A wafer six-sided inspection table

Abstract

The present invention relates to a six-sided inspection table for wafers, belonging to the technical field of wafer inspection. The six-sided inspection table for wafers includes a mounting base plate, a rotating motor, a rotating plate, and a detection block mounted on the rotating plate, and further includes: a lateral adjustment mechanism, a longitudinal adjustment mechanism, a magnification mechanism, and a blowing and suction mechanism. Through the combined use of the magnification mechanism and the blowing and suction mechanism, the present invention realizes the turning operation of the crystal grains, and can magnify the crystal grains both when turning and not turning, making the image captured by the inspection camera clearer, thus facilitating the judgment of the quality of the crystal grains, improving the inspection accuracy, reducing the arrangement of inspection cameras, saving resources, reducing the difficulty of maintenance and assembly, and when turning the crystal grains, the second magnification seat is directly above the first magnification seat, and at this time the opening of the groove is on the left side, so when turning the particle size, it can prevent the crystal grains from sliding out of the first magnification seat and the second magnification seat, thereby avoiding losses caused by the crystal grains being thrown out.

Description

Technical Field

[0001] The present invention belongs to the technical field of wafer detection, and particularly relates to a six-sided wafer detection table. Background Art

[0002] Wafer testing is a key step in the semiconductor manufacturing process, mainly used to evaluate the quality and performance of wafers; wafer testing mainly includes the following aspects: Appearance inspection includes: Wafer surface defect detection: checking whether there are defects such as scratches and contamination on the wafer surface; Dimension measurement: measuring parameters such as the diameter and flatness of the wafer to ensure that it meets the manufacturing standards; Electrical performance testing: evaluating the electrical performance of the wafer by measuring parameters such as resistance, capacitance, and current on the wafer; This is an important link to ensure the quality and reliability of semiconductor chips; Wafer surface defect detection is an important part of wafer testing, mainly including the following contents: Defect detection: detecting defects such as cracks, scratches, oxides, and particles; Contamination detection: detecting surface foreign objects, chemical residues, etc.; Optical performance detection: evaluating whether the optical characteristics of the wafer meet the requirements.

[0003] In the six-sided surface defect detection of wafers, generally, the form of sucking the die with a suction nozzle is adopted for detection. After the die is picked up by the die picking mechanism, the die picking suction nozzle is used to pick up the die, and then the die picking mechanism makes a rotational movement to meet the needs of six-sided detection. Such a method requires many groups of die picking mechanisms, and during the die picking process, the position where the die picking suction nozzle picks up the die often cannot be particularly accurate, making it impossible to meet the needs of a high-magnification lens with a small depth of field during detection. In addition, during the detection process, since six-sided detection is required, the die needs to be flipped during the detection process. In the prior art, generally, the die is placed on a transparent plate-like object, and multiple groups of upper detection cameras and lower detection cameras are used for shooting. Using multiple groups of upper and lower detection cameras increases the cost, and at the same time, the presence of the plate-like transparent object will affect the quality of the shooting image. Based on this, a six-sided wafer detection table is proposed. Summary of the Invention

[0004] The purpose of the present invention is to provide a reasonably designed six-sided wafer detection table to solve the above problems.

[0005] The present invention achieves the above purpose through the following technical solutions:

[0006] A six-sided wafer detection table includes a mounting base plate, a rotating motor, a rotating plate, and a detection block mounted on the rotating plate, and further includes:

[0007] A lateral adjustment mechanism and a longitudinal adjustment mechanism mounted on the detection block;

[0008] An amplifying mechanism installed on the top of the detection block. The amplifying mechanism includes a first amplifying base rotatably connected to the top of the detection block. A storage groove is provided at the top of the first amplifying base. A flipping ear is fixedly connected to one side of the first amplifying base. A second amplifying base is rotatably connected to the top of the first amplifying base. A groove is provided at the bottom of the second amplifying base;

[0009] A blowing and suction mechanism installed in the detection block.

