Temperature control system

Abstract

The invention provides a temperature control system which comprises a machine table heat exchange assembly, a low-temperature assembly and a high-temperature assembly, the low-temperature assembly comprises a low-temperature loop, a first water tank, a first water inlet pipe and a first water return pipe are sequentially arranged on the low-temperature loop, and the high-temperature assembly comprises a high-temperature loop. The machine table heat exchange assembly comprises a heat exchange flow path, the heat exchange flow path is sequentially provided with a mixing pipe, a main water inlet pipe, a main heat exchange pipe and a main water return pipe, the main heat exchange pipe is suitable for being arranged on the machine table, and the first water inlet pipe and the second water inlet pipe can both communicate with the mixing pipe. And the first water return pipe and the second water return pipe can communicate with the main water return pipe, so that the water flow in the heat exchange flow path flows back to the low-temperature loop and the high-temperature loop. The temperature control system has the advantages of being high in temperature switching speed, high in temperature stability, high in production efficiency and the like.

Description

Technical Field

[0001] The present invention relates to the technical field of temperature control systems, and in particular to a temperature control system. Background Art

[0002] In the manufacturing process of integrated circuits, temperature control is one of the key factors to ensure process accuracy and product quality. In order to meet the strict temperature requirements of different process steps, semiconductor-specific temperature control equipment provides constant temperature fluid for various machines. These temperature control equipment not only need to maintain precise temperature, but also need to be able to quickly switch between high and low temperatures to adapt to complex process flows. Traditional semiconductor temperature control equipment usually adopts a dual-channel design, in which one channel provides low-temperature fluid and the other channel provides high-temperature fluid. By switching these two channels, rapid temperature changes can be achieved. When the machine needs to switch from low temperature to high temperature, the high-temperature channel will suddenly come into contact with a large amount of cold fluid, causing it to bear a huge cold load. Similarly, when switching from high temperature to low temperature, the low-temperature channel will suddenly come into contact with a large amount of hot fluid, causing it to bear a huge heat load. Due to the impact of cold and hot loads, the temperature in the channel will fluctuate in a large range and for a long time. This not only affects the stability of the temperature, but also prolongs the waiting time in the process and reduces production efficiency. Summary of the invention

[0003] The present invention provides a temperature control system for solving the defects of large ripples and poor temperature stability during temperature switching in temperature control equipment in the prior art, so as to achieve stable switching temperature and improve switching efficiency.

[0004] The present invention provides a temperature control system, comprising: A low-temperature component, the low-temperature component comprises a low-temperature circuit, and the low-temperature circuit is provided with a first water tank, a first water inlet pipe and a first water return pipe in sequence; A high temperature component, the high temperature component comprises a high temperature circuit, and the high temperature circuit is provided with a second water tank, a second water inlet pipe and a second water return pipe in sequence; A machine heat exchange component, the machine heat exchange component comprises a heat exchange flow path, the heat exchange flow path is provided with a mixing tube, a main water inlet pipe, a main heat exchange pipe and a main water return pipe in sequence, and the main heat exchange pipe is suitable for being arranged on the machine; The first water inlet pipe and the second water inlet pipe can both be connected to the mixing pipe, so that the water flows in the low-temperature circuit and the high-temperature circuit are mixed and then enter the heat exchange flow path; The first water return pipe and the second water return pipe can both be connected to the main water return pipe so that the water flow in the heat exchange flow path flows back to the low-temperature circuit and the high-temperature circuit.

[0005] In some embodiments, the first water inlet pipe is provided with a first water pump, a first temperature sensor, a first pressure sensor, a first flow sensor, and a first control valve in sequence, and the first water tank is provided with a first heating element; The first water return pipe is provided with a second control valve and a third temperature sensor; The second water inlet pipe is provided with a second water pump, a second temperature sensor, a second pressure sensor, a second flow sensor, and a third control valve in sequence, and the second water tank is provided with a second heating element; The second water return pipe is provided with a fourth control valve and a fourth temperature sensor.

[0006] In some embodiments, the mixing tube is provided with a main temperature sensor, a main pressure sensor, and a main flow sensor. The main temperature sensor is used to measure the water flow temperature in the mixing tube, the main pressure sensor is used to measure the water flow pressure in the mixing tube, and the main flow sensor is used to measure the flow rate of the water flow in the mixing tube.

[0007] In some embodiments, the temperature control system includes a first heat exchange component, which includes a first heat exchanger and a first heat exchanger, the first heat exchanger has a first channel and a second channel that are independent of each other and can perform heat exchange, the first heat exchanger is connected to the first channel, and the first return pipe is connected to the second channel.

