Optical element feeding and discharging device for ion beam polishing equipment

Abstract

The invention discloses an optical element feeding and discharging device for ion beam polishing equipment, which comprises a moving platform (1) and a base (2) mounted on the moving platform (1), and is characterized by further comprising a first turnover mechanism (4), a second turnover mechanism (5) and a third turnover mechanism (6), the first turnover mechanism (4) comprises a first turnover frame (41) hinged on the base (2) and a first rotating mechanism (42) for driving the first turnover frame (41) to turn over by 90 degrees; the second overturning mechanism (5) comprises a second overturning frame (51) hinged to the first overturning frame (41) and a second rotating mechanism (52) used for driving the second overturning frame (51) to overturn by 90 degrees; the locking mechanism (6) is used for locking and unlocking the first turnover frame (41) and the second turnover frame (51); the element clamp (7) can be mounted on the second turnover frame (51) in a left-right sliding manner; and the translation mechanism (8) is used for driving the element clamp (7) to translate along the left-right direction.

Description

Technical Field

[0001] The present invention relates to the field of precision optical component processing, and particularly refers to an optical element loading and unloading device for an ion beam polishing equipment. Background Art

[0002] Ion beam polishing is usually used for the final processing of ultra-precision optical components. When processing optical components by traditional contact polishing methods, due to the inevitable problems such as polishing head wear, edge effect, and subsurface damage in their contact processing methods, the improvement of processing accuracy is restricted. Ion beam polishing uses an ion beam instead of a traditional polishing head, and removes the surface material of the optical component through the ion sputtering effect between the ion beam and the optical component. It can not only avoid the above problems, but also has the characteristics of high precision and high convergence.

[0003] Ion beam polishing realizes material removal based on the principle of atomic sputtering, enabling the removal accuracy of the ion beam polishing for component materials to reach the atomic level and the processing accuracy to reach the nanometer level. It is considered the optical component polishing technology with the highest processing accuracy and the best shaping effect. Most optical glasses are hard and brittle materials. When flipping ultra-large aperture optical components with a diameter of meters or more, a flipping device is required to complete the flipping. For details, reference can be made to the Chinese patent "A Loading and Unloading Device for an Ion Beam Polishing Equipment" with the patent application number CN202310748104.X.

[0004] However, in the above solution, on the one hand, the flipping device can only achieve a 90° flip of the component, and is only applicable to the vertical flipping loading and unloading of optical components in a horizontal ion beam polishing equipment, and is not applicable to the horizontal flipping loading and unloading of optical components in a vertical ion beam polishing equipment; on the other hand, the optical component flipping device is easily affected by the gravity of the component itself during the flipping process. Especially when the center of gravity of the component passes through the flipping axis, it will cause the flipping device to quickly drop in the rotation direction, resulting in an impact, which is extremely likely to cause chipping and damage to the component, and there is a greater risk. Summary of the Invention

[0005] The first technical problem to be solved by the present invention is to provide an optical element loading and unloading device for an ion beam polishing equipment that can be applicable to both horizontal ion beam polishing equipment and vertical ion beam polishing equipment in view of the current situation of the prior art.

[0006] The second technical problem to be solved by the present invention is to provide an optical element loading and unloading device for an ion beam polishing equipment that can ensure the safety of the optical element during the process of flipping from the horizontal state to the vertical state.

[0007] The technical solution adopted by the present invention to solve the above first technical problem is: an optical element loading and unloading device for an ion beam polishing equipment, including a moving platform and a base installed on the moving platform, characterized in that: it further includes

[0008] The first flipping mechanism includes a first flipping frame hinged to the base with a rotation axis extending in the left - right direction, and a first rotating mechanism for driving the first flipping frame to flip 90° relative to the base;

[0009] The second flipping mechanism includes a second flipping frame hinged to the first flipping frame with a rotation axis extending in the left - right direction, and a second rotating mechanism for driving the second flipping frame to flip 90° relative to the first flipping frame;

[0010] The locking mechanism is used to lock and unlock the first flipping frame and the second flipping frame;

[0011] The component fixture, which is used to clamp the optical component, is slidably mounted on the second flipping frame in the left - right direction; and

[0012] The translation mechanism is used to drive the component fixture to translate in the left - right direction relative to the second flipping frame;

[0013] In the state where the first flipping frame and the second flipping frame are unlocked from each other, the component fixture can be driven by the second rotating mechanism to flip 90° clockwise from the initial position to the first flipping position along with the second flipping frame;

[0014] In the state where the first flipping frame and the second flipping frame are locked to each other, the component fixture can be driven by the first rotating mechanism to flip 90° clockwise from the first flipping position to the second flipping position along with the first flipping frame.

