Photomask pressing device and photomask box using same

Abstract

The invention relates to a photomask pressing device and a photomask box using the same. The photomask box is used for accommodating a photomask. The photomask pressing device comprises a photomask pressing plate, a pressing device and an adjusting element. The pressing device is arranged on the photomask pressing plate. The pressing device comprises a pushing part. The pushing and abutting part correspondingly pushes and abuts against the photomask pressing plate according to the movement amplitude of the pressing device towards the photomask pressing plate, so that the photomask pressing plate laterally moves relative to the pressing device. The adjusting element is arranged from the pressing device to the photomask pressing plate. And the adjusting element is used for adjusting the movement amplitude of the pressing device, so that the pushing part is pushed towards the photomask pressing plate until the photomask is fixed, or the pushing part of the pressing device is adjusted to be far away from the photomask and the pushing force is relieved. Therefore, the purpose of laterally clamping the photomask by the photomask pressing plate can be achieved.

Description

Technical Field

[0001] The present disclosure relates to a photomask pressing device and a photomask cassette to which the same is applied. Background Art

[0002] In the semiconductor industry, photomasks play a very important role in the process. Whether it is traditional yellow light lithography or etching technology, or even the recent extreme ultraviolet lithography (EUVL) process, the use of photomasks cannot be dispensed with.

[0003] Among many industries directly or indirectly related to semiconductors, the optoelectronic-related industries also belong to a quite important part. When manufacturing large-sized panels, the size of the photomasks used in the process also changes with the size of the panels.

[0004] However, in the case of carrying large-sized photomasks in a photomask cassette, the accompanying inertial movement will become more and more serious. During the handling or transportation of large-sized photomasks, due to insufficient transportation accuracy, it is easier to generate shaking, impact, and even cause the entire photomask container to tip over, further resulting in damage to the large-sized photomasks. Not only that, the clamping method of large-sized photomasks in the current market photomask cassettes has a problem of loosening. Therefore, the large-sized photomasks will jump randomly in the photomask cassette during transportation, and then generate particles that will contaminate the photomasks. Moreover, the components included in the existing photomask pressing devices used in photomask cassettes are independent of each other. Therefore, when assembling and disassembling, the user needs to use both hands (for example, hold the device firmly with one hand and lock the screws to the photomask cassette through the device with the other hand), and the operation is difficult and unstable.

[0005] Therefore, how to propose a photomask pressing device and a photomask cassette that can solve the above problems is one of the problems that the industry is eager to invest in research and development resources to solve at present. Summary of the Invention

[0006] In view of this, an object of the present disclosure is to propose a photomask pressing device and a photomask cassette to which the same is applied that can solve the above problems.

[0007] To achieve the above object, according to an embodiment of the present disclosure, a photomask pressing device is applied to a photomask cassette. The photomask cassette is used to accommodate a photomask. The photomask pressing device includes a photomask pressing plate, a pressing device, and an adjusting element. The pressing device is disposed on the photomask pressing plate. The pressing device includes a pushing portion. The pushing portion correspondingly pushes the photomask pressing plate according to the moving amplitude of the pressing device toward the photomask pressing plate, so that the photomask pressing plate moves laterally relative to the pressing device. The adjusting element is disposed in the pressing device to the photomask pressing plate. The adjusting element is used to adjust the moving amplitude of the pressing device so that the pushing portion pushes toward the photomask pressing plate until the photomask is fixed, or adjusts the pushing portion of the pressing device to move away from the photomask and release the pushing force.

[0008] In one or more embodiments of the present disclosure, the pushing portion includes an elastic portion and an inclined surface coupled to the elastic portion. The pressing device will, according to the adjustment of the adjustment element, push the mask pressing plate toward or away from the mask along the inclination angle of the inclined surface, and at the same time, the elastic portion will elastically deform with the pushing force of the inclined surface.

[0009] In one or more embodiments of the present disclosure, the pressing device moves along a first axis toward the mask pressing plate, causing the pushing portion to push the mask pressing plate to move laterally relative to the pressing device along a second axis. The pushing portion is inclined relative to the first axis and the second axis.

[0010] In one or more embodiments of the present disclosure, the pressing device further includes a body portion. The body portion is coupled to the pushing portion and provides a setting for the adjustment element. The pushing portion includes an elastic portion. The elastic portion will elastically deform with the lateral movement of the body portion.

