Novel plasma detection and analysis device

Abstract

A novel plasma detection and analysis device provided by the present invention comprises an ion extraction module, an instantaneous sampling module, a focusing module, a quadrupole rod region and a signal collection module, the ion extraction module is connected to an ion source, the instantaneous sampling module is connected to the ion extraction module, the focusing module is connected to the instantaneous sampling module, the quadrupole rod region is connected to the focusing module, and the signal collection module is connected to the quadrupole rod region. The quadrupole rod area comprises two groups of electrodes, and the signal collection module is connected to the quadrupole rod area. Three kinds of ion analysis applications are realized by adopting the same hardware structure, different electric field operations and signal acquisition modes; meanwhile, when the mass spectrum and energy spectrum mixed analysis is carried out, ions with different energies are not filtered out by adopting an energy selection window, but the energies of the ions are distinguished by utilizing the flight time; ions with different initial energies can be measured and counted as long as the ions pass through the pulse gate, so that the measured ion energy spectrum truly represents the energy spectrum of the ions in the plasma, and the capability of simultaneously analyzing the mass and the energy of the ions is obtained.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma detection, and in particular to a novel plasma detection and analysis device. Background Art

[0002] Plasma is widely used in the semiconductor manufacturing field. For example, plasma etching equipment, plasma enhanced thin film deposition equipment, ion implantation equipment, etc. The state of plasma will affect the stability of the manufacturing process. Therefore, it is necessary to monitor the changes in plasma density and composition in real time to ensure the consistency of the plasma state of similar equipment. Measuring the ratio of ion energy E to ion mass M simultaneously can obtain information on multiple aspects such as the excitation, equilibrium, and decay of plasma, which is very helpful for the research and development of plasma processes. At the same time, an analyzer that measures ion energy and mass can also provide more refined and valuable data for plasma monitoring.

[0003] Existing analytical devices for plasma monitoring can usually only obtain the mass fraction data of ions (mass spectrometry) or the energy fraction data of ions (energy spectrometry). If one wants to obtain both the mass fraction data and the energy fraction data of ions simultaneously, the usual approach requires separately implementing the energy analysis of ions and the mass analysis of ions. Therefore, the device needs to include two independent and non-interfering analytical devices. In such a device, during energy analysis, ions of different masses can only pass through when their energy is within a selected range. During mass analysis, ions of different energies can only pass through when their mass is within a selected range. At the final receiver, only ion signals with both energy and mass within the selected range are received. For example, the energy range of ions contained in the plasma is 2 eV - 60 eV, and the ion mass range is 1 amu - 200 amu (one atomic mass unit is 1 amu, 1 amu = 1.66 x 10^-27 kg). Suppose the resolution of the ion energy analyzer is 0.2 eV, and the resolution of the ion mass analyzer is 0.5 amu. When the energy is scanned to 10 eV, for all ions of different masses, as long as their energy is between 9.9 eV and 10.1 eV, they can pass through the energy analyzer. After entering the mass analyzer, if the mass is scanned to 40 amu at that time, only ions with a mass between 39.75 amu and 40.25 amu can pass through the mass analyzer and be received. If the user is only interested in ions with a mass of 40 amu (such as argon ions Ar+), the mass analyzer can be fixed at 40 amu, and the energy analyzer can be set at 2 eV, 2.2 eV, 2.4 eV, …, 59.8 eV, 60 eV respectively to collect ion signals, thereby obtaining the energy spectrum of 40 amu ions. However, this analysis mode of fixing the mass and scanning the energy has a significant drawback, that is, ion signals of different energies are collected at different times. If the plasma itself is very stable and remains unchanged within the signal collection time range, the collected signals can indeed represent the true ion energy spectrum. If the plasma is unstable, then this collection mode cannot obtain the true ion energy spectrum. The number of ions at E = 2 eV is measured earlier than that at E = 60 eV, and it is not a comparison at the same time, so it is impossible to accurately analyze the plasma that changes over time.

[0004] Based on this, a new solution is needed. Summary of the Invention

[0005] The object of the present invention is to provide a new type of plasma detection and analysis device for the problems existing in the prior art that the analytical devices for simultaneously measuring the energy and mass of ions are often large in size, complex in structure, and low in accuracy.