[0008] In some embodiments, the temperature control system includes a second heat exchange component, which includes a second heat exchanger and a second heat exchanger. The second heat exchanger has a third channel and a fourth channel that are independent of each other and can perform heat exchange. The second heat exchanger is connected to the third channel, and the second return pipe is connected to the fourth channel.

[0009] In some embodiments, the cryogenic assembly includes a first intermediate pipe, a first three-way valve, and a second three-way valve, the first water inlet pipe is connected to the first intermediate pipe through the first three-way valve, and the first water return pipe is connected to the first intermediate pipe through the second three-way valve; The high-temperature component includes a second intermediate pipe, a third three-way valve and a fourth three-way valve. The second water inlet pipe is connected to the second intermediate pipe through the third three-way valve, and the second water return pipe is connected to the second intermediate pipe through the fourth three-way valve.

[0010] In some embodiments, the temperature control system includes a first water supply pipe and a second water supply pipe, the first water supply pipe can connect the first water inlet pipe and the mixing pipe, the second water supply pipe can connect the second water inlet pipe and the mixing pipe, the machine heat exchange component includes a main three-way pipe, the first water supply pipe, the second water supply pipe and the mixing pipe are connected through the main three-way pipe.

[0011] In some embodiments, the first water inlet pipe and the first water supply pipe are connected through the first three-way valve, and the second water inlet pipe and the second water supply pipe are connected through the third three-way valve.

[0012] In some embodiments, the temperature control system includes a first return pipe and a second return pipe, the first return pipe is used to connect the first return pipe and the main return pipe, the second return pipe is used to connect the second return pipe and the main return pipe, the machine heat exchange component includes a main two-way pipe, and the first return pipe, the second return pipe and the main return pipe are connected through the main two-way pipe.

[0013] In some embodiments, the first water return pipe and the first return pipe are connected through the second three-way valve, and the second water return pipe and the second return pipe are connected through the fourth three-way valve.

[0014] The temperature control system of the embodiment of the present invention first mixes the low-temperature water source in the low-temperature component and the high-temperature water source in the high-temperature component in a mixing tube to form a medium-temperature water flow required to maintain the temperature of the machine. Since the low-temperature water source and the high-temperature water source are mixed in the mixing tube in advance, they are maintained at a stable temperature when flowing to the main heat exchange tube of the machine, thereby not causing large fluctuations in the temperature of the machine.

[0015] Moreover, when the machine needs to switch the temperature, the medium-temperature water flow is diverted and enters the low-temperature component or the high-temperature component. At this time, the impact of the medium-temperature water flow on the low-temperature component is smaller than that of the high-temperature water flow, thereby reducing the heat load on the low-temperature component. Similarly, the impact of the medium-temperature water flow on the high-temperature component is smaller than that of the low-temperature water flow, thereby reducing the cold load on the high-temperature component. As a result, the temperature in the low-temperature component or the high-temperature component will not fluctuate over a large range, thereby facilitating the temperature in the low-temperature component or the high-temperature component to return to the initial temperature, thereby reducing the fluctuation time and the waiting time in the production process, which not only facilitates the next temperature switching but also improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the temperature control system provided by the present invention.

[0018] Figure 2It is a flow control diagram of the first water inlet pipe and the second water inlet pipe of the temperature control system provided by the present invention.

[0019] Figure 3 It is a pressure control diagram of the first water inlet pipe and the second water inlet pipe of the temperature control system provided by the present invention.

[0020] Figure 4 It is a temperature control diagram of the temperature control system provided by the present invention.

[0021] Reference numerals: 1. Low temperature component; 11. First water tank; 111. First heating element; 12. First water inlet pipe; 121. First water pump; 122. First temperature sensor; 123. First pressure sensor; 124. First flow sensor; 125. First control valve; 13. First water return pipe; 131. Second control valve; 132. Third temperature sensor; 133. Fifth temperature sensor; 14. First intermediate pipe; 15. First three-way valve; 16. Second three-way valve; 2. High temperature component; 21. Second water tank; 211. Second heating element; 22. Second water inlet pipe; 221. Second water pump; 222. Second temperature sensor; 223. Second pressure sensor; 224. Second flow sensor; 225. Third control valve; 23. Second water return pipe; 231. Fourth control valve; 232. Fourth temperature sensor; 233. Sixth temperature sensor; 24. Second intermediate pipe; 25. Third three-way valve; 26. Fourth three-way valve; 3. Heat exchange assembly of the machine; 31. Mixing tube; 312. Main temperature sensor; 313. Main pressure sensor; 314. Main flow sensor; 32. Main water inlet pipe; 33. Main heat exchange pipe; 34. Main return pipe; 341. Main return water temperature sensor; 35. Main first three-way pipe; 36. Main second three-way pipe; 4. First heat exchange assembly; 41. First heat exchanger; 42. First heat exchanger; 5. Second heat exchange assembly; 51. Second heat exchanger; 52. Second heat exchanger; 6. First water supply pipe; 7. Second water supply pipe; 8. First return pipe; 9. Second return pipe; 10. Controller. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] The embodiment of the present invention discloses a heat exchange assembly including a machine heat exchange assembly 3 , a low temperature assembly 1 and a high temperature assembly 2 .

