Loading device compatible with multi-size wafer cassettes

Abstract

The invention relates to the technical field of semiconductors, in particular to a loading device compatible with multi-size wafer cassettes, and mainly solves the technical problems that an existing wafer cassette loading device is time-consuming and labor-consuming to adjust, and accidents are caused due to the fact that sizes are easily selected by mistake. The loading device comprises a mounting base, a loading assembly and a detection assembly, the loading assembly comprises a carrying table and a positioning structure, the positioning structure comprises a positioning strip plate and positioning pieces, the positioning strip plate is provided with a plurality of clamping grooves, each type of positioning pieces comprises two positioning sets, each positioning set is composed of at least one positioning block, and the detection assembly is arranged on the carrying table. The detection assembly comprises an in-place sensor and a size indicating lamp. According to the loading device, when the specification of the loaded wafer box is replaced, the positioning block does not need to be adjusted, and the loading efficiency is higher; and a detector can be reminded of the size of the wafer loaded in real time, so that the probability of mistakenly selecting other sizes by the detector can be effectively reduced, and the accident rate is further reduced.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a loading device compatible with multi-size wafer boxes. Background Art

[0002] During wafer inspection, the wafer box containing the wafers is manually placed in the loading device of the inspection equipment, and then the loading device is docked with the inspection equipment for inspection. Figure 1 As shown, the wafer box 100 is composed of a top plate 101, two side plates 102 and a bottom plate 103. A plurality of groups of supporting teeth are vertically spaced along the upper edges of the opposite surfaces of the two side plates 102. The top plate 101 is connected between the tops of the two side plates 102, and the bottom plate 103 is connected between the bottoms of the two side plates 102. The lower surface of the bottom plate 103 is provided with a convex strip 104 for positioning.

[0003] The wafer boxes used for wafers of different sizes are also of different specifications. Currently, the standard wafer boxes are of six specifications: 2-inch, 3-inch, 4-inch, 5-inch, 6-inch and 8-inch. The loading ports required for wafer boxes of different specifications are also different. Therefore, in order to save equipment costs, the loading ports of loading devices are generally designed to be movable, that is, they can be adjusted to adapt to wafer boxes of different specifications.

[0004] However, this loading device still has the following defects: first, when loading wafer boxes of different specifications, it is necessary to reciprocate and adjust the mechanism on the loading device to match the wafer boxes of corresponding specifications, which is time-consuming and laborious; second, since wafer boxes of different specifications can be loaded, it is very easy for inspectors to mistakenly select other sizes during inspection, resulting in accidents. Therefore, a loading device that can overcome the above defects is urgently needed. Summary of the invention

[0005] In order to overcome the technical defects of the existing wafer box loading device, such as time-consuming and labor-intensive adjustment and easy accident caused by misselection of size, the present invention provides a loading device compatible with wafer boxes of multiple sizes.

[0006] The loading device compatible with multi-size wafer boxes provided by the present invention comprises: The mounting seat is an L-shaped structure and consists of a horizontal plate and a vertical plate, wherein the vertical plate is provided with an operation window; A loading assembly, comprising a carrier and a positioning structure, wherein the carrier is fixed to the horizontal plate, the carrier is arranged horizontally and is arranged corresponding to the bottom end of the operation window, the positioning structure is located on the upper surface of the carrier, the positioning structure comprises a positioning strip and a positioning member, the plate surface of the positioning strip is arranged horizontally and the length direction is perpendicular to the vertical plate, the positioning strip is provided with a plurality of slots at intervals along its length direction, each slot is arranged along the width direction of the positioning strip and is used to clamp the convex strip of the wafer box, the positioning member is provided with a plurality of types and corresponds to the slots one by one, each type of positioning member comprises two positioning groups symmetrically distributed on both sides in the width direction of the positioning strip, each positioning group is composed of at least one positioning block, the positioning block is fixed to the carrier and is used to abut against the bottom inner wall or the bottom outer wall of the wafer box; A detection component is provided with multiple groups corresponding to the card slots one by one. The detection component includes an in-place sensor and a size indicator light. The in-place sensor is press-type and is arranged in the corresponding card slot. The size indicator light is arranged on the vertical plate and is communicatively connected with the corresponding in-place sensor so as to light up when the in-place sensor is pressed.

