Vertical furnace heat treatment equipment

Abstract

The invention relates to the technical field of semiconductor equipment, in particular to vertical furnace heat treatment equipment. The invention provides vertical furnace heat treatment equipment, which comprises a furnace tube assembly at least comprising a furnace tube used for bearing a wafer and carrying out heat treatment; the furnace door assembly is used for isolating the furnace tube assembly from the wafer transmission area, and at least comprises a quartz plate, a furnace door, a rotary driving unit, a vertical control unit and a connecting rod mechanism, and the furnace door is used for sealing and isolating the furnace tube from the wafer transmission area; the rotary driving unit drives the furnace door to rotate through a connecting rod mechanism; the vertical control unit drives the furnace door to ascend and descend through a connecting rod mechanism. The lifting air cylinder and the rotating air cylinder are combined through the connecting rod mechanism, meanwhile, through the design of an internal air channel, the number of external air channel connectors is reduced, the air tightness leakage problem is effectively avoided, and the maintenance convenience of equipment is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and more particularly to a vertical furnace heat treatment equipment. Background Art

[0002] In the semiconductor manufacturing process, vertical furnace heat treatment equipment is an extremely important process equipment. Its working principle is to stack the wafers in the wafer boat, and then place the wafer boat in the furnace tube to achieve the coating process. Due to the rich variety of processes, the temperature range in the furnace tube is relatively large, ranging from 400℃ to 1200℃.

[0003] When the process is completed, the wafer boat will slowly descend, leave the furnace tube and enter the wafer transfer area. At this time, the furnace tube is connected to the wafer transfer area, and a large amount of heat will diffuse to the wafer transfer area, which will not only cause the temperature in the furnace tube to drop, but also increase the temperature in the wafer transfer area, thereby adversely affecting non-high temperature resistant components in the area. When the wafer boat is slowly lifted into the furnace tube, the furnace tube needs to be reheated to reach the specified temperature of the process. This heating process is usually very long, which not only reduces the utilization rate of the equipment, but also seriously affects the equipment production capacity.

[0004] In the existing vertical furnace heat treatment equipment, the furnace door assembly is generally used to seal the furnace tube area during wafer transfer. The existing furnace door assembly usually includes a rotating mechanism and a lifting mechanism, which are used to drive the rotation avoidance action and the lifting switch action of the furnace door assembly respectively. In addition, these rotating mechanisms and lifting mechanisms are usually driven by servo motors, which requires a thick insulation layer to protect the servo drive control system. At the same time, it is also necessary to process wiring troughs to protect the power cables and control cables of the servo drive control system, which leads to a complex structure of the furnace door assembly and difficulty in subsequent maintenance.

[0005] Therefore, there is an urgent need for a vertical furnace heat treatment equipment with a simple structure and convenient maintenance. Summary of the invention

[0006] The purpose of the present invention is to provide a vertical furnace heat treatment equipment to solve the problem that the vertical furnace heat treatment equipment in the prior art has a complex structure and is difficult to maintain.

[0007] In order to achieve the above object, the present invention provides a vertical furnace heat treatment equipment, including a furnace tube assembly and a furnace door assembly:

[0008] The furnace door assembly is used to isolate the furnace tube assembly from the wafer transfer area;

[0009] Wherein, the furnace tube assembly at least comprises a furnace tube;

[0010] The furnace tube is used to carry the wafer and perform heat treatment;

[0011] The furnace door assembly at least includes a quartz plate, a furnace door, a rotation drive unit, a vertical control unit, and a connecting rod mechanism:

[0012] The furnace door is used to seal and isolate the furnace tube from the wafer transmission area;

[0013] The quartz plate is arranged on the surface of the furnace door;

[0014] The connecting rod mechanism connects the rotary drive unit, the vertical control unit and the furnace door respectively;

[0015] The rotation drive unit drives the furnace door to rotate through a connecting rod mechanism;

[0016] The vertical control unit drives the furnace door to move up and down through a connecting rod mechanism.

[0017] In some embodiments, the rotary drive unit includes a rotary cylinder mounted on a mounting base;

[0018] The vertical control unit includes a lifting cylinder, and the lifting cylinder is mounted on a mounting seat;

[0019] The mounting seat is provided with a first internal air path and a second internal air path:

[0020] The first internal air path is used to connect the air inlet paths of the lifting cylinder and the rotating cylinder;

[0021] The second internal air path is used to connect the air outlet paths of the lifting cylinder and the rotating cylinder.

