A heat retaining material applied to a semiconductor, a manufacturing apparatus and a method for manufacturing the heat retaining material

Abstract

This invention relates to the field of thermal insulation materials technology, and more particularly to a thermal insulation material for semiconductors, a manufacturing apparatus for manufacturing the thermal insulation material, and a method thereof. A thermal insulation material for semiconductors includes: a sidewall portion and a base plate portion; a manufacturing apparatus for the thermal insulation material for semiconductors, used to produce the thermal insulation material, includes a high-speed web-laying machine, and further includes: a forming mold, the forming mold being disposed behind the high-speed web-laying machine and used to assist in the forming of the thermal insulation material; a laminating mechanism, the laminating mechanism being disposed above the forming mold and used to laminate the cut fiber cloth, including a pressing component disposed above the forming mold and used to adhere the base plate fiber cloth to the forming mold, and a side pressing component disposed around the forming mold and used to adhere the sidewall fiber cloth to the forming mold; a perforating mechanism, the perforating mechanism being disposed around the forming mold and used to cooperate with the laminating mechanism to achieve a tight bonding of the fiber cloth.

Description

Technical Field

[0001] This invention relates to the field of thermal insulation materials technology, and more particularly to a thermal insulation material for semiconductors, a manufacturing apparatus for manufacturing the thermal insulation material, and a method thereof. Background Technology

[0002] With the advancement of science and technology, fields such as military, national defense, solar energy, semiconductors, and heat treatment are developing rapidly, and the development of these fields all involve the use of thermal insulation materials. In particular, the rapid development of solar energy and semiconductors in recent years has made the demand for thermal insulation materials more prominent, and the requirements for thermal insulation materials are becoming increasingly higher. Not only are energy conservation and consumption reduction required, but also high oxidation resistance is required. These requirements are constantly promoting the rapid development of the thermal insulation materials field.

[0003] Patent document CN106904986B discloses a method for manufacturing a high-performance composite carbon fiber insulation board. The method involves mixing a mixture of chopped and ground carbon fibers with an organic binder and a solvent, removing the solvent, and then mixing the composite carbon fibers coated with the organic binder with water and a dispersant to form a carbon fiber slurry. This slurry is then vacuum-formed into a pre-finished composite carbon fiber insulation board. The slurry is dehydrated using hot steam or hot air and undergoes a non-melting / non-dissolving treatment. Finally, it is carbonized or graphitized to obtain the finished composite carbon fiber insulation board.

[0004] However, in actual use, the production of a barrel-shaped insulation material often adopts hot pressing molding, but this method is prone to uneven fiber distribution, which affects its insulation performance. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by adjusting the molding process of the insulation material through the setting of a side wall portion and a bottom plate portion, and by using a multi-layer fiber cloth wrapping method to achieve the molding of the insulation material, and by making the side wall portion and the bottom plate portion overlap each other, thereby solving the technical problem of uneven insulation performance in different parts of the insulation material.

[0006] To address the above technical issues, the following technical solution is adopted:

[0007] A thermal insulation material for use in semiconductors, comprising:

[0008] The sidewall portion is tubular and is formed by winding a complete section of fiber cloth, wherein each layer of fiber cloth in the sidewall portion has an opening in the middle for accommodating the bottom plate portion to pass through;

[0009] The base plate portion includes multiple layers of base plate fibers, each layer of base plate fibers consisting of a central fiber circle and fiber strips arranged around the fiber circle.

[0010] The number of fiber layers in the sidewall portion is the same as the number of fiber layers in the bottom plate portion, and the fiber strips in the bottom plate portion are interlocked between the fiber layers in the sidewall portion.

[0011] An apparatus for manufacturing thermal insulation materials for semiconductors, comprising a high-speed web-laying machine, and further comprising:

[0012] A molding die, which is located behind the high-speed mesh laying machine and is used to assist in the molding of the insulation material;

[0013] A laminating mechanism is provided above the molding die and laminating the cut fiber cloth, including a pressing component provided above the molding die for attaching the base plate fiber cloth to the molding die and a side pressing component provided around the molding die for attaching the side wall fiber cloth to the molding die.

[0014] A perforation mechanism is provided around the forming mold and is used to cooperate with the laminating mechanism to achieve a tight bonding of the fiber cloth.

[0015] Preferably, the molding die includes a worktable located behind the high-speed web laying machine, a turntable rotatably connected to the worktable, a cylinder vertically slidably connected to the middle of the turntable and with a telescopic cylinder located below it, and a needle plate with needle holes evenly arranged on the side wall of the cylinder and controlled by an electric cylinder to extend and retract the needle holes.

[0016] Preferably, the pressing assembly includes a conveyor belt disposed above the cylinder, a cutting component disposed on the conveyor roller for cutting the base plate fiber cloth into a specific shape, and a bonding component disposed above the cylinder for covering the cut fiber cloth onto the upper end face of the cylinder.

[0017] The cutting component includes a cutter positioned above the conveyor belt and controlled by an electric cylinder. Multiple sets of cutters are symmetrically arranged, and each set of cutters contains multiple blades, used to regularly cut multiple fiber strips from the fiber cloth.

[0018] Preferably, the cutting component further includes a fixed shaft disposed above the cylinder, a scanning ring rotatably connected to the fixed shaft via a motor, a telescopic rod rotatably connected to the scanning ring, a circular blade disposed at the end of the telescopic rod, and a protrusion fixed to the fixed shaft below the telescopic rod.

[0019] Preferably, the bonding component includes a bonding block disposed above the cylinder, multiple sets of tightly fitted pressure rings disposed inside the bonding block, a control frame disposed in the middle of the pressure rings and fixed on a fixed shaft, an inner control rod and an outer control rod that are horizontally slidably connected to the control frame via a threaded drive, a gear ring rotatably connected to the control frame and used to drive the inner and outer control rods, a telescopic cylinder disposed on the control frame and used to drive the bonding block to move up and down, and a turntable that drives the gear ring to rotate via a gear-connected transmission method.

