Substrate processing apparatus

Abstract

The purpose of the present invention is to provide a substrate processing apparatus capable of confirming whether or not a replacement member is a replacement member to be installed on an installation table immediately before the replacement member is installed on the installation table. A printing apparatus, which is a substrate processing apparatus provided with a lower carrier that is a replacement member and an installation table on which the lower carrier is detachably installed, is provided with: a lower surface-side identifier which is provided on the lower surface of the lower carrier and on which individual identification information of the lower carrier is recorded, and an upper surface-side identifier which is provided on the lower surface of the lower carrier and on which individual identification information of the lower carrier is recorded; and a printing unit camera that captures an image of the lower surface-side identifier from below the lower receiving body positioned above the setting table in order to be set on the setting table. The printing apparatus includes a determination unit that performs individual identification of the lower carrier on the basis of the lower surface-side identifier captured by the printing unit camera, and determines whether the lower carrier is suitable to be installed on the installation table.

Description

Technical Field

[0001] The present invention relates to a substrate processing apparatus for performing a predetermined process on a substrate. Background Art

[0002] Conventionally, as a substrate processing device for performing a predetermined process on a substrate, for example, a printing device for printing a paste such as solder on a substrate through a mask is known (see Patent Document 1 below). In the printing device described in Patent Document 1, the substrate is received from below by a substrate support portion (lower receiving body), and the substrate support portion is freely loadable and unloadable relative to a support table (setting table) that supports the substrate. Furthermore, when the substrate support portion is loaded and unloaded (replaced) relative to the support table, the substrate support portion is mounted on a fixture having a frame body having a shape substantially the same as that of the mask and is positioned above the support table, and the support table is raised in a manner close to the fixture to receive the substrate support portion from the fixture.

[0003] In the printing device of Patent Document 1, a plurality of types of lower receiving bodies corresponding to the types of substrates are prepared and stored in a storage section. Furthermore, when the type of substrate to be produced is changed, after the previously installed lower receiving body is removed from the setting table, the lower receiving body corresponding to the changed substrate is taken out from the storage section together with the clamp.

[0004] In the printing device of Patent Document 1, a barcode as an individual identifier is attached to the lower receiving body, so that it can be confirmed whether the correct lower receiving body is stored in the storage section.

[0005] Prior art literature

[0006] Patent Literature

[0007] Patent Document 1: Japanese Patent Application Publication No. 2020-100147 Summary of the invention

[0008] Problems to be solved by the invention

[0009] However, in the conventional substrate processing apparatus, whether the lower receiving body to be placed on the setting table (that is, before the setting table) is suitable is not confirmed. Therefore, there is a situation where the lower receiving body that should not be placed on the setting table is mistakenly placed on the setting table, which needs to be improved.

[0010] Therefore, an object of the present invention is to provide a substrate processing apparatus capable of confirming whether a replacement component is a replacement component to be installed on a mounting table immediately before the replacement component is installed on a mounting table.

[0011] Means for solving problems

[0012] The substrate processing apparatus of the present invention includes a replacement member and a setting table for detachably setting the replacement member, and performs a predetermined process on the substrate by setting the replacement member on the setting table. The substrate processing apparatus includes: a lower surface side identifier provided on the lower surface of the replacement member and recording individual identification information of the replacement member; an imaging unit that images the lower surface side identifier from below the replacement member located above the setting table for setting on the setting table; and a determination unit that performs individual identification of the replacement member based on the lower surface side identifier imaged by the imaging unit and determines whether the replacement member is suitable for setting on the setting table.

[0013] Advantages of the Invention

[0014] According to the present invention, it is possible to confirm whether the replacement member to be set on the setting table is the replacement member that should be set on the setting table before the replacement member is set on the setting table. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a side view of a printing apparatus according to an embodiment of the present invention.

[0016] Figure 2 is a side view of a printing unit included in a printing apparatus according to an embodiment of the present invention.

[0017] Figure 3 is a perspective view showing a setting table and a lower receiving body included in a printing unit according to an embodiment of the present invention together.

[0018] Figure 4 (a) and (b) of are perspective views showing a setting table and a substrate set on the setting table included in a printing unit according to an embodiment of the present invention together.

[0019] Figure 5 (a) of is a perspective view from above of a lower receiving body included in a printing unit according to an embodiment of the present invention, and (b) is a perspective view from below of the lower receiving body included in a printing unit according to an embodiment of the present invention.

[0020] Figure 6 (a) of is a side view of a setting table included in a printing unit according to an embodiment of the present invention observed from one direction, and (b) is a side view of the setting table included in a printing unit according to an embodiment of the present invention observed from another direction.

[0021] Figure 7 is a perspective view showing a mask and a guide rail included in a printing unit according to an embodiment of the present invention together.

[0022] Figure 8Figures (a) and (b) are perspective views showing a jig included in a printing apparatus according to an embodiment of the present invention and a lower receiving body mounted on the jig.

[0023] Figure 9 Figures (a) and (b) are side cross-sectional views of a jig included in a printing apparatus according to an embodiment of the present invention.

[0024] Figure 10 is a block diagram showing a control system of a printing apparatus according to an embodiment of the present invention.

[0025] Figure 11 is a flowchart showing a process of a printing operation of a printing apparatus according to an embodiment of the present invention.

[0026] Figure 12 is a schematic view showing a state of acquiring first corresponding information by a first information reader included in a printing apparatus according to an embodiment of the present invention.

[0027] Figure 13 is a schematic view showing a state of acquiring second corresponding information by a second information reader included in a printing apparatus according to an embodiment of the present invention.

[0028] Figure 14 is a view showing an example of third corresponding information acquired by a control device of a printing unit according to an embodiment of the present invention.

[0029] Figure 15 Figures (a) and (b) are top views of a part of a printing unit according to an embodiment of the present invention.

[0030] Figure 16 is a side view of a printing unit according to an embodiment of the present invention.

[0031] Figure 17 Figures (a) and (b) are side views for explaining the operation of a printing unit according to an embodiment of the present invention.

[0032] Figure 18 Figures (a) and (b) are side views for explaining the operation of a printing unit according to an embodiment of the present invention.

[0033] Figure 19 Figures (a) and (b) are side views for explaining the operation of a printing unit according to an embodiment of the present invention.

[0034] Figure 20 Figure (a) is a top view of a setting table included in a printing unit according to an embodiment of the present invention, and figure (b) is a top view showing the setting table and a lower receiving body mounted on the setting table.

[0035] Figure 21Figures (a) and (b) are side views for explaining the operation of the printing unit according to an embodiment of the present invention.

[0036] Figure 22 It is a side view of the printing unit according to an embodiment of the present invention.

[0037] Figure 23 It is a side view of the printing unit according to an embodiment of the present invention.

[0038] Figure 24 Figures (a) and (b) are top views of a part of the printing unit according to an embodiment of the present invention.

[0039] Figure 25 It is a side view of the printing unit according to an embodiment of the present invention.

[0040] Figure 26 It is a side view for explaining the operation of the printing unit according to an embodiment of the present invention.

[0041] Figure 27 It is a side view for explaining the operation of the printing unit according to an embodiment of the present invention.

[0042] Figure 28 It is a side view for explaining the operation of the printing unit according to an embodiment of the present invention.

[0043] Figure 29 It is a side view for explaining the operation of the printing unit according to an embodiment of the present invention.