[0010] As a further optimized solution of the present invention, the detection block includes a mounting block fixedly connected to the top of the rotating plate. An adjusting block is attached to the top of the mounting block. A fixing block is fixedly connected to the top of the adjusting block. A detection seat is fixedly connected to the top of the fixing block.

[0011] As a further optimized solution of the present invention, the blowing and suction mechanism includes a third air nozzle fixedly connected to the bottom of the detection seat. The third air nozzle is located within the fixing block. An air flow channel communicating with the inside of the third air nozzle is provided in the detection seat. An electric ball valve is installed in the air flow channel. An air pipe communicating with the inside of the air flow channel is provided on the detection seat.

[0012] As a further optimized solution of the present invention, a fixing groove is provided at the top of the detection seat. The exhaust end of the air pipe is located within the fixing groove.

[0013] As a further optimized solution of the present invention, the flipping ear is adapted to the fixing groove, and the first amplifying base is rotatably connected to the top of the detection seat.

[0014] As a further optimized solution of the present invention, the lateral adjustment mechanism includes a connecting plate fixedly connected to the mounting block. A first adjustment column is rotatably connected to the connecting plate. A first adjustment rod is threadedly connected to the inside of the first adjustment column. The end of the first adjustment rod penetrates through the connecting plate and is fixedly connected to a first sliding plate. A first adjustment frame is fixedly connected to the end of the first sliding plate. A first limiting column is slidably connected within the first adjustment frame.

[0015] As a further optimized solution of the present invention, the first sliding plate is slidably connected to the adjusting block, and the first limiting column is installed on the mounting block.

[0016] As a further optimized solution of the present invention, the longitudinal adjustment mechanism includes a fixing frame fixedly connected to the adjusting block. A second adjustment rod is fixedly connected to the fixing frame. A second adjustment column is threadedly connected to the end of the second adjustment rod. The end of the second adjustment column is rotatably connected to a second sliding plate. The second adjustment rod penetrates through the second sliding plate. A second adjustment frame is fixedly connected to the end of the second sliding plate. A second limiting column is slidably connected within the second adjustment frame. The second limiting column is installed on the adjusting block.

[0017] As a further optimization scheme of the present invention, the second slide plate is slidably connected to the mounting block, and the second slide plate is slidably connected to the first slide plate.

[0018] As a further optimization scheme of the present invention, the rotating motor is installed on the top of the mounting base plate. The output end of the rotating motor is fixedly connected to an air slide column. The rotating plate is fixedly connected to the air slide column. A first air nozzle is installed on the outer surface of the air slide column. A second air nozzle is installed at the bottom of the outer surface of the air slide column. The first air nozzle is internally communicated with the second air nozzle.

[0019] The beneficial effects of the present invention are as follows:

[0020] 1. Through the combined use of the magnification mechanism and the blowing and suction mechanism, the present invention realizes the turning operation of the crystal grains. Moreover, whether the crystal grains are turned or not, the crystal grains can be magnified, making the picture taken by the detection camera clearer, thus facilitating the judgment of the quality of the crystal grains, improving the detection accuracy, reducing the arrangement of the detection cameras, saving resources, reducing the difficulty of maintenance and assembly. And when turning the crystal grains, the second magnification base is directly above the second magnification base, and at this time, the opening of the groove is on the left side. Therefore, when turning the particle size, it can prevent the crystal grains from sliding out of the first magnification base and the second magnification base, thus avoiding losses caused by the crystal grains being thrown out.

[0021] 2. Through the setting of the blowing and suction mechanism, when the crystal grains are not turned, the blowing and suction mechanism can generate an air suction and fixation function, so that the turning ears in the magnification mechanism are stably adsorbed in the fixed slots, ensuring the stability of the position of the crystal grains during the crystal grain detection process, preventing the position of the crystal grains from moving, resulting in ghosting in the taken picture, and ensuring the detection accuracy.