[0020] Preferably, the bonding component further includes a central rod that is rotatably connected above the center of the cylinder by a motor, a rotating rod located at the center of the lower end of the central rod, multiple sets of fixing pins located around the rotating rod, and a positioning rod located inside the cylinder and vertically raised and lowered by an electric cylinder.

[0021] Preferably, the side pressure assembly includes an opening member for making a hole in the lower interior of the side wall and multiple sets of stabilizing members arranged around the cylinder. The opening member includes multiple sets of conveying rollers for conveying the side wall fiber cloth to one side of the cylinder, two sets of slicing blades arranged between the conveying rollers and the cylinder and located on both sides of the fiber cloth, each set of slicing blades including multiple sets of blades at equal distances, the slicing blades being arranged at the end of the telescopic rod of the electric cylinder and the bottom of the electric cylinder being arranged on the rotating shaft of the motor, and a second cutting blade arranged behind the slicing blades and moved by the electric cylinder.

[0022] Preferably, each set of stabilizers includes multiple coaxial rollers with the rollers mainly attached to the lower middle part of the cylinder, a movable frame for fixing the rollers, a mounting rod for enabling the movable frame to slide horizontally and fixedly connected to the worktable, and a spring provided between the mounting rod and the movable frame.

[0023] One set of stabilizers should be positioned on the straight line between the last set of conveyor rollers and the center of the cylinder.

[0024] Preferably, the perforation mechanism includes a rotating frame rotatably connected to the workbench, and a central rod driving the rotating frame to rotate via a transmission belt and gears. The rotating frame is provided with multiple sets of working parts, including two sets of symmetrically arranged clamping rods inclined towards the cylinder, an electromagnetic gripper located in the middle of the clamping rods, a push rod located below the electromagnetic gripper, and a hook located below the push rod and hinged to the rotating frame.

[0025] As a further preferred embodiment, the method for manufacturing a thermal insulation material for semiconductors, based on a thermal insulation material manufacturing apparatus for semiconductors, includes the following steps:

[0026] Step 1, Cutting Step: Two fiber cloths laid out by the high-speed web laying machine are fed into the device. One is vertically fed into the side of the cylinder as the side wall fiber cloth, and the other is horizontally fed into the top of the cylinder as the bottom plate fiber cloth. The bottom plate fiber cloth is cut into a circle with strips distributed around it by the cutting device, and the side wall fiber cloth has gaps opened on the surface by the opening device.

[0027] Step 2, the lamination step: The side wall fiber cloth is fixed to the cylinder by the needle plate and rotated to wrap the side wall fiber cloth around the cylinder side wall in circles. Each layer of side wall fiber cloth is wrapped with a layer of bottom plate fiber cloth. The cut bottom plate fiber cloth is attached to the top of the cylinder by the bonding gap, and the perforation mechanism is used to make the strip fibers around the bottom plate fiber cloth pass through the holes opened on the surface of the side wall fiber cloth, so that the side wall fiber cloth and the bottom plate fiber cloth overlap each other.

[0028] Step 3, the forming process: After completing one layer of coating, the diameter of the cylinder increases. Correspondingly, the diameter of the base fiber cloth layer on top also needs to increase. The diameter of the base fiber cloth is adjusted using the cutting tool, and the pressure ring is adjusted to match the diameter of the base fiber cloth, so that the pressure ring can stably press the base fiber cloth onto the cylinder, avoiding wrinkles. At the same time, before the pressure ring presses down the base fiber cloth, the angle of the base fiber cloth is horizontally rotated by the rotating rod of the bonding tool, so that the fiber strips of the outer base fiber cloth are misaligned with the fiber strips of the inner base fiber cloth. Then, the coating process continues. After multiple coatings, when the fiber strips of multiple layers of base fiber cloth have covered the entire circumference of the cylinder, the side wall fiber cloth is cut using the perforating tool, removing the upper half of the side wall fiber cloth. At this point, only the lower half of the cylinder's side wall is coated to compensate for the thickness of the lower part of the cylinder. After completion, the normal coating process continues, and this process is repeated.

[0029] The beneficial effects of this invention are:

[0030] (1) In this invention, a side wall and a bottom plate are provided to form the insulation material. On the one hand, the direction of the fibers can be controlled by a high-speed web laying machine so that the fibers are parallel to the outer surface of the insulation material. Then, multiple layers are wrapped. Each layer of fiber cloth can be used as a heat insulation layer, thereby achieving layer-by-layer heat blocking and strengthening the strength of the insulation material.

[0031] (2) In this invention, by setting up a bonding mechanism, the bonding component and the side pressing component are used to complete the layer-by-layer bonding of the insulation material sidewall and the bottom plate. By using this fiber layer-by-layer bonding method, on the one hand, the uniform arrangement of the fibers is achieved, and on the other hand, it is easy to control the arrangement direction of the fibers, so that the fibers can always be perpendicular to the direction of heat transfer, thereby enhancing the insulation performance.

[0032] (3) In this invention, by setting up a lamination mechanism, the pre-formed fiber cloth is wound and stacked. This method can quickly complete the forming step of the insulation material, reduce energy consumption, and by adjusting the parameters, the size of the required product can be quickly changed, making it widely applicable. Attached Figure Description

[0033] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0034] Figure 1 This is a schematic diagram of the coating structure of a thermal insulation material used in semiconductors.

[0035] Figure 2 This is a schematic diagram of the molding process of a thermal insulation material used in semiconductors.