[0044] Explanation of reference numerals:

[0045] 1 Printing device (substrate processing device)

[0046] 2 Printing unit

[0047] 3 Storage unit

[0048] 15 Mask

[0049] 16 Printing unit camera (imaging unit)

[0050] 25 Setting table

[0051] 25K Vacuum suction port

[0052] 26 Lower receiving body (replacement member)

[0053] 26P Upper surface side identifier

[0054] 26Q Lower surface side identifier

[0055] 31 Lifting cylinder

[0056] 32 Support release mechanism

[0057] 41 Cartridge

[0058] 41S Groove

[0059] 42 Cartridge Elevator

[0060] 51 Frame

[0061] 54 Support Member

[0062] 55 Biasing Spring

[0063] 60 Conversion Mechanism

[0064] 70 Control Device

[0065] 71 Storage Unit

[0066] 74 Detection Unit for Position Inside Storage Unit

[0067] 75 Judgment Unit (Judgment Element)

[0068] 81 First Information Reader

[0069] 82 Second Information Reader

[0070] J1 First Corresponding Information

[0071] J2 Second Corresponding Information

[0072] J3 Third Corresponding Information

[0073] KS1 Mask Identifier

[0074] KS2 Fixture Identifier

[0075] KB Substrate Detailed Embodiment

[0076] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Figure 1Shown is a printing apparatus 1 of a substrate processing apparatus as an embodiment of the present invention. The printing apparatus 1 includes a printing unit 2 and a storage unit 3 disposed adjacent to the printing unit 2, and performs a printing operation as a prescribed process: loading a substrate KB, printing a paste Pst such as solder on an electrode pattern (not shown) provided on the upper surface of the substrate KB, and unloading it to the outside. In the present embodiment, for convenience of explanation, the direction in which the substrate KB is transported (loaded and unloaded) (the left-right direction as viewed from the operator OP) is defined as the X direction. Further, the direction orthogonal to the X direction in the horizontal plane (the front-rear direction as viewed from the operator OP) is defined as the Y direction, and the up-down direction is defined as the Z direction. And, the side in the Y direction from the printing unit 2 toward the storage unit 3 is referred to as the rear side (depth side), and the side from the storage unit 3 toward the printing unit 2 is referred to as the front side (near side).

[0077] In Figure 1 and Figure 2 the printing unit 2 includes a substrate holding unit 12 on a base 11. A substrate holding unit moving mechanism 13 is interposed between the substrate holding unit 12 and the base 11. A pair of guide rails 14 as a mask support unit extends horizontally above the substrate holding unit 12, and a mask 15 is supported in a horizontal posture by the pair of guide rails 14. A printing unit camera 16 as a photographing unit is disposed between the substrate holding unit 12 and the mask 15 so as to be movable in the XY plane direction. A printing head 17 is provided above the mask 15.

[0078] In Figure 2 the substrate holding unit 12 includes a lifting base 21, a pair of conveyors 22, a lifter 23, a setting table base 24, a setting table 25, a lower receiving body 26, and a pair of grippers 27. The substrate holding unit moving mechanism 13 is constituted by, for example, an XYZ table mechanism. The substrate holding unit moving mechanism 13 moves the entire substrate holding unit 12 in the XY plane and in the Z direction, and also rotates the entire substrate holding unit 12 about an axis (Z axis) extending in the Z direction.

[0079] In Figure 2 the lifting base 21 is constituted by a plate-like member and is supported in a horizontal posture by the substrate holding unit moving mechanism 13. The pair of conveyors 22 is constituted by a fixed-side conveyor 22 fixed to the fixed side of the lifting base 21 and a movable-side conveyor 22 disposed behind (depth side) the fixed-side conveyor 22, and transports the substrate KB by synchronously traveling in the X direction.

[0080] The movable-side conveyor 22 is movable relative to the fixed-side conveyor 22 (and thus relative to the setting table base 24). By moving the movable-side conveyor 22 closer to or away from the fixed-side conveyor 22, the interval between the pair of conveyors 22 can be adjusted according to the size in the width direction (Y direction) of the substrate KB.

[0081] exist Figure 2 In the embodiment, the lift 23 is installed on the lift base 21. The installation base 24 is composed of a flat plate-shaped member extending along the XY plane. The lift 23 moves the installation base 24 relative to the lift base 21 in the Z direction.

[0082] exist Figure 2 and Figure 3 In the embodiment, the installation table 25 is installed on the installation table base 24 . The installation table 25 (the fixed side installation table 25 a and the movable side installation table 25 b ) is located below between the pair of conveyors 22 .

[0083] exist Figure 2 and Figure 3 In the embodiment, the setting table 25 is composed of a fixed side setting table 25a arranged on the front side and a movable side setting table 25b arranged on the back side. The fixed side setting table 25a and the movable side setting table 25b are respectively composed of block-shaped components, and the upper surfaces are at the same height. A vacuum suction port 25K and a vacuum suction path opening 25H are formed side by side along the Y direction on the upper surface of the fixed side setting table 25a.

[0084] The fixed side installation table 25a is fixed to the installation table base 24. The movable side installation table 25b is movable in the Y direction on the installation table base 24. The movable side installation table 25b is integrally movable in the Y direction with the movable side conveyor 22. Therefore, if the movable side conveyor 22 moves in the Y direction, the movable side installation table 25b also moves in the Y direction.

[0085] The lower receiving body 26 is detachably mounted on the mounting table 25. The lower receiving body 26 is composed of a flat plate-shaped member as a whole, and its upper surface is formed flat. When the lower receiving body 26 is mounted on the mounting table 25, it supports (receives) the substrate KB from below ( Figure 4 (a) → Figure 4 (b)).

[0086] The setting table 25 adsorbs the lower surface of the lower receiving body 26 at the vacuum adsorption port 25K provided on the upper surface. Therefore, the area near the front side of the lower surface of the lower receiving body 26 is adsorbed and held by the vacuum adsorption port 25K of the fixed side setting table 25a, and the area in the depth side of the lower surface of the lower receiving body 26 is supported by the movable side setting table 25b in a loading state.

[0087] The lower surface of the lower receiving body 26 is formed with an opening 26H ( Figure 5 (a), (b)). A vacuum chuck hole 26C connected to the vacuum adsorption path is formed on the upper surface of the lower receiving body 26 ( Figure 3 and Figure 5In the state where the lower receiving body 26 is disposed on the setting table 25, the vacuum suction path opening 25H of the setting table 25 is connected to the opening 26H of the lower receiving body 26. Therefore, the lower receiving body 26 can adsorb and hold the substrate KB placed on its upper surface by the vacuum suction force generated through the vacuum chuck holes 26C.

[0088] As Figure 5 As shown in (a) of FIG., a recess 26Z (a through hole when the component BH is tall) for avoiding interference with the component BH on the lower surface of the substrate KB placed on the lower receiving body 26 is provided on the upper surface of the lower receiving body 26. The configuration of the component BH mounted on the substrate KB varies depending on the substrate KB. Therefore, the configuration of the recess 26Z provided on the upper surface of the lower receiving body 26 also varies according to the type of the substrate KB.

[0089] The plurality of vacuum chuck holes 26C are respectively opened at positions avoiding the plurality of recesses 26Z provided on the upper surface of the lower receiving body 26. Therefore, the configuration of the vacuum chuck holes 26C and the recesses 26Z in the region of the upper surface of the lower receiving body 26 where the substrate KB is placed (the region that becomes the inside of the substrate KB in the state where the substrate KB is placed) varies depending on the substrate KB. Therefore, in the present embodiment, different types of lower receiving bodies 26 are prepared according to the type of the substrate KB, and the lower receiving body 26 can be replaced with respect to the setting table 25. That is, in the present embodiment, the lower receiving body 26 becomes a replaceable member in the printing apparatus 1.

[0090] For the lower receiving body 26, a lower receiving body having a size corresponding to the size in the width direction (here, the size in the Y direction) of the substrate KB to be produced is selected and disposed on the setting table 25. The interval between the fixed-side setting table 25a and the movable-side setting table 25b is adjusted according to the size of the substrate KB. In the present embodiment, as described above, the movable-side setting table 25b moves integrally with the movable-side conveyor 22 in the Y direction. Therefore, when the interval between the fixed-side conveyor 22 and the movable-side conveyor 22 is adjusted, the interval between the fixed-side setting table 25a and the movable-side setting table 25b is also automatically adjusted.

[0091] In Figure 3 , a plurality of protruding members 26T protruding outward in the X direction are respectively mounted on both sides of the upper surface of the lower receiving body 26 extending in the Y direction (opposing in the X direction). In the present embodiment, two protruding members 26T are respectively mounted on both outer edges of the upper surface of the lower receiving body 26 extending in the Y direction, but the number is merely an example.

