Water vapor catalytic low-temperature thermal oxidation equipment

Abstract

The invention relates to the technical field of oxidation furnaces, in particular to water vapor catalytic low-temperature thermal oxidation equipment which comprises an oxidation furnace body, a cooling water tank fixedly sleeves the oxidation furnace body, a box sleeves the cooling water tank, a circulating water system is arranged below the box, and a split electric gate is fixedly mounted at one end of the oxidation furnace body. A slag ash removal system is arranged on one side of the split electric gate, the other end of the oxidation furnace body is fixedly communicated with a gas inlet end and a gas outlet end, a piezoelectric steam generator and a mass flow meter are additionally arranged at the gas inlet end of the oxidation furnace body, and the gas outlet end is fixedly communicated with a waste gas treatment system. According to the equipment, the outer wall of the oxidation furnace body can be rapidly cooled by water, so that the internal temperature of the oxidation furnace body is easier to diffuse, the time required for cooling the oxidation furnace body is effectively saved, furnace slag of the oxidation furnace body after reaction can be cleaned to a switch valve at the other end of the oxidation furnace body, and the cleaning is rapid and convenient.

Description

Technical Field

[0001] The present invention relates to the technical field of oxidation furnaces, and particularly to a water vapor catalytic low-temperature thermal oxidation device. Background Art

[0002] An oxidation furnace is an industrial device for high-temperature oxidation treatment of materials, which is widely used in fields such as semiconductors, ceramics, and metal processing. By controlling the temperature (usually 800°C - 1200°C) and atmosphere (such as an oxygen or air environment), an oxidation reaction occurs on the material surface to form a dense oxide layer (such as silicon dioxide formed on a silicon wafer). Its core structure includes a heating system, a gas control system, a temperature control module, and a high-temperature resistant furnace chamber, and it can be divided into batch type or continuous type according to process requirements.

[0003] However, the existing oxidation furnaces have the following technical problems after use: Since the internal temperature required during the reaction of the oxidation furnace is relatively high, temperature diffusion also occurs on the outside, so after the oxidation furnace is used in the reaction, it is difficult for the internal and external temperatures of the oxidation furnace to drop for a while, and the waiting time required is relatively long, and the furnace slag in the furnace body is generally difficult to clean. Summary of the Invention

[0004] The main purpose of the present invention is to overcome the deficiencies in the prior art and provide a water vapor catalytic low-temperature thermal oxidation device.

[0005] The technical solution adopted by the present invention to achieve its technical purpose is: A water vapor catalytic low-temperature thermal oxidation device, including an oxidation furnace body, a cooling water tank is fixedly sleeved outside the oxidation furnace body, a box body is sleeved outside the cooling water tank, and a circulating water system is arranged below the box body; the cooling water tank is arranged in an annular structure and is fixedly sleeved on the outer wall of the oxidation furnace body, and the cooling water tank is used to quickly cool the oxidation furnace body after the reaction, and the box body serves as an outer shell.

[0006] An opening and closing type electric gate is fixedly installed at one end of the oxidation furnace body, and a furnace slag ash cleaning system is arranged on one side of the opening and closing type electric gate; the opening and closing type electric gate is set as a double-door, and by opening the opening and closing type electric gate, one end of the oxidation furnace body can be communicated with the opening and closing type electric gate.

[0007] The other end of the oxidation furnace body is fixedly communicated with an air inlet end and an air outlet end, a piezoelectric steam generator and a mass flowmeter are installed at the air inlet end of the oxidation furnace body, and the piezoelectric steam generator and the mass flowmeter are dynamically adjusted in a certain proportion to ensure that the density of the oxide layer ≥ 2.25 g / cm3.

[0008] The air outlet end is fixedly connected to the waste gas treatment system, and the waste gas is purified through the waste gas treatment system for environmentally friendly emission. After the waste gas is purified, the waste heat recovery module can be connected and installed to utilize the waste heat of the waste gas.

[0009] Preferably, the circulating water system includes a circulating water tank, a water tank inlet pump, a water tank outlet pump, a water tank outlet pipe, a stirring paddle, a high-speed heat extraction fan, a water tank opening, a flow collector cover, and a water tank inlet pipe; The water tank outlet pipe and the water tank inlet pipe are respectively fixedly connected to both ends of the circulating water tank. The water tank outlet pipe is connected to the cooling water tank through the water tank inlet pump, and the water tank inlet pipe is connected to the cooling water tank through the water tank outlet pump; both the water tank inlet pump and the water tank outlet pump are fixed on the top of the box body, and their ports are fixedly connected to the cooling water tank.

