An independent double-chamber electron gun evaporation coating equipment

Abstract

The present invention discloses an independent double-chamber electron gun evaporation coating equipment, which relates to the technical field of coating equipment. It includes an equipment bottom plate, on which an upper chamber and a lower chamber are fixedly installed. A vacuum pump is fixedly installed on the side end face of the equipment bottom plate. The input end of the vacuum pump is fixedly communicated with a discharge pipe, and the end of the discharge pipe far away from the vacuum pump is fixedly communicated with a double-pass pipe. The two ends of the double-pass pipe are respectively communicated with the upper chamber and the lower chamber, and valves are arranged on the pipeline of the double-pass pipe; the internal structures of the upper chamber and the lower chamber are the same. There is a driving component inside the upper chamber, and a crucible and an electron gun are arranged on the driving component; a rotating component is arranged inside the upper chamber. Through the combined use of the driving component, the rotating component and the auxiliary component, the invention optimizes the processes of material heating, evaporation and substrate coating, and effectively improves the coating effect and the overall working efficiency of the equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, and particularly to an independent double-chamber electron gun evaporation coating equipment. Background Art

[0002] An independent double-chamber electron gun evaporation coating equipment is a device for thin film deposition, which is widely used in the fields of optics, electronics, solar energy, etc. Its core principle is to use an electron gun to heat and evaporate the source material to form gaseous substances, and then let these substances deposit on the substrate to form a thin film.

[0003] In the prior art, a Chinese patent with the publication number "CN117127152A" discloses an electron beam evaporation coating equipment and an evaporation coating method. By adopting an optimized design of the electron beam evaporation mechanism, the crucible serving as the coating raw material has a large volume and can hold more evaporation materials, which is suitable for continuous evaporation coating processes. By adopting the method of an assembly base + fixed structure, the structural stability is improved, the evaporation coating process efficiency is increased, the optimization of the electron beam evaporation mechanism is realized, and the problems of the smaller volume of the existing crucible and the instability of the whole coating equipment are solved.

[0004] Currently, during the process of coating a substrate, an electron gun evaporation coating equipment is usually used for coating. In the above-described solution, an electron gun is used to dissolve the coating raw material in the crucible, thereby realizing the coating function. However, when the electron gun dissolves the coating raw material in the crucible, since the position of the electron gun is fixed, the electron beam irradiated by the electron gun on the coating raw material will always be at the same position. The coating raw material in the crucible may be locally overheated or unevenly evaporated due to long-term heating. In addition, some existing coating equipment cannot automatically adjust the front and back sides of the substrate during the coating process, resulting in inconsistent evaporation substances in contact with the front and back sides of the substrate, and ultimately resulting in inconsistent coating effects, seriously affecting the coating effect of the substrate. Summary of the Invention

[0005] In view of the deficiencies of the prior art, the present invention provides an independent double-chamber electron gun evaporation coating equipment, which solves the problems mentioned in the above background art.

[0006] To achieve the above objectives, the present invention is realized through the following technical solutions:

[0007] An independent double-chamber electron gun evaporation coating equipment includes an equipment bottom plate, on which an upper chamber and a lower chamber are fixedly installed. A vacuum pump is fixedly installed on the side end face of the equipment bottom plate. The input end of the vacuum pump is fixedly connected to a discharge pipe, and the end of the discharge pipe away from the vacuum pump is fixedly connected to a double-pass pipe. The two ends of the double-pass pipe are respectively connected to the upper chamber and the lower chamber, and valves are provided on the pipeline of the double-pass pipe.

[0008] The upper chamber has the same internal structure as the lower chamber, a driving assembly is provided inside the upper chamber, and a crucible and an electron gun are provided on the driving assembly;

[0009] A rotating assembly is disposed inside the upper chamber, and the substrate is turned over on the front and back sides by the rotating assembly.

[0010] Preferably, the driving assembly includes a driving motor fixedly mounted on the bottom of the upper chamber, a driving shaft fixedly mounted on the output end of the driving motor, a placement plate fixedly mounted on the end of the driving shaft away from the driving motor, a driving gear fixedly mounted on the driving shaft, and two symmetrically arranged auxiliary shafts are rotatably mounted on the inner bottom of the upper chamber.