[0092] In Figure 5In (a) and (b) thereof, an upper surface side identifier 26P and a lower surface side identifier 26Q, which are lower carrier identifiers (replacement member identifiers) recording the individual identification information of the lower carrier 26, are respectively installed on the upper surface and the lower surface of the lower carrier 26. Specifically, the upper surface side identifier 26P is provided on the upper surface of the substrate KB ( Figure 3 , Figure 4 in (a) and (b) of Figure 5 and in (a) and (b) of Figure 5 ), and the lower surface side identifier 26Q is provided on the lower surface of the substrate KB (

[0093] in (a) and (b) of Figure 4 ). The upper surface side identifier 26P needs to be provided on a flat surface of the upper surface of the lower carrier 26. However, as described above, in the area on the upper surface of the lower carrier 26 that receives the substrate KB (the area that becomes the inside of the substrate KB in the state where the substrate KB is received), a plurality of recessed portions (vacuum chuck holes 26C and recesses 26Z) different depending on the type of the substrate KB are formed. Therefore, if the upper surface side identifier 26P is to be provided in such an area while avoiding the recessed portions, it is necessary to change the reading portion (imaging position) according to the type of the substrate KB when reading the individual identification information from the upper surface side identifier 26P. Therefore, in the present embodiment, as Figure 4 shown in (a) and (b), the upper surface side identifier 26P is provided in an area that is not blocked by the substrate KB when the lower carrier 26 holds the substrate KB on its upper surface, that is, on the upper surface of the lower carrier 26 and in an area that becomes the outside of the substrate KB in the state where the lower carrier 26 receives the substrate KB.

[0094] Similarly, the lower surface side identifier 26Q also needs to be provided on a flat surface of the lower surface of the lower carrier 26. Based on such a principle, the lower surface side identifier 26Q is provided in an area that is necessarily flatly formed on the lower surface of the lower carrier 26 and that faces the vacuum suction port 25K of the fixed side setting table 25a (the area KR surrounded by the single dotted line in Figure 5 in (a) and (b)). The upper surface side identifier 26P and the lower surface side identifier 26Q only need to have the same content (individual identification information), and do not need to be the same identifier.

[0095] In Figure 2 , a pair of grippers 27 are arranged above a pair of conveyors 22 so as to face each other in the Y direction. The pair of grippers 27 hold the substrate KB by clamping the corresponding two side surfaces in the Y direction of the substrate KB supported (received) by the lower carrier 26.

[0096] Thus, the substrate holding unit 12 is configured to support (under-support) the substrate KB carried in by the pair of conveyors 22 using the lower receiving body 26, and to clamp and hold the substrate KB using the pair of grippers 27.

[0097] In the substrate holding unit 12, as Figure 3 and Figure 6 shown in (a) and (b) thereof, a plurality (four) of lifting cylinders 31 and a pair of support release mechanisms 32 are further provided on the setting table base 24.

[0098] In Figure 3 and Figure 6 of (a) and (b), two of the four lifting cylinders 31 are arranged at both ends in the X direction of the fixed-side setting table 25a (positions sandwiching the fixed-side setting table 25a in the X direction), and the other two are arranged at both ends in the X direction of the movable-side setting table 25b (positions sandwiching the movable-side setting table 25b in the X direction). These four lifting cylinders 31 are separately provided from the fixed-side setting table 25a and the movable-side setting table 25b. Each of the four lifting cylinders 31 can move the piston rod 31R in the vertical direction. The two lifting cylinders 31 arranged at positions sandwiching the movable-side setting table 25b in the X direction move integrally with the movable-side setting table 25b in the Y direction.

[0099] The four lifting cylinders 31 operate synchronously to move the piston rods 31R in the same direction by the same amount in the vertical direction. Therefore, the upper ends of the four piston rods 31R of the four lifting cylinders 31 are always at the same height.

[0100] In Figure 3 and Figure 6 of (a) and (b), a pair of support release mechanisms 32 are arranged at both ends in the X direction of the fixed-side setting table 25a (positions sandwiching the fixed-side setting table 25a in the X direction). Each support release mechanism 32 includes an operation cylinder 33, a rack 34, a pinion 35, and an operation rod 36.

[0101] The piston rods (operation cylinder rods 33R) of the two operation cylinders 33 are arranged facing the outside in the X direction. A rack guide 34G extending in the X direction is provided below the operation cylinder rod 33R. The rack 34 is arranged to be movable in the X direction on the rack guide 34G and is connected to the end of the operation cylinder rod 33R.

[0102] The two operation cylinders 33 operate synchronously to move the operation cylinder rods 33R in opposite directions by the same amount. Therefore, when the two operation cylinders 33 operate, the two racks 34 arranged at positions sandwiching the fixed-side setting table 25a in the X direction approach or separate from the fixed-side setting table 25a simultaneously.

[0103] In Figure 3 andFigure 6 In (a) and (b) thereof, two pinions 35 are arranged at positions sandwiching the fixed-side setting table 25a in the X direction, and are respectively located above the rack 34. The two pinions 35 are respectively supported rotatably by rotation support shafts 35J ( Figure 3 ) extending in the Y direction. Both end portions of each of the two rotation support shafts 35J are relatively fixed to the setting table base 24.

[0104] In Figure 3 and Figure 6 of (a) and (b), the teeth formed on the outer periphery of each pinion 35 are engaged with the teeth formed on the upper surface of the rack 34 located below the pinion 35. Therefore, when the two operation cylinders 33 operate and the two racks 34 move in the X direction (approach or separate), the two pinions 35 rotate in opposite directions around their respective rotation support shafts 35J.

[0105] The proximal ends (lower ends) of the two operation levers 36 are each connected to the pinion. Therefore, as described above, when the two operation cylinders 33 operate and the two pinions 35 rotate in opposite directions, the two operation levers 36 swing between the position where they fall in the direction facing each other ( Figure 6 the operation lever 36 shown by the solid line in (a) of Figure 6 ) and the position where they stand up in a substantially vertical posture (

[0106] In Figure 7 , a pair of guide rails 14 respectively extend in the Y direction and are arranged opposite to each other in the X direction. The mask 15 is composed of a rectangular plate-like member. The four sides of the mask 15 are supported by a rectangular mask frame 15W. A pattern opening 15K corresponding to the electrode pattern of the substrate KB is formed in the central portion of the mask 15.

[0107] In Figure 7 , the two guide rails 14 are each formed in an L shape. The two guide rails 14 support, from below, two side portions that extend in the Y direction and are arranged opposite to each other among the four side portions of the mask frame 15W. The mask 15 can move in the Y direction on the guide rails 14. During the printing operation, the mask 15 is located (set) at the mask setting position MI ( Figure 7 ) set on the guide rails 14. The mask setting position MI is a position corresponding to above the substrate holding portion 12.

[0108] In Figure 2In [the device], the printing unit camera 16 includes a lower shooting unit 16a that shoots downward and an upper shooting unit 16b that shoots upward. The printing unit camera 16 moves in the horizontal plane direction through a printing unit camera moving mechanism (not shown), shoots the substrate KB held by the substrate holding unit 12 (specifically, the mark provided on the substrate KB) through the lower shooting unit 16a, and shoots the mask 15 located at the mask setting position MI (specifically, the mark provided on the mask) through the upper shooting unit 16b.

[0109] In Figure 2 [the device], the print head 17 includes two squeegees 17S arranged opposite to each other in the Y direction. Each squeegee 17S is composed of a "doctor blade"-shaped member extending in the X direction. The print head 17 moves in the Y direction through a print head moving mechanism 17K ( Figure 1 and Figure 2 ) composed of a ball screw mechanism, etc. The two squeegees 17S are respectively lifted and lowered through two squeegee lifting parts 17M provided on the print head 17.

[0110] In Figure 1 [the device], the storage unit 3 includes a magazine 41 and a magazine elevator 42. The magazine 41 is composed of a box-shaped member and has openings on both the front side and the depth side. A plurality of grooves 41S serving as storage areas are provided in the magazine 41 and arranged along the Z direction.

[0111] In the grooves 41S in the lower half area of the magazine 41, a plurality of types of masks 15 corresponding to the types of the produced substrates KB are stored. A plurality of types of lower carriers 26 are stored in the grooves 41S in the upper half area of the magazine 41 in a state of being mounted on jigs 50 ( Figure 8 as shown in (a) and (b)) having an outer shape substantially the same as that of the mask 15.

