Thermal insulation material applied to semiconductor and manufacturing device and method for manufacturing thermal insulation material

Abstract

The invention relates to the technical field of thermal insulation materials, in particular to a thermal insulation material applied to a semiconductor and a manufacturing device and method for manufacturing the thermal insulation material. The thermal insulation material applied to the semiconductor comprises a side wall part and a bottom plate part, the thermal insulation material manufacturing device applied to the semiconductor is used for producing the thermal insulation material and comprises a high-speed lapping machine and further comprises a forming mold, a heat insulation material conveying device, a heat insulation material conveying device and a heat insulation material conveying device, and the forming mold is arranged behind the high-speed lapping machine and used for assisting in forming of the thermal insulation material; the covering mechanism is arranged above the forming mold and used for covering the cut fiber cloth, and the covering mechanism comprises a pressing assembly which is arranged above the forming mold and used for attaching the bottom plate fiber cloth to the forming mold and a side pressing assembly which is arranged on the periphery of the forming mold and used for attaching the side wall fiber cloth to the forming mold; and the perforating mechanism is arranged on the periphery of the forming mold and used for being matched with the covering mechanism to achieve fastening and attaching of the fiber cloth.

Description

Technical Field

[0001] The present invention relates to the technical field of thermal insulation materials, and in particular to a thermal insulation material applied to semiconductors, and a manufacturing device and method for manufacturing the thermal insulation material. Background Art

[0002] With the advancement of science and technology, the military, national defense, solar energy, semiconductors, heat treatment and other fields are developing rapidly, and the development of these fields involves the use of thermal insulation materials; especially in recent years, with the rapid development of solar energy and semiconductors, the demand for thermal insulation materials has become more prominent, and the requirements for thermal insulation materials are getting higher and higher, requiring not only energy saving and consumption reduction, but also high antioxidant performance. These requirements are also constantly promoting the rapid development of the field of thermal insulation materials.

[0003] Patent document CN106904986B discloses a method for manufacturing a high-performance composite carbon fiber insulation board. After mixing a mixed carbon fiber composed of chopped carbon fiber and ground carbon fiber with an organic binder and a solvent, the solvent is removed, and the composite carbon fiber with the organic binder coated on the surface is mixed with water and a dispersant to form a carbon fiber mixed slurry, which is then vacuum-formed into a composite carbon fiber insulation board preform; hot steam or hot air heating is used to dehydrate it and complete the infusibility and insolubility treatment; and then carbonization or graphitization treatment is performed to obtain a finished composite carbon fiber insulation board.

[0004] However, in actual use, a barrel-shaped thermal insulation material is often produced by hot pressing, but this method easily causes uneven fiber distribution, affecting its thermal insulation performance. Summary of the invention

[0005] The purpose of the present invention is to address the deficiencies of the prior art by setting side walls and a bottom plate portion, adjusting the molding process of the thermal insulation material, and using multiple layers of fiber cloth for wrapping to achieve the molding of the thermal insulation material, and making the side walls and the bottom plate portion overlap each other, thereby solving the technical problem of uneven thermal insulation performance in different parts of the thermal insulation material.

[0006] In view of the above technical problems, the technical solutions adopted are as follows: A thermal insulation material for semiconductors, comprising: The side wall part is tubular and formed by winding a complete section of fiber cloth, wherein each layer of fiber cloth of the side wall part is provided with an opening in the middle for accommodating the bottom plate opening to pass through; A bottom plate portion, the bottom plate portion comprising multiple layers of bottom plate fibers, each layer of the bottom plate fibers comprising a fiber circle in the middle and fiber strips arranged around the fiber circle; The number of fiber layers of the side wall portion is the same as that of the fiber layers of the bottom plate portion, and the fiber strips of the bottom plate portion are embedded in the middle of each fiber layer of the side wall portion.

[0007] An insulating material manufacturing device for semiconductors, which is used to produce an insulating material for semiconductors, includes a high-speed web laying machine, and further includes: A forming mold, which is arranged behind the high-speed web laying machine and is used to assist in the forming of the insulating material; A laminating mechanism, which is arranged above the forming mold and laminates the cut fiber cloth. It includes a pressing component arranged above the forming mold and used to attach the bottom fiber cloth to the forming mold, and a side pressing component arranged around the forming mold and used to attach the side wall fiber cloth to the forming mold; A perforating mechanism, which is arranged around the forming mold and is used to cooperate with the laminating mechanism to achieve the firm attachment of the fiber cloth.

[0008] Preferably, the forming mold includes a workbench arranged behind the high-speed web laying machine, a turntable rotatably connected to the workbench surface, a cylinder vertically slidably connected to the middle of the turntable and provided with a telescopic cylinder below, and a needle plate with needle holes evenly arranged on the surface of the cylinder and controlled by an electric cylinder to extend and retract the needle holes on the side wall of the cylinder.

[0009] Preferably, the pressing component includes a conveyor belt arranged above the cylinder, a cutting part arranged on the conveyor roller and used to cut the bottom fiber cloth into a specific shape, and a fitting part arranged above the cylinder and used to laminate the cut fiber cloth on the upper end surface of the cylinder; The cutting part includes a cutter arranged above the conveyor belt and controlled by an electric cylinder. The cutter is symmetrically arranged in multiple groups, and each group of cutters is provided with multiple blades, which are used to regularly cut multiple fiber strips on the fiber cloth.

[0010] Preferably, the cutting part further includes a fixed shaft arranged above the cylinder, a scanning ring rotatably connected to the fixed shaft by motor control, a telescopic rod rotatably connected to the scanning ring, a circular cutter arranged at the end of the telescopic rod, and a convex block fixed on the fixed shaft below the telescopic rod.

