the proportion of N loading ports among M functional modules, including: When the proportion of work-in-process of any one of the M functional modules increases, the loading port occupied by the functional module is kept unchanged, and an idle loading port is allocated to the functional module to dynamically adjust the port proportion of the N loading ports among the M functional modules.

7. A semiconductor processing system, characterized in that: include: A semiconductor processing machine having N loading ports and M functional modules, a perception decision execution system, a manufacturing execution system, and a real-time dispatch system, wherein: A perception decision execution system is used to periodically obtain the number of work-in-progress corresponding to each of the M functional modules from the manufacturing execution system, and calculate the proportion of the work-in-progress of the current station among the M functional modules; The real-time delivery system is used to determine the port ratio of N loading ports among M functional modules according to the current ratio of WIP among M functional modules, wherein the higher the ratio of WIP in a functional module, the higher the port ratio; according to the port ratio, the corresponding loading port is allocated to each functional module and then the manufacturing execution system is controlled to deliver the goods.

8. The semiconductor processing system according to claim 7, characterized in that: The real-time delivery system is also used for: When the proportion of work-in-progress in the current and subsequent cycles changes, the corresponding loading port is dynamically allocated to each functional module based on the changed proportion of work-in-progress, and then the manufacturing execution system is controlled to dispatch goods.

9. The semiconductor processing system according to claim 7 or 8, characterized in that: For any one of the M functional modules, the proportion of the current work-in-progress in the functional module is consistent with the proportion of the N loading ports in the functional module.

10. The semiconductor processing system according to claim 7 or 8, characterized in that: The M functional modules are different functional modules of the same process.

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