Aging test machine equipped with vibration isolation and sample limiting structure

Abstract

The invention provides an aging test machine equipped with a vibration isolation and sample limiting structure. The aging test machine equipped with the vibration isolation and sample limiting structure comprises a box body, a locking mechanism is arranged on the box body, the upper side of the box body is rotatably connected with a top cover plate, and the locking mechanism comprises a lateral fixing frame, an upper side fixing frame, a handle, a buckle and a supporting device. The second motor comprises a plurality of longitudinal rods distributed in the left-right direction, a lower support, placing plates symmetrically distributed in the front-back direction and five elastic pieces distributed in the left-right direction. The aging test machine equipped with the vibration isolation and sample limiting structure has the unique advantage of realizing the separation of semiconductor devices to be detected and stored through vibration. By means of the function, the samples can be automatically and flexibly separated and stored in the testing process, and therefore the testing efficiency and the automation level are improved.

Description

Technical Field

[0001] The invention relates to the technical field of aging test machines, in particular to an aging test machine equipped with a vibration isolation and sample limiting structure. Background Art

[0002] "An aging test machine equipped with vibration isolation and sample limiting structure" is usually composed of a vibration isolation system, a sample limiting structure, an aging test unit, a control system and a data acquisition system, which can then test semiconductor devices. The vibration isolation system uses springs, rubber pads or special isolation tables to reduce the interference of external vibrations on the test and ensure the stability of the sample during the test; the sample limiting structure fixes the sample through mechanical clamps or adjustment screws to prevent it from shifting during the aging process and ensure the test accuracy. The aging test unit is responsible for simulating various environmental conditions (such as temperature, humidity, ultraviolet rays, etc.) for accelerated aging; the control system is used to automatically adjust the test parameters and monitor the entire process in real time; the data acquisition system records various test data of the sample and provides a basis for later analysis.

[0003] However, although the system performs well in controlling external interference and ensuring sample stability, it still has certain defects. When testing semiconductors, the effect of the vibration isolation system cannot remain stable, and it is impossible to sort as the vibration progresses during the inspection process. Summary of the invention

[0004] In view of the deficiencies in the prior art, the present invention provides an aging testing machine equipped with a vibration isolation and sample limiting structure, which solves the problem that the effect of the vibration isolation system cannot remain stable and that sorting cannot be performed during the detection process as the vibration occurs.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: an aging tester equipped with a vibration isolation and sample limiting structure, comprising:

[0006] A box body, on which a locking mechanism is arranged, the upper side of the box body is rotatably connected to a top cover plate, and the locking mechanism comprises a lateral fixing frame, an upper fixing frame, a handle and a buckle;

[0007] The supporting device, the second motor includes a plurality of longitudinal rods distributed left and right, a lower bracket, a placement plate symmetrically distributed front and back, and five elastic sheets distributed left and right;

[0008] A plurality of vibration mechanisms are provided and are symmetrically distributed front to back, and the vibration mechanism comprises a vibrator, a support sheet and a spring;

[0009] A vibration screening device, the vibration screening device includes a vibration component and a detection screening component, the vibration component includes a first center box plate, a rotating shaft, a second center box plate, a first horizontal plate, a second separation plate and a longitudinal partition plate, the detection screening component includes a first separation plate, a first motor, a second separation plate, a second motor, a center separation plate and an electrode plate.

[0010] Preferably: the upper fixing frame is fixed to the upper fixing frame, the lateral fixing frame is fixed to the box body, the upper fixing frame is rotatably connected to the handle, the buckles are respectively located on the lateral fixing frame and the upper fixing frame, the side surface of the box body is provided with a lower opening, side plates are respectively provided at both ends of the box body, and four supporting feet for support are provided on the lower side of the box body.

[0011] Preferably: the lower side of the lower bracket is fixedly connected to the box body, the lower side of the elastic sheet is fixed to the lower bracket, the lower end of the longitudinal rod is fixed to the box body, and both ends of the placement plate are respectively fixed to the box body.