[0011] Preferably, a left gear and a right gear are fixedly mounted on the two auxiliary shafts respectively, a lower annular groove is provided on the inner side surface of the upper chamber, an annular plate is rotatably mounted inside the lower annular groove, an annular block is fixedly mounted on the lower end surface of the annular plate, a first gear set is fixedly mounted on the inner side surface of the annular block, a symmetrically arranged L-shaped frame plate is fixedly mounted on the annular plate, an auxiliary component is provided on the auxiliary component, and a mounting ring is provided on the auxiliary component.

[0012] Preferably, the placement plate is located inside the annular plate, the driving gear meshes with the left gear and the right gear, the first gear set meshes with the left gear and the right gear, the crucible is mounted on the placement plate, and the electron gun is fixedly mounted inside the mounting ring.

[0013] Preferably, the rotating assembly includes a connecting plate fixedly mounted on an L-shaped frame plate, a mounting block is fixedly mounted on the top end of the connecting plate, a bearing is fixedly mounted on the side end surface of the mounting block, an electric push rod is fixedly mounted on the bearing, and a clamping plate is fixedly mounted on the output shaft of the electric push rod.

[0014] Preferably, an auxiliary gear is fixedly mounted on the electric push rod, an auxiliary ring is fixedly mounted on the inner top of the upper chamber, two sets of second gear sets are fixedly mounted on the auxiliary ring, an upper annular groove is opened on the inner side surface of the upper chamber, and an arc block is fixedly mounted on the outer side surface of the mounting block.

[0015] Preferably, the auxiliary gear is meshed with the second gear set, and the arc block is movably mounted inside the upper annular groove.

[0016] Preferably, the auxiliary component comprises a positioning groove provided on the L-shaped frame plate, a rotation groove is provided on the inner side of the positioning groove, a rotation shaft is fixedly installed on the mounting ring, a torsion spring is fixedly connected to the mounting ring, and a round head is fixedly installed on the tail end of the electron gun.

[0017] Preferably, an arc-shaped convex block is fixedly installed on the inner side surface of the upper chamber. A push rod is slidably installed on the connecting plate. One end of the push rod is fixedly installed with a pressure-receiving arc block, and the other end of the push rod is fixedly installed with a push plate. A positioning ring is fixedly installed on the push rod, and a spring is fixedly connected to the positioning ring.

[0018] Preferably, the end of the rotating shaft away from the mounting ring is rotatably connected inside the rotating groove. The end of the torsion spring away from the mounting ring is fixedly connected inside the rotating groove. The position of the torsion spring is outside the rotating shaft. The end of the spring away from the positioning ring is fixedly connected to the connecting plate, and the spring is outside the push rod.

[0019] The present invention provides an independent double-chamber electron gun evaporation coating device. Compared with the prior art, it has the following beneficial effects:

[0020] 1. In the present invention, the driving motor drives the placing plate on the driving shaft to rotate, and the crucible on the placing plate will rotate. When the driving shaft rotates, it will drive the driving gear to rotate. By using the cooperation of the driving gear with the left gear and the right gear, and the cooperation of the first gear set on the annular block with the left gear and the right gear, the annular plate is limited by the lower annular groove and rotates in the opposite direction to the placing plate around the driving shaft. The electron gun on the annular plate will move synchronously. This rotation method in the opposite direction not only helps the coating raw materials in the crucible to dissolve evenly, but also enables the contact angle between the electron gun and the crucible to continuously change, so that the coating raw materials are heated more evenly under the heating conditions in different directions.

[0021] 2. In the present invention, when the annular plate rotates, it will drive the mounting block on the connecting plate to rotate. The mounting block will rotate around the driving shaft limited by the upper annular groove. The electric push rod on the mounting block will cooperate with the two second gear sets on the auxiliary ring through the auxiliary gear and the cooperation of the electric push rod with the bearing, so as to adjust the front and back sides of the substrate on the clamping plate, ensuring that the coating quality on both the front and back sides of the substrate is consistent, and effectively improving the coating effect of the coating device.

[0022] 3. In the present invention, when the electron gun rotates following the L-shaped frame plate, the push rod on the connecting plate will cooperate with the arc-shaped convex block through the pressure-receiving arc block and the reaction force of the spring on the positioning ring, so that the push plate on the push rod will repeatedly push the round head on the electron gun. At the same time, the electron gun will change its angle around the rotating shaft through the action of the rotating shaft and the torsion spring on the mounting ring. By changing the angle of the electron gun, the electron beam emitted by the electron gun can irradiate different areas of the coating raw materials, ensuring the uniform evaporation of the coating raw materials in the crucible.