[0022] 3. Through the combined use of the rotating motor, the rotating plate and the detection block, the six-sided detection table of the present invention only needs two crystal grain taking mechanisms to complete the crystal grain taking and unloading operations, reducing the arrangement quantity of the crystal grain taking mechanisms, reducing the equipment cost, and being able to adjust the position of the crystal grains so that the crystal grains are at the shooting end of the detection camera, ensuring the shooting quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is the overall front three-dimensional structure schematic diagram of the present invention;

[0024] Figure 2 is the overall bottom three-dimensional structure schematic diagram of the present invention;

[0025] Figure 3 is the front three-dimensional structure schematic diagram of the detection table of the present invention;

[0026] Figure 4 is the back three-dimensional structure schematic diagram of the detection table of the present invention;

[0027] Figure 5 It is a schematic cross-sectional view of the middle part of the front of the detection table of the present invention;

[0028] Figure 6 It is a schematic cross-sectional view of the middle part of the side of the detection table of the present invention;

[0029] Figure 7 It is of the present invention Figure 6 Schematic enlarged view of part A;

[0030] Figure 8 It is a schematic cross-sectional view of the top of the detection table of the present invention;

[0031] Figure 9 It is of the present invention Figure 8 Schematic enlarged view of part B;

[0032] Figure 10 It is a schematic cross-sectional view of the side of the detection table of the present invention;

[0033] Figure 11 It is a three-dimensional front view of the magnification mechanism of the present invention;

[0034] Figure 12 It is a three-dimensional bottom view of the magnification mechanism of the present invention;

[0035] Figure 13 It is a three-dimensional front view of the magnification mechanism after closing of the present invention;

[0036] Figure 14 It is a three-dimensional side view of the magnification mechanism after closing of the present invention.

[0037] In the figure: 1. Installation base plate; 2. Rotating motor; 3. Rotating plate; 4. Air slide column; 5. First air nozzle; 6. Second air nozzle; 7. Installation block; 8. Adjusting block; 9. Fixed block; 10. Detection seat; 11. Horizontal adjustment mechanism; 1101. Connecting plate; 1102. First adjustment column; 1103. First adjustment rod; 1104. First slide plate; 1105. First adjustment frame; 1106. First limit column; 12. Longitudinal adjustment mechanism; 1201. Fixed frame; 1202. Second adjustment rod; 1203. Second slide plate; 1204. Second adjustment column; 1205. Second adjustment frame; 1206. Second limit column; 13. Magnification mechanism; 1301. First magnification seat; 1302. Storage groove; 1303. Flipping ear; 1304. Second magnification seat; 1305. Groove; 14. Fixed groove; 15. Blowing and suction mechanism; 1501. Third air nozzle; 1502. Air flow channel; 1503. Electric ball valve; 1504. Air pipe. Detailed implementation manners

[0038] The present application will be further described in detail below in conjunction with the accompanying drawings. It is necessary to point out here that the following specific embodiments are only used to further illustrate the present application and should not be construed as limiting the protection scope of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application based on the above application content.

[0039] Embodiment: As Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Figure 10 shown, a six-sided inspection table for wafers includes a mounting base plate 1, a rotating motor 2, a rotating plate 3, and inspection blocks mounted on the rotating plate 3. The inspection blocks are mounted on the rotating plate 3 by bolts. The number of inspection blocks is multiple and can be arranged according to needs. The six-sided inspection table is mounted in an inspection device through the mounting base plate 1 (the inspection device is prior art and not shown in the figure and will not be elaborated in detail). The rotating motor 2 is mounted on the top of the mounting base plate 1. The output end of the rotating motor 2 is fixedly connected to an air slide column 4. The rotating plate 3 is fixedly connected to the air slide column 4. A first air nozzle 5 is mounted on the outer surface of the air slide column 4. The first air nozzle 5 is fixedly communicated with an air pump through a hose (both the air pump and the hose are prior art and not shown in the figure and will not be elaborated in detail). A second air nozzle 6 is mounted at the bottom of the outer surface of the air slide column 4. The first air nozzle 5 is internally communicated with the second air nozzle 6. The inspection block includes a mounting block 7 fixedly connected to the top of the rotating plate 3. The mounting block 7 is fixedly connected to the top of the rotating plate 3 by bolts. An adjusting block 8 is attached to the top of the mounting block 7. A fixing block 9 is fixedly connected to the top of the adjusting block 8. A detection seat 10 is fixedly connected to the top of the fixing block 9. A detection camera is arranged above the detection seat 10, and the number of detection cameras is adaptively set according to needs (the detection camera is prior art and not shown in the figure and will not be elaborated in detail). By adjusting the positions of the detection seat 10 and the detection camera, the quality and clarity of the grain images captured by the detection camera are ensured, thereby improving the detection accuracy.

