Horizontal two-degree-of-freedom compact vibration table device and operation method thereof

Abstract

The invention provides a horizontal two-degree-of-freedom compact vibration table device and an operation method thereof, and belongs to the technical field of vibration test equipment. The problems that a conventional vibration device is large in occupied space, and internal force exists between two actuators on the same degree of freedom, and the device is prone to being damaged are solved. Wherein the first control oil way is used for supplying oil to one X-direction actuator and returning oil to one Y-direction actuator, and the second control oil way is used for supplying oil to the other X-direction actuator and returning oil to the other Y-direction actuator; in the first control oil way, an oil inlet pipeline and an oil return pipeline are connected with an X-direction actuator through a first three-position four-way control valve, and when a first electromagnetic valve is powered off, a connecting pipeline is disconnected; when the first electromagnetic valve is communicated, the connecting pipeline is communicated; when the second electromagnetic valve is powered off, the two outlets of the first three-position four-way control valve are communicated; when the second electromagnetic valve is powered on, the two outlets of the first three-position four-way control valve are disconnected. The device is small in occupied space, and no internal force exists in the device when the device stops working.

Description

Technical Field

[0001] The present invention belongs to the technical field of vibration test equipment, and particularly relates to a horizontal two-degree-of-freedom compact vibration table device and an operation method thereof. Background Art

[0002] A high-frequency motion device is a test equipment used to simulate the vibration and shock that a product withstands under actual working conditions, and is composed of a tabletop, a motion component, and a control system. By simulating the vibration and shock in actual use, the performance and reliability of the product are tested. When the product has a large mass, a large acceleration, and a wide bandwidth, a servo system driven by hydraulic pressure is often used to complete the test. The platform is interconnected with the reaction base through a hinge, and the power is provided through an external oil circuit system to meet the test requirements. For a conventional vibration device, the use of hinges and reaction bases will increase the floor space of the test equipment, making it difficult to achieve the bandwidth of the signal to be reproduced. Moreover, the layout of the external oil circuit pipes will further make the test space cramped. Generally, two actuators are used to vibrate in the same direction. However, there are dynamic errors in servo motion, which may cause internal forces between the two actuators in the same degree of freedom, easily leading to failures and seriously damaging the device in severe cases. Summary of the Invention

[0003] In view of this, in order to solve the problems of large floor space of a conventional vibration device, difficulty in achieving the bandwidth of the signal to be reproduced, and dynamic errors in servo motion, which may cause internal forces between the two actuators in the same degree of freedom, easily leading to failures and seriously damaging the device in severe cases, the present invention proposes a horizontal two-degree-of-freedom compact vibration table device and an operation method thereof.

[0004] To achieve the above object, the present invention adopts the following technical solutions:

[0005] A horizontal two-degree-of-freedom compact vibration table device includes:

[0006] A base;

[0007] A vibration platform, which is arranged above the base;

[0008] An actuator system, which includes two X-direction actuators, two Y-direction actuators, a first control oil circuit, and a second control oil circuit. The two X-direction actuators are respectively fixedly arranged on the opposite sides of the base along the Y direction, and both can push the vibration platform to vibrate along the X direction. The two Y-direction actuators are respectively fixedly arranged on the opposite sides of the base along the X direction, and both can push the vibration platform to vibrate along the Y direction. The first control oil circuit is used to supply oil and return oil to one X-direction actuator and one Y-direction actuator, and the second control oil circuit is used to supply oil and return oil to the other X-direction actuator and the other Y-direction actuator;

[0009] The first control oil circuit includes a high-pressure accumulator, a low-pressure accumulator, a first solenoid valve, a second solenoid valve, a first three-position four-way control valve, an oil inlet pipeline, an oil return pipeline, and a connecting pipeline. The high-pressure accumulator is communicated with the oil inlet pipeline, and the low-pressure accumulator is communicated with the oil return pipeline. Both the oil inlet pipeline and the oil return pipeline are connected to one of the X-direction actuators through the first three-position four-way control valve. The two ends of the connecting pipeline are respectively communicated with the oil inlet pipeline and the oil return pipeline. The first solenoid valve is arranged on the connecting pipeline. When the first solenoid valve is de-energized, the connecting pipeline is disconnected; when the first solenoid valve is connected, the connecting pipeline is connected. The two ends of the second solenoid valve are respectively communicated with two outlets of the middle position of the first three-position four-way control valve close to the X-direction actuator. When the second solenoid valve is de-energized, the two outlets of the first three-position four-way control valve are connected; when the second solenoid valve is energized, the two outlets of the first three-position four-way control valve are disconnected.