[0023] 4. In the present invention, through the combined use of the driving component, the rotating component and the auxiliary component, the processes of material heating, evaporation and substrate coating are optimized, effectively improving the coating effect of the equipment and the overall working efficiency. Description of the Drawings

[0024] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0025] Figure 2 It is a schematic diagram of the internal structure of the present invention;

[0026] Figure 3 It is a sectional view of the present invention;

[0027] Figure 4 It is a schematic diagram of the structure of the rotating component in the present invention;

[0028] Figure 5 It is a schematic diagram of the structure of the driving component in the present invention;

[0029] Figure 6 It is a schematic diagram of the structure of the mounting block in the present invention;

[0030] Figure 7 It is a sectional view of the connecting plate in the present invention;

[0031] Figure 8 It is a sectional view of the L-shaped frame plate in the present invention.

[0032] In the figure: 1, equipment bottom plate; 2, upper chamber; 3, lower chamber; 4, vacuum pump; 5, discharge pipe; 6, through pipe; 7, valve; 8, crucible; 9, electron gun; 10, drive motor; 11, drive shaft; 12, placement plate; 13, drive gear; 14, auxiliary shaft; 15, left gear; 16, right gear; 17, lower annular groove; 18, annular plate; 19, annular block; 20, first gear set; 21, L-shaped frame plate; 22, mounting ring; 23, connecting plate; 24, mounting block; 25, bearing; 26, electric push rod; 27, clamping plate; 28, auxiliary gear; 29, auxiliary ring; 30, second gear set; 31, upper annular groove; 32, arc-shaped block; 33, positioning groove; 34, rotating groove; 35, rotating shaft; 36, torsion spring; 37, round head; 38, arc-shaped convex block; 39, push rod; 40, pressure-receiving arc block; 41, push plate; 42, positioning ring; 43, spring. Detailed Embodiments

[0033] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0034] Please refer to Figure 1-8 , the present invention is an independent double-chamber electron gun 9 evaporation coating device, including a device bottom plate 1. An upper chamber 2 and a lower chamber 3 are fixedly installed on the device bottom plate 1. A vacuum pump 4 is fixedly installed on the side end surface of the device bottom plate 1. An exhaust pipe 5 is fixedly connected to the input end of the vacuum pump 4. One end of the exhaust pipe 5 far from the vacuum pump 4 is fixedly connected to a double-pass pipe 6. Both ends of the double-pass pipe 6 are respectively connected to the upper chamber 2 and the lower chamber 3. Valves 7 are arranged on the pipelines of the double-pass pipe 6. The internal structures of the upper chamber 2 and the lower chamber 3 are the same. There is a driving component inside the upper chamber 2. A crucible 8 and an electron gun 9 are arranged on the driving component. Chamber doors are arranged on both the upper chamber 2 and the lower chamber 3. By opening the valves 7 simultaneously or individually, it is convenient to use the upper chamber 2 and the lower chamber 3. And the crucible 8 is used to place coating raw materials, and the coating raw materials in the crucible 8 are dissolved by the electron rays emitted by the electron gun 9. Since this technology is well-known to those skilled in the art, no specific description will be given here;

[0035] The driving component includes a driving motor 10 fixedly installed at the inner bottom of the upper chamber 2. The output end of the driving motor 10 is fixedly installed with a driving shaft 11. One end of the driving shaft 11 far from the driving motor 10 is fixedly installed with a placement plate 12. A driving gear 13 is fixedly installed on the driving shaft 11. Two symmetrically arranged auxiliary shafts 14 are rotatably installed at the inner bottom of the upper chamber 2. A left gear 15 and a right gear 16 are respectively fixedly installed on the two auxiliary shafts 14. A lower annular groove 17 is opened on the inner side surface of the upper chamber 2. An annular plate 18 is rotatably installed inside the lower annular groove 17. An annular block 19 is fixedly installed on the lower end surface of the annular plate 18. A first gear set 20 is fixedly installed on the inner side surface of the annular block 19. Symmetrically arranged L-shaped support plates 21 are fixedly installed on the annular plate 18. An auxiliary component is arranged on the L-shaped support plate 21. An installation ring 22 is arranged on the auxiliary component. The placement plate 12 is located inside the annular plate 18. The driving gear 13 meshes with the left gear 15 and the right gear 16. The first gear set 20 meshes with the left gear 15 and the right gear 16. The crucible 8 is installed on the placement plate 12. The electron gun 9 is fixedly installed inside the installation ring 22. Among them, the annular plate 18 can rotate stably inside the upper chamber 2 through the limitation of the lower annular groove 17. And according to the needs of personnel, a top column can be arranged below the annular plate 18. The end of the top column is a ball. Through the cooperation of the top column and the ball, the normal rotation of the annular plate 18 is ensured.

