Oscillator assembly with counter rotating masses

By using reverse rotation mass and magnetic buffers in a single-degree of freedom mechanical oscillation system, the magnetic field is used to transmit torque, so that the CRM and the rotor oscillate at the resonant frequency, solving the problem of maintaining a uniform speed and reducing power consumption, achieving an efficient and stable oscillation effect.

CN120051922APending Publication Date: 2025-05-27YINGNUOWEISI TECH CO LTD
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Patent Information

Application Number
CN202380075333.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2022-10-27
Filing Date
2023-10-26
Publication Date
2025-05-27

AI Technical Summary

Technical Problem

The prior art is difficult to maintain uniform speed and reduce power consumption in single-degree of freedom mechanical oscillation systems, especially over the entire range of motion of the oscillator.

Method used

Using a reverse rotation mass (CRM) and a magnetic buffer, the torque is transmitted using a magnetic field to oscillate at the resonant frequency by the rotor magnet arranged on the rotor and the torque transfer magnet on the CRM.

Benefits of technology

It realizes maintaining a uniform speed over the entire range of motion of the oscillator, reducing the power consumption of the oscillator system, and improving the stability and life of the oscillator.

✦ Generated by Eureka AI based on patent content.

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Abstract

An oscillator assembly is provided that includes a stator, a rotor, and at least one rotor magnet disposed on the rotor. The rotor magnet is configured to move with the rotor between a first end point and a second end point. The assembly includes a counter-rotating mass (CRM) rotatably and resiliently mounted on the stator, wherein the rotor is rotatably mounted on the CRM. The CRM includes a first energy conversion element (ECE) disposed on the CRM, where the first ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM, and at least a second ECE disposed on the CRM, where the second ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM.
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Description

[0001] This application claims the benefit of U.S. Non - Provisional Application No. 17 / 974,758, filed on October 27, 2022, the entire content of which is incorporated herein by reference in its entirety. Technical Field

[0002] Embodiments of the present disclosure generally relate to using counter - rotating mass blocks to transfer torque in a single - degree - of - freedom oscillator. Background Art

[0003] Components, systems, and methods are needed to control the motion of a single - degree - of - freedom mechanical oscillation system (e.g., to maintain a uniform speed of a movable part). Summary of the Invention

[0004] Oscillation components, systems, and methods for controlling oscillatory motion are provided herein. To achieve these and other advantages and in accordance with the purpose of the disclosed subject matter, as embodied and broadly described, the disclosed subject matter includes a component that includes a stator, a rotor, and at least one rotor magnet disposed on the rotor. The rotor magnet is configured to move with the rotor between a first end point and a second end point. The component includes a counter - rotating mass (CRM) rotatably and elastically mounted on the stator, wherein the rotor is rotatably mounted on the CRM. The CRM includes a first energy conversion element (ECE) disposed on the CRM and at least a second ECE disposed on the CRM, wherein the first ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM, and wherein the second ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM.

[0005] To achieve these and other advantages and in accordance with the purpose of the disclosed subject matter, as embodied and broadly described, the disclosed subject matter also includes an oscillating assembly that includes a stator, a rotor configured to move relative to the stator with one degree of freedom, and a counter-rotating mass (CRM) that is elastically and rotatably mounted on the stator, wherein the rotor is rotatably mounted on the CRM, and the CRM is configured to rotationally oscillate relative to the stator and rotate with one degree of freedom relative to the stator and the rotor. The rotor also includes at least a first rotor magnet and a second rotor magnet, each mounted on the rotor, the first rotor magnet configured to move with the rotor between a first end point and a second end point, and the second rotor magnet configured to move with the rotor between a third end point and a fourth end point. The CRM includes at least a first, a second, a third, and a fourth torque-transfer magnet disposed on the CRM respectively near the first, second, third, and fourth end points of the rotor, each torque-transfer magnet generating a magnetic field configured to repel the rotor magnet. The first rotor magnet is magnetically coupled to the first torque-transfer magnet and the second torque-transfer magnet, the second rotor magnet is magnetically coupled to the third torque-transfer magnet and the fourth torque-transfer magnet, the first rotor magnet generates a magnetic field that causes the first torque-transfer magnet and the second torque-transfer magnet to move the CRM, and the second rotor magnet generates a magnetic field that causes the third torque-transfer magnet and the fourth torque-transfer magnet to move the CRM. The stator includes at least one coil positioned outside the path traveled by each of the rotor magnets, wherein the at least one coil is electromagnetically coupled to the rotor magnets and is configured to generate a magnetic field that causes the rotor to move when energized.

[0006] To achieve these and other advantages and in accordance with the purpose of the disclosed subject matter, as embodied and broadly described, the disclosed subject matter includes a system that includes an oscillator assembly and an actuator coupled to the rotor, the actuator being configured to move the rotor.

[0007] To achieve these and other advantages and in accordance with the purpose of the disclosed subject matter, as embodied and broadly described, the disclosed subject matter also includes a method of oscillating the rotor at a resonance frequency. The method includes providing the system, wherein the assembly is an oscillator that includes a resonance frequency, and wherein the actuator is configured to drive the movement of the rotor at the resonance frequency, and wherein the counter-rotating mass is configured to oscillate in response to the oscillation of the rotor. The method includes exciting the actuator such that the rotor and the counter-rotating mass oscillate between a first end point and a second end point at the resonance frequency.

[0008] To achieve these and other advantages and in accordance with the purpose of the disclosed subject matter, as embodied and broadly described, the disclosed subject matter also includes a LIDAR scanning system that includes a light source configured to generate at least one light beam. An oscillator assembly that includes a stator and a rotor, the rotor being configured to move relative to the stator with one degree of freedom, the rotor further including at least one rotor magnet disposed on the rotor, wherein the at least one rotor magnet is configured to move with the rotor between a first end point and a second end point. The assembly includes a counter-rotating mass (CRM) rotatably and elastically mounted on the stator, wherein the rotor is rotatably mounted on the CRM, the CRM being configured to move relative to the stator and the rotor with one degree of freedom, the CRM further including at least a first energy conversion element (ECE) disposed on the CRM and at least a second ECE disposed on the CRM, wherein the first ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM, and wherein the second ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM. The system includes an optical deflector coupled to the rotor, a first actuator coupled to the rotor, a second actuator, and at least one processor, the first actuator being configured to rotate the optical deflector about a first scan axis, the second actuator being configured to rotate the optical deflector about a second scan axis, the optical deflector being configured to deflect at least one light beam into a field of view (POV), and the at least one processor being configured to control the light source, the first actuator, and the second actuator to scan the POV with the optical deflector. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] A detailed description of various aspects, features, and embodiments of the subject matter described herein is provided with reference to the accompanying drawings, which are briefly described below. The drawings are illustrative and not necessarily drawn to scale, where some components and features are exaggerated for clarity. The drawings illustrate various aspects and features of the subject matter and may show all or part of one or more embodiments or examples of the subject matter.

[0010] Figure 1 is a perspective view of an oscillator assembly with a counter-rotating mass in accordance with an embodiment of the disclosed subject matter.

[0011] Figure 2 is a perspective view of a counter-rotating mass configured to be used with an oscillator assembly in accordance with an embodiment of the disclosed subject matter.

[0012] Figure 3 is a perspective view of a stator configured to be used with an oscillator assembly in accordance with an embodiment of the disclosed subject matter.

[0013] Figure 4 is a perspective view of an oscillator assembly coupled to a payload (e.g., a mirror) in accordance with an embodiment of the disclosed subject matter.

[0014] Figure 5 is a flowchart of a method for causing a rotor to oscillate at a resonance frequency.

[0015] Figure 6a -b is a plan view of counter-rotating masses and a rotor in different oscillation phases.

[0016] Figure 7 is a LIDAR system that can be used with an oscillator assembly according to an embodiment of the disclosed subject matter. Detailed Description

[0017] Reference will now be made in detail to the exemplary embodiments of the disclosed subject matter, examples of which are illustrated in the accompanying drawings. The methods and corresponding steps of the disclosed subject matter will be described in conjunction with a detailed description of the system.

[0018] For purposes of explanation and illustration, and not limitation, an exemplary embodiment of a system according to the disclosed subject matter is shown in Figure 1 and is generally designated by reference numeral 100. Like reference numerals (distinguished by a leading digit) may be provided in the various views and drawings presented herein to denote functionally corresponding but not necessarily identical structures.

[0019] Two issues that are often considered when designing a mechanical oscillation system include: 1.) minimizing the power consumption of the oscillation system, and 2.) maintaining a uniform speed of the oscillator throughout the motion range of the oscillator. To reduce (e.g., minimize) the power consumption in the oscillation system, the oscillation system should be driven at a resonance frequency, such as the fundamental resonance frequency of the system (i.e., the lowest energy resonance frequency). Driving the oscillation system at the resonance frequency reduces the actuator and / or control requirements and thus reduces the power required to drive the system. The resonance frequency of the system can be changed, for example, by modifying the system geometry, system materials, the mass of the oscillator, by adding or removing components such as springs and / or dampers and / or counter-rotating masses. When the resonance frequency of the oscillation system changes, the system should be adjusted for that change and continue to drive the oscillator at the resonance frequency to reduce the power requirements.

[0020] When the oscillator approaches the end of its motion range and changes the oscillation direction, the speed of the oscillator may not be uniform (e.g., may be slower or faster) throughout the direction change compared to the speed of the oscillator in other parts of the motion range (e.g., the middle).

[0021] In some applications, maintaining a uniform velocity throughout the motion range of an oscillator provides better results. For example, Light Detection and Ranging (LIDAR) is a specific example of an application where these issues arise. In LIDAR, one or more mirrors oscillate back and forth at high frequency across a Field of View (FOV). While smaller mirrors may be easier to drive and control for angular velocity, larger mirrors require more energy to drive and control due to the increased momentum. Additionally, LIDAR systems collect data points (i.e., reflections of light) during the oscillation of the mirror and may require a uniform velocity of the oscillating mirror to provide equal measurement times (e.g., time-of-flight, number of repetitions) to all pixels, resulting in a substantially uniform resolution across the FOV.

[0022] These problems can be solved by using a magnetic buffer and one or more counter-rotating masses, where the magnetic buffer provides a non-linear force on the oscillator (e.g., rotor) as the oscillator magnet approaches the magnets at each end of the motion range, the oscillator having one or more magnets attached thereto, and the counter-rotating masses being configured to oscillate in the same or opposite direction of the other components of the system (i.e., the rotor). As the oscillator approaches the end of its motion range, the magnet attached to the oscillator (and thus the oscillator itself) will experience a non-linear (e.g., exponentially) increasing magnetic force as the oscillator gets closer to the end of its motion range. The magnet can prevent any potential impact between the oscillator and another part of the system due to the increased magnetic repulsion at the end of its motion range, thereby reducing the likelihood of damage.

[0023] Systems and components for controlling the motion of a single-degree-of-freedom oscillator using counter-rotating masses are disclosed herein, where the oscillator is configured to oscillate at the resonant frequency of the system. Additionally, methods for controlling the motion of a single-degree-of-freedom oscillator using counter-rotating masses are disclosed herein.

[0024] Now refer to Figure 1, a perspective view shows an oscillator assembly 100 with counter-rotating mass blocks, where various components are removed for clarity of illustration. The oscillator assembly 100 includes a stator 104. The stator 104 can be a planar component with a cutout at its center. The stator 104 may include one or more bosses on which electromagnetic coils are disposed. For the purposes of this disclosure, a "boss" is a protruding or raised portion of a component surface. The stator 104 may individually or in combination include one or more components configured to generate a magnetic field, such as an electromagnet, an electromagnetic coil, a voice coil, at least one permanent magnet, or a combination thereof. The stator 104 may include one or more bosses or portions that form one or more arcs defining a circular region therebetween. In various embodiments, the cutout through the stator 104 can be circular (or partially circular) and concentric with the boss or a portion thereof. In various embodiments, the stator 104 may include a single continuous portion. For example, the stator may include a single component, such as a block, having at least one coil, such as an electromagnetic coil attached thereto. In another example, the stator may include a horseshoe shape, where the magnets are at the ends of the horseshoe shape.

[0025] In various embodiments, the stator 104 may include discontinuous portions, where each discontinuous portion includes a magnet, an electromagnetic coil (such as 136a, 136b), etc. For example, the stator may include two separate portions, each having an electromagnet attached thereto. In various embodiments, the stator includes a first stator magnet and a second stator magnet. In various embodiments, each stator may include two stator magnets. In various embodiments, the stator includes more than two (e.g., three) stator magnets. In various embodiments, the stator may include a housing configured to secure the stator magnets and accommodate the oscillator assembly 100.