[0007] Optionally, the card slots are provided with six for respectively clamping 2-inch, 3-inch, 4-inch, 5-inch, 6-inch and 8-inch wafer boxes, the positioning parts are provided with six types accordingly, and the detection components are provided with six groups accordingly.

[0008] Optionally, the position of the positioning block on the carrier can be adjusted along the width direction of the positioning strip.

[0009] Optionally, the carrier is supported on the horizontal plate by leveling screws.

[0010] Optionally, the upper surface of the carrier is further provided with an anti-fool structure, and the anti-fool structure is used to prop up the wafer box when the wafer box is offset so that the protruding strip is separated from the corresponding slot.

[0011] Optionally, the relative positions of the multiple card slots ensure that wafer boxes of different specifications are aligned close to one end of the vertical plate and adjacent to the operating window when loaded. The operating window is provided with a protrusion sensor for detecting the wafer sliding out of the wafer box. The vertical plate is also provided with a protrusion indicator light, which is communicatively connected with the protrusion sensor to light up when the protrusion sensor detects that the wafer has slipped out.

[0012] Optionally, an interface for connecting to other devices is provided at the bottom of the vertical plate facing away from the horizontal plate.

[0013] Optionally, the loading device further includes an outer protection component, and the outer protection component includes: A flip cover, which is hinged on the vertical plate, and has a protective state in which the flip cover is covered on the horizontal plate and surrounds the carrier, and a evasive state in which the flip cover is detached from the horizontal plate and exposes the carrier; A cover lock, which is disposed between the flip cover and the horizontal plate and is used to be activated when the flip cover is in a protective state; A lock indicator light is disposed on the vertical plate and is communicatively connected with the cover lock so as to light up when the cover lock is activated.

[0014] Optionally, the loading device further includes an inner protection component, and the inner protection component includes: A safety door is installed on the plate surface of the vertical plate away from the horizontal plate and is driven to be vertically lifted and lowered. The safety door has a closed state for shielding the operating window and an open state for avoiding the operating window.

[0015] The technical solution provided by the present invention has the following advantages compared with the prior art: 1) The loading device compatible with wafer boxes of multiple sizes provided by the present invention is provided with a card slot and a positioning block on the carrier. The card slot can limit the front and rear positions of the wafer box, and the positioning block can limit the left and right positions of the wafer box. The two can cooperate to realize the clamping and positioning of the wafer box on the carrier, thereby ensuring the loading firmness of the wafer box; 2) The loading device compatible with multi-size wafer boxes provided by the present invention has multiple types of card slots and positioning blocks, so that wafer boxes of different specifications can be loaded, and positioning blocks of different groups do not interfere with each other. When the specifications of the loaded wafer boxes are changed, the positioning blocks do not need to be adjusted, and the loading efficiency is higher; 3) The loading device compatible with multi-size wafer boxes provided by the present invention is provided with an in-place sensor in the card slot. When a wafer box of a certain specification is loaded, the convex strip of the wafer box will press the corresponding in-place sensor and control the corresponding size indicator light to light up, so as to remind the inspector of the real-time loaded wafer size, thereby effectively reducing the probability of the inspector misselecting other sizes, thereby reducing the accident rate; and, when the wafer box is placed at an angle, the convex strip is separated from the card slot and cannot press the corresponding in-place sensor, and the size indicator light will not light up, so it can remind the staff that the wafer box is in a tilted state, thereby indirectly avoiding the wafer box from being placed at an angle. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A schematic diagram showing the structure of a wafer box in the prior art; Figure 2 A schematic diagram showing a loading device according to a first angle of view in an embodiment of the present invention; Figure 3 A second angle schematic diagram showing a loading device according to an embodiment of the present invention; Figure 4 A schematic diagram showing the structure of a mounting base in an embodiment of the present invention; Figure 5 A schematic diagram showing the structure of a carrier in an embodiment of the present invention; Figure 6 A schematic diagram showing a loading state of a 3-inch wafer box according to an embodiment of the present invention; Figure 7 A schematic diagram showing a loading state of a 4-inch wafer box according to an embodiment of the present invention; Figure 8 A schematic diagram showing the loading status of an 8-inch wafer box in an embodiment of the present invention.

