Efficient dual-light-path method and detection method for energy dispersive X-ray fluorescence spectrophotometer

Abstract

The invention discloses a high-efficiency double-light-path method for an energy dispersion X-ray fluorescence spectrophotometer, which comprises the following steps: arranging a plurality of light path modules, enabling one path to be in a fixed mode, enabling the displacement of other paths to be adjusted through a moving module, optimally configuring and integrating light path accessories of an optical shutter, a collimation component and an optical filter switching component, and enabling a test unit to be used for testing the samples according to different specifications and sizes. And the displacement of the movable optical path is effectively adjusted according to algorithm calculation, so that high efficiency and high performance are realized, the test requirements of different products are met, and the requirements of accuracy and efficiency in the test process can be met at the same time.

Description

Technical Field

[0001] The present invention belongs to the field of energy dispersive X-ray fluorescence spectroscopy detection, and relates to a dual optical path system for a spectrometer optical path. Background Art

[0002] In modern market industry applications, with the increasingly high demands of customers, the optical path system reception mode of traditional products has problems such as insufficient reception angle and reception energy in some cases, so it is becoming increasingly difficult to meet the market's application requirements for high efficiency and high performance. At the same time, due to the further improvement of efficiency requirements, especially under the premise of efficiency requirements, there is no corresponding equipment for high-efficiency and high-precision detection of array samples. Therefore, it is necessary to find new application solutions with high efficiency and high performance. Summary of the Invention

[0003] In view of this, it is necessary to overcome at least one of the above defects in the prior art. The present invention provides an efficient dual optical path method for an energy dispersive X-ray fluorescence spectrometer, which can effectively solve related problems. The process includes: The sample array is arranged on the lower side of the optical path bottom plate. A first optical path module is fixedly installed on the optical path bottom plate, a second optical path module, a third optical path module up to the nth optical path module that are installed on a sliding member and match the first optical path module, an integrated shutter collimator filter switching module installed under the first optical path module, the second optical path module, the third optical path module up to the nth optical path module, and a movement adjustment module for adjusting the movement of the second optical path module, the third optical path module up to the nth optical path module and the first optical path module; the distance between the first optical path module and a plurality of the second optical path modules is adjusted and fixed in advance or according to the sample array to form the distance S2 between the first optical path module and the second optical path module, the distance S3 between the second optical path module and the third optical path module, up to the distance Sn between the (n - 1)th optical path module and the nth optical path module, and the first optical path module corresponds to the starting sample in the sample array, the second optical path module corresponds to the mth sample determined according to the distance S2, up to the nth optical path module corresponding to the sample pairs arranged and combined according to the (n - 1)*(m - 1) samples determined according to the distance Sn, and then the driving part is used to drive the optical path bottom plate for array synchronous scanning detection.

[0004] The method-related device includes an optical path base plate, a first optical path module fixedly installed on the optical path base plate, a second optical path module, a third optical path module up to an nth optical path module that are installed on a sliding component on the optical path base plate and match the fixed optical path module, an integrated optical shutter collimation filter switching module installed below the first optical path module, the second optical path module, the third optical path module up to the nth optical path module, and a moving adjustment module for adjusting the second optical path module, the third optical path module up to the nth optical path module and the first optical path module; The first optical path module includes a single-channel X-ray source component for providing an X-ray source to excite a sample, a dual-channel detector component for receiving feedback signals, an optical path cavity for positioning and installing the X-ray source component and multiple detector components. The optical path cavity has a vertical interface for installing the X-ray source component and an inclined interface surrounding the vertical interface and for installing multiple detector components. The vertical interface and the inclined interface connect to the internal optical path chamber of the optical path cavity. The sample is installed below the vertical interface, and the inclined interface axially points to the sample; The second optical path module, the third optical path module up to the nth optical path module include a single-channel X-ray source component for providing an X-ray source to excite a sample, a dual-channel detector component for receiving feedback signals, an optical path cavity for positioning and installing the X-ray source component and multiple detector components. The optical path cavity has a vertical interface for installing the X-ray source component and an inclined interface surrounding the vertical interface and for installing multiple detector components. The vertical interface and the inclined interface connect to the internal optical path chamber of the optical path cavity. The sample is installed below the vertical interface, and the inclined interface axially points to the sample; The moving adjustment module corresponds one-to-one with the second optical path module, the third optical path module up to the nth optical path module. The moving adjustment module is connected to the second optical path module, the third optical path module up to the nth optical path module through a connecting component, and drives the second optical path module, the third optical path module up to the nth optical path module to move forward and backward to adjust the distance between the first optical path module or the second optical path module, the third optical path module up to the nth optical path module.