[0022] In some embodiments, the linkage mechanism comprises a long linkage arm and a short linkage arm:

[0023] The first end of the connecting rod long arm is connected to the rotary cylinder;

[0024] The first end of the connecting rod short arm is connected to the lifting cylinder;

[0025] The second end of the long connecting rod arm is connected to the second end of the short connecting rod arm and is connected to the furnace door.

[0026] In some embodiments, the oven door assembly further includes an oven door control unit for controlling the switching between the closed state and the open state of the oven door assembly:

[0027] The furnace door control unit comprises at least a first solenoid valve and a second solenoid valve:

[0028] The first solenoid valve is connected to the lifting cylinder and is used to trigger the switch state of the lifting cylinder;

[0029] The second solenoid valve is connected to the rotary cylinder and is used to trigger the on / off state of the rotary cylinder.

[0030] In some embodiments, the furnace door control unit further includes a first speed regulating valve and a second speed regulating valve:

[0031] The first speed regulating valve is connected between the first solenoid valve and the lifting cylinder, and is used to control and adjust the lifting speed of the lifting cylinder;

[0032] The second speed regulating valve is connected between the second solenoid valve and the rotary cylinder, and is used to control and adjust the rotation speed of the rotary cylinder.

[0033] In some embodiments, the furnace tube assembly further includes a furnace mouth flange:

[0034] The furnace mouth flange is located at the furnace tube inlet;

[0035] The furnace door assembly also includes a sealing ring:

[0036] The sealing ring is arranged between the furnace door and the furnace tube, and contacts with the furnace mouth flange for sealing.

[0037] In some embodiments, the furnace door assembly further includes a front adjustment seat:

[0038] The front adjustment seat is connected to the furnace door and is used to adjust the position of the furnace door in the horizontal direction so that the furnace door is aligned with the center of the furnace mouth flange.

[0039] In some embodiments, the furnace door assembly further includes a rear adjustment seat:

[0040] The rear adjustment seat is connected to the base of the furnace door and is used to adjust the horizontality of the furnace door so that the upper surface of the furnace door is parallel to the lower surface of the furnace mouth flange.

[0041] In some embodiments, a water cooling circulation pipeline is provided inside the furnace mouth flange to reduce the surface temperature of the furnace tube assembly.

[0042] In some embodiments, the first solenoid valve and the second solenoid valve are dual-control solenoid valves.

[0043] A vertical furnace heat treatment equipment proposed in the present invention combines a lifting cylinder and a rotating cylinder through a connecting rod mechanism to achieve sequential linkage of multiple axes. The structure is more compact and the demand for complex power cables and control cables is reduced. At the same time, through the design of the internal gas circuit, the number of external gas circuit joints is reduced, which effectively avoids the problem of airtight leakage and improves the maintenance convenience of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which the same reference numerals always represent the same features.

[0045] in:

[0046] Figure 1 An isometric schematic diagram of a furnace door assembly according to an embodiment of the present invention is disclosed;

[0047] Figure 2 A schematic diagram of a sealing method between a furnace tube and a furnace door according to an embodiment of the present invention is disclosed;

[0048] Figure 3 A top view of a furnace door assembly according to an embodiment of the present invention is disclosed;

[0049] Figure 4 A side view of a furnace door assembly according to an embodiment of the present invention is disclosed;

[0050] Figure 5 A front view of a furnace door assembly according to an embodiment of the present invention is disclosed;

[0051] Figure 6 A cross-sectional view of a connecting rod of a furnace door assembly according to an embodiment of the present invention is disclosed;

[0052] Figure 7a An overall schematic diagram of a furnace door assembly according to an embodiment of the present invention is disclosed;

[0053] Figure 7b A partial schematic diagram of a furnace door assembly according to an embodiment of the present invention is disclosed;

[0054] Figure 8 An electrical schematic diagram of the lifting control of a furnace door assembly according to an embodiment of the present invention is disclosed;

[0055] Fig. 9 An electrical schematic diagram of a furnace door assembly rotation control according to an embodiment of the present invention is disclosed.