[0036] Figure 3 This is a schematic diagram of the overall structure of a device for manufacturing thermal insulation materials for semiconductors.

[0037] Figure 4 This is a schematic diagram of the molding die.

[0038] Figure 5 This is a schematic diagram of the overall structure of the pressing assembly.

[0039] Figure 6 This is a partial structural diagram of the pressing assembly.

[0040] Figure 7 This is a schematic diagram of the cutting process of the base plate fiber cloth.

[0041] Figure 8 This is a partial structural diagram of the bonding component.

[0042] Figure 9 This is a schematic diagram of the relevant structure of the pressure ring.

[0043] Figure 10 This is a schematic diagram of the working state of the pressure ring.

[0044] Figure 11 This is a schematic diagram of the side-pressure assembly.

[0045] Figure 12 This is a partial structural diagram of the side-pressure assembly.

[0046] Figure 13 This is a schematic diagram of the clamping rod and electromagnetic gripper.

[0047] Figure 14 This is a schematic diagram of the clamping rod's operation.

[0048] Figure 15 This is a schematic diagram of the working state of the lever.

[0049] Figure 16 This is a schematic diagram of the manufacturing process for a thermal insulation material used in semiconductors. Detailed Implementation

[0050] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0051] Example 1

[0052] like Figure 1 , Figure 2 , Figure 3 As shown, a thermal insulation material for semiconductors includes:

[0053] Side wall portion 01, which is tubular and is formed by winding a complete section of fiber cloth, wherein each layer of fiber cloth in the side wall portion 01 has an opening in the middle for accommodating the bottom plate portion 02 to pass through;

[0054] The base plate part 02 includes multiple layers of base plate fibers, each layer of base plate fibers being a central fiber circle 021 and fiber strips 022 disposed around the fiber circle 021.

[0055] The sidewall portion 01 has the same number of fiber layers as the bottom plate portion 02, and the fiber strips 022 of the bottom plate portion 02 are interlocked between the fiber layers of the sidewall portion 01.

[0056] An apparatus for manufacturing thermal insulation materials for semiconductors, comprising a high-speed web-laying machine 0, and further comprising:

[0057] Molding mold 1, which is located behind the high-speed mesh laying machine 0 and is used to assist in the molding of thermal insulation material;

[0058] The laminating mechanism 2 is disposed above the molding mold 1 and laminating the cut fiber cloth. It includes a pressing component 21 disposed above the molding mold 1 and used to attach the bottom plate fiber cloth to the molding mold 1, and a side pressing component 22 disposed around the molding mold 1 and used to attach the side wall fiber cloth to the molding mold 1.

[0059] The perforation mechanism 3 is arranged around the forming mold 1 and is used to cooperate with the laminating mechanism 2 to achieve tight bonding of the fiber cloth.

[0060] In this embodiment, a device for manufacturing insulation materials for semiconductors is used to produce and shape a barrel-shaped insulation material. Existing barrel-shaped insulation materials are usually produced by hot pressing. During the hot pressing process, it is not easy to control the fiber concentration at different locations of the insulation material. The difference in fiber concentration at different locations of the insulation material will affect the insulation effect to some extent. The production process also requires a large amount of energy.

[0061] Based on this, this application uses a fiber cloth wrapping method to complete the molding of the barrel-shaped thermal insulation material. The molding of the barrel-shaped thermal insulation material is divided into two parts: the side wall and the bottom plate. The side wall is produced by wrapping it with continuous fiber cloth layer by layer, and the bottom plate is produced by stacking the fiber cloth. However, it is not conducive to the integrity and strength of the product if the side wall and the bottom plate are produced separately and then bonded. Therefore, by pre-setting the shape of the bottom plate fiber cloth, multiple sets of strip fibers flow out around the bottom plate fiber cloth and are arranged in the middle of the side wall fiber cloth, thereby strengthening the connection between the bottom plate and the side wall, ensuring sufficient thermal insulation effect and strength, and improving the integrity of the product.

[0062] In detail, a molding mold 1 is set up to assist in the molding of the insulation material. The fiber cloth is layered on the surface of the molding mold 1 through the laminating mechanism 2. The pressing component 21 and the side pressing component 22 work together to lay the side wall fiber cloth and the bottom plate fiber cloth together. The bottom plate fiber cloth and the side wall fiber cloth are then overlapped by the perforating mechanism 3.

[0063] It should be noted that during the production process, as the sidewall fiber cloth is wound, the outer diameter of the sidewall will gradually increase, and the size of the bottom plate fiber cloth laid each time must also gradually increase. Therefore, the pressing component 21 and the side pressing component 22 need to cooperate. As the thickness increases, the size of the bottom plate fiber also increases, so as to achieve adaptation and ensure the uniformity of the finished insulation material.

[0064] Furthermore, such as Figure 4 As shown, the molding die 1 includes a worktable set behind the high-speed web laying machine 0, a turntable 11 rotatably connected to the worktable, a cylinder 12 vertically slidably connected to the middle of the turntable 11 and with a telescopic cylinder below it, and a needle plate 13 with needle holes evenly arranged on the side wall of the cylinder 12 and controlled by an electric cylinder to extend and retract the needle holes.

[0065] In this embodiment, by setting up a turntable 11 and a cylinder 12, the cylinder 12 is used to support the fiber cloth, so that the fiber cloth can be stably formed. The needle plate 13 moves so that the needles on the needle plate 13 extend out of the cylinder 12. The needles can fix the fiber cloth on the side wall. Then the cylinder 12 rotates to wrap the fiber cloth around the side wall one circle at a time.

[0066] In detail, the cylinder 12 is used to assist in the forming of the fiber bucket. By using the needle holes and needle plate 13, on the one hand, the fiber cloth on the side wall can be fixed, and on the other hand, the connection between the fiber cloth layers can be strengthened by needle punching the multi-layer fiber cloth, reducing the occurrence of delamination.