[0011] In one or more embodiments of the present disclosure, the adjustment element is rotatably coupled to the pressing device.

[0012] In one or more embodiments of the present disclosure, the pressing device has a through hole. The through hole has a flared portion and a constricted portion that are connected. The aperture of the flared portion is larger than the aperture of the constricted portion. The adjustment element is placed in the flared portion and is coupled and positioned toward the constricted portion.

[0013] In one or more embodiments of the present disclosure, the constricted portion has a flange for coupling and positioning an annular engaging groove of the adjustment element.

[0014] In one or more embodiments of the present disclosure, the adjustment element includes a head, a locking portion, and a column. The head is configured to abut against the pressing device and on the side away from the mask pressing plate. The locking portion is used to lock the mask box, and the moving range of the pressing device relative to the mask pressing plate is adjusted according to the locking degree of the locking portion. One end of the column is coupled to the head, and the other end is coupled to the locking portion. The column is disposed in the pressing device to the mask pressing plate.

[0015] In one or more embodiments of the present disclosure, the mask pressing plate, the pressing device, and the adjustment element are coupled together. The adjustment element includes a locking portion. The locking portion is used to lock the mask box. When the locking portion is unlocked from the mask box, the mask pressing plate, the pressing device, and the adjustment element can be removed from the mask box together.

[0016] In one or more embodiments of the present disclosure, the mask pressing plate has a mounting hole. Both sides of the mounting hole have a first limiting portion. The pressing device includes a mounting portion. Both sides of the mounting portion have a second limiting portion. The second limiting portion is correspondingly configured with the first limiting portion to limit each other.

[0017] To achieve the above object, according to an embodiment of the present disclosure, a reticle cassette includes a cassette body and a reticle pressing device. The cassette body includes a wall portion. A plurality of platform portions are annularly provided on the inner side of the wall portion. Each platform portion has a locking hole. The reticle pressing device is disposed in the cassette body. The cassette body has an accommodating space for accommodating a reticle. The reticle pressing device includes a reticle pressing plate, a pressing device, and an adjusting element. The reticle pressing plate is disposed on one of the platform portions. The pressing device is disposed on the reticle pressing plate. The pressing device includes a pushing portion. The pushing portion correspondingly pushes the reticle pressing plate according to the moving amplitude of the pressing device toward the reticle pressing plate, so that the reticle pressing plate laterally moves relative to the pressing device. The adjusting element is disposed in the reticle pressing plate through the pressing device. The adjusting element has a locking portion. The locking portion is used for locking in the locking hole, and the moving amplitude of the pressing device on the reticle pressing plate is adjusted according to the locking degree of the locking portion.

[0018] In summary, in the reticle pressing device of the present disclosure, when the adjusting element is adjusted (locked) toward the reticle pressing plate, the pressing device that moves together toward the reticle pressing plate pushes the reticle pressing plate to move laterally with its inclined surface, so as to achieve the purpose of laterally clamping the reticle by the reticle pressing plate. In the embodiment where the adjusting element is coupled to the shrinkage hole portion of the pressing device, when the adjusting element rotates, the reticle pressing plate limits the pressing device, so that the pressing device does not rotate together with the adjusting element. In the embodiment where the pressing device has a engaging portion for engaging with the reticle pressing plate, in cooperation with the coupling relationship between the adjusting element and the shrinkage hole portion of the pressing device, the reticle pressing plate can move upward together with the pressing device along with the adjusting element after the adjusting element is completely loosened from the locking hole of the reticle cassette, so that the entire reticle pressing device can be removed from the reticle cassette (that is, the operation convenience can be increased).