[0036] In this embodiment, the driving motor 10 drives the placing plate 12 on the driving shaft 11 to rotate, and the crucible 8 on the placing plate 12 will rotate. When the driving shaft 11 rotates, it will drive the driving gear 13 to rotate. By utilizing the cooperation between the driving gear 13 and the left gear 15 and the right gear 16, as well as the cooperation between the first gear set 20 on the annular block 19 and the left gear 15 and the right gear 16, the annular plate 18 is limited by the lower annular groove 17 and rotates in the opposite direction to the placing plate 12 with the driving shaft 11 as the center. The electron gun 9 on the annular plate 18 will move synchronously. This rotation method in the opposite direction not only helps the coating raw materials in the crucible 8 to dissolve evenly, but also enables the contact angle between the electron gun 9 and the crucible 8 to continuously change, so that the coating raw materials are heated more evenly under the heating conditions in different directions.

[0037] A rotating assembly is arranged inside the upper chamber 2, and the substrate is turned over on both sides through the rotating assembly. The rotating assembly includes a connecting plate 23 fixedly installed on the L-shaped frame plate 21. The top end of the connecting plate 23 is fixedly installed with a mounting block 24. The side end face of the mounting block 24 is fixedly installed with a bearing 25. An electric push rod 26 is fixedly installed on the bearing 25. The output shaft of the electric push rod 26 is fixedly installed with a clamping plate 27. An auxiliary gear 28 is fixedly installed on the electric push rod 26. Two groups of second gear sets 30 are fixedly installed on the auxiliary ring 29 fixed to the inner top of the upper chamber 2. An upper annular groove 31 is formed on the inner side face of the upper chamber 2. An arc-shaped block 32 is fixedly installed on the outer side face of the mounting block 24. The auxiliary gear 28 meshes with the second gear sets 30. The arc-shaped block 32 is movably installed inside the upper annular groove 31. A round through groove is formed in the mounting block 24, and the electric push rod 26 is rotatably installed with the mounting block 24 through the round through groove to ensure that the substrate clamped by the clamping plate 27 can rotate normally.

[0038] In this embodiment, when the annular plate 18 rotates, it will drive the mounting block 24 on the connecting plate 23 to rotate. The mounting block 24 will rotate with the driving shaft 11 as the center under the limitation of the upper annular groove 31. The electric push rod 26 on the mounting block 24 will cooperate with the two groups of second gear sets 30 on the auxiliary ring 29 through the auxiliary gear 28, and cooperate with the bearing 25, so as to adjust the front and back sides of the substrate on the clamping plate 27, ensure that the coating quality on both the front and back sides of the substrate is consistent, and effectively improve the coating effect of the coating equipment.

[0039] The auxiliary component includes a positioning groove 33 formed in the L-shaped frame plate 21. A rotating groove 34 is formed in the inner side surface of the positioning groove 33. A rotating shaft 35 is fixedly installed on the mounting ring 22. A torsion spring 36 is fixedly connected to the mounting ring 22. A circular head 37 is fixedly installed at the tail end of the electron gun 9. An arc-shaped convex block 38 is fixedly installed on the inner side surface of the upper chamber 2. A push rod 39 is slidably installed on the connecting plate 23. A pressure-receiving arc block 40 is fixedly installed at one end of the push rod 39. A push plate 41 is fixedly installed at the other end of the push rod 39. A positioning ring 42 is fixedly installed on the push rod 39. A spring 43 is fixedly connected to the positioning ring 42. The end of the rotating shaft 35 away from the mounting ring 22 is rotatably connected inside the rotating groove 34. The end of the torsion spring 36 away from the mounting ring 22 is fixedly connected inside the rotating groove 34. The torsion spring 36 is located outside the rotating shaft 35. The end of the spring 43 away from the positioning ring 42 is fixedly connected to the connecting plate 23. The spring 43 is located outside the push rod 39. Among them, the pressure-receiving convex block is located outside the connecting plate 23, and the push plate 41 is located inside the connecting plate 23. The frictional force between the push plate 41 and the circular head 37 is small, effectively improving the service life of the push plate 41 and the circular head 37.