[0067] It should be noted that the cylinder 12 is vertically slidably connected to the turntable 11. The cylinder 12 is controlled to move down and up by a telescopic cylinder. When the forming is completed, the needle plate 13 is retracted and the cylinder 12 moves down, so that the formed fiber bucket can be removed from the device.

[0068] Furthermore, such as Figure 5 As shown, the pressing assembly 21 includes a conveyor belt disposed above the cylinder 12, a cutting piece 211 disposed on the conveyor roller for cutting the base plate fiber cloth into a specific shape, and a bonding piece 212 disposed above the cylinder 12 for covering the cut fiber cloth onto the upper end face of the cylinder 12.

[0069] The cutting component 211 includes a cutter 2111 disposed above the conveyor belt and controlled by an electric cylinder. Multiple sets of cutters 2111 are symmetrically arranged, and each set of cutters 2111 has multiple blades, which are used to regularly cut multiple fiber strips 022 on the fiber cloth.

[0070] In this embodiment, a pressing component 21 is used to press and cover the base plate fiber cloth. As the thickness of the base plate fiber cloth gradually increases, the size of the upper layer of the base plate fiber cloth is also larger than that of the lower layer as the lamination proceeds, thus achieving complete coverage.

[0071] Because the base plate and sidewalls are manufactured separately, directly bonding them with glue or similar methods can lead to decreased strength or inconsistencies after molding, and can also reduce the insulation effect. Therefore, multiple fiber strips 022 are left around the periphery of each layer of base plate fiber cloth. After the base plate fiber cloth covers the cylinder 12, the fiber strips 022 hang down and are covered by the sidewall fiber cloth. As the fiber cloth is layered, the fiber strips 022 are tightly wrapped by the sidewall fiber cloth. In this way, friction is used to improve product strength, ensure product consistency, and prevent separation of the base plate and sidewalls. At the same time, by embedding the fiber strips 022 into the sidewall fiber cloth, the insulation performance at the junction of the base plate and sidewalls is guaranteed, eliminating the need for additional high-temperature resistant glue for adhesion and improving product quality.

[0072] In detail, the cutting component 211 is used to cut the base plate fiber cloth. Multiple sets of cutters 2111 can be set. As the base plate fiber cloth moves, the cutters 2111 move down and cut fiber strips 022 on the base plate fiber cloth. It should be noted that the fiber strips 022 are cut but not completely cut. Multiple fiber strips 022 are evenly arranged around the center, but are not completely cut but cut into the required shape. The subsequent parts are used to complete the separation of the whole from the fabric.

[0073] It should be noted that, since the base plate is circular, when the fiber strip 022 is folded vertically, it will inevitably cause the fiber strip 022 to not be completely attached to the side wall, and wrinkles will appear at the folds of the fiber strip 022. Therefore, the width of the fiber strip 022 should not be too long or too short. If it is too wide, it will easily cause wrinkles and cannot be completely attached. With multiple layers, it will cause deviations in the shape of the product. If it is too narrow, it will reduce friction and weaken the bonding effect.

[0074] Furthermore, such as Figure 6 , Figure 7 As shown, the cutting component 211 also includes a fixed shaft 2112 disposed above the cylinder 12, a scanning ring 2113 rotatably connected to the fixed shaft 2112 by a motor, a telescopic rod 2114 rotatably connected to the scanning ring 2113, a circular blade 2115 disposed at the end of the telescopic rod 2114, and a protrusion 2116 fixed to the fixed shaft 2112 below the telescopic rod 2114.

[0075] In this embodiment, by setting a scanning ring 2113 and a circular knife 2115, the circular knife 2115 is rotated by setting the scanning ring 2113, and the base plate fiber cloth is separated by the cutting of the circular knife 2115.

[0076] In detail, after the fiber strip 022 is processed by the cutter 2111, the fiber cloth is conveyed to the bottom of the scanning ring 2113. The scanning ring 2113 rotates once, driving the circular cutter 2115 to rotate once. The circular cutter 2115 draws a circle on the fiber cloth, realizing the separation of the fiber cloth.

[0077] It should be noted that a protrusion 2116 is provided below the telescopic rod 2114. Whenever the telescopic rod 2114 moves onto the protrusion 2116, the telescopic rod 2114 will be lifted under the action of the protrusion 2116, and the circular knife 2115 will disengage from the fiber cloth. The position of the protrusion 2116 corresponds to the position where the fiber strip 022 is cut on the fiber cloth. That is, when the circular knife 2115 moves to the position of the reserved fiber strip 022, the circular knife 2115 is lifted, and the fiber strip 022 will not be cut off by the circular knife 2115. Thus, it cooperates with the cutter 2111 to cut out a circular base plate with the fiber strip 022 reserved on the edge.

[0078] It is worth mentioning that the circular cutter 2115 is set on the telescopic rod 2114. The telescopic rod 2114 is electrically controlled. As the thickness of the side wall coating increases, the diameter of the corresponding ring also gradually increases. After the product is formed, the telescopic rod 2114 is reset for further production.

[0079] Furthermore, such as Figure 8 , Figure 9 , Figure 10 As shown, the bonding component 212 includes a bonding block 2121 disposed above the cylinder 12, multiple sets of tightly fitted pressure rings 2122 disposed inside the bonding block 2121, a control frame 2123 disposed in the middle of the pressure rings 2122 and fixed on the fixed shaft 2112, an inner control rod 2124 and an outer control rod 2125 that are horizontally slidably connected to the control frame 2123 by a threaded drive, a gear ring 2126 rotatably connected to the control frame 2123 and used to drive the inner control rod 2124 and the outer control rod 2125, a telescopic cylinder 2127 disposed on the control frame 2123 and used to drive the bonding block 2121 to move up and down, and a turntable 11 driving the gear ring 2126 to rotate through a gear-connected transmission method.