[0005] According to the description of the prior art in the background art of the present invention, in the optical path system reception mode of traditional products, due to the problems of insufficient reception angle and reception energy in some cases, it is increasingly difficult to meet the market's application requirements for high efficiency and high performance. At the same time, due to the further improvement of the efficiency requirements, especially under the premise of efficiency requirements, there is a lack of corresponding equipment and methods for detecting array samples with high efficiency and high precision; while the high-efficiency dual optical path method of the energy dispersive X-ray fluorescence spectrometer disclosed in the present invention optimizes the product's optical path system from the actual application of the product, arranges multiple optical path modules, one is in a fixed mode, and the other paths can adjust their displacement amounts through a moving module, and optimizes and configures optical path accessories such as integrated shutters, collimators, and filter switching components. The test unit calculates the effective adjustment of the displacement amount of the movable optical path according to the algorithm for samples of different specifications and sizes, so as to achieve a high-efficiency and high-performance optical path system, thereby meeting the test requirements of different products, and can simultaneously meet the requirements of accuracy and efficiency in the test process, and is applied to industries with higher requirements for efficiency and accuracy such as the RoHS directive-related industries, the electronic product industry, and integrated circuits.

[0006] In addition, the high-efficiency dual optical path method of the energy dispersive X-ray fluorescence spectrometer disclosed in the present invention also has the following additional technical features: Further, the detector assembly and the tilt interface are symmetrically distributed around the single-channel X-ray source assembly and the vertical interface, and are evenly distributed, which can make the overall detection effect more accurate and obtain higher efficiency.

[0007] Further, the angle of the tilt interface is 20-70 degrees. The design of the angle not only brings convenience to installation and maintenance, but also has a better effect on the collection of excitation light.

[0008] Furthermore, the angle of the tilt interface is 30, 45, 50, 60, 70 degrees.

[0009] Further, the detector assembly is installed on the tilt interface through a detector insulating block, and the X-ray source assembly is installed on the vertical interface through an optical tube fixing ring.

[0010] Further, a collimator for providing collimation is also provided between the sample and the X-ray source assembly. The collimator is a circular hole for shielding X-rays in non-necessary / non-central regions.

[0011] Further, the first optical path module, the second optical path module up to the nth optical path module also include a shutter assembly. The shutter assembly includes a shutter plate, and a shutter flap for shielding X-ray leakage at the X-ray exit when the X-ray source is working normally and a filter for filtering stray light are installed on the shutter plate.

[0012] Further, the shutter assembly further includes a motor. The motor drives the shutter plate through a crank plate with a long slot. A rotating component is installed on the shutter plate, and the rotating component is inserted into the long slot of the crank plate. A slide rail assembly for driving the movement of the shutter plate is arranged below the shutter plate.

[0013] Further, the shutter baffle adopts a labyrinth structure, and the shutter plate has a plurality of annular vertical groove structures.

[0014] Further, the dual optical path system further includes a high-voltage unit for improving the high excitation efficiency of the X-ray source. The high-voltage unit is connected to the first optical path module, the second optical path module, the third optical path module, and up to the nth optical path module.

[0015] Further, the method can determine how many moving optical path modules to use according to the width of the sample array. When the width of the sample array is small, only two sets of optical path modules, such as the first optical path module and the second optical path module, can be used. To improve efficiency, the distance between the first optical path module and the second optical path module can be adjusted to half of the width of the sample array (the sample array is i*j). When starting the detection, the detection point of the first optical path module is at the first starting point (1,1) of the sample array, and the detection starting point of the second optical path module is at the sample (i / 2,j). If i is odd, the detection starting point of the second optical path module is at ((i + 1) / 2,j). In this way, the efficiency can be doubled.

[0016] When the width of the sample array is large, then n>2 moving optical path modules can be used. The method is the same as the method when n = 2, and the efficiency can be increased by n times. If the sample array is even larger, the optical path modules on the optical path bottom plate can be made into an array-type optical path, and its efficiency can be increased even more. At the same time, due to the adoption of the dual-path detection component, the detection accuracy can be greatly improved.

[0017] In the detection method, the sample can be fixed and the optical path can move in the XY axes, even including the Z axis movement. Or the optical path is only responsible for the Z axis movement and the sample moves in the XY axes, thereby forming a three-dimensional movement between the optical path and the sample, and further improving the overall efficiency.