[0026] In various embodiments, the stator 104 may include one or more stator magnets that are permanent magnets. In various embodiments, the stator magnets are electromagnets. In various embodiments, the electromagnets are driven by a DC current. In various embodiments, the electromagnets are driven by an AC current.

[0027] In various embodiments, the stator magnet is a single magnet having a single north pole and a single south pole. In various embodiments, the stator magnet includes more than one magnet arranged in a stack and thus includes two or more north poles and south poles. In various embodiments, the stacked magnets are arranged such that the north and south poles are vertically oriented. In various embodiments, the stacked magnets are arranged such that the north and south poles are perpendicular to the path of the rotor (e.g., in a rotating system, the magnets are arranged such that the north and south poles are parallel to a radial axis extending from the axis of rotation). In various embodiments, the stacked arrangement of magnets is arranged such that the north and south poles are horizontally oriented. In various embodiments, the stacked magnets are arranged such that the north and south poles are along the path of the rotor (e.g., parallel to, tangent to, etc., the path of the rotor). One of ordinary skill in the art will understand that in various embodiments of the disclosed subject matter, the description of the permanent magnet with respect to the "stator magnet" can apply to any magnet herein.

[0028] Still referring to Figure 1 , the oscillator assembly 100 includes a rotor 108. The rotor 108 is configured to move relative to the stator 104 with one degree of freedom. In various embodiments, the rotor 108 may be rotatably fixed to the stator 104. In various embodiments, the rotor 108 may be concentrically and centrally fixed to the stator 104. The rotor 108 includes at least one rotor magnet 112a disposed on the rotor, where the rotor magnet 112a is configured to move with the rotor 108 between a first end point ( Figure 6a of 604) and a second end point ( Figure 6b of 608). The rotor magnet 112a may be one or more permanent magnets. The rotor magnet 112a may be one or more electromagnets.

[0029] For example, the rotor may be configured for linear motion. In another example, the rotor may be configured for rotational motion. In various embodiments, the rotor magnet includes a permanent magnet. In various embodiments, the rotor magnet includes an electromagnet.

[0030] In various embodiments, the rotor magnet is a single magnet having a single north pole and a single south pole. In various embodiments, the rotor magnet includes more than one magnet arranged in a stack and thus includes two or more north poles and south poles. In various embodiments, the stacked arrangement of magnets is arranged such that the north and south poles are vertically oriented. In various embodiments, the stacked arrangement of magnets is arranged such that the north and south poles are horizontally oriented. In various embodiments, the north and south poles of the stacked magnets alternate within each stack. One of ordinary skill in the art will understand that many arrangements of magnets may be provided thereon, either individually or in combination.

[0031] The rotor 108 may include rotor arms 116. The rotor arms 116 may be rotatably fixed to the rotor 108 at a central position along the length of the rotor 108 such that the rotation of the rotor arms 116 is a rotation about their central points. The rotor arms 116 may rotate about a rotation axis 120. The axis 120 may be disposed perpendicular to the base portion of the stator 104 and axially and concentrically through the rotor 108. The rotor arms 116 may rotate freely about the rotation axis 120 without mechanical interference. The rotor arms 116 may rotate freely about the rotation axis 120 until the rotor arms 116 abut one or more other components, such as a portion of the stator 104 or any of the components described herein. In various embodiments, the rotor arms 116 may freely travel in an arc spanning from a first end point 604 to a second end point 608 (shown in FIG. 6). The rotor arms 116 may freely travel in an arcuate path between two end points defined by a magnetic field or a physical blocking component. The rotor 108 may include at least a second rotor magnet 112b. The second rotor magnet 112b may be disposed on the rotor arm 116. The second rotor magnet 112b may be disposed at an opposite end of the rotor arm 116 of the first rotor magnet 112a. The second rotor magnet 112b may rotate with the rotor arm 116 between a third end point (612) and a fourth end point (616 shown in FIG. 6).

[0032] Still referring to Figure 1 , the oscillator assembly 100 includes a counter-rotating mass (CRM) 124 that is rotatably and elastically mounted on the stator 104. For the purposes of the present disclosure, "elastically mounted" refers to a mode of mounting or attaching a first component to a second component in which displacement relative to each other results in a restoring force that counteracts the displacement. In various embodiments, the rotor 108 may be rotatably mounted on the CRM. The CRM 124 is configured to move relative to the stator 104 and the rotor 108 with one degree of freedom. As described above, in various embodiments, the rotor 108 may be rotatably mounted on the stator 104. The CRM 124 is configured to rotate and oscillate relative to the stator 104.

[0033] Referring again to Figure 1 , the CRM 124 is elastically and rotatably mounted on the stator 104 by at least one flexure 132a. In various embodiments, the CRM 124 may be elastically and rotatably mounted on the stator 104 by four flexures 132a, 132b, 132c, 132d, as Figure 1 shown. For the purposes of the present disclosure, a "flexure" is a flexible element or combination of elements configured to be compliant in a particular degree of freedom. As Figure 1As shown, and in various embodiments, the flexures 132a-d can be thin flat pieces of material, such as steel, fixed to the stator 104 and the CRM 124. By way of example and not limitation, the flexures 132a-d can be fixed to the stator 104 by pins or other mechanical fasteners and welded to the CRM 124 in various arrangements. By way of example and not limitation, the flexures 132a-d can be welded to the stator 104 and mechanically fastened to the CRM 124. In various embodiments, the flexures 132a-d can be mechanically fastened to both the CRM 124 and the stator 104. In various embodiments, the flexures 132a-d can be brazed or soldered to one or both of the CRM 124 and the stator 104.

[0034] In various embodiments, the flexures 132a-d can be pin flexures, such as thin strips or cylinders of material, that constrain three degrees of freedom when the geometry matches a notch cutout. In various embodiments, the flexures 132a-d can be leaf flexures, such as thin sheet material, that constrain three degrees of freedom. In various embodiments, the flexures 132a-d can be notch flexures, such as thin cuts on both sides of a relatively thick piece of material, that constrain five degrees of freedom. In various embodiments, the flexures 132a-d can be hinges or living hinges configured to constrain specific degrees of freedom. In various embodiments, the flexures 132a-d can be leaf springs or suspension flexures. In various embodiments, the flexible connector includes a strip of material (e.g., polymer, metal, composite, etc.). In various embodiments, the flexible connector is a flexible pivot. In various embodiments, the flexures 132a-d can be configured to elastically attach the CRM 124 to the stator 104 at regular intervals about the axis of rotation 120. In various embodiments, the flexures 132a-d can be mounted from the CRM 124 to the stator 104 at four points about the axis of rotation 120, the four points being irregularly and angularly spaced.

[0035] In various embodiments, the flexure members 132a-d may be made of metal (e.g., spring steel, stainless steel, titanium, bronze grades, etc.). In various embodiments, the flexure members 132a-d are made of a polymer. In various embodiments, the material for the flexure members 132a-d has a modulus of elasticity in the range of 100 GPa to 310 GPa, thereby providing a coupling that allows the CRM 124 to rotate about an axis (e.g., the axis of rotation 120) and / or provides additional control of the CRM oscillation. In various embodiments, the material for the flexure members 132a-d has a modulus of elasticity in the range of 200 GPa to 210 GPa. In various embodiments, the flexibility of the flexure members can be adjusted by changing one flexure material to another, thereby adjusting the control parameters of the CRM 124 during oscillation. In various embodiments, the flexure members are rigid such that rotation of the CRM 124 is allowed up to a desired angle. In various embodiments, as an alternative to the flexure members.

[0036] Refer again to Figure 1, the CRM 124 is elastically and rotatably mounted on the stator 104 by at least one bearing. For the purposes of this disclosure, a "bearing" is a mechanical component that bears friction and couples at least one component thereto. By way of example and not limitation, the at least one bearing can be at least one ball bearing. In various embodiments, ball bearings can be utilized to mount the CRM 124 on the stator 104. The ball bearing can include an inner ring fixed to the CRM 124 and an outer ring fixed to the stator 104, and the inner and outer rings are concentrically fixed to each other by suspension metal balls captured therebetween. In such an arrangement, the CRM 124 and the stator 104 can rotate relative to each other with one degree of freedom. In embodiments where the CRM 124 is mounted on the stator 104 by ball bearings, one or more elements that provide a restoring force can be attached to each of the CRM 124 and the stator 104. For example, in addition to the ball bearings, at least one flexure consistent with the description of the flexures 132a-d herein can be attached to the CRM 124 and a portion of the stator 104. In various embodiments, a spring can be attached to the CRM 124 and a portion of the stator 104, and the spring provides a force opposite to the relative displacement of the CRM 124 and the stator 104. In various embodiments, the at least one bearing can be a torsional bearing. The torsional bearing can include a first surface fixed to the CRM 124 and a second surface fixed to the stator 104, and the first and second surfaces of the torsional bearing are concentrically fixed together and rotatably capture a spring or some other type of biasing component, such as a helical spring, a clamping spring, a spring band, etc. In such an arrangement, the CRM 124 and the stator 104 can be rotatably and elastically fixed together, where each of the CRM 124 and the stator 104 is free to move relative to each other with one degree of freedom. In various embodiments, any of the flexures 132a-d can be a sliding bearing and a sleeve bearing. The sliding member can be fixed to the stator 104, and the sleeve member can be fixed to the CRM 124. The sliding member includes a cylindrical shape with an outer diameter smaller than the inner diameter of the sleeve member and is concentrically disposed therein. In such an arrangement, the sliding member is configured to rotate within the sleeve member, thereby rotatably fixing the stator 104 and the CRM 124 together. In embodiments utilizing sliding bearings and sleeve bearings, springs, flexures, or biasing components as described with reference to the ball bearing mounts can be used to provide a restoring force to resist the relative displacement of the CRM 124 and the stator 104.

[0037] In various embodiments, the stator 104 includes an open top portion for accessing components of the assembly 100. In various embodiments, one or more flexures 132a-d attach the stator 104 to the rotor 108. In various embodiments, one or more flexures 132a-d apply a linear spring force to the CRM 124 that is proportional to the displacement and elastic modulus of the flexures 132a-d. In various embodiments, the flexures do not contribute to the resonances of the system. In various embodiments, the rotor is rotationally coupled to the CRM 124 via bearings as an alternative to the flexures.

[0038] Still referring Figure 1 , the oscillator assembly 100 includes at least a first energy conversion element (ECE) 128a disposed on the CRM 124 within the CRM cutout 216. The ECE 128a is configured to at a first endpoint ( Figure 6aAt 604), torque is transferred from the rotor 108 to the CRM 124, thereby causing rotation of the CRM 124. At least the first ECE 128a is configured to convert energy into one or more other types of energy, heat, and / or motion. The first ECE 128a may be configured to convert the kinetic energy of the moving rotor 108 into the kinetic energy of the CRM 124. By way of example and not limitation, the rotor 108 is actuated by one or more coils (such as coil 136a or 136b) disposed on the stator 104. In various embodiments, the electromagnetic coils 136a, 136b may include a plurality of coils. In various embodiments, the electromagnetic coils 136a, 136b may be positioned to optimize (e.g., maximize) the magnetic force applied by the electromagnetic coils to the rotor magnets 112a, 112b for a given type of motion (e.g., whether rotational or linear) of the rotor arm 116. For example, the plurality of coils may be positioned such that the longitudinal axes of the coils generally point towards the axis of rotation 120. In various embodiments, the electromagnetic coils 136a, 136b provide a magnetic field to control the motion of the rotor arm 116. In various embodiments, the electromagnetic coils 136a, 136b provide a constant magnetic field, for example, by supplying a constant voltage to the electromagnetic coils 136a, 136b. In various embodiments, the electromagnetic coils 136a, 136b provide a variable magnetic field by adjusting the voltage supplied to the electromagnetic coils 136a, 136b. Those of ordinary skill in the art will understand that each electromagnetic coil may include a plurality of electromagnetic coils and, for ease of understanding, may be depicted in any of the figures herein. In various embodiments, the electromagnetic coils 136a, 136b may be mounted on the CRM 124. In various embodiments, the electromagnetic coils 136a, 136b may be mounted on a separate component on the stator 104 or the CRM 124 and configured to house the electromagnetic coils 136a, 136b. In various embodiments where the electromagnetic coils 136a, 136b are housed in a different component mounted on either the stator 104 or the CRM 124, the component may be configured to surround at least a portion of the rotor 108 and allow relative rotation of the CRM 124 and the rotor 108.