[0010] As a preferred solution of the above horizontal two-degree-of-freedom compact vibration table device, the first control oil circuit further includes an oil inlet branch, an oil return branch, a second three-position four-way control valve, and a third solenoid valve. The oil inlet branch is communicated with the oil inlet pipeline, and the oil return branch is communicated with the oil return pipeline. Both the oil inlet branch and the oil return branch are connected to one of the Y-direction actuators through the second three-position four-way control valve. The two ends of the third solenoid valve are respectively connected to two outlets of the middle position of the second three-position four-way control valve close to the Y-direction actuator. When the third solenoid valve is de-energized, the two outlets of the middle position of the second three-position four-way control valve are connected; when the third solenoid valve is energized, the two outlets of the middle position of the second three-position four-way control valve are disconnected.

[0011] As a preferred solution of the above horizontal two-degree-of-freedom compact vibration table device, the first control oil circuit further includes a throttle valve, and the throttle valve is arranged on the connecting pipeline.

[0012] As a preferred solution of the above horizontal two-degree-of-freedom compact vibration table device, the base includes an oil distribution plate and a plurality of laminated rubber bearings. The plurality of laminated rubber bearings are arranged at intervals and are located between the oil distribution plate and the vibration platform. Part of the oil inlet pipeline is an oil inlet channel arranged on the oil distribution plate, and part of the oil return pipeline is an oil return channel arranged on the oil distribution plate.

[0013] As a preferred solution of the above horizontal two-degree-of-freedom compact vibration table device, the laminated rubber bearing includes an upper shell, a lower shell, a plurality of steel plates, and a rubber layer. The upper shell and the lower shell are respectively fixedly arranged above and below the rubber layer. The plurality of steel plates are sequentially and intermittently embedded in the rubber layer. The upper shell is fixedly connected to the vibration platform, and the lower shell is fixedly connected to the oil distribution plate.

[0014] As a preferred solution of the above horizontal two-degree-of-freedom compact vibration table device, the horizontal two-degree-of-freedom compact vibration table device further includes a cooler, and the outlet of the oil return pipeline is connected to the cooler.

[0015] As a preferred embodiment of the above horizontal two-degree-of-freedom compact vibration table device, the horizontal two-degree-of-freedom compact vibration table device further includes an oil source pressure sensor, a first pressure sensor, and a second pressure sensor. The first pressure sensor and the second pressure sensor are respectively used to detect the left static pressure plate and the right static pressure plate of one of the X-direction actuators, and the oil source pressure sensor is arranged on the oil inlet pipeline.

[0016] As a preferred embodiment of the above horizontal two-degree-of-freedom compact vibration table device, the horizontal two-degree-of-freedom compact vibration table device further includes a displacement sensor, and the displacement sensor is used to detect the displacement of one of the X-direction actuators.

[0017] The present invention also provides an operation method for a horizontal two-degree-of-freedom compact vibration table device, which is characterized in that: the above horizontal two-degree-of-freedom compact vibration table device is adopted, including:

[0018] S1: Supply oil to the oil inlet pipeline;

[0019] S2: Judge whether the pressures of the static pressure plates at both ends of the X-direction actuator reach the set values;

[0020] If so, proceed to S3; if not, proceed to S7;

[0021] S3: Both the first electromagnetic valve and the second electromagnetic valve are energized;

[0022] S4: Control the first three-position four-way control valve to repeatedly change between the left position and the right position, and the X-direction actuator vibrates the vibration platform to perform a test movement;

[0023] S5: After the test movement ends, the first electromagnetic valve is de-energized, and control the first three-position four-way control valve to be in the middle position;

[0024] S6: Stop supplying oil to the oil inlet pipeline, and judge whether the pressures of the static pressure plates at both ends of the X-direction actuator and the oil source pressure are both close to zero;

[0025] If so, proceed to S7; if not, first record the data and then proceed to S7;

[0026] S7: Control the second electromagnetic valve to be de-energized.