[0056] The meanings of the reference numerals in the figures are as follows:

[0057] 100 furnace door components;

[0058] 101 quartz plate; 102 furnace door; 103 sealing ring;

[0059] 104 front adjustment seat; 105 rear adjustment seat; 106 mounting plate; 107 mounting seat;

[0060] 108 lifting cylinder; 109 lifting cylinder guide rod;

[0061] 110 lifting rod; 111 rotating cylinder; 112 connecting rod mechanism;

[0062] 112a connecting rod long arm; 112b connecting rod short arm;

[0063] 121 first internal gas path; 122 second internal gas path; 123 internal sealing ring;

[0064] 131 first speed regulating valve; 132 first solenoid valve; 133 second speed regulating valve; 134 second solenoid valve;

[0065] 200 furnace tube assembly;

[0066] 201 furnace tube; 202 furnace mouth flange. DETAILED DESCRIPTION

[0067] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and are not used to limit the invention.

[0068] A vertical furnace heat treatment device proposed by the present invention includes a furnace door assembly 100 and a furnace tube assembly 200:

[0069] The furnace door assembly 100 is used to isolate the furnace tube assembly 200 from the wafer transmission area to prevent the furnace tube assembly 200 from communicating with the wafer transmission area, thereby achieving sealing and preventing gas penetration, while also playing the role of heat insulation and preventing heat loss.

[0070] Figure 1 An isometric schematic diagram of a furnace door assembly according to an embodiment of the present invention is disclosed. Figure 1 As shown, the furnace door assembly 100 proposed by the present invention at least includes a quartz plate 101, a furnace door 102, a rotation drive unit, a vertical control unit, and a connecting rod mechanism:

[0071] The quartz plate 101 is arranged on the surface of the furnace door 102 close to the furnace tube to prevent the process gas from directly contacting the furnace door 102, thereby preventing the furnace door 102 from being corroded and extending the service life of the furnace door;

[0072] The shape of the quartz plate 101 depends on the design and application scenario of the furnace door 102 , and is usually circular, covering the surface of the furnace door 102 or serving as a component of the furnace door 102 .

[0073] The furnace door 102 is used to seal and isolate the furnace tube 201 from the wafer transmission area;

[0074] The connecting rod mechanism 112 connects the rotation driving unit, the vertical control unit and the furnace door 102 respectively;

[0075] The rotation driving unit drives the furnace door 102 to rotate through a connecting rod mechanism;

[0076] The vertical control unit drives the furnace door 102 to move up and down through a connecting rod mechanism.

[0077] Furthermore, the furnace door assembly 100 further includes a mounting plate 106 and a mounting seat 107:

[0078] The mounting plate 106 is located on the side of the furnace door assembly 100, and the mounting seat 107 is located on the top of the furnace door assembly 100. The mounting plate 106 and the mounting seat 107 are connected by mechanical connection to form a solid supporting structure for supporting and fixing the various sub-components of the furnace door assembly 100, serving as a structural support platform for the entire furnace door assembly 100, ensuring that the various sub-components of the furnace door assembly 100 can operate stably during operation.

[0079] Figure 2 A schematic diagram of a sealing method between a furnace tube and a furnace door according to an embodiment of the present invention is disclosed. Figure 2 As shown, the furnace tube assembly 200 is an important component of the vertical furnace heat treatment equipment, including a furnace tube 201 and a furnace mouth flange 202;

[0080] The furnace tube 201 is the main heat treatment area of ​​the entire vertical furnace, responsible for carrying the wafer and its auxiliary components and performing heat treatment;

[0081] The furnace tube 201 is a long and straight cylindrical structure with a certain inner diameter and wall thickness to ensure that it can accommodate the wafer boat and the wafers.

[0082] The furnace mouth flange 202 is located at the entrance of the furnace tube 201;

[0083] The furnace mouth flange 202 is a key part of the entrance of the furnace tube 201, and mainly plays the role of sealing connection with the furnace door assembly 100 to prevent gas leakage in the furnace tube 201 and reduce heat loss.

[0084] The working surface of the furnace mouth flange 202 is generally a flat circular structure, which contacts the sealing ring 103 on the furnace door assembly 100 .