[0039] The rotor 108 with the rotor magnet 112a travels along an arcuate path until the ECE 128a having a surface corresponding to the rotor magnet 112a provides some restoring force, such as magnetically or spring-based power, to change the direction of the rotor 108 and transfer the motion to the CRM 124 in which it is disposed. In various embodiments, the surface of the energy conversion element (ECE), such as a permanent magnet disposed on the counter-rotating mass (CRM), corresponds to the surface of at least one of the rotor magnets 112a or 112b. In various embodiments where the ECE magnet has stacked magnets, at least one of the stacked stator magnets has a surface corresponding to the surface of each rotor magnet. As used herein, when a surface is configured to move along a path toward or away from another surface and exerts an increasingly large repulsive magnetic force on each other as the two surfaces become closer, the surface of a magnet (e.g., an ECE magnet) corresponds to the surface of another magnet (e.g., at least one rotor magnet). By way of example and not limitation, the rotor magnet 112a may travel along an arcuate path toward the ECE 128a, and the magnetic repulsive force therebetween increases, e.g., at the first endpoint ( Figure 6a of 604), where the repulsive force overcomes the momentum of the rotor 108 and conversely changes the direction of travel of the rotor 108.

[0040] In various embodiments, the stator magnet includes two or more stacked magnets, where at least two of the magnets in the stator magnet correspond to two or more stacked magnets in the rotor magnet. In various embodiments, each corresponding surface of the stator magnet has a larger area than each corresponding surface of the rotor magnet. The point at which the ECE 128a interacts with the rotor 108 is defined as the first endpoint 604. When the rotor oscillates at least one of the rotor magnets 112a along a path (e.g., linear or arcuate) between endpoints (604, 608, 612, 616), the rotor magnet approaches one or more of the ECE 128a or 128b magnets at each of the first endpoint 604 and the second endpoint 608, which exerts an increasing repulsive force on the rotor magnet. In various embodiments, the repulsive force between the ECE 128a, 128b magnets and the rotor magnet 112a is used to control the speed of the rotor (e.g., linear speed or angular speed). In various embodiments, the repulsive force between the coils 136a, 136b and the rotor magnets 112a, 112b is used to reverse the direction of the oscillating rotor 108 while maintaining a substantially constant speed between the endpoints.

[0041] The CRM 124 includes an ECE 128a mounted on the CRM 124. The ECE 128a is located at the end of the rotational span of the rotor 108 and defines a first end point 604 and a second end point 608. The ECEs 128a - d are mounted such that the repelling poles face the rotor magnets 112, so that when the magnet 112a or 112b approaches the ECE 128a - b or 128c - d respectively, the repulsive force on the magnet 112a or 112b contributes to the change in the rotational direction of the rotor magnet 112a or 112b, and thus contributes to the change in the rotational direction of the rotor 108. The repulsive force on the rotor magnets 112a and / or 112b generates a torque on the mirror. When the rotor magnet 112a oscillates between the end points 604, 608 and the second rotor magnet 112b oscillates between the end points 612, 616, the repulsive force is applied between the rotor magnets 112a and / or 112b and the ECEs 128a - b and / or 128c - d respectively, and there is no impact between the rotor magnets 112a - b and the ECEs 128a - d. Since there is no impact between the magnets, the noise, aging effects, and the possibility of magnet damage due to impact are reduced (if not eliminated).

[0042] In various embodiments, the width of each energy conversion element ECE 128a - d magnet can be greater than the width of each corresponding rotor magnet 112a - b, thus providing a larger static overlap area (i.e., the area where the stator magnet faces the rotor magnet is greater than the area of the rotor magnet). In various embodiments, the size (length and / or width) of each stator magnet can be increased such that there is no inertial impact on the system, but the resonance frequency is beneficial (e.g., a higher resonance frequency can be obtained). Increasing the size of the stator magnet also allows for higher assembly tolerances. In various embodiments, by more effectively utilizing the potential magnetic energy, providing end magnets can cause a greater torque on the rotor magnet. In various embodiments using weaker magnetic materials, a greater torque may be required to fully repel the rotor magnet during oscillation.

[0043] Still referring to Figure 1 , in various embodiments, the CRM 124 includes first, second, third, and fourth end points ([[]] Figure 6aAt least first, second, third, and fourth torque - transmitting magnets 128a - d of - b (604, 608, 612, 616), each torque - transmitting magnet 128a - d generating a magnetic field configured to repel rotor magnets 112a, 112b. The first rotor magnet 112a can be magnetically coupled to the first energy - conversion element 128a and the second energy - conversion element 128b, in which case the first rotor magnet 112a is implemented as torque - transmitting magnets 128a, 128b. The second rotor magnet 112b can be magnetically coupled to the third torque - transmitting magnet 128c and the fourth torque - transmitting magnet 128d. When the first rotor magnet 112a is at the first end - point 604 or the second end - point 608, the first rotor magnet generates or naturally has a magnetic field that causes the first torque - transmitting magnet 128a and the second torque - transmitting magnet 128b to move the CRM 124; and when the rotor is at the third end - point 612 or the fourth end - point 616, the second rotor magnet 112b generates a magnetic field that causes the third torque - transmitting magnet 128c and the fourth torque - transmitting magnet 128d to move the CRM 124.

[0044] The first rotor magnet 112a on the rotor arm 116 includes at least two sides, and the second rotor magnet 112b similarly includes at least two sides. The ECE magnets 128a, 128b are mounted on the CRM 124. Each face can be substantially perpendicular to the path traveled by one or more rotor magnets 112a, 112b. In various embodiments, the forces on the system or oscillator assembly 100 due to the magnets are balanced, where each rotor magnet 112a, 112b can experience equal and opposite magnetic fields in a direction that facilitates rotation. Due to the symmetry of the system 400, although the magnetic repulsion is perpendicular to the magnetic - body surface (i.e., a straight - line path) and the motion of the rotor magnets 112a - b is arcuate, the forces on the axis are equal to the forces applied on the opposite side, causing the rotor to rotate because the torque is applied in the same direction on both sides of the rotor 108.

[0045] Continuing to refer Figure 1 , the rotor magnet 112a can be magnetically coupled to each of the first and second ECEs 128a, 128b. The rotor magnet 112a generates (or naturally has) a magnetic field that is configured to interact with and repel each ECE 128a, 128b. The repulsion of the ECEs 128a, 128b causes the CRM 124 to move, thereby transferring torque from the rotor 108 to the CRM 124.

[0046] Similarly, the rotor magnet 112b can be magnetically coupled to each of the third and fourth ECCs 128c, 128d. The rotor magnet 112b generates (or naturally has) a magnetic field that is configured to interact with and repel each of the ECEs 128c, 128d. The repulsion of the ECEs 128c, 128d causes the CRM 124 to move, thereby transferring torque from the rotor 108 to the CRM 124. The repulsion of 128c can cause the CRM 124 to move in the same direction as the repulsion of 128a. Conversely, the repulsion of 128b causes the CRM 124 to move in the same direction as the repulsion of 128a.

[0047] In this way, the repulsive forces from the ECEs 128a-d contribute to a change in the direction of rotation of the rotor arm 116 (e.g., from clockwise to counterclockwise), while maintaining a substantially constant magnitude of the speed (e.g., angular velocity) of the rotor. In various embodiments, a payload (e.g., a mirror) is coupled to the rotor 108. In various embodiments, the payload is coupled to the shaft of the rotor 108. In various embodiments, the payload may share the same axis of rotation as the rotor 108. In various embodiments, the axis of rotation of the payload may be different from the axis of rotation of the rotor 108. In various embodiments, the rotor 108 is positioned above the payload. In various embodiments, the rotor 111 is positioned below the payload. In various embodiments, the rotor 108 rotates about the axis of rotation 120 of the deflector. In various embodiments, the axis 120 is the same axis of rotation of the payload (e.g., a mirror). In various embodiments, the axis 120 about which the rotor 108 rotates is a different axis of rotation of the payload.

[0048] Still referring to Figure 1 , the oscillator assembly includes at least a second ECE 128b disposed on the CRM 124 within the CRM cutout 216. The second ECE 128b is configured to transfer torque from the rotor 108 to the CRM 124, and the second ECE 128b can be in Figure 6bTransfer torque at the second end point 608, thereby causing the rotation of the CRM 124. The first ECE 128a and the second ECE 128b can be configured to change the rotation of the rotor 108 back and forth between the first end point 604 and the second end point 608, thereby causing the oscillation of the CRM 124 when torque is transferred to the CRM 124. For example but not limited to, the oscillator assembly 100 can be configured to oscillate the CRM 124 in response to the oscillation of the rotor 108. In various embodiments, the rotor 108 and the CRM 124 can oscillate out of phase with each other with a predetermined lag time. For example but not limited to, the rotor 108 and the CRM 124 can rotate in opposite directions such that when the rotor 108 reaches the farthest point of its rotation in one direction, the CRM 124 can reach the farthest point of its rotation in the opposite direction. There may be a spin-up time of the oscillator assembly 100, where the rotor 108 applies oscillations to the CRM 124, and the amplitude of the oscillations increases to a steady-state amplitude after a certain amount of time.

[0049] In various embodiments, one or more end magnets can be disposed on the ends of the ECE magnets and / or electromagnetic coils to improve the magnetic force applied to the rotor magnets. As used herein, an "end magnet" is the outermost magnet in a stack of three or more magnets, or in the case where the stack of magnets is two magnets, the end magnet is disposed on one side of the other magnet. In an exemplary embodiment, the end magnet extends beyond the surface of the stacked stator magnets in the direction of travel of the rotor between the terminal points. In various embodiments, the ECE 128a-d magnets can have a cross-sectional area perpendicular to the path of the rotor magnets 112a-b that is larger than the cross-sectional area of the other stator magnets. In various embodiments, the volume of the ECE 128a-d magnets can be greater than the volume of the rotor magnets 112a-b. In various embodiments, the volume of the rotor magnets 112a-b can be greater than the volume of the ECE 128a-d magnets.

[0050] In various embodiments, any of the magnets described herein can be a neodymium iron boron (NdFeB) magnet. In various embodiments, any of the magnets described herein can be a samarium cobalt (SmCo) magnet.

[0051] In various embodiments, at least first and second ECEs 128a, 128b may include one or more springs. The one or more springs are configured to transfer torque from the rotor 108 to the CRM 124. In various embodiments where the ECEs 128a, 128b include one or more springs, the springs include mechanical characteristics that satisfy the oscillator assembly 100. The one or more springs may include a spring constant and / or a modulus of elasticity, and the springs are configured to transfer torque from the rotor 108 to the CRM 124. The one or more springs may be configured to include a certain number of turns or a length of the turns, which are configured to transfer torque from the rotor 108 to the CRM 124. The one or more springs may be fixed to a portion of the CRM 124 and the rotor arm 116 such that at a first end point 604 and a second end point 608, the springs are compressed and then extended, thereby changing the rotational direction of the rotor arm 116 and applying the rotation in the initial direction of the rotor arm to the CRM 124.

[0052] In various embodiments of the oscillator 100, such as Figure 1 the oscillator assembly, the CRM may include at least third and fourth ECEs 128. The third ECE is configured to transfer torque from the rotor 108 to the CRM 124 at a third end point, and the fourth ECE is configured to transfer torque from the rotor 108 to the CRM 124 at a fourth end point. For example but not limited to, the third end point 612 and the fourth end point 616 may be located at mirror image positions of the first and second end points 612, 616, across a plane of symmetry that includes the axis of rotation 120 and vertically bisects the CRM 124. The third and fourth end points 612, 616 may be provided at either end of an arc path traveled by at least the second rotor magnet 112, which is fixed to the rotor arm 116.

[0053] In various embodiments, one or more components may be included at different locations (e.g., positioned above / below other system components) in order to facilitate a more balanced overall system, increase the total repulsive force, etc. For example, a first rotor assembly may rotate clockwise while a second rotor assembly rotates at the same angular velocity but in the opposite rotational direction (i.e., counterclockwise). In various embodiments, the rotor 108 may include more than one rotor arm 116, such as 2, 3, 4, 6, 8 or more rotor arms. In various embodiments, additional arms (e.g., 4 arms, 6 arms, etc.) for increasing the repulsive force may be included. In various embodiments, a single arm may be used. In various embodiments, using two or more arms may reduce the size of the magnets required to generate a desired torque on the rotor and reduce the overall size of the system (e.g., the height of the system).

