Task execution method and device applied to electron beam exposure system and storage medium

Abstract

According to the task execution method and device applied to the electron beam exposure system and the storage medium provided by the invention, when the experiment request sent by the experiment user is detected, the electron beam exposure system can call the EBL experiment robot to obtain the corresponding process file according to the experiment name input by the experiment user; after preposed parameters are determined according to the parameter information input by the experiment user, the experiment process is automatically executed; moreover, in the process of executing the experiment process by the EBL experiment robot, interaction with the experiment user can be carried out according to the requirement of the experiment process, and the experiment process is continued to be executed after pre-parameter calibration and correction are carried out according to an interaction result, or the experiment process is canceled according to the interaction result. In the process, the EBL robot can simulate actions of a skilled operator and automatically complete repetitive processes such as process setting and parameter preliminary setting, so that the early-stage preparation time is greatly saved, and brand new vitality is injected to efficient application of the electron beam exposure system.

Description

Technical Field

[0001] The present application relates to the field of semiconductor chip manufacturing technology, and in particular to a task execution method, device and storage medium applied to an electron beam exposure system. Background Art

[0002] Semiconductor chip manufacturing is a highly complex and precise process, and it is the core foundation of the modern electronics industry. The chip manufacturing process mainly includes three major links: chip design, wafer manufacturing, chip packaging and testing. As a "weapon" in the field of micro-nano processing, the electron beam exposure system has penetrated into every link of chip manufacturing.

[0003] The core components of the electron beam exposure system work together. The electron gun emits a beam, which is focused and deflected to accurately act on the photoresist. With ultra-high resolution, it can achieve nanometer-level precision, thus breaking through the limitations of traditional photolithography and producing complex and precise microstructures. In scenarios such as high-end chip and biochip manufacturing, it is an indispensable key technology, laying the foundation for the development of cutting-edge science and technology and strongly driving industrial upgrading.

[0004] However, the electron beam exposure system is extremely difficult to operate. Before the experimental process begins, several format conversions, a series of processes and parameter settings are required; when conducting exposure experiments, operators need to synchronously adjust the electron beam's focusing accuracy, scanning speed and dose based on complex design drawings. If the parameters are slightly deviated, the results will be far from perfect. Newcomers often need repeated training and practical practice to get started accurately in the face of this series of delicate processes.

[0005] Therefore, how to reduce the operating difficulty of the electron beam exposure system in the prior art has become a technical problem that needs to be solved urgently. Summary of the invention

[0006] The purpose of the present application is to solve at least one of the above-mentioned technical defects, especially the technical defects of the electron beam exposure system in the prior art that the operation is extremely difficult and the experimental process is extremely complicated.

[0007] The present application provides a task execution method applied to an electron beam exposure system, the method comprising:

[0008] When an experiment request sent by an experiment user is detected, the EBL experiment robot is called to obtain the corresponding process file according to the experiment name input by the experiment user, and after determining the pre-parameters according to the parameter information input by the experiment user, the experiment process is executed;

[0009] During the process of the EBL experimental robot executing the experimental process, interact with the experimental user according to the requirements of the experimental process, and after calibrating and correcting the pre-parameters according to the interaction result, continue to execute the experimental process, or cancel the experimental process according to the interaction result.

[0010] Optionally, the calling of the EBL experimental robot to obtain the corresponding process file according to the experimental name input by the experimental user includes:

[0011] Call the EBL experimental robot to display the available experimental processes to the experimental user, and obtain the experimental name corresponding to the experimental process selected by the experimental user in the available experimental processes;

[0012] Through the EBL experimental robot, call the locally pre-built ipkg package that matches the experimental name, and after decompressing the ipkg package, obtain the corresponding process file.

[0013] Optionally, the EBL experimental robot includes a basic version and an advanced version;

[0014] The calling of the EBL experimental robot to determine the pre-parameters according to the parameter information input by the experimental user includes:

[0015] When the experimental user selects the basic version of the EBL experimental robot, call the basic version of the EBL experimental robot to send a reminder for setting pre-parameters to the experimental user once, then receive the parameter information input by the experimental user, and determine the pre-parameters for this experiment according to the parameter information;

[0016] When the experimental user selects the advanced version of the EBL experimental robot, call the advanced version of the EBL experimental robot to send different reminders for setting pre-parameters to the experimental user multiple times, then receive the different parameter information input by the experimental user according to each reminder for setting pre-parameters, and determine the pre-parameters for this experiment according to the parameter information input multiple times.

[0017] Optionally, after the calling of the EBL experimental robot determines the pre-parameters according to the parameter information input by the experimental user, execute the experimental process, including:

[0018] Call the EBL experimental robot to configure the parameters of this experiment before the exposure operation according to the pre-parameters, send a confirmation instruction for the operation completion to the experimental user after the device has broken the vacuum state, and continue with the parameter configuration after the experimental user confirms;

[0019] After the parameter configuration of the EBL experimental robot is completed, send a first confirmation request to the experimental user asking whether to start the exposure experiment, and start the exposure experiment after receiving the first confirmation instruction returned by the experimental user until the experimental process ends.

[0020] Optionally, when the EBL experimental robot is an advanced version of the EBL experimental robot and the experimental user selects manual confirmation of the pattern array in the pre-parameters, the calling of the EBL experimental robot continues with parameter configuration, including:

[0021] After the advanced version of the EBL experimental robot imports the pattern array, send a pattern array confirmation instruction to the experimental user, and continue with parameter configuration after the experimental user confirms.