[0019] The above is only used to elaborate on the problems to be solved by the present disclosure, the technical means for solving the problems, and the effects produced thereby. The specific details of the present disclosure will be described in detail in the following embodiments and related drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to make the above and other objects, features, advantages and embodiments of the present disclosure more obvious and understandable, the description of the accompanying drawings is as follows:

[0021] Figure 1 FIG. is a three-dimensional combined view of a reticle pressing device according to an embodiment of the present disclosure;

[0022] Figure 2 FIG. shows Figure 1 a three-dimensional exploded view of the reticle pressing device in

[0023] Figure 3 FIG. shows Figure 1 a three-dimensional view of the adjusting element in

[0024] Figure 4 FIG. showsFigure 1 Cross-sectional view of the presser and the adjusting element in

[0025] Figure 5 To illustrate Figure 1 Isometric view of the presser in

[0026] Figure 6 Isometric view of a photomask cassette according to an embodiment of the present disclosure;

[0027] Figure 7 To illustrate Figure 6 Exploded isometric view of a partial enlargement of the cassette body and the photomask pressing device in

[0028] Figure 8 To illustrate Figure 7 Assembled isometric view of a partial enlargement of the cassette body and the photomask pressing device in

[0029] Figure 9 To illustrate Figure 7 Another assembled isometric view of a partial enlargement of the cassette body and the photomask pressing device in

[0030] Figure 10 To illustrate Figure 7 Partial cross-sectional view of the cassette body and the photomask pressing device in

[0031]

Symbol description

[0032] 10: Photomask cassette

[0033] 100: Cassette body

[0034] 110: Wall portion

[0035] 111: Platform portion

[0036] 111a: Locking hole

[0037] 111b, 211b: Guiding structure

[0038] 200: Photomask pressing device

[0039] 210: Photomask pressing plate

[0040] 211: Mounting hole

[0041] 211a: First limiting portion

[0042] 220: Presser

[0043] 221: Body portion

[0044] 221a: Through hole

[0045] 221a1: Enlarged hole portion

[0046] 221a2: Shrinkage cavity part

[0047] 221a3: Flange

[0048] 222: Pushing part

[0049] 222a: Inclined surface

[0050] 222b: Elastic part

[0051] 223: Mounting part

[0052] 223a: Second limiting part

[0053] 224: Engaging part

[0054] 230: Adjusting element

[0055] 231: Cylinder

[0056] 231a: Annular engaging groove

[0057] 232: Locking part

[0058] 233: Head

[0059] 900: Reticle

[0060] A1: First axial direction

[0061] A2: Second axial direction Detailed implementation manners

[0062] The following will disclose multiple implementation manners of the present disclosure with the accompanying drawings. For the sake of clear illustration, many practical details will be described together in the following description. However, it should be understood that these practical details are not used to limit the present disclosure. That is to say, in some implementation manners of the present disclosure, these practical details are not necessary. In addition, for the purpose of simplifying the accompanying drawings, some conventional structures and elements will be shown in a simple schematic manner in the accompanying drawings.

[0063] Please refer to Figure 1 and Figure 2 . Figure 1 FIG. is a three - dimensional combined view of a reticle pressing device 200 according to an implementation manner of the present disclosure. Figure 2 FIG. is for showing Figure 1 the three - dimensional exploded view of the reticle pressing device 200 in Figure 1 and Figure 2As shown, in the present embodiment, the mask pressing device 200 includes a mask pressing plate 210, a pressing device 220, and an adjusting element 230. The pressing device 220 includes a pushing portion 222. The pushing portion 222 is configured to correspondingly push the mask pressing plate 210 according to the moving amplitude of the pressing device 220 toward the mask pressing plate 210, so that the mask pressing plate 210 laterally moves relative to the pressing device 220. The adjusting element 230 is disposed between the pressing device 220 and the mask pressing plate 210 and is configured to adjust the moving amplitude of the pressing device 220, so that the pushing portion 222 pushes toward the mask pressing plate 210 until the mask 900 is fixed (see Figure 9 first), or adjust the pushing portion 222 of the pressing device 220 to move away from the mask 900 and release the pushing force (see Figure 8 first).