[0011] Preferably, the fitting part includes a fitting block arranged above the cylinder, multiple groups of pressing rings tightly attached to each other inside the fitting block, a control frame arranged in the middle of the pressing ring and fixed on the fixed shaft, an inner control rod horizontally slidably connected to the control frame by screw drive, and an outer control rod horizontally slidably connected to the fitting block by screw drive. A toothed ring for driving the inner control rod and the outer control rod is rotatably connected to the control frame, and a telescopic cylinder for driving the fitting block to move up and down is arranged on the control frame. The turntable drives the toothed ring to rotate through a gear connection method.

[0012] Preferably, the fitting member further includes a central rod rotatably connected above the center of the cylinder by a motor, a rotating rod provided at the center of the lower end of the central rod, a plurality of groups of fixing needles provided around the rotating rod, and a positioning rod provided inside the cylinder and vertically lifted and lowered by an electric cylinder.

[0013] Preferably, the side pressing assembly includes an opening member for opening holes in the inner part of the side wall and a plurality of groups of stabilizing members provided around the cylinder. The opening member includes a plurality of groups of conveying rollers for conveying the side wall fiber cloth to one side of the cylinder, two groups of cutting knives provided on both sides of the fiber cloth between the conveying rollers and the cylinder, each group of cutting knives including a plurality of blades with consistent distances, the cutting knives are provided at the end of the telescopic rod of the electric cylinder and the bottom of the electric cylinder is provided on the rotating shaft of the motor, and a cutting knife controlled to move by an electric cylinder and arranged behind the cutting knife.

[0014] Preferably, each group of stabilizing members includes a plurality of coaxial rollers mainly attached to the middle and lower parts of the cylinder, a movable frame for fixing the rollers, a mounting rod for enabling the movable frame to slide horizontally and fixedly connected to the workbench, and a spring is provided between the mounting rod and the movable frame; The position of one group of stabilizing members should be set on the straight line between the last group of conveying rollers and the center of the cylinder.

[0015] Preferably, the perforating mechanism includes a rotating frame rotatably connected to the workbench. The central rod drives the rotating frame to rotate through the transmission of a transmission belt and a gear. A plurality of groups of working members are provided on the rotating frame. The working members include two groups of clamping rods symmetrically arranged and inclined towards the cylinder, an electromagnetic claw provided between the clamping rods, a push rod provided below the electromagnetic claw, and a hook provided below the push rod and hinged to the rotating frame.

[0016] More preferably, a manufacturing method of a heat insulation material applied to semiconductors, based on a manufacturing device of a heat insulation material applied to semiconductors, includes the following steps: Step 1, cutting step. Two fiber cloths laid out by a high-speed web laying machine are fed into the device. One is vertically input from the side of the cylinder as the side wall fiber cloth, and the other is horizontally input from above the cylinder as the bottom plate fiber cloth. The bottom plate fiber cloth is cut into a circle with strips distributed around it by a cutting member, and the side wall fiber cloth is provided with gaps on the surface by an opening member; Step 2, laminating step. The side wall fiber cloth is fixed on the cylinder by a needle plate and rotated, and the side wall fiber cloth is wrapped around the side wall of the cylinder layer by layer. For each layer of side wall fiber cloth wrapped, a layer of bottom plate fiber cloth is laminated. The cut bottom plate fiber cloth is laminated on the top of the cylinder by a fitting member, and the strip-shaped fibers around the bottom plate fiber cloth are passed through the holes opened on the surface of the side wall fiber cloth by a perforating mechanism, so that the side wall fiber cloth and the bottom plate fiber cloth are overlapped with each other; Step 3, forming step: After completing one layer of coating, the diameter of the cylinder becomes larger at this time. Correspondingly, it is necessary to increase the diameter of the bottom plate fiber cloth laminated on the upper part. Use the cutting piece to adjust the diameter of the bottom plate fiber cloth, and through the adjustment of the pressing ring, it is coordinated with the diameter of the bottom plate fiber cloth, so that the pressing ring can stably press the bottom plate fiber cloth on the cylinder to avoid wrinkles. At the same time, before the pressing ring presses down the bottom plate fiber cloth, rotate the rotating rod of the fitting horizontally to adjust the angle of the bottom plate fiber cloth, so that the fiber strips of the outer layer bottom plate fiber cloth are staggered from the fiber strips of the inner layer bottom plate fiber cloth, and then continue to complete the lamination. When multiple laminations are performed and the fiber strips of multiple layers of bottom plate fiber cloth cover the entire circumference of the cylinder, at this time, use the hole-opening piece to cut the side wall fiber cloth and cut off the upper half of the side wall fiber cloth. At this time, only the lower half of the side wall of the cylinder is coated to compensate for the thickness of the lower part of the cylinder. After completion, continue with the normal lamination steps and repeat in this way.

[0017] Advantages of the present invention: (1) In the present invention, the side wall part and the bottom plate part are provided to form the thermal insulation material. On the one hand, the high-speed web laying machine can control the direction of the fibers so that the fibers are all parallel to the outer side of the thermal insulation material, and then multiple layers of coating are carried out. Each layer of fiber cloth can be used as a heat insulation layer, thereby realizing the layer-by-layer blocking of heat and at the same time strengthening the strength of the thermal insulation material; (2) In the present invention, by setting the lamination mechanism and using the cooperation of the pressing component and the side pressing component, the side wall and the bottom plate of the thermal insulation material are laminated layer by layer. By using this method of fiber layer-by-layer lamination, on the one hand, the uniform arrangement of the fibers is realized, and on the other hand, it is convenient to control the arrangement direction of the fibers so that the fibers can always be perpendicular to the direction of heat transfer, enhancing the heat insulation efficiency; (3) In the present invention, by setting the lamination mechanism, the formed fiber cloth is processed by winding and laminating. Using this method, the forming step of the thermal insulation material can be completed quickly, reducing energy consumption. At the same time, by adjusting the parameters, the size of the required product can be quickly changed, and the applicable range is relatively large; Description of the drawings In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following described drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 It is a schematic diagram of the coating structure of a thermal insulation material applied to a semiconductor.

[0019] Figure 2 It is a schematic diagram of the forming process of a thermal insulation material applied to a semiconductor.