[0015] In order to avoid affecting the subsequent flipping of the second flipping frame while driving the second flipping frame to flip, when the component fixture is in the first flipping position, the optical component clamped by the component fixture is vertically arranged;

[0016] The second rotating mechanism includes

[0017] The pushing arm, which is used to support the second flipping frame, is hinged to the base; and

[0018] The second driving member is used to drive the pushing arm to flip relative to the first flipping frame;

[0019] During the process of the component fixture flipping from the initial position to the first flipping position, the pushing arm always supports under the second flipping frame, so that the pushing arm can push the second flipping frame to flip synchronously under the drive of the second driving member;

[0020] During the process of the component fixture flipping from the first flipping position to the second flipping position, the pushing arm releases the support for the second flipping frame.

[0021] To further solve the above-mentioned second technical problem, a hinged frame is provided at the rear of the base. The top of the front side frame of the hinged frame has a first turning shaft extending in the left-right direction. The rear side of the upper part of the first turning frame has a first rotating seat extending backward. The first rotating seat is rotatably sleeved on the outer periphery of the first turning shaft;

[0022] The front side of the lower part of the first turning frame has a second turning shaft extending in the left-right direction. The rear part of the second turning frame has a second rotating seat extending upward. The second rotating seat is rotatably sleeved on the outer periphery of the second turning shaft;

[0023] The front side of the bottom of the hinged frame has a pin shaft extending in the left-right direction. The rear end of the push arm has a third rotating seat extending upward. The third rotating seat is rotatably sleeved on the outer periphery of the pin shaft;

[0024] During the process of the component fixture flipping from the initial position to the first flipping position, the pin shaft and the second turning shaft are coaxially arranged, and the center of gravity of the second turning frame and the component fixture is always located in front of the second turning shaft.

[0025] To define two limit positions during the flipping process of the first turning frame, the front side and the top side of the hinged frame respectively have a first limiting surface and a second limiting surface;

[0026] In the state where the component fixture is in the first flipping position, the first turning frame stands upright on the front side of the hinged frame and abuts against the first limiting surface;

[0027] In the state where the component fixture is in the second flipping position, the first turning frame lies flat on the top side of the hinged frame and abuts against the second limiting surface.

[0028] To define two limit positions during the flipping process of the second turning frame, a limiting bracket is provided on the front side of the upper part of the first turning frame;

[0029] In the state where the component fixture is in the initial position, the second turning frame lies flat on the top side of the base;

[0030] In the state where the component fixture is in the first flipping position, the second turning frame stands upright on the front side of the first turning frame and abuts against the limiting bracket.

[0031] To lock and unlock the first turning frame and the second turning frame, a first locking piece is provided on the front side of the second turning frame. The first locking piece has a first locking hole penetrating in the left-right direction;

[0032] The described locking mechanism includes

[0033] A first mounting seat, installed on the front side of the upper part of the first flipping frame, having a first limiting groove for the first locking piece to extend into;

[0034] A first locking pin, extending in the left - right direction and capable of sliding in and out of the first limiting groove left - right; and

[0035] A first driving assembly, used to drive the first locking pin to move left - right;

[0036] In the locked state, the first locking piece extends into the first limiting groove, and the first locking pin is inserted into the first locking hole;

[0037] In the unlocked state, the first locking pin disengages from the first locking hole.

[0038] In order to drive the second flipping frame to translate while avoiding affecting the subsequent loading of the component fixture, the translation mechanism includes

[0039] A guide rail, arranged on the second flipping frame in the left - right direction;

[0040] A sliding table, slidably installed on the guide rail;

[0041] A lead screw, extending in the left - right direction and threadedly connected to the sliding table;

[0042] A third driving member, used to drive the lead screw to rotate around its own axis; and

[0043] A locking assembly, used to lock and unlock the sliding table and the component fixture.

[0044] In order to lock and unlock the sliding table and the component fixture, a second locking piece is provided on the component fixture, and the second locking piece has a second locking hole arranged through in the front - back direction;

[0045] The described locking assembly includes

[0046] A second mounting seat, installed on the sliding table, having a second limiting groove for the second locking piece to extend into;

[0047] A second locking pin, extending in the front - back direction and capable of sliding in and out of the second limiting groove front - back; and

[0048] A second driving assembly, used to drive the second locking pin to move front - back;

[0049] In the locked state, the second locking piece extends into the second limiting groove, and the second locking pin is inserted into the second locking hole;

[0050] In the unlocked state, the second locking pin disengages from the second lock hole.