[0006] An embodiment of the present invention provides a novel plasma detection and analysis device, which includes an ion extraction module, an instantaneous sampling module, a focusing module, a quadrupole region, and a signal collection module. The ion extraction module is connected to an ion source, the instantaneous sampling module is connected to the ion extraction module, the focusing module is connected to the instantaneous sampling module, the quadrupole region is connected to the focusing module, the quadrupole region includes two sets of electrodes, the signal collection module is connected to the quadrupole region, and the ion extraction module extracts and guides the plasma in the ion source into an electric field.

[0007] In the first working mode of mass spectrometry analysis, a pulsed voltage is applied to the instantaneous sampling module so that plasmas with different energies within the same pulse time window enter the focusing module. An accelerating voltage is applied to the two sets of electrodes of the focusing module and the quadrupole region so that plasmas with different masses are accelerated and focused and then fly to the signal collection module to be collected respectively. The signal collection module calculates the ion mass according to the flight time.

[0008] In the second working mode of mass spectrometry analysis, a DC low voltage is applied to the instantaneous sampling module and the focusing module so that the plasma freely flies into the quadrupole region. A DC voltage and an RF voltage with the same amplitude but opposite phases are respectively applied to the two sets of electrodes of the quadrupole region so that the plasmas within a preset mass range are collected by the signal collection module.

[0009] In the third working mode of simultaneously performing mass spectrometry analysis and energy spectrum analysis, a pulsed voltage is applied to the instantaneous sampling module so that plasmas with different energies within the same pulse time window enter the focusing module. A DC voltage V equal to the central potential of the quadrupole region is applied to the focusing module. c The voltage applied to the first set of electrodes in the horizontal direction is V 1 =V c +U+V*cos(ωt), and the voltage applied to the second set of electrodes in the vertical direction is V 2 =V c -U-V*cos(ωt). After the plasmas with different energies enter the quadrupole region through the focusing module, they move along the axial direction of the quadrupole region and oscillate reciprocally between the two sets of electrodes for filtering, so that the plasmas within a preset mass window are collected by the signal collection module, and the signal collection module analyzes the ion energy according to the flight time.

[0010] In the novel plasma detection and analysis device provided by the present invention, the ion extraction module includes a small hole electrode and a draw-out electrode, and the small hole electrode is connected between the ion source and the draw-out electrode.

[0011] In the novel plasma detection and analysis device provided by the present invention, the ion extraction module includes a small hole electrode and a draw-out electrode. The incident end of the small hole electrode is connected to the ion source. The draw-out electrode is arranged in the cavity of the small hole electrode, and the exit end of the small hole electrode and the exit end of the draw-out electrode are fixedly connected.

[0012] In the novel plasma detection and analysis device provided by the present invention, the diameter of the incident end of the small hole electrode is b, and the ratio range of the distance between the incident end of the draw-out electrode and the incident end of the small hole electrode to the diameter of the incident end of the small hole electrode is 5:1 to 30:1.

[0013] In the novel plasma detection and analysis device provided by the present invention, in the first working mode and the third working mode, the signal collection module adopts the MCP single-particle counting mode; in the second working mode, the signal collection module adopts the Faraday cup current measurement mode.

[0014] In the novel plasma detection and analysis device provided by the present invention, in the third working mode, the initial energy E of the plasma 1 and the flight time t of the plasma in the quadrupole region M have the relationship that,

[0015]

[0016] wherein, M is the ion mass, L is the length of the quadrupole region, and V F is the floating potential of the plasma.

[0017] Implementing the embodiments of the present invention has the following beneficial effects: In the novel plasma detection and analysis device provided by the present invention, three ion analysis applications are realized by adopting the same hardware structure, different electric field operations and signal acquisition modes; meanwhile, when performing mass spectrometry and energy spectrometry mixed analysis, instead of using an energy selection window to filter out ions with different energies, the flight time is used to distinguish the energies of ions; for ions with different initial energies, as long as they pass through the pulse gate, they will be measured and counted. Therefore, the measured ion energy spectrum truly represents the ion energy spectrum in the plasma, thereby obtaining the ability to simultaneously analyze ion mass and energy; thus, the disadvantage that ion energies are collected at different times in the same type of technology is avoided. For a plasma that changes over time, this analysis ability can provide more valuable data. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 The following shows the schematic diagram of the principle of the novel plasma detection and analysis device provided by the present invention;

[0020] Figure 2 The following shows the structural schematic diagram of the novel plasma detection and analysis device provided in the first embodiment of the present invention;