[0020] Figure 3 It is a schematic diagram of the overall structure of a manufacturing device for heat-insulating materials applied to semiconductors.

[0021] Figure 4 It is a schematic diagram of the structure of a forming die.

[0022] Figure 5 It is a schematic diagram of the overall structure of a pressing component.

[0023] Figure 6 It is a schematic diagram of a partial structure of a pressing component.

[0024] Figure 7 It is a schematic diagram of the cutting process of the bottom plate fiber cloth.

[0025] Figure 8 It is a schematic diagram of a partial structure of a fitting component.

[0026] Figure 9 It is a schematic diagram of the related structure of a pressing ring.

[0027] Figure 10 It is a schematic diagram of the working state of a pressing ring.

[0028] Figure 11 It is a schematic diagram of the structure of a side pressing component.

[0029] Figure 12 It is a schematic diagram of a partial structure of a side pressing component.

[0030] Figure 13 It is a schematic diagram of the structure of a clamping rod and an electromagnetic jaw.

[0031] Figure 14 It is a schematic diagram of the working of a clamping rod.

[0032] Figure 15 It is a schematic diagram of the working state of a hook.

[0033] Figure 16 It is a schematic diagram of the manufacturing process of a manufacturing method for heat-insulating materials applied to semiconductors. Specific embodiments

[0034] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0035] Embodiment 1 As Figure 1 , Figure 2 , Figure 3 shown, a heat-insulating material applied to semiconductors includes: A side wall portion 01, the side wall portion 01 is tubular and is formed by winding a complete section of fiber cloth. An opening for accommodating the passing of the bottom plate opening is provided between the layers of fiber cloth of the side wall portion 01; The bottom plate part 02, the bottom plate part 02 includes multiple layers of bottom plate fibers, and each layer of the bottom plate fibers is a fiber circle 021 in the middle and fiber strips 022 arranged around the fiber circle 021; The number of fiber layers of the side wall part 01 is the same as that of the bottom plate part 02, and each layer of fibers of the side wall part 01 is fitted into the fiber strip 022 of the bottom plate part 02 in the middle.

[0036] An insulating material manufacturing device for semiconductors, used to produce an insulating material for semiconductors, includes a high-speed web laying machine 0, and also includes: A forming die 1, the forming die 1 is arranged behind the high-speed web laying machine 0 and is used to assist in the forming of the insulating material; A laminating mechanism 2, the laminating mechanism 2 is arranged above the forming die 1 and laminates the cut fiber cloth, including a pressing component 21 arranged above the forming die 1 and used to attach the bottom plate fiber cloth to the forming die 1 and a side pressing component 22 arranged around the forming die 1 and used to attach the side wall fiber cloth to the forming die 1; A perforating mechanism 3, the perforating mechanism 3 is arranged around the forming die 1 and is used to cooperate with the laminating mechanism 2 to achieve the tight lamination of the fiber cloth.

[0037] In this embodiment, by setting an insulating material manufacturing device for semiconductors, the production and forming of a barrel-shaped insulating material are realized. The existing barrel-shaped insulating materials usually adopt a hot pressing forming process to complete the overall production. In the production process of the hot pressing forming process, it is not easy to control the fiber concentration at each position of the insulating material, and the different fiber concentrations at each part of the insulating material will affect the insulation effect to a certain extent, and the production process also requires a large amount of energy consumption.

[0038] Based on this, the present application adopts a method of covering with fiber cloth to complete the forming of the barrel-shaped insulating material. The forming of the barrel-shaped insulating material is divided into two parts, namely the side wall and the bottom plate. Through the continuous wrapping of the fiber cloth layer by layer, the production of the side wall is realized, and then the production of the bottom plate is realized by the lamination of the fiber cloth. However, bonding the side wall and the bottom plate separately after production is not conducive to the integrity and strength of the product. Therefore, by presetting the shape of the bottom plate fiber cloth, multiple groups of strip-shaped fibers are left around the bottom plate fiber cloth, and the strip-shaped fibers are arranged in the middle of the side wall fiber cloth, so as to strengthen the connection between the bottom plate and the side wall, ensure sufficient insulation effect and strength, and improve the integrity of the product.

[0039] Specifically, the forming die 1 is set to assist in the forming of the insulating material. Through the laminating mechanism 2, the fiber cloth is laminated layer by layer on the surface of the forming die 1. The pressing component 21 and the side pressing component 22 cooperate to realize the laying of the side wall fiber cloth and the bottom plate fiber cloth, and they are wrapped around each other, and then the perforating mechanism 3 is used to realize the lamination of the bottom plate fiber cloth and the side wall fiber cloth.

[0040] It should be noted that during the production process, as the sidewall fiber cloth is wound, the outer diameter of the sidewall will gradually increase accordingly, and the size of the bottom plate fiber cloth laid each time also needs to gradually increase. Therefore, the pressing component 21 and the side pressing component 22 need to cooperate. As the thickness increases, the size of the bottom plate fiber also increases, so as to complete the adaptation and ensure the uniformity of each part of the finished thermal insulation material product.

[0041] Furthermore, as Figure 4 shown, the forming die 1 includes a workbench arranged behind the high-speed web laying machine 0, a turntable 11 rotatably connected to the workbench surface, a cylinder 12 vertically slidably connected to the middle of the turntable 11 and provided with a telescopic cylinder below, and a needle plate 13 arranged on the surface of the cylinder 12 with needle holes uniformly arranged on the sidewall of the cylinder 12 and controlled by an electric cylinder to extend and retract the needle holes.

[0042] In this embodiment, by setting the turntable 11 and the cylinder 12, the cylinder 12 is used to support the fiber cloth, so that the fiber cloth can be stably formed. When the needle plate 13 moves and the needles on the needle plate 13 extend out of the cylinder 12, the sidewall fiber cloth can be fixed by the needles, and then the cylinder 12 rotates to wind the fiber cloth around the sidewall in circles.