[0085] like Figure 1 and Figure 2 As shown, the furnace door assembly 100 further includes a sealing ring 103:

[0086] The sealing ring 103 is arranged between the furnace door 102 and the furnace tube 201, and is in contact with and combined with the furnace mouth flange 202 to perform sealing, thereby effectively preventing heat and gas leakage.

[0087] Furthermore, the furnace mouth flange 202 is located at the entrance of the furnace tube 201, and is provided with a water cooling circulation pipeline inside, which can reduce the surface temperature and effectively protect the sealing ring 103 to prevent it from aging and failure due to overheating.

[0088] Figure 3A top view of a furnace door assembly according to an embodiment of the present invention is disclosed, as shown in FIG. Figure 1 and Figure 3 As shown, the furnace door assembly 100 further includes a front adjustment seat 104 and a rear adjustment seat 105:

[0089] The front adjustment seat 104 is connected to the furnace door 102 and is used to adjust the horizontal position of the furnace door 102 so that the furnace door 102 is aligned with the center of the furnace mouth flange 202 to avoid eccentricity causing sealing failure, thereby matching the sealing of the furnace tube assembly 200 and the furnace door assembly 100.

[0090] The front adjustment seat 104 is usually located at the front end of the furnace door assembly (i.e., close to the furnace tube assembly). The installation position of the front adjustment seat 104 is close to the furnace door 102, through which the horizontal position of the furnace door 102 can be adjusted to align with the furnace flange 202.

[0091] The front adjustment seat 104 is provided with adjustable screws or bolts, and the position of the furnace door 102 can be fine-tuned by adjusting these screws or bolts, so that the front adjustment seat 104 can be moved in the horizontal direction, thereby changing the position of the furnace door 102. After the adjustment is completed, it is necessary to ensure that the front adjustment seat 104 is locked to prevent position deviation during the operation of the equipment.

[0092] The rear adjustment seat 105 is connected to the base of the furnace door 102 and is used to adjust the levelness of the furnace door 102 so that the upper surface of the furnace door 102 is parallel to the lower surface of the furnace mouth flange 202, thereby ensuring the sealing between the furnace tube assembly 200 and the furnace door assembly 100 and avoiding sealing failure due to uneven furnace door.

[0093] The rear adjustment seat 105 is provided with adjustable bolts or screws, which can be used to adjust the position of the rear adjustment seat 105. When these bolts or screws are rotated, the rear adjustment seat 105 can move up and down, thereby changing the horizontality of the furnace door 102 so that it remains parallel to the lower surface of the furnace flange 202.

[0094] Figure 4 A side view of a furnace door assembly according to an embodiment of the present invention is disclosed, as shown in FIG. Figure 1 and Figure 4 As shown, the furnace door assembly 100 further includes a vertical control unit:

[0095] The vertical control unit includes a lifting cylinder 108, a lifting cylinder guide rod 109 and a lifting rod 110;

[0096] The lifting cylinder 108 is mounted on the mounting seat 107 via a lifting cylinder guide rod 109 , and drives the furnace door 102 to perform vertical lifting motion along the lifting rod 110 .

[0097] When the furnace door 102 is opened or closed, the lifting cylinder 108 pushes or pulls the furnace door 102 to achieve lifting, thereby ensuring that the furnace door 102 is sealed with the furnace opening flange 202 .

[0098] Compared with the servo drive method previously used, the lifting cylinder 108 can be used independently to control the furnace door assembly 100 away from the furnace tube assembly 200, and there is no need to consider the complicated routing of power cables and control cables and high temperature protection issues. The structure is simpler and maintenance is more convenient.

[0099] Furthermore, the vertical control unit further comprises a linear guide sleeve:

[0100] The lifting rod 110 passes through a linear guide sleeve to provide auxiliary guidance;

[0101] The linear guide sleeve is installed on the mounting seat 107 and wraps the lifting rod 110 to ensure that it does not produce lateral displacement during vertical lifting, avoid precision loss or excessive structural load due to up and down movement interference, and ensure that the lifting cylinder 108 maintains stability and efficiency during the lifting process, thereby protecting the overall operating performance of the equipment.