[0012] Preferably, the output end of the vibrator is fixed to a supporting plate, and the upper end of the supporting plate is fixed to a spring.

[0013] Preferably: a transverse plate is fixed to the upper end of the spring, and a rib plate is fixed on the transverse plate.

[0014] Preferably, the rotating shaft is fixed to the elastic sheet, the vibration screening device and the second center box plate are both rotatably connected to the rotating shaft, and the vibration screening device and the second center box plate form a first cavity inside.

[0015] Preferably: the upper end of the longitudinal rod is fixed to the longitudinal partition, the longitudinal partition slides with the first horizontal plate and the second separation plate respectively, the first horizontal plate is fixed to the second central box plate, and the second separation plate is fixed to the first central box plate.

[0016] Preferably: the first motor is located inside the second separation plate, the second motor is located inside the first central box plate, the output end of the second motor is fixed to the second separation sheet, and the output end of the first motor is fixed to the first separation sheet.

[0017] Preferably, the central separation sheet is fixed to the upper surface of the second separation plate, and the electrode sheet is located on the central separation sheet and is electrically connected to the first motor and the second motor.

[0018] The present invention provides an aging tester equipped with a vibration isolation and sample limiting structure. It has the following beneficial effects:

[0019] The aging tester equipped with vibration isolation and sample limiting structure has the unique advantage of separating the semiconductor devices to be tested and stored through vibration. The realization of this function enables the samples to be separated and stored automatically and flexibly during the test process, thereby improving the test efficiency and automation level. Specifically, when performing aging tests on semiconductor devices, the vibration system can ensure that the semiconductor devices to be tested are physically separated from the tested devices by adjusting the vibration frequency and amplitude. This separation not only avoids mutual interference between devices, but also reduces the need for manual operation, and improves the safety and reliability of the test process. As the total mass of the semiconductor devices gradually decreases under the action of vibration, the system is designed with the first and second separation plates, which can automatically rise according to the change in the total mass of the semiconductor devices, thereby achieving the continuity of the separation process. This design ensures that the separation process remains smooth and accurate as the number and quality of semiconductor devices change, effectively avoiding incomplete or incorrect separation due to quality changes. Through the automatically adjusted separation plate, the system can dynamically adjust the separation method according to the real-time situation to ensure that each semiconductor device to be tested can be handled independently and stably. Using the power generated by vibration, the tested semiconductor devices can be automatically separated from the area to be tested and directly sent to the storage area. Since the vibration process can continuously drive the automatic flow of samples, this not only speeds up the sample separation process after testing, but also further reduces the intervention of manual operations, improves the automation of the overall test process, and thus greatly improves work efficiency and test accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 For the present invention Figure 1 A schematic diagram of the structure enlargement in the middle;

[0022] Figure 3 It is a schematic diagram of the internal structure of the present invention;

[0023] Figure 4 For the present invention Figure 3 A magnified schematic diagram of the structure at B in the middle;

[0024] Figure 5 It is a schematic diagram of another part of the structure of the present invention;

[0025] Figure 6 It is a schematic diagram of the structure of the detection component of the present invention.

[0026] Among them, 1. box body; 2. lateral plate; 3. top cover plate; 4. lateral fixing frame; 5. upper fixing frame; 6. handle; 7. buckle; 8. lower opening; 9. first central box plate; 10. first cavity; 11. vibration screening device; 12. rotating shaft; 13. longitudinal rod; 14. first horizontal plate; 15. longitudinal partition; 16. first separation plate; 17. first motor; 18. second separation plate; 19. second motor; 20. central separation plate; 21. electrode plate; 22. transverse plate; 23. rib plate; 24. second central box plate; 25. placement plate; 26. elastic plate; 27. spring; 28. lower bracket; 29. ​​supporting device; 30. supporting foot; 31. vibrator; 32. supporting plate; 33. vibration mechanism. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] Embodiment 1