[0024] The machine heat exchange assembly 3 comprises a heat exchange flow path, on which a mixing tube 31, a main water inlet pipe 32, a main heat exchange pipe 33 and a main water return pipe 34 are sequentially arranged, and the main heat exchange pipe 33 is suitable for being arranged on the machine.

[0025] The low-temperature assembly 1 comprises a low-temperature circuit, on which a first water tank 11, a first water inlet pipe 12 and a first water return pipe 13 are sequentially arranged.

[0026] The high temperature component 2 comprises a high temperature circuit, on which a second water tank 21, a second water inlet pipe 22 and a second water return pipe 23 are sequentially arranged.

[0027] The first water inlet pipe 12 and the second water inlet pipe 22 can both be connected to the mixing pipe 31 so that the water flows in the low-temperature circuit and the high-temperature circuit are mixed and then enter the heat exchange flow path.

[0028] The first water return pipe 13 and the second water return pipe 23 can both be connected to the main water return pipe 34 so that the water flow in the heat exchange flow path flows back to the low-temperature circuit and the high-temperature circuit.

[0029] During operation, the heat exchange flow path of the machine heat exchange component 3 can always maintain the temperature of the machine at the target temperature. The machine is a machine that needs to be kept in a constant temperature environment, for example, a machine for manufacturing integrated circuits.

[0030] like Figure 1 As shown, a low-temperature water source is stored in the first water tank 11 of the low-temperature component 1, and the first water tank 11, the first water inlet pipe 12 and the first water return pipe 13 are connected in sequence to form a low-temperature circuit. In other words, the outlet of the first water tank 11 is connected to the first water inlet pipe 12, the first water inlet pipe 12 is directly or indirectly connected to the first water return pipe 13, and the first water return pipe 13 is connected to the inlet of the first water tank 11.

[0031] A high-temperature water source is stored in the second water tank 21 of the high-temperature component 2. The second water tank 21, the second water inlet pipe 22 and the second water return pipe 23 are sequentially connected to form a high-temperature circuit. In other words, the outlet of the second water tank 21 is connected to the second water inlet pipe 22, the second water inlet pipe 22 is directly or indirectly connected to the second water return pipe 23, and the second water return pipe 23 is connected to the inlet of the second water tank 21.

[0032] The low-temperature water source in the first water tank 11 enters the mixing tube 31 through the first water inlet pipe 12, and the high-temperature water source in the second water tank 21 enters the mixing tube 31 through the second water inlet pipe 22. The two are mixed in the mixing tube 31 to generate a medium-temperature target temperature water flow, and then the target temperature water flow enters the main heat exchange pipe 33 on the machine, so that the temperature of the machine is maintained at the target temperature. After passing through the machine, the water in the main heat exchange pipe 33 flows away from the main return pipe 34, and then enters the first return pipe 13 and the second return pipe 23 after diversion, and then returns to the first water tank 11 and the second water tank 21.

[0033] It should be noted that the low temperature, medium temperature and high temperature in this application are relative, and their actual range can be designed according to design requirements. For example, the temperature of the water source that the low-temperature component 1 can provide is 5 degrees to 30 degrees, the temperature of the water source that the high-temperature component 2 can provide is 70 degrees to 100 degrees, and the target temperature of the medium temperature is 35 degrees to 65 degrees.

[0034] It should be noted that the temperature required by the machine is not always medium temperature, but in most cases, the machine needs to be maintained at medium temperature. If the machine needs to maintain a low temperature, only the low temperature component 1 can be used to achieve it. Similarly, if the machine needs to maintain a high temperature, only the high temperature component 2 can be used to achieve it.