[0043] Specifically, the cylinder 12 is used to assist in the forming of the fiber barrel. By setting the needle holes and the needle plate 13, on the one hand, the sidewall fiber cloth can be fixed, and on the other hand, the needling of multiple layers of fiber cloth can be realized to strengthen the connection between each layer of fiber cloth and reduce the occurrence of delamination.

[0044] It should be noted that the cylinder 12 is vertically slidably connected to the turntable 11, and the telescopic cylinder is used to control the downward and upward movement of the cylinder 12. When the forming is completed, at this time, the needle plate 13 retracts and the cylinder 12 moves downward, so that the formed fiber barrel can be removed from the device.

[0045] Furthermore, as Figure 5 shown, the pressing component 21 includes a conveyor belt arranged above the cylinder 12, a cutting member 211 arranged on the conveyor roller and used to cut the bottom plate fiber cloth into a specific shape, and a fitting member 212 arranged above the cylinder 12 and used to cover the cut fiber cloth on the upper end surface of the cylinder 12; The cutting member 211 includes a cutter 2111 arranged above the conveyor belt and controlled by an electric cylinder. The cutter 2111 is symmetrically arranged in multiple groups, and each group of cutters 2111 is provided with a plurality of blades, which are used to regularly cut a plurality of fiber strips 022 on the fiber cloth.

[0046] In this embodiment, a pressing component 21 is provided to achieve the pressing and covering of the bottom plate fiber cloth. For the bottom plate fiber cloth, since the thickness gradually increases towards the side, as the covering progresses, the size of the bottom plate fiber cloth on the upper layer should be larger than that on the lower layer to achieve complete coverage.

[0047] Since the bottom plate and the side wall are produced and formed separately, for the combination of the bottom plate and the side wall, directly adhering them with glue or other means will cause a decrease in the strength of the product after forming or there will be differences, and it is easy to reduce the heat preservation effect. Therefore, multiple fiber strips 022 are left around the periphery of each layer of the bottom plate fiber cloth. After the bottom plate fiber cloth covers the cylinder 12, the fiber strips 022 hang down and are covered by the side wall fiber cloth. As the fiber cloth is covered layer by layer, the fiber strips 022 are tightened by the side wall fiber cloth. In this way, the strength of the product is improved by using friction, the consistency of the product is ensured, the separation of the bottom plate and the side wall is avoided, and at the same time, by embedding the fiber strips 022 into the side wall fiber cloth, the heat preservation efficiency at the joint of the bottom plate and the side wall is ensured, and there is no need to use high-temperature-resistant glue for adhesion additionally, improving the product quality.

[0048] Specifically, a cutting member 211 is used to cut the bottom plate fiber cloth. Multiple groups of cutting blades 2111 can be provided. As the bottom plate fiber cloth moves, the cutting blades 2111 move downwards to cut out the fiber strips 022 on the bottom plate fiber cloth. It should be noted that the fiber strips 022 are cut but not completely severed. Multiple fiber strips 022 are evenly arranged around the center, but are not completely cut off but cut into the required shape, and the subsequent parts are used to complete the separation of the whole and the cloth.

[0049] It should be noted that since the bottom plate is circular, when the fiber strips 022 are folded vertically, it is inevitable that the fiber strips 022 cannot completely fit on the side wall, and there will be wrinkles at the folding places of the fiber strips 022. Therefore, the width of the fiber strips 022 should not be too long or too short. If it is too wide, it is easy to cause wrinkles and cannot fit completely. After multiple layers are accumulated, the shape of the product will deviate. If it is too narrow, the friction force will be reduced and the covering effect will be weakened.

[0050] Furthermore, as Figure 6 、 Figure 7 shown, the cutting member 211 further includes a fixed shaft 2112 arranged above the cylinder 12, a scanning ring 2113 rotatably connected to the fixed shaft 2112 through a motor control, a telescopic rod 2114 rotatably connected to the scanning ring 2113, a circular knife 2115 arranged at the end of the telescopic rod 2114, and a convex block 2116 fixed on the fixed shaft 2112 below the telescopic rod 2114.

[0051] In this embodiment, by providing a scanning ring 2113 and a circular knife 2115, the rotation of the circular knife 2115 is realized through the provision of the scanning ring 2113, and the bottom plate fiber cloth is separated by the cutting of the circular knife 2115.

[0052] Specifically, after the fiber strip 022 is processed by the cutting knife 2111, the fiber cloth is conveyed under the scanning ring 2113. The scanning ring 2113 rotates one week to drive the circular knife 2115 to rotate one week, and the circular knife 2115 draws a circle on the fiber cloth to realize the separation of the fiber cloth.

[0053] It should be noted that a convex block 2116 is provided below the telescopic rod 2114. Whenever the telescopic rod 2114 moves onto the convex block 2116, the telescopic rod 2114 will be lifted under the action of the convex block 2116, and the circular knife 2115 will be separated from the fiber cloth. The position of the convex block 2116 corresponds to the position where the fiber strip 022 is cut on the fiber cloth, that is, when the circular knife 2115 moves to the position of the reserved fiber strip 022, the circular knife 2115 is lifted, and the fiber strip 022 will not be cut by the circular knife 2115, so as to cooperate with the cutting knife 2111 to cut out a circular bottom plate with a fiber strip 022 reserved at the edge.

[0054] It is worth mentioning that the circular knife 2115 is provided on the telescopic rod 2114, and the telescopic rod 2114 is electrically controlled. As the thickness of the side wall wrapping increases, the diameter of the corresponding circular ring also needs to gradually increase. After the product is formed, the telescopic rod 2114 resets for re-production.

[0055] Furthermore, as Figure 8 、 Figure 9 、 Figure 10 shown, the fitting member 212 includes a fitting block 2121 provided above the cylinder 12, a plurality of pressing rings 2122 tightly fitting with each other inside the fitting block 2121, a control frame 2123 provided in the middle of the pressing ring 2122 and fixed on the fixed shaft 2112, an inner control rod 2124 horizontally slidably connected to the control frame 2123 by screw drive, and an outer control rod 2125 horizontally slidably connected to the fitting block 2121 by screw drive, a toothed ring 2126 rotatably connected to the control frame 2123 and used to drive the inner control rod 2124 and the outer control rod 2125, a telescopic cylinder 2127 provided on the control frame 2123 and used to drive the fitting block 2121 to move up and down, and the toothed ring 2126 is driven to rotate by the transmission method of the turntable 11 connected by gears.