[0019] In the figure: 1. Mounting seat; 11. Horizontal plate; 12. Vertical plate; 121. Operation window; 13. Lug sensor; 14. Lug indicator light; 15. Interface; 16. Horizontal plate; 17. Vertical plate; 18. Connection frame; 2. Loading assembly; 21. Carrier; 211. Mounting slot; 22. Positioning structure; 221. Positioning strip; 222. Positioning block; 223. Slot; 224. Mounting strip; 225. Block body; 23. Leveling screw; 24. Foolproofing structure; 3. Detection assembly; 31. In-position sensor; 32. Size indicator light; 4. External protection assembly; 41. Flip cover; 42. Cover lock; 43. Lock indicator light; 5. Internal protection assembly; 51. Safety door; 52. Cylinder; 100, wafer box; 101, top plate; 102, side plate; 103, bottom plate; 104, convex strip. DETAILED DESCRIPTION

[0020] In order to more clearly understand the above-mentioned objectives, features and advantages of the present invention, the scheme of the present invention will be further described below. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0021] It should be noted that, unless otherwise clearly specified and limited, the terms "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0022] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein; it is obvious that the embodiments in the specification are only part of the embodiments of the present invention, rather than all of the embodiments.

[0023] Combine the following Figures 2 to 8 The specific embodiments of the present invention are described in detail.

[0024] This embodiment provides a loading device compatible with wafer boxes of multiple sizes, including a mounting seat 1 , a loading component 2 and a detection component 3 .

[0025] The mounting base 1 is an L-shaped structure and is composed of a horizontal plate 11 and a vertical plate 12 , and the vertical plate 12 is provided with an operation window 121 .

[0026] It should be noted that the operation window 121 is mainly used to detect the entry and exit of the robot arm of the equipment to interact with the wafers in the wafer box 100 .

[0027] Specifically, the mounting base 1 includes a horizontal plate 16, a vertical plate 17 and a connecting frame 18. The connecting frame 18 is an L-shaped frame and its two frame surfaces are respectively attached to the horizontal plate 16 and the vertical plate 17. The horizontal plate 16 and the vertical plate 17 are fixedly connected by the connecting frame 18. The horizontal plate 16 and one frame surface of the connecting frame 18 form a horizontal plate 11, and the vertical plate 17 and the other frame surface of the connecting frame 18 form a vertical plate 12.

[0028] Specifically, in this embodiment, an interface 15 for connecting other devices is provided at the bottom of the vertical plate 12 facing away from the horizontal plate 11, including but not limited to an air circuit interface for connecting to the cylinder 52 and an IO interface for connecting to a detection device.

[0029] Among them, the loading component 2 includes a carrier 21 and a positioning structure 22. The carrier 21 is fixed on the horizontal plate 11. The carrier 21 is arranged horizontally and corresponds to the bottom end of the operation window 121. The positioning structure 22 is located on the upper surface of the carrier 21. The positioning structure 22 includes a positioning strip 221 and a positioning member. The plate surface of the positioning strip 221 is arranged horizontally and the length direction is perpendicular to the vertical plate 12. The positioning strip 221 has a plurality of slots 223 spaced apart along its length direction. Each slot 223 is arranged along the width direction of the positioning strip 221 and is used to clamp the convex strip 104 of the wafer box 100. There are multiple types of positioning members and they correspond one by one to the slots 223. Each type of positioning member includes two positioning groups symmetrically distributed on both sides of the width direction of the positioning strip 221. Each positioning group is composed of at least one positioning block 222. The positioning block 222 is fixed on the carrier 21 and is used to abut the bottom inner wall or the bottom outer wall of the wafer box 100.

[0030] It should be noted that the card slot 223 and the positioning block 222 cooperate to realize the clamping and positioning of the wafer box 100. Different from the loading device with a movable loading port in the prior art, the present loading device is provided with multiple groups of card slots 223 and positioning blocks 222 at the same time. The multiple groups of card slots 223 and positioning blocks 222 do not interfere with each other. When the specifications of the loaded wafer box 100 change, the wafer box 100 can be directly installed at the corresponding card slots 223 and positioning blocks 222, which omits the existing steps of adjusting the upper mechanism of the loading device and improves the loading efficiency.

[0031] Specifically, the card slots 223 of the present embodiment are provided with six for respectively clamping 2-inch, 3-inch, 4-inch, 5-inch, 6-inch and 8-inch wafer boxes 100, the positioning parts are provided with six types, and the detection components 3 are provided with six groups. The loading device of the present embodiment can adapt to the loading of wafer boxes 100 of six specifications, namely 2-inch, 3-inch, 4-inch, 5-inch, 6-inch and 8-inch. In other embodiments, the design can be adaptive according to the specific situation. For example, if a certain scenario only needs to load 2-inch, 3-inch and 5-inch wafer boxes 100, then the card slots 223 can be provided with three for respectively clamping 2-inch, 3-inch and 5-inch wafer boxes 100, the positioning parts are provided with three types, and the detection components 3 are provided with three groups.