[0040] In this embodiment, when the electron gun 9 rotates following the L-shaped frame plate 21, the push rod 39 on the connecting plate 23 will, through the cooperation of the pressure-receiving arc block 40 and the arc-shaped convex block 38, and the reaction force of the spring 43 on the positioning ring 42, cause the push plate 41 on the push rod 39 to repeatedly push the circular head 37 on the electron gun 9. At the same time, the electron gun 9 will, through the action of the rotating shaft 35 and the torsion spring 36 on the mounting ring 22, change the angle with the rotating shaft 35 as the center. By changing the angle of the electron gun 9, the electron beam emitted by the electron gun 9 can irradiate different areas of the coating raw material, ensuring the uniform evaporation of the coating raw material in the crucible 8.

[0041] Working principle:

[0042] During use, open the chamber door, then fix the substrate to be coated in position through the clamping plate 27, then put the coating raw material into the crucible 8, and then close the chamber door. Through the action of the vacuum pump 4, the upper chamber 2 or the lower chamber 3 is in a coating environment;

[0043] Then, the driving motor 10 drives the placing plate 12 on the driving shaft 11 to rotate, and the crucible 8 on the placing plate 12 will rotate. When the driving shaft 11 rotates, it will drive the driving gear 13 to rotate. By using the cooperation of the driving gear 13 with the left gear 15 and the right gear 16, and the cooperation of the first gear set 20 on the annular block 19 with the left gear 15 and the right gear 16, the annular plate 18 is limited by the lower annular groove 17 and rotates in the opposite direction to the placing plate 12 with the driving shaft 11 as the center. The electron gun 9 on the annular plate 18 will move synchronously. This rotation method in the opposite direction not only helps the coating raw materials in the crucible 8 to dissolve evenly, but also enables the contact angle between the electron gun 9 and the crucible 8 to change continuously, so that the coating raw materials are heated more evenly under the heating conditions in different directions;

[0044] When the electron gun 9 rotates following the L-shaped frame plate 21, the push rod 39 on the connecting plate 23 will, through the cooperation of the pressure-receiving arc block 40 and the arc-shaped convex block 38, and the reaction force of the spring 43 on the positioning ring 42, cause the push plate 41 on the push rod 39 to repeatedly push the round head 37 on the electron gun 9. At the same time, the electron gun 9 will, through the rotating shaft 35 on the mounting ring 22 and the action of the torsion spring 36, change the angle with the rotating shaft 35 as the center. By changing the angle of the electron gun 9, the electron beam emitted by the electron gun 9 can irradiate different areas of the coating raw materials, ensuring the uniform evaporation of the coating raw materials in the crucible 8;

[0045] When the annular plate 18 rotates, it will drive the mounting block 24 on the connecting plate 23 to rotate. The mounting block 24 will rotate with the driving shaft 11 as the center under the limitation of the upper annular groove 31. The electric push rod 26 on the mounting block 24 will, through the cooperation of the auxiliary gear 28 with the two groups of second gear sets 30 on the auxiliary ring 29, and the cooperation of the electric push rod 26 with the bearing 25, further adjust the front and back sides of the substrate on the clamping plate 27, ensuring that the coating quality on both the front and back sides of the substrate is the same, and effectively improving the coating effect of the coating equipment.

[0046] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "including", "comprising" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device.

[0047] Although embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention.