[0029] like Figure 1-6 As shown, an embodiment of the present invention provides an aging tester equipped with a vibration isolation and sample limiting structure, including a box body 1, on which a locking mechanism is arranged. The box body 1 serves as a shell of the entire device and provides a stable structural support. A locking mechanism is arranged on the box body to ensure that the internal device can operate stably during the aging test. The upper side of the box body 1 is rotatably connected to a top cover plate 3, and the locking mechanism includes a lateral fixing frame 4, an upper fixing frame 5, a handle 6 and a buckle 7;

[0030] The supporting device 29, the second motor 19 includes a plurality of longitudinal bars 13 distributed left and right, a lower bracket 28, a placement plate 25 symmetrically distributed front and back, and five elastic sheets 26 distributed left and right. The supporting device 29 is composed of multiple parts to support the structural stability of the entire device. The second motor 19 drives the movement of the device. The motor is connected to the longitudinal bars 13 distributed left and right and supported by the lower bracket 28. The placement plate 25 is symmetrically distributed front and back and is used to place semiconductor devices. The presence of the five elastic sheets 26 can provide appropriate pressure to ensure the stability of the device during the test process;

[0031] A plurality of vibration mechanisms 33 are symmetrically distributed front to back, and the vibration mechanism 33 includes a vibrator 31, a support sheet 32 ​​and a spring 27;

[0032] The vibration screening device 11 includes a vibration component and a detection screening component. The vibration component includes a first central box plate 9, a rotating shaft 12, a second central box plate 24, a first horizontal plate 14, a second separation plate and a longitudinal partition 15. The detection screening component includes a first separation sheet 16, a first motor 17, a second separation sheet 18, a second motor 19, a central separation sheet 20 and an electrode sheet 21. The rotating shaft 12 is fixed to an elastic sheet 26. The vibration screening device 11 and the second central box plate 24 are both rotatably connected to the rotating shaft 12. A first cavity 10 is formed inside the vibration screening device 11 and the second central box plate 24. The upper end of the longitudinal rod 13 is fixed to the longitudinal partition 15. The longitudinal partition 15 is respectively connected to the first horizontal plate 14. The second separation plate slides, the first horizontal plate 14 is fixed to the second central box plate 24, the second separation plate is fixed to the first central box plate 9, the first motor 17 is located inside the second separation plate, the second motor 19 is located inside the first central box plate 9, the output end of the second motor 19 is fixed to the second separation sheet 18, the output end of the first motor 17 is fixed to the first separation sheet 16, the central separation sheet 20 is fixed to the upper surface of the second separation plate, the electrode sheet 21 is located on the central separation sheet 20 and is electrically connected to the first motor 17 and the second motor 19, the rotating shaft 12 drives the vibration screening device 11 to rotate, and cooperates with the elastic sheet 26 to separate the semiconductor device to be tested through the power generated by vibration. The first cavity 10 formed inside the vibration screening device 11 and the cooperation of the longitudinal rod 13 and the longitudinal partition 15 ensure the flow and separation effect of the device during the screening process. As the mass of the semiconductor device gradually decreases, the second separation plate will automatically rise, ensuring the continuity and stability of the separation process, thereby avoiding the situation of incomplete separation due to mass fluctuations.

[0033] Embodiment 2

[0034] like Figure 1-6 As shown, an embodiment of the present invention provides an aging tester equipped with a vibration isolation and sample limiting structure, including a box body 1, on which a locking mechanism is arranged, the upper side of the box body 1 is rotatably connected with a top cover plate 3, the locking mechanism includes a lateral fixing frame 4, an upper fixing frame 5, a handle 6 and a buckle 7, the upper fixing frame 5 is fixed to the upper fixing frame 5, the lateral fixing frame 4 is fixed to the box body 1, the upper fixing frame 5 is rotatably connected to the handle 6, the buckle 7 is respectively located on the lateral fixing frame 4 and the upper fixing frame 5, the side surface of the box body 1 is provided with a lower side opening 8, the two ends of the box body 1 are respectively provided with lateral plates 2, and the lower side of the box body 1 is provided with four supporting feet 30 for support;