[0032] Specifically, the position of the positioning block 222 of this embodiment on the carrier 21 can be adjusted along the width direction of the positioning strip 221. Since not all wafer boxes 100 processed by wafer foundries are standard, in order to meet the loading of a small number of non-standard wafer boxes 100, this embodiment sets the positioning block 222 to be adjustable. More specifically, a strip-shaped mounting groove 211 can be opened on the carrier 21, and the length direction of the mounting groove 211 is consistent with the width direction of the positioning strip 221. The positioning block 222 includes a mounting strip 224 and a block body 225. The mounting strip 224 is slidably connected in the mounting groove 211 and has a strip hole. The mounting strip 224 is pressed and fixed by screws that penetrate the strip hole and are screwed on the bottom of the mounting groove 211. The block body 225 is fixed on the mounting strip 224, and the position of the block body 225 is adjusted by adjusting the position of the screw relative to the strip hole.

[0033] Specifically, the carrier 21 of this embodiment is supported on the horizontal plate 11 by the leveling screws 23. When installed and used for the first time, the carrier is adjusted to a horizontal state by the leveling screws 23. More specifically, at least three adjustment screws need to be provided to ensure the accuracy of the horizontal adjustment.

[0034] Specifically, each positioning group of the 2-inch to 4-inch wafer boxes 100 of this embodiment includes two positioning blocks 222 , and each positioning group of the 5-inch, 6-inch and 8-inch wafer boxes 100 includes one positioning block 222 . The abutment position and distribution of the positioning blocks 222 of each positioning group are described in detail below: the two positioning blocks 222 of the 2-inch wafer box 100 are both used to abut the bottom inner wall of the wafer box 100 and are respectively located at the end and middle of the positioning strip 221 close to the vertical plate 12; the two positioning blocks 222 of the 3-inch wafer box 100 are both used to abut the bottom inner wall of the wafer box 100 and are both located in the middle of the positioning strip 221; one positioning block 222 of the 4-inch wafer box 100 is used to abut the bottom inner wall of the wafer box 100, and the other positioning block 222 is used to abut the bottom outer wall of the wafer box 100, and the two positioning blocks 222 are respectively located at both ends of the positioning strip 221; the positioning blocks 222 of the 5-inch, 6-inch and 8-inch wafer boxes 100 are all used to abut the bottom inner wall of the wafer box 100 and are both located on the side of the positioning strip 221 away from the vertical plate 12.

[0035] Furthermore, in this embodiment, a foolproof structure 24 is provided on the upper surface of the carrier 21, and the foolproof structure 24 is used to prop up the wafer box 100 when the wafer box 100 is placed off-center so that the convex strip 104 is separated from the corresponding slot 223. During use, if the wafer box 100 is placed off-center, it will be supported on the foolproof structure 24, so that the convex strip 104 of the wafer box 100 is separated from the corresponding slot 223. At this time, no in-position sensor 31 is pressed, and no size indicator light 32 is lit, so as to remind the staff that the wafer box 100 is in an abnormal placement state, so as to indirectly prevent the wafer box 100 from being placed off-center. Specifically, the fool-proof structure 24 of the present embodiment includes two blocking rods, both of which are parallel to the vertical plate 12 and are respectively arranged between the two positioning groups of the 6-inch wafer box 100 and between the two positioning groups of the 8-inch wafer box 100 to prevent the 6-inch wafer box 100 and the 8-inch wafer box 100 from being placed off-center. Because the positioning groups of the 2-inch to 5-inch wafer boxes 100 are located in a relatively dense structure, the wafer box 100 will be supported on other structures to play an anti-fool-proof role when it is placed off-center, so the present embodiment only has an anti-fool-proof design for the 6-inch and 8-inch wafer boxes 100.