[0040] In use, the feeding and crystal picking mechanism (the feeding and crystal picking mechanism is prior art and not shown in the figure, so no detailed description is given) sucks the crystal grains and places them on the tops of a plurality of detection seats 10. During this process, after the crystal picking mechanism places one crystal grain on one detection seat 10 each time, the rotation motor 2 works once. And before and after each operation, several of the plurality of detection seats 10 are always positioned at the shooting end of the detection camera. The detection camera takes pictures of each face of the crystal grain and sends the taken pictures to the control terminal (the control terminal is prior art and not shown in the figure, so no detailed description is given). The control terminal analyzes the pictures to judge the quality of the crystal grain. After the detection is completed, the rotation motor 2 rotates the detected detection seat 10 to the blanking station. The blanking and crystal picking mechanism (substantially the same as the feeding and crystal picking mechanism) removes the detected crystal grains, places the qualified ones in the qualified product storage box, and places the unqualified ones in the defective product box (the storage box and the defective product box are both prior art and not shown in the figure, so no detailed description is given).

[0041] As Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 8 and Figure 10 shown, this six-sided detection table further includes a lateral adjustment mechanism 11 and a longitudinal adjustment mechanism 12 installed on the detection block. The lateral adjustment mechanism 11 includes a connecting plate 1101 fixedly connected to the mounting block 7. A first adjustment column 1102 is rotatably connected to the connecting plate 1101. A first adjustment rod 1103 is threadedly connected to the inner thread of the first adjustment column 1102. The end of the first adjustment rod 1103 penetrates through the connecting plate 1101 and is fixedly connected to a first sliding plate 1104. The first sliding plate 1104 is slidably connected to the adjustment block 8. The end of the first sliding plate 1104 is fixedly connected to a first adjustment frame 1105. A first limiting column 1106 is slidably connected inside the first adjustment frame 1105. The first limiting column 1106 is installed on the mounting block 7. The longitudinal adjustment mechanism 12 includes a fixing frame 1201 fixedly connected to the adjustment block 8. A second adjustment rod 1202 is fixedly connected to the fixing frame 1201. A second adjustment column 1204 is threadedly connected to the end of the second adjustment rod 1202. Scales are provided on the second adjustment column 1204 to facilitate precise adjustment of the position of the detection seat 10, and thus the position of the crystal grain. The end of the second adjustment column 1204 is rotatably connected to a second sliding plate 1203. The second adjustment rod 1202 penetrates through the second sliding plate 1203. The second sliding plate 1203 is slidably connected to the mounting block 7. The second sliding plate 1203 is slidably connected to the first sliding plate 1104. The end of the second sliding plate 1203 is fixedly connected to a second adjustment frame 1205. A second limiting column 1206 is slidably connected inside the second adjustment frame 1205. The second limiting column 1206 is installed on the adjustment block 8.

[0042] During use, first adjust the position of the detection base 10 according to the position of the shooting end of the detection camera. When lateral adjustment is required, rotate the first adjustment column 1102 so that the first adjustment rod 1103 extends or contracts under the action of the thread, pushing or pulling the first sliding plate 1104 to move. Then, the adjustment block 8 is pushed or pulled to move on the top of the mounting block 7 and the top of the second sliding plate 1203. When longitudinal adjustment is required, rotate the second adjustment column 1204. The second adjustment column 1204 makes the second adjustment rod 1202 move forward or backward under the action of the thread, pushing or pulling the fixing bracket 1201. Then, the adjustment block 8 is pushed or pulled to move forward or backward on the top of the mounting block 7 and the top of the first sliding plate 1104, thereby realizing the adjustment of the position of the detection base 10, so that the crystal grains can be in a state of being directly opposite to the shooting end of the detection camera during detection.