[0056] In this embodiment, by providing the inner control rod 2124 and the outer control rod 2125, the control of the pressing ring 2122 is realized, and then the downward movement of the pressing rings 2122 with different diameters is controlled, and the fiber strip 022 is enabled to be flatly covered on the side wall by using the pressing ring 2122.

[0057] Specifically, since the side wall is circular, when the fiber strip 022 is turned down and attached to the side wall, it is easy to cause wrinkles in the fiber strip 022, and there may be overlap between the fiber strips 022. The wrinkles and overlap of the fiber strips 022 are not conducive to the covering and forming of the side wall. In the case of multi-layer composite, it is easy to cause dimensional differences at the position where the fiber strips 022 are located. Therefore, by moving down a circular ring with the same diameter as the side wall at this time, the fiber strip 022 is directly pressed down by the circular ring, so that the fiber strip 022 is attached to the side wall, thereby avoiding the overlap of the fiber strips 022. For the change in the diameter of the side wall, by adopting a set of pressing rings 2122, a set of pressing rings 2122 with diameters from small to large are closely attached together. As the diameter of the side wall expands, the pressing rings 2122 with corresponding sizes are pressed down to realize the combing of the fiber strips 022. The thickness of each pressing ring 2122 should be accurately controlled and approximated to the thickness of the fiber cloth as much as possible, so as to achieve close attachment.

[0058] That is, as the turntable 11 rotates, the synchronous drive gear ring 2126 rotates, and the gear ring 2126 synchronously drives the rotation of the threaded rod that controls the movement of the inner control rod 2124 and the outer control rod 2125, so that the inner control rod 2124 and the outer control rod 2125 move synchronously. The inner control rod 2124 and the outer control rod 2125 are arranged through the upper parts of the pressing rings 2122, and the ends of the two rods are on the same vertical plane. As the production progresses, both the inner control rod 2124 and the outer control rod 2125 move outwards. When the outer control rod 2125 disengages from one of the pressing rings 2122, the inner control rod 2124 is inserted into the pressing ring 2122. When the fitting block 2121 moves down, it drives the entire outer pressing ring 2122 to move down, while the pressing ring 2122 sleeved on the inner control rod 2124 does not move down. The moving-down pressing ring 2122 attaches the fiber strip 022 to the side wall. It is worth mentioning that since the fiber cloth on the side wall of one side of the cylinder 12 is continuously input, an opening is provided on all the pressing rings 2122. When the pressing ring 2122 moves down, the opening can avoid the input fiber cloth.

[0059] Furthermore, as Figure 6 、 Figure 11 shown, the fitting member 212 further includes a central rod 2128 rotatably connected above the center of the cylinder 12 through motor control, a vertical rotating rod 2129 provided at the center of the lower end of the central rod 2128, a plurality of fixed needles 2130 provided around the rotating rod 2129, and a positioning rod 2131 provided inside the cylinder 12 and vertically lifted and lowered through an electric cylinder.

[0060] In this embodiment, by providing the central rod 2128 and the rotating rod 2129, when the circular knife 2115 performs overall cutting on the bottom plate fiber cloth, the positioning rod 2131 rises, and the positioning rod 2131 and the rotating rod 2129 clamp the fiber cloth with the center of the bottom plate fiber cloth as the center. At the same time, the fixing needle 2130 also pierces into the fiber cloth, and the central rod 2128 rotates to realize the rotation of the fiber cloth.

[0061] Specifically, after the bottom plate fiber cloth is laminated on the side wall, the part where the fiber strip 022 is located is one layer thicker than other positions at this time. If the position of the subsequent fiber strip 022 is not rotated, the thickness at this place will increase rapidly, resulting in dimensional deviation. Therefore, by rotating the bottom plate fiber cloth, the area covered by each fiber strip 022 is staggered from the previous time. At the same time, the width of the fiber strip 022 should also be accurately set. For example, four groups of fiber strips 022 are provided around the circumference of each layer of fiber cloth, and the width of each group of fiber strips 022 occupies 30° of the fiber cloth circle. When the second layer of fiber cloth is laid, the central rod 2128 rotates 30°, so that the fiber strip 022 of the second layer is staggered from the fiber strip 022 of the first layer. At the same time, the third layer of fiber cloth rotates 60° and is staggered from the first layer and the second layer. At this time, the three layers of fiber strips 022 just surround the side wall for one week, and the area covered by the fiber strips 022 is exactly one layer thicker than the area below the lower part of the cylinder 12. Therefore, it is necessary to wind one more layer of fiber cloth on the lower part of the side wall for compensation later, so as to ensure that the thickness of the upper and lower positions of the side wall is consistent.

[0062] Further, as Figure 11 shown, the side pressing assembly 22 includes an opening member 221 for opening holes in the inner lower part of the side wall and a plurality of groups of stabilizing members 222 arranged around the cylinder 12. The opening member 221 includes a plurality of groups of conveying rollers 2211 for conveying the side wall fiber cloth to one side of the cylinder 12, two groups of cutting knives 2212 arranged between the conveying rollers 2211 and the cylinder 12 and located on both sides of the fiber cloth. Each group of cutting knives 2212 includes a plurality of blades with the same distance. The cutting knives 2212 are arranged at the end of the telescopic rod of the electric cylinder, and the bottom of the electric cylinder is arranged on the rotating shaft of the motor, and a cutting knife 2213 controlled to move by the electric cylinder is arranged behind the cutting knives 2212.