[0054] In various embodiments, such as Figure 2The CRM shown in the perspective view in [FIGURE REFERENCE] includes a plurality of components, continuous or discontinuous with any other component or portion. The CRM 124 includes a first end 204. The first end 204 may be characterized by a machined metal portion, such as steel, composite material, plastic, rubber, or a combination of materials. The first end 204 may have a solid cross-sectional thickness and include one or more cuts, notches, perforations, holes, or orifices. The first end 204 may be characterized by a substantially rectangular planar shape extending away from the axis of rotation 120. The first end 204 may be configured to have a greater mass than any other portion of the oscillator assembly 100. The CRM 124 includes a second end 208. The second end 208 may be a mirror image of the first end 204 in a plane of symmetry that includes the axis of rotation and is perpendicular to the planar shape of the first end 204. The second end 208 may include a substantially solid rectangular planar shape. The CRM 124 may include a central portion 212 disposed between the first end 204 and the second end 208. The central portion 212 may include a cutout 216 therethrough, wherein a rotor is disposed within the cutout, and the rotor and the CRM are coaxially disposed. The central cutout 216 may include a rotor shaft orifice configured to hold and rotatably secure the rotor shaft of the rotor 108 within the CRM 124.

[0055] The arrangement and design of the CRM 124 may have a moment of inertia. For the purposes of the present disclosure, "moment of inertia" is a property of a rigid body that determines the torque required to achieve a desired angular acceleration about an axis of rotation. The moment of inertia is determined by the mass distribution of the object and the axis. In the case of the CRM 124, the mass may be concentrated at the first end 204 and the second end 208, with a relatively small mass disposed at the central portion 212 via the cutout 216. Generally, a long and relatively thin body (such as the CRM 124) and a body that includes a greater mass (such as the CRM 124) have a higher moment of inertia than a relatively smaller, lighter body having a shorter length (such as the rotor 108, particularly the rotor arm 116). In various embodiments, the CRM 124 may have a moment of inertia that is greater than the moment of inertia of the rotor 108 by about 180 times. In various embodiments, the CRM 124 may have a moment of inertia that is 180 - 250 times greater than the moment of inertia of the rotor 108. In various embodiments, the CRM 124 may have a moment of inertia that is 150 - 250 times greater than the moment of inertia of the rotor 108. In various embodiments, the CRM 124 may have a moment of inertia that is 250 times greater than the moment of inertia of the rotor 108.

[0056] Now referring to Figure 3, the stator 104 is shown in perspective, with other components removed for clarity. The stator 104 can be a planar component with a cutout in its center. The stator 104 can include one or more bosses on which electromagnetic coils are disposed. The stator 104 can include, individually or in combination, one or more components configured to generate a magnetic field, such as electromagnets, electromagnetic coils, voice coils, at least one permanent magnet, or combinations thereof. The stator 104 can include one or more bosses or portions that form one or more arcs that define a circular region therebetween. In various embodiments, the cutout through the stator 104 can be circular (or partially circular) and concentric with the boss or portion thereof. In various embodiments, the stator 104 can include a single continuous portion. For example, the stator can include a single component, such as a block, that has at least one coil, such as an electromagnetic coil attached thereto. In another example, the stator can include a horseshoe shape with magnets at the ends of the horseshoe shape. In various embodiments, one or more structural portions of the stator 104 can be composed of magnets and / or electromagnets. In various embodiments, the entire stator 104 can be magnetic and / or electromagnetic and configured to drive one or more other components of the system 100, such as the rotor 108.

[0057] In various embodiments, the stator 104 can include discontinuous portions, where each discontinuous portion includes a magnet, an electromagnetic coil, etc. For example, the stator can include two separate portions, each having an electromagnet attached thereto. In various embodiments, the stator includes a first stator magnet and a second stator magnet. In various embodiments, each stator can include two stator magnets. In various embodiments, the stator includes more than two (e.g., three) stator magnets. In various embodiments, the stator can include a housing configured to secure the stator magnets and accommodate the oscillator assembly 100.

[0058] Figure 3The stator 104 shown in [figure] includes electromagnetic coils 136a and 136b, each of 136a and 136b being made up of two different electromagnetic coils and, for ease of understanding, grouped and labeled. The electromagnetic coils 136a and 136b may be configured to generate a time-varying magnetic field configured to move one or more rotors, such as rotor 108. The stator 104 includes a rotational axis 120 that is disposed perpendicular to a plate portion of the stator 104 and centered between the electromagnetic coils 136a, 136b. In various embodiments, each of the four corners of the stator 104 includes a boss having one or more flat surfaces disposed thereon. The flat surfaces of the plurality of bosses may be configured to receive at least one flexure, such as flexures 132a-d. The stator 104 may be configured to handle torsional loads applied thereto by the CRM 124. The stator 104 may include one or more fastening portions, such as holes therethrough, configured for mechanical fasteners such as bolts, screws, nails, studs, etc.

[0059] Now referring to Figure 4 , system 400 includes oscillator assembly 100. In various embodiments, system 400 may include oscillator assembly 100, including but not limited to the embodiments depicted in the perspective view in Figure 4 . In the oscillator assembly shown herein, there are four ECEs disposed on the CRM, where the CRM cutout is disposed corresponding to opposite sides of the first rotor magnet and the second rotor magnet. The rotor oscillates freely between a first and second end point and a third and fourth end point, where at each end point, the ECE (shown herein as a permanent magnet) transfers torque from the rotor to the CRM, thereby moving the CRM in the initial direction of the rotor. The CRM is shown as being rotatably and elastically mounted on the stator by four flexures, such as the flexures shown above. The flexures are used to provide a restoring force to the CRM and prevent its rotation and move the CRM in the opposite rotational direction, thereby causing an oscillation relative to the oscillation of the rotor.

[0060] Still referring to Figure 4, the system 400 includes an actuator 404 configured to move a rotor. In various embodiments, the actuator 404 can be an electric motor. The electric motor can include a rotor shaft coupled to the rotor, and an electromagnetic force drives the rotation of the rotor shaft, causing the rotor to rotate back and forth to oscillate. In various embodiments, the electric motor is a voice coil motor. The voice coil motor can be configured to have a coil holder that linearly actuates a permanent magnet therein in and out. The actuator of the voice coil motor can be coupled to a portion of the rotor, causing it to move at least partially through its path. In various embodiments, the actuator 404 can include at least one coil positioned within a stator and outside the path traveled by each rotor magnet, and each coil is electromagnetically coupled to at least one rotor magnet and configured to generate a magnetic field that causes the rotor to move when the coil is energized. The coil can be an electromagnetic coil, a boosted electromagnet, or a similar electromagnet configured to generate a varying magnetic field over time. In various embodiments including at least one coil, the coil can be disposed on the CRM and configured to move the rotor 108 in substantially the same manner as described herein.

[0061] The system 400 can include a stator that houses at least one electromagnetic coil. In various embodiments, the electromagnetic coil is disposed within a recess in the housing such that the electromagnetic coil is flush with the inner surface of the housing. In various embodiments, the electromagnetic coil includes a plurality of coils. In various embodiments, when energized, the resulting magnetic field from the electromagnetic coil causes a magnetic force on the rotor magnet. In various embodiments, the magnetic force causes the rotor to move (e.g., translate, rotate, and / or oscillate). In various embodiments, the electromagnetic coil is positioned outside the path traveled by the rotor magnet such that the rotor magnet and the rotor arm do not contact the electromagnetic coil when the rotor oscillates.

[0062] In various embodiments, the electromagnetic coil includes a plurality of coils, and a voltage is applied through these coils to generate a magnetic field. In various embodiments, each electromagnetic coil includes two or more sets of adjacent coils. In various embodiments, a voltage is applied to the electromagnetic coil to generate a magnetic field that drives the oscillation of the rotor and thereby drives the oscillation of the payload coupled thereto. In various embodiments, a voltage is applied to the electromagnetic coil to generate a magnetic field for controlling the oscillation of the payload (e.g., payload 408). In various embodiments, the applied voltage is oscillated to generate an alternating magnetic field and apply a magnetic force on the rotor magnet on the rotor. In various embodiments, the alternating magnetic field generated by the electromagnetic coil causes the rotor to oscillate at the resonance frequency of the system 400, the oscillator assembly 100, or the rotor. In various embodiments, the payload 408 can be driven by an external actuator (e.g., a voice coil actuator, an electric motor, etc.).

[0063] Still referring to Figure 4, the payload 408 can be coupled to the rotor. In various embodiments, the payload 408 is coupled to the rotor and moves along an arcuate path or at least rotates about the axis of rotation by the rotation of the rotor. In various embodiments, in addition to or instead of the path, the payload 408 can move, rotate, turn, spin, or oscillate along a path different from the rotor. In various embodiments, the payload is coupled to the axle of an externally mounted actuator. In various embodiments, the payload is configured to rotate or oscillate about an axis different from the axis of the externally mounted actuator. In various embodiments, the actuator is configured to move the payload between a first end point and a second end point. In various embodiments, the actuator is configured to move the payload rotationally, and the rotation angle of the rotor from the first end point to the second end point is equal to the rotation angle of the payload. In various embodiments, the payload is configured to move from a third end point to a fourth end point by the actuator. In various embodiments, the actuator is configured to move the payload 408 about the axis of rotation by an angle equal to the angle between the third end point and the fourth end point. In various embodiments, the rotation angle of the rotor from the first end point to the second end point is not equal to the rotation angle of the payload 408. In various embodiments, the rotation angle of the rotor from the third end point to the fourth end point is not equal to the rotation angle of the payload 408. In various embodiments, the payload includes a mirror (e.g., a light deflector used in LIDAR applications). The light deflector (e.g., a mirror) rotates to steer at least one beam emitter by a light source (e.g., a laser) to scan the field of view (FOV). The payload 408 can be coupled to a rotor on which at least one rotor magnet is mounted.

[0064] System 400 may include a controller (not shown for clarity). The controller may be configured to control the movement (e.g., speed) of the rotor. In various embodiments, the controller may be configured to control actuator 404, which in turn controls the speed of the rotor. In various embodiments, the controller includes proportional control. In various embodiments, the controller includes integral control. In various embodiments, the controller includes derivative control. In various embodiments, the controller receives movement data of the rotor as an input (e.g., from a linear or rotary encoder). In various embodiments, the controller receives voltage data supplied to the motor as an input. In various embodiments, the controller receives voltage data supplied to one or more electromagnets (e.g., rotor magnets, stator magnets, and / or electromagnetic coils) as an input. In various embodiments, for example, if the resonance frequency of the system changes as the rotor oscillates, the controller adjusts the speed of the motor and / or the voltage supplied to the electromagnets (e.g., rotor electromagnets, stator electromagnets, and / or electromagnetic coils) based on the resonance frequency of the system. In various embodiments, the controller is configured to maintain the rotor oscillating at the natural resonance frequency of the oscillating system. In various embodiments, electromagnetic coil 504 includes an air core. In various embodiments, the electromagnetic coil includes a magnetic core. In various embodiments, the magnetic core tunes the magnetic field (e.g., magnetic lines of force pass through the magnetic core and increase the magnetic field strength).

[0065] In various embodiments, each electromagnet of, for example, the electromagnetic coil and / or actuator 404 is controlled with an H-bridge. In various embodiments, electromagnetic coils that are opposite each other (i.e., 180 degrees) operate in pairs. In various embodiments, the same H-bridge is used to control electromagnetic coils that are opposite each other (i.e., 180 degrees). In various embodiments, separate and synchronized H-bridges are used to control electromagnetic coils that are opposite each other (i.e., 180 degrees). For example, one H-bridge can be used to control a set of electromagnetic coils, and a different H-bridge can be used to control a second set of electromagnetic coils. In various embodiments, electromagnetic coils that are opposite each other are equidistant from an axis (e.g., a rotational axis).

[0066] In various embodiments, the actuator 404 is controlled by a duty cycle. In various embodiments, the H-bridge has a self-excited configuration, a positive voltage (+V) configuration, a negative voltage (-V) configuration, and a braking operation configuration. In various embodiments, the +V configuration generates a magnetic field that accelerates the rotor magnet in a first direction (e.g., clockwise). In various embodiments, the -V configuration generates a magnetic field that accelerates the rotor magnet in a second direction (e.g., counterclockwise). In various embodiments, in the self-excited configuration, no current passes through the coil of the boost electromagnet, and thus no magnetic field is generated. In various embodiments, the braking operation configuration decelerates the rotor magnet. In the self-excited configuration, all switches in the H-bridge are open (i.e., disconnected). In the braking operation configuration, the boost electromagnet is coupled to ground from both ends of the coil. In the +V configuration, the first end of the coil is coupled to the voltage Vcc at the common collector, and the second end of the coil is coupled to ground. In the -V configuration, the first end of the coil is coupled to ground, and the second end of the coil is coupled to the voltage Vcc at the common collector.

