Optical element driving mechanism
By designing an optical element driving mechanism with multiple driving parts and movable parts, the problem of difficulty in adapting to different photography needs and insufficient matching in the prior art is solved, and more stable optical quality and broader matching are achieved.
Patent Information
- Application Number
- CN202411634920.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2023-11-17
- Filing Date
- 2024-11-15
- Publication Date
- 2025-05-20
AI Technical Summary
The existing optical element driving mechanism is difficult to adapt to different photography needs, and the matching ability is insufficient, so it cannot provide stable optical quality.
An optical element driving mechanism is designed, including a first movable part, a second movable part, a fixing part, a driving component, a circuit component, a guide rod, a sensing component and a stabilizing component. Through the design of the first driving part and the second driving part, the movement of the driving component drives the movable part to move relative to the fixed part, adapting to different photography needs, and increasing the matching of the optical element driving mechanism and different optical elements.
The stable performance of the optical element driving mechanism under different photography needs is achieved, the matching with different optical elements is enhanced, and more stable optical quality is provided.
Smart Images

Figure CN120020628A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to an optical element driving mechanism, and more particularly to an optical element driving mechanism having a plurality of driving parts and a plurality of movable parts. Background Art
[0002] With the development of technology, many current electronic devices (such as laptop computers, smart phones or digital cameras) have the function of taking pictures or videos. The use of these electronic devices is becoming more and more common. While developing more stable and better optical quality, they are also moving towards convenient and thin-and-light designs to provide users with more choices.
[0003] In view of this, an optical component is needed that can allow adjustment of the optical photography focal length to meet different external photography needs. At the same time, it can be paired with a variety of optical modules to increase practicality. And it has a stable internal structure to provide more stable and better optical quality. Summary of the Invention
[0004] The terms of the embodiments and similar terms (e.g., embodiments, configurations, features, examples, and options) are intended to generally refer to all the subject matter of the present invention and the following claims. Several statement items containing these terms should be understood as not limiting the subject matter described herein or the meaning or scope of the following claims. The embodiments of the present invention covered herein are defined by the following claims, rather than the summary of the invention. This summary of the invention is a high-level overview of various features of the present invention and introduces some concepts more described in the following embodiments section. This summary of the invention is not intended to identify the key or essential features of the claim subject matter, nor is it intended to be used independently to determine the scope of the claim subject matter. The subject matter should be understood by referring to the appropriate parts of the complete specification of the present invention, any or all of the drawings, and each claim.
[0005] The object of the present invention is to provide an optical element driving mechanism to solve at least one of the above problems.
[0006] According to certain features of the present disclosure, an optical element driving mechanism is provided. The optical element driving mechanism includes a first movable part, a fixed part, and a driving component. The first movable part is used to connect a first optical element. The first movable part can move relative to the fixed part. The driving component is used to drive the first movable part to move.
[0007] According to certain features of the present disclosure, the driving component includes a first driving part and a circuit part. The first driving part drives the first movable part to move in a first dimension. The circuit part is electrically connected to the first driving part. The first driving part is electrically connected to a first external circuit via the circuit part.
[0008] The beneficial effects of the present invention are as follows. The present invention provides an optical element driving mechanism, which includes a first movable part, a second movable part, a fixed part, a driving component, a circuit component, a guide rod, a sensing component, and a stabilizing component. The movement of the driving component drives the first movable part and the second movable part to move relative to the fixed part to meet different photographic requirements and provide more stable optical quality. At the same time, through the design of the first driving part and the second driving part, the compatibility of the optical element driving mechanism with different optical elements (such as lenses, aperture modules, etc.) can be increased.
[0009] The above invention content is not intended to present every embodiment or every feature of the present invention. Instead, the foregoing invention content only provides examples of some novel features and characteristics described herein. When combined with the accompanying drawings and the appended claims, the above features and advantages of the present invention and other features and advantages will become apparent from the following detailed description of the representative embodiments and modes for carrying out the present invention. Given the detailed description of the various embodiments with reference to the accompanying drawings and the following simple explanation of the symbols provided, the additional features of the present invention will be apparent to those skilled in the art. BRIEF DESCRIPTION OF THE DRAWINGS
[0010] The present invention and its advantages and the accompanying drawings will be better understood from the following description of exemplary embodiments in conjunction with the reference to the accompanying drawings. These drawings only show exemplary embodiments and should not be considered as limiting the various embodiments or the claims.
