Upper light source type exposure machine and working method thereof

Abstract

The invention discloses an upper light source type exposure machine and a working method thereof. Comprising a box body, an exposure light source, a lens group and a lower frame assembly are arranged in the box body, the exposure light source is located over the lens group, the lower frame assembly is located under the lens group, and the lower frame assembly comprises a frame body, non-breathable elastic cloth and a material supporting module; the non-breathable elastic cloth covers an opening in the bottom of the frame body and seals the opening in the bottom of the frame body, the material supporting module comprises a sealing ring, a containing cylinder and a second driving device, a first through hole is formed in the center of the non-breathable elastic cloth, the bottom of the containing cylinder is sealed, and the top of the containing cylinder is connected with the first through hole through the sealing ring; the outer side of the top of the containing cylinder is sleeved with a supporting plate and fixedly connected with the supporting plate, and the supporting plate is located below the non-breathable elastic cloth. The exposure precision can be improved, the exposure effect is good, irregular objects can be exposed, and the applicability is high.

Description

Technical Field

[0001] The present invention relates to the technical field of exposure machines, and in particular to an upper light source type exposure machine and its working method. Background Art

[0002] Most of the existing exposure machines use the lower light source type exposure. The lower light source type exposure is a technology that inverts the exposure surface of the article to be exposed and then sets the exposure light source below the article to be exposed for exposure. Because the exposure light source and other components in the exposure machine are arranged below, the exposure light source is easily affected by the vibration generated when other working components in the exposure machine are working during exposure, resulting in the final exposure effect not meeting the expectation, low exposure accuracy, and most of the articles to be exposed are regular articles. If the article to be exposed is an irregular article, exposure cannot be performed, and the applicability is low. Summary of the Invention

[0003] In order to solve the above technical problems, the present invention provides an upper light source type exposure machine and its working method, which can improve the exposure accuracy, have a good exposure effect, and can expose irregular articles, with high applicability.

[0004] In order to solve the above problems, the present invention is implemented by adopting the following technical solutions:

[0005] An upper light source type exposure machine of the present invention includes a box body. An exposure light source, a lens group, and a lower frame assembly are arranged in the box body. The exposure light source is located directly above the lens group, and the lower frame assembly is located directly below the lens group. The lower frame assembly includes a frame body, an airtight elastic cloth, and a material supporting module. A first driving device for driving the lens group to approach / away from the frame body is arranged in the box body. The airtight elastic cloth covers the bottom opening of the frame body and seals the bottom opening of the frame body. The material supporting module includes a sealing ring, a receiving cylinder, and a second driving device. A first through hole is provided in the center of the airtight elastic cloth. The bottom of the receiving cylinder is sealed. The top of the receiving cylinder is connected to the first through hole through the sealing ring. A support plate is sleeved outside the top of the receiving cylinder and is fixedly connected to the support plate. The support plate is located below the airtight elastic cloth. The second driving device is used to drive the support plate to rise / fall. When the lens group is in close contact with the frame body, the lens group, the frame body, the airtight elastic cloth, and the receiving cylinder enclose a sealed exposure chamber.

[0006] In this solution, when an irregular object needs to be exposed, the irregular object to be exposed is placed at the center position on the upper surface of the airtight elastic cloth. At this time, the exposure surface of the object to be exposed faces upward, and the irregular part of the bottom of the object to be exposed that does not need to be exposed extends into the receiving cylinder. The rest of the object to be exposed is supported by the support plate. The second driving device drives the support plate to rise to a preset position. During the upward movement of the support plate, the top surface of the support plate pushes the airtight elastic cloth upward, stretching the airtight elastic cloth. Subsequently, the first driving device drives the lens group to move downward to the exposure position. At this time, the lens group, the frame, the airtight elastic cloth, and the receiving cylinder enclose a sealed exposure chamber. The exposure light source exposes the exposure surface of the object to be exposed through the lens group until the exposure is completed. The exposure light source is arranged at the upper part inside the box, which can reduce the vibration generated by the movement of the lens group and the support plate or the external environment during the exposure of the exposure light source, improving the stability of the exposure light source during exposure. Moreover, the receiving cylinder can accommodate the irregular part of the bottom of the object to be exposed that does not need to be exposed, enabling the exposure machine to expose irregular objects and improving the applicability of the exposure machine.