[0010] When water needs to be transported into the cooling water tank, the water in the circulating water tank is pumped into the cooling water tank through the water tank outlet pipe and by opening the water tank inlet pump. When the water in the cooling water tank reaches a certain amount, the water in the cooling water tank is pumped into the circulating water tank through the water tank inlet pipe and by opening the water tank outlet pump, and the water circulation is carried out in this way.

[0011] The water tank opening is opened at the top of the circulating water tank. The flow collector cover is fixedly installed at the outer edge part of the water tank opening, and the high-speed heat extraction fan is fixedly installed inside the flow collector cover; air holes are opened on the sides of the flow collector cover. When the temperature of the water in the circulating water tank rises after circulation, the hot air in the water will diffuse towards the water tank opening direction, and the hot air is quickly extracted through the flow collector cover and the high-speed heat extraction fan. The flow collector cover can be connected and installed with a waste heat recovery module to utilize the waste heat of the waste gas, so as to achieve the purpose of quickly dissipating heat from the circulating water tank and recovering and utilizing the waste heat of the hot air.

[0012] Preferably, the circulating water tank is fixedly installed below the box body through a connecting column, and the stirring paddle is rotatably arranged inside the circulating water tank. Through the arrangement of the stirring paddle, the water flow rate in the circulating water tank can be increased, and the diffusion of hot air can be further accelerated.

[0013] Preferably, the split-type electric gate is set as a convex structure, and the slag cleaning system of the furnace is located in the convex channel of the split-type electric gate; by opening the split-type electric gate, the inner cavity of the oxidation furnace is connected to the split-type electric gate, and the slag cleaning system of the furnace can travel from the convex channel of the split-type electric gate to the inner cavity of the oxidation furnace. The diameter of the inner cavity of the oxidation furnace is the same as the diameter of the convex channel of the split-type electric gate, ensuring that the slag cleaning system of the furnace can travel to the inner cavity of the oxidation furnace for ash cleaning operation.

[0014] The slag cleaning system includes a fixed disk, a cleaning plate, a cleaning motor, a sleeve, a guide rod, a top plate, a micro drive wheel, and a tightening spring; The sleeves are fixedly distributed in an annular array at the edge part of the fixed disk. The guide rods are slidably connected inside the sleeves. One end of the guide rods is fixedly connected to the top plate. The micro drive wheels are fixedly installed on the top plate, and the micro drive wheels are in contact with the inner wall of the convex channel of the split-type electric gate; The tightening spring is sleeved outside the sleeve and the guide rod. One end of the tightening spring abuts against the edge part of the fixed disk, and the other end abuts against the lower part of the top plate.

[0015] Through the setting of the tightening spring, the micro drive wheels can be made to closely adhere to the inner wall of the convex channel of the split-type electric gate. Then, through the drive of the micro drive wheels, the slag cleaning system can move along the inner wall of the convex channel of the split-type electric gate.

[0016] Preferably, the cleaning plate is rotatably connected to one side of the fixed disk, the cleaning motor is fixedly installed on the other side of the fixed disk, and the drive shaft of the cleaning motor is fixedly connected to the rotating shaft of the cleaning plate; The inner diameter of the cleaning plate is slightly smaller than the inner diameter of the channel of the split-type electric gate and the inner cavity diameter of the oxidation furnace. By driving the cleaning plate to rotate by the cleaning motor and cooperating with the movement of the micro drive wheels, the slag in the oxidation furnace after the reaction can be cleaned to the switch valve at the other end of the oxidation furnace, so that the switch valve can be opened to discharge the slag in the oxidation furnace.

[0017] Preferably, the waste gas treatment system includes a shunt pipe, an air outlet nozzle, a cylinder, a cover plate, a rotating rod, a shaping shell, a first activated carbon filter screen, a high-pressure air extraction pump, a bearing, a second activated carbon filter screen, a rolling groove, a roller, a first diversion hole, a second diversion hole, a third activated carbon filter screen, and an air extraction fan; The top and bottom of the cylinder are threadedly connected with cover plates. A rotating rod is rotatably connected between the two cover plates. Six groups of first activated carbon filter screens are evenly arranged on the outer wall of the rotating rod. The outer wall of the first activated carbon filter screen is fixedly connected to the rotating rod through a shaping shell, and one side of the shaping shell is in contact with the inner wall of the cylinder; The other end of the waste gas treatment pipe is provided with a high-pressure air extraction pump. One end of the high-pressure air extraction pump is provided with a shunt pipe. Six groups of air outlet nozzles are fixedly installed on one side of the shunt pipe, and the air outlet nozzles are fixedly installed inside the cylinder; One side of the shaping shell and the inner wall of the cylinder are polished so that when the shaping shell rotates, the friction between one side of the shaping shell and the inner wall of the cylinder is small, which is beneficial to the rotation of the shaping shell and the first activated carbon filter screen.