[0022] Optionally, during the execution of the experimental process by the EBL experimental robot, interact with the experimental user according to the requirements of the experimental process, and after calibrating and correcting the pre-parameters according to the interaction result, continue to execute the experimental process, or cancel the experimental process according to the interaction result, including:

[0023] During the execution of the experimental process by the EBL experimental robot, if it is detected that the experimental user selects the need to manually calibrate the coordinates in the process parameters, send a second confirmation request for manual calibration of the coordinates to the experimental user;

[0024] After the EBL experimental robot receives the second confirmation instruction returned by the experimental user, calibrate and correct the pre-parameters according to the content input by the experimental user, and continue to execute the experimental process;

[0025] When the EBL experimental robot receives the first cancellation instruction returned by the experimental user, cancel the execution of the experimental process.

[0026] Optionally, during the execution of the experimental process by the EBL experimental robot, interact with the experimental user according to the requirements of the experimental process, and after calibrating and correcting the pre-parameters according to the interaction result, continue to execute the experimental process, or cancel the experimental process according to the interaction result, including:

[0027] During the execution of the experimental process by the EBL experimental robot, if it is detected that the experimental user selects not to manually calibrate the coordinates in the process parameters, send a third confirmation request for setting the coordinate parameters to the experimental user;

[0028] After the EBL experimental robot receives the third confirmation instruction returned by the experimental user, continue to execute the experimental process;

[0029] After the EBL experimental robot receives the second cancellation instruction returned by the experimental user, it cancels the execution of the experimental process.

[0030] This application also provides a task execution device applied to an electron beam exposure system, including:

[0031] An experimental process determination module, configured to, when detecting an experimental request sent by an experimental user, call the EBL experimental robot to obtain a corresponding process file according to the experimental name input by the experimental user, and execute the experimental process after determining pre-parameters according to the parameter information input by the experimental user;

[0032] An experimental process execution module, configured to, during the process of the EBL experimental robot executing the experimental process, interact with the experimental user according to the requirements of the experimental process, and continue to execute the experimental process after calibrating and correcting the pre-parameters according to the interaction result, or cancel the experimental process according to the interaction result.

[0033] This application also provides a computer-readable storage medium, in which computer-readable instructions are stored. When the computer-readable instructions are executed by one or more processors, the one or more processors are caused to execute the steps of the task execution method applied to the electron beam exposure system as described in any one of the above embodiments.

[0034] This application also provides a computer device, including: one or more processors, and a memory;

[0035] The memory stores computer-readable instructions, and when the computer-readable instructions are executed by the one or more processors, the steps of the task execution method applied to the electron beam exposure system as described in any one of the above embodiments are executed.

[0036] It can be seen from the above technical solutions that the embodiments of this application have the following advantages:

[0037] The task execution method, device, and storage medium provided by this application for an electron beam lithography system. When an experiment request sent by an experimental user is detected, the electron beam lithography system can call the EBL experimental robot to obtain the corresponding process file according to the experiment name input by the experimental user, and after determining the pre-parameters based on the parameter information input by the experimental user, automatically execute the experimental process. Moreover, during the execution of the experimental process by the EBL experimental robot, it can also interact with the experimental user according to the requirements of the experimental process, and continue to execute the experimental process after calibrating and correcting the pre-parameters based on the interaction results, or cancel the experimental process according to the interaction results. In this process, the EBL robot can simulate the actions of a skilled operator and automatically complete repetitive processes such as process setting and preliminary parameter setting, thereby greatly saving the pre-preparation time. The interaction process between the EBL experimental robot and the experimental user builds a visual interaction bridge for novices. Each operation has clear guidance and real-time feedback, and novices can more intuitively understand complex instructions and quickly familiarize themselves with the operation path, thus greatly reducing the getting-started cycle and injecting new vitality into the efficient application of the electron beam lithography system. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of this application. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0039] Figure 1 It is a schematic flowchart of a task execution method for an electron beam lithography system provided by an embodiment of this application;

[0040] Figure 2 It is a version schematic diagram of the EBL experimental robot provided by an embodiment of this application;

[0041] Figure 3 It is an interaction schematic diagram of the EBL experimental robot provided by an embodiment of this application showing the experimental process to the experimental user;

[0042] Figure 4 It is a display diagram of the pre-parameter setting page when the user selects the novice version for a single-layer exposure experiment provided by an embodiment of this application;

[0043] Figure 5 It is a display diagram of the first pre-parameter setting page when the user selects the advanced version for a single-layer exposure experiment provided by an embodiment of this application;

[0044] Figure 6It is a diagram showing the display of the second pre-parameter setting page when the user selects the advanced version for single-layer exposure experiment provided by the embodiment of the present application;

[0045] Figure 7 It is a diagram showing the display of the third pre-parameter setting page when the user selects the advanced version for single-layer exposure experiment provided by the embodiment of the present application;

[0046] Figure 8 It is a diagram showing the display of the manual confirmation pattern array page when the user selects the advanced version for single-layer exposure experiment provided by the embodiment of the present application;

[0047] Figure 9 It is a schematic structural diagram of a task execution device applied to an electron beam exposure system provided by the embodiment of the present application;

[0048] Figure 10 It is a schematic internal structure diagram of a computer device provided by the embodiment of the present application. Detailed implementation manners

[0049] Next, the technical solutions in the embodiments of the present application will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0050] In one embodiment, as Figure 1 shown, Figure 1 It is a schematic flowchart of a task execution method applied to an electron beam exposure system provided by the embodiment of the present application; The present application provides a task execution method applied to an electron beam exposure system, and the method may include:

[0051] S110: When detecting an experiment request sent by an experiment user, call the EBL experiment robot to obtain the corresponding process file according to the experiment name input by the experiment user, and execute the experiment process after determining the pre-parameters according to the parameter information input by the experiment user.