[0027] As a preferred embodiment of the operation method of the above horizontal two-degree-of-freedom compact vibration table device, the horizontal movement degrees of freedom are two directions of X and Y. Using degree-of-freedom control, assuming the distance between the two X-direction actuators is a, and the distance between the two Y-direction actuators is b, then the corresponding degree-of-freedom decomposition matrix C and degree-of-freedom synthesis matrix D are respectively:

[0028]

[0029] Compared with the prior art, the horizontal two-degree-of-freedom compact vibration table device and the operation method thereof provided by the present invention have the following beneficial effects:

[0030] 1. The present invention provides a horizontal two-degree-of-freedom compact vibration table device and an operation method thereof. In the horizontal two-degree-of-freedom compact vibration table device, a high-pressure accumulator is used for the oil supply circuit, and a low-pressure accumulator is used for the oil return circuit. The first control oil circuit can control one X-axis actuator and one Y-axis actuator to vibrate the vibration platform, and the second control oil circuit can control another X-axis actuator and another Y-axis actuator to vibrate the vibration platform; the upper surface of the vibration platform is used as a reference surface for installing the load. In the first control oil circuit, the high-pressure oil at the oil inlet enters the first three-position four-way control valve with the assistance of the high-pressure accumulator, and the first three-position four-way control valve controls the reciprocating motion of the X-axis actuator. When working, the first solenoid valve is energized, and when stopped, the first solenoid valve is de-energized. In order to reduce the internal force between the actuators when the device is static and the damage to the device when a fault occurs, a second solenoid valve is also provided. When the second solenoid valve is powered off, the two outlets in the middle position of the first three-position four-way control valve and the two outlets in the middle position connected to the X-direction actuator are connected. When the first three-position four-way control valve is in the middle position and the second solenoid valve is powered off, the two oil chambers in the X-direction actuator can be connected. At this time, even if there is a dynamic error in the servo motion so that there is an internal force between the two actuators on the same degree of freedom, the valve core free position of the first three-position four-way control valve will be adaptively changed through the hydraulic force, so that there is no internal force in the two actuators on the same degree of freedom, and the entire system is free of internal force.

[0031] 2. The present invention provides a horizontal two-degree-of-freedom compact vibration table device and an operation method thereof, wherein the base includes an oil distribution plate and a plurality of laminated rubber bearings, the plurality of laminated rubber bearings are arranged at intervals and located between the oil distribution plate and the vibration platform, part of the oil inlet pipeline is an oil inlet channel arranged in the oil distribution plate, and part of the oil return pipeline is an oil return channel arranged in the oil distribution plate. Arranging part of the oil inlet pipeline and the oil return pipeline in the oil distribution plate can save space and further reduce the occupied space of the horizontal two-degree-of-freedom compact vibration table device.

[0032] 3. The present invention provides a horizontal two-degree-of-freedom compact vibration table device and an operation method thereof. In the horizontal two-degree-of-freedom compact vibration table device, the laminated rubber bearing is both a motion support for the vibration platform and a physical vibration isolation for the vibration platform movement. The vertical support of the horizontal two-degree-of-freedom compact vibration table device is supported by a laminated rubber bearing. The laminated rubber bearing is realized by stacking steel plates and rubber, and has the characteristics of large axial stiffness and small lateral stiffness. When the load direction is applied along the axial direction of the laminated rubber bearing, the laminated rubber bearing can transfer the load to the mounting surface. When the load is applied along a direction perpendicular to the axis of the laminated rubber bearing, the laminated rubber bearing can perform a small lateral movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The drawings forming a part of the present invention are used to provide a further understanding of the present invention. The schematic embodiments and descriptions thereof of the present invention are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0034] Figure 1 FIG. is a schematic structural diagram of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0035] Figure 2 FIG. is a schematic structural diagram of a vibration platform of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0036] Figure 3 FIG. is a natural frequency diagram of a vibration platform of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0037] Figure 4 FIG. is a schematic structural diagram of a laminated rubber bearing of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0038] Figure 5 FIG. is a cross-sectional view of a laminated rubber bearing of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0039] Figure 6 FIG. is a schematic structural diagram of a base of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0040] Figure 7 FIG. is a schematic structural diagram of an oil distribution plate of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0041] Figure 8 FIG. is a cross-sectional view of an oil distribution plate of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0042] Figure 9 FIG. is a schematic structural diagram of an X-direction actuator of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0043] Figure 10 FIG. is a schematic diagram of a first control oil circuit and a second control oil circuit of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention;

[0044] Figure 11 FIG. is a flowchart of an operation method of a horizontal two-degree-of-freedom compact vibration table device provided by a specific embodiment of the present invention.

