High-stability vacuum chuck device

Abstract

An embedding groove is formed in a device body of the high-stability vacuum suction cup device, and a negative pressure circumferential hole communicated to a vacuum assembly is formed in the position surrounding the embedding groove; a vacuum cavity is formed below the suction cup. A plurality of first communicating valves are arranged above the vacuum cavity; a laser sensor is arranged in the suction port; the controller controls the first communication valve corresponding to the laser sensor to be opened according to a detection signal of the laser sensor; a plurality of second communication valves are uniformly arranged in the extension direction of the negative pressure circumferential hole; the upper end of the suction port is provided with a weight sensor for detecting the weight of the part of the object above the suction port, and the lower end of the suction port is provided with an air pressure sensor; the controller controls the air flow flux of one or more second communication valves with the minimum distance to the suction port according to detection data of the weight sensor and the air pressure sensor, and therefore the suction force to an object above the suction port is adjusted. The high-stability vacuum chuck device is high in adsorption stability, low in energy consumption and high in safety.

Description

Technical Field

[0001] The present invention relates to a high-stability vacuum suction cup device. Background Art

[0002] A vacuum suction cup is a device that uses the vacuum principle to adsorb objects and is widely used in the fields of industrial automation, logistics, robotics, etc. for loading, transporting, and transferring. The vacuum suction cup adsorbs an object by creating a pressure difference between the inside and outside of the suction cup. Although the vacuum suction cup technology is quite mature, it still cannot meet the adsorption requirements in some application scenarios. Currently: Conventional suction cups adsorb objects through a simple structure of a vacuum component and a suction cup. To improve the adsorption stability, a relatively large negative pressure power is usually maintained, resulting in high energy consumption; for the scenario of transporting easily deformable objects, a relatively large adsorption force is likely to cause deformation, constituting a quality problem, and a small suction force will result in unstable adsorption; at the same time, the adsorption capacities of various parts of the simple suction cup structure are uneven, and the adsorption accuracy for different objects and objects at different positions is insufficient, resulting in insufficient overall adsorption and transportation stability. Summary of the Invention

[0003] The present invention provides a high-stability vacuum suction cup device to solve the above-mentioned technical problems, and specifically adopts the following technical solutions:

[0004] A high-stability vacuum suction cup device includes: a device body and a controller installed on the device body; a suction cup is embedded in the device body; the device body is connected to a vacuum component through a connection pipe to perform a negative pressure operation on the inside of the suction cup; one end of the connection pipe is detachably connected to a connection port of the device body; the device body is formed with a groove for embedding the suction cup, and a negative pressure circumferential hole communicating with the vacuum component is provided at a position surrounding the groove; a vacuum chamber for providing a negative pressure adsorption force for the suction cup is provided below the suction cup; a plurality of first communication valves for corresponding to the suction ports of the suction cup to control the on-off of the air flow of the suction ports are provided above the vacuum chamber; a laser sensor for detecting whether an object is located above the suction port is provided in the suction port; the controller controls the first communication valve corresponding to the laser sensor to open according to the detection signal of the laser sensor; a plurality of second communication valves for communicating the negative pressure circumferential hole and the vacuum chamber are uniformly provided in the extending direction of the negative pressure circumferential hole; a weight sensor for detecting the weight of the part of the object above the suction port is provided at the upper end of the suction port, and a pressure sensor for detecting the air pressure below the suction port is provided at the lower end of the suction port; the controller controls the air flow rate of one or more second communication valves closest to the suction port according to the detection data of the weight sensor and the pressure sensor, so as to adjust the suction force on the object above the suction port.

[0005] Further, a pressurizing chamber is provided below the vacuum chamber for increasing the negative pressure at the corresponding suction port in case of urgent need to increase the negative pressure; the pressurizing chamber is connected to the vacuum assembly and is provided with a plurality of solenoid valves for controlling negative pressure boosting at corresponding positions; the plurality of solenoid valves are arranged corresponding to the plurality of suction ports; the controller controls the conduction of the corresponding solenoid valves according to the change of the detection value of the weight sensor.

[0006] Further, the pressurizing chamber includes a plurality of non-communicating pressurizing units; the plurality of pressurizing units are respectively connected to the vacuum assembly through negative pressure pipes.