[0112] Here, the jig 50 will be described. As shown in (a) and (b) of Figure 8 , the jig 50 includes a frame body 51, an auxiliary cross bar 52, two moving guides 53, and two support members 54. The frame body 51 has a rectangular shape and is substantially the same shape as the mask frame 15W.

[0113] Similar to the case of the mask 15, both sides of the frame body 51 extending in the Y direction (i.e., opposite to each other in the X direction) are supported by the guide rails 14. Therefore, similar to the mask 15, the jig 50 can slide along the Y direction on a pair of guide rails 14. The auxiliary cross bar 52 extends in the X direction in the internal space of the frame body 51, and both ends thereof are fixed to both sides of the frame body 51 opposite to each other in the Y direction.

[0114] In Figure 8In (a) and (b) thereof, two moving guides 53 extend along the Y direction respectively. One end (rear end) of each moving guide 53 is supported by the frame 51, and the other end (front end) is supported by the auxiliary cross bar 52. The two moving guides 53 can move along the X direction while maintaining the posture of extending along the Y direction respectively.

[0115] In Figure 8 In (a) and (b) thereof, two supporting members 54 extend along the Y direction respectively. The two supporting members 54 are respectively arranged on the opposing surfaces of the two moving guides 53. Protruding piece portions 54T protruding in the direction facing each other are respectively formed on the surfaces of the two supporting members 54 facing each other.

[0116] In Figure 8 In (a) and (b) thereof, the two moving guides 53 are respectively biased towards the inside of the frame 51 by a plurality of biasing springs 55, and the plurality of biasing springs 55 are arranged between each moving guide 53 and the frame 51. Therefore, the two supporting members 54 can move between a close position where they approach each other ( Figure 9 in (a) thereof) and a separated position where they move in the direction of separating from the close position ( Figure 9 in (b) thereof). It should be noted that Figure 9 Both (a) and (b) thereof are Figure 8 a V-V cross-sectional view in (a) thereof.

[0117] In this way, in the present embodiment, the jig 50 has a structure including a frame 51 and a pair of supporting members 54 provided on the frame 51 and capable of approaching and separating from each other.

[0118] In the state where the two supporting members 54 are in the close position ( Figure 9 in (a) thereof), the interval between the two protruding piece portions 54T is larger than the X-direction dimension of the lower receiving body 26 and smaller than the interval between the outer ends of the two protruding members 26T opposing each other in the X direction. Therefore, in the state where the two supporting members 54 are in the close position, by placing the plurality of protruding members 26T provided on the lower receiving body 26 on the protruding piece portions 54T of the two supporting members 54 respectively from above ( Figure 8 from (a) thereof → Figure 8 to (b) thereof), the lower receiving body 26 can be mounted on the jig 50. In this way, in the state where the lower receiving body 26 is mounted on the jig 50, by moving the jig 50, the lower receiving body 26 can be moved.

[0119] In Figure 1 it, the magazine elevator 42 has a lifting table 42B having a shape extending in a horizontal plane. The magazine 41 is placed on the lifting table 42B, and when the magazine elevator 42 moves the lifting table 42B in the vertical direction, the magazine 41 moves up and down relative to the printing unit 2.

[0120] In Figure 1 Figure 1 , a conversion mechanism 60 for switching (converting) the mask 15 or the jig 50 located at the mask setting position MI is provided between the printing unit 2 and the storage unit 3. The conversion mechanism 60 is composed of a pick-and-place mechanism unit 61 on the storage unit 3 side and a moving mechanism unit 62 on the printing unit 2 side.

[0121] The pick-and-place mechanism unit 61 performs the operation of picking up and placing the mask 15 or the jig 50 in the storage unit 3 (cartridge 41) from and to the printing unit 2. The moving mechanism unit 62 uses a rod portion 62R that can be telescopically extended downward to perform the loading operation of moving the mask 15 or the jig 50 taken out from the storage unit 3 by the pick-and-place mechanism unit 61 on the guide rail 14 and loading it into the printing unit 2 (specifically, moving it to the mask setting position MI), and the unloading operation of moving the mask 15 or the jig 50 located at the mask setting position MI on the guide rail 14 and moving it to the storage unit 3 side. The moving mechanism unit 62 does not have an autonomous traveling mechanism and moves in the Y direction together with the print head 17 in a state of being connected to the print head 17.

[0122] Figure 10 The control system of the printing apparatus 1 is shown. The control device 70, which is the control unit of the printing apparatus 1, controls the following operations: the loading, holding, and unloading operations of the substrate KB by the substrate holding unit 12; the XY-plane movement and lifting operations of the substrate holding unit 12 by the substrate holding unit moving mechanism 13; the imaging operations of the printing camera 16 (lower imaging unit 16a and upper imaging unit 16b); the lifting operation of the squeegee 17S by the squeegee lifting unit 17M; the movement operation of the print head 17 by the print head moving mechanism 17K. In addition, the control device 70 controls the following operations: the adsorption and holding operation between the lower receiving body 26 of the setting table 25 and the substrate KB; the operations of the four lifting cylinders 31 as the lifting unit; the operations of the two operation cylinders 33 constituting the support release mechanism 32. The control device 70 also controls the lifting operation of the cartridge 41 by the cartridge elevator 42 and the conversion operation of the mask 15 or the jig 50 by the conversion mechanism 60.

[0123] In Figure 10 Figure 10 , the control device 70 includes a storage unit 71. The storage unit 71 includes, in addition to a program storage unit 72 that stores an operation program recording the steps of the printing operation of printing the paste Pst on the substrate KB, a data storage unit 73 that stores various data.

[0124] In Figure 7 Figure 7 , a mask identifier KS1 for individually identifying the mask 15 is provided in front of the mask 15, i.e., ZM. In addition, as Figure 8As shown in (a) and (b), a fixture identifier KS2 for individually identifying the fixture 50 is provided in front ZM of the fixture 50. The mask identifier KS1 and the fixture identifier KS2 are each constituted by, for example, a QR code (registered trademark).

[0125] As described above, a plurality of types of lower carriers 26 corresponding to the types of a plurality of substrates KB are prepared, and each type of lower carrier 26 is installed on a dedicated fixture 50. Therefore, when the lower carrier 26 is removed from the fixture 50 and then reinstalled on the fixture 50, it must be installed on the fixture 50 dedicated to the lower carrier 26. Therefore, a one-to-one relationship is maintained between the lower carrier 26 and the fixture 50 on which the lower carrier 26 is installed.

[0126] Next, based on Figure 11 the flowchart of, the process of a printing operation of printing the paste Pst on the substrate KB performed by the printing apparatus 1 having such a structure will be described. In the case of performing the printing operation, as a preliminary preparation therefor, the operator OP installs a plurality of types of lower carriers 26 used in the printing operation on dedicated fixtures 50 respectively. Then, a storage operation of storing the lower carrier 26 on which the fixture 50 is installed in the slot 41S of the magazine 41 is performed.

[0127] When the operator OP installs the lower carrier 26 on the fixture 50, the operator causes a first information reader 81, which is constituted by, for example, a handheld information reader, to read the individual identification information of the lower carrier 26 (referred to as "lower carrier information") and the individual identification information of the fixture 50 on which the lower carrier 26 is installed (referred to as "fixture information"). Specifically, the first information reader 81 identifies the lower carrier identifier (upper surface side identifier 26P or lower surface side identifier 26Q) provided on the upper surface of the lower carrier 26, reads the lower carrier information recorded in the lower carrier identifier, and causes the first information reader 81 to identify the fixture identifier KS2 provided on the fixture 50 and read the fixture information recorded in the fixture identifier KS2 ( Figure 12 ). The lower carrier information and the fixture information read by the first information reader 81 are sent to the control device 70.

[0128] After receiving the fixture information and the lower carrier information sent from the first information reader 81, the control device 70 obtains information on the correspondence relationship (referred to as "first correspondence information J1") in which the lower carrier information and the fixture information are in one-to-one correspondence for each of the plurality of lower carriers 26 (first correspondence information acquisition step, Figure 11The steps shown in ST1). Specifically, the control device 70 obtains the first correspondence information J1 for each of the plurality of lower holders 26 based on the individual identification information (lower holder information) of the lower holder 26 read by the first information reader 81 from the lower holder identifier (upper surface side identifier 26P or lower surface side identifier 26Q) and the individual identification information (fixture information) of the fixture 50 read by the first information reader 81 from the fixture identifier KS2.