[0045] In the figures:

[0046] 1. Oil distribution plate; 2. Laminated rubber bearing; 3. X-direction actuator; 4. Y-direction actuator; 5. High-pressure accumulator; 6. Low-pressure accumulator; 7. Vibration platform; 8. First three-position four-way control valve; 9. Oil inlet pipeline; 10. Oil return pipeline; 11. Connecting pipeline; 12. First solenoid valve; 13. Second solenoid valve; 14. Throttle valve; 15. Oil source pressure sensor; 16. Displacement sensor; 17. First pressure sensor; 18. Second pressure sensor;

[0047] 21. Upper shell; 22. Rubber layer; 23. Steel plate; 24. Lower shell; 101. Oil inlet hole passage; 102. Oil return hole passage. Detailed implementation manners

[0048] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. It should be noted that, without conflict, the embodiments and features in the embodiments of the present invention may be combined with each other. The described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0049] In the description of the present invention, unless otherwise clearly defined and limited, the terms "connected", "connected", and "fixed" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the internal communication of two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0050] In the present invention, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "above", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "below", and "under" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than that of the second feature.

[0051] In the description of this embodiment, the orientation or positional relationship terms such as "above", "below", "right", etc. are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present invention. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0052] See Figures 1-11 To describe this embodiment, the present invention provides a horizontal two-degree-of-freedom compact vibration table device and its operation method. The horizontal two-degree-of-freedom compact vibration table device includes a base, a vibration platform 7, and an actuator system. The vibration platform 7 is arranged above the base. The actuator system includes two X-direction actuators 3, two Y-direction actuators 4, a first control oil circuit, and a second control oil circuit. The two X-direction actuators 3 are respectively fixedly arranged on two opposite sides of the base along the Y direction and can both push the vibration platform 7 to vibrate in the X direction. The two Y-direction actuators 4 are respectively fixedly arranged on two opposite sides of the base along the X direction and can both push the vibration platform 7 to vibrate in the Y direction. The first control oil circuit is used for supplying oil and returning oil to one X-direction actuator 3 and one Y-direction actuator. The second control oil circuit is used for supplying oil and returning oil to the other X-direction actuator 3 and the other Y-direction actuator 4. The first control oil circuit includes a high-pressure accumulator 5, a low-pressure accumulator 6, a first solenoid valve 12, a second solenoid valve 13, a first three-position four-way control valve 8, an oil inlet pipeline 9, an oil return pipeline 10, and a connecting pipeline 11. The high-pressure accumulator 5 is communicated with the oil inlet pipeline 9, and the low-pressure accumulator 6 is communicated with the oil return pipeline 10. Both the oil inlet pipeline 9 and the oil return pipeline 10 are connected to one X-direction actuator 3 through the first three-position four-way control valve 8. The two ends of the connecting pipeline 11 are respectively communicated with the oil inlet pipeline 9 and the oil return pipeline 10. The first solenoid valve 12 is arranged on the connecting pipeline 11. When the first solenoid valve 12 is de-energized, the connecting pipeline 11 is disconnected. When the first solenoid valve 12 is connected, the connecting pipeline 11 is connected. The two ends of the second solenoid valve 13 are respectively communicated with two outlets of the middle position of the first three-position four-way control valve 8 close to the X-direction actuator 3. When the second solenoid valve 13 is de-energized, the two outlets of the first three-position four-way control valve 8 are connected. When the second solenoid valve 13 is energized, the two outlets of the first three-position four-way control valve 8 are disconnected.

[0053] In the horizontal two-degree-of-freedom compact vibration table device, the high-pressure accumulator 5 is used for the oil supply circuit, and the low-pressure accumulator 6 is used for the oil return circuit. The first control oil circuit can control one X-axis actuator 3 and one Y-axis actuator to vibrate the vibration platform 7, and the second control oil circuit can control another X-axis actuator 3 and another Y-axis actuator 4 to vibrate the vibration platform 7; the upper surface of the vibration platform 7 is used as the reference surface for installing the load. In the first control oil circuit, the high-pressure oil at the oil inlet enters the first three-position four-way control valve 8 with the assistance of the high-pressure accumulator 5, and the first three-position four-way control valve 8 controls the reciprocating motion of the X-axis actuator 3. When working, the first solenoid valve 12 is energized, and when stopping, the first solenoid valve 12 is de-energized. In order to reduce the internal force between the actuators when the device is static and the damage to the device when a fault occurs, a second solenoid valve 13 is also provided. When the second solenoid valve 13 is powered off, the two outlets at the middle position of the first three-position four-way control valve 8 and the two outlets at the middle position connected to the X-direction actuator 3 are connected. When the first three-position four-way control valve 8 is in the middle position and the second solenoid valve 13 is powered off, the two oil chambers in the X-direction actuator 3 can be connected. At this time, even if there is a dynamic error in the servo motion so that there is an internal force between the two actuators on the same degree of freedom, the valve core free position of the first three-position four-way control valve 8 will be adaptively changed through the hydraulic force, so that there is no internal force in the two actuators on the same degree of freedom, and the entire system is free of internal force.