[0007] Further, the vacuum assembly provides negative pressure for both the negative pressure peripheral holes and the pressurizing chamber at the same time; the controller calculates the negative pressure value of the pressurizing chamber according to the weight value of the heaviest object detected by the weight sensor on the suction cup; the controller calculates the negative pressure value of the negative pressure peripheral holes according to the average value of the weight values of all heavy objects detected by the weight sensor on the suction cup.

[0008] Further, the device body is provided with an inertial sensor; when the weight sensor detects that the object is tilted, the controller calculates the tilt angle of the corresponding object according to the detection value of the laser sensor in the suction port; the controller calculates the suction negative pressure required to suck back the object according to the detection value of the inertial sensor, the detection value of the gravity sensor and the tilt angle of the object; the controller adjusts the internal negative pressure value of one or more pressurizing units at the position corresponding to the object according to the suction negative pressure.

[0009] Further, the calculation method for the controller to calculate the suction negative pressure required to suck back the object according to the detection value of the inertial sensor, the detection value of the gravity sensor and the tilt angle of the object is as follows:

[0010] Determine the weight and tilt angle of the object according to the detection data of the gravity sensor and the laser sensor: the weight W of the object can be calculated from its mass m and the acceleration due to gravity g:

[0011] W = m·g;

[0012] Calculate the component of gravity along the inclined plane: when the object is tilted, the gravity can be decomposed into two components: the component W ∥ along the inclined plane and the component W ⊥ perpendicular to the inclined plane; the component of gravity along the inclined plane W ∥ can be calculated by the following formula:

[0013] W ∥ = W·sin(θ)

[0014] where θ is the tilt angle (in radians or degrees);

[0015] Calculate the component of gravity perpendicular to the inclined plane: the component of gravity perpendicular to the inclined plane W ⊥It can be calculated by the following formula:

[0016] W ⊥ = W·cos(θ);

[0017] The frictional force can be calculated by the following formula:

[0018] F f = μ·W ⊥

[0019] where μ is the coefficient of friction;

[0020] The force F required to pull back the object pull is calculated as:

[0021] F pull = W ∥ + F f

[0022] Substitute the expressions of W ∥ and F f to get:

[0023] F pull = W·sin(θ) + μ·W·cos(θ);

[0024] The inertial force F inertia Calculation formula:

[0025] F inertia = m·a

[0026] where a is the acceleration (or deceleration) of the object;

[0027] The calculation formula for the total pulling-back force:

[0028] F total = F pull + F inertia

[0029] Substitute the expressions of F pull and F inertia to get:

[0030] F total = W(sin(θ) + μ·cos(θ)) + m·a.

[0031] Furthermore, a plurality of jacking cylinders are provided on the lower side of the device body in its circumferential direction; when an object above the suction port tilts, the controller controls the jacking cylinder on one side in the tilting direction of the object to perform jacking; the angle value formed by the jacking of the jacking cylinder and the device body is less than or equal to half of the tilting angle value of the object.

[0032] Further, when the device body is lifted and tilted, the controller calculates the stable object negative pressure values in one or more pressurizing units corresponding to the objects that have not tilted above the multiple suction ports according to the detection values of the inertial sensors, the detection values of the gravity sensors, and the tilt angle of the object; the controller adjusts the internal negative pressure values of one or more pressurizing units at the positions corresponding to the object according to the stable object negative pressure values.

[0033] Further, an ambient temperature sensor for detecting the ambient temperature, an ambient air pressure sensor for detecting the ambient air pressure, and an angle sensor for detecting the tilt angle of the suction cup are also provided on the device body; the controller calculates the target air pressure value at the lower end of the corresponding suction port according to the detection data of the gravity sensor, the ambient temperature sensor, the ambient air pressure sensor, and the angle sensor.

[0034] Further, the calculation formula for the controller to calculate the target air pressure value at the lower end of the corresponding suction port according to the detection data of the gravity sensor, the ambient temperature sensor, the ambient air pressure sensor, and the angle sensor:

[0035]

[0036] Among them, the measured ambient air pressure is P env ,the measured ambient temperature is T env ,T ref is the reference temperature, the measured object mass is m, the suction cup suction port area A is calculated, the adsorption surface angle θ is measured, and the target air pressure value is P target .

[0037] The beneficial effect of the present invention is that the provided high-stability vacuum suction cup device can provide accurate adsorption force according to the specific object weight and position, effectively reduce energy consumption while ensuring stable adsorption of the object, and avoid excessive adsorption force affecting the product quality of the object. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0039] Figure 1 is a schematic diagram of the high-stability vacuum suction cup device of the present application.