[0067] In various embodiments, the duty cycle switches between a positive voltage and a negative voltage. In various embodiments, the duty cycle includes a square wave that alternates between a positive voltage (+V) and a negative voltage (-V). In various embodiments, the duty cycle is adjusted by increasing or decreasing the amount of time that the positive voltage and / or the negative voltage is applied to the boost electromagnet. In various embodiments, the duty cycle is adjusted by allowing the electromagnetic coil to assume a self-excited configuration. In various embodiments, the duty cycle is adjusted by allowing the electromagnetic coil to assume a braking operation configuration. In various embodiments, the positive voltage and the negative voltage can each be applied during a time window in which the rotor magnet is within an effective range (e.g., an effective angular range) that is suitable for driving the rotor magnet using the magnetic field generated by the electromagnetic coil. In various embodiments, the voltage amplitude in the +V and / or -V configurations can be increased or decreased to adjust the duty cycle of the electromagnetic coil. In various embodiments, the square wave can be continuous. In various embodiments, the square wave is an interrupted square wave (e.g., the electromagnetic coil assumes a self-excited configuration between each positive voltage and / or negative voltage component of the interrupted square wave). In various embodiments, the positive voltage and / or the negative voltage is applied for any suitable amount of time to drive the rotor magnet (e.g., at the resonant frequency of the system). For example, the positive voltage and the negative voltage can each be applied for a time amount d t1 . In various embodiments, d t1 is any suitable amount of time such that the rotor magnet oscillates at the resonant frequency of the system. In another example, the positive voltage and the negative voltage can each be applied for a certain amount of time d t2 in the form of an interrupted square wave, where the electromagnetic coil is in a self-excited configuration during the time d tf between the positive voltage and the negative voltage. In various embodiments, d t2 is less than d t1 . In various embodiments, dt2 Greater than d t1 . In various embodiments, d t2 Approximately equal to d t1 . In various embodiments, d t2 Is any suitable amount of time such that the rotor magnet oscillates at the resonant frequency of the system. In various embodiments, d tf Is any suitable amount of time such that the rotor magnet oscillates at the resonant frequency of the system.

[0068] In various embodiments, in the case where two or more sets of electromagnetic coils (electromagnetic coils, such as Figure 1 The coils 136a - b in are used as the actuator 404) are included near the path of each rotor magnet, the duty cycle of each pair of coils 136 opposite to each other has a predetermined amount of time delay (e.g., the amount of time when the rotor magnet exits the effective range of the first pair of electromagnetic coils and enters the effective range of the second pair of electromagnetic coils). In various embodiments, the middle of each square - wave peak or valley corresponds to the time when the rotor magnet is closest to the corresponding electromagnetic coil being driven.

[0069] Now referring to Figure 5 , a method 500 for oscillating a rotor at a resonant frequency is shown in flowchart form. Method 500 includes, at step 505, providing a system, such as Figure 4 The system 400, where Figure 4 The oscillator assembly 100 of has a resonant frequency. An actuator (such as Figure 4 The actuator 404) is configured to drive the movement of a rotor (such as Figure 1 The rotor 108). The actuator of the system is configured to drive (e.g., oscillate) the rotor at the resonant frequency. The resonant frequency can be Figure 4 The resonant frequency of the oscillator assembly 100. The resonant frequency can be Figure 4 The resonant frequency of the system 400. Figure 4 The system 400 is configured to oscillate a counter - rotating mass block in response to the rotor oscillation, as shown in Figure 6a -b. For clarity, in Figure 6a -b, the rotor arm is visible with the CRM and the energy conversion element (ECE) mounted thereon. The actuator is removed, and any payload coupled to the rotor that may obstruct this planar view is also removed. Figure 6a And 6b Show the oscillations of the CRM and the rotor at the opposite oscillation peaks at the first and third endpoints 604, 612 to the second and fourth endpoints 608, 616.

[0070] Still now referring to Figure 5 , method 500 includes, at step 510, exciting the actuator, thereby causing the rotor to Figure 6aoscillates at a resonant frequency between a first end point 604 and a second end point 608 of -b and, in turn, causes the CRM to oscillate. In various embodiments, the actuator is configured to move a rotor of a component, where the rotor is configured to be coupled to a payload. The exciting actuator may include providing electrical energy to an electromagnet such as an electromagnetic coil. In various embodiments, the actuator includes an electric motor. In various embodiments, the actuator includes at least one electromagnetic coil positioned outside a path traveled by each rotor magnet, where the electromagnetic coil is electromagnetically coupled to the rotor magnet and configured to generate a magnetic field that causes the rotor to move when energized. In various embodiments, the at least one electromagnetic coil is disposed within a stator housing such as a stator. In various embodiments, the actuator is externally coupled to the housing. In various embodiments, the actuator is a voice coil actuator.

[0071] Still referring to Figure 5 , method 500 includes, at step 515, receiving a feedback signal at a controller. The controller may be a Figure 4 component of system 400. In various embodiments, the controller is configured to receive feedback from the actuator and / or an encoder (not shown). In various embodiments, the controller receives motion data of the payload 408 or the rotor (e.g., via a sensing device) and / or voltage data of an electromagnet of the actuator 408, for example. In various embodiments, the sensing device includes a linear encoder. In various embodiments, the sensing device includes a rotary encoder. In various embodiments, the sensing device includes an optical encoder. In various embodiments, the sensing device includes a magnetic encoder. In various embodiments, the sensing device includes a capacitive encoder.

[0072] Still referring to Figure 5, method 500 includes, at step 520, providing a control signal to actuator 408 in response to a feedback signal to control the speed of the rotor. In various embodiments, the controller is configured to receive feedback from actuator 404 and / or an encoder (not shown) and provide a control signal to the actuator to control the speed of the rotor. In various embodiments, the controller receives motion data of payload 408 or the rotor (e.g., via a sensing device) and / or voltage data of an electromagnet such as actuator 404 and provides a control signal to control the speed of the payload. In various embodiments, the control signal is provided to the actuator. In various embodiments, the control signal is provided to a driver circuit configured to energize one or more electromagnets in a stator magnet, a rotor magnet, and / or an electromagnetic coil. In various embodiments, the controller includes proportional control. In various embodiments, the controller includes integral control. In various embodiments, the controller includes derivative control. In various embodiments, the method includes determining whether the rotor is oscillating at a resonance frequency and, when the rotor is not oscillating at the resonance frequency, providing a control signal to the actuator to decrease or increase the speed of the rotor such that the rotor oscillates at the resonance frequency.

[0073] Now referring to Figure 7 , LIDAR system 700 is shown in a block diagram view. The disclosed embodiments may relate to an optical system. As used herein, the term "optical system" includes any system for the generation, detection, and / or manipulation of light. By way of example only, an optical system may include one or more optical components for the generation, detection, and / or manipulation of light. For example, a light source, a lens, a mirror, a prism, a beam splitter, a collimator, polarization optics, an optical modulator, an optical switch, an optical amplifier, an optical detector, an optical sensor, an optical fiber, a semiconductor optical component, while not necessarily each, may each be part of an optical system. In addition to one or more optical components, an optical system may also include other non-optical components such as electrical components, mechanical components, chemical reaction elements, and semiconductor elements. The non-optical components may cooperate with the optical components of the optical system. For example, an optical system may include at least one processor for analyzing the detected light.

[0074] Lidar system

[0075] Consistent with the present disclosure, an optical system may include a LIDAR system or may be included as part of a LIDAR system. As used herein, the term "lidar system" includes any system that can determine a value of a parameter indicative of a distance between a pair of tangible objects based on reflected light. In one embodiment, a lidar system may determine a distance between a pair of tangible objects based on the reflection of light emitted by the lidar system. As used herein, the term "determine distance" includes generating an output indicative of the distance between a pair of tangible objects. The determined distance may represent a physical dimension between a pair of tangible objects. By way of example only, the determined distance may include a flight line distance between the lidar system and another tangible object in the field of view of the lidar system. In another embodiment, a lidar system may determine a relative velocity between a pair of tangible objects based on the reflection of light emitted by the lidar system. Examples of an output indicative of a distance between a pair of tangible objects include: the number of standard length units between the tangible objects (e.g., number of meters, number of inches, number of kilometers, number of millimeters), e.g., the number of any length units (e.g., number of lidar system lengths), a ratio between distances to another length (e.g., a ratio to the length of an object detected in the field of view of the lidar system), an amount of time (e.g., given as a standard unit, any unit, or ratio, e.g., the time it takes for light to travel between the tangible objects), one or more positions (e.g., specified using a convention coordinate system, specified relative to a known position), etc.

[0076] Scan

[0077] Consistent with the present disclosure, a lidar system may be configured to detect objects by scanning the environment of the lidar system. The term "scan the environment of a lidar system" includes illuminating the field of view or a portion of the field of view of the lidar system. In one example, scanning the environment of a lidar system may be achieved by moving or pivoting an optical deflector to deflect light in different directions towards different portions of the field of view. In another example, scanning the environment of a lidar system may be achieved by changing the position (i.e., location and / or orientation) of the sensor relative to the field of view. In another example, scanning the environment of a lidar system may be achieved by changing the position (i.e., location and / or orientation) of the light source relative to the field of view. In yet another example, scanning the environment of a lidar system may be achieved by changing the positions of at least one light source and at least one sensor to move rigidly relative to the field of view (i.e., the relative distances and orientations of the at least one sensor and the at least one light source remain unchanged).

[0078] Field of view

[0079] As used herein, the term "field of view of a lidar system" may include the extent of the observable environment of the lidar system within which objects can be detected. Note that the field of view (FOV) of a lidar system may be affected by various conditions such as, but not limited to: the orientation of the lidar system (e.g., the direction of the optical axis of the lidar system); the position of the LIDAR system relative to the environment (e.g., the distance above the ground and adjacent terrain and obstacles); the operating parameters of the LIDAR system (e.g., transmit power, computational settings, defined operating angles), etc. The field of view of a lidar system can be defined, for example, by a solid angle (e.g., defined using φ, θ angles, where φ and θ are angles defined in a vertical plane, e.g., with respect to the axis of symmetry of the LIDAR system and / or its FOV). In one example, the field of view can also be limited to a certain range (e.g., up to 200m).

[0080] The term "instantaneous field of view" may include the extent of the observable environment within which a lidar system can detect an object at any given moment. For example, for a scanning lidar system, the instantaneous field of view is narrower than the entire FOV of the lidar system, and it can move within the FOV of the lidar system in order to enable detection in other parts of the FOV of the lidar system. The movement of the instantaneous field of view within the FOV of the lidar system can be achieved by moving the light deflector of the lidar system (or external to the lidar system) in order to deflect the light beam going to and / or coming from the lidar system in different directions. In one embodiment, the lidar system may be configured to scan a scene in the environment in which the lidar system operates. As used herein, the term "scene" may include some or all of the objects within the field of view of the lidar system that are in their relative positions and their current states during the duration of the operation of the lidar system. For example, a scene may include ground elements (e.g., earth, roads, grass, ground, sidewalks, road surface markings), sky, man-made objects (e.g., vehicles, buildings, signs), vegetation, people, animals, light projection elements (e.g., flashlights, sun, other LIDAR systems), etc.

[0081] Light source

[0082] Consistent with the disclosed embodiments, a lidar system may include at least one projection unit having a light source configured to project light. As used herein, the term "light source" refers to any device configured to emit light. In one embodiment, the light source may be a laser, such as a solid-state laser, a laser diode, a high-power laser, or an alternative light source, such as a light-emitting diode (LED)-based light source. Additionally, as shown in all of the figures, the light source 712 may emit light in different formats, such as light pulses, continuous wave (CW), quasi-CW, etc. For example, one type of light source that may be used is a vertical-cavity surface-emitting laser (VCSEL). Another light source that may be used is an external cavity diode laser (ECDL). In some examples, the light source may include a laser diode configured to emit light having a wavelength between approximately 650 nm and 1150 nm. Alternatively, the light source may include a laser diode configured to emit light having a wavelength between approximately 800 nm and approximately 7000 nm, between approximately 850 nm and approximately 950 nm, or between approximately 1300 nm and approximately 1600 nm. Unless otherwise specified, the term "about" with respect to a numerical value is defined as a variation of up to 5% relative to the stated value.