[0007] Preferably, when the top surface of the support plate and the bottom surface of the frame are on the same horizontal plane, the top surface of the support plate is completely attached to the airtight elastic cloth.

[0008] Preferably, an air extraction hole group communicating with the outside is provided inside the frame. The air extraction hole group includes air extraction holes symmetrically arranged on the left and right side walls inside the frame.

[0009] Preferably, a leveling glass is further included. The leveling glass covers and adheres to the exposure surface of the object to be exposed. When the exposure chamber is evacuated to a vacuum, the lower surface of the lens group is closely attached to the upper surface of the leveling glass group.

[0010] Preferably, the second driving device includes a support plate frame and a support plate frame driving mechanism. The support plate frame is fixedly connected to the bottom of the support plate. The support plate frame driving mechanism includes a lifting rod driver and lifting rods symmetrically arranged on the left and right sides of the support plate frame. The lifting rods are fixedly connected to the corresponding bottom sides of the support plate frame through connecting blocks. The lifting rod driver is used to drive the two lifting rods to rise / fall synchronously.

[0011] Preferably, protection blocks are provided at the four corners inside the frame. The bottom surface of the protection blocks is on the same horizontal plane as the bottom surface of the frame. A protection inclined surface is formed on the side of the protection block facing the support plate. The protection inclined surface inclines inward from bottom to top. Protection cutouts are provided at the four corners of the support plate.

[0012] When the airtight elastic cloth is stretched, it will be pulled by the pallet and the frame, which will reduce the service life of the airtight elastic cloth. To protect the airtight elastic cloth, protective blocks are provided at the four corners inside the frame. The bottom surface of the protective block is on the same horizontal plane as the bottom surface of the frame. A protective inclined surface is formed on the side of the protective block facing the pallet. The protective inclined surface is inclined inward from bottom to top. Protective cutouts are provided at the four corners of the pallet corresponding to the positions of the protective blocks. When the airtight elastic cloth is stretched, the protective blocks at the four corners of the frame prevent the four corners of the airtight elastic cloth from being overstretched and damaged during the vacuuming process, greatly increasing the service life of the airtight elastic cloth and preventing the airtight elastic cloth from being torn when stretched.

[0013] Preferably, linkage lifting structures are provided at the four corners of the bottom of the pallet frame. The linkage lifting structures include linkage columns and linkage gearboxes. The linkage columns are power-connected to the linkage gearboxes. The linkage columns are vertically arranged at the bottom of the pallet frame. The linkage gearboxes are fixedly connected to the box body. Adjacent two linkage gearboxes are power-connected through a linkage shaft.

[0014] The center of gravity of the item to be exposed may not be at the center position of the pallet, which will cause one corner of the pallet to tilt. When the pallet tilts, the linkage column on that side will descend, and then drive the gear in the linkage gearbox on that side to rotate through the linkage shaft, driving the gears in the remaining linkage gearboxes to rotate, and then driving the remaining linkage columns to descend, finally making the four corners of the pallet descend synchronously to ensure that the pallet is horizontal and does not tilt.

[0015] Preferably, exhaust hole groups are symmetrically arranged at the front and back of the top of the pallet. The exhaust hole groups include exhaust holes symmetrically arranged on the left and right.

[0016] During the upward movement of the pallet, some air may remain between the contact surface of the pallet and the airtight elastic cloth, resulting in the airtight elastic cloth bulging, which makes the exposure effect poor. To prevent bulging, exhaust hole groups are symmetrically arranged at the front and back of the top of the pallet. The exhaust hole groups include exhaust holes symmetrically arranged on the left and right. During the upward movement of the pallet, the air between the pallet and the airtight elastic cloth can be discharged through the exhaust holes, enhancing the air fluidity and avoiding the occurrence of bulging.

[0017] Preferably, first connecting plates are symmetrically arranged at the front and rear of the top inside the box body. The exposure light source is located between the two first connecting plates. The first connecting plates are arranged in the left - right direction. Second connecting plates are symmetrically arranged at the left and right of the top of the exposure light source. The second connecting plates are arranged in the front - rear direction. The second connecting plates are located above the first connecting plates. Connecting and locking modules are symmetrically arranged at the front and rear ends of the top of the second connecting plates. The connecting and locking module includes a first connecting structure and a locking mechanism. The locking mechanism is used to lock / unlock the second connecting plate and the first connecting plate. The first connecting structure includes third through - holes symmetrically arranged on the front and rear sides of the second connecting plate. Upper fixing nuts are arranged at the corresponding positions of the top of the second connecting plate corresponding to the third through - holes. Adjusting bolts are threadedly connected inside the upper fixing nuts. The lower part of the adjusting bolt passes through the third through - hole and abuts against the corresponding side of the top of the first connecting plate.