[0021] Figure 3 The following shows the working principle of obtaining the ion energy distribution by time-of-flight measurement;

[0022] Figure 4 The following shows the connection schematic diagram of the small hole electrode and the extraction electrode of the novel plasma detection and analysis device provided in the second embodiment of the present invention. Detailed implementation manners

[0023] To facilitate the understanding of the present application, the following will describe the present application more comprehensively with reference to the relevant drawings. The typical embodiments of the present application are given in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs. The terms used in the specification of this application herein are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0025] To better understand the above technical solutions, the following will describe the above technical solutions in detail in combination with the drawings of the specification and specific implementation manners. It should be understood that the embodiments of the present invention and the specific features in the embodiments are detailed descriptions of the technical solutions of this application, rather than limitations on the technical solutions of this application. Without conflict, the technical features in the embodiments of the present invention and the embodiments can be combined with each other.

[0026] Embodiment 1

[0027] Figure 1 The following shows the schematic diagram of the principle of the novel plasma detection and analysis device provided by the present invention; Figure 2 The following shows the structural schematic diagram of the novel plasma detection and analysis device provided in the first embodiment of the present invention. As Figure 1and Figure 2 As shown in Figure 2 , the novel plasma detection and analysis device provided by the embodiment of the present invention includes an ion extraction module 100, an instantaneous sampling module 200, a focusing module 300, a quadrupole region 400, and a signal collection module 500 that are connected in sequence. Among them, the quadrupole region 400 includes two sets of electrodes, the ion extraction module 100 includes a small hole electrode 110 and an extraction electrode 120, and the small hole electrode 110 is connected between the ion source 600 and the extraction electrode 120 to extract and guide the plasma in the ion source into the electric field. Further, the small hole electrode 110 is used to extract ions from the ion source, form a preliminary ion beam, and control the initial shape and direction of the beam current. The extraction electrode 120 is used to further extract and accelerate ions, optimize the transmission efficiency of the ion beam; at the same time, preliminarily focus the ion beam and reduce divergence.

[0028] Specifically, in this embodiment, in the first working mode of mass spectrometry analysis, a pulsed voltage is applied to the instantaneous sampling module so that plasmas with different energies within the same pulsed time window enter the focusing module, and accelerating voltages are applied to the two sets of electrodes of the focusing module and the quadrupole region so that plasmas with different masses are accelerated and focused and then fly to the signal collection module to be collected respectively, and the signal collection module calculates the ion mass according to the flight time. In this embodiment, the time of flight is used to separate plasmas with different masses. By immediately accelerating the ions after the pulsed gate electrode of the instantaneous sampling module, the accelerating voltage is much greater than the ion energy difference in the plasma, so that the ions fly at a uniform speed in the field-free region. By making the voltage on the quadrupole the same as the ion accelerating voltage, the time difference for ions with different masses to fly to the receiver is large enough, and thus the mass spectrum of the plasma is obtained. Among them, the signal collection module adopts the MCP single-particle counting mode.

[0029] Specifically, in this embodiment, in the second working mode of mass spectrometry analysis, a DC low voltage is applied to the instantaneous sampling module and the focusing module so that the plasma freely flies into the quadrupole region, and DC voltages and RF voltages with the same amplitude but opposite phases are respectively applied to the two sets of electrodes of the quadrupole region so that plasmas within a preset mass range are collected by the signal collection module. In this embodiment, a pulsed voltage is not used for instantaneous sampling of the plasma. By applying a DC low voltage to both the pulsed gate electrode of the instantaneous sampling module and the accelerating and focusing electrode of the focusing module, all ions are allowed to freely fly into the quadrupole region. By applying a DC voltage U and an RF voltage V to the two sets of electrodes in the quadrupole region to select the ion mass, ions with a specific mass can pass through (not affected by the ion energy). The signal collection adopts the Faraday cup current measurement mode.