[0040] High-stability vacuum suction cup device 10, device body 11, embedding groove 111, negative pressure peripheral holes 112, vacuum chamber 113, pressurizing chamber 114, pressurizing unit 115, first communication valve 12, laser sensor 13, second communication valve 14, weight sensor 15, air pressure sensor 16, solenoid valve 17, inertial sensor 18, controller 19, suction cup 20, suction port 201, connecting pipe 21, vacuum assembly 22, lifting cylinder 23, ambient temperature sensor 24, ambient air pressure sensor 25, angle sensor 26. Detailed implementation mode

[0041] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present invention and should not be construed as a limitation of the present invention.

[0042] A high-stability vacuum suction cup device 10 includes: a device body 11 and a controller 19. The controller 19 is installed on one side of the device body 11 to control the operation of the components inside the device body 11. An embedding groove 111 is formed in the device body 11, and a suction cup 20 is embedded in the embedding groove 111. Different objects can be adsorbed through the suction cup 20. The device body 11 is connected to a vacuum assembly 22 through a connecting pipe 21. Negative pressure is applied to the inside of the device body 11 through the vacuum assembly 22, so as to realize negative pressure operation on the inside of the suction cup 20, and then adsorb an object through the relatively vacuum state of the airflow discharge. One end of the connecting pipe 21 is detachably connected to the connection port of the device body 11, so as to facilitate quickly replacing the suction cup 20 and the device body 11 according to actual adsorption requirements.

[0043] As a specific structure, the device body 11 in this solution is provided with a negative pressure peripheral hole 112 at the position surrounding the embedding groove 111, and the negative pressure peripheral hole 112 communicates with the vacuum assembly 22, so as to form a negative pressure when the vacuum assembly 22 is started. A vacuum chamber 113 is provided below the suction cup 20, and the vacuum chamber 113 is used to provide a negative pressure adsorption force for the suction cup 20. A plurality of first communication valves 12 are provided above the vacuum chamber 113, and each first communication valve 12 corresponds to a suction port 201 of the suction cup 20, so as to control the air flow on / off of the suction port 201. A laser sensor 13 is provided in the suction port 201 to detect whether an object is located above the suction port 201 through the laser sensor 13. That is, when an object is placed above the suction port 201 corresponding to the laser sensor 13, the laser sensor 13 can detect it and send a detection signal. Then, the controller 19 controls the first communication valve 12 corresponding to the laser sensor 13 to open according to the detection signal of the laser sensor 13, so as to provide an adsorption force for the suction port 201 corresponding to the laser sensor 13 to adsorb the object. In this way, the part above the suction cup 20 where no object is placed can not be subjected to negative pressure adsorption, thus avoiding waste of energy consumption.

[0044] Furthermore, a plurality of second communication valves 14 are uniformly arranged in the extending direction of the negative pressure peripheral hole 112, and the second communication valves 14 are used to communicate the negative pressure peripheral hole 112 and the vacuum chamber 113. A weight sensor 15 is provided at the upper end of the suction port 201, and the weight sensor 15 is used to detect the weight of the part of the object above the suction port 201. A pressure sensor 16 is provided at the lower end of the suction port 201, and the pressure sensor 16 is used to detect the air pressure below the suction port 201. The controller 19 controls the air flow rate of one or more second communication valves 14 with the smallest distance to the suction port 201 according to the detection data of the weight sensor 15 and the pressure sensor 16, so as to adjust the suction force on the object above the suction port 201.

[0045] Specifically, after the high-stability vacuum suction cup device 10 is started, the vacuum assembly 22 performs a negative pressure operation on the negative pressure peripheral hole 112 to prepare for adsorption. When an object is placed on one or more suction ports 201 of the suction cup 20, the laser sensor 13 corresponding to the one or more suction ports 201 detects the object, and the controller 19 controls the corresponding first communication valve 12 according to the detection signal of the laser sensor 13, and controls one or more second communication valves 14 with the smallest distance to the one or more suction ports 201 to open, so as to adjust the air flow rate at the position of the corresponding one or more suction ports 201, so as to ensure the adsorption capacity at the position of the corresponding one or more suction ports 201 with the lowest energy consumption. This adsorption capacity, that is, the suction force value on the object above the one or more suction ports 201. This suction force value is the target air pressure value at the position of the suction port 201 corresponding to the object. By determining the target air pressure value, the suction force is provided at this target air pressure value at the beginning of adsorbing the object, and the adsorption accuracy is higher.