[0129] In this way, in the present embodiment, the control device 70 becomes a first correspondence information acquisition unit that obtains the information of the correspondence relationship between the lower holder 26 and the fixture 50 on which the lower holder 26 is mounted, that is, the first correspondence information J1, for each of the plurality of lower holders 26. After the control device 70 obtains the first correspondence information J1, it stores the data of the first correspondence information J1 in the storage unit 71 (specifically, the data storage unit 73) ( Figure 10 , Figure 12 ).

[0130] In Figure 1 , a second information reader 82 is provided in front of the storage unit 3. The second information reader 82 directs the shooting field of view backward. After detecting the end of the above-mentioned storage operation performed by the operator OP, the control device 70 lifts and lowers the cassette 41 by using the cassette elevator 42 while causing the second information reader 82 to read the individual identification information (referred to as "mask information") of the mask 15 recorded in each slot 41S of the cassette 41 and the individual identification information (the aforementioned fixture information) of the fixture 50 recorded in the fixture 50 ( Figure 13 ).

[0131] After the second information reader 82 reads the mask information or the fixture information, it sends the read mask information or fixture information to the control device 70 ( Figure 13 ). At this time, the second information reader 82 also sends the information of the position of the slot 41S in which the mask 15 or the fixture 50 is stored (referred to as "position within the storage unit") to the control device 70.

[0132] After the control device 70 receives the mask information or the fixture information and the information of the position within the storage unit (position within the storage unit information) of the mask 15 or the fixture 50 from the second information reader 82, it obtains the information of the correspondence relationship (the "second correspondence information J2") that makes the mask information or the fixture information and the position within the storage unit information of the corresponding mask 15 or fixture 50 correspond one-to-one for each of the plurality of fixtures 50 (second correspondence information acquisition process, step ST2). Specifically, the control device 70 obtains the second correspondence information J2 based on the individual identification information (fixture information) of the fixture 50 read from the fixture identifier KS2 and the information of the position within the storage unit of the fixture 50.

[0133] Thus, in the present embodiment, the control device 70 serves as a second correspondence information acquisition unit that acquires, for each of the plurality of jigs 50, information on the correspondence relationship between the jig 50 and the position information within the storage portion of the jig 50, i.e., the second correspondence information J2. After the control device 70 acquires the second correspondence information J2, it stores the data of the second correspondence information J2 in the storage portion 71 (specifically, the data storage portion 73) ( Figure 10 , Figure 13 ).

[0134] If the control device 70 has acquired the first correspondence information J1 and the second correspondence information J2 as described above, based on the first correspondence information J1 and the second correspondence information J2, it acquires, for each of the plurality of lower receivers 26, information on the correspondence relationship (referred to as "third correspondence information J3") that makes the individual identification information (lower receiver information) of the lower receiver 26 as a replacement member correspond one-to-one with the position information within the storage portion of the jig 50 on which the lower receiver 26 is mounted ( Figure 14 ). (Third correspondence information acquisition process, step ST3).

[0135] Thus, in the present embodiment, the control device 70 serves as a third correspondence information acquisition unit that acquires, for each of the plurality of lower receivers 26, information on the relationship between the lower receiver 26 and the position within the storage portion of the jig 50 on which the lower receiver 26 is mounted, i.e., the third correspondence information J3, based on the acquired first correspondence information J1 and second correspondence information J2. After the control device 70 acquires the third correspondence information J3, it stores the data of the third correspondence information J3 in the storage portion 71 (specifically, the data storage portion 73) ( Figure 10 ).

[0136] When the printing device 1 performs a printing operation of printing the paste Pst on the substrate KB, first, it performs a lower receiver setting operation of taking out the lower receiver 26 of the type corresponding to the type of the produced substrate KB from the storage portion 3 and setting it on the setting table 25. In the lower receiver setting operation, the control device 70 first uses the storage portion position detection unit 74 ( Figure 10 ) to detect the position within the storage portion that houses the lower receiver 26 to be set on the setting table 25 based on the third correspondence information J3 stored in the storage portion 71 (first storage portion position detection process, step ST4).

[0137] After the control device 70 detects the position within the storage portion of the lower receiver 26 to be set, it operates the magazine elevator 42 to raise and lower the magazine 41. Then, it positions the jig 50 located at the detected position within the storage portion (slot 41S) at the height of the guide rail 14.

[0138] After the jig 50 is positioned at the height of the guide rail 14, the control device 70 transports the jig 50 into the printing unit 2 through the conversion mechanism 60 ( Figure 15of (a) → Figure 15 of (b)), the jig 50 is positioned at the mask setting position MI above the setting table 25 (pre-setting jig positioning process, step ST5). Thus, the jig 50 equipped with the lower carrier 26 and the lower carrier 26 together are in a state above the setting table 25 ( Figure 15 of (b), Figure 16 ).

[0139] After the lower carrier 26 is positioned above the setting table 25, the control device 70 causes the printing unit camera 16 to move in and out of the area below the jig 50. Then, the printing unit camera 16 as the imaging unit (specifically, the upper imaging unit 16b) images the lower surface side identifier 26Q of the lower carrier 26 mounted on the jig 50 ( Figure 17 of (a)).

[0140] After the control device 70 causes the printing unit camera 16 to image the lower surface side identifier 26Q, it reads the lower carrier information recorded on the lower surface side identifier 26Q based on the imaging result. Then, it compares the read lower carrier information with the operation program stored in the program storage unit 72 to determine whether the lower carrier 26 mounted on the jig 50 is the appropriate lower carrier (the correct type of lower carrier specified in the operation program) (pre-setting lower carrier confirmation process, step ST6).

[0141] In this embodiment, the determination unit 75 of the control device 70 is a determination unit that: based on the lower surface side identifier 26Q imaged by the printing unit camera 16 as the imaging unit, individually identifies the lower carrier 26 provided with the lower surface side identifier 26Q, and determines whether the lower carrier 26 is suitable for being set on the setting table 25.

[0142] If the result of the above determination is that the lower carrier 26 mounted on the jig 50 is not suitable, the control device 70 issues an alarm to the operator OP through an alarm unit (not shown). On the other hand, if the result of the determination is that the lower carrier 26 mounted on the jig 50 is suitable, the substrate holding unit moving mechanism 13 is operated to raise the lifting base 21, and the elevator 23 is operated to raise the setting table base 24, causing the setting table 25 to approach the jig 50 from below ( Figure 17 of (a) → Figure 17 of (b)).

[0143] After the setting table 25 rises to a predetermined height close to the clamp 50, the control device 70 stops the rise of the setting table 25 and operates the four lifting cylinders 31. The upper ends of the piston rods 31R of the four lifting cylinders 31 are brought into contact with the four corners of the lower receiving body 26. As a result, the lower receiving body 26 of the clamp 50 located above the setting table 25 is supported from below by the four lifting cylinders 31 ( Figure 18 (a), release the front support process, step ST7).

[0144] After the lower receiving body 26 is supported by the four lifting cylinders 31, the control device 70 moves the piston rods 31R of the four lifting cylinders 31 further upward, thereby pushing up the lower receiving body 26. As a result, the plurality of extending members 26T are separated upward from the protruding pieces 54T of the two supporting members 54 ( Figure 18 (b)). It should be noted that the step of pushing up the lower receiving body 26 is not essential.

[0145] After the control device 70 operates the four lifting cylinders 31 to support (or further push up) the lower receiving body 26, it then operates the two operating cylinders 33 to move the two racks 34 in the direction of separation from each other. When the two racks 34 move in the direction of separation from each other, the two pinions 35 rotate around the rotation support shaft 35J, and the pair of operating rods 36 move from the lying position to the raised position ( Figure 18 (b) → Figure 19 (a)).

[0146] When the pair of operating rods 36 are moved from the lying position to the raised position, the pair of support members 54 are pressed by the pair of operating rods 36 and move in the direction of separating from each other ( Figure 19 As shown by arrow A in (a), the support of the lower receiving body 26 by the pair of supporting members 54 is released (support release process, step ST8). As a result, the lower receiving body 26 is supported only by the four lifting cylinders 31.