[0054] It can be understood that each actuator includes two static pressure plates and a cylinder body. A piston is slidably arranged in the cylinder body, and the piston divides the space in the cylinder body into two oil chambers. A piston rod is arranged at both ends of the piston. Two static pressure plates are respectively installed at the front end of the piston rod. The end faces of the static pressure plates contact the contact surface on the vibration platform 7, and play a role in force transmission and guidance. For example, when the vibration platform 7 moves along the X direction, the static pressure plate of the X-direction actuator 3 plays a role in force transmission, pushing the vibration platform 7 to vibrate along the X direction; while the static pressure plate of the Y-direction actuator 4 plays a role in motion guidance for the X-direction movement, so that the vibration platform 7 keeps moving along the X direction without deviation. A spring is installed at the rear end of the piston rod, which pushes the piston rod to make the static pressure plate close to the side of the vibration platform 7 when there is no oil source pressure, so as to prevent hydraulic oil leakage; a static pressure ball head structure is adopted between the static pressure plate and the piston rod, and the static pressure plate can swing around the plunger. It can be seen that the mutual installation position of the vibration platform 7 and the actuator ensures that for each contact surface on the vibration platform 7, it is both a supporting surface in the direction of the contact static pressure plate and a sliding surface in a mutually perpendicular direction.

[0055] It is understandable that in order to accurately transmit the force and motion law of the electro-hydraulic servo system to the load, the vibration platform 7 should be as light as possible while ensuring sufficient rigidity and high natural frequency. The upper surface of the vibration platform 7 is the reference surface for installing the load, and the outer edge of the upper surface of the vibration platform 7 is distributed with threaded holes.

[0056] Optionally, the first control oil circuit further includes an oil inlet branch, an oil return branch, a second three-position four-way control valve, and a third solenoid valve. The oil inlet branch is communicated with the oil inlet pipeline 9, and the oil return branch is communicated with the oil return pipeline 10. Both the oil inlet branch and the oil return branch are connected to one of the Y-direction actuators 4 through the second three-position four-way control valve. Two ends of the third solenoid valve are respectively connected to two outlets of the middle position of the second three-position four-way control valve close to the Y-direction actuator 4. When the third solenoid valve is de-energized, the two outlets of the middle position of the second three-position four-way control valve are communicated; when the third solenoid valve is energized, the two outlets of the middle position of the second three-position four-way control valve are disconnected. It can be understood that the two outlets connected to the third solenoid valve are the two outlets connected to the Y-direction actuator 4. When the second three-position four-way control valve is in the middle position and the third solenoid valve is de-energized, there is no internal force in the two actuators on the same degree of freedom.

[0057] It can be understood that the second control oil circuit is similar to the first control oil circuit. The second control oil circuit is also provided with a high-pressure accumulator 5, a low-pressure accumulator 6, three solenoid valves, two three-position four-way control valves, an oil inlet pipeline 9, an oil return pipeline 10, a connecting pipeline 11, an oil inlet branch, and an oil return branch. The connection relationship is the same as that of the first control oil circuit and will not be described in detail here.

[0058] Optionally, the first control oil circuit further includes a throttle valve 14, and the throttle valve 14 is arranged on the connecting pipeline 11.

[0059] Optionally, the base includes a distribution plate 1 and a plurality of laminated rubber bearings 2. The plurality of laminated rubber bearings 2 are arranged at intervals and are located between the distribution plate 1 and the vibration platform 7. Part of the oil inlet pipeline 9 is an oil inlet channel 101 arranged on the distribution plate 1, and part of the oil return pipeline 10 is an oil return channel 102 arranged on the distribution plate 1. Arranging part of the oil inlet pipeline 9 and the oil return pipeline 10 in the distribution plate 1 can save space and further reduce the occupied space of the horizontal two-degree-of-freedom compact vibration table device.