[0064] For example, as Figure 2 shown, the adjusting element 230 is configured to move the pressing device 220 along the first axial direction A1 toward the mask pressing plate 210, so that the pushing portion 222 pushes the mask pressing plate 210 to laterally move along the second axial direction A2 relative to the pressing device 220. Specifically, the pressing device 220 further includes a main body portion 221. The main body portion 221 provides a setting for the adjusting element 230. The pushing portion 222 is coupled to the main body portion 221. The pushing portion 222 includes an elastic portion 222b and an inclined surface 222a coupled to the elastic portion 222b. The inclined surface 222a is located on the elastic portion 222b and on a side of the elastic portion 222b away from the main body portion 221. The inclined surface 222a is inclined with respect to the first axial direction A1 and the second axial direction A2. The pressing device 220 will, according to the adjustment of the adjusting element 230, push the mask pressing plate 210 toward or away from the mask 900 along the inclination angle of the inclined surface 222a, and at the same time, the elastic portion 222b will elastically deform with the pushing force of the inclined surface 222a. It can be seen from this that the elastic portion 222b will elastically deform with the lateral movement of the main body portion 221. Through the elastically deformable pushing portion 222, the pressing device 220 can simultaneously achieve the purpose of abutting the main body portion 221 against the mask pressing plate 210 and laterally pushing the mask pressing plate 210 with the pushing portion 222.

[0065] In some embodiments, the inclined surface 222a is an inclined plane inclined with respect to the first axial direction A1 and the second axial direction A2, but the present disclosure is not limited thereto. In practical applications, the inclined surface 222a may be an arc surface.

[0066] In some embodiments, the first axial direction A1 and the second axial direction A2 are perpendicular to each other, but the present disclosure is not limited thereto.

[0067] In some embodiments, the adjusting element 230 is rotatably coupled to the pressing device 220. For example, please refer to Figure 3 , which is a perspective view of the adjusting element 230 shown in Figure 1 . AsFigure 2 As shown in Figure 3 In this embodiment, the presser 220 has a through hole 221a. The through hole 221a has a connected enlarged hole portion 221a1 and a reduced hole portion 221a2. The aperture of the enlarged hole portion 221a1 is larger than that of the reduced hole portion 221a2. For example, the contour of the through hole 221a having the enlarged hole portion 221a1 and the reduced hole portion 221a2 is similar to a gourd. The adjusting element 230 is configured to be placed in the enlarged hole portion 221a1 and coupled and positioned toward the reduced hole portion 221a2.

[0068] Specifically, the adjusting element 230 includes a cylinder 231 and a head 233. The head 233 is configured to abut against the presser 220 and away from the side of the mask pressing plate 210. One end of the cylinder 231 is coupled to the head 233. The cylinder 231 is disposed in the presser 220 to the mask pressing plate 210. The size of the through hole 221a is not suitable for the head 233 to pass through. For example, the enlarged hole portion 221a1 is part of a circular hole (but not limited thereto), and its aperture is equal to or larger than the outer diameter of the cylinder 231. Therefore, the enlarged hole portion 221a1 allows the cylinder 231 to pass through.

[0069] Please refer to Figure 4 which is a cross-sectional view showing the presser 220 and the adjusting element 230 in Figure 1 . As shown in Figure 3 and Figure 4 In this embodiment, the adjusting element 230 is configured to be rotatably coupled to the reduced hole portion 221a2 of the through hole 221a. Specifically, the reduced hole portion 221a2 has a flange 221a3. In addition, the cylinder 231 of the adjusting element 230 has an annular engaging groove 231a. The flange 221a3 is used to couple and position the annular engaging groove 231a. For example, the reduced hole portion 221a2 is part of a circular hole, and its aperture is equal to or larger than the outer diameter of the annular engaging groove 231a and smaller than the outer diameter of the cylinder 231. Therefore, the flange 221a3 is rotatably engaged with the annular engaging groove 231a.

[0070] In some embodiments, the contour of the reduced hole portion 221a2 is slightly larger than a semi-circle, and the cylinder 231 originally located in the enlarged hole portion 221a1 can enter the reduced hole portion 221a2 by extrusion through the annular engaging groove 231a. Therefore, when the flange 221a3 is rotatably engaged with the annular engaging groove 231a, the adjusting element 230 can rotate relative to the presser 220. Thus, when the adjusting element 230 rotates, the presser 220 does not rotate with the adjusting element 230.