[0080] In this embodiment, by setting an inner control rod 2124 and an outer control rod 2125, the pressure ring 2122 is controlled, thereby controlling the downward movement of pressure rings 2122 of different diameters, and using the pressure ring 2122 to make the fiber strip 022 flatly cover the side wall.

[0081] In detail, because the sidewall is circular, when the fiber strip 022 is folded down and attached to the sidewall, it is easy for the fiber strip 022 to wrinkle, and the fiber strips 022 may overlap. The wrinkles and overlaps of the fiber strips 022 are not conducive to the covering and shaping of the sidewall. Under multi-layer composite, the fiber strips 022 are prone to size differences in their positions. Therefore, by moving a ring with the same diameter as the sidewall at this time, the ring is used to press down the fiber strip 022 directly, so that the fiber strip 022 is attached to the sidewall, thereby avoiding the overlap of the fiber strips 022. For the change of sidewall diameter, multiple sets of pressure rings 2122 are set up so that multiple sets of pressure rings 2122 with diameters from small to large are tightly attached together. As the sidewall diameter expands, the pressure rings 2122 of the corresponding size are pressed down to comb the fiber strip 022. The thickness of each pressure ring 2122 should be precisely controlled to be as close as possible to the thickness of the fiber cloth, so as to achieve a tight fit.

[0082] That is, as the turntable 11 rotates, the gear ring 2126 is driven to rotate synchronously. The gear ring 2126 synchronously drives the threaded rod that controls the movement of the inner control rod 2124 and the outer control rod 2125 to rotate, thereby causing the inner control rod 2124 and the outer control rod 2125 to move synchronously. The inner control rod 2124 and the outer control rod 2125 are inserted into the upper part of each pressure ring 2122, and the ends of the two rods are on the same vertical plane. As production proceeds, both the inner control rod 2124 and the outer control rod 2125 move outward. At the same time as the outer control rod 2125 disengages from one of the pressure rings 2122, the inner control rod 2124 inserts into the pressure ring 2122. When the bonding block 2121 moves down, it drives the entire outer pressure ring 2122 to move down, while the pressure ring 2122 sleeved on the inner control rod 2124 does not move down. The moving pressure ring 2122 adheres the fiber strip 022 to the side wall.

[0083] It is worth mentioning that since the fiber cloth is continuously fed into the side wall of one side of the cylinder 12, an opening is provided on all the pressure rings 2122. When the pressure rings 2122 move down, the opening can avoid the fiber cloth being fed in.

[0084] Furthermore, such as Figure 6 , Figure 11 As shown, the bonding component 212 also includes a central rod 2128 that is rotatably connected above the center of the cylinder 12 by a motor, a vertical rotating rod 2129 that is located at the center of the lower end of the central rod 2128, multiple sets of fixing pins 2130 that are located around the rotating rod 2129, and a positioning rod 2131 that is located inside the cylinder 12 and is vertically raised and lowered by an electric cylinder.

[0085] In this embodiment, by setting a central rod 2128 and a rotating rod 2129, when the circular knife 2115 cuts the base plate fiber cloth as a whole, the positioning rod 2131 rises, and the positioning rod 2131 and the rotating rod 2129 clamp the fiber cloth with the center of the base plate fiber cloth. At the same time, the fixing needle 2130 is also inserted into the fiber cloth, and the central rod 2128 rotates to realize the rotation of the fiber cloth.

[0086] In detail, after the base plate fiber cloth is laid on the side wall, the area where fiber strip 022 is located is one layer thicker than other areas. If the position of subsequent fiber strips 022 is not rotated, the thickness at this point will increase rapidly, causing dimensional deviations. Therefore, by rotating the base plate fiber cloth, the area covered by each fiber strip 022 is staggered from the previous one. At the same time, the width of the fiber strip 022 should also be accurately set. For example, four sets of fiber strips 022 are set around the perimeter of each layer of fiber cloth, and the width of each set of fiber strips 022 is... Occupying 30° of the fiber cloth circle, when laying the second layer of fiber cloth, the central rod 2128 rotates 30° to offset the fiber strip 022 of the second layer from the fiber strip 022 of the first layer. At the same time, the fiber cloth of the third layer rotates 60° to offset the first and second layers. At this time, the three layers of fiber strip 022 just wrap around the side wall. The area covered by the fiber strip 022 is just one circle thicker than the area at the bottom of the cylinder 12. Therefore, it is necessary to wrap an extra circle of fiber cloth around the bottom of the side wall to compensate for this, so as to ensure that the thickness of the upper and lower parts of the side wall is consistent.

[0087] Furthermore, such as Figure 11 As shown, the side pressure assembly 22 includes an opening member 221 for making holes in the lower interior of the side wall and multiple sets of stabilizing members 222 arranged around the cylinder 12. The opening member 221 includes multiple sets of conveying rollers 2211 for conveying the side wall fiber cloth to one side of the cylinder 12, two sets of slicing blades 2212 arranged between the conveying rollers 2211 and the cylinder 12 and located on both sides of the fiber cloth, each set of slicing blades 2212 including multiple sets of blades with the same distance, the slicing blades 2212 are arranged at the end of the telescopic rod of the electric cylinder and the bottom of the electric cylinder is arranged on the rotating shaft of the motor, and a second cutting blade 2213 arranged behind the slicing blades 2212 and moved by the electric cylinder.