[0046] Specifically, an ambient temperature sensor 24, an ambient air pressure sensor 25, and an angle sensor 26 are further provided on the device body 11. The ambient temperature sensor 24 and the ambient air pressure sensor 25 are used to detect the ambient air pressure, and the angle sensor 26 is used to detect the tilt angle of the suction cup 20. The controller 19 calculates the target air pressure value at the lower end of the corresponding suction port 201 based on the detection data of the gravity sensor, the ambient temperature sensor 24, the ambient air pressure sensor 25, and the angle sensor 26.

[0047] Taking into account the influence of factors such as temperature, air pressure, gravity, and the inclination angle of the adsorption surface on the air pressure, the calculation formula for the controller 19 to calculate the target air pressure value at the lower end of the corresponding suction port 201 based on the detection data of the gravity sensor, the ambient temperature sensor 24, the ambient air pressure sensor 25, and the angle sensor 26 is as follows:

[0048] Define variables:

[0049] P target : Target air pressure value (Pa),

[0050] P env : Ambient air pressure (measured by the ambient air pressure sensor 25, unit: Pa),

[0051] T env : Ambient temperature (measured by the ambient temperature sensor 24, unit: K),

[0052] m: Mass of the object adsorbed by the suction cup 20 (measured by the gravity sensor, unit: kg),

[0053] g: Acceleration due to gravity (about 9.81 m / s2),

[0054] A: Area of the suction port 201 of the suction cup 20 (unit: m 2 ),

[0055] θ: Angle of the adsorption surface of the suction cup 20 (measured by the angle sensor 26, unit: radian),

[0056] R: Ideal gas constant (8.314 J / (mol·K)),

[0057] n: Number of moles of gas (assumed to be constant),

[0058] The target air pressure value P target needs to meet the following conditions: The gravity of the object adsorbed by the suction cup 20 should be balanced with the force generated by the adsorption air pressure difference (equilibrium condition); The ambient temperature and air pressure will affect the air pressure inside the suction cup 20 (ambient influence); The angle of the adsorption surface will affect the air pressure distribution (angle influence).

[0059] For the equilibrium condition: The gravity F of the object adsorbed by the suction cup 20gravity , the force F generated by the air pressure difference pressure , balance: F gravity = m·g F pressure = (P env - P target )·A

[0060] Therefore: m·g = (P env - P target )·A

[0061] So: P target = P env - Am·g

[0062] Regarding the environmental impact: According to the ideal gas law: P target ·V = n·R·T env

[0063] Assuming that the internal volume V of the suction cup 20 remains unchanged, it can be simplified to: P target ∝ T env

[0064] Therefore, the target air pressure value needs to be adjusted according to the environmental temperature,

[0065] P target = P env ·T ref ·T env

[0066] where, T ref is the reference temperature (usually taking the standard temperature 273.15K).

[0067] Regarding the angle impact: Assuming that the impact of the angle on the air pressure can be represented by a correction factor cos(θ): P target = P env ·cos(θ).

[0068] Then, the target air pressure value P target = (P env - Am·g)·T ref ·T env ·cos(θ).

[0069] Example: Assume that P env = 101325Pa, T env = 300K, m = 10kg, g = 9.81m / s2, A = 0.01m2, θ = 30° (cos(30°) = 0.866), T ref = 273.15K

[0070] Substitute into the formula: P target=(101325-0.0110·9.81)·273.15300·0.866

[0071] Then, P target ≈86500Pa

[0072] Through the above formula and steps, the target air pressure value at the lower end of the suction port 201 on the suction cup 20 can be calculated. This calculation method comprehensively considers the influence of gravity, ambient temperature, ambient air pressure and the angle of the suction surface, ensuring that the suction cup 20 can stably absorb the object with the lowest energy consumption.