[0052] In this step, when the electron beam exposure system detects an experiment request initiated by an experiment user, it can call the pre-configured EBL experiment robot and execute the experiment process corresponding to the experiment selected by the experiment user through the EBL experiment robot.

[0053] Specifically, when an experimental user in this application conducts an exposure experiment, they can first initiate an experiment request through the electron beam lithography system. At this time, the electron beam lithography system can then call the pre-configured EBL experimental robot according to this experiment request. The client corresponding to this EBL experimental robot has been pre-connected to the Saybolt instrument management system. Therefore, when the EBL experimental robot is called, it can obtain the user information corresponding to the experimental user who is currently logged in and using the instrument through this system, and then can perform subsequent operations based on this user information.

[0054] Furthermore, when the EBL experimental robot is called, it can also communicate with the experimental user through the EBL experimental robot interaction box, and then obtain the experiment name input by the experimental user, and obtain the corresponding process file according to this experiment name. This process file is designed and written in advance according to the experimental tasks and is built into the local area after being packaged. When the EBL experimental robot obtains this process file, it can also obtain the parameter information input by the experimental user through the EBL experimental robot interaction box. In this way, it can determine the pre-parameters according to this parameter information, and then execute the experimental process according to the process file and the pre-parameters.

[0055] And, as Figure 2 shown, Figure 2 is a schematic diagram of the version of the EBL experimental robot provided by the embodiment of this application; the EBL experimental robot of this application can be divided into a novice version and an advanced version. Among them, when using the novice version robot, the user can input a small number of pre-parameters to conduct basic experiments. When using the advanced version robot, the user needs to input more pre-parameters. This version is suitable for users with rich experience who want to flexibly design the experimental process parameters and adjust the experimental parameters according to the experimental process data. Therefore, the user can choose a suitable robot to replace the operation according to their preferences and needs.

[0056] In addition, before the experimental user in this application initiates an experiment request through the electron beam lithography system, they can also perform some experimental preparation work so that the EBL experimental robot can quickly enter the experimental process and then efficiently complete the exposure experiment.

[0057] For example, before conducting an exposure experiment in this application, the experimental user can first load the wafer onto the holder, and then load the holder onto the microscope. During this process, handle it gently when locking to avoid damaging the sapphire. After use, the platform needs to be in the initial position to prevent platform deformation. Next, the experimental user can move the center of the Faraday Cup under the microscope objective (X20), press X0 and Y0 on the SCD to zero, and then turn on the microscope light source → turn off the fast movement during adjustment. Subsequently, find two marks on the exposure pattern that are on the same straight line, with the cross center of the right eyepiece on the edge (corner) of the mark. If the mark is small, the cross can be centered on the mark (preferred). Then, focus the objective on the sample, use an Allen wrench to adjust the screws on the holder (clockwise rotation to lower, counterclockwise rotation to raise) so that the value of z on the SCD is in the range of [-50, 50] μm. Then, use a tool to turn the screws to adjust the angle so that the XFC marks in the X direction on the same straight line are basically the same, and record the value on the SCD on the paper with the drawn pattern. Finally, click SET LOCK VENT on the CSYS to break the vacuum, wait until ATM is displayed on the CSYS, then the lid can be opened (to avoid opening the chamber door for a long time), the carrier is taken out, the holder is placed in, and after the carrier is placed in, click START SET LOCK VENT to start pumping vacuum. When the vacuum value reaches above 5e-5 bar, start wafer transfer, and then the experiment request can be initiated. This process can be operated either manually by the experimental user or by the relevant robots in the laboratory, and the specific choice can be made according to the actual situation and is not restricted here.

[0058] S120: During the process of the EBL experimental robot executing the experimental procedure, interact with the experimental user according to the requirements of the experimental procedure, and continue to execute the experimental procedure after performing pre-parameter calibration and correction based on the interaction result, or cancel the experimental procedure according to the interaction result.

[0059] In this step, after calling the EBL experimental robot through S110 to obtain the corresponding process file according to the experimental name input by the experimental user and determining the pre-parameters according to the parameter information input by the experimental user, the experimental procedure can be executed. During the process of the EBL experimental robot executing the experimental procedure, it can also interact with the experimental user according to the requirements of the experimental procedure, and continue or cancel the execution of the experimental procedure after performing pre-parameter calibration and correction based on the interaction result.

[0060] It can be understood that before the exposure experiment of this application, a series of parameters need to be precisely set, including the energy of the electron beam, beam current intensity, exposure dose, scanning speed, pattern data, workpiece stage movement path, etc. Therefore, the above-mentioned pre-parameters of this application are the process of setting this series of parameters. Then, during the execution of the experimental process of this application, since some parameters need to be calculated and judged manually, at this time, the EBL experimental robot will block the process execution, pop up a process parameter setting dialog box, and the experimental user fills in the corresponding parameters according to their own needs, clicks save and run. At this time, the EBL robot can perform pre-parameter calibration and correction according to the parameters set by the experimental user, and then continue to execute the experimental process, thus completing the experiment. Of course, the EBL robot can also cancel the experimental process according to the feedback of the experimental user, which can be specifically set according to the actual situation and will not be limited here.