[0088] In this embodiment, by setting the opening 221, on the one hand, the fiber cloth on the side wall of the normal input cylinder 12 is cut to make an opening in the fiber cloth on the side wall. This opening is used for the cooperation and winding with the fiber strip 022. On the other hand, when it is necessary to compensate for the side wall, the fiber cloth is cut in a large area to cut out a fiber cloth of appropriate size for input.

[0089] In detail, the sliding surfaces on both sides are used to cut open the fiber cloth, creating openings on the surface of the sidewall fiber cloth. The position of the opening needs to be matched with the rotation angle of the base plate fiber cloth. When the base plate fiber cloth rotates, the position of the opening to be cut also needs to be adjusted. When sidewall compensation is required, the cutting blade 2212 is adjusted to work with the cutting blade 2213 to cut the entire piece, so that the cut fiber cloth can just cover the area without fiber strips 022, thus achieving thickness compensation for the sidewall.

[0090] Furthermore, such as Figure 12As shown, each set of stabilizers 222 includes multiple coaxial rollers 2221, and the rollers 2221 are mainly attached to the lower middle part of the cylinder 12. A movable frame 2222 is used to fix the rollers 2221, a mounting rod 2223 is used to enable the movable frame 2222 to slide horizontally and is fixedly connected to the worktable, and a spring is provided between the mounting rod 2223 and the movable frame 2222.

[0091] One set of stabilizers 222 should be positioned on the straight line between the center of the last set of conveyor rollers 2211 and the center of the cylinder 12.

[0092] In this embodiment, the sidewall fiber cloth is fixed by setting rollers 2221 and movable frame 2222, ensuring that the fiber cloth will not wrinkle or deviate due to loosening during the winding process. Rollers 2221 are attached to the surface of cylinder 12. As the sidewall fiber cloth is fed in, rollers 2221 roll the fiber cloth, ensuring that there are no obvious gaps in the middle of the fiber cloth, so that the fiber cloth will not deviate due to the up and down movement of pressure ring 2122 after being fed into the surface of cylinder 12.

[0093] It should be noted that the stabilizers 222 are evenly distributed around the cylinder 12. If the fiber cloth is directly conveyed to the surface of the cylinder 12 by the conveyor rollers 2211, the increasing thickness of the sidewalls will cause the movement path of the fiber cloth and the fabric in the middle of the cylinder 12 to deflect, thus affecting the cutting of the fiber cloth surface by the perforation 221. At the same time, the deflection of the fabric movement path will make it difficult for the pressure ring 2122 to avoid the fiber cloth being fed in when it descends. Therefore, by setting a set of stabilizers 222 on the straight line between the last set of conveyor rollers 2211 and the center of the cylinder 12, the fiber cloth will first contact the set of stabilizers after exiting the conveyor rollers 2211, and then turn to the cylinder rollers after passing through the stabilizers 222, thereby avoiding the deflection of the fiber cloth movement path.

[0094] Furthermore, such as Figure 12 , Figure 13 , Figure 14 , Figure 15 As shown, the perforation mechanism 3 includes a rotating frame 31 rotatably connected to the workbench. The central rod 2128 drives the rotating frame 31 to rotate through a transmission belt and gears. The rotating frame 31 is provided with multiple sets of working parts 32. The working parts 32 include two sets of clamping rods 321 symmetrically arranged and inclined towards the cylinder 12, an electromagnetic gripper 322 arranged in the middle of the clamping rods 321, a push rod 323 arranged below the electromagnetic gripper 322, and a hook 324 arranged below the push rod 323 and hinged to the rotating frame 31.

[0095] In this embodiment, by setting clamping rod 321 and push rod 323, the fiber cloth of the fish side wall of fiber strip 022 is stacked together.

[0096] In detail, an opening is left on the sidewall fiber cloth through the perforator 221. After covering one layer of sidewall fiber cloth and one layer of bottom fiber cloth, the fiber strip 022 is located inside the sidewall fiber cloth. The clamping rod 321 extends towards the opening on the sidewall fiber cloth. The two clamping rods 321 are set with only an included angle. By extending the clamping rod 321, it passes through the opening and directly squeezes the internal fiber strip 022, causing the middle of the fiber strip 022 to curl up. The electromagnetic claw 322 is used to grab and pull out the fiber strip 022, so that the lower part of the fiber strip 022 is pulled out of the sidewall fiber cloth. Then the hook 324 rotates. During the rotation of the hook 324, it contacts the opening below and pulls the opening open. The push rod 323 pushes out and inserts the pulled-out fiber strip 022 back into the sidewall fiber cloth, realizing the mutual interlocking of the fiber strip 022 and the sidewall fiber cloth.

[0097] It should be noted that the width of the opening made by the hole 221 is greater than the width of the fiber strip 022. The lever opens the opening by hooking the two ends of the opening to avoid affecting the insertion of the fiber strip 022. At the same time, in order to cope with the change of sidewall thickness, an elastic material is set in the middle of the lever to cope with the gradual thickening of the sidewall.

[0098] It is worth mentioning that by setting the rotating frame 31, the position of the perforating mechanism 3 and the fiber strip 022 are aligned. The position adjustment of the fiber strip 022 synchronously drives the rotating frame 31 to rotate, so that the positions of the clamping rod 321 and the hook 324 can always correspond to the position of the fiber strip 022.

[0099] Example 2

[0100] like Figure 16 As shown, components that are the same as or corresponding to those in Embodiment 1 are referred to using the same reference numerals as in Embodiment 1. For simplicity, only the differences from Embodiment 1 are described below. The difference between Embodiment 2 and Embodiment 1 is as follows:

[0101] Furthermore, such as Figure 16 As shown, the method for manufacturing a thermal insulation material for semiconductors, applied to an apparatus for manufacturing thermal insulation materials for semiconductors, includes the following steps:

[0102] Step 1, Cutting Step: Two fiber cloths laid out by the high-speed web laying machine are fed into the device. One is vertically input from the side of the cylinder 12 as the side wall fiber cloth, and the other is horizontally input from the top of the cylinder 12 as the bottom plate fiber cloth. The bottom plate fiber cloth is cut into a circle with strips distributed around it by the cutting piece 211. The side wall fiber cloth has gaps opened on its surface by the opening piece 221.