[0035] The supporting device 29, the second motor 19 includes a plurality of longitudinal rods 13 distributed left and right, a lower bracket 28, a placement plate 25 symmetrically distributed front and back, and five elastic sheets 26 distributed left and right, the lower side of the lower bracket 28 is fixedly connected to the box body 1, the lower side of the elastic sheet 26 is fixed to the lower bracket 28, the lower end of the longitudinal rod 13 is fixed to the box body 1, and the two ends of the placement plate 25 are respectively fixed to the box body 1;

[0036] The vibrating mechanism 33 is multiple and symmetrically distributed front to back. The vibrating mechanism 33 includes a vibrator 31, a support plate 32 and a spring 27. The output end of the vibrator 31 is fixed to the support plate 32. The upper end of the support plate 32 is fixed to the spring 27. The upper end of the spring 27 is fixed with a transverse plate 22. The transverse plate 22 is fixed with a rib plate 23.

[0037] The vibration screening device 11 includes a vibration component and a detection screening component. The vibration component includes a first central box plate 9, a rotating shaft 12, a second central box plate 24, a first horizontal plate 14, a second separation plate and a longitudinal partition 15. The detection screening component includes a first separation sheet 16, a first motor 17, a second separation sheet 18, a second motor 19, a central separation sheet 20 and an electrode sheet 21. The rotating shaft 12 drives the rotation of the vibration screening device 11. With the action of the elastic sheet 26, the semiconductor device to be tested can be separated by the power generated by vibration. The first cavity 10 formed inside the vibration screening device 11 and the cooperation of the longitudinal rod 13 and the longitudinal partition 15 ensure the flow and separation effect of the device during the screening process. As the mass of the semiconductor device gradually decreases, the second separation plate will automatically rise, ensuring the continuity and stability of the separation process, thereby avoiding the situation of incomplete separation due to quality fluctuations.

[0038] Working principle: The box 1 of the test machine serves as the outer shell of the entire device, providing stable structural support to ensure that the device is not disturbed by the outside world during the test. A top cover 3 is provided on the upper side of the box 1, which is connected by rotation to facilitate the operator to maintain and inspect the device. To ensure the stability of internal components during the test, a locking mechanism is provided in the box 1, including a lateral fixing frame 4, an upper fixing frame 5, a handle 6 and a buckle 7, which effectively prevent the device from loosening or being unsafe. The support device 29 ensures the overall stability of the device. The support device 29 includes a second motor 19. The movement of the motor drive device drives a number of longitudinal rods 13 distributed on the left and right. The longitudinal rods 13 are fixed by the lower bracket 28 to provide support for the device. The placement plate 25 is symmetrically distributed front and back and is used to place semiconductor devices to ensure that the sample will not be displaced during the test. Five elastic sheets 26 are evenly distributed to provide appropriate pressure for the semiconductor device to keep it stable and ensure the test accuracy. The vibration mechanism 33 consists of a plurality of vibrators 31 symmetrically distributed front and back, support sheets 32 and springs 27 The vibration force generated by the vibrator 31 is transmitted through the support plate 32, and the spring 27 plays a buffering role to ensure smooth vibration transmission and avoid unnecessary external interference. The vibration mechanism 33 can effectively isolate external vibrations to ensure that the sample is only affected by the vibration within the design range during the test, thereby improving the test accuracy. The vibration screening device 11 includes a vibration component and a detection screening component. The vibration component is composed of a first central box plate 9, a rotating shaft 12, a second central box plate 24, a first horizontal plate 14, a second separation plate and a longitudinal partition 15. The detection screening component includes a first separation plate 16, a first motor 17, a second separation plate 18, a second motor 19, a central separation plate 20 and an electrode plate 21. The vibration screening device 11 uses vibration and sorting functions to automatically separate the tested semiconductor devices and move them to different storage areas, thereby improving the automation and efficiency of the aging test. On the whole, the test machine can ensure the accuracy and reliability of the test results while efficiently completing the aging test through innovative vibration isolation, sample limiting and sorting mechanisms.