[0035] In traditional semiconductor temperature control equipment, the machine can only be connected to one of the low-temperature channel and the high-temperature channel at the same time. When the machine needs to switch from low temperature to high temperature, the low-temperature channel needs to be disconnected from the machine, and then the high-temperature channel needs to be connected to the machine. At this time, the low-temperature water in the machine will flow into the high-temperature channel through the return pipe. The high-temperature channel will suddenly come into contact with a large amount of cold fluid, causing it to bear a huge cold load. Similarly, when switching from high temperature to low temperature, the low-temperature channel will suddenly come into contact with a large amount of hot fluid, causing it to bear a huge heat load. Due to the impact of cold and hot loads, the temperature in the channel will fluctuate over a large range and for a long time. This not only affects the stability of the temperature, but also prolongs the waiting time in the process and reduces production efficiency.

[0036] The temperature control system of the embodiment of the present invention first mixes the low-temperature water source in the low-temperature component 1 and the high-temperature water source in the high-temperature component 2 in the mixing tube 31 to form a medium-temperature water flow required to maintain the temperature of the machine. Since the low-temperature water source and the high-temperature water source are mixed in the mixing tube 31 in advance, when flowing to the main heat exchange tube 33 of the machine, they are already maintained at a stable temperature, thereby not causing large fluctuations in the temperature of the machine.

[0037] Moreover, when the machine needs to switch the temperature, the medium-temperature water flow is diverted and enters the low-temperature component 1 or the high-temperature component 2. At this time, the impact of the medium-temperature water flow on the low-temperature component 1 is smaller than the impact of the high-temperature water flow on the low-temperature component 1, thereby reducing the heat load on the low-temperature component 1. Similarly, the impact of the medium-temperature water flow on the high-temperature component 2 is smaller than the impact of the low-temperature water flow on the high-temperature component 2, thereby reducing the cold load on the high-temperature component 2, so that the temperature in the low-temperature component 1 or the high-temperature component 2 will not fluctuate within a large range, thereby facilitating the temperature in the low-temperature component 1 or the high-temperature component 2 to return to the initial temperature, thereby reducing the fluctuation time and the waiting time in the production process, which not only facilitates the next temperature switching but also improves production efficiency.

[0038] Therefore, the temperature control system of the embodiment of the present invention has the advantages of fast temperature switching speed, high temperature stability and high production efficiency.

[0039] In some embodiments, a first water pump 121 , a first temperature sensor 122 , a first pressure sensor 123 , a first flow sensor 124 , and a first control valve 125 are sequentially disposed on the first water inlet pipe 12 , and a first heating element 111 is disposed in the first water tank 11 .

[0040] The first water return pipe 13 is provided with a second control valve 131 and a third temperature sensor 132 .

[0041] The second water inlet pipe 22 is provided with a second water pump 221 , a second temperature sensor 222 , a second pressure sensor 223 , a second flow sensor 224 , and a third control valve 225 in sequence, and the second water tank 21 is provided with a second heating element 211 .

[0042] The second water return pipe 23 is provided with a fourth control valve 231 and a fourth temperature sensor 232 .

[0043] The temperature control system includes a controller 10. The devices in the low temperature component 1 and the high temperature component 2 are connected to the controller 10. The first water pump 121, the first temperature sensor 122, the first pressure sensor 123, the first flow sensor 124, and the first control valve 125 are arranged in sequence downstream of the first water tank 11. The first water pump 121 is used to control the flow in the first water inlet pipe 12, the first control valve 125 is used to control the pressure of the water flow in the first water inlet pipe 12, the first temperature sensor 122 is used to detect the water flow temperature in the first water inlet pipe 12, and the first flow sensor 124 is used to detect the flow of the water flow in the first water inlet pipe 12. The first heating element 111 is used to heat the water flow in the first water tank 11 to reach the required temperature. The controller 10 timely controls the pumping flow of the first water pump 121 and the opening size of the first control valve 125 through the values ​​detected by the first pressure sensor 123 and the first flow sensor 124, thereby controlling the flow and pressure of the water flow in the first water inlet pipe 12.

[0044] The first water return pipe 13 is provided with a second control valve 131 and a third temperature sensor 132 . The second control valve 131 is used to control the water flow pressure in the first water return pipe 13 , and the third temperature sensor 132 is used to detect the water flow temperature in the first water return pipe 13 .