[0018] Preferably, the locking mechanism includes locking holes symmetrically arranged on the left and right sides of the third through - hole. The locking holes are arranged in the front - rear direction. Locking threaded holes are arranged at the corresponding positions of the first connecting plate corresponding to the locking holes. Upper locking bolts are arranged inside the locking holes. The lower part of the upper locking bolt passes through the locking hole and is threadedly connected with the locking threaded hole.

[0019] Before the exposure machine exposes, it is necessary to calibrate the spatial attitude of the exposure light source. First, loosen the upper locking bolt to unlock the second connecting plate and the first connecting plate. Then rotate the adjusting bolt to change the length of the lower part of the adjusting bolt extending out of the second connecting plate, and change the spatial attitude of the four corners of the exposure light source, so as to realize the adjustment of the overall spatial attitude of the exposure light source. Then tighten the upper locking bolt to lock the second connecting plate and the first connecting plate, and lock the exposure light source.

[0020] Preferably, a connecting disk is arranged between the lifting rod and the corresponding connecting block. The top of the lifting rod is fixedly connected with the connecting disk coaxially. A plurality of connecting arc holes are arranged along the circumference of the top of the connecting disk. The center of the arc of the connecting arc hole coincides with the axis of the lifting rod. Upper connecting holes are arranged at the corresponding positions of the connecting block corresponding to the connecting arc holes. Lower locking bolts are arranged inside the connecting arc holes. The upper part of the lower locking bolt passes through the corresponding connecting arc hole and is threadedly connected with the corresponding upper connecting hole.

[0021] The lifting rod is a lead screw. When the lifting rod is installed, the radial angles may be inconsistent, resulting in the uneven horizontal position of the connecting disk at the top of the lifting rod, and finally resulting in the inclination of the supporting plate. When the horizontal positions of the connecting disks are uneven, first rotate the lifting rod to align the horizontal positions of the two connecting disks, and then screw the lower locking bolt into the connecting arc hole so that the upper part of the lower locking bolt is threadedly connected with the upper connecting hole to lock the connecting disk and the connecting block.

[0022] A working method of an upper - light - source exposure machine according to the present invention, which is used for the above - mentioned upper - light - source exposure machine, includes the following steps:

[0023] S1: The first driving device drives the lens group to move upward to the upper limit position, and the second driving device drives the pallet to drive the receiving cylinder to move downward to the lower limit position. Place the item to be exposed at the center position on the upper surface of the airtight elastic cloth. At this time, the exposure surface of the item to be exposed faces upward, and the irregular part at the bottom of the item to be exposed extends into the receiving cylinder. The remaining part of the item to be exposed is supported by the pallet. Cover the leveling glass on the exposure surface of the item to be exposed so that the lower surface of the leveling glass fits the exposure surface of the item to be exposed, and the upper surface of the leveling glass is parallel to the lower surface of the lens group.

[0024] S2: Subsequently, the first driving device drives the lens group to move downward until it is in close contact with the upper surface of the frame. At this time, the lens group, the frame, the airtight elastic cloth, and the receiving cylinder enclose a sealed exposure chamber. The second driving device drives the pallet to move upward to the working position, and at the same time drives the airtight elastic cloth to stretch. The external air extractor evacuates the exposure chamber through the air extraction holes. After the exposure chamber is evacuated, the lower surface of the lens group is in close contact with the upper surface of the leveling glass, and the exposure light source exposes the exposure surface of the item to be exposed through the lens group until the exposure is completed.

[0025] S3: After the exposure is completed, the pressure in the exposure chamber is relieved. The first driving device drives the lens group to move upward, and the second driving device drives the pallet to move downward so that the item to be exposed after the exposure is completed can be taken out.