[0060] The laminated rubber bearings 2 are both the movement supports of the vibration platform 7 and the physical vibration isolators for the movement of the vibration platform 7. The X-direction actuator 3, the Y-direction actuator 4, the high-pressure accumulator 5, and the low-pressure accumulator 6 are all installed on the distribution plate 1, and the distribution plate 1 is processed from a steel plate 23. The distribution plate 1 is also provided with an oil inlet and an oil return port. The oil inlet is connected to the starting point of the oil inlet pipeline 9, and the oil return port is connected to the end point of the oil return pipeline 10. A plurality of installation positions for the laminated rubber bearings 2 are arranged at intervals on the distribution plate 1. The number of the laminated rubber bearings 2 is multiple, and the multiple laminated rubber bearings 2 are arranged in one-to-one correspondence with the multiple installation positions for the laminated rubber bearings 2. The laminated rubber bearings 2 are arranged on the distribution plate 1 through fixing bolts and positioning pins. The break points of the oil inlet channel 101 and the oil return channel 102 in the figure are exactly the positions where the actuators are installed. In this embodiment, the number of the laminated rubber bearings 2 is ten.

[0061] Optionally, the laminated rubber bearing 2 includes an upper shell 21, a lower shell 24, a plurality of steel plates 23 and a rubber layer 22. The upper shell 21 and the lower shell 24 are respectively fixedly arranged above and below the rubber layer 22. The plurality of steel plates 23 are sequentially and spacedly embedded in the rubber layer 22. The upper shell 21 is fixedly connected to the vibration platform 7, and the lower shell 24 is fixedly connected to the oil distribution plate 1.

[0062] The vertical support of the horizontal two-degree-of-freedom compact vibration table device uses the laminated rubber bearing 2 for support. The laminated rubber bearing 2 is realized by the superposition of steel plates 23 and rubber, and has the characteristics of large axial stiffness and small lateral stiffness. When the load direction is applied along the axis of the laminated rubber bearing 2, the laminated rubber bearing 2 can transfer the load to the installation surface. When the load is applied perpendicular to the axis of the laminated rubber bearing 2, the laminated rubber bearing 2 can perform small-displacement lateral movement.

[0063] Optionally, the horizontal two-degree-of-freedom compact vibration table device further includes a cooler, and the outlet of the oil return pipeline 10 is connected to the cooler. The cooler is used to cool the oil in the oil return pipeline 10.

[0064] Optionally, the horizontal two-degree-of-freedom compact vibration table device further includes a first pressure sensor 17 and a second pressure sensor 18, and the first pressure sensor 17 and the second pressure sensor 18 are respectively used to detect the left static pressure plate and the right static pressure plate of one of the X-direction actuators 3.

[0065] Optionally, the horizontal two-degree-of-freedom compact vibration table device further includes an oil source pressure sensor 15, and the oil source pressure sensor 15 is arranged on the oil inlet pipeline 9.

[0066] Optionally, the horizontal two-degree-of-freedom compact vibration table device further includes a displacement sensor 16, and the displacement sensor 16 is used to detect the displacement of one of the X-direction actuators 3.

[0067] The present invention also provides an operation method of a horizontal two-degree-of-freedom compact vibration table device, using the above-mentioned horizontal two-degree-of-freedom compact vibration table device, including:

[0068] S1: Supply oil to the oil inlet pipeline 9;

[0069] S2: Judge whether the pressures of the static pressure plates at both ends of the X-direction actuator 3 reach the set values;

[0070] If so, perform S3; if not, perform S7;

[0071] S3: Both the first solenoid valve 12 and the second solenoid valve 13 are energized;

[0072] S4: Control the first three-position four-way control valve 8 to repeatedly change between the left position and the right position, and the X-direction actuator 3 vibrates the vibration platform 7 to perform a test movement;

[0073] S5: After the test movement ends, cut off the power supply of the first electromagnetic valve 12 and control the first three-position four-way control valve 8 to be in the middle position;

[0074] S6: Stop supplying oil to the oil inlet pipeline 9, and judge whether the pressures of the static pressure plates at both ends of the X-direction actuator 3 and the oil source pressure are both close to zero;

[0075] If so, proceed to S7; if not, record the data first and then proceed to S7;

[0076] S7: Control the second electromagnetic valve 13 to cut off the power supply.