[0051] To adjust the distance of the optical element in the vertical direction, a lifting mechanism is further included for driving the base to lift relative to the moving platform.

[0052] To drive the base to lift smoothly relative to the moving platform, a first slide rail extending in the front-rear direction is installed on the moving platform, and a second slide rail extending in the front-rear direction is installed on the base;

[0053] The lifting mechanism includes

[0054] A first scissor arm and a second scissor arm arranged in an X-shaped cross, which are hinged at the cross, the first ends of the first scissor arm and the second scissor arm are respectively hinged on the moving platform and the base, and the second ends of the first scissor arm and the second scissor arm can be respectively installed in the second slide rail and the first slide rail in a rolling manner; and

[0055] A first driving member for driving the first scissor arm and the second scissor arm to rotate relative to each other.

[0056] Compared with the prior art, the advantages of the present invention are:

[0057] (1) The second flipping device can achieve a 90° flip of the optical element from the horizontal direction to the vertical direction, which is suitable for the vertical flipping and loading / unloading of optical elements in a horizontal ion beam polishing device;

[0058] The combination of the second flipping device and the first flipping device can achieve a 180° flip of the optical element in the horizontal direction, which is suitable for the horizontal flipping and loading / unloading of optical elements in a vertical ion beam polishing device;

[0059] (2) During the flipping process of the second flipping device, the center of gravity of the second flipping frame and the element fixture is always in front of the second flipping axis. In this way, the second driving member is always in a one-way pressure application state, avoiding the impact and crosstalk caused by the center of gravity of the entire flipping component crossing the second flipping axis during the flipping process, and ensuring the safety of the optical element during the flipping process. Brief Description of the Drawings

[0060] Figure 1 It is a three-dimensional structural schematic diagram of an embodiment of the optical element loading / unloading device for an ion beam polishing device of the present invention when the element fixture is in the initial position;

[0061] Figure 2 is Figure 1 The three-dimensional structural schematic diagram during the process of the element fixture flipping from the initial position to the first flipping position in ;

[0062] Figure 3 For Figure 2 the three-dimensional structural schematic diagram after the component fixture in

[0062] is flipped to the first flipping position;

[0063] Figure 4 For Figure 3 the three-dimensional structural schematic diagram of the first locking piece and the locking mechanism in

[0062] ;

[0064] Figure 5 For Figure 4 the longitudinal sectional view of

[0062] ;

[0065] Figure 6 For Figure 3 the three-dimensional structural schematic diagram in another direction of

[0062] ;

[0066] Figure 7 For Figure 3 the three-dimensional structural schematic diagram after the pushing arm in

[0062] is reset;

[0067] Figure 8 For Figure 7 the three-dimensional structural schematic diagram after the component fixture in

[0062] is flipped to the second flipping position;

[0068] Figure 9 For Figure 8 the three-dimensional structural schematic diagram during the process of the component fixture moving out to the right from the second flipping frame in

[0062] ;

[0069] Figure 10 For Figure 9 the three-dimensional structural schematic diagram of the second flipping frame, the component fixture and the translation mechanism in

[0062] ;

[0070] Figure 11 For Figure 10 the three-dimensional structural schematic diagram of the second locking piece and the locking component in

[0062] ;

[0071] Figure 12 For Figure 11 the transverse sectional view of

[0062] . Specific Embodiments

[0072] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments.

[0073] In the description and claims of the present invention, terms indicating directions, such as "front", "rear", "upper", "lower", "left", "right", "side", "top", "bottom", etc., are used to describe various exemplary structural parts and elements of the present invention. However, these terms are used here only for the convenience of description and are determined based on the exemplary orientations shown in the drawings. Since the disclosed embodiments of the present invention can be arranged in different directions, these terms indicating directions are only for illustration and should not be regarded as limitations. For example, "upper" and "lower" are not necessarily limited to the directions opposite to or consistent with the direction of gravity.

[0074] As Figures 1 to 12 shown, it is a preferred embodiment of the optical element loading and unloading device for an ion beam polishing apparatus according to the present invention. The optical element loading and unloading device includes a moving platform 1, a base 2, a lifting mechanism 3, a first flipping mechanism 4, a second flipping mechanism 5, a locking mechanism 6, an element fixture 7, and a translation mechanism 8.

[0075] Among them, universal wheels 11 are installed at the four corners of the bottom of the moving platform 1; four first slide rails 12 arranged side by side in the left - right direction are installed on the top side of the rear part of the moving platform 1, and each first slide rail 12 extends in the front - rear direction.

