Perovskite battery and preparation method thereof

Abstract

The invention relates to the technical field of photovoltaic cells, in particular to a perovskite cell and a preparation method thereof. The perovskite battery comprises a substrate layer, a composite functional layer, an electrode layer, an interface protection layer, a groove protection layer and a P3 groove, the interface protection layer comprises an organic polymer; the groove protection layer comprises a first protection layer located on the side wall of the P3 groove part, and the first protection layer comprises reactants of carbonyl sulfide and an organic polymer. According to the perovskite cell, the interface protection layer and the groove protection layer are arranged, so that the laser heat influence can be reduced, and dust particles generated in the processing process are not easy to adhere to the surface of a device; environmental water vapor and the like can be effectively prevented from intruding into the device structure, so that the overall stability of the battery is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of photovoltaic cells, and in particular to a perovskite cell and a preparation method thereof. Background Art

[0002] Photovoltaic power generation has the advantages of being easy to use, environmentally friendly, and having a long lifespan. It is the most dynamic application mode of energy in the future. Perovskite solar cells are photovoltaic cells that use perovskite-type organic metal halide semiconductors as light-absorbing materials. Compared with crystalline silicon and other thin-film batteries, perovskite solar cells have higher efficiency. Perovskite is a synthetic material with high defect tolerance and less thermal recombination efficiency loss, so the carrier lifetime is high. The band gap can be adjusted according to different formulas, which can improve the spectrum utilization and achieve higher photoelectric conversion efficiency. Perovskite materials have good light absorption properties, and the film layer can be made very thin. Its material properties provide rich development space for the appearance of the battery, such as color adjustment, light transmission, flexibility, etc., while also ensuring a certain power generation efficiency. Therefore, it has broad development space in application scenarios such as photovoltaic vehicle integration, photovoltaic building integration, wearable devices, outdoor power stations, and indoor photovoltaics.

[0003] In terms of processing methods, lasers are indispensable in the preparation process of perovskite cells because of their advantages of non-contact processing, regional selectivity, high processing accuracy, strong adjustability, improved material utilization, and effective control of thermal effect zones. However, with the continuous optimization and superposition of the functional layers of perovskites and the introduction of various new material layers, lasers may produce adverse process effects such as obvious heat-affected zones, craters, bottom debris burrs, and film stratification when acting on the film layer, especially the P3 process, whose main function is to isolate the sub-cells separately. If there are many defects such as collapsed edges and stratification around the P3 wire slots, it is easy to cause overlap to form leakage risk points, reduce the parallel resistance of the battery, and film stratification is easy to cause ion migration, water and oxygen diffusion, and other problems, and also reduce the stability of the components.

[0004] The existing process optimization of P3 line grooves is to pre-score the edges of the P3 lines by setting different laser process parameters to form a protective line method, which improves the flatness of the line grooves and reduces the thermal impact on the edges on both sides. However, this involves multiple laser processing, which affects the process cycle. It is not suitable for large-area perovskite battery production processes. Some optimizations require combining the functional layer and the electrode layer under specific thickness and material conditions to optimize the laser process to achieve a line morphology without edge collapse, which makes the overall process less compatible and is not conducive to the development and introduction of new functional layer materials.

[0005] In view of this, the present invention is proposed. Summary of the invention

[0006] One object of the present invention is to provide a perovskite cell to solve the above-mentioned technical problems. The perovskite cell of the present invention can reduce the thermal impact of the laser by setting an interface protection layer and a groove protection layer. The dust particles generated during the processing are not easy to adhere to the surface of the device, and the collapsed edge overlap morphology of the wire groove is effectively reduced, which can effectively improve the overall stability of the battery.

[0007] Another object of the present invention is to provide a method for preparing the perovskite battery, which is suitable for the production process of large-area perovskite batteries, does not affect the production rhythm, has strong compatibility with the development and introduction of new functional layer materials, and can obtain batteries with excellent stable performance.