[0011] Figure 1 A perspective view of an optical element driving mechanism according to certain features of the present disclosure.
[0012] Figure 2A An exploded perspective view of an exemplary optical element driving mechanism according to certain features of the present disclosure.
[0013] Figure 2B According to certain features of the present disclosure, Figure 2A A schematic diagram of the first driving part and the circuit part of the optical element driving mechanism in
[0014] Figure 3A An exploded perspective view of another exemplary optical element driving mechanism according to certain features of the present disclosure.
[0015] Figure 3B According to certain features of the present disclosure, Figure 3A A perspective view of the first driving part and the circuit part of the optical element driving mechanism in
[0016] Figure 4 A side view of an optical element driving mechanism according to certain features of the present disclosure, where for illustrative purposes, the outer shell is removed and the base is shown in dashed lines.
[0017] Figure 5 A top view of an optical element driving mechanism according to certain features of the present disclosure, where, for illustrative purposes, the housing is removed and the first driving part and the circuit part are shown in dashed lines.
[0018] The reference numerals are as follows:
[0019] 1: Optical element driving mechanism
[0020] 10: First optical element
[0021] 20: Optical module
[0022] 22: Second optical element
[0023] 100: First movable part
[0024] 200: Second movable part
[0025] 210: First groove
[0026] 220: Second groove
[0027] 300: Fixed part
[0028] 310: Housing
[0029] 320: Base
[0030] 322: Accommodating part
[0031] 400: Driving assembly
[0032] 410: First driving part
[0033] 420: Circuit part
[0034] 422: Connecting line
[0035] 430: Second driving part
[0036] 432: Driving magnetic element
[0037] 434: Driving coil
[0038] 500: Electronic component
[0039] 510: First part
[0040] 520: Second part
[0041] 530: Intermediate part
[0042] 600: Guide rod
[0043] 700: Sensing assembly
[0044] 710: Magnetic sensing element
[0045] 720: Sensing element
[0046] 800: Stabilizing component
[0047] 810: Stabilizing magnetic element
[0048] 820, 830: Magnetic conductive elements
[0049] X, Y, Z: Axes Detailed implementation manners
[0050] Multiple embodiments are described with reference to the accompanying drawings, and like reference signs are used throughout the drawings to designate like or equivalent elements. The drawings are not drawn to scale and are provided only to show the features and characteristics of the present disclosure. It should be understood that many specific details, relationships, and methods are set forth to provide a thorough understanding. However, those skilled in the art will readily conceive that the multiple embodiments can be practiced without one or more of the specific details or in other ways. In some cases, well-known structures or operations are not shown in detail for illustrative purposes. The multiple embodiments are not limited to the order of display of actions or events, such as some actions can occur in a different order and / or simultaneously with other actions or events. In addition, not all of the shown actions or events are required to implement certain features and characteristics of the present disclosure.
[0051] For the purposes of this embodiment, unless explicitly stated otherwise, the singular includes the plural and vice versa. The term "comprising" means "including but not limited to". In addition, approximate terms such as "about, almost, substantially, approximately" and their like can herein mean, for example, "at", "near, nearly at", "within 3 - 5% of", "within acceptable manufacturing tolerances" or any of their logical combinations. Additionally, the terms "vertical" or "horizontal" are intended to respectively additionally include "within 3 - 5%" of the vertical or horizontal direction. In addition, directional terms such as "top", "bottom", "left", "right", "above" and "below" are intended to be equivalent to the directions described in the reference drawings; understood from the context of the reference object or element, such as from the normal position of the object or element; or such other descriptions.
[0052] It is understood that although terms such as "first", "second", etc. may be used herein to describe various elements, layers, and / or parts, these elements, layers, and / or parts should not be limited by these terms, and these terms are only used to distinguish different elements, layers, and / or parts. Therefore, a first element, layer, and / or part discussed below may be referred to as a second element, layer, and / or part without departing from the teachings of some embodiments of the present disclosure. Additionally, for the sake of brevity, the terms "first", "second", etc. may not be used in the specification to distinguish different elements. Without departing from the scope defined by the appended claims, the first element and / or the second element recited in the claims may be interpreted as any element that conforms to the description in the specification.