[0147] After the pair of supporting members 54 release the support of the lower receiving body 26, the control device 70 operates the four lifting cylinders 31 to move the piston rod 31R downward. As a result, the lower receiving body 26 is lowered while maintaining a horizontal posture, and the lower surface contacts the upper surface of the setting table 25 (fixed side setting table 25a and movable side setting table 25b) ( Figure 19 (a) → Figure 19 (b) Figure 20 (a) → Figure 20(b)). When the lower surface of the lower receiving body 26 contacts the upper surface of the setting table 25, the control device 70 causes the vacuum suction port 25K on the upper surface of the fixed side setting table 25a to generate a vacuum suction force. As a result, the front side area of ​​the lower receiving body 26 is sucked and held on the upper surface of the fixed side setting table 25a, and the lower receiving body 26 is placed on the setting table 25 (setting process, step ST9).

[0148] Thus, the pair of support release mechanisms 32 provided in the printing device 1 of the present embodiment serve as a support release unit that releases the support of the lower receiving body 26 by the pair of support members 54 by moving the pair of support members 54 in a direction away from each other in a state where the clamp 50 supporting the lower receiving body 26 is set above the setting table 25. In addition, the plurality of (four) lifting cylinders 31 serve as a lifting unit that supports the lower receiving body 26 from below before the support based on the pair of support members 54 is released by the pair of support release mechanisms 32 as the support release unit, and lowers the lower receiving body 26 and holds it on the setting table 25 after the support based on the pair of support members 54 is released by the pair of support release mechanisms 32.

[0149] Thus, the printing device 1 of the present embodiment includes a clamp 50, which is arranged above the setting table 25 in the following state, that is, a pair of supporting members 54 in a state close to each other are used to support the two end portions of the lower receiving body 26 (specifically, a plurality of protruding members 26T arranged at the two end portions) from below, and the printing device 1 also includes a pair of support release mechanisms 32 as a support release unit and a plurality of (four) lifting cylinders 31 as a lifting unit. The pair of support release mechanisms 32 move the pair of supporting members 54 in a direction of separation from each other when the clamp 50 supporting the lower receiving body 26 is located above the setting table 25, thereby releasing the support of the pair of supporting members 54 on the lower receiving body 26. The plurality of (four) lifting cylinders 31 support the lower receiving body 26 from below before the support based on the pair of supporting members 54 is released by the pair of support release mechanisms 32, and after the support based on the pair of supporting members 54 is released by the pair of support release mechanisms 32, the lower receiving body 26 is lowered and set on the setting table 25.

[0150] After the lower receiving body 26 is set on the setting table 25, the control device 70 operates the two operating cylinders 33 to move the two racks 34 in the direction of approaching each other. When the two racks 34 move in the direction of approaching each other, the two pinions 35 rotate around the rotation support shaft 35J, and the pair of operating rods 36 move from the raised position to the lowered position. As a result, the pair of supporting members 54 move in the direction of approaching each other by the force of the force spring 55 ( Figure 21the arrow B shown in (a) thereof), is restored to its original position (the position before movement) ( Figure 21 of (a)).

[0151] After the pair of support members 54 is restored to its original position, the control device 70 operates the elevator 23 to lower the setting table base 24, and operates the substrate holding portion moving mechanism 13 to lower the substrate holding portion 12 ( Figure 21 the arrow C shown in (b) thereof). Thus, after the substrate holding portion 12 is restored to the position at its original height ( Figure 21 of (b), Figure 22 ), the operation of holding the lower receiving body 26 on the setting table 25 is completed.

[0152] After the operation of setting the lower receiving body is completed as described above, the control device 70 causes the printing unit camera 16 to enter and exit the area below the jig 50, and then causes the printing unit camera 16 (specifically, the lower shooting unit 16a) to shoot the upper surface side identifier 26P provided on the upper surface of the lower receiving body 26 provided on the setting table 25 ( Figure 23 ).

[0153] After the control device 70 causes the printing unit camera 16 to shoot the upper surface side identifier 26P of the lower receiving body 26, in the determination unit 75 ( Figure 10 ), the upper surface side identifier 26P shot by the printing unit camera 16 is identified, and the individual identification information of the lower receiving body 26 recorded in the upper surface side identifier 26P is obtained. Then, by comparing the obtained individual identification information of the lower receiving body 26 with the operation program, it is determined whether the situation of the lower receiving body 26 being set on the setting table 25 is appropriate (whether it is the correct type of lower receiving body specified in the operation program) (post-setting determination process, step ST10).

[0154] Thus, in the present embodiment, the determination unit 75 as the determination unit individually identifies the lower receiving body 26 provided with the upper surface side identifier 26P based on the upper surface side identifier 26P shot by the printing unit camera 16 as the shooting unit, and determines whether the situation of the lower receiving body 26 being set on the setting table 25 is appropriate.

[0155] When the result of the above determination by the determination unit 75 is that the lower receiving body 26 set on the setting table 25 is not suitable (is not the correct type of lower receiving body specified in the operation procedure), the control device 70 issues an alarm to the operator OP through the aforementioned unillustrated alarm unit. On the other hand, when the result of the determination is that the lower receiving body 26 set on the setting table 25 is suitable (is the correct type of lower receiving body specified in the operation procedure), the conversion mechanism 60 is operated to carry out the jig 50 from the mask setting position MI and return it to the cassette 41 in the storage unit 3 (post-setting jig return process, step ST11).

[0156] In this way, in the present embodiment, after the lower receiving body 26 is removed from the jig 50 taken out from the storage unit 3 and set on the setting table 25, the conversion mechanism 60 returns the jig 50 to the storage unit 3.

[0157] After returning the jig 50 from which the lower receiving body 26 has been removed to the cassette 41, the control device 70 positions the mask 15 corresponding to the type of the substrate KB to be produced next at the mask setting position MI. To this end, first, through the aforementioned in-storage unit position detection unit 74, based on the first correspondence information J1 stored in the storage unit 71, the in-storage unit position of the mask 15 to be positioned at the mask setting position MI is detected (mask in-storage unit position detection process, step ST12).

[0158] After the control device 70 detects the in-storage unit position of the mask 15 to be positioned at the mask setting position MI, it operates the cassette elevator 42 to raise and lower the cassette 41. Then, the detected mask 15 located at the in-storage unit position (i.e., the mask 15 to be set on the setting table 25) is positioned at the height of the guide rail 14.

[0159] After the mask 15 located at the detected in-storage unit position is positioned at the height of the guide rail 14, the control device 70 transfers the mask 15 into the printing unit 2 through the conversion mechanism 60 ( Figure 24 from (a) of Figure 24 to (b) of Figure 24 ), and positions it at the mask setting position MI (mask positioning process, step ST13). Thereby, a state is achieved in which the mask 15 is located above the setting table 25 (

[0160] from (b) of ).

[0160] After the mask 15 is positioned at the mask setting position MI, the paste Pst is supplied onto the mask 15. The supply of the paste Pst is carried out manually by the operator OP or automatically by an unillustrated paste supply device.

[0161] After supplying the paste Pst onto the mask 15, the control device 70 executes the printing process (step ST14). In the printing process, the control device 70 first operates the conveyor 22 of the substrate holding unit 12 to carry in the substrate KB. After carrying in the substrate KB, the elevator 23 is operated to raise the setting table base 24 ( Figure 4 from (a) of Figure 4 to (b)). As a result, the lower receiving body 26 rises together with the setting table 25, and the substrate KB is received from below by the lower receiving body 26 ( Figure 25 ). After the substrate KB is received from below, a suction force is generated in the vacuum chuck holes 26C of the lower receiving body 26, so that the substrate KB is sucked and held by the lower receiving body 26.

[0162] After the lower receiving body 26 sucks and holds the substrate KB, the control device 70 operates the elevator 23 to raise the setting table base 24 ( Figure 26 in the direction of arrow D shown in Figure 26 ). Then, after the substrate KB is clamped by the gripper 27 ( Figure 26 in the direction of arrow E shown in Figure 26 ), the setting table base 24 is further raised, so that the upper surface of the substrate KB becomes the same height as the upper surface of the gripper 27. As a result, the substrate KB is held by the substrate holding unit 12.