[0043] As Figure 5 、 Figure 7 、 Figure 9 、 Figure 11 、 Figure 12 、 Figure 13 and Figure 14 As shown, this six-sided detection table further includes: a magnifying mechanism 13 installed on the top of the detection block. The magnifying mechanism 13 includes a first magnifying base 1301 rotatably connected to the top of the detection block. A hemispherical groove adapted to the first magnifying base 1301 is provided on the top of the detection base 10. A storage groove 1302 is provided on the top of the first magnifying base 1301. A flipping ear 1303 is fixedly connected to one side of the first magnifying base 1301. A second magnifying base 1304 is rotatably connected to the top of the first magnifying base 1301 (both the first magnifying base 1301 and the second magnifying base 1304 are made of transparent convex lens materials, so both the first magnifying base 1301 and the second magnifying base 1304 have a magnifying function). When the second magnifying base 1304 rotates to the directly above the first magnifying base 1301, at this time, the first magnifying base 1301 and the second magnifying base 1304 form a sphere. A groove 1305 is provided at the bottom of the second magnifying base 1304. The first magnifying base 1301 is rotatably connected to the top of the detection base 10. A fixing groove 14 is provided on the top of the detection base 10. The flipping ear 1303 is adapted to the fixing groove 14. The setting of the flipping ear 1303 realizes a certain limiting function, ensuring that when flipping and not flipping, the lower surface or the upper surface of the crystal grains can be directly above.

[0044] During use, after the position of the detection base 10 is adjusted, the crystal grains are placed in the storage groove 1302 through the loading and crystal picking mechanism. Then, the second magnifying base 1304 can be rotated counterclockwise by 180 0 by the loading and crystal picking mechanism, so that the second magnifying base 1304 rotates to the directly above the first magnifying base 1301, presenting as shown in Figure 13 and Figure 14The state shown. At this time, the crystal grains are in the groove 1305. During detection, both the first magnification seat 1301 and the second magnification seat 1304 can magnify the crystal grains, making the image captured by the detection camera clearer, thus facilitating the judgment of the quality of the crystal grains, improving the detection accuracy. And when flipping the crystal grains, the second magnification seat 1304 is directly above the second magnification seat 1304. At this time, the opening of the groove 1305 is on the left side (as Figure 13 shown), so when flipping the particle size, it can prevent the crystal grains from slipping out of the first magnification seat 1301 and the second magnification seat 1304, thus avoiding losses caused by the crystal grains being thrown out.

[0045] As Figure 5 , Figure 6 , Figure 7 , Figure 9 and Figure 10 shown, this six-sided detection table further includes: a blowing and suction mechanism 15 installed in the detection block. The blowing and suction mechanism 15 includes a third air nozzle 1501 fixedly connected to the bottom of the detection seat 10. The third air nozzle 1501 is fixedly connected to the second air nozzle 6 through a hose (the hose is a prior art and is not shown in the figure and will not be elaborated in detail). The third air nozzle 1501 is located in the fixed block 9. An air flow channel 1502 communicating with the inside of the third air nozzle 1501 is opened in the detection seat 10. An electric ball valve 1503 is installed in the air flow channel 1502. An air pipe 1504 communicating with the inside of the air flow channel 1502 is opened on the detection seat 10. The exhaust end of the air pipe 1504 is in the fixed groove 14.