[0026] The beneficial effects of the present invention are as follows: The exposure light source is arranged in the upper part of the box body, which can reduce the vibration generated by the movement of the lens group and the pallet, and improve the stability of the exposure light source during exposure; the receiving cylinder can accommodate the irregular part at the bottom of the item to be exposed that does not need to be exposed, enabling the exposure machine to expose irregular items and improving the applicability of the exposure machine; the linkage lifting structure can ensure that the pallet always remains horizontal; the protection block and the protection notch can protect the airtight elastic cloth and extend the service life of the airtight elastic cloth; the exhaust hole group can prevent the airtight elastic cloth from bulging when stretched. Description of the Drawings

[0027] Figure 1 is the structural schematic diagram of the present invention;

[0028] Figure 2 is the internal structural schematic diagram of the present invention;

[0029] Figure 3 is the structural schematic diagram of the lens group and the lower frame assembly in the present invention;

[0030] Figure 4 is Figure 3 the partial enlarged view of point A in

[0031] Figure 5 is Figure 3Partial enlarged view at position B in [the figure];

[0032] Figure 6 is a schematic structural view of the pallet and the connection plate in the present invention;

[0033] Figure 7 is Figure 6 Partial enlarged view at position C in [the figure];

[0034] Figure 8 is a schematic structural view of the exposure light source in the present invention;

[0035] Figure 9 is Figure 8 Partial enlarged view at position D in [the figure];

[0036] Figure 10 is a schematic structural view of the pallet and the protection block in the present invention;

[0037] Figure 11 is Figure 10 Partial enlarged view at position E in [the figure].

[0038] In the figure: 1. Box body, 2. Exposure light source, 3. Lens group, 4. Lower frame assembly, 41. Frame body, 411. Air extraction hole, 42. Non-air-permeable elastic cloth, 43. Sealing ring, 44. Accommodating cylinder, 45. Pallet, 451. Protection cut-off corner, 452. Exhaust hole, 46. Pallet support, 47. Lifting rod driver, 471. Lifting rod, 472. Connecting block, 5. Protection block, 51. Protection inclined surface, 6. Linking column, 61. Linking gear box, 62. Linking shaft, 7. First connecting plate, 71. Second connecting plate, 72. Upper fixing nut, 73. Adjusting bolt, 74. Locking hole, 75. Upper locking bolt, 8. Connection plate, 81. Connecting arc hole, 82. Lower locking bolt, 9. Taking window, 91. Flap. Detailed implementation mode

[0039] The technical solution of the present invention will be further specifically described below through embodiments and in conjunction with the accompanying drawings.

[0040] Embodiment: An upper light source type exposure machine in this embodiment, as Figures 1 to 11As shown in the figure, it includes a box body 1. Inside the box body 1, there are an exposure light source 2, a lens group 3, and a lower frame assembly 4. The exposure light source 2 is located directly above the lens group 3, and the lower frame assembly 4 is located directly below the lens group 3. The lower frame assembly 4 includes a frame body 41, an airtight elastic cloth 42, and a material supporting module. Inside the box body 1, there is a first driving device for driving the lens group 3 to approach / away from the frame body 41. The airtight elastic cloth 42 covers the bottom opening of the frame body 41 and seals the bottom opening of the frame body 41. The material supporting module includes a sealing ring 43, a receiving cylinder 44, and a second driving device. A first through hole is provided in the center of the airtight elastic cloth 42. The bottom of the receiving cylinder 44 is sealed. The top of the receiving cylinder 44 is connected to the first through hole through the sealing ring 43. A support plate 45 is sleeved outside the top of the receiving cylinder 44 and is fixedly connected to the support plate 45. The support plate 45 is located below the airtight elastic cloth 42. A taking window 9 is provided on the front side of the box body 1. The taking window 9 is located on the front side of the lower frame assembly 4. Flap doors 91 are symmetrically provided on the left and right in the taking window 9. The flap doors 91 are rotatably connected to the taking window 9.

[0041] Air extraction holes groups communicating with the outside are provided on the inner side of the frame body 41. The air extraction holes groups include air extraction holes 411 symmetrically arranged on the left and right side walls inside the frame body 41.

[0042] The second driving device includes a support plate frame 46 and a support plate frame driving mechanism. The support plate frame 46 is fixedly connected to the bottom of the support plate 45. Both the support plate frame 46 and the bottom plate 45 are rectangular. The support plate frame 46 and the bottom plate 45 are coaxially arranged. The support plate frame driving mechanism includes a lifting rod driver 47 and lifting rods 471 symmetrically arranged on the left and right sides of the support plate frame 46. The lifting rods 471 are fixedly connected to the corresponding bottom sides of the support plate frame 46 through connecting blocks 472. The lifting rod driver 47 is used to drive the two lifting rods 471 to rise / fall synchronously.