[0008] In order to achieve the above-mentioned purpose of the present invention, the following technical solutions are particularly adopted: A perovskite battery, comprising a substrate layer, a composite functional layer, an electrode layer, an interface protection layer, a groove protection layer and a P3 groove; the composite functional layer and the electrode layer are arranged between the substrate layer and the interface protection layer, and the interface protection layer is located on the surface of the electrode layer, and the composite functional layer is located on the surface of the substrate layer; the P3 groove sequentially penetrates the interface protection layer, the electrode layer and the composite functional layer; The interface protection layer includes an organic polymer; The groove protection layer includes a first protection layer located on a sidewall of the P3 groove portion, wherein the first protection layer includes a reactant of carbonyl sulfide and the organic polymer.

[0009] In some embodiments, the organic polymer comprises a cross-linked product of a polymer material, and the polymer material comprises at least one of polyurethane acrylate, epoxy acrylate, acrylate, polyester acrylate, polyether acrylate, polyalkene acid, and polyol compounds.

[0010] In some embodiments, the groove protection layer further includes a second protection layer, and the second protection layer is located on the surface of the first protection layer and the surface of the P3 groove; the second protection layer includes a fluorinated carbon polymer.

[0011] In some embodiments, the composite functional layer includes a first charge transport layer, a perovskite layer, and a second charge transport layer stacked in sequence, the first charge transport layer is in contact with the base layer, and the second charge transport layer is in contact with the electrode layer; the perovskite battery also includes a P2 groove, which sequentially passes through the second charge transport layer, the perovskite layer, and the first charge transport layer; the electrode layer has an extension section, which passes through the P2 groove and contacts the base layer; the base layer is provided with a P1 groove opening toward the first charge transport layer.

[0012] The method for preparing the perovskite battery as described above comprises the following steps: The composite functional layer and the electrode layer are sequentially prepared on the substrate layer.

[0013] A polymer material solution is coated on the surface of the electrode layer, and an organic protective layer is formed after curing.

[0014] A P3 groove is manufactured which penetrates the organic protective layer, the electrode layer and the composite functional layer.

[0015] Plasma etching is performed on the organic protective layer near the P3 groove to form an interface protective layer; carbonyl sulfide is introduced during the plasma etching process to form a first protective layer on a portion of the sidewall of the P3 groove to obtain a groove protective layer.

[0016] In some embodiments, the polymer material solution includes a polymer material and an organic solvent.

[0017] In some embodiments, the thickness of the organic protective layer is 50-150 nm. The thickness of the organic protective layer is preferably 50-120 nm.

[0018] In some embodiments, the plasma etching includes a dilution gas and an etching gas, and a flow ratio of the dilution gas to the etching gas is (1-2):(3-5).

[0019] In some embodiments, the flow ratio of the carbonyl sulfide to the dilution gas is 1:(3-5).

[0020] In some implementations, the RF power of the plasma etching is 500-700 W, and the RF frequency is 50-60 MHz.

[0021] In some implementations, after the plasma etching for 60 to 150 seconds, the carbonyl sulfide is introduced for a treatment time of 100 to 150 seconds.

[0022] In some embodiments, the preparation of the groove protective layer further includes: after obtaining the first protective layer, introducing fluorinated cycloalkane to form a second protective layer on the surface of the first protective layer and the P3 groove.

[0023] In some embodiments, the fluorinated cycloalkane comprises C 4 F 8 , the flow ratio of the fluorinated cycloalkane to the dilution gas is 1:(3~5).

[0024] In some implementations, after the etching gas and the carbonyl sulfide are stopped, the fluorinated cycloalkane is introduced at a radio frequency power of 150-250W.

[0025] In some embodiments, the treatment time using the fluorinated cycloalkane is 100 to 150 seconds.

[0026] In some embodiments, the preparation of the composite functional layer specifically includes: A P1 groove is made on the surface of the substrate layer, and a first charge transport layer, a perovskite layer, and a second charge transport layer are sequentially prepared on the surface of one side of the substrate layer having the P1 groove; a P2 groove is made that sequentially penetrates the second charge transport layer, the perovskite layer, and the first charge transport layer; and an electrode layer is prepared on the surface of the second charge transport layer and in the P2 groove.