[0102] Figure 5 A front view of a furnace door assembly according to an embodiment of the present invention is disclosed. Figure 6 A cross-sectional view of a connecting rod of a furnace door assembly according to an embodiment of the present invention is disclosed. Figure 1 , Figure 5 and Figure 6 As shown, the furnace door assembly 100 further includes a rotation drive unit:

[0103] The rotary drive unit at least comprises a rotary cylinder 111, and the rotary cylinder 111 is mounted on a mounting seat 107;

[0104] The rotary cylinder 111 drives the furnace door 102 to rotate through the connecting rod mechanism 112, thereby realizing the rotation function of the furnace door 102;

[0105] Furthermore, the connecting rod mechanism 112 includes a long connecting rod arm 112a and a short connecting rod arm 112b:

[0106] The first end of the connecting rod long arm is connected to the rotary cylinder;

[0107] The first end of the connecting rod short arm 112b is connected to the lifting cylinder;

[0108] The second end of the long connecting rod arm 112 a is connected to the second end of the short connecting rod arm 112 b , and is connected to the furnace door 102 .

[0109] According to the lever principle, the rotary cylinder 111 can drive the quartz plate 101 and the furnace door 102 to rotate with only a small force. This design allows a smaller rotary cylinder to be used in a smaller space, thereby realizing the rotation function. In addition, the rotary cylinder 111 is pneumatically driven, and the rotation angle is adjustable. Its action corresponds to two positions, corresponding to the opening and closing of the furnace door 102, respectively, and can intuitively display the state of the furnace door 102.

[0110] Figure 7a The overall schematic diagram of a furnace door assembly according to an embodiment of the present invention is disclosed. Figure 7b for Figure 7a A local schematic diagram of the AA section in the middle, as shown in Figure 7a and Figure 7b As shown, the furnace door assembly is provided with a first internal gas path 121 and a second internal gas path 122 inside the mounting seat 107:

[0111] The first internal air path 121 is used to connect the air inlet paths of the lifting cylinder 108 and the rotating cylinder 111;

[0112] The second internal air path 122 is used to connect the air outlet paths of the lifting cylinder 108 and the rotating cylinder 111 .

[0113] The lifting cylinder 108 and the rotating cylinder 111 are pneumatic systems, which need to receive compressed air or other gases through the air inlet line to drive the cylinder to work, and the air outlet line is responsible for discharging the gas from the cylinder to complete the circulation work of the pneumatic system.

[0114] Through the first internal gas circuit 121, the gas can enter the lifting cylinder 108 and the rotating cylinder 111 from the gas source, ensuring that they can work normally, while the second internal gas circuit 122 ensures smooth exhaust of the cylinders and the gas can smoothly return to the gas source or the exhaust system. Ultimately, the wiring of external gas circuits can be avoided, reducing space occupancy and optimizing the overall structure.

[0115] The air inlet and outlet air paths of the lifting cylinder 108 and the rotating cylinder 111 are connected through the first internal air path 121 and the second internal air path 122, and are compressed and sealed by the internal sealing ring 123, which can not only ensure the sealing of the air path, but also reduce the number of external air path pipelines and reduce space occupancy.

[0116] Figure 8 The electrical schematic diagram of the lifting control of the furnace door assembly according to one embodiment of the present invention is disclosed. Fig. 9 The electrical schematic diagram of the rotation control of the furnace door assembly according to one embodiment of the present invention is disclosed. Figure 8 and Fig. 9 As shown, the oven door assembly 100 further includes an oven door control unit for controlling the switching of the oven door assembly 100 between a closed state and an open state.

[0117] The furnace door control unit includes a first solenoid valve 132 and a second solenoid valve 134:

[0118] The first solenoid valve 132 is connected to the lifting cylinder 108 and is used to trigger the switch state of the lifting cylinder 108. By triggering the first solenoid valve 132, the lifting cylinder 108 can move up and down, driving the lifting action of the furnace door 102.

[0119] The second solenoid valve 134 is connected to the rotary cylinder 111 and is used to trigger the on / off state of the rotary cylinder 111. By triggering the second solenoid valve 134, the rotary cylinder 111 drives the furnace door 102 to rotate, thereby realizing the opening or closing of the furnace door 102.

[0120] Compared with the prior art, the furnace door control unit of the present invention removes the redundant structures of the actuators and control components in the drive assembly, which are originally added to protect the control components.