[0073] As a specific implementation, a booster chamber 114 is provided below the vacuum chamber 113. The booster chamber 114 is used to increase the negative pressure at the corresponding suction port 201 when the negative pressure needs to be increased urgently. The booster chamber 114 is connected to the vacuum assembly 22, and is provided with a plurality of solenoid valves 17 for controlling the negative pressure boost at the corresponding position, and the plurality of solenoid valves 17 are provided corresponding to the plurality of suction ports 201. The controller 19 controls the corresponding solenoid valve 17 to be turned on according to the change of the detection value of the weight sensor 15. That is to say, when the suction cup 20 is transferred or transported, collision, emergency stop or other unexpected situations occur, and the detection data of the weight sensor 15 changes, that is, when the object is about to leave the suction port 201, the controller 19 controls the corresponding solenoid valve 17 to be turned on according to the change of the detection value of the weight sensor 15, thereby increasing the adsorption force on the object and ensuring the safety of the object adsorption transfer and adsorption transportation. When the stability is restored, the controller 19 controls the corresponding solenoid valve 17 to be closed according to the normal detection value of the weight sensor 15.

[0074] Specifically, the booster chamber 114 includes a plurality of booster units 115 that are not connected to each other, and the plurality of booster units 115 are respectively connected to the vacuum assembly 22 through negative pressure pipes. In this way, the electromagnetic valve 17 of the booster unit 115 corresponding to the local object can be opened according to the tilt condition of the local object, which saves energy consumption, and the smaller booster chamber 114 can instantly improve the adsorption force better.

[0075] As a specific implementation, the vacuum assembly 22 provides negative pressure for both the negative pressure peripheral hole 112 and the pressurization chamber 114, thereby ensuring that pressurization adsorption can be performed in a timely manner in the event of an accident. Specifically:

[0076] The controller 19 calculates the negative pressure value of the pressurizing chamber 114 according to the weight value of the heaviest object detected by the weight sensor 15 on the suction cup 20. In this way, the pressurizing adsorption capacity can be provided in the safest state, thereby ensuring the safety of transfer and transportation.

[0077] The controller 19 calculates the negative pressure value of the negative pressure peripheral holes 112 based on the average value of the weight values of all heavy objects detected by the weight sensors 15 on the suction cups 20. This can ensure that the negative pressure in the negative pressure peripheral holes 112 is sufficient to adsorb the objects above one or more suction ports 201, and then controls it to coordinate the corresponding negative pressure value at the specific suction port 201 according to the detection value of the weight sensor 15 on each suction port 201 by controlling the opening of the specific second communication valve 14 and adjusting the air flow rate. In this way, stable adsorption of objects can be achieved with the lowest energy consumption, with high adsorption coordination, convenient use, and more applicable scenarios.

[0078] As a specific implementation manner, the device body 11 is provided with an inertial sensor 18. When the weight sensor 15 detects that the object is tilted, the controller 19 calculates the tilt angle of the corresponding object according to the detection value of the laser sensor 13 in the suction port 201 (here, the fixed-point deviation distance obtained by using the laser ranging function of the laser sensor 13 is used. The distance from the fixed point projected onto the side of the suction port 201 is known, and it is calculated by substituting it into the triangle angle calculation formula).

[0079] The controller 19 calculates the suction-back negative pressure required to suck back the object according to the detection value of the inertial sensor 18, the detection value of the gravity sensor, and the tilt angle of the object, and then adjusts the internal negative pressure value of one or more booster units 115 at the position corresponding to the object according to the suction-back negative pressure.

[0080] Specifically, the calculation method for the controller 19 to calculate the suction-back negative pressure required to suck back the object according to the detection value of the inertial sensor 18, the detection value of the gravity sensor, and the tilt angle of the object is as follows:

[0081] 1. Determine the weight and tilt angle of the object according to the detection data of the gravity sensor and the laser sensor 13: The weight W of the object can be calculated from its mass m and the acceleration due to gravity g:

[0082] W = m·g;

[0083] 2. Calculate the component of gravity along the inclined plane: When the object is tilted, the gravity can be decomposed into two components: the component W ∥ along the inclined plane and the component W ⊥ perpendicular to the inclined plane; The component of gravity along the inclined plane W ∥ can be calculated by the following formula:

[0084] W ∥ = W·sin(θ)

[0085] where θ is the tilt angle (in radians or degrees);

[0086] 3. Calculate the component of gravity perpendicular to the inclined plane: The component of gravity perpendicular to the inclined plane W ⊥It can be calculated by the following formula:

[0087] W ⊥ = W·cos(θ);

[0088] 4. The frictional force is calculated by the following formula:

[0089] F f = μ·W ⊥

[0090] where μ is the coefficient of friction;

[0091] 5. Calculation of the force F required to pull back the object pull :

[0092] F pull = W ∥ + F f

[0093] Substitute the expressions of W ∥ and F f to get:

[0094] F pull = W·sin(θ)+μ·W·cos(θ);

[0095] Inertial force F inertia Calculation formula:

[0096] F inertia = m·a

[0097] where a is the acceleration (or deceleration) of the object;

[0098] 6. Calculation formula for the total pulling-back force:

[0099] F total = F pull + F inertia

[0100] Substitute the expressions of F pull and F inertia to get:

[0101] F total = W(sin(θ)+μ·cos(θ))+m·a.