[0076] The base 2 is located above the moving platform 1. Specifically, four second slide rails 21 arranged side by side in the left - right direction and corresponding to the above - mentioned first slide rails 12 one by one are installed on the bottom side of the rear part of the base 2, and each second slide rail 21 extends in the front - rear direction; a hinged frame 22 is provided on the top side of the rear part of the base 2. The top of the front - side frame of the hinged frame 22 has a first flipping shaft 221 extending in the left - right direction. The front side and the top side of the hinged frame 22 respectively have a first limiting surface 222 and a second limiting surface 223, and a pin shaft 224 extending in the left - right direction is provided on the front side of the bottom of the hinged frame 22.

[0077] The number of the lifting mechanisms 3 is two groups, and they are arranged at intervals in the left - right direction between the moving platform 1 and the base 2. In this embodiment, each lifting mechanism 3 includes a first scissor arm 31, a second scissor arm 32, and a first driving member 33.

[0078] Specifically, the number of the first scissor arms 31 and the second scissor arms 32 is two and corresponds to the above - mentioned first slide rail 1. The two second scissor arms 32 are connected by a connecting rod extending in the left - right direction. The first scissor arm 31 and the corresponding second scissor arm 32 are arranged in an X - shaped cross - arrangement and are hinged at the intersection. The front ends of each first scissor arm 31 and second scissor arm 32 are respectively hinged to the top side of the front part of the moving platform 1 and the bottom side of the front part of the base 2. The rear ends of each first scissor arm 31 and second scissor arm 32 can be rotatably installed in the above - mentioned second slide rail 21 and first slide rail 12 respectively;

[0079] The first driving member 33 is an electric push rod. The bottom end of the electric push rod is rotatably connected to the top side of the front part of the moving platform 1, and the top end of the electric push rod is rotatably connected to the connecting rod between the two second scissor arms 32, and is used to drive the relative rotation of the first scissor arm 31 and the second scissor arm 32, thereby driving the base 2 to lift relative to the moving platform 1;

[0080] The above - mentioned lifting mechanism 3 can be applicable to ion beam polishing apparatuses with different element clamping heights, and at the same time can ensure that the entire base 2 is always in the same horizontal plane during the lifting process.

[0081] The first flipping mechanism 4 includes a first flipping frame 41 hinged to the base 2 and a first rotating mechanism 42 for driving the first flipping frame 41 to flip 90° relative to the base 2.

[0082] Specifically, the rear side of the upper part of the first flipping frame 41 has a first rotating seat 411 extending backward, and the first rotating seat 411 is rotatably sleeved on the outer periphery of the first flipping shaft 221; the front side of the lower part of the first flipping frame 41 has a second flipping shaft 412 extending in the left-right direction; the front side of the upper part of the first flipping frame 41 has a limiting bracket 413;

[0083] The first rotating mechanism 42 is an electric push rod, the bottom end of the electric push rod is rotatably connected to the top side of the rear part of the base 2, and the top end of the electric push rod is rotatably connected to the rear side of the middle part of the first flipping frame 41, for driving the bottom end of the first flipping frame 41 to flip up and down around the first flipping shaft 221.

[0084] The second flipping mechanism 5 includes a second flipping frame 51 hinged to the first flipping frame 41 and a second rotating mechanism 52 for driving the second flipping frame 51 to flip 90° relative to the first flipping frame 41.

[0085] Specifically, the rear part of the second flipping frame 51 has a second rotating seat 511 extending upward, and the second rotating seat 511 is rotatably sleeved on the outer periphery of the second flipping shaft 412; the front side of the second flipping frame 51 is provided with a first locking piece 512, and the first locking piece 512 has a first locking hole 5121 penetrating in the left-right direction; both the front and rear sides of the second flipping frame 51 are provided with first guide bars 513 extending in the left-right direction, and the inner sides of the first guide bars 513 are rotatably connected with a plurality of rollers 5131 arranged at intervals in the left-right direction;

[0086] The second rotating mechanism 52 includes a pushing arm 521 and a second driving member 522. The pushing arm 521 is located below the second flipping frame 51 and is used to support the second flipping frame 51. The rear end of the pushing arm 521 has a third rotating seat 5211 extending upward, and the third rotating seat 5211 is rotatably sleeved on the outer periphery of the pin shaft 224; the second driving member 522 is an electric push rod, the bottom end of the electric push rod is rotatably connected to the bottom side of the front part of the base 2, and the top end of the electric push rod passes through the base 2 and is rotatably connected to the front end of the pushing arm 521, for driving the pushing arm 521 to flip up and down around the pin shaft 224, and further pushing the front end of the second flipping frame 51 to flip up and down around the second flipping shaft 412.