[0121] In this embodiment, the first solenoid valve 132 and the second solenoid valve 134 are both double-control solenoid valves. Only two signals are needed to open or close the furnace door assembly 100, without the need for complex and cumbersome communication cables. Moreover, the two solenoid valves can be installed in an area away from the furnace tube assembly 200 without the need for additional insulation measures.

[0122] A double-control solenoid valve is a solenoid valve used in pneumatic systems that can control two different functions or directions at the same time, and is usually used to achieve more complex control functions. The design of the double-control solenoid valve makes the control system simpler, reduces the need for multiple separate solenoid valves, and thus reduces the complexity of the system.

[0123] Furthermore, the furnace door control unit further includes a first speed regulating valve 131 and a second speed regulating valve 133:

[0124] The first speed regulating valve 131 is connected between the first solenoid valve 132 and the lifting cylinder 108, and is used to control and adjust the lifting speed of the lifting cylinder 108. By adjusting the speed of the lifting cylinder 108, the lifting and lowering action of the furnace door 102 is ensured to be smooth without generating airflow disturbance.

[0125] The second speed regulating valve 133 is connected between the second solenoid valve 134 and the rotary cylinder 111, and is used to control and adjust the rotation speed of the rotary cylinder 111. Adjusting the rotation speed can ensure that the rotation of the furnace door 102 is not too hasty, thereby ensuring sealing and smooth operation.

[0126] In this embodiment, the first speed regulating valve 131 and the second speed regulating valve 133 are used to control the movement speed of the furnace door assembly 100 within a certain range to ensure that there is no air flow disturbance in the area, thereby achieving smooth movement control.

[0127] The specific process of switching between the closed state and the open state of the furnace door assembly 100 in the vertical furnace heat treatment equipment proposed by the present invention is described below:

[0128] When the solenoid valve controls the switching state of the furnace door assembly 100 and the furnace tube assembly 200, when the electromagnetic relay of the first solenoid valve 132 is triggered, the lifting cylinder 108 can be controlled to move up and down; when the electromagnetic relay of the second solenoid valve 134 is triggered, the rotating cylinder 111 can be controlled to rotate.

[0129] When the furnace door assembly 100 switches from a closed state to an open state, the furnace door assembly 100 is driven by the lifting cylinder 108 to first descend vertically, and then rotates and descends under the joint drive of the rotating cylinder 111 and the lifting cylinder 108 until it stops.

[0130] When the furnace door assembly switches from an open state to a closed state, the furnace door assembly 100, driven by the lifting cylinder 108 and the rotating cylinder 111, rises and rotates at the same time (the rotating action will be in place before reaching the furnace door), and finally rises a short distance driven by the lifting cylinder 108, so that the furnace door 102 gradually contacts the furnace mouth flange 202, and the sealing ring 103 is compressed and deformed, completing the sealing of the furnace door 102 and the furnace mouth flange 202.

[0131] A vertical furnace heat treatment equipment proposed in the present invention realizes multi-axis sequential linkage by combining two pneumatic drive units, namely a rotary drive unit and a vertical control unit, with a connecting rod structure. It has a simple structure, is easy to maintain, and can automatically adjust the sealing effect of the furnace tube.

[0132] Specifically, the up and down movement of the furnace door assembly is driven by a lifting cylinder, and the rotation movement is driven by a rotating cylinder and a connecting rod structure. The lever principle is used to achieve a labor-saving design, making the structure more compact. Both cylinders are controlled by solenoid valves and connected in series with a speed regulating valve, which can independently control the movement speed of the furnace door and the sealing pressure of the furnace door. Not only is the structure simple, but the control is also very convenient. Driven by the cylinder, the furnace door can be lifted and rotated at the same time, which not only saves action time but also avoids wear on the sealing ring.

[0133] The vertical furnace heat treatment equipment proposed by the present invention has the following beneficial effects:

[0134] 1) The rotary lifting drive device is assembled together through a connecting rod, which has a compact structure and is easy to install. At the same time, the execution structure is separated from the control mechanism, and no complex structure is required to protect the control mechanism and its power cables and communication cables.

[0135] 2) The rotary cylinder and the lifting cylinder are perfectly combined in a limited space, and the external gas path joints are reduced by cleverly designing the internal gas path direction;

[0136] 3) By using the lever principle of the connecting rod mechanism to amplify the end force, a smaller rotary cylinder can be integrated in a limited space to meet the rotational power requirements;

[0137] 4) The linear guide sleeve avoids the interference caused by the up and down movement of the lifting cylinder, reducing the load on the lifting cylinder.