[0163] After the substrate KB is held by the substrate holding unit 12, the control device 70 moves the printing unit camera 16 in and out of the area between the substrate KB and the mask 15. Then, the lower photographing unit 16a of the printing unit camera 16 photographs the alignment marks (not shown) provided on the substrate KB, and the upper photographing unit 16b photographs the positioning marks (not shown) provided on the mask 15 ( Figure 27 ). The control device 70 grasps the positional relationship between the substrate KB and the mask 15 based on the relative positions of the two positioning marks obtained by the above photographing.

[0164] After grasping the positional relationship between the substrate KB and the mask 15, the control device 70 operates the substrate holding unit moving mechanism 13 to move the substrate holding unit 12 in the XY plane so that the electrode pattern of the substrate KB coincides with the pattern opening 15K of the mask 15 in plan view. Then, after the electrode pattern of the substrate KB coincides with the pattern opening 15K of the mask 15 in plan view, by raising the substrate holding unit 12 ( Figure 28 in the direction of arrow F shown in Figure 28 ), the substrate KB contacts the mask 15 from below ( Figure 28 ), and the electrode pattern of the substrate KB coincides with the pattern opening 15K of the mask 15.

[0165] After the substrate KB comes into contact with the mask 15, the control device 70 operates the squeegee lifting / lowering unit 17M to lower one of the two squeegees 17S. Then, after the lower end of the lowered squeegee 17S abuts against the upper surface of the mask 15, the print head 17 is moved in the Y direction ( Figure 2 the arrow G shown in), and the paste Pst on the mask 15 is scraped together by the squeegee 17S. Thus, the paste Pst fills the pattern opening 15K, and the paste Pst is applied to the electrode pattern on the substrate KB.

[0166] After applying the paste Pst to the electrode pattern on the substrate KB, the control device 70 operates the substrate holding unit moving mechanism 13 to lower the substrate holding unit 12, thereby performing an operation of separating the substrate KB downward from the mask 15 (so-called stripping). After the stripping is completed, the control device 70 operates the conveyor 22 to carry out the substrate KB to the outside (substrate carry-out). Thus, the printing of one substrate KB is completed.

[0167] When repeatedly performing the above printing process and changing the model of the substrate KB for production change, the control device 70 first returns the used mask 15 to the magazine 41 in the reverse steps to when the mask 15 is positioned at the mask setting position MI (mask return process, step ST15). Then, after removing the lower receiving body 26 (used lower receiving body 26) set on the setting table 25, the lower receiving body replacement operation of setting the lower receiving body 26 corresponding to the next model on the setting table 25 is performed.

[0168] When performing the lower receiving body replacement operation, the control device 70 makes the print unit camera 16 enter and exit the lower area of the jig 50. Then, the lower photographing unit 16a photographs the upper surface side identifier 26P of the lower receiving body 26 set on the setting table 25, and reads the individual identification information (lower receiving body information) of the lower receiving body 26 ( Figure 23 )

[0169] After the control device 70 reads the individual identification information of the lower receiving body 26, based on the read individual identification information and the third corresponding information J3 obtained in step ST3 ( Figure 14)Then, the position inside the storage part of the jig 50 corresponding to the lower receiving body 26 (the lower receiving body 26 to be disassembled, the lower receiving body 26 that has been used up) provided on the setting table 25 is detected (second storage part internal position detection process, step ST16). Specifically, the control device 70 detects the position inside the storage part of the jig 50 (the jig 50 dedicated to the lower receiving body 26 to be disassembled) that returns to the storage part 3 in the above step ST11 based on the third correspondence information J3. After detecting the position inside the storage part of the jig 50 corresponding to the lower receiving body 26 to be disassembled, the control device 70 operates the cassette elevator 42 to raise and lower the cassette 41. Then, the jig 50 located at the detected position inside the storage part is positioned at the height of the guide rail 14.

[0170] Thus, in the present embodiment, when the lower receiving body 26 provided on the setting table 25 is disassembled from the setting table 25 and returned to the storage part 3, the second storage part internal position detection process is executed, and the position inside the storage part of the jig 50 that returns to the storage part 3 by the conversion mechanism 60 in step ST11 is detected based on the third correspondence information J3.

[0171] After the jig 50 is positioned at the height of the guide rail 14, the control device 70 uses the conversion mechanism 60 to carry the jig 50 into the printing part 2 ( Figure 29 arrow H shown in). Then, the jig 50 is positioned at the mask setting position MI (pre-disassembly jig positioning process, step ST17). As a result, a state is achieved in which the jig 50 corresponding to the lower receiving body 26 to be disassembled from the setting table 25 is located above the setting table 25. In the state where the jig 50 is located at the mask setting position MI, the lower receiving body 26 to be disassembled is located below the jig 50 ( Figure 29 ).

[0172] After the control device 70 positions the jig 50 at the mask setting position MI, it disassembles the used-up lower receiving body 26 to be disassembled from the setting table 25 and mounts it on the jig 50 (lower receiving body disassembly and mounting process, step ST18). The steps of the process of disassembling the used-up lower receiving body 26 from the setting table 25 and mounting it on the jig 50 are the reverse steps of the above steps of disassembling the lower receiving body 26 from the jig 50 and setting it on the setting table 25.

[0173] After the control device 70 installs the used lower receiving body 26 on the jig 50, it returns the jig 50 with the used lower receiving body 26 installed to the storage unit 3 in the same steps as when the jig 50 returns to the storage unit 3 after the lower receiving body 26 is set on the setting table 25 (disassembly jig return process, step ST19). After returning the lower receiving body 26 to the storage unit 3 in this way, the control device 70 determines whether to change the model and continue the printing operation (determination process, step ST20). Then, in the case of changing the model and continuing the printing operation, it returns to the first storage unit position detection process of step ST4 to prepare for installing the lower receiving body 26 corresponding to the next model on the setting table 25, and ends the printing operation in the case of not changing the model.

[0174] Thus, in the present embodiment, the replacement operation (component replacement method) of replacing the lower receiving body 26 as a replacement component with respect to the setting table 25 includes: a pre-setting jig positioning process (step ST5) in which the jig 50 that supports both ends of the lower receiving body 26 through a pair of support members 54 is positioned above the setting table 25; a pre-support release process (step ST7) in which the lower receiving body 26 supported by the jig 50 located above the setting table 25 is supported from below by a plurality of lifting cylinders 31; a support release process (step ST8) in which, while the lower receiving body 26 is supported by the plurality of lifting cylinders 31, the pair of support members 54 are moved in a direction away from each other to release the support of the pair of support members 54 on the lower receiving body 26; and a setting process (step ST9) in which the lower receiving body 26 is lowered by the plurality of lifting cylinders 31 and set on the setting table 25.

[0175] Thus, in the printing apparatus 1 (component replacement method) of the present embodiment, when the lower receiving body 26 is detached from the jig 50 located above the setting table 25 and set on the setting table 25, first, the lower receiving body 26 is supported from below by a plurality of lifting cylinders 31, and then, the pair of support members 54 are moved in a direction away from each other by a pair of support release mechanisms 32 to release the support of the lower receiving body 26. After the support is released, the lower receiving body 26 is lowered to the setting table 25 by the lifting cylinders 31. Therefore, when the lower receiving body 26 is detached from the jig 50 and set on the setting table 25, the lower receiving body 26 only moves in the simple up and down direction with respect to the jig 50.

[0176] Therefore, in the printing apparatus 1 (component replacement method) of the present embodiment, there is no need for a complicated movement such as lifting the lower receiving body 26 with respect to the jig 50 and then laterally moving the lower receiving body 26 with respect to the jig 50 and then lowering it as in the past when loading and unloading the lower receiving body 26 with respect to the jig 50. Therefore, according to the printing apparatus 1 (component replacement method) of the present embodiment, the loading and unloading time of the lower receiving body 26 with respect to the jig 50 can be shortened.