[0087] The locking mechanism 6 is used to lock and unlock the first flipping frame 41 and the second flipping frame 51, and includes a first mounting seat 61, a first locking pin 62 and a first driving assembly 63.

[0088] Specifically, the first mounting seat 61 is mounted on the front side of the upper part of the first flipping frame 41. The front side of the first mounting seat 61 has a first limiting groove 611 for the first locking piece 512 to extend into;

[0089] The first locking pin 62 extends in the left - right direction and can slide in and out of the first limiting groove 611 in the left - right direction;

[0090] The first driving assembly 63 is an electric cylinder, and its power output end is connected to the first locking pin 62 to drive the first locking pin 62 to move left and right;

[0091] In the locked state, the first locking piece 512 extends into the first limiting groove 611, and the first locking pin 62 is inserted into the first locking hole 5121;

[0092] In the unlocked state, the first locking pin 62 disengages from the first locking hole 5121.

[0093] The component fixture 7 is used to clamp the optical component. Specifically, both the front and rear sides of the component fixture 7 are provided with second guiding strips 71 that extend in the left - right direction and correspond to the above - mentioned first guiding strips 513 one by one. Each second guiding strip 71 is arranged inside the corresponding first guiding strip 513 and is in frictional contact with the corresponding roller 5131, so as to realize the left - right sliding of the component fixture 7 on the second flipping frame 51. In addition, the edge of the left end of the first guiding strip 513 bends inward and extends to form a limiting piece 5132 for limiting the second guiding strip 71, so as to prevent the component fixture 7 from moving leftward out of the second flipping frame 51; a second locking piece 72 is provided on the left side of the component fixture 7, and the second locking piece 72 has a second locking hole 721 arranged through in the front - rear direction;

[0094] Driven by the first flipping mechanism 4 and the second flipping mechanism 5, the above - mentioned component fixture 7 has an initial position, a first flipping position, and a second flipping position:

[0095] In the state where the first flipping frame 41 and the second flipping frame 51 are unlocked from each other, the component fixture 7 can be driven by the second rotating mechanism 52 to flip 90° clockwise from the initial position along with the second flipping frame 51 to the first flipping position. During this process, the pushing arm 521 always supports below the second flipping frame 51, so that the pushing arm 521 drives the second flipping frame 51 to flip synchronously under the drive of the second driving member 522. At the same time, the pin shaft 224 and the second flipping shaft 412 are coaxially arranged, and the center of gravity of the second flipping frame 51 and the component fixture 7 is always located in front of the second flipping shaft 412;

[0096] In the state where the first flipping frame 41 and the second flipping frame 51 are locked to each other, the component fixture 7 can be driven by the first rotating mechanism 42 to flip 90° clockwise from the first flipping position to the second flipping position along with the first flipping frame 41. During this process, the pushing arm 521 releases the support for the second flipping frame 51, so as to make way for the second flipping frame 51.

[0097] In the state where the component fixture 7 is in the initial position, as Figure 1 shown, the first flipping frame 41 stands upright on the front side of the articulated frame 22 and abuts against the first limiting surface 222, the second flipping frame 51 lies flat on the top side of the base 2, and the optical component clamped by the optical fixture 7 is horizontally arranged with the surface to be processed facing upward.

[0098] In the state where the component fixture 7 is in the first flipping position, as Figure 3 and Figure 6 shown, the first flipping frame 41 stands upright on the front side of the articulated frame 22 and abuts against the first limiting surface 222, the second flipping frame 51 stands upright on the front side of the first flipping frame 41 and abuts against the limiting bracket 413, and the optical component clamped by the optical fixture 7 is vertically arranged with the surface to be processed facing backward.

[0099] In the state where the component fixture 7 is in the second flipping position, as Figure 8 shown, the first flipping frame 41 lies flat on the top side of the articulated frame 22 and abuts against the second limiting surface 223, the second flipping frame 51 lies flat on the top side of the first flipping frame 41 and abuts against the limiting bracket 413, and the optical component clamped by the optical fixture 7 is horizontally arranged with the surface to be processed facing downward.

[0100] The translation mechanism 8 includes a guide rail 81, a sliding table 82, a lead screw 83, a third driving member 84 and a locking assembly 85.