[0053] It should be noted that the technical solutions provided in different embodiments below can be mutually replaced, combined, or used in combination to form another embodiment without violating the spirit of the present disclosure.
[0054] The present disclosure relates to an optical element driving mechanism, which has a driving assembly. The driving assembly has a first driving part and a second driving part, driving a first movable part, a second movable part, and an optical element to move, thereby adjusting the photographic imaging of the optical element driving mechanism to meet different photographic requirements.
[0055] First, please refer to Figures 1 to 2A , Figure 1 FIG. 13 is a perspective view of an optical element driving mechanism 1 according to certain features of the present disclosure.
[0056] Figure 2A FIG. 14 is an exploded perspective view of an exemplary optical element driving mechanism 1 according to certain features of the present disclosure.
[0057] The optical element driving mechanism 1 includes a first movable part 100, a second movable part 200, a fixed part 300, a driving assembly 400, a plurality of electronic components 500, a plurality of guide rods 600, a sensing assembly 700, and a stabilizing assembly 800. The first movable part 100 is used to connect a first optical element 10. The first optical element 10 can be, for example, an optical lens. The first movable part 100 can move relative to the fixed part 300. The driving assembly 400 is used to drive the first movable part 1000 and the second movable part 200 to move. The first movable part 100 and the second movable part 200 can move relative to the fixed part 300.
[0058] Incident light from the outside travels along an incident direction (i.e., the Z-axis direction) through the optical element driving mechanism 1 to reach the first optical element 10. The first optical element 10 is disposed on an optical element driving mechanism 1 and achieves the functions of auto focus (AF) and optical image stabilization (OIS) through the optical element driving mechanism 1.
[0059] The second moving part 200 includes a first groove 210 and a second groove 220. The first groove 210 has a V-shaped configuration and houses one of the guide rods 600. The second groove 220 has a U-shaped configuration and houses the other guide rod of the guide rods 600.
[0060] The fixing part 300 includes a housing 310 and a base 320. The base 320 has a plurality of receiving parts 322 for receiving the guide rods 600. In this embodiment, there are two guide rods 600, so the base 320 also has two receiving parts 322 (the relative movement of the guide rods 600, the second moving part 200, and the base 320 will be described in more detail below with respect to Figure 2A and Figure 5 more details).
[0061] The driving assembly 400 includes a first driving part 410, a circuit part 420, and a second driving part 430. The first driving part 410 drives the first moving part 100 to move in a first dimension. The circuit part 420 is electrically connected to the first driving part 410, and the first moving part 100 is connected to the second moving part 200 through the first driving part 410 and the circuit part 420. When observed along the direction perpendicular to the incident direction of the incident light (i.e., the X and Y axis directions), the first driving part 410 and the circuit part 420 are located between the first moving part 100, the second moving part 200, and the optical module 20. The second driving part 430 drives the second moving part 200 to move in a second dimension.
[0062] In this embodiment, the first driving part 410 is formed of, for example, a shape memory alloy (SMA) material and can change its length by applying a driving signal (such as current) thereto through an external power source (not shown).
[0063] For example, when the driving signal reaches the first driving part 410 via the circuit part 420 and causes the first driving part 410 to heat up, the first driving part 410 can deform and elongate or shorten; when the application of the driving signal is stopped, the first driving part 410 can return to its original length. In other words, by applying an appropriate driving signal, the length of the first driving part 410 can be controlled so that the first driving part 410 drives the first moving part 100 to move relative to the fixing part 300, thereby driving the first optical element 10 to move, and enabling the optical element driving mechanism 1 to have functions of focusing, anti-shake, or shake compensation.
[0064] The circuit unit 420 may be composed of, for example, a reed or a fixed piece. The first driving unit 410 is electrically connected to a first external circuit (not shown, which may be, for example, a circuit output by the first driving unit 410) via the circuit unit 420. The circuit unit 420 has a connection line 422, and the connection line 422 may be, for example, a wire clamping part, a reed formed by a shape memory alloy, etc. The connection line 422 is at least partially fixedly arranged on the first movable part 100.
[0065] The circuit unit 420 can be electrically connected to a second external circuit (not shown) directly or indirectly. For example, it may be a circuit output to another module, such as the optical module described below. The second external circuit is connected to an optical module 20, and this optical module may be, for example, an aperture. The optical module carries a second optical element 22, which may be, for example, a plurality of blades forming an aperture.