[0071] Please refer to Figure 5 which is a perspective view showing the presser 220 in Figure 1 . As shown in Figure 2 and Figure 5As shown, in this embodiment, the mask pressing plate 210 has a mounting hole 211. The pressing device 220 passes through the mounting hole 211 and is configured to slide along the mounting hole 211. Among them, the inclined surface 222a on the pressing portion 222 presses against the inner edge of the mounting hole 211, so that the mask pressing plate 210 moves laterally relative to the pressing device 220. Specifically, the mounting hole 211 extends along the second axial direction A2, for example, and two opposite first limiting portions 211a are provided on both sides of the mounting hole 211. The pressing device 220 further includes a mounting portion 223. The body portion 221 of the pressing device 220 is configured to abut against one side of the mask pressing plate 210 (such as the top side of the mask pressing plate 210 in Figure 2 ). The mounting portion 223 is connected to the body portion 221 and passes through the mounting hole 211. Two opposite second limiting portions 223a are provided on both sides of the mounting portion 223. The two second limiting portions 223a are configured to respectively abut against the two first limiting portions 211a. Thereby, during the pressing device 220 passing through the mounting hole 211 and sliding along the mounting hole 211, the two first limiting portions 211a of the mounting hole 211 will limit the two second limiting portions 223a of the mounting portion 223 to prevent the pressing device 220 from rotating relative to the mask pressing plate 210 about the first axial direction A1. It can be seen from this that when the adjusting element 230 rotates, the pressing device 220 whose rotation is restricted by the mask pressing plate 210 will not rotate together with the adjusting element 230.

[0072] Furthermore, as Figure 2 and Figure 5 shown, in this embodiment, the pressing device 220 further includes two engaging portions 224. The two engaging portions 224 are respectively connected to the two second limiting portions 223a of the mounting portion 223 and protrude in the opposite direction relative to the mounting portion 223. The two engaging portions 224 are configured to engage with the other side of the mask pressing plate 210 (such as the bottom side of the mask pressing plate 210 in Figure 2 , and reference can be made to Figure 10 first), so that the mask pressing plate 210 is limited between the body portion 221 of the pressing device 220 and the two engaging portions 224. During actual assembly, the pressing device 220 can pass through the mounting hole 211 of the mask pressing plate 210 with the mounting portion 223. During the mounting portion 223 passing through the mounting hole 211, the two first limiting portions 211a of the mounting hole 211 will be mutually pressed against the two engaging portions 224. After passing through the mounting hole 211 by extrusion, the two engaging portions 224 can engage with the other side of the mask pressing plate 210.

[0073] According to the foregoing structural configuration, in addition to the coupling relationship between the adjusting element 230 and the shrinkage hole portion 221a2 of the pressing device 220, and in cooperation with the engaging relationship between the engaging portion 224 of the pressing device 220 and the mask pressing plate 210, the mask pressing plate 210 can move together with the pressing device 220 along with the adjusting element 230, so that the operation convenience of the mask pressing device 200 can be increased.

[0074] As shown Figure 5 in the present embodiment, the engaging portion 224 is in the shape of a hook, but the present disclosure is not limited thereto.

[0075] Please refer to Figure 6 , which is a perspective view showing a photomask cassette 10 according to an embodiment of the present disclosure. As shown Figure 6 in the present embodiment, the photomask cassette 10 includes a cassette body 100 and a plurality of photomask pressing devices 200. The cassette body 100 includes a wall portion 110. The wall portion 110 surrounds and forms an accommodating space. A plurality of platform portions 111 are annularly provided on the inner side of the wall portion 110. The photomask pressing devices 200 are configured to be assembled on the platform portions 111.

[0076] Please refer to Figure 7 , Figure 8 and Figure 9 . Figure 7 is a partially enlarged perspective exploded view showing the cassette body 100 and the photomask pressing device 200 in Figure 6 . Figure 8 is a partially enlarged perspective combined view showing the cassette body 100 and the photomask pressing device 200 in Figure 7 . Figure 9 is another partially enlarged perspective combined view showing the cassette body 100 and the photomask pressing device 200 in Figure 7 . An assembler can install the photomask pressing device 200 on the cassette body 100 in the order of Figures 7 to 9 , and hold the photomask 900 located in the accommodating space of the wall portion 110 with the photomask pressing device 200.

[0077] As shown Figure 7 in the present embodiment, each platform portion 111 of the wall portion 110 has a locking hole 111a. As described above, by adjusting the coupling relationship between the adjusting element 230 and the shrinkage hole portion 221a2 of the pressing device 220 and the engaging relationship between the engaging portion 224 of the pressing device 220 and the photomask pressing plate 210, an assembler can move the entire photomask pressing device 200 above the platform portion 111 only by grasping the adjusting element 230.