[0045] Downstream of the second water tank 21, a second water pump 221, a second temperature sensor 222, a second pressure sensor 223, a second flow sensor 224, and a third control valve 225 are sequentially provided. The second water pump 221 is used to control the flow in the second water inlet pipe 22, the third control valve 225 is used to control the pressure of the water flow in the second water inlet pipe 22, the second temperature sensor 222 is used to detect the water flow temperature in the second water inlet pipe 22, and the second flow sensor 224 is used to detect the flow of the water flow in the second water inlet pipe 22. The second heating element 211 is used to heat the water flow in the second water tank 21 to reach the required temperature. The controller 10 timely controls the pumping flow of the second water pump 221 and the opening size of the third control valve 225 through the values ​​detected by the second pressure sensor 223 and the second flow sensor 224, thereby controlling the flow and pressure of the water flow in the second water inlet pipe 22.

[0046] The second water return pipe 23 is provided with a fourth control valve 231 and a fourth temperature sensor 232 . The fourth control valve 231 is used to control the water flow pressure in the second water return pipe 23 , and the fourth temperature sensor 232 is used to detect the water flow temperature in the second water return pipe 23 .

[0047] Optionally, when the temperature of the machine needs to be adjusted, the temperature control system controls the flow and pressure in the first water inlet pipe 12 and the second water inlet pipe 22 to be the same, so that the water flow in the first water inlet pipe 12 and the second water inlet pipe 22 can smoothly enter the mixing tube 31 for mixing.

[0048] In some embodiments, a main temperature sensor 312, a main pressure sensor 313, and a main flow sensor 314 are provided on the mixing tube 31. The main temperature sensor 312 is used to measure the water flow temperature in the mixing tube 31, the main pressure sensor 313 is used to measure the water flow pressure in the mixing tube 31, and the main flow sensor 314 is used to measure the flow rate of the water flow in the mixing tube 31.

[0049] like Figure 1 As shown, the main flow sensor 314 measures the water flow through the mixing tube 31 so that the controller 10 adjusts the working status of the first water pump 121 and the second water pump 221 to ensure that there is enough water flowing through the main heat exchange tube 33 for effective heat exchange, and adjusts the flow according to actual needs to avoid waste of resources or insufficient heat transfer.

[0050] The main pressure sensor 313 monitors the pressure of the water flow in the mixing tube 31 to maintain an appropriate pressure to prevent the normal operation of the system from being affected by excessively high or low pressure.

[0051] The temperature control system of the embodiment of the present invention can dynamically respond to changes in the temperature requirements of the machine through the coordinated work of the three sensors on the mixing tube 31, provide precise temperature control, and reduce the thermal shock to the low-temperature component 1 and the high-temperature component 2 during temperature switching, thereby improving the stability of the temperature control system.

[0052] In some embodiments, the temperature control system includes a first heat exchange component 4, the first heat exchange component 4 includes a first heat exchanger 41 and a first heat exchanger 42, the first heat exchanger 42 has a first channel and a second channel that are independent of each other and can perform heat exchange, the first heat exchanger 41 is connected to the first channel, and the first return pipe 13 is connected to the second channel.

[0053] When the water flow temperature in the first return water pipe 13 is greater than the water source temperature in the first water pump 121, the first heat exchanger 41 can exchange heat with the water flow in the first return water pipe 13 through the first heat exchanger 42. The first heat exchanger 41 can absorb the heat in the first return water pipe 13 so as to reduce the water flow temperature in the first return water pipe 13 and restore it from a medium temperature state to a low temperature state.

[0054] In this way, the first heat exchange component 4 can effectively utilize the residual heat energy in the first return pipe 13, and also reduce the impact of the medium-temperature water flow in the first return pipe 13 on the low-temperature water source in the first water tank 11, thereby optimizing the temperature control process and improving the stability of the temperature control system.

[0055] In some embodiments, the temperature control system includes a second heat exchange component 5, the second heat exchange component 5 includes a second heat exchanger 51 and a second heat exchanger 52, the second heat exchanger 52 has a third channel and a fourth channel that are independent of each other and can perform heat exchange, the second heat exchanger 51 is connected to the third channel, and the second return pipe 23 is connected to the fourth channel.

[0056] When the water flow temperature in the second return water pipe 23 is lower than the water source temperature in the second water pump 221, the second heat exchanger 51 can exchange heat with the water flow in the second return water pipe 23 through the second heat exchanger 52. The second heat exchanger 51 can heat the heat in the second return water pipe 23 so as to increase the water flow temperature in the second return water pipe 23 and restore it from a medium temperature state to a high temperature state.

[0057] In this way, the second heat exchange component 5 can effectively transfer the heat therein to the second return water pipe 23, thereby reducing the impact of the medium-temperature water flow in the second return water pipe 23 on the high-temperature water source in the second water tank 21, thereby optimizing the temperature control process and improving the stability of the temperature control system.