[0066] Next, please refer to Figures 2A to 2B . Figure 2B For certain features according to the present disclosure, Figure 2A a schematic diagram of the first driving unit 410 of the optical element driving mechanism 1 and the circuit unit 420 in
[0067] Figures 2A to 2B shows an exemplary configuration of the first driving unit 410 of the optical element driving mechanism 1 and the circuit unit 420 in
[0068] In this embodiment, the first driving unit 410 is located above the first movable part 100. The first driving unit 410 is four wires made of shape memory alloy, each connected to the circuit unit 420. The optical module 20 can be connected to the electronic component 500 via the circuit unit 420.
[0069] A moving mode of this configuration is that the first driving unit 410 receives a driving signal via the circuit unit 420 and deforms, and displaces in the X-axis and Y-axis plane directions. Thus, the first driving unit 410 drives the first movable part 100 to move in the first dimension in the X-axis and Y-axis plane.
[0070] When observing along the incident direction of the incident light (i.e., the Z-axis direction), the housing 310, the first driving unit 410, the first movable part 100, and the base 320 are arranged in sequence.
[0071] Next, please refer to Figures 3A to 3B . Figure 3A An exploded perspective view of another exemplary optical element driving mechanism 1 according to certain features of the present disclosure. Figure 3B For certain features according to the present disclosure, Figure 3A a perspective view of the first driving unit 410 of the optical element driving mechanism 1 and the circuit unit 420 in
[0072] In this embodiment, the first driving part 410 is located between the first movable part 100 and the second movable part 200. The first driving part 410 is composed of eight shape memory alloy wires, each of which is connected to the circuit part 420. In this embodiment, the optical module 20 can be connected to the first driving part 410 via the connection line 422 of the circuit part 420, and then connected to the electronic component 500 via the first driving part 410. Finally, the electronic component 500 is electrically connected to an external driving circuit (not shown) via an insert molding circuit structure (not shown) in the base 320. That is to say, the shape memory alloy of the first driving part 410 is a conductive material.
[0073] One movement mode of this configuration is that the first driving part 410 receives a driving signal via the circuit part 420 and deforms, and expands and contracts in the X-axis and Z-axis plane directions and the Y-axis and Z-axis plane directions respectively, so as to be displaced and rotated. Thus, the first driving part 410 drives the first movable part 100 to move in the first dimension composed of the X-axis, Y-axis, and Z-axis. The first movable part 100 is connected to the second movable part 200 through the first driving part 410 and the circuit part 420. When observing along the incident direction of the incident light (i.e., the Z-axis direction), the first driving part 410 and the circuit part 420 are located between the first movable part 100 and the second movable part 200.
[0074] The second driving part 430 is located between the second movable part 200 and the fixed part 300. The second driving part 430 includes a plurality of driving magnetic elements 432 and a plurality of driving coils 434.
[0075] In this embodiment, there are two driving magnetic elements 432 and two driving coils 434. The driving magnetic elements 432 are arranged on the base 320 of the fixed part 300. The driving coils 434 are arranged on the second movable part 200. In other embodiments, the driving magnetic elements 432 can also be arranged on the second movable part 200. The driving coils 434 can also be arranged on the fixed part 300.
[0076] Through the electromagnetic driving force generated between the driving magnetic element 432 and the driving coil 434, the driving coil 434 moves relative to the driving magnetic element 432 in the second dimension. In this embodiment, the second dimension is the Z-axis direction. Thus, the second movable part 200 moves relative to the base 320 of the fixed part 300, and the second movable part 200 drives the movement of the first movable part 100, the first optical element 10, and the second optical element 22. Therefore, through the electromagnetic driving force generated between the driving magnetic element 432 and the driving coil 434, the second movable part 200 can be driven to drive the first movable part 100, the first optical element 10, and the second optical element 22 to move in the second dimension relative to the base 320 of the fixed part 300.
[0077] The electronic component 500 includes a first part 510, a second part 520, and an intermediate part 530. The first part 510 is connected to the base 320 of the fixing part 300. The second part 520 is connected to the second movable part 200. The intermediate part 530 is made of a flexible material, has a bent shape, and spans the base 320 of the fixing part 300 to connect the base 320 of the fixing part 300 and the second movable part 200.