[0061] In the above embodiment, when detecting an experimental request sent by the experimental user, the electron beam exposure system can call the EBL experimental robot to obtain the corresponding process file according to the experimental name input by the experimental user, and after determining the pre-parameters according to the parameter information input by the experimental user, automatically execute the experimental process; and, during the execution of the experimental process by the EBL experimental robot, it can also interact with the experimental user according to the requirements of the experimental process, and continue to execute the experimental process after performing pre-parameter calibration and correction according to the interaction result, or cancel the experimental process according to the interaction result. During this process, the EBL robot can simulate the actions of a skilled operator and automatically complete repetitive processes such as process setting and preliminary parameter setting, thereby greatly saving the pre-preparation time; the interaction process between the EBL experimental robot and the experimental user builds a visual interaction bridge for novices, with clear guidance and real-time feedback for each operation. Novices can more intuitively understand complex instructions and quickly familiarize themselves with the operation path, thus greatly shortening the getting-started cycle and injecting new vitality into the efficient application of the electron beam exposure system.

[0062] In one embodiment, in S110, calling the EBL experimental robot to obtain the corresponding process file according to the experimental name input by the experimental user may include:

[0063] S111: Call the EBL experimental robot to display the executable experimental processes to the experimental user, and obtain the experimental name corresponding to the experimental process selected by the experimental user in the executable experimental processes.

[0064] S112: Call the ipkg package pre-built locally and matching the experimental name through the EBL experimental robot, and after decompressing the ipkg package, obtain the corresponding process file.

[0065] In this embodiment, during the process of calling the EBL experimental robot to obtain the corresponding process file, the present application can display the runnable experimental process to the experimental user through the EBL experimental robot interaction box, and obtain the experimental name corresponding to the experimental process selected by the experimental user in the runnable experimental process. Then, the present application can call the ipkg package pre-built locally and matching the experimental name through the EBL experimental robot, and after decompressing the ipkg package, obtain the corresponding process file.

[0066] In a specific implementation manner, as Figure 3 shown, Figure 3 is the interaction schematic diagram of the EBL experimental robot provided by the embodiment of the present application to display the experimental process to the experimental user; Figure 3 In, the EBL experimental robot can display the runnable experimental process to the experimental user, and the experimental user can select the corresponding experimental process according to their own needs. After the EBL experimental robot obtains the experimental name corresponding to the experimental process, it can call the ipkg package pre-built locally and matching the experimental name, and use C++ to decompress the ipkg package to obtain the py file of the process, that is, the process file, and then start the local python process to execute the experimental process. During this process, the experimental user only needs to select the corresponding experimental process, and the EBL experimental robot can automatically execute the corresponding experimental process, thereby greatly shortening the operation time of the experiment and effectively reducing the complexity of the experimental operation.

[0067] In one embodiment, the EBL experimental robot may include a basic version and an advanced version.

[0068] In S110, calling the EBL experimental robot to determine the pre-parameters according to the parameter information input by the experimental user may include:

[0069] S113: When the experimental user selects the basic version of the EBL experimental robot, after calling the basic version of the EBL experimental robot to send a pre-parameter setting reminder to the experimental user once, receive the parameter information input by the experimental user, and determine the pre-parameters of this experiment according to the parameter information.

[0070] S114: When the experimental user selects the advanced version of the EBL experimental robot, after calling the advanced version of the EBL experimental robot to send different pre-parameter setting reminders to the experimental user multiple times, receive the different parameter information input by the experimental user according to each pre-parameter setting reminder, and determine the pre-parameters of this experiment according to the parameter information input multiple times.

[0071] In this embodiment, after the EBL experimental robot obtains the process file, since a series of parameters need to be configured before the exposure experiment, the configured parameters include but are not limited to the energy of the electron beam, beam current intensity, exposure dose, scanning speed, pattern data, workpiece stage movement path, etc. The EBL experimental robot in this application can send a first confirmation request to the experimental user through an interaction box to ask whether to start filling in the pre-parameters, and after receiving the first confirmation instruction returned by the experimental user, display the parameter configuration page to be filled to the experimental user. After obtaining the parameter information filled in by the experimental user on this parameter configuration page, determine the pre-parameters of this experiment according to the parameter information.

[0072] It can be understood that during the configuration process of the electron beam exposure system, one Cjob contains all these relevant setting information required for a specific workpiece or a specific batch of processing tasks, similar to a configuration file of a project, which defines how the entire exposure process is executed. In actual operation, the user can create different Cjobs in advance according to different processing requirements. When a specific exposure task needs to be performed, only the relevant parameter information, that is, the pre-parameters, needs to be set, and then the corresponding Cjob can be called through the EBL experimental robot. The electron beam exposure system will automatically complete the exposure operation according to the parameters and processes preset therein, which can greatly improve the processing efficiency and accuracy, and is also convenient for managing and repeating different process procedures.