[0043] Protective blocks 5 are provided at the four corners inside the frame body 41. The bottom surface of the protective blocks 5 is on the same horizontal plane as the bottom surface of the frame body 41. A protective inclined surface 51 is formed on the side of the protective block 5 facing the support plate 45. The protective inclined surface 51 inclines inwards from bottom to top. Protective cutouts 451 are provided at the four corners of the support plate 45.

[0044] Linkage lifting structures are provided at the four corners of the bottom of the support plate frame 46. The linkage lifting structures include linkage columns 6 and linkage gearboxes 61. The linkage columns 6 are power-connected to the linkage gearboxes 61. The linkage columns 6 are vertically arranged at the bottom of the support plate frame 46. The linkage gearboxes 61 are fixedly connected to the box body 1. Adjacent two linkage gearboxes 61 are power-connected through a linkage shaft 62.

[0045] Exhaust hole groups are symmetrically provided on the front and rear of the top of the support plate 45. The exhaust hole groups include exhaust holes 452 symmetrically arranged on the left and right.

[0046] At the top inside the box body 1, first connecting plates 7 are symmetrically arranged in the front and back. The exposure light source 2 is located between the two first connecting plates 7. The first connecting plates 7 are arranged in the left - right direction. On the top of the exposure light source 2, second connecting plates 71 are symmetrically arranged in the left and right. The second connecting plates 71 are arranged in the front - back direction. The second connecting plates 71 are located above the first connecting plates 7. At the front and back ends of the top of the second connecting plates 71, connection locking modules are symmetrically arranged. The connection locking module includes a first connection structure and a locking mechanism. The first connection structure includes third through - holes symmetrically arranged on the front and back sides of the second connecting plates 71. At the position corresponding to the third through - holes on the top of the second connecting plates 71, upper fixing nuts 72 are arranged. An adjusting bolt 73 is threadedly connected inside the upper fixing nut 72. The lower part of the adjusting bolt 73 passes through the third through - hole and abuts against the corresponding side of the top of the first connecting plate 7.

[0047] The locking mechanism includes locking holes 74 symmetrically arranged on the left and right sides of the third through - holes. The locking holes 74 are arranged in the front - back direction. At the position corresponding to the locking holes 74 on the first connecting plate 7, locking threaded holes are provided. Inside the locking holes 74, upper locking bolts 75 are arranged. The lower part of the upper locking bolt 75 passes through the locking hole 74 and is threadedly connected with the locking threaded hole.

[0048] A connection disk 8 is arranged between the lifting rod 471 and the corresponding connecting block 472 on one side. The top of the lifting rod 471 is fixedly connected to the connection disk 8 and is coaxial. Along the circumference on the top of the connection disk 8, a plurality of connection arc holes 81 are arranged. The center of the arc of the connection arc holes 81 coincides with the axis of the lifting rod 471. At the position corresponding to the connection arc holes 81 on the connecting block 472, upper connection holes are provided. Inside the connection arc holes 81, lower locking bolts 82 are arranged. The upper part of the lower locking bolt 82 passes through the corresponding connection arc hole 81 and is threadedly connected with the corresponding upper connection hole.

[0049] The outer edge of the top of the support plate 45 is provided with a chamfer structure. The outer edge of the top of the exhaust hole 452 is provided with a chamfer structure.

[0050] It also includes a leveling glass, which covers and fits with the exposure surface of the item to be exposed.

[0051] In this solution, before the exposure machine exposes, it is necessary to calibrate the spatial attitude of the exposure light source. First, loosen the upper locking bolt to unlock the second connecting plate from the first connecting plate. Then rotate the adjusting bolt to change the length of the lower part of the adjusting bolt extending out of the second connecting plate, and change the spatial attitude of the four corners of the exposure light source, so as to realize the adjustment of the overall spatial attitude of the exposure light source. Then tighten the upper locking bolt to lock the second connecting plate and the first connecting plate, so that the exposure light source is locked.