[0078] Next, please refer to Figure 4 . Figure 4 A side view of the optical element driving mechanism 1 according to certain features of the present disclosure, wherein for illustrative purposes, the housing 310 is removed, and the base 320 is shown in dashed lines.
[0079] The first part 510 has a height H1, and the second part 520 has a height H2. The height H2 of the second part 520 is less than the height H1 of the first part 510. When the second movable part 200 is driven by the driving component 300 to move, the second part 520 connected to the second movable part 200 moves along with the second movable part 200. The intermediate part 530 bends and moves between the first part 510 and the second part 520. The movement range of the second part 520 does not exceed the height H1 of the first part 510. That is, the maximum movement range of the second part 520 does not exceed the first part 510.
[0080] Next, please refer to both Figure 2A and Figure 5 . Figure 5 A top view of the optical element driving mechanism 1 according to certain features of the present disclosure, wherein for illustrative purposes, the housing 310 is removed, and the first driving part 410 and the circuit part 420 are shown in dashed lines.
[0081] In this embodiment, two guide rods 600 are included. The guide rods 600 are movably connected to the second movable part 200 and the base 320 of the fixing part 300. The guide rods 600 are disposed between the second movable part 200 and the base 320, adjacent to the stable magnetic element 810 and the magnetic conductive element 820 of the stable component 800.
[0082] More specifically, one guide rod 600 is disposed between the first groove 210 of the second movable part 200 and the receiving part 322 of the base 320, and the other guide rod 600 is disposed between the second groove 220 of the second movable part 200 and the other receiving part 322 of the base 320.
[0083] When the second movable part 200 is driven by the driving component 300 to move, the guide rod 600 moves between the base 320 and the second movable part 200. The V-shaped first groove 210 enables the guide rod 600 to slide in the Z-axis direction between it and the receiving part 322. The U-shaped second groove 220 enables the guide rod 600 to roll in the X-axis direction in addition to sliding in the Z-axis direction between it and the receiving part 322, so as to adjust the relative position between the second movable part 200 and the base 320. Therefore, the guide rod 600 enables the second movable part 200 to move smoothly relative to the base 320.
[0084] It should be noted that in this configuration, the second movable part 200 is a polygonal structure. In this embodiment, the second movable part 200 can be a rectangle, and the position of the guide rod 600 is not suitable to be located at the corner of the rectangular second movable part 200 because it is not conducive to the movement of the guide rod 600.
[0085] The sensing component 700 includes a sensing magnetic element 710 (please refer to Figure 2A ) and a sensing element 720. The sensing magnetic element 710 is arranged on the second movable part 200. The sensing element 720 is arranged on the base 320 of the fixed part 300, corresponding to the sensing magnetic element 710. The sensing magnetic element 710, the sensing element 720 and the first groove 210 are located on the same side of the second movable part 200.
[0086] Due to the V-shaped shape of the first groove 210, the relative position between the second movable part 200 and the base 320 at the first groove 210 is more stable than the relative position between the second movable part 200 and the base 320 at the second groove 220. Therefore, the sensing magnetic element 710 and the sensing element 720 are arranged on the same side as the first groove 210, which can make the sensing signal of the sensing element 720 more stable when sensing the first magnetic element 310.
[0087] Next, please continue to refer to Figure 2A and Figure 5 . The stabilizing component 800 includes a plurality of stabilizing magnetic elements 810, a plurality of magnetic conductive elements 820 and a plurality of magnetic conductive elements 830.
[0088] In this embodiment, it includes two stabilizing magnetic elements 810 and two magnetic conductive elements 820. The stabilizing magnetic elements 810 are arranged on the second movable part 200. The magnetic conductive elements 820 are arranged on the base 320. The stabilizing magnetic elements 810 correspond to the magnetic conductive elements 820. The stabilizing magnetic elements 810 and the magnetic conductive elements 820 provide a magnetic suction force in the Y-axis direction for the second movable part 200, so that the second movable part 200 abuts against the guide rod 600, and thus can move stably relative to the base 320.
[0089] In this embodiment, there are two magnetic conduction elements 830. The magnetic conduction elements 830 are arranged on the outer shell 310 and correspond to driving the magnetic element 432. The magnetic conduction elements 830 provide additional magnetic suction force for the second movable part 200 to stabilize the structure.