[0177] In addition, in the printing apparatus 1 of the present embodiment, the mask 15 moves above the setting table 25 along a pair of guide rails 14 extending in the horizontal direction, and the jig 50 has a shape that can move along the guide rails 14. Therefore, the jig 50 can move on the guide rails 14 on which the mask 15 moves and move above the setting table 25, and it is easy to adapt to the printing apparatus 1 having the automatic replacement function of the mask 15 with the conversion mechanism 60 as in the present embodiment.

[0178] In addition, in the present embodiment, the first correspondence information acquisition process (step ST1), the second correspondence information acquisition process (step ST2), the third correspondence information acquisition process (step ST3), and the first storage unit internal position detection process (step ST4), which are part of the printing operation performed by the printing apparatus 1, constitute the component management method of the printing apparatus 1 of the present embodiment. In the first correspondence information acquisition process, the first correspondence information J1 is obtained for each of the plurality of lower receivers 26. The first correspondence information J1 is information on the correspondence between the lower receiver 26 as the replacement component and the jig 50 on which the lower receiver 26 is mounted; in the second correspondence information acquisition process, the second correspondence information J2 is obtained for each of the plurality of jigs 50. The second correspondence information J2 is information on the correspondence between the jig 50 and the position of the storage unit 3 of the storage area (slot 41S) that stores the jig 50, that is, the internal position of the storage unit; in the third correspondence information acquisition process, the third correspondence information J3 is obtained for each of the plurality of lower receivers 26 based on the first correspondence information J1 and the second correspondence information J2. The third correspondence information J3 is information on the correspondence between the lower receiver 26 as the replacement component and the internal position of the storage unit of the jig 50 on which the lower receiver 26 is mounted; in the first storage unit internal position detection process, when the lower receiver 26 to be set on the setting table 25 is taken out from the storage unit 3 and set on the setting table 25, the internal position of the storage unit of the lower receiver 26 is detected based on the third correspondence information J3 obtained in the third correspondence information acquisition process.

[0179] The lower receiving body 26 installed on the jig 50 has difficulty in reading individual identification information from the replacement member identifiers (lower receiving body identifiers, i.e., the upper surface side identifier 26P and the lower surface side identifier 26Q) which are its identifiers when stored in the storage unit 3. However, in the present embodiment, the individual identification information (lower receiving body information) of the lower receiving body 26 is managed in such a way as to establish an association with the individual identification information (jig information) of the jig 50. Therefore, even in a situation where it is difficult to read information from the individual identifier of the lower receiving body 26 due to the lower receiving body 26 being installed on the jig 50, the individual identification information of the lower receiving body 26 can be easily obtained by reading information from the individual identifier (jig identifier KS2) of the jig 50. And, in the present embodiment, since the individual identification information of the jig 50 and the information on the position within the storage unit are managed in an associated manner, even when the lower receiving body 26 is stored in the storage unit 3 in a state of being installed on the jig 50, the position of the lower receiving body 26 can be easily detected based on the information on the position within the storage unit. Thus, according to the present embodiment, the management of the lower receiving body 26 in a state of being installed on the jig 50 can be easily performed.

[0180] In addition, in the printing apparatus 1 of the present embodiment, the printing unit camera 16, which is a photographing unit, photographs the lower surface side identifier 26Q provided on the lower surface of the lower receiving body 26 located above the setting table 25 for setting on the setting table 25, and performs individual identification of the lower receiving body 26 based on the lower surface side identifier 26Q obtained by this photographing, and determines whether the lower receiving body 26 is suitable for being set on the setting table 25. Therefore, in the printing apparatus 1 of the present embodiment, before the lower receiving body 26 is about to be set on the setting table 25, it can be confirmed whether the lower receiving body 26 is the lower receiving body 26 that should be set on the setting table 25, and an error of installing the lower receiving body 26 that should not be set on the setting table 25 on the setting table 25 can be prevented in advance.

[0181] Moreover, an upper surface side identifier 26P for individual identification of the lower receiving body 26 is also provided on the upper surface of the lower receiving body 26, and individual identification of the lower receiving body 26 can also be performed by photographing the upper surface side identifier 26P. Therefore, in the printing apparatus 1 of the present embodiment, it can also be determined whether the lower receiving body 26 set on the setting table 25 is suitable for the situation where it is set on the setting table 25.

[0182] As described above, in the printing device 1 of the present embodiment, the lower surface side identifier 26Q provided on the lower surface of the lower receiving body 26 is photographed from below the lower receiving body 26 located above the setting table 25 for setting on the setting table 25 by the printing unit camera 16 as the photographing means, and the individual identification of the lower receiving body 26 is performed based on the lower surface side identifier 26Q obtained by the photographing, and it is determined whether the lower receiving body 26 is suitable for setting on the setting table 25. Therefore, according to the printing device 1 of the present embodiment, before the lower receiving body 26 is about to be set on the setting table 25, it can be confirmed whether the lower receiving body 26 is the lower receiving body 26 that should be set on the setting table 25, and the error of installing the lower receiving body 26 that should not be set on the setting table 25 on the setting table 25 can be prevented in advance.

[0183] The embodiments of the present invention have been described above, but the present invention is not limited to the above contents, and various modifications are possible. For example, the structures of the support release unit, the lifting unit, etc. shown in the above embodiments are examples, and other structures may be used as long as they function in a manner of performing the required actions respectively. The clamp 50 may also have other structures as long as it has a pair of support members 54 that can approach and separate from each other, and is located above the setting table 25 in a state where the two ends of the replacement member set before the setting table 25 are supported from below by the pair of support members 54.

[0184] In addition, in the above-mentioned embodiment, the replacement component is described as the lower receiving body 26 that receives the substrate KB from below, but the replacement component is not limited to the lower receiving body 26, and can also be a component such as a cleaning unit for cleaning the lower surface of the mask 15 or a paste supply tank for supplying paste Pst.

[0185] In addition, in the above-mentioned embodiment, it is described that the substrate processing device to which the present invention is applied is a printing device 1 that performs a printing operation of printing paste Pst onto a substrate KB through a mask 15, but the substrate processing device to which the present invention is applied can be any device that has a replacement component and a setting table on which the replacement component can be freely loaded and unloaded, and performs prescribed processing on the substrate by setting the replacement component on the setting table, and is not limited to the printing device 1.

[0186] Industrial Applicability

[0187] The present invention provides a substrate processing device, which can confirm whether a replacement component is a replacement component that should be placed on a setting table before the replacement component is placed on a setting table.

Claims

1. A substrate processing apparatus comprising a replacement member and a mounting table on which the replacement member is detachably mounted, and performing a predetermined process on a substrate by mounting the replacement member on the mounting table, wherein: The substrate processing device comprises: A lower surface side identifier, which is disposed on the lower surface of the replacement component and records the individual identification information of the replacement component; an imaging unit that images the lower surface side identifier from below the replacement member that is located above the installation table in order to be installed on the installation table; as well as A determination unit is configured to perform individual recognition of the replacement component based on the lower surface identifier photographed by the imaging unit, and to determine whether the replacement component is suitable for installation on the installation table.

2. The substrate processing apparatus according to claim 1, wherein: The installation table adsorbs the lower surface of the replacement member at a vacuum adsorption port provided on the upper surface, and the lower surface side identifier is provided in a region of the lower surface of the replacement member that faces the vacuum adsorption port.

3. The substrate processing apparatus according to claim 1, wherein: An upper surface side identifier recording individual identification information of the replacement component is provided on the upper surface of the replacement component, the shooting unit shoots the upper surface side identifier from above the replacement component in the state of being set on the setting table, the judgment unit performs individual identification of the replacement component based on the upper surface side identifier photographed by the shooting unit, and judges whether the replacement component is suitable for being set on the setting table.

4. The substrate processing apparatus according to any one of claims 1 to 3, wherein: The replacement component includes a lower receiving body for receiving the substrate from below, and the substrate processing device comprises: a mask for contacting the upper surface of the substrate supported by the lower receiving body; a scraper for printing paste on the substrate through the mask by scraping the paste on the mask in contact with the upper surface of the substrate; and a clamp for installing the lower receiving body set in front of the setting table.

5. The substrate processing apparatus according to claim 4 as cited in claim 3, wherein: The upper surface side identifier is provided in a region of the upper surface of the lower receiving body that is located outside the substrate when the substrate is received under the lower receiving body.

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