[0036] Furthermore, the relative positions of the multiple card slots 223 of the present embodiment ensure that the wafer boxes 100 of different specifications are aligned near one end of the vertical plate 12 and adjacent to the operation window 121 when loaded. The operation window 121 is provided with a protrusion sensor 13 for detecting the wafer sliding out of the wafer box 100. The vertical plate 12 is also provided with a protrusion indicator light 14, which is connected to the protrusion sensor 13 in communication and lights up when the protrusion sensor 13 detects the wafer sliding out. During operation, if a wafer slides out of the wafer box 100 into the operation window 121 to form a protrusion, the protrusion sensor 13 will detect the protrusion signal and control the protrusion indicator light 14 to light up to remind the operator to make adjustments.

[0037] Among them, the detection component 3 is provided with multiple groups and corresponds to the card slot 223 one by one. The detection component 3 includes an in-position sensor 31 and a size indicator light 32. The in-position sensor 31 is a press-type and is arranged in the corresponding card slot 223. The size indicator light 32 is arranged on the vertical plate 12 and is connected to the corresponding in-position sensor 31 in communication so as to light up when the in-position sensor 31 is pressed. During operation, the wafer box 100 is manually placed in the corresponding card slot 223 and the positioning block 222 position, and the convex strip 104 of the wafer box 100 presses the in-position sensor 31. The in-position sensor 31 controls the corresponding size indicator light 32 to light up to remind the inspector of the real-time loaded wafer size, thereby effectively reducing the probability of the inspector mistakenly selecting other sizes, thereby reducing the accident rate.

[0038] In addition, the loading device of this embodiment also includes an outer protection component 4, which includes a flip cover 41, a cover lock 42 and a lock indicator light 43; the flip cover 41 is hinged on the vertical plate 12, and the flip cover 41 has a protection state of covering the horizontal plate 11 and surrounding the carrier 21 and a evasion state of detaching from the horizontal plate 11 and exposing the carrier 21; the cover lock 42 is arranged between the flip cover 41 and the horizontal plate 11 and is used to start when the flip cover 41 is in the protection state; the lock indicator light 43 is arranged on the vertical plate 12 and is connected to the cover lock 42 to light up when the cover lock 42 is started. After the wafer box 100 is manually placed on the carrier 21 and clamped and positioned, the flip cover 41 is controlled to rotate to the protection state to prevent the robot of the detection equipment from manually reaching into the wafer box 100 during operation to cause personal injury accidents.

[0039] In addition, the loading device of this embodiment further includes an inner protection assembly 5, which includes a safety door 51. The safety door 51 is installed on the plate surface of the vertical plate 12 away from the horizontal plate 11 and is driven to be vertically lifted and lowered. The safety door 51 has a closed state for shielding the operation window 121 and an open state for avoiding the operation window 121. The safety door 51 is in a closed state when the wafer box 100 is manually placed to prevent a human hand from reaching into the inner side of the detection device through the operation window 121 and causing a personal injury accident.

[0040] Specifically, the safety door 51 of this embodiment is connected to a cylinder 52 for driving the safety door 51 to rise and fall, and the cylinder 52 drives the safety door 51 to rise and fall vertically.

[0041] It should be noted that this embodiment ensures through program design that the flap 41 cannot be switched to the avoidance state when the safety door 51 is in the open state, and the safety door 51 cannot be switched to the open state when the flap 41 is in the avoidance state, that is, the safety door 51 and the flap 41 can only be opened on one side, thereby playing a role of safety protection.

[0042] The working process of the loading device compatible with multi-size wafer boxes of this embodiment is as follows: S1. The control flap 41 is switched to the avoidance state, and the wafer box 100 containing the wafers is manually placed in the corresponding slot 223 and the positioning block 222 of the stage 21 for clamping and positioning; S2. If the corresponding size indicator light 32 is on, it means that the placement is accurate; if the size indicator light 32 is not on, it means that the placement is tilted or offset, and the staff will check and re-place it until the corresponding size indicator light 32 is on; S3. The control cover 41 is switched to the protection state, and the lock indicator light 43 is on; S4. Control the safety door 51 to switch to the open state, and the manipulator of the detection equipment performs the detection operation through the operation window 121.

[0043] The above is only a specific implementation of the present invention, which enables those skilled in the art to understand or implement the present invention. Although detailed descriptions are given with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments, and they should all be covered by the protection scope of the claims.