[0063] In this embodiment, by providing the opening member 221, on the one hand, the fiber cloth input into the side wall of the cylinder 12 is cut to make an opening in the side wall fiber cloth, and this opening is used for the cooperative winding with the fiber strip 022. On the other hand, when compensation for the side wall is required, the fiber cloth is cut on a large scale to cut out a fiber cloth of a suitable size for input.

[0064] Specifically, the slides provided on both sides are used to cut open the fiber cloth, creating openings on the surface of the sidewall fiber cloth. The position of the openings needs to be coordinated with the rotation angle of the bottom fiber cloth. When the bottom fiber cloth rotates, the corresponding positions where the openings need to be cut also need to be adjusted. When sidewall compensation is required, the cutter 2212 adjusts its position and cooperates with the cutting knife 2213 for overall cutting, so that the cut fiber cloth can just cover the area without the fiber strip 022, achieving thickness compensation for the sidewall.

[0065] Furthermore, as Figure 12 shown, each set of stabilizers 222 includes a plurality of coaxial rollers 2221, and the rollers 2221 mainly adhere to the middle and lower parts of the cylinder 12. There is a movable frame 2222 for fixing the rollers 2221, a mounting rod 2223 for enabling the movable frame 2222 to achieve horizontal sliding and fixedly connected to the workbench, and a spring is provided between the mounting rod 2223 and the movable frame 2222; The position of one set of stabilizers 222 should be set on the straight line position between the last set of conveying rollers 2211 and the center of the cylinder 12.

[0066] In this embodiment, by setting the rollers 2221 and the movable frame 2222, the fixation of the sidewall fiber cloth is achieved, ensuring that the fiber cloth will not form wrinkles or deviate due to slack during the winding process. The rollers 2221 adhere to the surface of the cylinder 12. As the sidewall fiber cloth is input, the rollers 2221 roll over the fiber cloth, ensuring that there are no obvious gaps among various parts of the fiber cloth, so that after the fiber cloth is input onto the surface of the cylinder 12, it will not deviate due to the up and down movement of the pressing ring 2122.

[0067] It should be noted that the stabilizers 222 are evenly arranged around the cylinder 12. If the fiber cloth is directly conveyed from the conveying rollers 2211 to the surface of the cylinder 12, due to the increasing thickness of the sidewall, the moving path of the cloth between the fiber cloth and the cylinder 12 will deflect, thus affecting the cutting of the fiber cloth surface by the opening member 221. At the same time, the deflection of the moving path of the cloth will cause it to be difficult for the pressing ring 2122 to avoid the fiber cloth being input when it descends. Therefore, by setting one set of stabilizers 222 on the straight line position between the last set of conveying rollers 2211 and the center of the cylinder 12, after the fiber cloth exits the conveying rollers 2211, it first contacts this set of stabilizers and then turns to the circular roller through the stabilizers 222, thus avoiding the deflection of the moving path of the fiber cloth.

[0068] Furthermore, as Figure 12 、 Figure 13 、 Figure 14 、 Figure 15As shown in the figure, the perforating mechanism 3 includes a rotating frame 31 rotatably connected to the workbench. The central rod 2128 drives the rotating frame 31 to rotate through a transmission belt and a gear. A plurality of working members 32 are arranged on the rotating frame 31. The working member 32 includes two sets of clamping rods 321 symmetrically arranged and inclined towards the cylinder 12, an electromagnetic gripper 322 arranged between the clamping rods 321, a push rod 323 arranged below the electromagnetic gripper 322, and a hook 324 arranged below the push rod 323 and hinged to the rotating frame 31.

[0069] In this embodiment, by arranging the clamping rod 321 and the push rod 323, the mutual lamination of the fiber strip 022 and the side wall fiber cloth is realized.

[0070] Specifically, an opening is left on the side wall fiber cloth by the opening member 221. When a layer of side wall fiber cloth and a layer of bottom plate fiber cloth are wrapped, at this time, the fiber strip 022 is located inside the side wall fiber cloth. The clamping rod 321 extends towards the opening on the side wall fiber cloth. The two clamping rods 321 are arranged with an included angle. By extending the clamping rod 321, it passes through the opening and directly presses the internal fiber strip 022, causing the middle of the fiber strip 022 to warp. The electromagnetic gripper 322 grabs and pulls out the fiber strip 022, so that the lower part of the fiber strip 022 is pulled out of the side wall fiber cloth. Then the hook 324 rotates. During the rotation of the hook 324, it contacts the opening below and opens the opening. The push rod 323 is pushed out, and the pulled fiber strip 022 is stuffed back into the side wall fiber cloth again, realizing the mutual embedding of the fiber strip 022 and the side wall fiber cloth.

[0071] It should be noted that the width of the opening opened by the opening member 221 should be greater than the width of the fiber strip 022. The lever hooks the two ends of the opening to open the opening, avoiding affecting the stuffing of the fiber strip 022. At the same time, in order to cope with the change of the side wall thickness, an elastic material is arranged in the middle of the lever to cope with the gradual thickening of the side wall.

[0072] It is worth mentioning that by arranging the rotating frame 31, the correspondence between the perforating mechanism 3 and the position of the fiber strip 022 is realized. The position adjustment of the fiber strip 022 synchronously drives the rotating frame 31 to rotate, so that the positions of the clamping rod 321 and the hook 324 can always correspond to the position of the fiber strip 022.