[0083] Light deflector

[0084] Consistent with the disclosed embodiments, a lidar system may include at least one scanning unit having at least one light deflector configured to deflect light from a light source so as to scan a field of view. The term "light deflector" includes any mechanism or module configured to deflect light from its original path; for example, mirrors, prisms, controllable lenses, mechanical mirrors, mechanical scanning polygons, active diffraction (e.g., controllable LCD), Risley prisms, non-mechanical - electro - beam control (e.g., made by Vscent), polarization gratings (e.g., provided by Boulder Non - Linear Systems), optical phased arrays (OPAs), and the like. In one embodiment, the light deflector may include a plurality of optical components, such as at least one reflective element (e.g., a mirror), at least one refractive element (e.g., a prism, a lens), etc. In one example, the light deflector may be movable to deflect light to different extents (e.g., discrete extents, or over a continuous degree span). The light deflector may optionally be controllable in different ways (e.g., deflected to an angle α, the deflection angle changed by Δα, the components of the light deflector moved by M millimeters, the speed of change of the deflection angle changed). Additionally, the light deflector may optionally be operable to change the deflection angle within a single plane (e.g., the θ coordinate). Optionally, the light deflector is operable to change the deflection angle within two non - parallel planes (e.g., the θ and φ coordinates). Alternatively or additionally, the light deflector may optionally be operable to change the deflection angle between predetermined settings (e.g., along a predefined scan path) or otherwise. Regarding the use of the light deflector in a lidar system, it should be noted that the light deflector may be used in the outward direction (also referred to as the transmission direction or TX) to deflect light from the light source to at least a portion of the field of view. However, the light deflector may also be used in the inward direction (also referred to as the reception direction or RX) to deflect light from at least a portion of the field of view to one or more light sensors.

[0085] The disclosed embodiments may relate to pivoting a light deflector to scan a field of view. As used herein, the term "pivoting" includes the rotation of an object (particularly a solid object) about one or more axes of rotation while substantially keeping the center of rotation fixed. In one embodiment, pivoting of the light deflector may include rotation of the light deflector about a fixed axis (e.g., an axis), but this is not necessarily the case. For example, in some MEMS mirror implementations, the MEMS mirror may be moved by actuating a plurality of flexures connected to the mirror, and the mirror may undergo some spatial translation in addition to rotation. However, such a mirror may be designed to rotate about a substantially fixed axis and is thus considered to be pivoting in accordance with the present disclosure. In other embodiments, some types of light deflectors (e.g., non-mechanical-electro-beam control, OPA) do not require any moving parts or internal movement to change the deflection angle of the deflected light. Note that any discussion related to moving or pivoting a light deflector also applies, with the necessary modifications, to controlling the light deflector such that it changes the deflection behavior of the light deflector. For example, controlling the light deflector may cause a change in the deflection angle of a beam arriving from at least one direction.

[0086] The disclosed embodiments may relate to receiving reflections associated with a portion of a field of view corresponding to a single instantaneous position of a light deflector. As used herein, the term "instantaneous position of the light deflector" (also referred to as "state of the light deflector") refers to the location or position in space where at least one controlled component of the light deflector is located at an instantaneous time point or over a short time span. In one embodiment, the instantaneous position of the light deflector may be measured relative to a reference frame. The reference frame may be related to at least one fixed point in the lidar system. Alternatively, for example, the reference frame may relate to at least one fixed point in the scene. In some embodiments, the instantaneous position of the light deflector may include some movement of one or more components (e.g., mirrors, prisms) of the light deflector, typically to a limited extent relative to the maximum degree of change during the scanning of the field of view. For example, the scanning of the entire field of view of a lidar system may include changing the deflection of light over a span of 30°, and the instantaneous position of at least one light deflector may include an angular offset of the light deflector within 0.05°. In other embodiments, the term "instantaneous position of the light deflector" may refer to the position of the light deflector during the acquisition of light that is processed to provide data for a single point of a point cloud (or another type of 3D model) generated by the lidar system. In some embodiments, the instantaneous position of the light deflector may correspond to a fixed position or orientation where the deflector pauses for a short period of time during the illumination of a particular sub-region of the lidar field of view. In other cases, the instantaneous position of the light deflector may correspond to a particular position / azimuth along the scan range of the position / azimuth of the light deflector, through which the light deflector passes as part of a continuous or semi-continuous scan of the lidar field of view. In some embodiments, the light deflector may be moved such that during the scan period of the lidar FOV, the light deflector is located at a plurality of different instantaneous positions. In other words, during the time period in which the scan period occurs, the deflector may move through a series of different instantaneous positions / azimuths, and the deflector may reach each different instantaneous position / azimuth at different times during the scan period.

[0087] sensor

[0088] Consistent with the disclosed embodiments, a lidar system may include at least one sensing unit having at least one sensor configured to detect reflections from objects in a field of view. The term "sensor" includes any device, element, or system capable of measuring properties of electromagnetic waves (e.g., power, frequency, phase, pulse timing, pulse duration) and generating an output related to the measured properties. In some embodiments, the at least one sensor may include a plurality of detectors composed of a plurality of detection elements. The at least one sensor may include one or more types of optical sensors. It should be noted that the at least one sensor may include a plurality of sensors of the same type that differ in other characteristics (e.g., sensitivity, size). Other types of sensors may also be used. For different reasons, a combination of several types of sensors may be used, such as improving detection over a range span (especially at close range); improving the dynamic range of the sensors; improving the time response of the sensors; and improving detection under varying environmental conditions (e.g., atmospheric temperature, rainfall, etc.).

[0089] In one embodiment, the at least one sensor includes a SiPM (silicon photomultiplier), which is a solid-state single-photon sensitive device constructed from an array of avalanche photodiodes (APDs), single-photon avalanche diodes (SPADs), and serves as a detection element on a common silicon substrate. In one example, the typical distance between SPADs may be between about 10 μm and about 50 μm, where each SPAD may have a recovery time between about 20 ns and about 700 ns. Similar photomultipliers from other non-silicon materials may also be used. Although SiPM devices operate in a digital / switching mode, SiPMs are analog devices because all micro-units can be read in parallel, making it possible to generate signals in a dynamic range from a single photon to hundreds and thousands of photons detected by different SPADs. Note that the outputs from different types of sensors (e.g., SPADs, APDs, SiPMs, PIN diodes, photodetectors) can be combined together into a single output that can be processed by the processor of the LIDAR system.

[0090] Lidar system

[0091] Consistent with the present disclosure, an optical system may include a LIDAR system or may be included as part of a LIDAR system. As used herein, the term "LIDAR system" includes any system that can determine a value of a parameter indicative of a distance between a pair of tangible objects based on reflected light. In one embodiment, a LIDAR system may determine a distance between a pair of tangible objects based on the reflection of light emitted by the LIDAR system. As used herein, the term "determine distance" includes generating an output indicative of the distance between a pair of tangible objects. The determined distance may represent the physical dimension between a pair of tangible objects. By way of example only, the determined distance may include the line-of-flight distance between the LIDAR system and another tangible object within the field of view of the LIDAR system. In another embodiment, a LIDAR system may determine a relative velocity between a pair of tangible objects based on the reflection of light emitted by the LIDAR system. Examples of outputs indicative of a distance between a pair of tangible objects include: a plurality of standard length units between the tangible objects (e.g., number of meters, inches, kilometers, millimeters), a plurality of arbitrary length units (e.g., number of LIDAR system lengths), a ratio of the distance to another length (e.g., ratio to the length of an object detected within the field of view of the LIDAR system), an amount of time (e.g., given in standard units, arbitrary units, or ratios, such as the time it takes for light to travel between the tangible objects), one or more positions (e.g., specified using a conventional coordinate system, specified relative to a known position), and so on.

[0092] System Overview

[0093] Figure 1Description of a LIDAR system 700, which includes a projection unit 702, a scanning unit 704, a sensing unit 706, and a processing unit 708. The LIDAR system 700 can be installed on a vehicle 710. Consistent with embodiments of the present disclosure, the projection unit 702 can include at least one light source 712, the scanning unit 704 can include at least one light deflector 714, the sensing unit 706 can include at least one sensor 716, and the processing unit 708 can include at least one processor 718. In one embodiment, at least one processor 718 can be configured to coordinate the operation of at least one light source 712 with the movement of at least one light deflector 714 to scan a field of view 720. During a scanning cycle, each instantaneous position of at least one light deflector 714 can be associated with a specific portion 722 of the field of view 720. Additionally, the lidar system 700 can include at least one optional optical window 724 for directing light projected toward the field of view 720 and / or receiving light reflected from an object in the field of view 720. The optional optical window 724 can be used for different purposes, such as collimation of the projected light and focusing of the reflected light. In one embodiment, the optional optical window 724 can be an aperture, a flat window, a lens, or any other type of optical window.

[0094] Consistent with the present disclosure, the lidar system 700 can be used in autonomous or semi-autonomous road vehicles (e.g., cars, buses, vans, trucks, and any other land vehicles). An autonomous road vehicle having the lidar system 700 can scan its environment and drive to a destination without human input. Similarly, the LIDAR system 700 can also be used in autonomous / semi-autonomous aircraft (e.g., UAVs, drones, quadcopters, and any other airborne vehicles or devices); or in autonomous or semi-autonomous watercraft (e.g., boats, ships, submarines, or any other vessels). An autonomous aircraft and vessel having the LIDAR system 700 can scan its environment and navigate to a destination autonomously or using a remote human operator. According to one embodiment, the vehicle 710 (road vehicle, aircraft, or vessel) can use the lidar system 700 to assist in detecting and scanning the environment in which the vehicle 710 operates.

[0095] It should be noted that the LIDAR system 700 or any one of its components can be used with any one of the exemplary embodiments and methods disclosed herein. Additionally, although some aspects of the LIDAR system 700 are described with respect to an exemplary vehicle-based LIDAR platform, the LIDAR system 700, any component thereof, or any process described herein can be applicable to LIDAR systems of other platform types.

[0096] In some embodiments, the lidar system 700 may include one or more scanning units 704 to scan the environment around the vehicle 710. The LIDAR system 700 may be attached or mounted to any part of the vehicle 710. The sensing unit 706 may receive reflections from the environment around the vehicle 710 and transmit a reflection signal indicative of light reflected from an object in the field of view 720 to the processing unit 708. Consistent with the present disclosure, the scanning unit 704 may be mounted to or incorporated into a bumper, fender, side panel, spoiler, roof, headlight assembly, taillight assembly, mirror assembly, hood, trunk, or any other suitable part of the vehicle 710 that can accommodate at least a portion of the lidar system. In some cases, the LIDAR system 700 may capture a complete surround view of the environment of the vehicle 710. Accordingly, the LIDAR system 700 may have a 360-degree horizontal field of view. In one example, as Figure 1 shown in A, the lidar system 700 may include a single scanning unit 704 mounted on the roof of the vehicle 710. Alternatively, the lidar system 700 may include multiple scanning units (e.g., two, three, four, or more scanning units 704), each scanning unit having a field of view such that the overall horizontal field of view is covered by a 360-degree scan around the vehicle 710. Those skilled in the art will understand that the LIDAR system 700 may include any number of scanning units 704 arranged in any manner, each scanning unit having a field of view of 80° to 720° or less, depending on the number of units employed. Additionally, a 360-degree horizontal field of view may also be obtained by mounting multiple LIDAR systems 700 on the vehicle 710, each LIDAR system 700 having a single scanning unit 704. However, one or more LIDAR systems 700 need not provide a full 360° field of view, and a narrower field of view may be useful in some situations. For example, the vehicle 710 may require a first lidar system 700 with a 75° field of view when viewing in front of the vehicle and may require a second lidar system 700 with a similar FOV (optionally with a lower detection range) when viewing backward. Note also that different vertical field of view angles may also be implemented.

[0097] Accordingly, in a first exemplary embodiment, the present invention is an oscillator assembly. In a first aspect of the first exemplary embodiment, the assembly includes: a stator; a rotor configured to move relative to the stator with one degree of freedom. The rotor further includes: at least one rotor magnet disposed on the rotor, wherein the at least one rotor magnet is configured to move with the rotor between a first end point and a second end point; a counter-rotating mass (CRM) rotatably and elastically mounted on the stator, wherein the rotor is rotatably mounted on the CRM, and the CRM is configured to move relative to the stator and the rotor with one degree of freedom. The CRM further includes: at least a first energy conversion element (ECE) disposed on the CRM, wherein the first ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM; and at least a second ECE disposed on the CRM, wherein the second ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM.

[0098] In a second aspect of the first exemplary embodiment, the assembly further includes at least a second rotor magnet disposed on the rotor, wherein the second rotor magnet is configured to move with the rotor between a third end point and a fourth end point. The remaining features and exemplary features of the second aspect are as described above for the first aspect of the first exemplary embodiment.