[0018] At the other end of the waste gas treatment pipeline, a high-pressure air extraction pump is provided. The high-pressure air extraction pump increases the flow rate of the waste gas. One end of the high-pressure air extraction pump is provided with a diversion pipeline. Six air outlet nozzles are fixedly installed on one side of the diversion pipeline. The air outlet nozzles are fixedly installed inside the cylinder. The waste gas extracted by the high-pressure air extraction pump enters the inside of the cylinder through the diversion pipeline and the six air outlet nozzles, so that the waste gas impacts on the surface of the first activated carbon filter screen, thereby enabling the first activated carbon filter screen and the shaping shell to rotate.

[0019] A second diversion hole is opened inside the cylinder. A third activated carbon filter screen is arranged inside the second diversion hole. An air extraction fan is arranged outside the third activated carbon filter screen. The back of the air extraction fan is fixedly connected to the third activated carbon filter screen through a mounting frame. The air extraction fan is used to change the flow direction of the gas after being filtered by the first activated carbon filter screen, so as to discharge the gas.

[0020] Preferably, bearings are arranged at both ends of the rotating rod, and a second activated carbon filter screen is sleeved. The bearings are used to fix both ends of the rotating rod and facilitate the rotation of the rotating rod at the same time. The second activated carbon filter screen avoids the direct contact between the waste gas and the bearings, thereby preventing the bearings from being easily corroded. The second activated carbon filter screen is located on one side of the bearing, and a fixing shell is arranged on the outer wall. The fixing shell is used to plastically wrap the second activated carbon filter screen. The second activated carbon filter screen is sleeved on the outer wall of the rotating rod through the fixing shell. The rotating rod and the fixing shell are also polished to reduce friction. Both the bearings and the second activated carbon filter screen are arranged in the middle of the inner part of the cover plate.

[0021] Preferably, rollers are arranged at the upper and lower ends on one side of the shaping shell. Rolling grooves are opened inside the upper and lower ends of the cylinder. The rollers are arranged corresponding to the rolling grooves and are movably connected inside the rolling grooves. Through the arrangement of the rollers and the rolling grooves, it is convenient to guide the rotation trajectories of the first activated carbon filter screen and the shaping shell.

[0022] Preferably, six first diversion holes are opened inside the cylinder. The first diversion holes are located on the left side of the second diversion holes. The air outlet nozzles are located inside the first diversion holes. Both the first diversion holes and the second diversion holes are inclined. The inclination of the first diversion holes and the second diversion holes is to achieve the effect of wind direction guidance, which is beneficial for the air outlet nozzles to impact the waste gas on the surface of the first activated carbon filter screen, thereby facilitating the slow rotation of the first activated carbon filter screen. On the other hand, the inclination of the second diversion holes also facilitates the discharge of the gas after the first filtration.

[0023] Compared with the prior art, the beneficial effects of the present invention are: This steam-catalyzed low-temperature thermal oxidation equipment can quickly cool the outer wall of the oxidation furnace body through the setting of a cooling water tank and a circulating water system, and by using the principle of heat transfer. When the external temperature is low, the internal temperature of the oxidation furnace body is more likely to diffuse, effectively saving the time required for the oxidation furnace body to cool down and facilitating subsequent operations. Through the setting of the furnace slag cleaning system, the furnace slag after the reaction in the oxidation furnace body can be cleaned to the switching valve at the other end of the oxidation furnace body, so that the switching valve can be opened to discharge the furnace slag of the oxidation furnace body. The cleaning is rapid and convenient, and manpower can be saved.

[0024] This steam-catalyzed low-temperature thermal oxidation equipment can also adsorb and treat the waste gas generated during the oxidation reaction and discharge it environmentally. Through the setting of the waste gas treatment system, the waste gas can be preliminarily filtered and adsorbed between every two groups of first activated carbon filter meshes, so that the waste gas is initially adsorbed and filtered through the first activated carbon filter mesh. Then, the preliminarily filtered gas is quickly extracted by an air extraction fan and cooperates with the third activated carbon filter mesh for secondary filtration to meet the emission standards.

[0025] All in all, this steam-catalyzed low-temperature thermal oxidation equipment has diverse functions, integrating functions such as cooling, cleaning, and waste gas adsorption. Moreover, the processing steps at each stage are distinct, the oxidation reaction process is environmentally friendly and harmless, and the recycling and treatment efficiency is high. Brief Description of the Drawings

[0026] Figure 1 It is the main view sectional structure schematic diagram of the steam-catalyzed low-temperature thermal oxidation equipment.