[0046] When the crystal grains are placed in the storage groove 1302 and the second magnification seat 1304 is directly above the first magnification seat 1301, at this time, the flipping ear 1303 is in the left fixed groove 14, and the position of the electric ball valve 1503 makes the left side of the air flow channel 1502 communicate with the inside of the third air nozzle 1501. Then the air pump is started to extract the gas in the air flow channel 1502. At this time, the air flow channel 1502 will extract the gas in the left air pipe 1504, making the flipping ear 1303 tightly adsorbed in the left fixed groove 14, ensuring the stability of the position of the crystal grains during the detection of the crystal grains, preventing the position of the crystal grains from moving, resulting in double images in the captured image, and ensuring the detection accuracy;

[0047] When the crystal grains need to be flipped, the air pump blows out high-pressure air flow at this time, so that the third air nozzle 1501 injects high-pressure air flow into the left side of the air flow channel 1502, and then the left trachea 1504 blows out high-pressure air flow. The high-pressure air flow will act on the flipping ear 1303, so that the flipping ear 1303 drives the second magnifying seat 1304 and the first magnifying seat 1301 to flip to the right until the flipping ear 1303 is in the fixing groove 14 on the right side. At this time, the electric ball valve 1503 rotates to make the third air nozzle 1501 communicate with the right side of the air flow channel 1502. At this time, the air pump pumps air, so that the third air nozzle 1501 extracts the gas in the right side of the air flow channel 1502, and then the air flow channel 1502 extracts the gas in the right trachea 1504, so that the flipping ear 1303 is tightly adsorbed in the fixing groove 14 on the right side, ensuring the stability of the crystal grain position during the crystal grain detection process, preventing the crystal grain position from moving, resulting in double images in the captured picture, ensuring the detection accuracy, and then realizing the flipping detection of the crystal grains, reducing the arrangement of the detection cameras, saving resources, reducing the difficulty of maintenance and assembly. In addition, when the flipping ear 1303 is tightly adsorbed in the fixing groove 14 on one side, the electric ball valve 1503 can be controlled to work, so that the third air nozzle 1501 communicates with the inside of the air flow channel 1502 on the other side, and then blows air into the fixing groove 14 on the other side through the trachea 1504 on the other side. The blown air will act on the shooting end of the detection camera, realizing the cleaning function of the detection camera, avoiding the adhesion of pollutants on the detection camera affecting the shooting clarity, and further improving the quality of the captured image.

[0048] The specific working principle of the present invention is as follows:

[0049] During use, first adjust the position of the detection seat 10 according to the position of the shooting end of the detection camera. When horizontal adjustment is required, rotate the first adjustment column 1102 so that the first adjustment rod 1103 extends or shortens under the action of the thread, pushing or pulling the first slide plate 1104 to move, and then pushing or pulling the adjustment block 8 to move on the top of the mounting block 7 and the top of the second slide plate 1203. When vertical adjustment is required, rotate the second adjustment column 1204. The second adjustment column 1204 makes the second adjustment rod 1202 move forward or backward under the action of the thread, pushing or pulling the fixing frame 1201, and then pushing or pulling the adjustment block 8 to move forward or backward on the top of the mounting block 7 and the top of the first slide plate 1104, thereby realizing the adjustment of the position of the detection seat 10, so that the crystal grains can be in a state of facing the shooting end of the detection camera during detection;

[0050] Then, the crystal grains are sucked by the feeding and crystal taking mechanism and placed in the storage groove 1302, and then the second magnifying seat 1304 can be rotated counterclockwise by 180° through the feeding and crystal taking mechanism, so that the second magnifying seat 1304 rotates to directly above the first magnifying seat 1301, presenting asFigure 13 and Figure 14 In the state shown, when the crystal grain is placed in the storage groove 1302 and the second magnifying base 1304 is directly above the first magnifying base 1301, at this time, the flipping ear 1303 is in the left fixing groove 14, and the position of the electric ball valve 1503 makes the left side of the air flow channel 1502 communicate with the inside of the third air nozzle 1501. Then, the air pump is started to extract the gas in the air flow channel 1502. At this time, the air flow channel 1502 will extract the gas in the left air pipe 1504, so that the flipping ear 1303 is tightly adsorbed in the left fixing groove 14, ensuring the stability of the crystal grain position during the crystal grain detection process, preventing the crystal grain position from moving, resulting in ghosting in the captured image, ensuring the detection accuracy. After the rotation is completed, the rotation motor 2 is started to rotate the next storage groove 1302 without a crystal grain to the discharging end of the feeding and crystal picking mechanism. During this process, after the crystal picking mechanism places each crystal grain on a detection seat 10, the rotation motor 2 works once, and always makes several of the multiple detection seats 10 at the shooting end of the detection camera before and after each operation. The detection camera takes pictures of each face of the crystal grain and sends the captured pictures to the control terminal for analysis by the control terminal to judge the quality of the crystal grain;