[0058] In some embodiments, the cryogenic component 1 includes a first intermediate pipe 14, a first three-way valve 15 and a second three-way valve 16, the first water inlet pipe 12 is connected to the first intermediate pipe 14 through the first three-way valve 15, and the first water return pipe 13 is connected to the first intermediate pipe 14 through the second three-way valve 16.

[0059] The high-temperature component 2 includes a second intermediate pipe 24 , a third three-way valve 25 and a fourth three-way valve 26 . The second water inlet pipe 22 is connected to the second intermediate pipe 24 via the third three-way valve 25 , and the second water return pipe 23 is connected to the second intermediate pipe 24 via the fourth three-way valve 26 .

[0060] like Figure 1 As shown, the first water inlet pipe 12 and the first water return pipe 13 can also be connected through the first three-way valve 15, the first intermediate pipe 14 and the second three-way valve 16. The first water inlet pipe 12, the first intermediate pipe 14 and the mixing pipe 31 are connected via the first three-way valve 15. Thus, the ratio of the water in the first water inlet pipe 12 flowing to the first intermediate pipe 14 and the mixing pipe 31 can be adjusted by controlling the opening of the first three-way valve 15, thereby ensuring that the flow rate of the water flowing from the first water inlet pipe 12 into the mixing pipe 31 is within a set range.

[0061] The main water return pipe 34 , the first intermediate pipe 14 and the first water return pipe 13 are connected via the second three-way valve 16 , so that a portion of the water flow in the main water return pipe 34 and the water flow in the first intermediate pipe 14 can flow into the first water return pipe 13 .

[0062] The second water inlet pipe 22 and the second water return pipe 23 can also be connected through the third three-way valve 25, the second intermediate pipe 24 and the fourth three-way valve 26. The second water inlet pipe 22, the second intermediate pipe 24 and the mixing pipe 31 are connected through the third three-way valve 25. Therefore, by controlling the opening of the third three-way valve 25, the ratio of the water flow in the second water inlet pipe 22 flowing to the second intermediate pipe 24 and the mixing pipe 31 can be adjusted, thereby ensuring that the flow rate of the water flow from the second water inlet pipe 22 into the mixing pipe 31 is within a set range.

[0063] The main water return pipe 34 , the second intermediate pipe 24 and the second water return pipe 23 are connected via the fourth three-way valve 26 , so that another part of the water flow in the main water return pipe 34 and the water flow in the second intermediate pipe 24 can flow into the second water return pipe 23 .

[0064] In some embodiments, the temperature control system includes a first water supply pipe 6 and a second water supply pipe 7. The first water supply pipe 6 can connect the first water inlet pipe 12 and the mixing pipe 31. The second water supply pipe 7 can connect the second water inlet pipe 22 and the mixing pipe 31. The machine heat exchange component 3 includes a main three-way pipe 35. The first water supply pipe 6, the second water supply pipe 7 and the mixing pipe 31 are connected through the main three-way pipe 35.

[0065] The main three-way pipe 35 connects the first water supply pipe 6, the second water supply pipe 7 and the mixing pipe 31 together. In other words, the main three-way pipe 35 connects the first water inlet pipe 12, the second water inlet pipe 22 and the mixing pipe 31 together, so that the low-temperature water source and the high-temperature water source can enter the mixing pipe 31 through the main three-way pipe 35.

[0066] In some embodiments, the first water inlet pipe 12 and the first water supply pipe 6 are connected through a first three-way valve 15 , and the second water inlet pipe 22 and the second water supply pipe 7 are connected through a third three-way valve 25 .

[0067] like Figure 1 As shown, the first water inlet pipe 12, the first water supply pipe 6 and the first intermediate pipe 14 are connected through the first three-way valve 15, and the second water inlet pipe 22, the second water supply pipe 7 and the second intermediate pipe 24 are connected through the third three-way valve 25. The temperature control system of the embodiment of the present invention can more effectively cope with the demand for temperature switching and provide a fast and stable temperature response by controlling the first three-way valve 15 and the third three-way valve 25, thereby improving the efficiency and reliability of the temperature control system.

[0068] In some embodiments, the temperature control system includes a first return pipe 8 and a second return pipe 9, the first return pipe 8 is used to connect the first return pipe 13 and the main return pipe 34, the second return pipe 9 is used to connect the second return pipe 23 and the main return pipe 34, the machine heat exchange component 3 includes a main two-way pipe 36, and the first return pipe 8, the second return pipe 9 and the main return pipe 34 are connected through the main two-way pipe 36.