[0027] Figure 2 It is the main view structure schematic diagram of the furnace slag cleaning system.

[0028] Figure 3 It is the side view structure schematic diagram of the furnace slag cleaning system.

[0029] Figure 4 It is the enlarged structure schematic diagram of the activated carbon adsorption system.

[0030] Figure 5 It is the top view structure schematic diagram of the activated carbon adsorption system.

[0031] Figure 6 It is Figure 5 the enlarged structure schematic diagram at position A in

[0032] Figure 7 It is the right view structure schematic diagram of the third activated carbon filter mesh and the air extraction fan.

[0033] Wherein: 1 - Box body; 2 - Oxidation furnace body; 3 - Cooling water tank; 4 - Exhaust gas treatment system; 401 - Shunt pipeline; 402 - Air outlet nozzle; 403 - Cylinder; 404 - Cover plate; 405 - Rotating rod; 406 - Shaping shell; 407 - First activated carbon filter screen; 408 - High - pressure air extraction pump; 409 - Bearing; 410 - Second activated carbon filter screen; 411 - Rolling groove; 412 - Roller; 413 - First diversion hole; 414 - Second diversion hole; 415 - Third activated carbon filter screen; 416 - Air extraction fan; 5 - Furnace slag ash cleaning system; 501 - Fixed disk; 502 - Cleaning plate; 503 - Cleaning motor; 504 - Sleeve; 505 - Guide rod; 506 - Top plate; 507 - Micro - drive wheel; 508 - Tightening spring; 6 - Split - type electric gate; 7 - Circulating water system; 701 - Circulating water pool; 702 - Water tank inlet pump; 703 - Water tank outlet pump; 704 - Water pool outlet pipe; 705 - Stirring paddle; 706 - High - speed heat extraction fan; 707 - Water pool opening; 708 - Flow - collecting cover; 709 - Water pool inlet pipe. Detailed implementation mode

[0034] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of this invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present invention. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0035] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "install", "connect", "link" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0036] To make the purpose, technical solution and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below through the drawings and embodiments. However, it should be understood that the specific embodiments described herein are only used to explain the present invention and do not limit the scope of the present invention. In addition, in the following description, the descriptions of well - known structures and technologies are omitted to avoid unnecessarily confusing the concepts of the present invention. Embodiment 1

[0037] See also Figure 1 , Figure 2 and Figure 4 The water vapor catalytic low-temperature thermal oxidation equipment includes an oxidation furnace body 2, a cooling water tank 3 is fixedly sleeved outside the oxidation furnace body 2, a box body 1 is sleeved outside the cooling water tank 3, and a circulating water system 7 is arranged below the box body 1; the cooling water tank 3 is arranged as an annular structure, and is fixedly sleeved on the outer wall of the oxidation furnace body 2. The oxidation furnace body 2 after the reaction is quickly cooled by the cooling water tank 3, and the box body 1 serves as an outer shell.

[0038] A split electric gate 6 is fixedly installed at one end of the oxidation furnace body 2, and a slag cleaning system 5 is arranged on one side of the split electric gate 6; the split electric gate 6 is arranged as a double-door, and by opening the split electric gate 6, one end of the oxidation furnace body 2 can be connected with the split electric gate 6. The split electric gate 6 is arranged as a convex structure, and the slag cleaning system 5 is located in the convex channel of the split electric gate 6; by opening the split electric gate 6, the inner cavity of the oxidation furnace body 2 is connected with the split electric gate 6, and the slag cleaning system 5 can travel from the convex channel of the split electric gate 6 to the inner cavity of the oxidation furnace body 2, and the inner cavity diameter of the oxidation furnace body 2 is consistent with the convex channel diameter of the split electric gate 6, ensuring that the slag cleaning system 5 can travel to the inner cavity of the oxidation furnace body 2 for cleaning.