[0073] Embodiment Two As Figure 16 shown, the same or corresponding components as those in Embodiment One adopt the corresponding reference numerals in Embodiment One. For the sake of simplicity, only the differences from Embodiment One will be described below. The difference between this Embodiment Two and Embodiment One is that: Further, as Figure 16 shown, a manufacturing method of a heat insulation material applied to a semiconductor, which is applied to a manufacturing device of a heat insulation material applied to a semiconductor, includes the following steps: Step 1: Cutting step. Two fiber cloths laid out by a high-speed web laying machine 0 are fed into the device. One is vertically fed into the side of the cylinder 12 as the sidewall fiber cloth, and the other is horizontally fed above the cylinder 12 as the bottom plate fiber cloth. The bottom plate fiber cloth is cut into a circular shape with strips distributed around it by the cutting member 211. The sidewall fiber cloth has voids opened on its surface by the hole-opening member 221. Step 2: Laminating step. The sidewall fiber cloth is fixed on the cylinder 12 by the needle plate 13 and rotates, wrapping the sidewall fiber cloth around the sidewall of the cylinder 12 layer by layer. For each layer of the sidewall fiber cloth wrapped, one layer of the bottom plate fiber cloth is laminated. The cut bottom plate fiber cloth is laminated on the top of the cylinder 12 by the laminating section, and the strip-shaped fibers around the bottom plate fiber cloth are passed through the holes opened on the surface of the sidewall fiber cloth by the perforating mechanism 3, so that the sidewall fiber cloth and the bottom plate fiber cloth are overlapped with each other. Step 3: Forming step. After one layer of lamination is completed, at this time, the diameter of the cylinder 12 becomes larger. Correspondingly, the diameter of the bottom plate fiber cloth laminated above also needs to become larger. The cutting member 211 is used to adjust the diameter of the bottom plate fiber cloth, and through the adjustment of the pressing ring 2122, it is matched with the diameter of the bottom plate fiber cloth, so that the pressing ring 2122 can stably press the bottom plate fiber cloth on the cylinder 12 to avoid wrinkles. At the same time, before the pressing ring 2122 presses down the bottom plate fiber cloth, the angle of the bottom plate fiber cloth is horizontally rotated by the rotating rod 2129 of the laminating member 212, so that the fiber strips 022 of the outer-layer bottom plate fiber cloth are staggered from the fiber strips 022 of the inner-layer bottom plate fiber cloth, and then the lamination is continued. When multiple laminations are carried out and the fiber strips 022 of the multi-layer bottom plate fiber cloth cover the entire circumference of the cylinder 12, at this time, the sidewall fiber cloth is cut by opening holes, and the upper half of the sidewall fiber cloth is cut off. At this time, only the lower half of the sidewall of the cylinder 12 is covered, realizing the compensation for the thickness of the lower part of the cylinder 12. After completion, the normal lamination step is continued, and so on.

[0074] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "front and back", "left and right", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the invention.

[0075] Certainly, in this technical solution, those skilled in the art should understand that the term "one" should be understood as "at least one" or "one or more". That is, in one embodiment, the number of one element can be one, while in other embodiments, the number of this element can be multiple. The term "one" cannot be understood as a limitation on the quantity.

[0076] As described above, it is only the preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any change or replacement that can be easily thought of by those skilled in the art in the technical field of the present invention under the technical hint of the present invention should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. A thermal insulation material used in semiconductors, characterized in that: include: A side wall portion (01), the side wall portion (01) being tubular and formed by winding a complete section of fiber cloth, wherein each layer of fiber cloth of the side wall portion (01) is provided with an opening in the middle thereof for accommodating the bottom plate opening to pass through; A bottom plate portion (02), the bottom plate portion (02) comprising multiple layers of bottom plate fibers, each layer of the bottom plate fibers comprising a fiber circle (021) in the middle and fiber strips (022) arranged around the fiber circle (021); The number of fiber layers of the side wall portion (01) is the same as the number of fiber layers of the bottom plate portion (02), and the fiber strips (022) of the bottom plate portion (02) are embedded in the middle of each fiber layer of the side wall portion (01).

2. A thermal insulation material manufacturing device for semiconductors, used to produce the thermal insulation material for semiconductors according to claim 1, characterized in that: The invention comprises a high-speed web laying machine (0), and further comprises: A forming mold (1), wherein the forming mold (1) is arranged behind the high-speed web laying machine (0) and is used to assist in the forming of the thermal insulation material; A laminating mechanism (2), the laminating mechanism (2) being arranged above the forming mold (1) and laminating the cut fiber cloth, comprising a pressing assembly (21) arranged above the forming mold (1) and used to attach the bottom plate fiber cloth to the forming mold (1), and a side pressing assembly (22) arranged around the forming mold (1) and used to attach the side wall fiber cloth to the forming mold (1); A perforating mechanism (3) is arranged around the forming mold (1) and is used to cooperate with the laminating mechanism (2) to achieve fastening and laminating of the fiber cloth.

3. The thermal insulation material manufacturing device for semiconductor according to claim 2, characterized in that: The forming die (1) comprises a workbench arranged at the rear of the high-speed web laying machine (0), a turntable (11) rotatably connected to the workbench, a cylinder (12) vertically slidably connected to the middle of the turntable (11) and provided with a telescopic cylinder below, needle holes arranged on the surface of the cylinder (12), and a needle plate (13) evenly arranged on the side wall of the cylinder (12) and controlled by an electric cylinder to extend and retract the needle holes.

4. The thermal insulation material manufacturing device for semiconductor according to claim 3, characterized in that: The laminating assembly (21) comprises a conveyor belt arranged above the cylinder (12), a cutting piece (211) arranged on the conveyor roller and used for cutting the bottom plate fiber cloth into a specific shape, and a laminating piece (212) arranged above the cylinder (12) and used for laminating the cut fiber cloth onto the upper end surface of the cylinder (12); The cutting piece (211) comprises a cutter (2111) arranged above the conveyor belt and controlled by an electric cylinder, wherein the cutters (2111) are symmetrically arranged in multiple groups and each group of cutters (2111) is provided with multiple blades for regularly cutting multiple fiber strips (022) on the fiber cloth; It also comprises a fixed shaft (2112) arranged above the cylinder (12), a scanning ring (2113) rotatably connected to the fixed shaft (2112) through motor control, a telescopic rod (2114) rotatably connected to the scanning ring (2113), a circular knife (2115) arranged at the end of the telescopic rod (2114), and a protrusion (2116) fixed on the fixed shaft (2112) below the telescopic rod (2114).