[0103] Step 2, the lamination step: The side wall fiber cloth is fixed on the cylinder 12 by the needle plate 13 and rotated to wrap the side wall fiber cloth around the side wall of the cylinder 12 in circles. Each layer of side wall fiber cloth is wrapped, which is to lamination a layer of bottom plate fiber cloth. The cut bottom plate fiber cloth is attached to the top of the cylinder 12 by the bonding gap, and the perforation mechanism 3 is used to make the strip fibers around the bottom plate fiber cloth pass through the holes opened on the surface of the side wall fiber cloth, so that the side wall fiber cloth and the bottom plate fiber cloth overlap each other.

[0104] Step 3, the forming step: After completing one layer of coating, the diameter of the cylinder 12 increases. Correspondingly, the diameter of the base fiber cloth covering it also needs to increase. The diameter of the base fiber cloth is adjusted using the cutting piece 211, and then matched with the diameter of the pressure ring 2122 through adjustment. This ensures that the pressure ring 2122 can stably press the base fiber cloth onto the cylinder 12, preventing wrinkles. Simultaneously, before the pressure ring 2122 presses down the base fiber cloth, the rotating rod 2129 of the bonding piece 212 horizontally rotates the base fiber cloth... The angle of the fiber cloth is adjusted so that the fiber strips 022 of the outer bottom plate fiber cloth are staggered from the fiber strips 022 of the inner bottom plate fiber cloth. Then, the lamination is continued. After multiple laminations, the fiber strips 022 of the multiple bottom plate fiber cloths have covered the cylinder 12. At this time, the side wall fiber cloth is cut using the opening. The upper half of the side wall fiber cloth is cut off. At this time, only the lower half of the cylinder 12 is covered to compensate for the thickness of the lower part of the cylinder 12. After completion, the normal lamination steps are continued, and so on.

[0105] In the description of this invention, it should be understood that the terms "front and back", "left and right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention.

[0106] Of course, those skilled in the art should understand that the term "a" should be understood as "at least one" or "one or more". That is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple. The term "a" should not be understood as a limitation on the quantity.

[0107] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art under the technical guidance of the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A thermal insulation material for use in semiconductors, characterized in that, include: The side wall portion (01) is tubular and is formed by winding a complete section of fiber cloth. Each layer of fiber cloth in the side wall portion (01) has an opening in the middle for accommodating the bottom plate portion (02) to pass through. The base plate (02) includes multiple layers of base plate fibers, each layer of base plate fibers being a central fiber circle (021) and fiber strips (022) arranged around the fiber circle (021). The sidewall portion (01) has the same number of fiber layers as the bottom plate portion (02), and the fiber strips (022) of the bottom plate portion (02) are interlocked between the fiber layers of the sidewall portion (01).

2. An apparatus for manufacturing thermal insulation materials for semiconductors, used to produce the thermal insulation material for semiconductors as described in claim 1, characterized in that, Including a high-speed net laying machine (0), and also including: A molding die (1) is located behind the high-speed mesh laying machine (0) and is used to assist in the molding of the insulation material; The laminating mechanism (2) is located above the molding mold (1) and laminating the cut fiber cloth. It includes a pressing component (21) located above the molding mold (1) and used to attach the bottom plate fiber cloth to the molding mold (1) and a side pressing component (22) located around the molding mold (1) and used to attach the side wall fiber cloth to the molding mold (1). The perforation mechanism (3) is arranged around the forming mold (1) and is used to cooperate with the bonding mechanism (2) to achieve the tight bonding of the fiber cloth.

3. The apparatus for manufacturing thermal insulation materials for semiconductors according to claim 2, characterized in that, The forming mold (1) includes a worktable set behind the high-speed web laying machine (0), a turntable (11) rotatably connected to the worktable, a cylinder (12) vertically slidably connected to the middle of the turntable (11) and with a telescopic cylinder below it, pinholes set on the surface of the cylinder (12), and a needle plate (13) evenly arranged on the side wall of the cylinder (12) and controlled by an electric cylinder to extend and retract the pinholes.

4. The apparatus for manufacturing thermal insulation materials for semiconductors according to claim 3, characterized in that, The pressing assembly (21) includes a conveyor belt disposed above the cylinder (12), a cutting piece (211) disposed on the conveyor roller for cutting the base plate fiber cloth into a specific shape, and a bonding piece (212) disposed above the cylinder (12) for covering the cut fiber cloth onto the upper end face of the cylinder (12). The cutting component (211) includes a cutter (2111) disposed above the conveyor belt and controlled by an electric cylinder. The cutter (2111) is symmetrically arranged in multiple sets, and each set of cutters (2111) is provided with multiple blades for regularly cutting multiple fiber strips (022) on the fiber cloth. It also includes a fixed shaft (2112) set above the cylinder (12), a scanning ring (2113) rotatably connected to the fixed shaft (2112) by a motor, a telescopic rod (2114) rotatably connected to the scanning ring (2113), a circular knife (2115) set at the end of the telescopic rod (2114), and a protrusion (2116) fixed on the fixed shaft (2112) below the telescopic rod (2114).