[0073] Furthermore, the EBL experimental robot of this application can be divided into a beginner version and an advanced version, and the user can choose a suitable robot to replace the operation according to their preferences and needs. For example, when the user selects the beginner version of the EBL experimental robot for a single-layer exposure experiment, as Figure 4 shown, Figure 4 is the display diagram of the pre-parameter setting page when the user selects the beginner version for a single-layer exposure experiment provided by the embodiment of this application; Figure 4 In it, after the beginner version of the EBL experimental robot sends a reminder for setting pre-parameters to the experimental user once, the pre-parameters set by the experimental user can include Gpf_name - GPF file name, Beam - electron beam current definition file name, Dose - exposure dose size, and JobName - task name. After the EBL experimental robot receives these pre-parameters, it can perform a single-layer exposure experiment according to each pre-parameter; and when the user selects the advanced version of the EBL experimental robot for a single-layer exposure experiment, as Figure 5 、 6 、7、8 shown, Figure 5 is the display diagram of the first pre-parameter setting page when the user selects the advanced version for a single-layer exposure experiment provided by the embodiment of this application, Figure 6It is a diagram showing the display of the second pre-parameter setting page when the user selects the advanced version for the single-layer exposure experiment provided by the embodiment of this application. Figure 7 It is a diagram showing the display of the third pre-parameter setting page when the user selects the advanced version for the single-layer exposure experiment provided by the embodiment of this application. Figure 8 It is a diagram showing the display of the manual confirmation pattern array page when the user selects the advanced version for the single-layer exposure experiment provided by the embodiment of this application. Figure 5 In this case, when the user selects the advanced version, more pre-parameters can be set. For example, the user can first set relevant parameters including: Holder - wafer holder size, SubstrateName - substrate name, MaskSize - mask size (can input 4, 5, 6, 7, 8 or directly input 20*20), ExposureName - exposure name, LayoutName - layout array name, and JobName - task name. Figure 6 In this case, the user can then set relevant parameters including: Gpf_name - gpf file name, Beam - electron beam current definition file name, Dose - exposure dose size, and Confirm pattern - whether manual confirmation of the pattern array is required (Yes: the process pauses to give time for manual operation, and after the operation is completed, confirmation needs to be clicked, and the robot will take over and continue to execute; No: skip this step); after that, Figure 7 In this case, the user can also set parameters: termina - command line execution command, the default is to execute mvn, art, mcur (if you need to use, reply 1, or directly input mvn, art, mcur), and parameter - the parameter is automatically entered in the parameters of the submitjob (submit task) window (separated by commas for two numbers); when the EBL experiment robot receives these pre-parameters, it can perform the single-layer exposure experiment according to each pre-parameter. In addition, as Figure 8 shown, when manual confirmation is required, the robot can pause the experimental process and continue to execute after waiting for manual confirmation.

[0074] In one embodiment, after calling the EBL experiment robot in S110 to determine the pre-parameters according to the parameter information input by the experimental user and then executing the experimental process, it may include:

[0075] S115: Call the EBL experiment robot to configure the parameters of this experiment before the exposure operation according to the pre-parameters, send an operation completion confirmation instruction to the experimental user after the device has broken the vacuum state, and continue with the parameter configuration after the experimental user confirms.

[0076] S116: After the parameter configuration is completed, call the EBL experimental robot to send a first confirmation request to the experimental user asking whether to start the exposure experiment, and start the exposure experiment after receiving the first confirmation instruction returned by the experimental user until the experimental process ends.

[0077] In this embodiment, when calling the EBL experimental robot to execute the experimental process, the EBL experimental robot can select the corresponding type according to the Holder input in the pre-set parameters. After clicking the confirmation, it automatically selects the usage environment according to the pre-set parameters and imports the files to be exposed into the system. Then, it configures the parameters of this experiment before the exposure operation according to the pre-set parameters, and sends a first confirmation request to the experimental user asking whether to start the exposure experiment after the configuration is completed. When receiving the first confirmation instruction returned by the experimental user, it starts the exposure experiment until the experimental process ends.

[0078] In a specific implementation manner, when this application calls the EBL experimental robot to execute the experimental process, the EBL experimental robot can simulate a mouse to automatically click on the Cassette, pop up the Select Holder window. The EBL experimental robot can select the corresponding type according to the Holder input by the pre-set parameters, and then simulate the mouse to automatically click on Select to confirm. After confirmation, the EBL experimental robot can automatically select the usage environment according to the pre-set parameters. After that, the gpf file generated by the Beamer in this application has been uploaded to the EBL server by the robot on the beamer side. That is, the robot on the beams side will automatically download the corresponding gpf file from the server to the patterns in each user environment according to the gpf_name of the pre-set parameters. Then the EBL experimental robot can click on Cjob in the graphical interface, and the Cjob window will open. Under the Cjob window, the EBL experimental robot will drag the substrate (A) into Job Design (B), and the SelectSubstrate window will open. At this time, the EBL experimental robot can select the mask or other (WxH) according to the mask size of the pre-set parameters, and then set the text of the Name according to the name of the pre-set parameters, and automatically click on OK to confirm. Then the EBL experimental robot automatically selects exposure. Under the Cjob window, drag exposure into the substrate, drag layout into exposure in the popped-up window, drag pattern into 1x1, and automatically click on the File browse button. At this time, the Select Pattern window will open. The robot can select the pattern file from the list according to the gpf_name of the pre-set parameters, and after clicking on Select, then automatically click on the Beam browse button. The Select Beam window will open. The robot selects the electron beam current definition file from the list according to the pattern.Beam of the pre-set parameters, and after clicking on Select, then enter the exposure dose in the Dose edit box according to the pattern.Dose in the pre-set parameters. After simulating the mouse to automatically click on OK, the robot automatically clicks on View in the Cjob window, automatically checks the patterns, and the imported patterns can be displayed. The robot can automatically click on OK for the imported pattern array and automatically fill in the relevant pages according to the pre-set parameters layout-Repetition 1 Repetition 2.