[0077] In the initial state, supply oil to the oil inlet. When the pressures at both ends of the static pressure plate reach the set value, energize the first electromagnetic valve 12 and the second electromagnetic valve 13, otherwise check the static pressure plate system. At this time, the device starts to move according to the requirements. After the test movement ends, first cut off the power supply of the first electromagnetic valve 12, stop supplying oil to the oil inlet. When the pressure values of the oil source pressure sensor 15, the first pressure sensor 17, and the second pressure sensor 18 are all close to zero, it means that the pressure of the oil supply system has been relieved and the pressure of the static pressure plate has also been relieved. At this time, the second electromagnetic valve 13 can be cut off the power supply to make the system have no internal force.

[0078] Optionally, the horizontal direction movement degrees of freedom are two directions of X and Y. Using degrees of freedom control, let the distance between the two X-direction actuators 3 be a, and the distance between the two Y-direction actuators 4 be b. Then the corresponding degrees of freedom decomposition matrix C and degrees of freedom synthesis matrix D are respectively:

[0079]

[0080] The horizontal direction movement degrees of freedom are two directions of X and Y, and there are four actuators. Therefore, this horizontal two-degree-of-freedom compact vibration table device is a redundant system. If the device cannot be well controlled, it will generate a large internal force inside the device. Therefore, degrees of freedom control is adopted here. Let the distances between the X and Y direction actuators be a and b respectively. Then the corresponding degrees of freedom decomposition matrix C and degrees of freedom synthesis matrix D. Through the matrices C and D, the redundant mechanism can be effectively controlled to reduce the internal force inside the system.

[0081] Obviously, the embodiments of the present invention disclosed above are only used to help illustrate the present invention. The embodiments do not describe all the details in detail, nor do they limit the invention to the specific embodiments described. According to the content of this specification, many modifications and variations can be made. These embodiments are selected and specifically described in this specification in order to better explain the principle and practical application of the present invention, so that those skilled in the art can well understand and utilize the present invention. It is not necessary and impossible to enumerate all the embodiments here.

Claims

1. A horizontal two-degree-of-freedom compact vibration table device, characterized in that: include: Base; A vibration platform (7), the vibration platform (7) is arranged above the base; An actuator system, the actuator system comprising two X-direction actuators (3), two Y-direction actuators (4), a first control oil circuit and a second control oil circuit, the two X-direction actuators (3) are respectively fixed on two opposite sides of a base along the Y direction, and can both drive a vibration platform (7) to vibrate along the X direction, the two Y-direction actuators (4) are respectively fixed on two opposite sides of a base along the X direction, and can both drive a vibration platform (7) to vibrate along the Y direction, the first control oil circuit is used to supply oil to and return oil to one of the X-direction actuators (3) and one of the Y-direction actuators, and the second control oil circuit is used to supply oil to and return oil to the other X-direction actuator (3) and the other Y-direction actuator (4); The first control oil circuit comprises a high-pressure accumulator (5), a low-pressure accumulator (6), a first solenoid valve (12), a second solenoid valve (13), a first three-position four-way control valve (8), an oil inlet pipeline (9), an oil return pipeline (10) and a connecting pipeline (11); the high-pressure accumulator (5) is connected to the oil inlet pipeline (9), the low-pressure accumulator (6) is connected to the oil return pipeline (10), the oil inlet pipeline (9) and the oil return pipeline (10) are both connected to an X-direction actuator (3) via the first three-position four-way control valve (8), and the two ends of the connecting pipeline (11) are respectively connected to the oil inlet pipeline (9) and the oil return pipeline (10). The oil return pipeline (10) is provided with a first solenoid valve (12) on the connecting pipeline (11). When the first solenoid valve (12) is powered off, the connecting pipeline (11) is disconnected; when the first solenoid valve (12) is powered on, the connecting pipeline (11) is powered on; two ends of the second solenoid valve (13) are respectively connected to two outlets of the middle position of the first three-position four-way control valve (8) close to the X-direction actuator (3); when the second solenoid valve (13) is powered off, the two outlets of the first three-position four-way control valve (8) are connected; when the second solenoid valve (13) is powered on, the two outlets of the first three-position four-way control valve (8) are disconnected.