Claims

1. An independent double-chamber electron gun evaporation coating device, comprising a device base plate (1), characterized in that: An upper chamber (2) and a lower chamber (3) are fixedly installed on the equipment base plate (1). A vacuum pump (4) is fixedly installed on the side end face of the equipment base plate (1). An exhaust pipe (5) is fixedly communicated with the input end of the vacuum pump (4). One end of the exhaust pipe (5) far away from the vacuum pump (4) is fixedly communicated with a double-pass pipe (6). Two ends of the double-pass pipe (6) are respectively communicated with the upper chamber (2) and the lower chamber (3). Valves (7) are arranged on the pipeline of the double-pass pipe (6). The internal structures of the upper chamber (2) and the lower chamber (3) are the same. There is a driving assembly inside the upper chamber (2). A crucible (8) and an electron gun (9) are arranged on the driving assembly. A rotating assembly is arranged inside the upper chamber (2). The front and back sides of the substrate are flipped through the rotating assembly. The driving assembly includes a driving motor (10) fixedly installed on the inner bottom of the upper chamber (2). A driving shaft (11) is fixedly installed at the output end of the driving motor (10). A placement plate (12) is fixedly installed at one end of the driving shaft (11) far away from the driving motor (10). A driving gear (13) is fixedly installed on the driving shaft (11). Two symmetrically arranged auxiliary shafts (14) are rotatably installed on the inner bottom of the upper chamber (2). A left gear (15) and a right gear (16) are respectively fixedly installed on the two auxiliary shafts (14). A lower annular groove (17) is formed on the inner side surface of the upper chamber (2). An annular plate (18) is rotatably installed inside the lower annular groove (17). An annular block (19) is fixedly installed on the lower end surface of the annular plate (18). A first gear set (20) is fixedly installed on the inner side surface of the annular block (19). Symmetrically arranged L-shaped support plates (21) are fixedly installed on the annular plate (18). An auxiliary assembly is arranged on the L-shaped support plate (21). An installation ring (22) is arranged on the auxiliary assembly. The placement plate (12) is located inside the annular plate (18). The driving gear (13) meshes with the left gear (15) and the right gear (16). The first gear set (20) meshes with the left gear (15) and the right gear (16). The crucible (8) is installed on the placement plate (12). The electron gun (9) is fixedly installed inside the installation ring (22).

2. An independent double-chamber electron gun evaporation coating device according to claim 1, characterized in that: The rotating assembly includes a connecting plate (23) fixedly installed on the L-shaped frame plate (21). At the top end of the connecting plate (23), a mounting block (24) is fixedly installed. On the side end face of the mounting block (24), a bearing (25) is fixedly installed. On the bearing (25), an electric push rod (26) is fixedly installed. At the output shaft of the electric push rod (26), a clamping plate (27) is fixedly installed. On the electric push rod (26), an auxiliary gear (28) is fixedly installed. At the inner top of the upper chamber (2), an auxiliary ring (29) is fixedly installed. On the auxiliary ring (29), two groups of second gear sets (30) are fixedly installed. An upper annular groove (31) is formed on the inner side face of the upper chamber (2). An arc-shaped block (32) is fixedly installed on the outer side face of the mounting block (24). The auxiliary gear (28) meshes with the second gear set (30). The arc-shaped block (32) is movably installed inside the upper annular groove (31).

3. An independent double-chamber electron gun evaporation coating device according to claim 2, characterized in that: The auxiliary assembly includes a positioning groove (33) formed on the L-shaped frame plate (21). A rotating groove (34) is formed on the inner side face of the positioning groove (33). A rotating shaft (35) is fixedly installed on the mounting ring (22). A torsion spring (36) is fixedly connected to the mounting ring (22). A round head (37) is fixedly installed at the tail end of the electron gun (9).

4. An independent double-chamber electron gun evaporation coating device according to claim 3, characterized in that: An arc-shaped convex block (38) is fixedly installed on the inner side face of the upper chamber (2). A push rod (39) is slidably installed on the connecting plate (23). At one end of the push rod (39), a pressure-receiving arc block (40) is fixedly installed. At the other end of the push rod (39), a push plate (41) is fixedly installed. A positioning ring (42) is fixedly installed on the push rod (39). A spring (43) is fixedly connected to the positioning ring (42).

5. An independent double-chamber electron gun evaporation coating device according to claim 4, characterized in that: One end of the rotating shaft (35) away from the mounting ring (22) is rotatably connected inside the rotating groove (34). One end of the torsion spring (36) away from the mounting ring (22) is fixedly connected inside the rotating groove (34). The torsion spring (36) is located outside the rotating shaft (35). One end of the spring (43) away from the positioning ring (42) is fixedly connected to the connecting plate (23). The spring (43) is located outside the push rod (39).

Images