[0079] Next, after the robot in this application edits the markers, it can automatically click File, select Save to save. Then the robot clicks File again and selects Export Job. The Export Job window will open. The robot selects the exposure to be exported (if there is no need for overlay, the exposure can be directly exported; for overlay, continue to search for markers downward). It launches the command-line process, and then according to the pre-set parameter terminal, sequentially inputs the commands mvm → atc → mcur → mpos / r Pre-marker XFC, YFC. The robot automatically confirms the position in the semb according to the sem attribute of the pre-set parameter, so as to adjust the magnific. Then according to the pre-set parameter terminal, it inputs the command pg get tab to obtain the coordinates, copies and pastes them into the parametersation, or the robot automatically clicks the Grab Position button, opens the Grab Position window, clicks grab to obtain the coordinates, clicks add to add the coordinates, clicks Done to complete, checks no unload, and then automatically clicks #. According to the cjob-name set by the pre-set parameter, it selects the already created Cjob, then the experimental parameters are ready, and the exposure experiment can be started. After the experiment ends, the robot can prompt the experimental user with "This experiment is over. [Do it again / Other experiments]" and, according to the choice of the experimental user, do the experiment again or conduct other experiments.

[0080] Further, before invoking the EBL experimental robot to execute the experimental process in this application, it can also invoke the EBL experimental robot to send a confirmation instruction to the experimental user that the pre-operations have been completed. For example, the EBL experimental robot in this application can send to the experimental user "The single-layer exposure experiment is about to start. Please confirm that the pre-operations (loading the wafer, evacuating, calibrating) have all been completed!" When the EBL experimental robot detects that the experimental user clicks Confirm, it executes the experimental process; when the EBL experimental robot detects that the experimental user clicks Cancel, it can cancel the execution of the experimental process.

[0081] In one embodiment, when the EBL experimental robot is an advanced version of the EBL experimental robot and the experimental user selects manual confirmation of the pattern array in the pre-set parameters, the invocation of the EBL experimental robot to continue with parameter configuration in S115 may include:

[0082] S1151: Invoke the advanced version of the EBL experimental robot to send a pattern array confirmation instruction to the experimental user after importing the pattern array, and continue with parameter configuration after the experimental user confirms.

[0083] In this embodiment, when the EBL experimental robot in the white version is selected for the experiment in this application, the robot can automatically click OK on the imported pattern array and fill in the page according to the pre-set parameters layout-Repetition 1 Repetition 2. When the advanced version of the EBL experimental robot is selected for the experiment in this application, the robot can operate according to the parameter selected by the user in "Confirm pattern - whether manual confirmation of the pattern array is required" set in the pre-set parameters. If the user selects "Yes", a dialog box as shown in Figure 8 will pop up to confirm the pattern array with the user. After the user confirms and clicks the interface, the subsequent steps can be continued. If the user selects "No", this step will be skipped and the subsequent operations will be continued.

[0084] In one embodiment, during the process of the EBL experimental robot executing the experimental process in S120, interacting with the experimental user according to the requirements of the experimental process, and after calibrating and correcting the pre-set parameters according to the interaction result, continuing to execute the experimental process, or canceling the experimental process according to the interaction result, may include:

[0085] S121: During the process of the EBL experimental robot executing the experimental process, if it is detected that the experimental user selects to manually calibrate the coordinates in the process parameters, a second confirmation request for manually calibrating the coordinates is sent to the experimental user.

[0086] S122: When the EBL experimental robot receives the second confirmation instruction returned by the experimental user, calibrate and correct the pre-set parameters according to the content input by the experimental user, and continue to execute the experimental process.

[0087] S123: When the EBL experimental robot receives the first cancellation instruction returned by the experimental user, cancel the execution of the experimental process.

[0088] In this embodiment, during the process of the EBL experimental robot executing the experimental process, the EBL experimental robot can detect whether the experimental user selects the need for manual coordinate calibration in the process parameters. If so, it can send a second confirmation request of "Please manually calibrate the coordinates and confirm after the operation is completed" to the experimental user. The experimental user can click confirm or cancel according to their own needs. If the experimental user clicks the confirm button, after receiving the second confirmation instruction returned by the experimental user, the EBL experimental robot can perform pre-parameter calibration and correction according to the content input by the experimental user and continue to execute the experimental process. For example, when the experimental user confirms the current coordinates, the EBL experimental robot can perform pre-parameter calibration operations according to the coordinates confirmed by the experimental user and then continue to execute the experimental process. When the experimental user modifies the current coordinates, the EBL experimental robot can perform pre-parameter correction according to the modified coordinates by the experimental user and continue to execute the experimental process after the correction. If the experimental user clicks the cancel button, after receiving the first cancellation instruction returned by the experimental user, the EBL experimental robot cancels the execution of the experimental process.

[0089] During this process, the robot blocks the running of the process, opens the mouse permission to the user, and allows the user to confirm the input of the coordinates by themselves. After this step is completed, click confirm on the robot interaction interface to complete the operation.

[0090] In one embodiment, in S120, during the process of the EBL experimental robot executing the experimental process, interacting with the experimental user according to the requirements of the experimental process, and after performing pre-parameter calibration and correction according to the interaction result, continuing to execute the experimental process, or canceling the experimental process according to the interaction result, may include:

[0091] S124: During the process of the EBL experimental robot executing the experimental process, if it detects that the experimental user does not select the need for manual coordinate calibration in the process parameters, it sends a third confirmation request for setting coordinate parameters to the experimental user.