[0052] After the exposure light source is locked, rotate the two flaps outward to open them, so that the two flaps no longer close the access window. The access window is opened. The first driving device drives the lens group to move upward to the upper limit position. The lifter rod driver drives the two lifter rods to descend synchronously, so that the two lifter rods drive the tray to descend to the lower limit position. Place the item to be exposed at the center position on the upper surface of the airtight elastic cloth. At this time, the exposure surface of the item to be exposed faces upward, and the irregular part of the bottom of the item to be exposed that does not need to be exposed extends into the receiving cylinder. The rest of the item to be exposed is supported by the tray. Then rotate the two flaps inward to close the window. Then the lifter rod driver drives the two lifter rods to rise synchronously, so that the two lifter rods drive the tray and the receiving cylinder to move upward to the preset material supporting position. During the upward movement of the tray, the top surface of the tray pushes the airtight elastic cloth upward, so that the airtight elastic cloth is stretched. Then the first driving device drives the lens group to move downward to the exposure position. At this time, the lens group, the frame, the airtight elastic cloth and the receiving cylinder enclose a sealed exposure chamber. After that, an external air extractor evacuates the exposure chamber through the air extraction holes. After the exposure chamber is evacuated, the lower surface of the lens group is closely attached to the upper surface of the leveling glass. By arranging the leveling glass, the normal line of the exposure surface of the item to be exposed is parallel to the optical axis of the exposure light source. The exposure light source exposes the exposure surface of the item to be exposed through the lens group until the exposure is completed.

[0053] After the exposure is completed, the pressure in the exposure chamber is released. The first driving device drives the lens group to move upward, and the lifter rod driver drives the two lifter rods to descend synchronously, so that the two lifter rods drive the tray to descend, so that the item to be exposed after the exposure is completed can be taken out.

[0054] When the airtight elastic cloth is stretched, it will be pulled by the tray and the frame, which will reduce the service life of the airtight elastic cloth. To protect the airtight elastic cloth, protection blocks are provided at the four corners inside the frame. The bottom surface of the protection block is on the same horizontal plane as the bottom surface of the frame. A protection inclined surface is formed on the side of the protection block facing the tray. The protection inclined surface is inclined inward from bottom to top. Protection cutouts are provided at the four corners of the tray corresponding to the positions of the protection blocks. Chamfer structures are provided at the outer edges of the top of the tray and the outer edges of the top of the exhaust holes. When the airtight elastic cloth is stretched, the protection blocks at the four corners of the frame avoid the problem that the four corners of the airtight elastic cloth are overstretched and damaged during the vacuum pumping process, greatly increasing the service life of the airtight elastic cloth and preventing the airtight elastic cloth from being torn when stretched.

[0055] The center of gravity of the item to be exposed may not be at the center position of the tray, which will cause one corner of the tray to tilt. When the tray tilts, the linkage column on that side will descend, which will drive the linkage gearbox on that side to drive the gears in the other linkage gearboxes to rotate through the linkage shaft, and then drive the other linkage columns to descend, and finally make the four corners of the tray descend synchronously to ensure that the tray is horizontal and does not tilt.

[0056] During the upward movement of the pallet, some air may be trapped between the contact surface of the pallet and the airtight elastic cloth, resulting in the airtight elastic cloth bulging, which leads to poor exposure effect. To prevent bulging, exhaust hole groups are symmetrically arranged at the front and rear of the top of the pallet. The exhaust hole groups include exhaust holes symmetrically arranged on the left and right. During the upward movement of the pallet, the air between the pallet and the airtight elastic cloth can be discharged through the exhaust holes, enhancing the air fluidity and avoiding the occurrence of bulging.

[0057] The lifting rod is a lead screw. When the lifting rod is installed, the radial angles may be inconsistent, resulting in the horizontal positions of the connection disks at the top of the lifting rod being uneven, and ultimately causing the pallet to tilt. When the horizontal positions of the connection disks are uneven, first rotate the lifting rod to align the horizontal positions of the two connection disks, and then screw the lower locking bolt into the connecting arc hole so that the upper part of the lower locking bolt is threadedly connected to the upper connection hole, locking the connection disk and the connecting block.

[0058] When the upper surface of the pallet is at the same horizontal plane as the lower surface of the frame body, the top surface of the pallet is completely attached to the airtight elastic cloth.