[0039] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An aging tester equipped with a vibration isolation and sample limiting structure, characterized in that: include: A box body (1) is provided with a locking mechanism, the upper side of the box body (1) is rotatably connected to a top cover plate (3), and the locking mechanism comprises a lateral fixing frame (4), an upper fixing frame (5), a handle (6) and a buckle (7); A supporting device (29), wherein the second motor (19) comprises a plurality of longitudinal rods (13) distributed left and right, a lower bracket (28), a placement plate (25) symmetrically distributed front and back, and five elastic sheets (26) distributed left and right; A plurality of vibration mechanisms (33) are provided and are symmetrically distributed front to back, wherein the vibration mechanism (33) comprises a vibrator (31), a support sheet (32) and a spring (27); A vibration screening device (11), the vibration screening device (11) includes a vibration component and a detection screening component, the vibration component includes a first central box plate (9), a rotating shaft (12), a second central box plate (24), a first horizontal plate (14), a second separation plate and a longitudinal partition plate (15), and the detection screening component includes a first separation plate (16), a first motor (17), a second separation plate (18), a second motor (19), a central separation plate (20) and an electrode plate (21).

2. The aging tester with vibration isolation and sample limiting structure according to claim 1, characterized in that: The upper fixing frame (5) is fixed to the upper fixing frame (5), the lateral fixing frame (4) is fixed to the box body (1), the upper fixing frame (5) is rotatably connected to the handle (6), the buckle (7) is respectively located on the lateral fixing frame (4) and the upper fixing frame (5), the side surface of the box body (1) is provided with a lower opening (8), the two ends of the box body (1) are respectively provided with lateral plates (2), and the lower side of the box body (1) is provided with four supporting feet (30) for support.

3. The aging tester with vibration isolation and sample limiting structure according to claim 1, characterized in that: The lower side of the lower bracket (28) is fixedly connected to the box body (1), the lower side of the elastic sheet (26) is fixed to the lower bracket (28), the lower end of the longitudinal rod (13) is fixed to the box body (1), and the two ends of the placement plate (25) are respectively fixed to the box body (1).

4. The aging tester with vibration isolation and sample limiting structure according to claim 1, characterized in that: The output end of the vibrator (31) is fixed to a support plate (32), and the upper end of the support plate (32) is fixed to a spring (27).

5. The aging tester equipped with a vibration isolation and sample limiting structure according to claim 4, characterized in that: A transverse plate (22) is fixed to the upper end of the spring (27), and a rib plate (23) is fixed on the transverse plate (22).

6. The aging tester with vibration isolation and sample limiting structure according to claim 1, characterized in that: The rotating shaft (12) is fixed to the elastic sheet (26); the vibrating screening device (11) and the second center box plate (24) are both rotatably connected to the rotating shaft (12); and a first cavity (10) is formed inside the vibrating screening device (11) and the second center box plate (24).

7. The aging tester with vibration isolation and sample limiting structure according to claim 6, characterized in that: The upper end of the longitudinal rod (13) is fixed to the longitudinal partition (15), and the longitudinal partition (15) slides with the first horizontal plate (14) and the second separation plate respectively. The first horizontal plate (14) is fixed to the second central box plate (24), and the second separation plate is fixed to the first central box plate (9).

8. The aging tester with vibration isolation and sample limiting structure according to claim 7, characterized in that: The first motor (17) is located inside the second separation plate, the second motor (19) is located inside the first central box plate (9), the output end of the second motor (19) is fixed to the second separation plate (18), and the output end of the first motor (17) is fixed to the first separation plate (16).

9. The aging tester equipped with a vibration isolation and sample limiting structure according to claim 8, characterized in that: The central separation sheet (20) is fixed to the upper surface of the second separation plate, and the electrode sheet (21) is located on the central separation sheet (20) and is electrically connected to the first motor (17) and the second motor (19).

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