[0018] The additional aspects and advantages of the present invention will be partially given in the following description, partially become obvious from the following description, or be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become obvious and easy to understand from the following description of the embodiments in conjunction with the drawings, wherein: Figure 1It is a top view schematic diagram of the overall system of the present invention (only two optical path modules are included, and there can be multiple parallel or juxtaposed optical path modules); Figure 2 It is a side view schematic diagram of the overall system of the present invention; Figure 3 It is a three-dimensional schematic diagram of the overall system of the present invention; Figure 4 It is a schematic diagram of the sample array of the present invention (the markings in the sample circles represent parallel detection using two optical path modules); Figure 5 It is a three-dimensional schematic diagram of the optical path module of the present invention; Figure 6 It is a front view schematic diagram of the optical path module of the present invention; Figure 7 It is a side view schematic diagram of the optical path module of the present invention; Figure 8 It is a top view schematic diagram of the shutter assembly in the present invention; Figure 9 It is a schematic diagram of the shutter assembly in the present invention; Figure 10 It is a schematic diagram of the maze structure of the shutter plate in the present invention; Among them, 1. optical path cavity, 2. detector insulating block, 3. a group of detector components, 4. X-ray source component, 5. wire tying post, 6. a second group of detector components, 7. light tube fixing ring, 8. collimator, 9. shutter baffle, 10. filter, 11. shutter plate, A shutter assembly, A4. shutter fixing plate, A5. motor, A6. slide rail, A7. bearing, A8. crank plate, A9. shutter trigger piece, A10. photoelectric switch, B optical path bottom plate, C first optical path module, D high-voltage unit, E adjustment module, F connecting plate, G second optical path module. Detailed implementation manners

[0020] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention and should not be construed as limiting the present invention.

[0021] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by the terms "upper", "lower", "bottom", "top", "front", "rear", "inner", "outer", "horizontal", "vertical", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and defined, the terms "coupling", "connecting", "linking", "joining", "matching" should be understood in a broad sense. For example, it may be a fixed connection, an integral connection, or a detachable connection; it may be the connection inside two components; it may be directly connected or indirectly connected through an intermediate medium; "matching" may be the matching between surfaces, or the matching between a point and a surface or a line and a surface, and also includes the matching between a hole and a shaft. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] The high-efficiency dual optical path method of the energy dispersive X-ray fluorescence spectrometer of the present invention will be described below with reference to the accompanying drawings. Figure 1-4 These are various schematic diagrams of the overall system of the present invention. Figure 5-7 These are schematic diagrams of the optical path module of the present invention. Figure 8-9 These are schematic diagrams of the shutter assembly in the present invention.

[0024] According to an embodiment of the present invention, as Figure 1-7 , the method includes: a sample array is arranged on the lower side of an optical path bottom plate, a first optical path module is fixedly installed on the optical path bottom plate, a second optical path module, a third optical path module up to an nth optical path module that are installed on a sliding member and match the first optical path module, an integrated shutter collimator filter switching module installed under the first optical path module, the second optical path module, the third optical path module up to the nth optical path module, and a moving adjustment module for adjusting the second optical path module, the third optical path module up to the nth optical path module and the first optical path module; the distance between the first optical path module and a plurality of the second optical path modules is adjusted and fixed in advance or according to the sample array to form a distance S2 between the first optical path module and the second optical path module, a distance S3 between the second optical path module and the third optical path module, up to a distance Sn between the (n - 1)th optical path module and the nth optical path module, and the first optical path module corresponds to the starting sample in the sample array, the second optical path module corresponds to the mth sample determined according to the distance S2, up to the nth optical path module corresponding to the sample obtained by permutation and combination of the samples of (n - 1)*(m - 1) determined according to the distance Sn, and then the drive part is used to drive the optical path bottom plate for array synchronous scanning detection.

[0025] The device involved in the method includes an optical path base plate, a first optical path module fixedly installed on the optical path base plate, a second optical path module, a third optical path module up to the nth optical path module installed on a sliding component on the optical path base plate and matching the fixed optical path module, an integrated optical shutter collimator filter switching module installed under the first optical path module, the second optical path module, the third optical path module up to the nth optical path module, and a moving adjustment module for adjusting the second optical path module, the third optical path module up to the nth optical path module and the first optical path module; The first optical path module includes a single - path X - ray source component for providing an X - ray source to excite a sample, a dual - path detector component for receiving feedback signals, and an optical path cavity for positioning and installing the X - ray source component and multiple detector components. The optical path cavity has a vertical interface for installing the X - ray source component and an inclined interface surrounding the vertical interface and for installing multiple detector components. The vertical interface and the inclined interface connect to the internal optical path chamber of the optical path cavity. The sample is installed below the vertical interface, and the inclined interface axially points to the sample; The second optical path module, the third optical path module up to the nth optical path module include a single - path X - ray source component for providing an X - ray source to excite a sample, a dual - path detector component for receiving feedback signals, and an optical path cavity for positioning and installing the X - ray source component and multiple detector components. The optical path cavity has a vertical interface for installing the X - ray source component and an inclined interface surrounding the vertical interface and for installing multiple detector components. The vertical interface and the inclined interface connect to the internal optical path chamber of the optical path cavity. The sample is installed below the vertical interface, and the inclined interface axially points to the sample; The moving adjustment module corresponds one - to - one with the second optical path module, the third optical path module up to the nth optical path module. The moving adjustment module is connected to the second optical path module, the third optical path module up to the nth optical path module through a connecting component, and drives the second optical path module, the third optical path module up to the nth optical path module to move forward and backward to adjust the distance between the first optical path module or the second optical path module, the third optical path module up to the nth optical path module;