[0078] As shown Figure 8 in, and in conjunction with reference to Figure 3, in the present embodiment, the adjusting element 230 further includes a locking portion 232. The locking portion 232 is disposed at one end of the cylinder 231 away from the head 233. The locking portion 232 is located on the side of the mask pressing plate 210 away from the presser 220. An assembler holding the adjusting element 230 can move the entire mask pressing device 200 toward the platform portion 111 so that the locking portion 232 contacts the locking hole 111a, enabling the preliminary alignment of the mask pressing device 200 with the platform portion 111. According to the locking degree of the locking portion 232, the moving range of the presser 220 relative to the mask pressing plate 210 can be adjusted.

[0079] As Figure 9 shown, in the present embodiment, the locking portion 232 of the adjusting element 230 is configured to be locked to the locking hole 111a along the first axial direction A1. The assembler can lock the locking portion 232 downward to the locking hole 111a by rotating the head 233 of the adjusting element 230. During the complete locking of the locking portion 232 to the locking hole 111a, the head 233 of the adjusting element 230 pushes the presser 220 along the first axial direction A1 toward the mask pressing plate 210, causing the inclined surface 222a of the pushing portion 222 to push the mask pressing plate 210, such that the mask pressing plate 210 moves laterally relative to the presser 220 along the second axial direction A2 away from the wall portion 110 and holds the mask 900. When the locking portion 232 is completely locked to the locking hole 111a, the body portion 221 of the presser 220 and the mask pressing plate 210 are clamped between the platform portion 111 and the head 233 of the adjusting element 230.

[0080] When the assembler desires to disassemble the mask pressing device 200 to release the mask 900, the procedure from Figure 9 progressing to Figure 7 can be performed in reverse order, which will not be elaborated here. As described above, the mask pressing plate 210, the presser 220, and the adjusting element 230 are coupled together. When the locking portion 232 is unlocked from the mask box 10, the mask pressing plate 210, the presser 220, and the adjusting element 230 can be removed from the mask box 10 together.

[0081] Please refer to Figure 10 , which is a partial cross-sectional view showing the box body 100 and the mask pressing device 200 in Figure 7 . As Figure 10As shown, in the present embodiment, the platform portion 111 further has a guiding structure 111b. The guiding structure 111b is configured to guide the mask pressing plate 210 to move along the second axial direction A2. Specifically, the guiding structure 111b of the platform portion 111 is a bump. The bump extends along the second axial direction A2. In addition, the bottom of the mask pressing plate 210 also correspondingly has a guiding structure 211b. The guiding structure 211b of the mask pressing plate 210 is two convex ribs. The two convex ribs extend along the second axial direction A2. The bump is slidably coupled between the two convex ribs, thereby guiding the mask pressing plate 210 to move relative to the platform portion 111 along the second axial direction A2.

[0082] In some embodiments, the guiding structure 111b of the platform portion 111 and the guiding structure 211b of the mask pressing plate 210 can be swapped with each other, and the same effect of mutual guiding can be achieved.

[0083] From the above detailed description of the specific embodiments of the present disclosure, it can be clearly seen that in the mask clamping device of the present disclosure, when the adjusting element is adjusted (locked) towards the mask pressing plate, the clamp that moves together towards the mask pressing plate uses its inclined portion to push the mask pressing plate to move laterally, so as to achieve the purpose of laterally clamping the mask by the mask pressing plate. In the embodiment where the adjusting element is coupled to the shrinkage hole portion of the clamp, when the adjusting element rotates, the mask pressing plate will limit the clamp, so that the clamp will not rotate together with the adjusting element. In the embodiment where the clamp has an engaging portion for engaging with the mask pressing plate, in cooperation with the coupling relationship between the adjusting element and the shrinkage hole portion of the clamp, the mask pressing plate can move upward together with the clamp along with the adjusting element after the adjusting element is completely loosened from the locking hole of the mask box, so that the entire mask clamping device can be removed from the mask box (i.e., the operation convenience can be increased).

[0084] Although the present disclosure has been disclosed as above in embodiments, it is not intended to limit the present disclosure. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to what is defined by the appended claims.