[0030] Specifically, in this embodiment, in the third working mode of simultaneously performing mass spectrometry analysis and energy spectrometry analysis, a pulsed voltage is applied to the instantaneous sampling module so that plasmas with different energies within the same pulsed time window enter the focusing module, and a DC voltage V equal to the central potential of the quadrupole region is applied to the focusing module. c The voltage applied to the first set of electrodes in the horizontal direction is V 1 = V c + U + V*cos(ωt), and the voltage applied to the second set of electrodes in the vertical direction is V 2 = V c - U - V*cos(ωt). The plasmas with different energies enter the quadrupole region through the focusing module and move axially along the quadrupole region while oscillating reciprocally between the two sets of electrodes for filtering, so that the plasmas within the preset mass window are collected by the signal collection module, and the signal collection module analyzes the ion energy according to the flight time. In this embodiment, the instantaneous sampling module uses a pulsed voltage to perform instantaneous sampling on the plasma; after the plasma passes through the pulsed gate electrode of the instantaneous sampling module, since a DC low voltage is still applied to the acceleration and focusing electrodes of the focusing module and there is no further acceleration, the original energy difference of the ions in the plasma is retained, and this energy difference is used to separate the time for the ions to fly through the quadrupole region. Since this DC low voltage is the same as the central potential of the quadrupole mass region, in the axial direction of the quadrupole region, the flight speed of the ions is determined by the original energy of the ions. The oscillating movement of the ions in the two directions perpendicular to the quadrupole region does not affect the flight time in the axial direction, so when the ions are mass-screened by the RF voltage, the difference in the original energy is also distinguished by the difference in the flight time in the axial direction, thus completing both mass analysis and energy analysis simultaneously. Since pulsed voltage sampling is used, the signal collection module also adopts the MCP single-particle counting mode.

[0031] Furthermore, in the third working mode of simultaneously performing mass spectrometry analysis and energy spectrometry analysis, the central potential (Pole Potential) of the quadrupole region is used to control the flight speed of the ions in the quadrupole region. Define the z-axis as the central axis pointing from the small hole to the signal collection module, and the x-axis and y-axis are the other two rectangular coordinate axes perpendicular to the z-axis. Assume that the x-axis is from the quadrupole mass electrode -3 to the quadrupole mass electrode -1, and a positive voltage V 13 = U + V*cos(ωt) is applied to the quadrupole mass electrodes -3 and -1. Further assume that the y-axis is from the quadrupole mass electrode -4 to the quadrupole mass electrode -2, and a negative voltage V 24 = - U - V*cos(ωt) is applied to the quadrupole mass electrodes -4 and -2. At this time, the central potential of the quadrupole region is zero: V 0 = (V 13+V 24 ) / 2 = 0. If a DC bias voltage V 13 and V 24 are both provided with a DC bias voltage V C , then there is:

[0032]

[0033] In this way, the central potential V C of the quadrupole region can be controlled by the DC bias voltage V 0 . V 0 and two other physical quantities will determine the velocity of an ion with mass M flying along the central axis of the quadrupole region. The first physical quantity is the floating potential V F of the plasma, and the second physical quantity is the kinetic energy E 1 of the ion when it moves in the plasma. If the ion starts from the edge of the plasma sheath with kinetic energy E 1 and shoots towards the small hole, then the energy when it enters the small hole after passing through the plasma sheath is E 1 +eV F , where e is the charge carried by the ion (for a monovalent positive ion, e = 1.6x10 -19 Coulomb). When the ion enters the quadrupole region after passing through the extraction electrode, the pulsed gate electrode, and the focusing electrode, the energy of the ion is E 2 = E 1 +eV F -eV C . If V C <0, the ion energy will further increase. Select the mass window of the quadrupole region (determined by U, V, and ω) to allow the ion with mass M to pass through, and ions with other masses are filtered out. Therefore, only the flight time of the ion with mass M needs to be considered where L is the distance the ion flies through in the quadrupole region. The floating potential V F can be measured by other methods (such as using a Langmuir Probe), V C is the controllable central potential of the quadrupole region. In the formula, all are known quantities except E 1 . Thus, after obtaining t M by measuring the flight time, the initial kinetic energy E 1 of the ion can be deduced through the formula. When the initial kinetic energy of the ion is large, the flight time t M is shorter. Therefore, by measuring t M , the energy distribution data of ion M is obtained. It should be particularly pointed out here that measuring t MWhen an energy selection window was not used to filter ions of different energies, ions with different initial energies would be measured and counted as long as they passed through the pulsed gate. Therefore, the measured ion energy spectrum truly represents the ion energy spectrum in the plasma, enabling the ability to simultaneously analyze ion mass and energy. For a plasma that changes over time, this analytical ability can provide more valuable data.