[0099] In a third aspect of the first exemplary embodiment, the CRM further includes at least a third and a fourth energy conversion element (ECE) disposed thereon, the third ECE being configured to transfer torque from the rotor to the CRM, and the fourth ECE being configured to transfer torque from the rotor to the CRM. The remaining features and exemplary features of the third aspect are as described above for any one of the first aspect and the second aspect of the first exemplary embodiment.

[0100] In a fourth aspect of the first exemplary embodiment, each of the at least first and second ECEs includes a spring configured to transfer torque from the rotor to the CRM. The remaining features and exemplary features of the fourth aspect are as described above for any one of the first to third aspects of the first exemplary embodiment.

[0101] In a fifth aspect of the first exemplary embodiment, each of the at least first and second energy conversion elements includes a magnet. The remaining features and exemplary features of the fifth aspect are as described above for the first to fourth aspects of the first exemplary embodiment.

[0102] In a sixth aspect of the first exemplary embodiment, at least one rotor magnet is magnetically coupled to each of at least a first and a second ECE, and the at least one rotor magnet generates a magnetic field that repels the magnets of each of the first and second ECEs, thereby causing the at least first and second ECEs to move the CRM. The remaining features and exemplary features of the sixth aspect are as described above for any one of the first through fifth aspects of the first exemplary embodiment.

[0103] In a seventh aspect of the first exemplary embodiment, the CRM is configured to rotate and oscillate relative to the stator. The remaining features and exemplary features of the seventh aspect are as described above for any one of the first through sixth aspects of the first exemplary embodiment.

[0104] In an eighth aspect of the first exemplary embodiment, the CRM is elastically mounted on the stator by at least one bearing. The remaining features and exemplary features of the eighth aspect are as described above for any one of the first through seventh aspects of the first exemplary embodiment.

[0105] In a ninth aspect of the first exemplary embodiment, at least one bearing is a flexure. The remaining features and exemplary features of the ninth aspect are as described above for any one of the first through eighth aspects of the first exemplary embodiment.

[0106] In a tenth aspect of the first exemplary embodiment, each rotor magnet includes a permanent magnet. The remaining features and exemplary features of the tenth aspect are as described above for any one of the first through ninth aspects of the first exemplary embodiment.

[0107] In an eleventh aspect of the first exemplary embodiment, the rotor and the CRM each have a moment of inertia, wherein the moment of inertia of the CRM is at least 180 times greater than the moment of inertia of the rotor. The remaining features and exemplary features of the eleventh aspect are as described above for any one of the first through tenth aspects of the first exemplary embodiment.

[0108] In a twelfth aspect of the first exemplary embodiment, the rotor is coupled to a payload. The remaining features and exemplary features of the twelfth aspect are as described above for any one of the first through eleventh aspects of the first exemplary embodiment.

[0109] In a thirteenth aspect of the first exemplary embodiment, the payload is a mirror. The remaining features and exemplary features of the thirteenth aspect are as described above for any one of the first through twelfth aspects of the first exemplary embodiment.

[0110] In a second exemplary embodiment, the invention is a system. In a first aspect of the second exemplary embodiment, the system includes any one of the oscillator assemblies according to any aspect of the first exemplary embodiment and an actuator coupled to the rotor, the actuator being configured to move the rotor.

[0111] In a second aspect of the second exemplary embodiment, the actuator is an electric motor. The remaining features and exemplary features of the second aspect are as described above with respect to the first aspect of the second exemplary embodiment.

[0112] In a third aspect of the second exemplary embodiment, the electric motor is a voice coil motor. The remaining features and exemplary features of the third aspect are as described above with respect to the first and second aspects of the second exemplary embodiment.

[0113] In a fourth aspect of the second exemplary embodiment, the actuator includes at least one coil positioned within the stator and outside of the path traveled by each of the rotor magnets, wherein the at least one coil is electromagnetically coupled to the at least one rotor magnet and is configured to generate a magnetic field that causes the rotor to move when energized. The remaining features and exemplary features of the fourth aspect are as described above with respect to any one of the first through third aspects of the second exemplary embodiment.

[0114] In a fifth aspect of the second exemplary embodiment, the system further includes a controller configured to receive a feedback signal and provide a control signal to the actuator to control the speed of the rotor. The remaining features and exemplary features of the fifth aspect are as described above with respect to any one of the first through fourth aspects of the second exemplary embodiment.

[0115] In a third exemplary embodiment, the present invention is an oscillating assembly. In a first aspect of the third exemplary embodiment, the oscillating assembly includes: a stator; a rotor configured to move relative to the stator with one degree of freedom; a counter-rotating mass (CRM) elastically and rotatably mounted on the stator, wherein the rotor is rotatably mounted on the CRM, and the CRM is configured to oscillate rotationally relative to the stator and rotate with one degree of freedom relative to the stator and the rotor. The rotor includes at least a first rotor magnet and a second rotor magnet, each of the first rotor magnet and the second rotor magnet being mounted on the rotor, the first rotor magnet being configured to move with the rotor between a first end point and a second end point, and the second rotor magnet being configured to move with the rotor between a third end point and a fourth end point; the CRM includes at least a first torque transfer magnet, a second torque transfer magnet, a third torque transfer magnet, and a fourth torque transfer magnet disposed on the CRM near the first end point, the second end point, the third end point, and the fourth end point of the rotor respectively, each torque transfer magnet generating a magnetic field configured to repel the rotor magnet; the first rotor magnet is magnetically coupled to the first torque transfer magnet and the second torque transfer magnet, and the second rotor magnet is magnetically coupled to the third torque transfer magnet and the fourth torque transfer magnet, the first rotor magnet generating a magnetic field that moves the CRM by the first torque transfer magnet and the second torque transfer magnet, and the second rotor magnet generating a magnetic field that moves the CRM by the third torque transfer magnet and the fourth torque transfer magnet. The stator includes at least one coil positioned outside the path traveled by each of the rotor magnets, wherein the at least one coil is electromagnetically coupled to the rotor magnets and is configured to generate a magnetic field that moves the rotor when energized.

[0116] In a second aspect of the third exemplary embodiment, the rotor and the CRM each have a moment of inertia, wherein the moment of inertia of the CRM is at least 180 times greater than the moment of inertia of the rotor. The remaining features and exemplary features of the second aspect are as described above with respect to the first aspect of the third exemplary embodiment.

[0117] In a third aspect of the third exemplary embodiment, the CRM further includes a first end, a second end, and a central portion disposed between the first end and the second end, the central portion having a cutout therethrough, wherein the rotor is disposed within the cutout, and the rotor and the CRM are coaxially disposed. The remaining features and exemplary features of the third aspect are as described above with respect to any one of the first aspect and the second aspect of the third exemplary embodiment.

[0118] In a fourth aspect of the third exemplary embodiment, the CRM is elastically mounted on the stator by at least one flexure. The remaining features and exemplary features of the fourth aspect are as described above with respect to any one of the first to third aspects of the third exemplary embodiment.

[0119] In a fifth aspect of the third exemplary embodiment, the CRM is elastically mounted on the stator by four flexures. The remaining features of the fifth aspect and the exemplary features are as described above for any one of the first through fourth aspects of the third exemplary embodiment.

[0120] In a fourth exemplary embodiment, the invention is a method of oscillating a rotor at a resonant frequency. In a first aspect of the fourth exemplary embodiment, the method includes: providing a system as described above for any one of the second exemplary embodiment and its aspects, wherein the assembly is an oscillator including a resonant frequency, and wherein the actuator is configured to drive the movement of the rotor at the resonant frequency, wherein the counter-rotating mass is configured to oscillate in response to the oscillation of the rotor; and exciting the actuator such that the rotor and the counter-rotating mass oscillate between the first end point and the second end point at the resonant frequency.

[0121] In a second aspect of the fourth exemplary embodiment, the system further includes a controller, and the method further includes receiving a feedback signal at the controller; and providing a control signal to the actuator to control the speed of the rotor. The remaining features of the second aspect and the exemplary features are as described above for the first aspect of the fourth exemplary embodiment.

[0122] In a fifth exemplary embodiment, the invention is a LIDAR scanning assembly. In a first aspect of the fifth exemplary embodiment, the system includes: a light source configured to generate at least one light beam; an oscillator assembly including a stator; a rotor configured to move relative to the stator with one degree of freedom. The rotor further includes: at least one rotor magnet disposed on the rotor, wherein the at least one rotor magnet is configured to move with the rotor between a first end point and a second end point; a counter-rotating mass (CRM) rotatably and elastically mounted on the stator, wherein the rotor is rotatably mounted on the CRM, and the CRM is configured to move relative to the stator and the rotor with one degree of freedom. The CRM further includes: at least a first energy conversion element (ECE) disposed on the CRM, wherein the first ECE is configured to transfer torque from the rotor to the CRM to cause rotation of the CRM; and at least a second ECE disposed on the CRM, wherein the second ECE is configured to transfer torque from the rotor to the CRM to cause rotation of the CRM. The system includes a light deflector coupled to the rotor, a first actuator coupled to the rotor, the first actuator configured to rotate the light deflector about a first scan axis, a second actuator configured to rotate the light deflector about a second scan axis, the light deflector configured to deflect at least one light beam into a field of view (FOV), and at least one processor configured to control the light source, the first and second actuators to cause the light deflector to scan the FOV.

[0123] In a second aspect of the fifth exemplary embodiment, the lidar scanning system further includes at least one sensor configured to detect at least one light beam reflected from an object located in the field of view, wherein at least one processor is configured to: receive from the at least one sensor a reflection signal indicative of the at least one light beam reflected from the object; and generate, based on the reflection signal, a point cloud representation of the system environment within at least a portion of the field of view. The remaining features and exemplary features of the second aspect are as described in any of the aspects above with respect to the first aspect of the fifth exemplary embodiment.

[0124] In a third aspect of the fifth exemplary embodiment, the first scanning axis and the second scanning axis are perpendicular to each other. The remaining features and exemplary features of the third aspect are as described in any of the aspects above with respect to the first to second aspects of the fifth exemplary embodiment.

[0125] In a fourth aspect of the fifth exemplary embodiment, the assembly further includes at least a second rotor magnet disposed on the rotor, wherein the second rotor magnet is configured to move with the rotor between a third end point and a fourth end point. The remaining features and exemplary features of the fourth aspect are as described in any of the aspects above with respect to the first to third aspects of the fifth exemplary embodiment.

[0126] In a fifth aspect of the fifth embodiment, the CRM further includes at least third and fourth energy conversion elements (ECEs) disposed thereon, the third ECE being configured to transfer torque from the rotor to the CRM, and the fourth ECE being configured to transfer torque from the rotor to the CRM. The remaining features and exemplary features of the fifth aspect are as described in any of the aspects above with respect to the first to fourth aspects of the fifth exemplary embodiment.

[0127] In a sixth aspect of the fifth embodiment, each of at least the first ECE and the second ECE includes a spring configured to transfer torque from the rotor to the CRM. The remaining features and exemplary features of the sixth aspect are as described in any of the aspects above with respect to the first to fifth aspects of the fifth exemplary embodiment.

[0128] In a seventh aspect of the fifth exemplary embodiment, each of at least the first and second energy conversion elements includes a magnet. The remaining features and exemplary features of the seventh aspect are as described in any of the aspects above with respect to the first to sixth aspects of the fifth exemplary embodiment.

[0129] In an eighth aspect of the fifth exemplary embodiment, at least one rotor magnet is magnetically coupled to each of at least the first and second ECEs, and the at least one rotor magnet generates a magnetic field that repels the magnets of each of the first and second ECEs, thereby causing the at least first and second ECEs to move the CRM. The remaining features and exemplary features of the eighth aspect are as described in any of the aspects above with respect to the first to seventh aspects of the fifth exemplary embodiment.

[0130] In a ninth aspect of the fifth exemplary embodiment, the CRM is configured to rotate and oscillate relative to the stator. The remaining features and exemplary features of the ninth aspect are as described above for any one of the first through eighth aspects of the fifth exemplary embodiment.

[0131] In a tenth aspect of the fifth exemplary embodiment, the CRM is elastically mounted on the stator by at least one bearing. The remaining features and exemplary features of the tenth aspect are as described above for any one of the first through ninth aspects of the fifth exemplary embodiment.

[0132] In an eleventh aspect of the fifth exemplary embodiment, the at least one bearing is a flexure. The remaining features and exemplary features of the eleventh aspect are as described above for any one of the first through tenth aspects of the fifth exemplary embodiment.