[0138] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0139] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "plurality" means two or more, unless otherwise clearly specified.

[0140] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0141] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Personnel familiar with the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A vertical furnace heat treatment equipment, characterized in that: Including furnace tube assembly and furnace door assembly: The furnace door assembly is used to isolate the furnace tube assembly from the wafer transfer area; Wherein, the furnace tube assembly at least comprises a furnace tube; The furnace tube is used to carry the wafer and perform heat treatment; The furnace door assembly at least includes a quartz plate, a furnace door, a rotation drive unit, a vertical control unit, and a connecting rod mechanism: The furnace door is used to seal and isolate the furnace tube from the wafer transmission area; The quartz plate is arranged on the surface of the furnace door; The connecting rod mechanism connects the rotary drive unit, the vertical control unit and the furnace door respectively; The rotation drive unit drives the furnace door to rotate through a connecting rod mechanism; The vertical control unit drives the furnace door to move up and down through a connecting rod mechanism.

2. The vertical furnace heat treatment equipment according to claim 1, characterized in that: The rotary drive unit at least comprises a rotary cylinder, and the rotary cylinder is mounted on a mounting seat; The vertical control unit at least comprises a lifting cylinder, and the lifting cylinder is mounted on a mounting seat; The mounting seat is provided with a first internal air path and a second internal air path: The first internal air path is used to connect the air inlet paths of the lifting cylinder and the rotating cylinder; The second internal air path is used to connect the air outlet paths of the lifting cylinder and the rotating cylinder.

3. The vertical furnace heat treatment equipment according to claim 2, characterized in that: The connecting rod mechanism comprises a long connecting rod arm and a short connecting rod arm: The first end of the connecting rod long arm is connected to the rotary cylinder; The first end of the connecting rod short arm is connected to the lifting cylinder; The second end of the long connecting rod arm is connected to the second end of the short connecting rod arm and is connected to the furnace door.

4. The vertical furnace heat treatment equipment according to claim 2, characterized in that: The furnace door assembly further includes a furnace door control unit for controlling the switching between the closed state and the open state of the furnace door assembly: The furnace door control unit comprises at least a first solenoid valve and a second solenoid valve: The first solenoid valve is connected to the lifting cylinder and is used to trigger the switch state of the lifting cylinder; The second solenoid valve is connected to the rotary cylinder and is used to trigger the on / off state of the rotary cylinder.

5. The vertical furnace heat treatment equipment according to claim 4, characterized in that: The furnace door control unit further includes a first speed regulating valve and a second speed regulating valve: The first speed regulating valve is connected between the first solenoid valve and the lifting cylinder, and is used to control and adjust the lifting speed of the lifting cylinder; The second speed regulating valve is connected between the second solenoid valve and the rotary cylinder, and is used to control and adjust the rotation speed of the rotary cylinder.

6. The vertical furnace heat treatment equipment according to claim 1, characterized in that: The furnace tube assembly also includes a furnace mouth flange: The furnace mouth flange is located at the furnace tube inlet; The furnace door assembly also includes a sealing ring: The sealing ring is arranged between the furnace door and the furnace tube, and contacts with the furnace mouth flange for sealing.

7. The vertical furnace heat treatment equipment according to claim 6, characterized in that: The furnace door assembly also includes a front adjustment seat: The front adjustment seat is connected to the furnace door and is used to adjust the position of the furnace door in the horizontal direction so that the furnace door is aligned with the center of the furnace mouth flange.

8. The vertical furnace heat treatment equipment according to claim 6, characterized in that: The furnace door assembly also includes a rear adjustment seat: The rear adjustment seat is connected to the base of the furnace door and is used to adjust the horizontality of the furnace door so that the upper surface of the furnace door is parallel to the lower surface of the furnace mouth flange.

9. The vertical furnace heat treatment equipment according to claim 6, characterized in that: The furnace mouth flange is internally provided with a water cooling circulation pipeline for reducing the surface temperature of the furnace tube assembly.

10. The vertical furnace heat treatment equipment according to claim 4, characterized in that: The first solenoid valve and the second solenoid valve are double-control solenoid valves.

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