[0102] Furthermore, a plurality of jacking cylinders 23 are provided on the lower side of the device body 11 in its circumferential direction. When an object above the suction port 201 tilts, the controller 19 controls the jacking cylinder 23 on one side of the tilting direction of the object to jack up. The angle formed by the jacking of the device body 11 by the jacking cylinder 23 is less than or equal to half of the tilting angle of the object, and the maximum jacking angle is less than 30 degrees. This has a certain reverse buffering effect and will not cause large fluctuations. Specifically, the jacking angle value decreases as the detection value of the gravity sensor returns to stability and increases. That is to say, when the device body 11 jacks up and tilts, the controller 19 calculates the stable object negative pressure value in one or more pressurizing units 115 corresponding to the objects that do not tilt above the plurality of suction ports 201 according to the detection value of the inertial sensor 18, the detection value of the gravity sensor, and the tilting angle of the object. The controller 19 adjusts the internal negative pressure value of one or more pressurizing units 115 at the position corresponding to the object according to the stable object negative pressure value, so as to make the overall object above the suction cup 20 return to balance. Calculating the stable object negative pressure value in one or more pressurizing units 115 corresponding to the objects that do not tilt above the plurality of suction ports 201 is the same as the above calculation method of the suction negative pressure required to suck back the object. The tilting angle in the calculation process is the angle at which the jacking cylinder 23 jacks up the adsorption inclined plane.

[0103] According to the above technical solution, the high-stability vacuum suction cup device 10 can achieve low energy consumption and adsorb objects with high stability, and ensure the adsorption safety of objects in application scenarios such as transportation and transfer.

[0104] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the above embodiments do not limit the present invention in any form. Any technical solutions obtained by using equivalent replacement or equivalent transformation fall within the protection scope of the present invention.

Claims

1. A high-stability vacuum suction cup device, comprising: The device body and the controller installed on the device body; the device body is embedded with a suction cup; the device body is connected to the vacuum assembly through a connecting tube to perform negative pressure operation on the inside of the suction cup; one end of the connecting tube is detachably connected to the connection port of the device body; characterized in that, The device body is formed with an embedding groove for embedding the suction cup, and a negative pressure peripheral hole connected to the vacuum component is provided at a position surrounding the embedding groove; A vacuum chamber is provided below the suction cup for providing negative pressure adsorption force to the suction cup; A plurality of first connecting valves are provided above the vacuum chamber, which are used to correspond to the suction ports of the suction cups to control the air flow of the suction ports; A laser sensor is provided in the suction port for detecting whether an object is located above the suction port; The controller controls the first communication valve corresponding to the laser sensor to open according to the detection signal of the laser sensor; The negative pressure peripheral hole is evenly provided with a plurality of second connecting valves for connecting the negative pressure peripheral hole and the vacuum chamber in its extending direction; The suction port is provided with a weight sensor at its upper end for detecting the weight of an object above the suction port, and an air pressure sensor at its lower end for detecting the air pressure below the suction port; The controller controls the air flow rate of one or more second connecting valves with the smallest distance to the suction port according to the detection data of the weight sensor and the air pressure sensor, thereby adjusting the suction force on the object above the suction port.

2. The high stability vacuum chuck device according to claim 1, characterized in that: A pressure boosting chamber is provided below the vacuum chamber for increasing the negative pressure at the corresponding suction port when the negative pressure needs to be increased urgently; The boosting chamber is connected to the vacuum assembly and is provided with a plurality of solenoid valves for controlling the corresponding positions to perform negative pressure boosting; The plurality of solenoid valves are arranged corresponding to the plurality of suction ports; The controller controls the corresponding solenoid valve to be turned on according to the change of the detection value of the weight sensor.