[0026] According to some embodiments of the present invention, the angle of the inclined interface is 20 - 70 degrees. The design of the angle not only brings convenience to installation and maintenance, but also has a better effect on the collection of excitation light.

[0027] According to some embodiments of the present invention, the angle of the inclined interface is 30, 45, 50, 60, 70 degrees.

[0028] According to some embodiments of the present invention, the detector assembly is mounted on the inclined interface through a detector insulating block, and the X-ray source assembly is mounted on the vertical interface through an optical tube fixing ring.

[0029] According to some embodiments of the present invention, a collimator for providing collimation is further provided between the sample and the X-ray source assembly. The collimator is a circular hole with a certain thickness and is used to block X-rays in non-essential / non-central regions.

[0030] According to some embodiments of the present invention, the first optical path module, the second optical path module up to the nth optical path module further include a shutter assembly. The shutter assembly includes a shutter plate. On the shutter plate, there are installed a shutter flap for shielding X-ray leakage when the X-ray source is operating normally and located at the X-ray exit, and a filter for filtering stray light, such as Figure 8 , 9 .

[0031] According to some embodiments of the present invention, the shutter assembly further includes a motor. The motor drives the shutter plate through a crank plate with a long strip-shaped groove. A rotating part is installed on the shutter plate, and the rotating part is inserted into the long strip-shaped groove of the crank plate. A slide rail assembly for driving the movement of the shutter plate is provided below the shutter plate, such as Figure 8 , 9 .

[0032] According to an embodiment of the present invention, the shutter baffle adopts a labyrinth structure, and the shutter plate has a plurality of annular vertical groove structures, such as Figure 10 , for preventing X-ray leakage.

[0033] According to an embodiment of the present invention, the dual optical path system further includes a high-voltage unit for improving the high excitation efficiency of the X-ray source. The high-voltage unit is connected to the first optical path module, the second optical path module, the third optical path module up to the nth optical path module.

[0034] According to an embodiment of the present invention, the number of moving optical path modules can be determined according to the width of the sample array. When the width of the sample array is small, only two sets of optical path modules, such as the first optical path module and the second optical path module, can be used. To improve efficiency, the distance between the first optical path module and the second optical path module can be adjusted to half of the width of the sample array (the sample array is i*j). When starting the detection, the detection point of the first optical path module is at the first starting point (1,1) of the sample array, and the detection starting point of the second optical path module is at the sample (i / 2,j). If i is odd, the detection starting point of the second optical path module is at ((i + 1) / 2,j). In this way, the efficiency can be doubled, as Figure 4 shown, Figure 4Two optical path modules are used for detection.

[0035] According to an embodiment of the present invention, when the width of the sample array is relatively large, n>2 moving optical path modules can be used. The method is the same as the method when n = 2, and the efficiency can be increased by n times. If the sample array is larger, the optical path modules on the optical path bottom plate can be made into an array-type optical path, and its efficiency can be increased even more. At the same time, due to the adoption of the dual-path detection component, the detection accuracy can be further improved.

[0036] In the detection method, the sample can be fixed and the optical path moves in the XY axes, and even includes the Z-axis movement. It is also possible that the optical path is only responsible for the Z-axis movement and the sample moves in the XY axes, thereby forming a three-dimensional movement between the optical path and the sample, and further improving the overall efficiency.

[0037] Any reference to "an embodiment", "embodiment", "illustrative embodiment", etc. means that the specific components, structures or features described in connection with that embodiment are included in at least one embodiment of the present invention. Such illustrative statements throughout this specification do not necessarily refer to the same embodiment. Moreover, when describing specific components, structures or features in connection with any embodiment, it is contended that implementing such components, structures or features in combination with other embodiments falls within the scope of those skilled in the art.