[0090] In summary, the present invention provides an optical element driving mechanism, which includes a first movable part, a second movable part, a fixed part, a driving component, a circuit component, a guide rod, a sensing component and a stabilizing component. The movement of the driving component drives the first movable part and the second movable part to move relative to the fixed part to meet different photography requirements and provide more stable optical quality. At the same time, through the design of the first driving part and the second driving part, the compatibility of the optical element driving mechanism with different optical elements (such as lenses, aperture modules, etc.) can be increased.
[0091] Moreover, the structural design of the first movable part and the second movable part can cooperate with lenses of different sizes, so that the circuit design for driving the first movable part, the second movable part and the aperture component can be integrated with the circuit of the aperture module, simplifying the design of the control circuit.
[0092] Although the embodiments of the present invention have been shown and described with respect to one or more embodiments, those skilled in the art will conceive of equivalents and modifications after reading and understanding this specification and the drawings. Additionally, although a particular feature of the present invention may have been invented with respect to only one of several embodiments, for any given or particular application, such feature, as may be desired and advantageous, may be combined with one or more other features of one or more other embodiments.
[0093] Although various embodiments of the present invention have been described above, it should be understood that they are presented by way of example only and not by way of limitation. Without departing from the spirit or scope of the present invention, various changes can be made in accordance with the embodiments of the present invention as disclosed herein. Therefore, the breadth and scope of the present invention should not be limited by any of the above embodiments. On the contrary, the scope of the present invention should be defined by the following claims and their equivalents.
[0094] The terms used herein are for the purpose of describing particular embodiments only and are not intended to limit the present invention. The singular forms "a", "an" and "the" used herein are also intended to include the plural forms unless the context clearly indicates otherwise. In addition, the terms "including", "having", "has" or their variants used in the embodiments and / or claims are intended to be included in a manner similar to the term "comprising".
Claims
1. An optical element driving mechanism, comprising: A first movable portion, used to connect a first optical element; a fixed portion, the first movable portion being movable relative to the fixed portion; A driving assembly is used to drive the first movable part to move.
2. The optical element driving mechanism as claimed in claim 1, wherein the driving assembly comprises: a first driving part, driving the first movable part to move in a first dimension; as well as A circuit unit is electrically connected to the first driving unit, wherein the first driving unit is electrically connected to a first external circuit via the circuit unit. 3 . The optical element driving mechanism as claimed in claim 2 , wherein the first driving portion is located above the first movable portion. 4 . The optical element driving mechanism as claimed in claim 2 , wherein the circuit portion has a connecting circuit, and the connecting circuit is at least partially fixedly disposed on the first movable portion. 5 . The optical element driving mechanism as claimed in claim 4 , wherein the circuit portion is electrically connected to a second external circuit, the second external circuit is connected to an optical module, and the optical module carries a second optical element.
6. The optical element driving mechanism as described in claim 2 further comprises a second movable portion, wherein the driving assembly comprises a second driving portion, driving the second movable portion to move in a second dimension. 7 . The optical element driving mechanism as claimed in claim 6 , wherein the second driving portion is located between the second movable portion and the fixed portion.
8. The optical element driving mechanism as claimed in claim 6, further comprising an electronic component, the electronic component comprising: a first portion connected to the fixing portion; a second portion connected to the second movable portion; as well as a middle portion having a bent shape, spanning the fixed portion and connecting the fixed portion and the second movable portion; in When the second movable portion moves, a moving range of the second portion does not exceed the height of the first portion.
9. The optical element driving mechanism as claimed in claim 6, further comprising a plurality of guide rods, wherein the plurality of guide rods are movably connected to the second movable portion and the fixed portion, and the second movable portion comprises: a first groove having a V-shape and accommodating a guide rod among the plurality of guide rods; as well as A second groove having a U-shape, accommodating another guide rod of the plurality of guide rods, wherein The plurality of guide rod positions are not located at corners of the second movable portion.
10. The optical element driving mechanism as claimed in claim 9, further comprising a sensing component, wherein the sensing component comprises: A magnetic sensing element, disposed on the second movable portion; as well as A sensing element, corresponding to the sensing magnetic element, is disposed on the fixing portion, wherein The sensing element, the sensing magnetic element, and the first groove are located on the same side of the second movable portion.