[0133] In a twelfth aspect of the fifth exemplary embodiment, each rotor magnet includes a permanent magnet. The remaining features and exemplary features of the twelfth aspect are as described above for any one of the first through eleventh aspects of the fifth exemplary embodiment.

[0134] In a thirteenth aspect of the fifth exemplary embodiment, the rotor and the CRM each have a moment of inertia, and wherein the moment of inertia of the CRM is at least 180 times greater than the moment of inertia of the rotor. The remaining features and exemplary features of the thirteenth aspect are as described above for any one of the first through twelfth aspects of the fifth exemplary embodiment.

[0135] In a fourteenth aspect of the fifth exemplary embodiment, the first and / or second actuator is an electric motor. The remaining features and exemplary features of the fourteenth aspect are as described above for any one of the first through thirteenth aspects of the fifth exemplary embodiment.

[0136] In a fifteenth aspect of the fifth exemplary embodiment, the electric motor is a voice coil motor. The remaining features and exemplary features of the fifteenth aspect are as described above for any one of the first through fourteenth aspects of the fifth exemplary embodiment.

[0137] In a sixteenth aspect of the fifth exemplary embodiment, the first actuator includes at least one coil positioned within the stator and outside of the path traveled by each of the rotor magnets, wherein the at least one coil is electromagnetically coupled to the at least one rotor magnet and is configured to generate a magnetic field that causes the rotor to move when energized. The remaining features and exemplary features of the sixteenth aspect are as described above for any one of the first through fifteenth aspects of the fifth exemplary embodiment.

[0138] In a seventeenth aspect of the fifth exemplary embodiment, the system further includes a controller configured to receive a feedback signal and provide a control signal to the first actuator to control the speed of the rotor. The remaining features and the exemplary features of the seventeenth aspect are as described above for any one of the first to sixteenth aspects of the fifth exemplary embodiment.

[0139] While the disclosed subject matter has been described herein in accordance with certain preferred embodiments, those skilled in the art will recognize that various modifications and improvements can be made to the disclosed subject matter without departing from its scope. Additionally, although the various features of one embodiment of the disclosed subject matter may be discussed herein or shown in the drawings of one embodiment and not in other embodiments, it should be apparent that the various features of one embodiment can be combined with one or more features of another embodiment or features from multiple embodiments.

[0140] In addition to the specific embodiments claimed below, the disclosed subject matter is also directed to other embodiments having any other possible combinations of the dependent features claimed below and those features disclosed above. Thus, the specific features presented in the dependent claims and disclosed above can be combined with each other in other ways within the scope of the disclosed subject matter such that the disclosed subject matter should also be considered to specifically relate to other embodiments having any other possible combinations. Accordingly, the foregoing description of specific embodiments of the disclosed subject matter has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the disclosed subject matter to the forms disclosed.

[0141] It will be apparent to those skilled in the art that various modifications and variations can be made to the methods and systems of the disclosed subject matter without departing from the spirit or scope of the disclosed subject matter. Accordingly, the disclosed subject matter is intended to include modifications and variations within the scope of the appended claims and their equivalents.

Claims

1. An oscillator assembly, the assembly comprising: a stator; a rotor configured to move relative to the stator with one degree of freedom, the rotor further comprising: at least one rotor magnet disposed on the rotor, wherein the at least one rotor magnet is configured to move with the rotor between a first end point and a second end point; a counter-rotating mass (CRM) rotatably and elastically mounted on the stator, wherein the rotor is rotatably mounted on the CRM, the CRM being configured to move relative to the stator and the rotor with one degree of freedom, the CRM further comprising: at least a first energy conversion element (ECE) disposed on the CRM, wherein the first ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM; and at least a second ECE disposed on the CRM, wherein the second ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM.

2. The assembly according to claim 1, wherein, the assembly further comprises at least a second rotor magnet disposed on the rotor, wherein the second rotor magnet is configured to move with the rotor between a third end point and a fourth end point.

3. The assembly according to claim 2, wherein, the CRM further comprises at least a third and a fourth energy conversion element (ECE) disposed thereon, the third ECE being configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM, and the fourth ECE being configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM.

4. The assembly according to claim 1, wherein, each of the at least first ECE and second ECE comprises a spring configured to transfer torque from the rotor to the CRM.

5. The assembly according to claim 1, wherein, each of the at least first energy conversion element and the second energy conversion element comprises a magnet.

6. The assembly according to claim 5, wherein, the at least one rotor magnet is magnetically coupled to each of the at least first ECE and second ECE, the at least one rotor magnet generating a magnetic field that repels the magnet of each of the first ECE and second ECE, thereby causing the at least first ECE and second ECE to move the CRM.

7. The assembly according to claim 1, wherein, the CRM is configured to rotate and oscillate relative to the stator.

8. The assembly according to claim 1, wherein, the CRM is elastically mounted on the stator by at least one bearing.

9. The assembly according to claim 8, wherein, the at least one bearing is a flexure.

10. The assembly according to claim 1, wherein, each rotor magnet comprises a permanent magnet.

11. The assembly according to claim 1, wherein, the rotor and the CRM each have a moment of inertia, and wherein the moment of inertia of the CRM is at least 180 times greater than the moment of inertia of the rotor.

12. The component according to claim 1, wherein, the rotor is coupled to the payload.

13. The component according to claim 12, wherein, the payload is an optical deflector.

14. A system, comprising: the oscillator component according to claim 1; and an actuator coupled to the rotor, the actuator being configured to move the rotor.

15. The system according to claim 14, wherein, the actuator is an electric motor.

16. The system according to claim 15, wherein, the electric motor is a voice coil motor.

17. The system according to claim 14, wherein, the actuator includes at least one coil positioned within the stator and outside the path traveled by each of the rotor magnets of the rotor magnets, wherein the at least one coil is electromagnetically coupled to the at least one rotor magnet and is configured to generate a magnetic field that moves the rotor when energized.

18. The system according to claim 14, wherein, the system further includes a controller configured to receive a feedback signal and provide a control signal to the actuator to control the speed of the rotor.

19. An oscillation component, comprising: a stator; a rotor configured to move relative to the stator in one degree of freedom; a counter-rotating mass (CRM) elastically and rotatably mounted on the stator, wherein the rotor is rotatably mounted on the CRM, the CRM being configured to oscillate rotationally relative to the stator and rotate in one degree of freedom relative to the stator and the rotor, and further wherein: the rotor includes at least a first rotor magnet and a second rotor magnet, the first rotor magnet and the second rotor magnet are each mounted on the rotor, the first rotor magnet is configured to move with the rotor between a first end point and a second end point, the second rotor magnet is configured to move with the rotor between a third end point and a fourth end point; the CRM includes at least a first torque transfer magnet, a second torque transfer magnet, a third torque transfer magnet, and a fourth torque transfer magnet disposed on the CRM adjacent to the first end point, the second end point, the third end point, and the fourth end point of the rotor, respectively, each torque transfer magnet generating a magnetic field configured to repel the rotor magnet; the first rotor magnet is magnetically coupled to the first torque transfer magnet and the second torque transfer magnet, and the second rotor magnet is magnetically coupled to the third torque transfer magnet and the fourth torque transfer magnet, the first rotor magnet generates a magnetic field that causes the first torque transfer magnet and the second torque transfer magnet to move the CRM, and the second rotor magnet generates a magnetic field that causes the third torque transfer magnet and the fourth torque transfer magnet to move the CRM; and further wherein: The stator includes at least one coil positioned outside the path traversed by each of the rotor magnets, wherein the at least one coil is electromagnetically coupled to the rotor magnets and configured to generate a magnetic field upon energization that causes the rotor to move.

20. The oscillating assembly according to claim 19, wherein, the rotor and the CRM each have a moment of inertia, and wherein the moment of inertia of the CRM is at least 180 times greater than the moment of inertia of the rotor.

21. The oscillating assembly according to claim 19, wherein, the CRM further includes a first end, a second end, and a central portion disposed between the first end and the second end, the central portion having a cutout therethrough, wherein the rotor is disposed within the cutout, and the rotor and the CRM are coaxially disposed.

22. The oscillating assembly according to claim 19, wherein, the CRM is elastically mounted on the stator by at least one flexure.

23. The oscillating assembly according to claim 22, wherein, the CRM is elastically mounted on the stator by four flexures.

24. A method of oscillating a rotor at a resonant frequency, the method comprising: providing a system according to claim 14, wherein the assembly is an oscillator including a resonant frequency, and wherein the actuator is configured to drive the movement of the rotor at the resonant frequency, and wherein the counter-rotating mass (CRM) is configured to oscillate in response to the oscillation of the rotor; and actuating the actuator so that the rotor and the counter-rotating mass oscillate between the first end point and the second end point at the resonant frequency.

25. The method according to claim 24, wherein, the system further includes a controller, and wherein the method further includes receiving a feedback signal at the controller; and providing a control signal to the actuator to control the speed of the rotor.

26. A LIDAR scanning system, comprising: a light source configured to generate at least one light beam; an oscillator assembly, the assembly including: a stator; a rotor configured to move relative to the stator with one degree of freedom, the rotor further including: at least one rotor magnet disposed on the rotor, wherein the at least one rotor magnet is configured to move with the rotor between a first end point and a second end point; a counter-rotating mass (CRM) rotatably and elastically mounted on the stator, wherein the rotor is rotatably mounted on the CRM, the CRM being configured to move relative to the stator and the rotor with one degree of freedom, the CRM further including: at least a first energy conversion element (ECE) disposed on the CRM, wherein the first ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM; and at least a second ECE disposed on the CRM, wherein the second ECE is configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM; a light deflector coupled to the rotor; A first actuator coupled to the rotor, the first actuator being configured to rotate the optical deflector about a first scan axis; A second actuator configured to rotate the optical deflector about a second scan axis, the optical deflector being configured to deflect the at least one light beam into a field of view (FOV); At least one processor configured to control the light source, the first actuator, and the second actuator to cause the optical deflector to scan the FOV.

27. The LIDAR scanning system according to claim 26, further comprising at least one sensor configured to detect the at least one light beam reflected from an object located in the field of view, and wherein the at least one processor is configured to: Receive a reflection signal from the at least one sensor indicative of the at least one light beam reflected from the object; and Generate a point cloud representation of the environment of the system within at least a portion of the field of view based on the reflection signal.

28. The LIDAR scanning system according to claim 26, wherein, The first scan axis and the second scan axis are perpendicular to each other.

29. The LIDAR scanning system according to claim 26, wherein, The assembly further includes at least a second rotor magnet disposed on the rotor, wherein the second rotor magnet is configured to move between a third end point and a fourth end point together with the rotor.

30. The LIDAR scanning system according to claim 29, wherein, The CRM further includes at least third and fourth energy conversion elements (ECEs) disposed thereon, the third ECE being configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM, and the fourth ECE being configured to transfer torque from the rotor to the CRM, thereby causing rotation of the CRM.

31. The LIDAR scanning system according to claim 26, wherein, Each of the at least first ECE and second ECE includes a spring configured to transfer torque from the rotor to the CRM.

32. The LIDAR scanning system according to claim 26, wherein, Each of the at least first energy conversion element and the second energy conversion element includes a magnet.

33. The LIDAR scanning system according to claim 32, wherein, The at least one rotor magnet is magnetically coupled to each of the at least first ECE and the second ECE, and the at least one rotor magnet generates a magnetic field that repels the magnets of each of the first ECE and the second ECE, thereby causing the at least first ECE and the second ECE to move the CRM.

34. The LIDAR scanning system according to claim 26, wherein, The CRM is configured to rotate and oscillate relative to the stator.

35. The LIDAR scanning system according to claim 26, wherein, The CRM is elastically mounted on the stator by at least one bearing.

36. The LIDAR scanning system according to claim 35, wherein, The at least one bearing is a flexure member.

37. The LIDAR scanning system according to claim 26, wherein, each rotor magnet includes a permanent magnet.

38. The LIDAR scanning system according to claim 26, wherein, the rotor and the CRM each have a moment of inertia, and the moment of inertia of the CRM is at least 180 times greater than the moment of inertia of the rotor.

39. The system according to claim 26, wherein, the first actuator and / or the second actuator is an electric motor.

40. The system according to claim 39, wherein, the electric motor is a voice coil motor.

41. The system according to claim 26, wherein, the first actuator includes at least one coil, the at least one coil is positioned within the stator and outside the path traveled by each of the rotor magnets, wherein the at least one coil is electromagnetically coupled to the at least one rotor magnet and is configured to generate a magnetic field that causes the rotor to move when energized.

42. The system according to claim 26, wherein, the system further includes a controller configured to receive a feedback signal and provide a control signal to the first actuator to control the speed of the rotor.