[0027] Compared with the prior art, the present invention has the following beneficial effects: (1) In the perovskite battery of the present invention, the interface protection layer can reduce the influence of the thermal effect in P3 laser scribing, and the dust generated during processing is not easy to accumulate on the surface of the device; the groove protection layer has a double-layer protection layer, has excellent chemical stability and hydrophobicity, and can effectively prevent environmental water vapor from invading the device structure, thereby improving the overall stability of the battery.

[0028] (2) The preparation method of the perovskite battery of the present invention prepares an organic protective layer on the surface of the electrode layer, which can reduce the influence of the thermal effect in the P3 laser scribing, and the dust generated during the processing is not easy to accumulate on the surface of the device, effectively reducing the edge collapse and overlap morphology of the wire groove; plasma etching is used after the P3 process to relatively flatten the protective layer at the edge of the wire groove, and carbonyl sulfide treatment is used to form a first protective layer on part of the side wall of the P3 groove; then a passivation process is performed, and fluorinated cycloalkane gas (CF 2 )n long-chain polymer, this fluorinated carbon polymer has excellent chemical stability and hydrophobicity, can be deposited on the sidewalls and bottom of the groove, and can effectively prevent environmental water vapor from invading the device structure, thereby improving the overall stability of the battery. This method is suitable for large-area perovskite battery production processes, does not affect the production cycle, and has strong compatibility with the development and introduction of new functional layer materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 It is a schematic diagram of the structure of the perovskite battery of the present invention.

[0031] Reference numerals: 1-base layer, 2-composite functional layer, 201-first charge transport layer, 202-perovskite layer, 203-second charge transport layer, 3-electrode layer, 4-interface protection layer, 5-groove protection layer, 6-P1 groove, 7-P2 groove, 8-P3 groove. DETAILED DESCRIPTION

[0032] The embodiments of the present invention will be described in detail below in conjunction with the examples, but it will be appreciated by those skilled in the art that the following examples are only used to illustrate the present invention and should not be considered as limiting the scope of the present invention. If no specific conditions are specified in the examples, the conditions are carried out according to normal conditions or the conditions recommended by the manufacturer. If the manufacturer of the reagents or instruments used is not specified, they are all conventional products that can be obtained commercially.

[0033] According to one aspect of the present invention, the present invention relates to a perovskite battery, comprising a substrate layer, a composite functional layer, an electrode layer, an interface protection layer, a groove protection layer and a P3 groove; the composite functional layer and the electrode layer are between the substrate layer and the interface protection layer, and the interface protection layer is located on the surface of the electrode layer, and the composite functional layer is located on the surface of the substrate layer; the P3 groove sequentially penetrates the interface protection layer, the electrode layer and the composite functional layer; the interface protection layer comprises an organic polymer, and the groove protection layer comprises a first protective layer located on a partial side wall of the P3 groove, and the first protective layer comprises a reactant of carbonyl sulfide (COS) and the organic polymer.

[0034] In the perovskite battery of the present invention, the interface protection layer can reduce the influence of the thermal effect in P3 laser scribing, and the dust generated during processing is not easy to accumulate on the device surface, effectively reducing the edge collapse and overlap morphology of the wire groove; the plasma etching area is relatively flat; the groove protection layer has excellent chemical stability and hydrophobicity, which can effectively prevent environmental water vapor from invading the device structure, thereby improving the overall stability of the battery.

[0035] In some embodiments, the organic polymer comprises a cross-linked product of a polymer material, wherein the polymer material comprises at least one of polyurethane acrylate, epoxy acrylate, acrylate, polyester acrylate, polyether acrylate, polyolefinic acid and polyol compounds, such as a combination of polyurethane acrylate and epoxy acrylate, a combination of polyester acrylate and polyether acrylate, a combination of polyester acrylate, polyether acrylate and polyol compounds, etc.