[0051] During the detection process, after a detection camera detects the upper surface of the crystal grain, when the rotating motor 2 works again to send the crystal grain to the next detection camera, at this time, the air pump blows out high-pressure air flow, so that the third air nozzle 1501 injects high-pressure air flow into the left side of the air flow channel 1502, and then the left air pipe 1504 blows out high-pressure air flow. The high-pressure air flow will act on the turning ear 1303, causing the turning ear 1303 to drive the second magnifying seat 1304 and the first magnifying seat 1301 to turn to the right until the turning ear 1303 is in the fixed groove 14 on the right side. At this time, the electric ball valve 1503 rotates to make the third air nozzle 1501 communicate with the right side of the air flow channel 1502. At this time, the air pump sucks air, so that the third air nozzle 1501 sucks the gas inside the right side of the air flow channel 1502, and then the air flow channel 1502 sucks the gas inside the right air pipe 1504, making the turning ear 1303 tightly adsorbed in the right fixed groove 14, ensuring the stability of the crystal grain position during the crystal grain detection process, preventing the crystal grain position from moving, resulting in double images in the captured picture, ensuring the detection accuracy, and thus realizing the flipping detection of the crystal grain, reducing the arrangement of detection cameras, saving resources, reducing the difficulty of maintenance and assembly. In addition, when the turning ear 1303 is tightly adsorbed in the fixed groove 14 on one side, the electric ball valve 1503 can be controlled to work, so that the third air nozzle 1501 communicates with the inside of the air flow channel 1502 on the other side, and then blows air into the fixed groove 14 on the other side through the air pipe 1504 on the other side. The blown air will act on the shooting end of the detection camera, realizing the cleaning function of the detection camera, avoiding the adhesion of pollutants on the detection camera from affecting the shooting clarity, and further improving the quality of the captured image;

[0052] After multiple repeated flips, finally, it is necessary to ensure that the upper surface of the crystal grain is facing upward, that is, the second magnifying seat 1304 is above the first magnifying seat 1301. Therefore, the last flipping operation is as follows: the air pump blows out high-pressure air flow, so that the third air nozzle 1501 injects high-pressure air flow into the right side of the air flow channel 1502, and then the right air pipe 1504 blows out high-pressure air flow. The high-pressure air flow will act on the turning ear 1303, causing the turning ear 1303 to drive the second magnifying seat 1304 and the first magnifying seat 1301 to turn to the left until the turning ear 1303 is in the fixed groove 14 on the left side. At this time, the electric ball valve 1503 rotates to make the third air nozzle 1501 communicate with the left side of the air flow channel 1502. At this time, the air pump sucks air, so that the third air nozzle 1501 sucks the gas inside the left side of the air flow channel 1502, and then the air flow channel 1502 sucks the gas inside the left air pipe 1504, making the turning ear 1303 tightly adsorbed in the left fixed groove 14;

[0053] When the motor 2 to be rotated rotates the detected detection base 10 to the blanking station, the second magnification base 1304 is rotated clockwise by 180° through the blanking and crystal picking mechanism, so that the second magnification base 1304 can be rotated away from directly above the first magnification base 1301. The detected crystal grains are taken off by the blanking and crystal picking mechanism, and the qualified ones are placed in the qualified product storage box, and the unqualified ones are placed in the defective product box.

[0054] The above embodiments only represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several deformations and improvements can still be made, and these all belong to the protection scope of the present invention.