[0101] Specifically, the guide rail 81 is arranged on the top side of the second flipping frame 51 along the left - right direction;

[0102] The sliding table 82 is slidably mounted on the guide rail 81;

[0103] The lead screw 83 extends along the left - right direction and its two ends are rotatably connected to the second flipping frame 51, and the lead screw 83 is threadedly connected to the above - mentioned sliding table 82;

[0104] The third driving member 84 is a motor, and its power output end is connected to the left end of the lead screw 83 for driving the lead screw 83 to rotate around its own axis;

[0105] The locking assembly 85 is used to lock and unlock the sliding table 82 and the component fixture 7, and includes a second mounting seat 851, a second locking pin 852 and a second driving assembly 853;

[0106] Specifically, the second mounting seat 851 is mounted on the top side of the slide 82, and the right side of the second mounting seat 851 has a second limiting groove 8511 for the second locking piece 72 to extend into;

[0107] The second locking pin 852 extends in the front-to-back direction and can slide in and out of the second limiting groove 8511;

[0108] The second driving assembly 853 is a cylinder, whose power output end is connected to the second locking pin 852, so as to drive the second locking pin 852 to move forward and backward. In this embodiment, the piston rod of the cylinder and the second locking pin 852 are integrated.

[0109] In the locked state, the second locking piece 72 extends into the second limiting groove 8511, and the second locking pin 852 is inserted into the second locking hole 721. At this time, the third driving member 84 is started to drive the screw rod 83 to rotate, and the slide 82 slides along the left and right directions, thereby driving the component fixture 7 to translate along the left and right directions relative to the second flip frame 51;

[0110] In the unlocked state, the second locking pin 852 is disengaged from the second locking hole 721 .

[0111] The working principle of this embodiment is as follows:

[0112] (1) Loading process:

[0113] ① Positioning and component clamping: The mobile platform 1 changes the direction of movement through the universal wheel 11, moves the entire optical component loading and unloading device to the component loading and unloading position of the ion beam polishing equipment, and completes the optical component clamping. At this time, the component fixture 7 is in the initial position, such as Figure 1 As shown, the first flip frame 41 stands upright on the front side of the hinged frame 22 and abuts against the first limit surface 222, the second flip frame 51 is laid flat on the top side of the base 2, and the optical element clamped by the optical fixture 7 is arranged horizontally with the surface to be processed facing upward;

[0114] ② The second turning frame turns over: The second driving member 522 drives the push arm 521 to turn upward around the pin shaft 224, thereby pushing the front end of the second turning frame 51 to turn upward around the second turning axis 412 (such as Figure 2 As shown in the figure, during this process, the component fixture 7 and the second flip frame 51 are synchronously flipped upward in the clockwise direction. At the same time, the pin shaft 224 is coaxially arranged with the second flip axis 412, and the center of gravity of the second flip frame 51 and the component fixture 7 is always located in front of the second flip axis 412. In this way, the second driving member 522 is always in a unidirectional pressure state, which avoids the impact and movement caused by the center of gravity of the entire flip component passing over the second flip axis 412 during the flipping process, thereby ensuring the safety of the optical element during the flipping process;

[0115] ③ The second flip frame is locked in place: After the second flip frame 51 contacts the limit bracket 413, the second driving member 522 stops moving. At this time, the component fixture 7 is located in the first flip position, such as Figure 3 and Figure 6 As shown, the first flip frame 41 stands on the front side of the hinged frame 22 and abuts against the first limiting surface 222, the second flip frame 51 stands on the front side of the first flip frame 41 and abuts against the limiting bracket 413, the optical element clamped by the optical fixture 7 is arranged vertically with the surface to be processed facing backward, and the first locking piece 512 extends into the first limiting groove 611; then the first driving assembly 63 drives the first locking pin 62 to be inserted into the first locking hole 5121 to complete the position locking of the second flip frame 51;

[0116] ④ Push arm recovery: Figure 7 As shown, the second driving member 522 drives the driving push arm 521 to flip downward around the pin shaft 224 and reset, so as to prevent the push arm 521 from interfering with the subsequent flipping of the second flip frame 51;

[0117] ⑤ The first flip frame flips: The first rotating mechanism 42 drives the bottom end of the first flip frame 41 to flip upward around the first flip axis 221, thereby driving the second flip frame 51 and the component fixture 7 to flip upward synchronously, until the first flip frame 41 contacts the second limit surface 223, and the first rotating mechanism 42 stops and locks. At this time, the component fixture 7 is in the second flip position, such as Figure 8 As shown, the first flip frame 41 is laid flat on the top side of the hinged frame 22 and abuts against the second limit surface 223, the second flip frame 51 is laid flat on the top side of the first flip frame 41 and abuts against the limit bracket 413, and the optical element clamped by the optical fixture 7 is arranged horizontally with the surface to be processed facing downward;