[0059] A working method of an upper light source type exposure machine according to this embodiment, which is used for the above-mentioned upper light source type exposure machine, includes the following steps:

[0060] S1: Adjust the spatial attitude of the exposure light source to a preset position. The first driving device drives the lens group to move upward to the upper limit position, and the second driving device drives the pallet to drive the receiving cylinder to move downward to the lower limit position. Place the item to be exposed on the center position of the upper surface of the airtight elastic cloth through the picking window. At this time, the exposure surface of the irregular item to be exposed faces upward, and the irregular part of the bottom of the item to be exposed that does not need to be exposed extends into the receiving cylinder, and the rest of the item to be exposed is supported by the pallet. Cover the leveling glass on the exposure surface of the item to be exposed so that the lower surface of the leveling glass is attached to the exposure surface of the item to be exposed, and the upper surface of the leveling glass is parallel to the lower surface of the lens group;

[0061] S2: Subsequently, the first driving device drives the lens group to move downward until it is in close contact with the upper surface of the frame body. At this time, the lens group, the frame body, the airtight elastic cloth, and the receiving cylinder enclose a sealed exposure chamber. The lifting rod driver drives the two lifting rods to rise synchronously, causing the pallet to move upward to the preset position. During the upward movement of the pallet, the top surface of the pallet will gradually be attached to the airtight elastic cloth and stretch the airtight elastic cloth, and the air between the upper surface of the pallet and the airtight elastic cloth will be discharged downward through the exhaust holes, avoiding the occurrence of bulging between the pallet and the airtight elastic cloth. Then, an external air extractor evacuates the exposure chamber through the air extraction holes. After the exposure chamber is evacuated, the lower surface of the lens group is in close contact with the upper surface of the leveling glass, and the exposure light source exposes the exposure surface of the item to be exposed through the lens group until the exposure is completed;

[0062] S3: After the exposure is completed, the pressure in the exposure chamber is relieved. The first driving device drives the lens group to move upward, and the lifting rod driver drives the two lifting rods to descend synchronously, causing the pallet to move downward. At this time, the to-be-exposed article after the exposure is completed can be taken out through the taking window.

Claims

1. An upper light source exposure machine, characterized in that: The invention comprises a box body (1), wherein an exposure light source (2), a lens group (3) and a lower frame assembly (4) are arranged in the box body (1), wherein the exposure light source (2) is located directly above the lens group (3), wherein the lower frame assembly (4) is located directly below the lens group (3), wherein the lower frame assembly (4) comprises a frame body (41), a non-breathable elastic cloth (42) and a support module, wherein a first driving device for driving the lens group (3) to approach / move away from the frame body (41) is arranged in the box body (1), wherein the non-breathable elastic cloth (42) is arranged to cover the bottom opening of the frame body (41) and seal the bottom opening of the frame body (41), wherein the support module comprises A sealing ring (43), a receiving tube (44) and a second driving device, wherein a first through hole is provided at the center of the non-breathable elastic cloth (42), the bottom of the receiving tube (44) is sealed, the top of the receiving tube (44) is connected to the first through hole via a sealing ring (43), a support plate (45) is sleeved on the outer side of the top of the receiving tube (44) and is fixedly connected to the support plate (45), the support plate (45) is located below the non-breathable elastic cloth (42), and the second driving device is used to drive the support plate (45) to rise / fall, and when the lens group is in close contact with the frame, the lens group, the frame, the non-breathable elastic cloth and the receiving tube form a sealed exposure chamber.

2. The upper light source exposure machine according to claim 1, characterized in that: An air extraction hole group communicating with the outside is provided inside the frame (41), and the air extraction hole group comprises air extraction holes (411) symmetrically arranged on the left and right side walls inside the frame (41).

3. The upper light source exposure machine according to claim 2, characterized in that: It also includes a leveling glass, which is covered on the exposure surface of the object to be exposed and fits the exposure surface of the object to be exposed. When the exposure chamber is evacuated to a vacuum, the lower surface of the lens group is in close contact with the upper surface of the leveling glass group.

4. The upper light source exposure machine according to claim 1, characterized in that: The second driving device includes a pallet frame (46) and a pallet frame driving mechanism, wherein the pallet frame (46) is fixedly connected to the bottom of the pallet (45), and the pallet frame driving mechanism includes a lifting rod driver (47) and lifting rods (471) symmetrically arranged on the left and right sides of the pallet frame (46), and the lifting rod (471) is fixedly connected to the bottom of the corresponding side of the pallet frame (46) through a connecting block (472), and the lifting rod driver (47) is used to drive the two lifting rods (471) to rise / fall synchronously.

5. The upper light source exposure machine according to claim 1, characterized in that: The frame (41) is provided with protective blocks (5) at four corners, the bottom surface of the protective block (5) and the bottom surface of the frame (41) are located at the same horizontal plane, the protective block (5) is formed with a protective inclined surface (51) on one side facing the support plate (45), the protective inclined surface (51) is inclined inward from bottom to top, and the four corners of the support plate (45) are provided with protective notched corners (451).