Claims

1. A mask pressing device, applied to a mask box, the mask box is used to accommodate a mask, characterized in that: The mask pressing device comprises: a mask pressing plate; A pressing device is disposed on the photomask pressing plate, the pressing device comprises a pushing portion, the pushing portion pushes the photomask pressing plate accordingly according to the movement amplitude of the pressing device toward the photomask pressing plate, so that the photomask pressing plate moves laterally relative to the pressing device; and An adjusting element is arranged in the photomask pressing plate through the pressing device, and is used to adjust the movement range of the pressing device so that the pushing portion pushes toward the photomask pressing plate until the photomask is fixed, or adjust the pushing portion of the pressing device to move away from the photomask and release the pushing force.

2. The mask pressing device according to claim 1, characterized in that: The pushing portion includes an elastic portion and an inclined surface coupled to the elastic portion. The pressing device will push the mask pressing plate toward or away from the mask along the inclination angle of the inclined surface according to the adjustment of the adjustment element. At the same time, the elastic portion will elastically deform with the pushing force of the inclined surface.

3. The mask pressing device according to claim 1, characterized in that: The pressing device moves toward the photomask pressing plate along a first axial direction, so that the pushing portion pushes the photomask pressing plate to move laterally relative to the pressing device along a second axial direction, and the pushing portion is inclined relative to the first axial direction and the second axial direction.

4. The mask pressing device according to claim 1, characterized in that: The pressing device further comprises a main body portion, which is coupled to the pushing portion and provides the adjusting element arrangement, wherein the pushing portion comprises an elastic portion, and the elastic portion is elastically deformed along with the lateral movement of the main body portion.

5. The mask pressing device according to claim 1, characterized in that: The adjusting element is rotatably coupled to the pressing device.

6. The mask pressing device according to claim 1, characterized in that: The tightener has a through hole, which has an expanding hole portion and a shrinking hole portion that are connected to each other. The aperture of the expanding hole portion is larger than that of the shrinking hole portion. The adjustment element is placed in the expanding hole portion and coupled and positioned toward the shrinking hole portion.

7. The mask pressing device according to claim 6, characterized in that: The shrinkage hole has a flange in it for coupling and positioning an annular snap-fitting groove of the adjustment element.

8. The mask pressing device according to claim 1, characterized in that: The adjustment element includes: A head portion configured to abut against the pressing device and away from one side of the photomask pressing plate; A locking portion, used to lock the mask box, and the movement range of the pressing device relative to the mask pressing plate is adjusted according to the locking degree of the locking portion; as well as A column, one end of which is coupled to the head, and the other end of which is coupled to the locking portion. The column is arranged in the photomask pressing plate through the pressing device.

9. The mask pressing device according to claim 1, characterized in that: The mask pressing plate, the pressing device and the adjusting element are coupled together. The adjusting element includes a locking portion for locking the mask box. When the locking portion is unlocked from the mask box, the mask pressing plate, the pressing device and the adjusting element can be removed from the mask box together.

10. The mask pressing device according to claim 1, characterized in that: The photomask pressing plate has a mounting hole, and two sides of the mounting hole have first limiting parts; and The pressing device comprises a mounting portion, and two sides of the mounting portion are provided with second limiting portions, and the second limiting portions are correspondingly configured with the first limiting portions to limit each other.

11. A mask box, characterized in that: Include: A box body, comprising a wall portion, a plurality of platform portions are arranged around the inner side of the wall portion, each of the plurality of platform portions has a locking hole; and A photomask pressing device is disposed in the box body, the box body has a receiving space for receiving a photomask, and the photomask pressing device comprises: a photomask pressing plate, disposed on one of the plurality of platform portions; A pressing device is disposed on the photomask pressing plate, the pressing device comprises a pushing portion, the pushing portion pushes the photomask pressing plate accordingly according to the movement amplitude of the pressing device toward the photomask pressing plate, so that the photomask pressing plate moves laterally relative to the pressing device; and An adjusting element is arranged in the photomask pressing plate through the pressing device. The adjusting element has a locking part which is used to be locked in the locking hole. The movement range of the pressing device on the photomask pressing plate is adjusted according to the locking degree of the locking part.

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