[0036] In some embodiments, the groove protection layer further includes a second protection layer, the second protection layer is located on the surface of the first protection layer and the surface of the P3 groove; the second protection layer includes a fluorinated carbon polymer. The fluorinated carbon polymer is (CF 2)n long-chain polymer. Fluorinated carbon polymers have excellent chemical stability and hydrophobicity, which can effectively prevent environmental water vapor from invading the device structure, thereby improving the overall stability of the battery.

[0037] In some embodiments, the thickness of the interface protection layer is 20-100 nm, for example, 20 nm, 30 nm, 40 nm, 50 nm, 60 nm, 70 nm, 80 nm, 90 nm or 100 nm.

[0038] In some embodiments, the thickness of the groove protection layer is 1 to 10 nm, for example, 1 nm, 2 nm, 3 nm, 4 nm, 5 nm, 6 nm, 7 nm, 8 nm, 9 nm, 10 nm, etc.

[0039] In some embodiments, the composite functional layer includes a first charge transport layer, a perovskite layer, and a second charge transport layer stacked in sequence, the first charge transport layer is in contact with the substrate layer, and the second charge transport layer is in contact with the electrode layer. The perovskite battery also includes a P2 slot, which sequentially passes through the second charge transport layer, the perovskite layer, and the first charge transport layer. The electrode layer has an extension section, which passes through the P2 slot and contacts the substrate layer; the substrate layer is provided with a P1 slot opening toward the first charge transport layer.

[0040] In some embodiments, the substrate layer includes conductive glass, which may be ITO or FTO. The thickness of the substrate layer is 100-400 nm.

[0041] In some embodiments, the first charge transport layer is a hole transport layer with a thickness of 15-25 nm, and the material includes polymer materials, inorganic oxide materials and metal organic framework materials; the inorganic oxide includes at least one of nickel oxide, titanium oxide, zinc oxide and scandium oxide. The second charge transport layer is an electron transport layer, including at least one of inorganic materials (such as titanium dioxide, zinc oxide, nitride) and organic materials (such as fullerene and its derivatives), and the thickness of the second charge transport layer is 40-80 nm.

[0042] In some embodiments, the thickness of the perovskite layer is 400-850 nm.

[0043] In some embodiments, the electrode layer includes one or a combination of Cu, Mo, Ni, and Ag. The thickness of the electrode layer is 50-100 nm.

[0044] According to another aspect of the present invention, the present invention also relates to a method for preparing the above perovskite battery, comprising the following steps: A composite functional layer and an electrode layer are sequentially prepared on the substrate layer. A polymer material solution is coated on the surface of the electrode layer, and an organic protective layer is formed after solidification. A P3 groove is made that runs through the organic protective layer, the electrode layer and the composite functional layer. The organic protective layer near the P3 groove is plasma-etched to form a plasma-etched area on the organic protective layer near the P3 groove to form an interface protective layer; carbonyl sulfide is introduced during the plasma etching process to form a first protective layer on part of the sidewall of the P3 groove to obtain a groove protective layer.

[0045] The preparation method of the perovskite battery of the present invention prepares an organic protective layer on the surface of the electrode layer, which can reduce the influence of the thermal effect in the P3 laser scribing, and the dust generated during the processing is not easy to accumulate on the device surface, effectively reducing the collapse edge overlap morphology of the wire groove, because: the protective layer helps to cool during laser processing, the protective layer is evenly diffused to the entire surface of the workpiece, and the surfactant components and organic solvents in the material can decompose the substances remaining on the surface of the device into tiny particles or chemical reactions, and dissolve in the organic detergent solution to achieve the effect of surface cleaning; plasma etching is used after the P3 process to relatively flatten the wire groove edge protective layer, and carbonyl sulfide treatment is used to form a groove protective layer with a first protective layer on part of the side wall of the P3 groove, which can prevent environmental water vapor from invading the device structure, thereby improving the overall stability of the battery. This method is suitable for large-area perovskite battery production processes, does not affect the production rhythm, and has strong compatibility with the development and introduction of new functional layer materials.