6. The upper light source exposure machine according to claim 4, characterized in that: The four corners of the bottom of the support frame (46) are provided with a linkage lifting structure, the linkage lifting structure comprising a linkage column (6) and a linkage gear box (61), the linkage column (6) being dynamically connected to the linkage gear box (61), the linkage column (6) being vertically arranged at the bottom of the support frame (46), the linkage gear box (61) being fixedly connected to the box body (1), and two adjacent linkage gear boxes (61) being dynamically connected via a linkage shaft (62).

7. The upper light source exposure machine according to claim 1, characterized in that: A group of exhaust holes is symmetrically arranged at the top of the support plate (45), and the exhaust hole group includes exhaust holes (452) symmetrically arranged at the left and right sides.

8. The upper light source exposure machine according to claim 1, characterized in that: A first connecting plate (7) is symmetrically arranged on the top of the box body (1) in the front and back directions. The exposure light source (2) is located between the two first connecting plates (7). The first connecting plate (7) is arranged in a left-right direction. A second connecting plate (71) is symmetrically arranged on the top of the exposure light source (2) in the left-right direction. The second connecting plate (71) is arranged in a front-back direction. The second connecting plate (71) is located above the first connecting plate (7). Connection locking modules are symmetrically arranged on the front and back ends of the top of the second connecting plate (71). The connection locking module comprises a first connection structure and a locking mechanism. The locking mechanism is used to lock / unlock the second connecting plate (71) and the first connecting plate (7). The first connection structure comprises a third through hole symmetrically arranged on the front and back sides of the second connecting plate (71). An upper fixing nut (72) is arranged on the top of the second connecting plate (71) at a position corresponding to the third through hole. An adjusting bolt (73) is connected to the inner thread of the upper fixing nut (72). The lower part of the adjusting bolt (73) passes through the third through hole and abuts against a corresponding side of the top of the first connecting plate (7).

9. The upper light source exposure machine according to claim 4, characterized in that: A connecting plate (8) is provided between the lifting rod (471) and the connecting block (472) on the corresponding side. The top of the lifting rod (471) is fixedly connected to the connecting plate (8) and is coaxial. A plurality of connecting arc holes (81) are provided on the top of the connecting plate (8) along the circumference. The arc center of the connecting arc hole (81) coincides with the axis of the lifting rod (471). An upper connecting hole is provided on the connecting block (472) at a position corresponding to the connecting arc hole (81). A lower locking bolt (82) is provided in the connecting arc hole (81). The upper part of the lower locking bolt (82) passes through the corresponding connecting arc hole (81) and is threadedly connected to the corresponding upper connecting hole.

10. A method for operating an upper light source exposure machine, used in the upper light source exposure machine according to claim 3, characterized in that: The following steps are involved: S1: The first driving device drives the lens group to move upward to the upper limit position, and the second driving device drives the support plate to drive the accommodating tube to move downward to the lower limit position, and the object to be exposed is placed on the center of the upper surface of the non-breathable elastic cloth. At this time, the exposure surface of the object to be exposed faces upward, and the irregular part of the bottom of the object to be exposed extends into the accommodating tube. The remaining part of the object to be exposed is held up by the support plate, and the leveling glass is covered on the exposure surface of the object to be exposed, so that the lower surface of the leveling glass is in contact with the exposure surface of the object to be exposed, and the upper surface of the leveling glass is parallel to the lower surface of the lens group; S2: Then the first driving device drives the lens group to move downward until it is in close contact with the upper surface of the frame. At this time, the lens group, the frame, the non-breathable elastic cloth and the accommodating tube form a sealed exposure chamber. The second driving device drives the support plate to move up to the working position, and at the same time drives the non-breathable elastic cloth to stretch. The external vacuum pump evacuates the exposure chamber through the vacuum hole. After the exposure chamber is evacuated, the lower surface of the lens group is in close contact with the upper surface of the leveling glass. The exposure light source exposes the exposure surface of the object to be exposed through the lens group until the exposure is completed. S3: After the exposure is completed, the pressure in the exposure chamber is released, the first driving device drives the lens group to move upward, and the second driving device drives the support plate to move downward, so that the object to be exposed can be taken out after the exposure is completed.

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