2. The horizontal two-degree-of-freedom compact vibration table device according to claim 1 is characterized in that: The first control oil circuit also includes an oil inlet branch, an oil return branch, a second three-position four-way control valve and a third solenoid valve. The oil inlet branch is connected to the oil inlet pipeline (9), and the oil return branch is connected to the oil return pipeline (10). The oil inlet branch and the oil return branch are both connected to the Y-direction actuator (4) through the second three-position four-way control valve. The two ends of the third solenoid valve are respectively connected to two outlets at the middle position of the second three-position four-way control valve close to the Y-direction actuator (4). When the third solenoid valve is powered off, the two outlets at the middle position of the second three-position four-way control valve are connected; when the third solenoid valve is powered on, the two outlets at the middle position of the second three-position four-way control valve are disconnected.

3. The horizontal two-degree-of-freedom compact vibration table device according to claim 1, characterized in that: The first control oil circuit also includes a throttle valve (14), and the throttle valve (14) is arranged on the connecting pipeline (11).

4. The horizontal two-degree-of-freedom compact vibration table device according to claim 1, characterized in that: The base comprises an oil distribution plate (1) and a plurality of laminated rubber bearings (2), wherein the plurality of laminated rubber bearings (2) are arranged at intervals and are located between the oil distribution plate (1) and the vibration platform (7), a portion of the oil inlet pipeline (9) is an oil inlet channel (101) arranged in the oil distribution plate (1), and a portion of the oil return pipeline (10) is an oil return channel (102) arranged in the oil distribution plate (1).

5. The horizontal two-degree-of-freedom compact vibration table device according to claim 4, characterized in that: The laminated rubber bearing (2) comprises an upper shell (21), a lower shell (24), a plurality of steel plates (23) and a rubber layer (22); the upper shell (21) and the lower shell (24) are respectively fixedly arranged above and below the rubber layer (22); the plurality of steel plates (23) are sequentially embedded in the rubber layer (22) at intervals; the upper shell (21) is fixedly connected to the vibration platform (7); and the lower shell (24) is fixedly connected to the oil distribution plate (1).

6. The horizontal two-degree-of-freedom compact vibration table device according to claim 1, characterized in that: It also comprises a cooler, and the outlet of the oil return pipeline (10) is connected to the cooler.

7. The horizontal two-degree-of-freedom compact vibration table device according to claim 1, characterized in that: It also includes an oil source pressure sensor (15), a first pressure sensor (17) and a second pressure sensor (18), wherein the first pressure sensor (17) and the second pressure sensor (18) are respectively used to detect a left static pressure plate and a right static pressure plate of one of the X-axis actuators (3), and the oil source pressure sensor (15) is arranged on the oil inlet pipeline (9).

8. The horizontal two-degree-of-freedom compact vibration table device according to claim 1, characterized in that: It also includes a displacement sensor (16), which is used to detect the displacement of one of the X-axis actuators.

9. A method for operating a horizontal two-degree-of-freedom compact vibration table device, characterized in that: The horizontal two-degree-of-freedom compact vibration table device according to any one of claims 1 to 8 comprises: S1: supply oil to the oil inlet pipeline (9); S2: Determine whether the pressure of the static pressure plates at both ends of the X-axis actuator (3) reaches the set value; If yes, proceed to S3; if no, proceed to S7; S3: Both the first solenoid valve (12) and the second solenoid valve (13) are energized; S4: Control the first three-position four-way control valve (8) to repeatedly switch between the left position and the right position, and the X-axis actuator (3) vibrates the vibration platform (7) to perform a test movement; S5: After the test movement is completed, the first solenoid valve (12) is powered off, and the first three-position four-way control valve (8) is controlled to be in the middle position; S6: stop supplying oil to the oil inlet pipeline (9), and determine whether the pressure of the static pressure plates at both ends of the X-axis actuator (3) and the oil source pressure are both close to zero; If yes, proceed to S7; if no, record the data first and then proceed to S7; S7: Control the second solenoid valve (13) to cut off power.

10. The method for operating the horizontal two-degree-of-freedom compact vibration table device according to claim 9, characterized in that: The horizontal motion degrees of freedom are in the X and Y directions. Using degree of freedom control, the spacing between the two X-direction actuators (3) is a, and the spacing between the two Y-direction actuators (4) is b. The corresponding degree of freedom decomposition matrix C and degree of freedom synthesis matrix D are:

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