[0038] Although the specific embodiments of the present invention have been described in detail with reference to multiple illustrative embodiments of the present invention, it must be understood that those skilled in the art can design various other improvements and embodiments, which will fall within the spirit and scope of the principles of the present invention. Specifically, within the scope of the foregoing disclosure, drawings and claims, reasonable variations and improvements can be made in the arrangement of components and / or sub-combination layouts without departing from the spirit of the present invention. In addition to variations and improvements in components and / or layouts, the scope is defined by the appended claims and their equivalents.

Claims

1. An efficient dual-light path method for energy dispersive X-ray fluorescence spectrometer, characterized in that ,include: The sample array is arranged on the lower side of the optical path bottom plate, the first optical path module is fixedly installed on the optical path bottom plate, the second optical path module, the third optical path module, and the nth optical path module are installed on the sliding component and matched with the first optical path module, the integrated shutter collimating filter switching module is installed under the first optical path module and the second optical path module, the third optical path module, and the nth optical path module, and the movable adjustment module is used to adjust the second optical path module, the third optical path module, and the nth optical path module and the first optical path module; the first optical path module and the second optical path module are pre-designed or adjusted and fixed according to the sample array and the spacing between the nth optical path modules, forming the spacing S2 between the first optical path module and the second optical path module, the spacing S3 between the second optical path module and the third optical path module, until the spacing Sn between the n-1th optical path module and the nth optical path module, and making the first optical path module correspond to the starting sample in the sample array, the second optical path module corresponds to the mth sample determined according to the spacing S2, until the nth optical path module corresponds to the (n-1)*(m-1)th sample pair for the arranged and combined samples for detection, and then the driving unit drives the optical path base plate to perform array synchronous scanning detection.

2. The high-efficiency dual-light path method for energy dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that: The first optical path module, the second optical path module, the third optical path module, and the nth optical path module include a single-path X-ray source assembly for providing an X-ray source to excite a sample, a dual-path detector assembly for receiving a feedback signal, and an optical path cavity for positioning and installing the X-ray source assembly and the dual-path detector assembly, wherein the optical path cavity has a vertical interface for installing the X-ray source assembly and an inclined interface surrounding the vertical interface and for installing the dual-path detector assembly, wherein the vertical interface and the inclined interface are connected to an internal optical path chamber of the optical path cavity, and a sample is installed below the vertical interface, and the inclined interface axially points to the sample The movable adjustment module corresponds to the second optical path module, the third optical path module, and the nth optical path module in one-to-one manner. The movable adjustment module is connected to the second optical path module, the third optical path module, and the nth optical path module through a connecting component to drive the second optical path module, the third optical path module, and the nth optical path module to move forward and backward to adjust the distance between the first optical path module or the second optical path module, the third optical path module, and the nth optical path module.

3. The high-efficiency dual-light path method for energy dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that: The angle of the inclined interface is 20-70 degrees.

4. The high-efficiency dual-light path method for energy dispersive X-ray fluorescence spectrometer according to claim 3, characterized in that: The angle of the inclined interface is 30, 45, 50, 60, or 70 degrees.

5. The high-efficiency dual-light path method for energy dispersive X-ray fluorescence spectrometer according to claim 2, characterized in that: The detector assembly is installed on the inclined interface through a detector insulating block, and the X-ray source assembly is installed on the vertical interface through a light pipe fixing ring.

6. The high-efficiency dual-light path method for energy dispersive X-ray fluorescence spectrometer according to claim 2, characterized in that: A collimator is also provided between the sample and the X-ray source assembly for providing collimation.

7. The high-efficiency dual-light path method for energy dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that: The first optical path module, the second optical path module, and up to the nth optical path module also include an optical shutter assembly, and the optical shutter assembly includes an optical shutter plate, on which is installed an optical shutter baffle that is located at the X-ray exit when the X-ray source is working normally and shields X-ray leakage, and a filter that provides stray light filtering.

8. The high-efficiency dual-light path method for energy dispersive X-ray fluorescence spectrometer according to claim 7, characterized in that: The optical shutter assembly also includes a motor, which drives the optical shutter plate through a crank plate with a long groove. A rotating component is installed on the optical shutter plate, and the rotating component is inserted into the long groove of the crank plate. A slide rail assembly is arranged under the optical shutter plate to drive the optical shutter plate to move.

9. The high-efficiency dual-light path method for energy dispersive X-ray fluorescence spectrometer according to claim 1, characterized in that: The dual optical path method also includes a high voltage unit for improving the high excitation efficiency of the X-ray source, and the high voltage unit is connected to the first optical path module and the second optical path module, the third optical path module and up to the nth optical path module.

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