3. The high stability vacuum chuck device according to claim 2, characterized in that: The boost chamber includes a plurality of boost units that are not connected to each other; The plurality of booster units are connected to the vacuum assembly through negative pressure pipes respectively.

4. The high stability vacuum chuck device according to claim 3, characterized in that: The vacuum component provides negative pressure to the negative pressure peripheral hole and the booster chamber simultaneously; The controller calculates the negative pressure value of the pressurization chamber according to the weight value of the heaviest object detected by the weight sensor on the suction cup; The controller calculates the negative pressure value of the negative pressure peripheral hole according to the average value of the weight values ​​of all heavy objects detected by the weight sensor on the suction cup.

5. The high stability vacuum chuck device according to claim 4, characterized in that: The device body is provided with an inertial sensor; When the weight sensor detects that the object is tilted, the controller calculates the tilt angle of the corresponding object according to the detection value of the laser sensor in the suction port; The controller calculates the suction negative pressure required to suck back the object according to the detection value of the inertial sensor, the detection value of the gravity sensor and the tilt angle of the object; The controller adjusts the internal negative pressure value of one or more of the boosting units at positions corresponding to the object according to the suction back negative pressure.

6. The high stability vacuum chuck device according to claim 5, characterized in that: The controller calculates the negative suction pressure required to suck back the object according to the detection value of the inertial sensor, the detection value of the gravity sensor and the inclination angle of the object as follows: The weight and tilt angle of the object are determined based on the detection data of the gravity sensor and the laser sensor: the weight W of the object can be calculated from its mass m and gravitational acceleration g: W = m·g; Calculate the gravity component along the inclined surface: When the object is tilted, the gravity can be decomposed into two components: the component W along the inclined surface ∥ and the component W perpendicular to the inclined surface ⊥ ; Gravity component W along the inclined surface ∥ It can be calculated by the following formula: W ∥ =W sin(θ) where θ is the tilt angle (radians or degrees); Calculate the gravity component perpendicular to the inclined surface: The gravity component perpendicular to the inclined surface W ⊥ It can be calculated by the following formula: IN ⊥ =W cos(θ); The friction force can be calculated by the following formula: F f =μ·W ⊥ Where μ is the friction coefficient; The force F required to pull the object back pull Calculation: F pull =W ∥ +F f Substitute W ∥ and F f The expression of , we get: F pull =W·sin(θ)+μ·W·cos(θ); Inertial force F inertia Calculation formula: F inertia =m·a Where a is the acceleration (or deceleration) of the object; The total pull-back force calculation formula is: F total =F pull +F inertia Substitute F pull and F inertia The expression of , we get: F total =W(sin(θ)+μ·cos(θ))+m·a.

7. The high stability vacuum chuck device according to claim 5, characterized in that: The lower side of the device body is provided with a plurality of lifting cylinders in the circumferential direction thereof; When the object above the suction port tilts, the controller controls the lifting cylinder located on one side of the tilting direction of the object to lift it; The angle formed by the lifting cylinder lifting the device body is less than or equal to half of the inclination angle of the object.

8. The high stability vacuum chuck device according to claim 7, characterized in that: When the device body is lifted and tilted, the controller calculates the negative pressure values ​​of the stable objects in one or more of the booster units corresponding to the objects above the suction ports that are not tilted according to the detection value of the inertial sensor, the detection value of the gravity sensor and the tilt angle of the object; The controller adjusts the internal negative pressure value of one or more of the boosting units at positions corresponding to the object according to the negative pressure value of the stable object.

9. The high stability vacuum chuck device according to claim 1, characterized in that: The device body is also provided with an ambient temperature sensor for detecting ambient temperature, an ambient pressure sensor for detecting ambient air pressure, and an angle sensor for detecting the tilt angle of the suction cup; The controller calculates a corresponding target air pressure value at the lower end of the suction port according to detection data of the gravity sensor, the ambient temperature sensor, the ambient air pressure sensor and the angle sensor.

10. The high stability vacuum chuck device according to claim 9, characterized in that: The controller calculates the corresponding target air pressure value at the lower end of the suction port according to the detection data of the gravity sensor, the ambient temperature sensor, the ambient air pressure sensor and the angle sensor: Among them, the measured ambient air pressure P env , measure the ambient temperature T env , T ref is the reference temperature, the mass of the object is measured m, the suction cup suction area A is calculated, the suction surface angle θ is measured, and the target air pressure value P target .

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