[0069] The main two-way pipe 36 connects the first return pipe 8 , the second return pipe 9 and the main return pipe 34 . The water in the main return pipe 34 can be diverted to the low-temperature component 1 or the high-temperature component 2 through the main two-way pipe 36 .

[0070] In some embodiments, the first water return pipe 13 and the first return pipe 8 are connected through the second three-way valve 16 , and the second water return pipe 23 and the second return pipe 9 are connected through the fourth three-way valve 26 .

[0071] like Figure 1 As shown, the first water return pipe 13, the first return pipe 8 and the first intermediate pipe 14 are connected through the second three-way valve 16. The second water return pipe 23, the second return pipe 9 and the second intermediate pipe 24 are connected through the fourth three-way valve 26. The temperature control system of the embodiment of the present invention can more effectively respond to the demand for temperature switching and provide a fast and stable temperature response by controlling the second three-way valve 16 and the fourth three-way valve 26, thereby improving the efficiency and reliability of the temperature control system.

[0072] Optionally, a fifth temperature sensor 133 is provided on the first water return pipe 13 between the second channel outlet of the first heat exchanger 42 and the first water tank 11 , so that the controller 10 obtains the temperature of the water flow entering the first water tank 11 according to the fifth temperature sensor 133 .

[0073] A sixth temperature sensor 233 is provided on the second water return pipe 23 between the fourth channel outlet of the second heat exchanger 52 and the second water tank 21 , so that the controller 10 obtains the temperature of the water flow entering the second water tank 21 according to the sixth temperature sensor 233 .

[0074] A main return water temperature sensor 341 is provided on the main return water pipe 34 , so that the controller 10 can obtain the temperature of the water flow in the main return water pipe 34 according to the main return water temperature sensor 341 .

[0075] Optionally, the controller 10 includes a first control unit and a second control unit, the first control unit being used to control the operation of devices in the cryogenic assembly 1, for example, the first water pump 121, the first control valve 125, the second control valve 131, the first three-way valve 15 and the second three-way valve 16.

[0076] The second control unit is used to control the operation of components in the high temperature assembly 2 , for example, the second water pump 221 , the third control valve 225 , the fourth control valve 231 , the third three-way valve 25 and the fourth three-way valve 26 .

[0077] The following describes a specific working process of the temperature control system of an embodiment of the present invention: S1. Detect the values ​​of the first flow sensor 124 and the second flow sensor 224. If they are the same, proceed to the next step. If they are different, control the rotation speeds of the first water pump 121 and the second water pump 221 to control the outlet flow rates of the first water inlet pipe 12 and the second water inlet pipe 22 until the values ​​of the first flow sensor 124 and the second flow sensor 224 are the same.

[0078] S2, detecting the values ​​of the first pressure sensor 123 and the second pressure sensor 223, if they are the same, proceed to the next step. If they are different, controlling the opening of the first control valve 125 and the third control valve 225, so as to control the outlet pressures of the first water inlet pipe 12 and the second water inlet pipe 22, until the values ​​of the first pressure sensor 123 and the second pressure sensor 223 are the same.

[0079] S3, the temperature setting value of the outlet of the first water inlet pipe 12 and the second water inlet pipe 22: the temperature range required by the machine is a~b, the temperature of the outlet of the first water inlet pipe 12 is set to be Δ degrees lower than a, that is, a-Δ. The temperature of the outlet of the second water inlet pipe 22 is set to be Δ degrees higher than b, that is, b+Δ. The value of Δ is set according to actual needs, for example, Δ is 5-30, etc.

[0080] S4, the controller 10 controls the opening of the first three-way valve 15, the second three-way valve 16, the third three-way valve 25, and the fourth three-way valve 26, wherein the opening of the first three-way valve 15 and the second three-way valve 16 in the low-temperature component 1 corresponds to 0~100 output by the controller 10, and the opening of the third three-way valve 25 and the fourth three-way valve 26 of the high-temperature component 2 corresponds to 100~0 output by the controller 10.

[0081] S5. The current temperature of the machine is T1 and needs to be switched to T2. When the temperature T1 is greater than T2, the output of the controller 10 increases, and the opening of the first three-way valve 15 and the second three-way valve 16 of the low-temperature component 1 increases, so that the low-temperature water flow entering the mixing tube 31 increases; the opening of the third three-way valve 25 and the fourth three-way valve 26 of the high-temperature component 2 decreases, so that the high-temperature water flow entering the mixing tube 31 decreases, thereby reducing the current temperature T1 of the machine to T2.