5. The apparatus for manufacturing thermal insulation materials for semiconductors according to claim 4, characterized in that, The bonding component (212) includes a bonding block (2121) disposed above the cylinder (12), multiple sets of pressure rings (2122) disposed inside the bonding block (2121) and tightly fitted to each other, a control frame (2123) disposed in the middle of the pressure rings (2122) and fixed on the fixed shaft (2112), an inner control rod (2124) and an outer control rod (2125) that are horizontally slidably connected to the control frame (2123) and horizontally slidably connected to the bonding block (2121) by a threaded drive, a gear ring (2126) rotatably connected to the control frame (2123) and used to drive the inner control rod (2124) and the outer control rod (2125), a telescopic cylinder (2127) disposed on the control frame (2123) and used to drive the bonding block (2121) to move up and down, and a turntable (11) driving the gear ring (2126) to rotate by a gear-connected transmission method.

6. The apparatus for manufacturing thermal insulation materials for semiconductors according to claim 5, characterized in that, The bonding component (212) also includes a central rod (2128) connected to the center of the cylinder (12) by a motor, a rotating rod (2129) located at the center of the lower end of the central rod (2128), multiple sets of fixing pins (2130) located around the rotating rod (2129), and a positioning rod (2131) located inside the cylinder (12) and vertically raised and lowered by an electric cylinder.

7. The apparatus for manufacturing thermal insulation materials for semiconductors according to claim 2, characterized in that, The side pressure assembly (22) includes an opening member (221) for making a hole in the lower interior of the side wall and multiple sets of stabilizing members (222) arranged around the cylinder (12). The opening member (221) includes multiple sets of conveying rollers (2211) for conveying the side wall fiber cloth to one side of the cylinder (12), two sets of slicing blades (2212) arranged between the conveying rollers (2211) and the cylinder (12) and located on both sides of the fiber cloth. Each set of slicing blades (2212) includes multiple sets of blades with the same distance. The slicing blades (2212) are arranged at the end of the telescopic rod of the electric cylinder and the bottom of the electric cylinder is arranged on the rotating shaft of the motor. A cutting blade (2213) is arranged behind the slicing blades (2212) and moved by the electric cylinder.

8. The apparatus for manufacturing thermal insulation materials for semiconductors according to claim 7, characterized in that, Each set of stabilizers (222) includes multiple coaxial rollers (2221) and the rollers (2221) are mainly attached to the middle and lower part of the cylinder (12). A movable frame (2222) is used to fix the rollers (2221), a mounting rod (2223) is used to enable the movable frame (2222) to slide horizontally and is fixedly connected to the worktable, and a spring is provided between the mounting rod (2223) and the movable frame (2222). One set of stabilizers (222) should be positioned on the straight line between the center of the last set of conveyor rollers (2211) and the center of the cylinder (12).

9. The apparatus for manufacturing thermal insulation materials for semiconductors according to claim 2, characterized in that, The perforation mechanism (3) includes a rotating frame (31) rotatably connected to the workbench, and a central rod (2128) driving the rotating frame (31) to rotate through a transmission belt and gear. The rotating frame (31) is provided with multiple sets of working parts (32). The working parts (32) include two sets of symmetrically arranged clamping rods (321) inclined towards the cylinder (12), an electromagnetic gripper (322) arranged in the middle of the clamping rods (321), a push rod (323) arranged below the electromagnetic gripper (322), and a hook (324) arranged below the push rod (323) and hinged to the rotating frame (31).

10. A method for manufacturing a thermal insulation material for semiconductors, applied to the apparatus for manufacturing a thermal insulation material for semiconductors as described in any one of claims 2-9, characterized in that, Includes the following steps: Step 1, Cutting Step: Two fiber cloths laid out by the high-speed web laying machine (0) are fed into the device. One is vertically input from the side of the cylinder (12) as the side wall fiber cloth, and the other is horizontally input from the top of the cylinder (12) as the bottom plate fiber cloth. The bottom plate fiber cloth is cut into a circle with strips distributed around it by the cutting piece (211). The side wall fiber cloth has gaps opened on the surface by the opening piece (221). Step 2, the overlay step: the side wall fiber cloth is fixed on the cylinder (12) by the needle plate (13) and rotated to wrap the side wall fiber cloth around the side wall of the cylinder (12) in circles. Each layer of side wall fiber cloth is wrapped, that is, a layer of bottom plate fiber cloth is overlaid. The cut bottom plate fiber cloth is attached to the top of the cylinder (12) by the bonding space, and the perforation mechanism (3) is used to make the strip fibers around the bottom plate fiber cloth pass through the holes opened on the surface of the side wall fiber cloth, so that the side wall fiber cloth and the bottom plate fiber cloth overlap each other. Step 3, forming step: After completing one layer of coating, the diameter of the cylinder (12) increases, and the diameter of the base plate fiber cloth covering it also needs to increase accordingly. The diameter of the base plate fiber cloth is adjusted by the cutting part (211), and the diameter of the pressure ring (2122) is matched with the diameter of the base plate fiber cloth by the adjustment of the pressure ring (2122), so that the pressure ring (2122) can stably press the base plate fiber cloth onto the cylinder (12) to avoid wrinkles. At the same time, before the pressure ring (2122) presses down the base plate fiber cloth, the base plate is horizontally rotated by the rotating rod (2129) of the bonding part (212). The angle of the fiber cloth is adjusted so that the fiber strips (022) of the outer bottom plate fiber cloth are staggered from the fiber strips (022) of the inner bottom plate fiber cloth. Then the lamination is completed. After multiple laminations, the fiber strips (022) of the multi-layer bottom plate fiber cloth cover the cylinder (12) around the circumference. At this time, the side wall fiber cloth is cut using the opening part (221) to cut off the upper half of the side wall fiber cloth. At this time, only the lower half of the cylinder (12) is covered to compensate for the thickness of the lower part of the cylinder (12). After completion, the normal lamination steps are continued, and so on.

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