[0046] In some embodiments, the polymer material solution includes a polymer material and an organic solvent. The organic solvent includes ethers and esters, such as glycol ether and butyl acetate. In some embodiments, the coating can be performed by scraping or spraying.

[0047] In some embodiments, the thickness of the organic protective layer is 50-150 nm, such as 50 nm, 80 nm, 100 nm, 129 nm or 150 nm, etc. The thickness of the organic protective layer is preferably 50-120 nm.

[0048] In some embodiments, the curing temperature is 100-130° C., such as 100° C., 110° C., 120° C., 130° C., etc. The curing time is 1-5 min, such as 1 min, 2 min, 3 min, 5 min, etc.

[0049] In some embodiments, the plasma etching includes a diluent gas and an etching gas, and the flow ratio of the diluent gas to the etching gas is (1-2): (3-5), such as 1:3, 1.5:4, 2:5, etc. The diluent gas includes a protective gas, such as Ar or N 2 . Etching gases include CO 2Plasma etching includes diluent gas and etching gas with a suitable volume ratio to ensure the etching effect. The gas generated by the organic protective layer after a certain etching reaction mainly includes H 2 、NO 2 、SO 2 , CO 2 .

[0050] In some embodiments, the flow ratio of carbonyl sulfide to the diluent gas is 1:(3-5), such as 1:3, 1:4 or 1:5, etc. The carbonyl sulfide and the diluent gas have a suitable flow ratio to ensure that carbonyl sulfide forms a stable chemical bond with the carbon atoms in the organic protective layer, thereby forming a first protective layer on the sidewall of the P3 groove.

[0051] In some implementations, the RF power of plasma etching is 500-700 W, such as 500 W, 550 W, 600 W, 650 W, 700 W, etc. The RF frequency is 50-60 MHz, such as 50 MHz, 55 MHz, 60 MHz, etc. Plasma etching uses appropriate RF power and frequency to ensure the plasma etching effect.

[0052] In some embodiments, after plasma etching for 60 to 150 seconds (e.g., 60 seconds, 70 seconds, 80 seconds, 90 seconds, 100 seconds, 110 seconds, 120 seconds, 150 seconds, etc.), carbonyl sulfide is introduced for a treatment time of 100 to 150 seconds (e.g., 100 seconds, 110 seconds, 120 seconds, 130 seconds, 140 seconds, 150 seconds, etc.).

[0053] In some embodiments, the preparation of the groove protective layer further includes: after obtaining the first protective layer, introducing fluorinated cycloalkane to form a second protective layer on the surface of the first protective layer and the P3 groove. The fluorinated cycloalkane will generate (CF 2 )n long-chain polymers, which have excellent chemical stability and hydrophobicity, can be deposited on the side walls and bottom of the groove, effectively preventing environmental water vapor from invading the interior of the device and improving the overall stability of the battery.

[0054] In some embodiments, the fluorocycloalkane comprises C 4 F 8 The flow ratio of fluorocycloalkane to diluent gas is 1:(3-5), such as 1:3, 1:4, 1:5, etc. The fluorocycloalkane and diluent gas have a suitable flow ratio to ensure the formation of uniform and stable fluorinated carbon polymers.

[0055] In some embodiments, after the etching gas and carbonyl sulfide are stopped, fluorocycloalkane is introduced under the condition that the RF power is 150-250 W (eg, 150 W, 200 W, or 250 W).

[0056] In some embodiments, the treatment time using fluorocycloalkane is 100-150 s, for example, 100 s, 120 s, 130 s, 150 s, etc.

[0057] In some embodiments, the preparation of the composite functional layer specifically includes: making a P1 groove on the surface of the substrate layer, and then washing and drying; sequentially preparing a first charge transport layer, a perovskite layer, and a second charge transport layer on the surface of one side of the substrate layer having the P1 groove, and the first charge transport layer and the second charge transport layer are respectively prepared by a deposition method, and the perovskite layer is prepared by coating a precursor solution of the perovskite layer on the surface of the first charge transport layer, and then annealing at 100-140°C for 5-30 minutes, and cooling to obtain a perovskite layer. Make a P2 groove that runs through the second charge transport layer, the perovskite layer, and the first charge transport layer in sequence; prepare an electrode layer on the surface of the second charge transport layer and in the P2 groove, and the electrode layer can be sputtered.