Claims

1. A loading device compatible with multi-size wafer boxes, characterized in that: include: A mounting seat (1) having an L-shaped structure and consisting of a horizontal plate (11) and a vertical plate (12), wherein the vertical plate (12) is provided with an operating window (121); The loading assembly (2) comprises a carrier (21) and a positioning structure (22), wherein the carrier (21) is fixed on the horizontal plate (11), the carrier (21) is arranged horizontally and is arranged corresponding to the bottom end of the operation window (121), the positioning structure (22) is located on the upper surface of the carrier (21), the positioning structure (22) comprises a positioning strip (221) and a positioning member, the plate surface of the positioning strip (221) is arranged horizontally and the length direction is perpendicular to the vertical plate (12), and the positioning strip (221) is spaced apart along its length direction. A plurality of slots (223), each of which is arranged along the width direction of the positioning strip (221) and is used to clamp the convex strip (104) of the wafer box (100), the positioning members are provided in a plurality of types and correspond one to one with the slots (223), each type of positioning member comprises two positioning groups symmetrically distributed on both sides in the width direction of the positioning strip (221), each positioning group comprises at least one positioning block (222), the positioning block (222) is fixed on the carrier (21) and is used to abut against the bottom inner wall or the bottom outer wall of the wafer box (100); A detection assembly (3) is provided with a plurality of groups corresponding to the card slots (223) one by one. The detection assembly (3) comprises an in-position sensor (31) and a size indicator light (32). The in-position sensor (31) is a press-type sensor and is arranged in the corresponding card slot (223). The size indicator light (32) is arranged on the vertical plate (12) and is communicatively connected with the corresponding in-position sensor (31) so as to light up when the in-position sensor (31) is pressed.

2. The loading device compatible with multi-size wafer boxes according to claim 1, characterized in that: The card slots (223) are provided with six for respectively clamping 2-inch, 3-inch, 4-inch, 5-inch, 6-inch and 8-inch wafer boxes (100), the positioning pieces are provided with six types correspondingly, and the detection components (3) are provided with six groups correspondingly.

3. The loading device compatible with multi-size wafer boxes according to claim 1, characterized in that: The position of the positioning block (222) on the carrier (21) can be adjusted along the width direction of the positioning strip (221).

4. The loading device compatible with multi-size wafer boxes according to claim 1, characterized in that: The carrier (21) is supported on the horizontal plate (11) via leveling screws (23).

5. The loading device compatible with multi-size wafer boxes according to claim 1, characterized in that: The upper surface of the carrier (21) is also provided with an anti-fool structure (24), and the anti-fool structure (24) is used to prop up the wafer box (100) when the wafer box (100) is offset so that the convex strip (104) is separated from the corresponding slot (223).

6. The loading device compatible with multi-size wafer boxes according to claim 1, characterized in that: The relative positions of the plurality of card slots (223) ensure that wafer boxes (100) of different specifications are aligned near one end of the vertical plate (12) and adjacent to the operation window (121) when loaded, and the operation window (121) is provided with a protrusion sensor (13) for detecting that a wafer has slipped out of the wafer box (100), and the vertical plate (12) is also provided with a protrusion indicator light (14), and the protrusion indicator light (14) is communicatively connected with the protrusion sensor (13) so as to light up when the protrusion sensor (13) detects that a wafer has slipped out.

7. The loading device compatible with multi-size wafer boxes according to claim 1, characterized in that: An interface (15) for connecting to other equipment is provided at the bottom of the plate surface of the vertical plate (12) facing away from the horizontal plate (11).

8. The loading device compatible with multi-size wafer boxes according to any one of claims 1 to 7, characterized in that: It also includes an outer protection component (4), wherein the outer protection component (4) includes: a flip cover (41) hinged on the vertical plate (12), the flip cover (41) having a protective state in which it covers the horizontal plate (11) and surrounds the carrier (21), and a evasive state in which it is detached from the horizontal plate (11) and exposes the carrier (21); a cover lock (42) disposed between the flip cover (41) and the horizontal plate (11) and configured to be activated when the flip cover (41) is in a protective state; A lock indicator light (43) is disposed on the vertical plate (12) and is communicatively connected to the cover lock (42) so as to light up when the cover lock (42) is activated.

9. The loading device compatible with multi-size wafer boxes according to any one of claims 1 to 7, characterized in that: It also includes an inner protection component (5), wherein the inner protection component (5) includes: A safety door (51) is installed on the plate surface of the vertical plate (12) facing away from the horizontal plate (11) and is driven to be vertically raised and lowered, the safety door (51) having a closed state for shielding the operating window (121) and an open state for avoiding the operating window (121).

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