[0118] ⑥ Workpiece transmission process: The first driving member 33 drives the first scissor arm 31 and the second scissor arm 32 to rotate relative to each other, thereby driving the base 2 to rise and fall relative to the mobile platform 1 to adjust the vertical distance; then the third driving member 84 drives the screw rod 83 to rotate, and the slide 82 slides along the left and right direction, thereby driving the component fixture 7 to move rightward relative to the second flip frame 51 (such as Figure 9 As shown), until the component fixture 7 enters the processing station of the ion beam polishing equipment; finally, the second driving assembly 853 drives the second locking pin 852 to disengage from the second locking hole 721 to complete the position unlocking of the component fixture 7, and the loading of the optical element is completed;

[0119] During the above entire loading process, first, the second rotating mechanism 52 is used to push the second flipping frame 51 to complete the flipping of the optical element from the horizontal direction to the vertical direction, and then the first rotating mechanism 42 is used to push the first flipping frame 41 to complete the flipping of the optical element from the vertical direction to the horizontal direction, realizing a 180° flipping of the optical element, which is applicable to the horizontal flipping loading and unloading of the optical element of the vertical ion beam polishing equipment; of course, it is also possible to only use the second rotating mechanism 52 to push the second flipping frame 51 to complete the flipping of the optical element from the horizontal direction to the vertical direction, which is applicable to the vertical flipping loading and unloading of the optical element of the horizontal ion beam polishing equipment;

[0120] (2) The unloading process is opposite to the loading process.

Claims

1. An optical element loading and unloading device for ion beam polishing equipment, comprising a mobile platform (1) and a base (2) mounted on the mobile platform (1), characterized in that: Also includes A first turning mechanism (4) comprises a first turning frame (41) hinged on the base (2) and having a rotation axis extending in the left-right direction, and a first rotating mechanism (42) for driving the first turning frame (41) to turn 90 degrees relative to the base (2); A second turning mechanism (5) comprises a second turning frame (51) hinged on the first turning frame (41) and having a rotation axis extending in the left-right direction, and a second rotating mechanism (52) for driving the second turning frame (51) to turn 90 degrees relative to the first turning frame (41); A locking mechanism (6) for locking and unlocking the first flip frame (41) and the second flip frame (51); An element fixture (7) is used to clamp the optical element and is mounted on the second flip frame (51) so as to be slidable left and right; as well as A translation mechanism (8) for driving the component fixture (7) to translate in a left-right direction relative to the second flip frame (51); When the first flip frame (41) and the second flip frame (51) are unlocked from each other, the component fixture (7) can be driven by the second rotating mechanism (52) to flip 90 degrees clockwise from the initial position to the first flip position along with the second flip frame (51); When the first flip frame (41) and the second flip frame (51) are locked with each other, the component clamp (7) can be driven by the first rotating mechanism (42) to flip 90 degrees clockwise from the first flip position to the second flip position along with the first flip frame (41).

2. The optical element loading and unloading device according to claim 1, characterized in that: When the component fixture (7) is located at the first flipping position, the optical component clamped by the component fixture (7) is arranged vertically; The second rotating mechanism (52) comprises A pushing arm (521), used for supporting the second turning frame (51), hinged on the base (2); as well as a second driving member (522), used for driving the pushing arm (521) to flip relative to the first flip frame (41); During the process of the component fixture (7) flipping from the initial position to the first flipping position, the pushing arm (521) is always supported below the second flipping frame (51), so that the pushing arm (521) pushes the second flipping frame (51) to flip synchronously under the drive of the second driving member (522); During the process of the component fixture (7) flipping from the first flipping position to the second flipping position, the pushing arm (521) releases the support for the second flipping frame (51).

3. The optical element loading and unloading device according to claim 2, characterized in that: A hinged frame (22) is provided at the rear of the base (2); a first flip shaft (221) extending in the left-right direction is provided at the top of the front frame of the hinged frame (22); a first rotating seat (411) extending backward is provided at the rear side of the upper portion of the first flip frame (41); the first rotating seat (411) is rotatably sleeved on the outer periphery of the first flip shaft (221); The front side of the lower part of the first turning frame (41) has a second turning shaft (412) extending in the left-right direction, and the rear part of the second turning frame (51) has a second rotating seat (511) extending upward, and the second rotating seat (511) is rotatably sleeved on the outer periphery of the second turning shaft (412); The front side of the bottom of the hinged frame (22) has a pin shaft (224) extending in the left-right direction, and the rear end of the push arm (521) has a third rotating seat (5211) extending upward, and the third rotating seat (5211) is rotatably sleeved on the outer periphery of the pin shaft (224); During the process of the component fixture (7) flipping from the initial position to the first flipping position, the pin shaft (224) is coaxially arranged with the second flipping axis (412), and the center of gravity of the second flipping frame (51) and the component fixture (7) is always located in front of the second flipping axis (412).