[0058] In some implementations, the method further includes: performing P4 scribing after the groove protection layer is prepared.

[0059] The following is further explained in conjunction with specific embodiments and comparative examples.

[0060] Example 1 A perovskite battery, such as Figure 1 As shown, it includes a substrate layer 1, a composite functional layer 2, an electrode layer 3, an interface protection layer 4, a groove protection layer 5, a P1 groove 6, a P2 groove 7 and a P3 groove 8; the composite functional layer 2 and the electrode layer 3 are arranged between the substrate layer 1 and the interface protection layer 4, and the interface protection layer 4 is located on the surface of the electrode layer 3, and the composite functional layer 2 is located on the surface of the substrate layer 1. The substrate layer 1 is provided with a P1 groove 6 with an opening toward the first charge transport layer 201. The composite functional layer 2 includes a first charge transport layer 201, a perovskite layer 202 and a second charge transport layer 203 which are stacked in sequence, the first charge transport layer 201 is in contact with the substrate layer 1, and the second charge transport layer 203 is in contact with the electrode layer 3. The P2 groove 7 sequentially penetrates the second charge transport layer 203, the perovskite layer 202 and the first charge transport layer 201. The electrode layer 3 has an extension section, which penetrates the P2 groove 7 and contacts the substrate layer 1. The P3 groove 8 runs through the interface protection layer 4, the electrode layer 3 and the composite functional layer 2 in sequence; the interface protection layer 4 includes an organic polymer, and a plasma etching area is provided in the interface protection layer 4 near the P3 groove 8; the groove protection layer 5 includes a first protection layer located on a part of the side wall of the P3 groove 8, and a second protection layer located on the surface of the first protection layer and the surface of the P3 groove 8, the first protection layer includes a reactant of carbonyl sulfide and an organic polymer; the second protection layer includes a fluorinated carbon polymer.

[0061] The method for preparing the perovskite battery in this embodiment comprises the following steps: (1) Laser P1 lines were scribed on the surface of the base layer 1 (ITO) with a size of 1.2m*2m, and the surface was cleaned with pure water and dried. The thickness of the base layer 1 was 400nm.

[0062] (2) Preparing a composite functional layer 2 on the base layer 1 in sequence, including: Nickel oxide is deposited on the surface of the base layer 1 by PVD to obtain a first charge transport layer 201 (hole transport layer) with a thickness of 20 nm.

[0063] Methylammonium chloride, formamidine iodide and lead iodide powders in a molar ratio of 1:10.5:16 are dissolved in a DMF (N,N-dimethylformamide) solvent, and the mixture is stirred and mixed to obtain a precursor solution. The precursor solution is spin-coated on the surface of the first charge transport layer 201, heated to 130°C, maintained for 10 minutes, and naturally cooled to room temperature to obtain a perovskite layer 202. The thickness of the perovskite layer 202 is 550 nm.

[0064] A second charge transport layer 203 is prepared on the surface of the perovskite layer 202 . The material of the second charge transport layer 203 is C60, and the thickness is 60 nm.

[0065] (3) Performing a laser P2 scribing process to fabricate a P2 groove 7 that sequentially penetrates the second charge transport layer 203 , the perovskite layer 202 , and the first charge transport layer 201 , thereby forming a series of grooves.

[0066] (4) A metal electrode made of Cu is sputtered to form an electrode layer 3 on the surface of the second charge transport layer 203 and in the P2 groove 7. The thickness of the electrode layer 3 is 70 nm.

[0067] (5) Spraying a polymer material solution on the surface of the electrode layer 3, the polymer material solution including polyurethane acrylate and glycol ether, heating and curing at 120°C for 3 minutes to form an organic protective layer with a thickness of 50 nm.

[0068] (6) Performing a laser P3 line scribing process to produce a P3 groove 8 that penetrates the organic protective layer, the electrode layer 3 and the composite functional layer 2 to form a partition line groove.