[0082] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A temperature control system, characterized in that: include: A low-temperature component, the low-temperature component comprises a low-temperature circuit, and the low-temperature circuit is provided with a first water tank, a first water inlet pipe and a first water return pipe in sequence; A high temperature component, the high temperature component comprises a high temperature circuit, and the high temperature circuit is provided with a second water tank, a second water inlet pipe and a second water return pipe in sequence; A machine heat exchange component, the machine heat exchange component comprises a heat exchange flow path, the heat exchange flow path is provided with a mixing tube, a main water inlet pipe, a main heat exchange pipe and a main water return pipe in sequence, and the main heat exchange pipe is suitable for being arranged on the machine; The first water inlet pipe and the second water inlet pipe can both be connected to the mixing pipe, so that the water flows in the low-temperature circuit and the high-temperature circuit are mixed and then enter the heat exchange flow path; The first water return pipe and the second water return pipe can both be connected to the main water return pipe so that the water flow in the heat exchange flow path flows back to the low-temperature circuit and the high-temperature circuit.

2. The temperature control system according to claim 1, characterized in that: The first water inlet pipe is provided with a first water pump, a first temperature sensor, a first pressure sensor, a first flow sensor, and a first control valve in sequence, and the first water tank is provided with a first heating element; The first water return pipe is provided with a second control valve and a third temperature sensor; The second water inlet pipe is provided with a second water pump, a second temperature sensor, a second pressure sensor, a second flow sensor, and a third control valve in sequence, and the second water tank is provided with a second heating element; The second water return pipe is provided with a fourth control valve and a fourth temperature sensor.

3. The temperature control system according to claim 1, characterized in that: The mixing tube is provided with a main temperature sensor, a main pressure sensor and a main flow sensor. The main temperature sensor is used to measure the water flow temperature in the mixing tube, the main pressure sensor is used to measure the water flow pressure in the mixing tube, and the main flow sensor is used to measure the flow rate of the water flow in the mixing tube.

4. The temperature control system according to claim 1, characterized in that: The temperature control system includes a first heat exchange component, which includes a first heat exchanger and a first heat exchanger. The first heat exchanger has a first channel and a second channel that are independent of each other and can perform heat exchange. The first heat exchanger is connected to the first channel, and the first return pipe is connected to the second channel.

5. The temperature control system according to claim 1, characterized in that: The temperature control system includes a second heat exchange component, which includes a second heat exchanger and a second heat exchanger. The second heat exchanger has a third channel and a fourth channel that are independent of each other and can perform heat exchange. The second heat exchanger is connected to the third channel, and the second return pipe is connected to the fourth channel.

6. The temperature control system according to any one of claims 1 to 5, characterized in that: The low-temperature assembly includes a first intermediate pipe, a first three-way valve and a second three-way valve, the first water inlet pipe is connected to the first intermediate pipe through the first three-way valve, and the first water return pipe is connected to the first intermediate pipe through the second three-way valve; The high-temperature component includes a second intermediate pipe, a third three-way valve and a fourth three-way valve. The second water inlet pipe is connected to the second intermediate pipe through the third three-way valve, and the second water return pipe is connected to the second intermediate pipe through the fourth three-way valve.

7. The temperature control system according to claim 6, characterized in that: The temperature control system includes a first water supply pipe and a second water supply pipe, the first water supply pipe can connect the first water inlet pipe and the mixing pipe, the second water supply pipe can connect the second water inlet pipe and the mixing pipe, the machine heat exchange component includes a main three-way pipe, the first water supply pipe, the second water supply pipe and the mixing pipe are connected through the main three-way pipe.

8. The temperature control system according to claim 7, characterized in that: The first water inlet pipe and the first water supply pipe are communicated with each other through the first three-way valve, and the second water inlet pipe and the second water supply pipe are communicated with each other through the third three-way valve.

9. The temperature control system according to claim 6, characterized in that: The temperature control system includes a first return pipe and a second return pipe, the first return pipe is used to connect the first return pipe and the main return pipe, the second return pipe is used to connect the second return pipe and the main return pipe, the machine heat exchange component includes a main two-way pipe, and the first return pipe, the second return pipe and the main return pipe are connected through the main two-way pipe.

10. The temperature control system according to claim 9, characterized in that: The first water return pipe and the first return pipe are communicated through the second three-way valve, and the second water return pipe and the second return pipe are communicated through the fourth three-way valve.

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