Claims

1. A wafer six-sided inspection platform, comprising a mounting base plate (1), a rotating motor (2), a rotating plate (3) and an inspection block mounted on the rotating plate (3), characterized in that: Also includes: The detection block comprises a mounting block (7) fixedly connected to the top of the rotating plate (3); an adjusting block (8) is attached to the top of the mounting block (7); a fixing block (9) is fixedly connected to the top of the adjusting block (8); and a detection seat (10) is fixedly connected to the top of the fixing block (9); A lateral adjustment mechanism (11) and a longitudinal adjustment mechanism (12) are mounted on the detection block, wherein the lateral adjustment mechanism (11) comprises a connecting plate (1101) fixedly connected to the mounting block (7), a first adjustment column (1102) being rotatably connected to the connecting plate (1101), a first adjustment rod (1103) being connected to the internal thread of the first adjustment column (1102), an end of the first adjustment rod (1103) passing through the connecting plate (1101) and being fixedly connected to a first slide plate (1104), an end of the first slide plate (1104) being fixedly connected to a first adjustment frame (1105), a first limiting column (1106) being slidably connected in the first adjustment frame (1105), and the longitudinal adjustment mechanism (1110) comprising a connecting plate (1101) and a connecting plate (1101) being fixedly connected to the first slide plate (1104), The adjustment mechanism (12) comprises a fixing frame (1201) fixedly connected to the adjustment block (8); a second adjustment rod (1202) is fixedly connected to the fixing frame (1201); a second adjustment column (1204) is threadedly connected to the end of the second adjustment rod (1202); a second slide plate (1203) is rotatably connected to the end of the second adjustment column (1204); the second adjustment rod (1202) passes through the second slide plate (1203); a second adjustment frame (1205) is fixedly connected to the end of the second slide plate (1203); a second limiting column (1206) is slidably connected in the second adjustment frame (1205); and the second limiting column (1206) is mounted on the adjustment block (8); An amplifying mechanism (13) installed on the top of the detection block, the amplifying mechanism (13) comprising a first amplifying seat (1301) rotatably connected to the top of the detection block, a storage slot (1302) being provided on the top of the first amplifying seat (1301), a flip ear (1303) being fixedly connected to one side of the first amplifying seat (1301), a second amplifying seat (1304) being rotatably connected to the top of the first amplifying seat (1301), and a groove (1305) being provided on the bottom of the second amplifying seat (1304); A blowing and suction mechanism (15) is installed in the detection block.

2. The wafer six-side inspection platform according to claim 1, characterized in that: The blowing and sucking mechanism (15) includes a third air nozzle (1501) fixedly connected to the bottom of the detection seat (10), the third air nozzle (1501) is located in the fixed block (9), an air flow channel (1502) connected to the inside of the third air nozzle (1501) is opened in the detection seat (10), an electric ball valve (1503) is installed in the air flow channel (1502), and an air pipe (1504) connected to the inside of the air flow channel (1502) is opened on the detection seat (10).

3. The wafer six-side inspection platform according to claim 2, characterized in that: A fixing groove (14) is provided on the top of the detection seat (10), and the exhaust end of the air pipe (1504) is located in the fixing groove (14).

4. The wafer six-side inspection platform according to claim 3, characterized in that: The flip ear (1303) is matched with the fixing groove (14), and the first amplifying seat (1301) is rotatably connected to the top of the detection seat (10).

5. The wafer six-side inspection platform according to claim 1, characterized in that: The first slide plate (1104) is slidably connected to the adjustment block (8), and the first limiting column (1106) is installed on the installation block (7).

6. The wafer six-side inspection platform according to claim 1, characterized in that: The second slide plate (1203) is slidably connected to the mounting block (7), and the second slide plate (1203) is slidably connected to the first slide plate (1104).

7. The wafer six-side inspection platform according to claim 1, characterized in that: The rotating motor (2) is mounted on the top of the mounting base plate (1); the output end of the rotating motor (2) is fixedly connected to an air slide column (4); the rotating plate (3) is fixedly connected to the air slide column (4); a first air nozzle (5) is mounted on the outer surface of the air slide column (4); a second air nozzle (6) is mounted on the bottom of the outer surface of the air slide column (4); the first air nozzle (5) is internally connected to the second air nozzle (6).

Images