5. The thermal insulation material manufacturing device for semiconductor according to claim 4, characterized in that: The fitting member (212) comprises a fitting block (2121) arranged above the cylinder (12), a plurality of groups of pressing rings (2122) arranged inside the fitting block (2121) and tightly fitted with each other, a control frame (2123) arranged in the middle of the pressing ring (2122) and fixed on the fixed shaft (2112), an inner control rod (2124) horizontally slidably connected to the control frame (2123) by thread drive, and an outer control rod (2125) horizontally slidably connected to the fitting block (2121) by thread drive, a gear ring (2126) rotatably connected to the control frame (2123) and used for driving the inner control rod (2124) and the outer control rod (2125), a telescopic cylinder (2127) arranged on the control frame (2123) and used for driving the fitting block (2121) to move up and down, and the turntable (11) drives the gear ring (2126) to rotate by a transmission method of gear connection.

6. The thermal insulation material manufacturing device for semiconductor according to claim 5, characterized in that: The fitting member (212) further comprises a center rod (2128) connected to the center of the cylinder (12) and controlled to rotate by a motor, a rotating rod (2129) arranged at the center of the lower end of the center rod (2128), a plurality of groups of fixing needles (2130) arranged around the rotating rod (2129), and a positioning rod (2131) arranged inside the cylinder (12) and controlled to rise and fall vertically by an electric cylinder.

7. The thermal insulation material manufacturing device for semiconductor according to claim 2, characterized in that: The side pressure assembly (22) comprises a hole-opening member (221) for opening a hole on the lower inner portion of the side wall and a plurality of stabilizing members (222) arranged around the cylinder (12), the hole-opening member (221) comprising a plurality of conveying rollers (2211) for conveying the side wall fiber cloth to one side of the cylinder (12), two groups of cutters (2212) arranged between the conveying rollers (2211) and the cylinder (12) and located on both sides of the fiber cloth, each group of cutters (2212) comprising a plurality of groups of blades with uniform distances, the cutters (2212) being arranged at the end of a telescopic rod of an electric cylinder and the bottom of the electric cylinder being arranged on the rotating shaft of a motor, and a cutting knife (2213) being arranged behind the cutters (2212) and moving controlled by the electric cylinder.

8. The thermal insulation material manufacturing device for semiconductor according to claim 7, characterized in that: Each group of stabilizing members (222) comprises a plurality of coaxial rollers (2221), wherein the rollers (2221) are mainly attached to the middle and lower part of the cylinder (12), a movable frame (2222) for fixing the rollers (2221), a mounting rod (2223) for enabling the movable frame (2222) to slide horizontally and fixedly connected to the workbench, and a spring is arranged between the mounting rod (2223) and the movable frame (2222); The position of one set of stabilizing members (222) should be set on the straight line between the last set of conveying rollers (2211) and the center of the cylinder (12).

9. The thermal insulation material manufacturing device for semiconductor according to claim 2, characterized in that: The perforating mechanism (3) comprises a rotating frame (31) rotatably connected to a workbench, a center rod (2128) driving the rotating frame (31) to rotate via a transmission belt and a gear, a plurality of groups of working pieces (32) being arranged on the rotating frame (31), the working pieces (32) comprising two groups of clamping rods (321) symmetrically arranged and inclined toward the cylinder (12), an electromagnetic clamping claw (322) arranged in the middle of the clamping rod (321), a push rod (323) arranged below the electromagnetic clamping claw (322), and a pulling hook (324) arranged below the push rod (323) and hinged on the rotating frame (31).

10. A method for manufacturing a thermal insulation material for semiconductors, applied to a device for manufacturing a thermal insulation material for semiconductors as claimed in any one of claims 2 to 9, characterized in that: The following steps are involved: Step 1, a cutting step, wherein two fiber cloths laid out by the high-speed web laying machine (0) are conveyed into the device, one of which is vertically fed from the side of the cylinder (12) to serve as the side wall fiber cloth, and the other of which is horizontally fed from the top of the cylinder (12) to serve as the bottom plate fiber cloth. The bottom plate fiber cloth is cut into a circular shape with strips distributed around it by a cutting piece (211), and the side wall fiber cloth is cut into gaps on its surface by a hole-opening piece (221); Step 2, a laminating step, wherein the side wall fiber cloth is fixed on the cylinder (12) by a needle plate (13) and rotated, and the side wall fiber cloth is wrapped around the side wall of the cylinder (12) in circles, and each layer of the side wall fiber cloth is wrapped, that is, a layer of the bottom plate fiber cloth is laminated, and the cut bottom plate fiber cloth is laminated to the top of the cylinder (12) by using a laminating room, and the strip fibers around the bottom plate fiber cloth are passed through the holes opened on the surface of the side wall fiber cloth by using a perforating mechanism (3), so that the side wall fiber cloth and the bottom plate fiber cloth are overlapped with each other; Step three, the forming step, after completing a layer of coating, the diameter of the cylinder (12) becomes larger, and the diameter of the bottom plate fiber cloth coated on the top needs to be increased accordingly. The diameter of the bottom plate fiber cloth is adjusted by using the cutting piece (211), and the pressure ring (2122) is adjusted to match the diameter of the bottom plate fiber cloth, so that the pressure ring (2122) can stably press the bottom plate fiber cloth on the cylinder (12) to avoid wrinkles. At the same time, before the pressure ring (2122) presses the bottom plate fiber cloth down, the bottom plate is horizontally rotated by the rotating rod (2129) of the fitting piece (212). The angle of the fiber cloth is such that the positions of the fiber strips (022) of the outer bottom plate fiber cloth and the fiber strips (022) of the inner bottom plate fiber cloth are offset, and then the lamination is continued. After multiple laminations, the fiber strips (022) of the multiple layers of bottom plate fiber cloth cover the entire circumference of the cylinder (12). At this time, the side wall fiber cloth is cut using the opening member (221) to cut off the upper half of the side wall fiber cloth. At this time, only the side wall of the lower half of the cylinder (12) is covered to achieve compensation for the thickness of the lower part of the cylinder (12). After completion, the normal lamination steps are continued, and this is repeated.

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