[0039] The other end of the oxidation furnace body 2 is fixedly connected with an air inlet and an air outlet. A piezoelectric steam generator and a mass flow meter are installed at the air inlet of the oxidation furnace body 2. The piezoelectric steam generator and the mass flow meter are dynamically adjusted according to a certain ratio to ensure that the density of the oxidation layer is ≥ 2.25g / cm3. The air outlet is fixedly connected to the exhaust gas treatment system 4, and the exhaust gas is purified by the exhaust gas treatment system 4 to facilitate environmentally friendly discharge. After the exhaust gas is purified, the exhaust heat can be utilized by connecting and installing a waste heat recovery module. Example 2

[0040] See also Figure 1 , based on the above embodiment, the water vapor catalytic low temperature thermal oxidation equipment, the circulating water system 7 includes a circulating water pool 701, a water tank inlet pump 702, a water tank outlet pump 703, a water pool outlet pipe 704, a stirring paddle 705, a high-speed heat extraction fan 706, a water pool port 707, a collecting cover 708 and a water pool inlet pipe 709; The circulating water pool 701 is fixedly installed below the housing 1 through a connecting column, and a stirring paddle 705 is rotatably arranged inside the circulating water pool 701. The arrangement of the stirring paddle 705 can speed up the flow of water in the circulating water pool 701 and further speed up the diffusion of hot air.

[0041] The water outlet pipe 704 of the water tank and the water inlet pipe 709 of the water tank are respectively fixedly connected to both ends of the circulating water tank 701. The water outlet pipe 704 of the water tank is connected to the cooling water tank 3 through the water pump 702 for the water tank inlet, and the water inlet pipe 709 of the water tank is connected to the cooling water tank 3 through the water pump 703 for the water tank outlet; both the water pump 702 for the water tank inlet and the water pump 703 for the water tank outlet are fixed on the top of the box body 1, and their ports are fixedly connected to the cooling water tank 3. When it is necessary to convey water into the cooling water tank 3, the water in the circulating water tank 701 is pumped into the cooling water tank 3 through the water outlet pipe 704 and by turning on the water pump 702 for the water tank inlet. When the water in the cooling water tank 3 reaches a certain amount, the water in the cooling water tank 3 is pumped into the circulating water tank 701 through the water inlet pipe 709 and by turning on the water pump 703 for the water tank outlet, and the water circulation is carried out in this way.

[0042] A water tank opening 707 is opened at the top of the circulating water tank 701. A flow collecting cover 708 is fixedly installed at the outer edge part of the water tank opening 707, and a high-speed heat extraction fan 706 is fixedly installed inside the flow collecting cover 708; ventilation holes are opened on the sides of the flow collecting cover 708. When the temperature of the water in the circulating water tank 701 rises after circulation, the hot air in the water will diffuse towards the water tank opening 707, and the hot air is quickly extracted through the flow collecting cover 708 and the high-speed heat extraction fan 706. The flow collecting cover 708 can utilize the waste heat of the exhaust gas by connecting and installing a waste heat recovery module, so as to achieve the purpose of quickly dissipating heat from the circulating water tank 701 and recovering and utilizing the waste heat of the hot air.

[0043] Specifically, during use, when it is necessary to quickly cool down the oxidation furnace body 2, the water in the circulating water tank 701 is pumped into the cooling water tank 3 through the water outlet pipe 704 and by turning on the water pump 702 for the water tank inlet. The cooling water tank 3 can cool down the oxidation furnace body 2. When the water in the cooling water tank 3 reaches a certain amount, the water in the cooling water tank 3 is pumped into the circulating water tank 701 through the water inlet pipe 709 and by turning on the water pump 703 for the water tank outlet, and the water circulation is carried out in this way.

[0044] When the temperature of the water in the circulating water tank 701 rises after circulation, the hot air in the water will diffuse towards the water tank opening 707, and the hot air is quickly extracted through the flow collecting cover 708 and the high-speed heat extraction fan 706. The flow collecting cover 708 can utilize the waste heat of the exhaust gas by connecting and installing a waste heat recovery module, so as to achieve the purpose of quickly dissipating heat from the circulating water tank 701 and recovering and utilizing the waste heat of the hot air.

[0045] The solution in this embodiment can be selectively combined and used with the solutions in other embodiments. Embodiment 3

[0046] Please refer to Figures 1-3, on the basis of the above embodiments, for the steam catalytic low-temperature thermal oxidation equipment, the slag cleaning system 5 of the furnace includes a fixed disk 501, a cleaning plate 502, a cleaning motor 503, a sleeve 504, a guide rod 505, a top plate 506, a micro drive wheel 507 and a tension spring 508; The sleeves 504 are fixedly distributed in an annular array at the edge part of the fixed disk 501. The guide rods 505 are slidably connected inside the sleeves 504. One end of the guide rod 505 is fixedly connected to the top plate 506. The micro drive wheel 507 is fixedly installed on the top plate 506, and the micro drive wheel 507 contacts the inner wall of the convex channel of the split electric gate 6. The tension spring 508 is sleeved outside the sleeves 504 and the guide rods 505. One end of the tension spring 508 abuts against the edge part of the fixed disk 501, and the other end abuts against the lower part of the top plate 506. Through the setting of the tension spring 508, the micro drive wheel 507 can be made to closely adhere to the inner wall of the convex channel of the split electric gate 6. Then, through the drive of the micro drive wheel 507, the slag cleaning system of the furnace can walk along the inner wall of the convex channel of the split electric gate 6.