4. The optical element loading and unloading device according to claim 3, characterized in that: The front side and the top side of the hinged frame (22) respectively have a first limiting surface (222) and a second limiting surface (223); When the component fixture (7) is located at the first flipping position, the first flip frame (41) stands upright on the front side of the hinged frame (22) and abuts against the first limiting surface (222); When the component fixture (7) is located at the second flipping position, the first flip frame (41) is laid flat on the top side of the hinged frame (22) and abuts against the second limiting surface (223).

5. The optical element loading and unloading device according to claim 3, characterized in that: The front side of the upper portion of the first turning frame (41) is provided with a limiting bracket (413); When the component fixture (7) is located at the initial position, the second flip frame (51) is laid flat on the top side of the base (2); When the component fixture (7) is located at the first flipping position, the second flipping frame (51) stands upright on the front side of the first flipping frame (41) and abuts against the limiting bracket (413).

6. The optical element loading and unloading device according to claim 3, characterized in that: A first locking plate (512) is provided on the front side of the second flip frame (51), and the first locking plate (512) has a first locking hole (5121) penetrating in the left-right direction; The locking mechanism (6) comprises A first mounting seat (61) is mounted on the front side of the upper portion of the first flip frame (41) and has a first limiting groove (611) for the first locking piece (512) to extend into; A first locking pin (62) extends in the left-right direction and can slide left-right into and out of the first limiting groove (611); and A first driving assembly (63), used for driving the first locking pin (62) to move left and right; In the locked state, the first locking piece (512) extends into the first limiting groove (611), and the first locking pin (62) is inserted into the first locking hole (5121); In the unlocked state, the first locking pin (62) is disengaged from the first locking hole (5121).

7. The optical element loading and unloading device according to claim 1, characterized in that: The translation mechanism (8) comprises A guide rail (81) is arranged on the second turning frame (51) along the left-right direction; A slide table (82) is mounted on the guide rail (81) so as to slide leftward and rightward; A screw rod (83) extending in the left-right direction and threadedly connected to the slide table (82); A third driving member (84) is used to drive the screw rod (83) to rotate around its own axis; as well as The locking assembly (85) is used to lock and unlock the slide (82) and the component fixture (7).

8. The optical element loading and unloading device according to claim 7, characterized in that: The component fixture (7) is provided with a second locking piece (72), and the second locking piece (72) has a second locking hole (721) penetrating along the front-to-back direction; The locking assembly (85) comprises A second mounting seat (851), mounted on the slide (82), having a second limiting groove (8511) for the second locking piece (72) to extend into; A second locking pin (852) extends in the front-to-back direction and can slide forward and backward into and out of the second limiting groove (8511); and A second driving assembly (853) for driving the second locking pin (852) to move forward and backward; In the locked state, the second locking piece (72) extends into the second limiting groove (8511), and the second locking pin (852) is inserted into the second locking hole (721); In the unlocked state, the second locking pin (852) is disengaged from the second locking hole (721).

9. The optical element loading and unloading device according to any one of claims 1 to 8, characterized in that: It also includes a lifting mechanism (3) for driving the base (2) to rise and fall relative to the mobile platform (1).

10. The optical element loading and unloading device according to claim 9, characterized in that: The mobile platform (1) is provided with a first slide rail (12) extending in the front-rear direction, and the base (2) is provided with a second slide rail (21) extending in the front-rear direction; The lifting mechanism (3) comprises A first scissor arm (31) and a second scissor arm (32) are arranged in an X-shaped cross-arrangement, the first scissor arm (31) and the second scissor arm (32) are hinged at the intersection, the first ends of the first scissor arm (31) and the second scissor arm (32) are respectively hinged on the mobile platform (1) and the base (2), and the second ends of the first scissor arm (31) and the second scissor arm (32) are respectively rollably mounted in the second slide rail (21) and the first slide rail (12); as well as The first driving member (33) is used to drive the first scissor arm (31) and the second scissor arm (32) to rotate relative to each other.

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