[0092] S125: When the EBL experimental robot receives the third confirmation instruction returned by the experimental user, it continues to execute the experimental process.

[0093] S126: When the EBL experimental robot receives the second cancellation instruction returned by the experimental user, it cancels the execution of the experimental process.

[0094] In this embodiment, if the experimental user selects not to calibrate the coordinates in the process parameters, the EBL experimental robot can directly pop up a dialog box on the interaction page and determine the required input parameters. For example, in this application, the EBL experimental robot displays on the interaction page "Robot: The following parameters need to be set for the current experimental step. Please confirm after completion

Confirm Cancel

[0095] Next, the task execution device applied to the electron beam exposure system provided in the embodiments of the present application will be described. The task execution device applied to the electron beam exposure system described below can be correspondingly referred to the task execution method applied to the electron beam exposure system described above.

[0096] In one embodiment, as Figure 9 shown, Figure 9 is a schematic structural diagram of a task execution device applied to an electron beam exposure system provided in an embodiment of the present application; the present application also provides a task execution device applied to an electron beam exposure system, which may include an experimental process determination module 210 and an experimental process execution module 220, specifically including the following:

[0097] The experimental process determination module 210 is configured to, when detecting an experimental request sent by an experimental user, call the EBL experimental robot to obtain a corresponding process file according to the experimental name input by the experimental user, and after determining the pre-parameters according to the parameter information input by the experimental user, execute the experimental process.

[0098] The experimental process execution module 220 is configured to, during the process of the EBL experimental robot executing the experimental process, interact with the experimental user according to the requirements of the experimental process, and continue to execute the experimental process after calibrating and correcting the pre-parameters according to the interaction result, or cancel the experimental process according to the interaction result.

[0099] In the above embodiments, when an experiment request sent by an experimental user is detected, the electron beam lithography system can call the EBL experiment robot to obtain the corresponding process file according to the experiment name input by the experimental user, and after determining the pre-parameters according to the parameter information input by the experimental user, automatically execute the experimental process; moreover, during the process of the EBL experiment robot executing the experimental process, it can also interact with the experimental user according to the requirements of the experimental process, and continue to execute the experimental process after calibrating and correcting the pre-parameters according to the interaction result, or cancel the experimental process according to the interaction result. In this process, the EBL robot can simulate the actions of a skilled operator and automatically complete repetitive processes such as process setting and preliminary parameter setting, thereby greatly saving the preparation time in the early stage; the interaction process between the EBL experiment robot and the experimental user builds a visual interaction bridge for novices, with clear guidance and real-time feedback for each operation. Novices can more intuitively understand complex instructions and quickly familiarize themselves with the operation path, thus greatly shortening the getting-started cycle and injecting new vitality into the efficient application of the electron beam lithography system.

[0100] In one embodiment, the present application further provides a computer-readable storage medium, in which computer-readable instructions are stored. When the computer-readable instructions are executed by one or more processors, one or more processors are caused to execute the steps of the task execution method applied to the electron beam lithography system as described in any one of the above embodiments.

[0101] In one embodiment, the present application further provides a computer device, including: one or more processors, and a memory.

[0102] The memory stores computer-readable instructions, and when the computer-readable instructions are executed by the one or more processors, the steps of the task execution method applied to the electron beam lithography system as described in any one of the above embodiments are executed.

[0103] Schematically, as Figure 10 shown, Figure 10 is an internal structure schematic diagram of a computer device provided by an embodiment of the present application. The computer device 300 can be provided as a server. Referring to Figure 10 , the computer device 300 includes a processing component 302, which further includes one or more processors, and memory resources represented by the memory 301 for storing instructions executable by the processing component 302, such as application programs. The application programs stored in the memory 301 can include one or more modules each corresponding to a set of instructions. In addition, the processing component 302 is configured to execute instructions to perform the task execution method applied to the electron beam lithography system in any of the above embodiments.

[0104] The computer device 300 may further include a power supply component 303 configured to perform power management of the computer device 300, a wired or wireless network interface 304 configured to connect the computer device 300 to a network, and an input / output (I / O) interface 305. The computer device 300 may operate based on an operating system stored in the memory 301, such as Windows Server TM, Mac OS XTM, Unix TM, Linux TM, Free BSDTM, or the like.

[0105] Those skilled in the art can understand that Figure 10 the structure shown in is only a block diagram of some structures related to the solution of this application, and does not constitute a limitation on the computer device to which the solution of this application is applied. The specific computer device may include more or fewer components than those shown in the figure, or combine some components, or have different component arrangements.

[0106] Finally, it should also be noted that in this document, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not expressly listed, or elements inherent to such process, method, article or device. Without further limitation, an element defined by the phrase "comprising an..." does not exclude the presence of additional identical elements in the process, method, article or device comprising the element.

[0107] The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The various embodiments can be combined as needed, and the same or similar parts can be referred to each other.