[0047] The cleaning plate 502 is rotatably connected to one side of the fixed disk 501. The cleaning motor 503 is fixedly installed on the other side of the fixed disk 501. The drive shaft of the cleaning motor 503 is fixedly connected to the rotating shaft of the cleaning plate 502. The inner diameter of the cleaning plate 502 is slightly smaller than the channel inner diameter of the split electric gate 6 and the inner cavity inner diameter of the oxidation furnace body 2. By driving the cleaning plate 502 to rotate through the cleaning motor 503 and cooperating with the walking of the micro drive wheel 507, the slag in the oxidation furnace body 2 after the reaction can be cleaned to the other end of the oxidation furnace body 2 at the switching valve, so that the switching valve can be opened to discharge the slag in the oxidation furnace body 2.

[0048] Specifically, when in use, after the oxidation furnace body 2 reacts, when it is necessary to clean the slag in the oxidation furnace body 2, by opening the split electric gate 6, the inner cavity of the oxidation furnace body 2 is communicated with the split electric gate 6. The inner diameter of the cleaning plate 502 is slightly smaller than the channel inner diameter of the split electric gate 6 and the inner cavity inner diameter of the oxidation furnace body 2. Then, by cooperating with the walking of the micro drive wheel 507, the slag cleaning system 5 can travel from the convex channel of the split electric gate 6 into the inner cavity of the oxidation furnace body 2. Then, by driving the cleaning plate 502 to rotate through the cleaning motor 503, the slag in the oxidation furnace body 2 after the reaction can be cleaned to the other end of the oxidation furnace body 2 at the switching valve, so that the switching valve can be opened to discharge the slag in the oxidation furnace body 2.

[0049] The solution in this embodiment can be selectively combined and used with the solutions in other embodiments. Embodiment 4

[0050] Please refer to Figures 4-7, on the basis of the above embodiments, for the water vapor catalytic low-temperature thermal oxidation equipment, the waste gas treatment system 4 includes a shunt pipeline 401, an air outlet nozzle 402, a cylinder 403, a cover plate 404, a rotating rod 405, a shaping outer shell 406, a first activated carbon filter screen 407, a high-pressure air extraction pump 408, a bearing 409, a second activated carbon filter screen 410, a rolling groove 411, a roller 412, a first diversion hole 413, a second diversion hole 414, a third activated carbon filter screen 415 and an air extraction fan 416; The top and bottom of the cylinder 403 are threadedly connected with a cover plate 404. The cover plate 404 is threadedly connected with the cylinder 403, which is convenient for installation and disassembly and is also conducive to maintenance. A rotating rod 405 is rotatably connected between the two cover plates 404. Six groups of first activated carbon filter screens 407 are evenly arranged on the outer wall of the rotating rod 405. The outer wall of the first activated carbon filter screen 407 is fixedly connected with the rotating rod 405 through a shaping outer shell 406. The shaping outer shell 406 is used to maintain the shape of the first activated carbon filter screen 407 and avoid the problem that the first activated carbon filter screen 407 is prone to deformation. One side of the shaping outer shell 406 is in contact with the inner wall of the cylinder 403. One side of the shaping outer shell 406 and the inner wall of the cylinder 403 are polished, so that when the shaping outer shell 406 rotates, the friction between one side of the shaping outer shell 406 and the inner wall of the cylinder 403 is small, which is conducive to the rotation of the shaping outer shell 406 and the first activated carbon filter screen 407.

[0051] Specifically, bearings 409 are arranged at both ends of the rotating rod 405, and a second activated carbon filter screen 410 is sleeved. The bearings 409 are used to fix both ends of the rotating rod 405 and are also convenient for the rotation of the rotating rod 405. The second activated carbon filter screen 410 prevents the waste gas from directly contacting the bearings 409, thereby avoiding the problem that the bearings 409 are prone to corrosion. The second activated carbon filter screen 410 is located on one side of the bearings 409, and a fixing shell is arranged on the outer wall. The fixing shell is used to plastically wrap the second activated carbon filter screen 410. The second activated carbon filter screen 410 is sleeved on the outer wall of the rotating rod 405 through the fixing shell. The surfaces between the rotating rod 405 and the fixing shell are also polished to reduce friction. Both the bearings 409 and the second activated carbon filter screen 410 are arranged in the middle of the interior of the cover plate 404.