[0034] Figure 3 The working principle of obtaining the ion energy distribution by time-of-flight measurement is shown as follows. As Figure 3 shown, the electrical pulse applied to the gate electrode allows 15 ions to pass through within the time period of (0, t 0 ), where t 0 is a very short time (such as t 0 = 100 ns). The red vertical line represents an ion with a relatively high initial energy E1, the cyan vertical line represents an ion with a medium initial energy E1, and the green vertical line represents an ion with a relatively low initial energy E1. After flying a distance L, all ions arrive at the signal receiving module within the time period of (t min , t max ). Since ions with different initial energies have different flight times, the ions with a higher E1 arrive at the signal receiving module earlier, and the ions with a lower E1 arrive at the signal collection module later. They are all collected and counted within the time window of (t min , t max ).

[0035] In this embodiment, three ion analysis applications are achieved by using the same hardware structure, different electric field operations, and signal acquisition modes. At the same time, when performing a combined mass spectrometry and energy spectrometry analysis, an energy selection window is not used to filter ions of different energies. Instead, the time of flight is used to distinguish the energies of ions. For ions with different initial energies, as long as they pass through the pulsed gate, they will be measured and counted. Therefore, the measured ion energy spectrum truly represents the ion energy spectrum in the plasma, enabling the ability to simultaneously analyze ion mass and energy. Thus, the drawback in the same type of technology where ion energies are collected at different times is avoided. For a plasma that changes over time, this analytical ability can provide more valuable data.

[0036] Embodiment 2

[0037] Figure 4 The schematic connection diagram of the small hole electrode and the extraction electrode of the novel plasma detection and analysis device provided in Embodiment 2 of the present invention is shown as follows. As Figure 4As shown, the difference from the first embodiment is that, in this embodiment, the ion extraction module 100 includes a small hole electrode 110 and a draw-out electrode 120. The incident end of the small hole electrode is connected to the ion source. The draw-out electrode is disposed in the cavity of the small hole electrode, and the exit end of the small hole electrode and the exit end of the draw-out electrode are fixedly connected. Thus, the incident end of the draw-out electrode is close to the small hole electrode, which can directly accelerate the positive ions passing through the small hole. The electric field between the small hole electrode and the draw-out electrode forms a focusing effect on the positive ion beam, which can keep the detected ion beam at a high degree of parallelism. At the same time, the front end of the draw-out electrode is a small hole, which can form a differential pumping effect. The differential pumping reduces the air pressure behind the draw-out electrode, making the vacuum degree in the vacuum pumping - 2 channel relatively high. The relatively high vacuum degree reduces the probability of ions colliding with neutral gas molecules, and reduces the chance of ions being missed due to neutralization (charge transfer to neutral molecules).

[0038] Further, in this embodiment, in order not to cause gas discharge near the small hole, the diameter of the incident end of the small hole electrode is b, and the ratio range of the distance between the incident end of the draw-out electrode and the incident end of the small hole electrode to the diameter of the incident end of the small hole electrode is 5:1 to 30:1.

[0039] In the plasma detection device of the first embodiment, the small hole electrode and the vacuum cavity are at the same potential (grounded), and the draw-out electrode is connected to a negative voltage. After the ions pass through the small hole, they drift through the field-free region. When detecting the plasma in the state of low gas pressure / high ionization rate or high gas pressure / low ionization rate, the positive ions repel each other during the drift process, and the divergence phenomenon of the ion beam after passing through the small hole is relatively serious. And the ions with too large divergence angle will be missed, reducing the analysis and detection efficiency. In this embodiment, by arranging the draw-out electrode close to the small hole, the positive ions passing through the small hole are directly accelerated. At the same time, the small hole electrode adopts a Pierce source structure, which can suppress the divergence of the positive ion beam. A differential pumping effect can be formed between the draw-out electrode and the small hole electrode, thereby suppressing ion neutralization.

[0040] In the specification provided here, a large number of specific details are described. However, it can be understood that the embodiments of the present invention can be practiced without these specific details. In some instances, well-known methods, structures, and technologies are not shown in detail so as not to obscure the understanding of this specification.

[0041] Similarly, it should be understood that, for the purpose of streamlining the present disclosure and assisting in understanding one or more of the various inventive aspects, in the foregoing description of the exemplary embodiments of the present invention, the various features of the present invention are sometimes grouped together into a single embodiment, figure, or description thereof. However, the disclosed method should not be construed as reflecting an intention that the claimed invention requires more features than are expressly recited in each claim. Rather, as reflected in the following claims, the inventive aspects lie in less than all of the features of the single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into the detailed description, with each claim standing on its own as a separate embodiment of the present invention.