[0069] (7) Place the sample after preparation of P3 groove 8 into the plasma equipment, introduce dilution gas Ar, and introduce etching gas CO 2 , the flow ratio of dilution gas to etching gas is 1:3, the RF power is 600W, the frequency is 55MHz, and the processing time is 120s, so that the organic protective layer produces gas through a certain etching reaction; at this time, COS gas is introduced, with a flow ratio of 1:4 to the dilution gas, and the processing time is 120s, so that it forms a stable chemical bond with the C atoms in the organic matter, thereby attaching to the side wall of the P3 groove 8 to form the first protective layer; then the RF power is adjusted to 200W, and the CO is stopped.2 and COS gas, pass into C 4 F 8 Gas, C 4 F 8 The gas to dilution gas flow ratio is 1:4, and the processing time is 120s, so that C 4 F 8 Gas ionization produces an appropriate amount of (CF 2 )n long-chain polymer further adheres to the side wall and bottom of the wire groove to form a second protective layer to obtain a groove protective layer 5.

[0070] (8) Then carry out the P4 process to obtain the perovskite battery.

[0071] Example 2 A method for preparing a perovskite battery, which differs from Example 1 in that: The polymer material is polyester acrylate.

[0072] Example 3 A method for preparing a perovskite battery, which differs from Example 1 in that: The polymer materials are epoxy acrylate and polyether acrylate.

[0073] Example 4 A method for preparing a perovskite battery, which differs from Example 1 in that: The flow ratio of the dilution gas to the etching gas is 2:5, and the processing time is 100 s; the flow ratio of the COS gas to the dilution gas is 1:3, and the processing time is 100 s.

[0074] Example 5 A method for preparing a perovskite battery, which differs from Example 1 in that: The flow ratio of the dilution gas to the etching gas is 2:5, and the processing time is 150 s; the flow ratio of the COS gas to the dilution gas is 1:5, and the processing time is 100 s.

[0075] Example 6 A method for preparing a perovskite battery, which differs from Example 1 in that: During the plasma etching process, the RF power was 700 W and the frequency was 60 MHz.

[0076] Example 7 A method for preparing a perovskite battery, which differs from Example 1 in that: C 4 F 8 The flow ratio of gas to dilution gas is 1:3.

[0077] Example 8 A method for preparing a perovskite battery, which differs from Example 1 in that: C 4 F 8 The flow ratio of gas to dilution gas is 1:5.

[0078] Comparative Example 1 A method for preparing a perovskite battery, which differs from Example 1 in that: The groove protection layer 5 is not prepared.

[0079] Comparative Example 2 A method for preparing a perovskite battery, which differs from Example 1 in that: The surface of the electrode layer is not subjected to the step of coating the polymer material solution, and P3 scribing is directly completed.

[0080] Experimental example The perovskite cells of each embodiment were subjected to performance tests, and the test results are shown in Table 1.

[0081] Table 1 Performance test results

[0082] The preparation method of the perovskite battery of the present invention prepares an organic protective layer on the surface of the electrode layer, which can reduce the influence of the thermal effect in P3 laser scribing, and the dust generated in the process is not easy to accumulate on the surface of the device, effectively reducing the edge collapse and overlap morphology of the line groove; plasma etching is used after the P3 process to relatively flatten the protective layer at the edge of the line groove, and carbonyl sulfide treatment is performed to form a first protective layer on part of the side wall of the P3 groove; and then a passivation process is performed, C 4 F 8 The gas will produce fluorinated carbon polymers, which have excellent chemical stability and hydrophobicity. They can be deposited on the side walls and bottom of the P3 groove, effectively preventing environmental water vapor from invading the device structure, thereby improving the overall stability of the battery.