[0052] The other end of the waste gas treatment pipeline 7 is provided with a high-pressure air extraction pump 408. The high-pressure air extraction pump 408 increases the flow rate of the waste gas. One end of the high-pressure air extraction pump 408 is provided with a shunt pipeline 401. Six groups of air outlet nozzles 402 are fixedly installed on one side of the shunt pipeline 401. The air outlet nozzles 402 are fixedly installed inside the cylinder 403. The waste gas extracted by the high-pressure air extraction pump 408 enters the inside of the cylinder 403 through the shunt pipeline 401 and the six groups of air outlet nozzles 402, so that the waste gas impacts on the surface of the first activated carbon filter screen 407, thereby enabling the first activated carbon filter screen 407 and the shaping outer shell 406 to rotate.

[0053] A second diversion hole 414 is provided inside the cylinder 403, and a third activated carbon filter screen 415 is arranged inside the second diversion hole 414. The third activated carbon filter screen 415 is used to perform secondary filtration on the gas filtered by the first activated carbon filter screen 407 to achieve the purpose of efficiently treating waste gas. An air extraction fan 416 is arranged on the outer side of the third activated carbon filter screen 415. The back of the air extraction fan 416 is fixedly connected to the third activated carbon filter screen 415 through an installation frame. The air extraction fan 416 is used to change the flow direction of the gas filtered by the first activated carbon filter screen 407 so that the gas can be discharged.

[0054] Specifically, six groups of first diversion holes 413 are provided inside the cylinder 403. The first diversion holes 413 are located on the left side of the second diversion hole 414, and the air outlet nozzle 402 is located inside the first diversion holes 413. Both the first diversion holes 413 and the second diversion holes 414 are inclined. The inclination of the first diversion holes 413 and the second diversion holes 414 is to achieve the effect of wind direction guidance, which is beneficial for the air outlet nozzle 402 to impact the waste gas on the surface of the first activated carbon filter screen 407, thereby facilitating the slow rotation of the first activated carbon filter screen 407. On the other hand, the inclination of the second diversion holes 414 also facilitates the discharge of the gas after primary filtration.

[0055] In addition, rollers 412 are provided at the upper and lower ends on one side of the shaping outer shell 406. Rolling grooves 411 are provided inside the upper and lower ends of the cylinder 403. The rollers 412 are correspondingly arranged with the rolling grooves 411, and the rollers 412 are movably connected inside the rolling grooves 411. Through the arrangement of the rollers 412 and the rolling grooves 411, it is convenient to guide the rotation trajectories of the first activated carbon filter screen 407 and the shaping outer shell 406.

[0056] It should be noted that although the above-mentioned embodiments have been described in this article, the patent protection scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, any changes and modifications made to the embodiments described in this article, or equivalent structural, equivalent process, or equivalent functional transformations made using the content of the specification and drawings of the present invention, and directly or indirectly applying the above technical solutions to other related technical fields, are all included in the protection scope of the present invention patent.

Claims

1. A steam catalytic low-temperature thermal oxidation device, comprising an oxidation furnace body (2), characterized in that: The outer fixed sleeve of the oxidation furnace body (2) is provided with a cooling water tank (3), the outer sleeve of the cooling water tank (3) is provided with a box body (1), and a circulating water system (7) is provided below the box body (1); A split-type electric gate (6) is fixedly mounted on one end of the oxidation furnace body (2), and a slag cleaning system (5) is provided on one side of the split-type electric gate (6); The other end of the oxidation furnace body (2) is fixedly connected to an air inlet and an air outlet, and a piezoelectric steam generator and a mass flow meter are installed on the air inlet of the oxidation furnace body (2); the air outlet is fixedly connected to an exhaust gas treatment system (4).

2. The steam catalytic low temperature thermal oxidation equipment according to claim 1 is characterized in that: The circulating water system (7) comprises a circulating water pool (701), a water tank inlet pump (702), a water tank outlet pump (703), a water pool outlet pipe (704), a stirring paddle (705), a high-speed heat extraction fan (706), a water pool outlet (707), a flow collecting cover (708) and a water pool inlet pipe (709); The water pool outlet pipe (704) and the water pool inlet pipe (709) are respectively fixedly connected to the two ends of the circulating water pool (701); the water pool outlet pipe (704) is connected to the cooling water tank (3) via a water tank inlet pump (702); and the water pool inlet pipe (709) is connected to the cooling water tank (3) via a water tank outlet pump (703); The water pool outlet (707) is opened at the top of the circulating water pool (701), the collecting cover (708) is fixedly installed on the outer edge of the water pool outlet (707), and the high-speed heat extraction fan (706) is fixedly installed inside the collecting cover (708).