[0108] The above description of the disclosed embodiments enables those skilled in the art to implement or use this application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application will not be limited to the embodiments shown herein, but will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A task execution method applied to an electron beam exposure system, characterized in that: The method comprises: When an experiment request sent by an experiment user is detected, the EBL experiment robot is called to obtain the corresponding process file according to the experiment name input by the experiment user, and after determining the pre-parameters according to the parameter information input by the experiment user, the experiment process is executed; During the process of the EBL experimental robot executing the experimental process, it interacts with the experimental user according to the requirements of the experimental process, and continues to execute the experimental process after calibrating and correcting the pre-parameters according to the interaction results, or cancels the experimental process according to the interaction results.

2. The task execution method applied to the electron beam exposure system according to claim 1, characterized in that: The calling of the EBL experiment robot to obtain the corresponding process file according to the experiment name input by the experiment user includes: Invoke the EBL experiment robot to display the executable experiment process to the experiment user, and obtain the experiment name corresponding to the experiment process selected by the experiment user from the executable experiment process; The EBL experiment robot calls a locally pre-built-in ipkg package that matches the experiment name, and after decompressing the ipkg package, obtains the corresponding process file.

3. The task execution method applied to the electron beam exposure system according to claim 1, characterized in that: The EBL experimental robot includes a beginner version and an advanced version; The calling of the EBL experiment robot to determine the pre-parameters according to the parameter information input by the experiment user includes: When the experiment user selects the white version of the EBL experiment robot, the white version of the EBL experiment robot is called to send a pre-parameter setting reminder to the experiment user, receive the parameter information input by the experiment user, and determine the pre-parameters of this experiment according to the parameter information; When the experimental user selects the advanced version of the EBL experimental robot, the advanced version of the EBL experimental robot is called to send different pre-parameter setting reminders to the experimental user multiple times, receive different parameter information input by the experimental user according to the pre-parameter setting reminder each time, and determine the pre-parameters of this experiment according to the parameter information input multiple times.

4. The task execution method applied to the electron beam exposure system according to claim 1, characterized in that: After the calling EBL experiment robot determines the pre-parameters according to the parameter information input by the experiment user, the experiment process is executed, including: Calling the EBL experiment robot to configure various parameters of this experiment before performing the exposure operation according to the pre-set parameters, and sending an operation completion confirmation instruction to the experiment user after the device has broken the vacuum state, and continuing the parameter configuration after the experiment user confirms; After the parameter configuration of the EBL experiment robot is completed, the robot sends a first confirmation request to the experiment user whether to start the exposure experiment, and after receiving the first confirmation instruction returned by the experiment user, the robot starts the exposure experiment until the experiment process is completed.

5. The task execution method applied to the electron beam exposure system according to claim 4, characterized in that: When the EBL experimental robot is an advanced version of the EBL experimental robot, and the experimental user selects the manual confirmation pattern array in the pre-parameters, the calling of the EBL experimental robot to continue parameter configuration includes: After the advanced version of the EBL experimental robot is called to import the pattern array, it sends a pattern array confirmation instruction to the experimental user, and continues to configure parameters after the experimental user confirms.

6. The task execution method applied to an electron beam exposure system according to any one of claims 1 to 5, characterized in that: In the process of the EBL experimental robot executing the experimental process, the robot interacts with the experimental user according to the requirements of the experimental process, and continues to execute the experimental process after calibrating and correcting the pre-parameters according to the interaction results, or cancels the experimental process according to the interaction results, including: During the process of the EBL experimental robot executing the experimental process, if it is detected that the experimental user selects the need to manually calibrate the coordinates in the process parameters, a second confirmation request for manually calibrating the coordinates is sent to the experimental user; When the EBL experiment robot receives the second confirmation instruction returned by the experiment user, it performs pre-parameter calibration and correction according to the content input by the experiment user, and continues to execute the experiment process; When the EBL experiment robot receives the first cancel instruction returned by the experiment user, it cancels the execution of the experiment process.

7. The task execution method applied to an electron beam exposure system according to any one of claims 1 to 5, characterized in that: In the process of the EBL experimental robot executing the experimental process, the robot interacts with the experimental user according to the requirements of the experimental process, and continues to execute the experimental process after calibrating and correcting the pre-parameters according to the interaction results, or cancels the experimental process according to the interaction results, including: During the process of the EBL experimental robot executing the experimental process, if it is detected that the experimental user selects not to manually calibrate the coordinates in the process parameters, a third confirmation request for setting the coordinate parameters is sent to the experimental user; When the EBL experiment robot receives the third confirmation instruction returned by the experiment user, it continues to execute the experiment process; When the EBL experiment robot receives the second cancel instruction returned by the experiment user, it cancels the execution of the experiment process.

8. A task execution device applied to an electron beam exposure system, characterized in that: include: The experiment process determination module is used to detect the experiment request sent by the experiment user, call the EBL experiment robot to obtain the corresponding process file according to the experiment name input by the experiment user, and determine the pre-parameters according to the parameter information input by the experiment user, and then execute the experiment process; The experimental process execution module is used to interact with the experimental user according to the requirements of the experimental process during the execution of the experimental process by the EBL experimental robot, and to continue to execute the experimental process after calibrating and correcting the pre-parameters according to the interaction results, or to cancel the experimental process according to the interaction results.

9. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores computer-readable instructions, and when the computer-readable instructions are executed by one or more processors, the one or more processors execute the steps of the task execution method applied to the electron beam exposure system as described in any one of claims 1 to 7.

10. A computer device, characterized in that: include: one or more processors, and memory; The memory stores computer-readable instructions, and when the computer-readable instructions are executed by the one or more processors, the steps of the task execution method applied to the electron beam exposure system as claimed in any one of claims 1 to 7 are executed.

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