[0042] Moreover, those skilled in the art will appreciate that although some embodiments herein include certain features included in other embodiments but not others, combinations of features of different embodiments are meant to be within the scope of the present invention and form different embodiments. For example, in the following claims, any one of the claimed embodiments can be used in any combination.

[0043] It should be noted that the above embodiments illustrate rather than limit the present invention, and those skilled in the art can design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The present invention can be implemented by means of hardware comprising several distinct elements and by means of a suitably programmed computer. In the unit claims listing several devices, several of these devices can be embodied by the same item of hardware. The use of the words first, second, and third, etc. does not denote any order. These words can be interpreted as names.

Claims

1. A novel plasma detection and analysis device, characterized in that: The invention comprises an ion extraction module, an instantaneous sampling module, a focusing module, a quadrupole region and a signal collection module, wherein the ion extraction module is connected to an ion source, the instantaneous sampling module is connected to the ion extraction module, the focusing module is connected to the instantaneous sampling module, the quadrupole region is connected to the focusing module, the quadrupole region comprises two groups of electrodes, the signal collection module is connected to the quadrupole region, the ion extraction module extracts the plasma in the ion source and guides it into an electric field, In the first working mode of mass spectrometry analysis, a pulse voltage is applied to the instantaneous sampling module so that plasmas of different energies within the same pulse time window enter the focusing module, and an acceleration voltage is applied to the two sets of electrodes in the focusing module and the quadrupole region so that plasmas of different masses are accelerated and focused and then fly to the signal collection module to be collected, and the signal collection module calculates the ion mass according to the flight time; In the second working mode of mass spectrometry analysis, a DC low voltage is applied to the instantaneous sampling module and the focusing module to allow the plasma to freely fly into the quadrupole region, and a DC voltage and a radio frequency voltage with the same amplitude but opposite phases are applied to two groups of electrodes in the quadrupole region respectively so that the plasma within a preset mass range is collected by the signal collection module; In the third working mode of simultaneously performing mass spectrometry analysis and energy spectrum analysis, a pulse voltage is applied to the instantaneous sampling module so that plasmas of different energies within the same pulse time window enter the focusing module, and a DC voltage V which is the same as the central potential of the quadrupole region is applied to the focusing module. c , the voltage applied to the first set of electrodes in the horizontal direction is V1 = V c +U+V*cos(ωt), the voltage applied to the second set of electrodes in the vertical direction is V2=V c -UV*cos(ωt), after the plasmas with different energies enter the quadrupole region through the focusing module, they move along the axial direction of the quadrupole region while reciprocatingly oscillating between the two groups of electrodes for filtering, so that the plasma within the preset mass window is collected by the signal collection module, and the signal collection module analyzes the ion energy according to the flight time.

2. The novel plasma detection and analysis device according to claim 1 is characterized in that: The ion extraction module includes a pinhole electrode and a pumping electrode, and the pinhole electrode is connected between the ion source and the pumping electrode.

3. The novel plasma detection and analysis device according to claim 1 is characterized in that: The ion extraction module comprises a pinhole electrode and a pumping electrode, wherein the incident end of the pinhole electrode is connected to the ion source, the pumping electrode is arranged in the cavity of the pinhole electrode and the output end of the pinhole electrode is fixedly connected to the output end of the pumping electrode.

4. The novel plasma detection and analysis device according to claim 3, characterized in that: The diameter of the incident end of the pinhole electrode is b, and the ratio of the distance between the incident end of the extraction electrode and the incident end of the pinhole electrode to the diameter of the incident end of the pinhole electrode is in a range of 5:1 to 30:

1.

5. The novel plasma detection and analysis device according to claim 1 is characterized in that: In the first working mode and the third working mode, the signal collection module adopts the MCP single particle counting mode; in the second working mode, the signal collection module adopts the Faraday cup current measurement mode.

6. The novel plasma detection and analysis device according to claim 1 is characterized in that: In the third working mode, the initial energy E1 of the plasma and the flight time t M The relationship is, Where M is the ion mass, L is the length of the quadrupole region, and V F is the suspension potential of the plasma.

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