3. The steam catalytic low temperature thermal oxidation equipment according to claim 2 is characterized in that: The circulating water pool (701) is fixedly installed below the box (1) via a connecting column, and the stirring paddle (705) is rotatably arranged inside the circulating water pool (701).

4. The steam catalytic low temperature thermal oxidation equipment according to claim 1 is characterized in that: The split-type electric gate (6) is configured as a convex structure, and the slag cleaning system (5) is located in the convex channel of the split-type electric gate (6); The slag cleaning system (5) comprises a fixed plate (501), a cleaning plate (502), a cleaning motor (503), a sleeve (504), a guide rod (505), a top plate (506), a micro driving wheel (507) and a tightening spring (508); The sleeves (504) are fixedly distributed in an annular array on the edge of the fixed disk (501), the guide rods (505) are slidably connected to the inside of the sleeves (504), the top plate (506) is fixedly connected to one end of the guide rods (505), and the micro driving wheel (507) is fixedly mounted on the top plate (506); The pressing spring (508) is sleeved on the outside of the sleeve (504) and the guide rod (505); one end of the pressing spring (508) is pressed against the edge of the fixed disk (501), and the other end is pressed against the bottom of the top plate (506).

5. The steam catalytic low temperature thermal oxidation equipment according to claim 4 is characterized in that: The cleaning plate (502) is rotatably connected to one side of the fixed disk (501), the cleaning motor (503) is fixedly mounted on the other side of the fixed disk (501), and the driving shaft of the cleaning motor (503) is fixedly connected to the rotating shaft of the cleaning plate (502).

6. The steam catalytic low temperature thermal oxidation equipment according to claim 1 is characterized in that: The exhaust gas treatment system (4) comprises a diversion pipe (401), an air outlet nozzle (402), a cylinder (403), a cover plate (404), a rotating rod (405), a shaping shell (406), a first activated carbon filter (407), a high-pressure air pump (408), a bearing (409), a second activated carbon filter (410), a rolling groove (411), a roller (412), a first guide hole (413), a second guide hole (414), a third activated carbon filter (415) and an exhaust fan (416); The top and bottom of the cylinder (403) are threadedly connected with a cover plate (404), and a rotating rod (405) is rotatably connected between two groups of the cover plates (404). Six groups of first activated carbon filter screens (407) are evenly arranged on the outer wall of the rotating rod (405). The outer wall of the first activated carbon filter screen (407) is fixedly connected to the rotating rod (405) by arranging a shaping shell (406), and one side of the shaping shell (406) is in contact with the inner wall of the cylinder (403); A high-pressure air pump (408) is disposed at the other end of the exhaust gas treatment pipeline (7), a diversion pipeline (401) is disposed at one end of the high-pressure air pump (408), six groups of air outlet nozzles (402) are fixedly installed on one side of the diversion pipeline (401), and the air outlet nozzles (402) are fixedly installed inside the cylinder (403); A second flow guide hole (414) is provided inside the cylinder (403), a third activated carbon filter (415) is provided inside the second flow guide hole (414), an exhaust fan (416) is provided outside the third activated carbon filter (415), and the back of the exhaust fan (416) is fixedly connected to the third activated carbon filter (415) by providing a mounting frame.

7. The steam catalytic low temperature thermal oxidation equipment according to claim 6, characterized in that: The two ends of the rotating rod (405) are provided with bearings (409) and are sleeved with a second activated carbon filter (410); the second activated carbon filter (410) is located on one side of the bearing (409), and a fixed shell is provided on the outer wall; the second activated carbon filter (410) is sleeved on the outer wall of the rotating rod (405) through the fixed shell; the bearing (409) and the second activated carbon filter (410) are both provided at the inner middle end of the cover plate (404).

8. The steam catalytic low temperature thermal oxidation equipment according to claim 6, characterized in that: Rollers (412) are arranged at the upper and lower ends of one side of the shaping shell (406), rolling grooves (411) are opened inside the upper and lower ends of the cylinder (403), the rollers (412) are arranged corresponding to the rolling grooves (411), and the rollers (412) are movably connected inside the rolling grooves (411).

9. The steam catalytic low temperature thermal oxidation equipment according to claim 6, characterized in that: Six groups of first flow guide holes (413) are provided inside the cylinder (403), the first flow guide holes (413) are located on the left side of the second flow guide holes (414), and the air outlet nozzle (402) is located inside the first flow guide holes (413); The first guide hole (413) and the second guide hole (414) are both arranged at an incline.

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