[0083] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A perovskite battery, characterized in that: It comprises a base layer, a composite functional layer, an electrode layer, an interface protection layer, a groove protection layer and a P3 groove; the composite functional layer and the electrode layer are arranged between the base layer and the interface protection layer, and the interface protection layer is located on the surface of the electrode layer, and the composite functional layer is located on the surface of the base layer; the P3 groove runs through the interface protection layer, the electrode layer and the composite functional layer in sequence; The interface protection layer includes an organic polymer; The groove protection layer includes a first protection layer located on a sidewall of the P3 groove portion, wherein the first protection layer includes a reactant of carbonyl sulfide and the organic polymer.

2. The perovskite battery according to claim 1, characterized in that: The organic polymer includes a cross-linked product of a polymer material, and the polymer material includes at least one of polyurethane acrylate, epoxy acrylate, acrylate, polyester acrylate, polyether acrylate, polyolefinic acid, and polyol compounds.

3. The perovskite battery according to claim 1, characterized in that: The groove protection layer also includes a second protection layer, which is located on the surface of the first protection layer and the surface of the P3 groove; the second protection layer includes a fluorinated carbon polymer.

4. The perovskite battery according to claim 1, characterized in that: The composite functional layer comprises a first charge transport layer, a perovskite layer and a second charge transport layer which are stacked in sequence, the first charge transport layer is in contact with the substrate layer, and the second charge transport layer is in contact with the electrode layer; The perovskite cell further includes a P2 slot, which sequentially runs through the second charge transport layer, the perovskite layer and the first charge transport layer; The electrode layer has an extension section, and the extension section runs through the P2 groove and contacts the base layer; The base layer is provided with a P1 groove opening toward the first charge transport layer.

5. A method for preparing a perovskite battery, characterized in that: The perovskite cell according to any one of claims 1 to 4, comprising the following steps: sequentially preparing a composite functional layer and an electrode layer on the substrate layer; Coating a polymer material solution on the surface of the electrode layer to form an organic protective layer after curing; Making a P3 groove penetrating the organic protective layer, the electrode layer and the composite functional layer; Plasma etching is performed on the organic protective layer near the P3 groove to form an interface protective layer; carbonyl sulfide is introduced during the plasma etching process to form a first protective layer on a portion of the sidewall of the P3 groove to obtain a groove protective layer.

6. The method for preparing a perovskite battery according to claim 5, characterized in that: The polymer material solution includes a polymer material and an organic solvent.

7. The method for preparing a perovskite battery according to claim 5, characterized in that: Contains at least one of the following features (1) to (4): (1) The plasma etching includes a dilution gas and an etching gas, and the flow ratio of the dilution gas to the etching gas is (1-2):(3-5); (2) The flow ratio of the carbonyl sulfide and the dilution gas is 1:(3-5); (3) The radio frequency power of the plasma etching is 500-700W, and the radio frequency is 50-60MHz; (4) After the plasma etching is performed for 60 to 150 seconds, the carbonyl sulfide is introduced for a treatment time of 100 to 150 seconds.

8. The method for preparing a perovskite battery according to claim 5, characterized in that: The preparation of the groove protection layer also includes: after obtaining the first protection layer, introducing fluorinated cycloalkane to form a second protection layer on the surface of the first protection layer and the P3 groove.

9. The method for preparing a perovskite battery according to claim 8, characterized in that: Contains at least one of the following features (1) to (3): (1) The fluorinated cycloalkane includes C4F8, and the flow ratio of the fluorinated cycloalkane to the diluent gas is 1:(3-5); (2) after stopping the etching gas and the carbonyl sulfide, introducing the fluorinated cycloalkane under the condition that the radio frequency power is 150-250W; (3) The treatment time using the fluorinated cycloalkane is 100 to 150 seconds.

10. The method for preparing a perovskite battery according to claim 5, characterized in that: The preparation of the composite functional layer specifically includes: A P1 groove is formed on the surface of the substrate layer, and a first charge transport layer, a perovskite layer, and a second charge transport layer are sequentially formed on one side of the substrate layer having the P1 groove; Making a P2 groove that sequentially penetrates the second charge transport layer, the perovskite layer, and the first charge transport layer; An electrode layer is prepared on the surface of the second charge transport layer and in the P2 groove.

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